JP5403359B2 - Polishing tool and polishing apparatus - Google Patents

Description

  The present invention relates to a polishing tool and a polishing apparatus, and in particular, polishing that flatly processes the surface (surface to be processed) of a single substrate made of SiC or GaN, or a bonded substrate (epitaxial substrate) on which SiC or GaN is mounted. The present invention relates to a polishing tool used in an apparatus, and a polishing apparatus including the polishing tool.

  As a polishing method for precisely and efficiently polishing difficult-to-process semiconductor substrates such as SiC and GaN, the applicant has determined that the surface of the semiconductor substrate (surface to be polished) and at least the surface of the substrate are made of a catalyst in a processing solution. A polishing method has been proposed in which the surface (surface to be polished) of a semiconductor substrate is polished by moving the board (polishing tool) relative to each other while making contact with each other (see Patent Document 1). As this contact surface plate, for example, a surface of a base material such as molybdenum pasted with a catalyst such as platinum is used.

JP 2009-117782 A

  For example, if a contact surface plate (abrasive tool) is formed by pasting a catalyst on the surface of a base material that has been formed into a predetermined shape by cutting, the burr formed on the surface of the base material at the time of cutting will cause the polished surface to be polished. It has been found that there are problems that scratches occur and that the irregularities on the surface of the substrate are transferred directly to the processed workpiece. The catalyst used for the contact surface plate plays a role as a catalyst in the transfer of electrons between the catalyst surface and the workpiece surface. The catalyst and the workpiece are moved relative to each other while pressing the catalyst and the workpiece. When the surface is processed, the catalyst is mechanically worn, so the catalyst needs to be replaced periodically. However, for example, if a contact surface plate is constructed by pasting a catalyst such as platinum on the surface of a substrate such as molybdenum, it is necessary to replace the contact surface plate integrally when replacing the catalyst. It has also been found that there is a problem of high.

  The present invention has been made in view of the above circumstances, and it is possible to obtain a flat work surface with less generation of scratches, and basically, it is possible to replace only the catalyst, so that it is inexpensive and durable. It is an object of the present invention to provide a polishing tool and a polishing apparatus including the polishing tool.

According to the first aspect of the present invention, there is provided a light-transmitting support surface plate having a metal wiring formed on the surface, and at least a portion of the surface that contacts the substrate is made of a catalyst, and allows at least one of light and ionic current to pass through. have a catalyst pad having a plurality of through-holes therein, the catalyst pad is mounted on the surface of the support plate, wherein the catalyst is a noble metal, transition metal, ceramic-based solid catalyst, basic solid catalyst Or it is an abrasive | polishing tool characterized by consisting of any one or more of an acidic solid catalyst .

  In this way, the support surface plate and the catalyst pad are separated from each other, the surface flatness is high, and the catalyst pad having no cause of scratches such as burrs is used. A work surface can be obtained. In addition, by allowing the catalyst to be exchanged through the catalyst pad while reusing the support surface plate, it is possible to provide an inexpensive and durable polishing tool.

  According to a second aspect of the present invention, the metal wiring is formed by embedding a metal wire in a groove formed on the surface of the supporting surface plate, forming a metal wiring pattern on the surface of the supporting surface plate, or forming a metal wiring pattern. The polishing tool according to claim 1, wherein the polishing tool is formed by disposing a wiring film on a surface of a supporting surface plate.

A third aspect of the present invention is the polishing tool according to the first aspect, wherein the metal wiring is formed by a metal film pattern vacuum-deposited on the surface of the support platen.
A fourth aspect of the present invention is the polishing tool according to any one of the first to third aspects, wherein the supporting surface plate is made of glass or light-transmitting resin.

The invention described in 請 Motomeko 5, wherein the catalyst pad is polishing tool according to any one of claims 1 to 4, characterized in that it consists of quartz glass.

The invention according to claim 6 is characterized in that the catalyst pad has a noble metal, a transition metal, or an acidic or non-crystalline metal on the surface of a pad base material made of any one of glass, rubber, light transmissive resin, foamable resin, and nonwoven fabric. The polishing tool according to any one of claims 1 to 4, wherein the metal oxide film having basicity is formed by vapor deposition.
Thus, by forming a metal oxide film having acidity or basicity on the surface of the pad base material by vapor deposition, the metal oxide film can be made difficult to peel off from the pad base material.
The invention according to claim 7 is the polishing tool according to any one of claims 1 to 6, wherein the catalyst pad is detachably attached to the support surface plate.

  The invention described in claim 8 is a container for holding a processing liquid, the polishing tool according to any one of claims 1 to 7 disposed in the processing liquid in the container, and a substrate. A substrate holder that is immersed in the processing solution in the container and brought into contact with the polishing tool, a moving mechanism that relatively moves the polishing tool and the substrate held by the substrate holder in contact with each other, and the substrate holder A polishing apparatus comprising at least one of a light source for irradiating light onto a substrate surface held and immersed in the processing solution in the container and a power source for applying a bias potential to the substrate.

  The invention according to claim 9 is the polishing tool according to any one of claims 1 to 7, a substrate holder that holds the substrate in contact with the polishing tool, and a substrate that is held by the polishing tool and the substrate holder. A moving mechanism for relatively moving them in contact with each other, a treatment liquid supply part for supplying a treatment liquid to a contact part between the polishing tool and the substrate held by the substrate holder, and holding the substrate holder in the container A polishing apparatus comprising at least one of a light source for irradiating light on a substrate surface immersed in the treatment liquid and a power source for applying a bias potential to the substrate.

  The invention according to claim 10 is characterized in that the treatment liquid is made of a pH buffer having a neutral liquidity containing Ga ions, and the substrate is made of a compound semiconductor containing Ga element. A polishing apparatus according to claim 8 or 9.

One reference example of the present invention is an elastic base material made of one or more elastic bodies of rubber, resin, foamable resin, or non-woven fabric, and a conductive material disposed at least in contact with the substrate of the elastic base material. A polishing tool comprising: a member; and an intermediate film made of carbon or chromium interposed between the elastic base material and the conductive member so as to improve adhesion between them.

  In this way, by providing an elastic base material made of an elastic body, the elastic base material deforms following the surface of the substrate (workpiece surface), so even if there are irregularities on the surface of the elastic base material, It is possible to prevent the irregularities on the surface of the elastic base material from being transferred to the surface of the substrate. In addition, an intermediate film made of carbon or chromium is interposed between the elastic base material and the conductive member so as to improve the adhesion between the elastic base material and the conductive member. Adhesion can be improved and the conductive member can be made difficult to peel off from the elastic substrate.

A preferred embodiment of the above reference example, wherein the surface of the elastic substrate, you characterized in that the groove for supplying the processing liquid efficiently is formed.
A preferred embodiment of the above reference example, the elastic substrate, it characterized as having a number of through holes for passing at least one of light and ion current.

Another exemplary embodiment of the present invention, a container for holding a processing solution, and the polishing tool is arranged immersed in the treatment liquid into the container, while holding the substrate in said processing solution in said container A polishing apparatus comprising: a substrate holder that is immersed and brought into contact with the polishing tool; and a moving mechanism that moves the polishing tool and the substrate held by the substrate holder relative to each other while being in contact with each other.

Yet another exemplary embodiment of the present invention, and the polishing tool, and the substrate holder into contact with the polishing tool while holding the substrate, the relatively moving while contacting with each other was the substrate held by the substrate holder and the polishing tool A polishing apparatus comprising: a moving mechanism; and a processing liquid supply unit that supplies a processing liquid to a contact portion between the polishing tool and the substrate held by the substrate holder.

A preferred embodiment of the above reference example, the treatment solution is water weakly acidic water or air is dissolved or electrolytic ion water, the substrate is, you characterized by comprising a compound semiconductor containing Ga element.

  According to the present invention, the support surface plate and the catalyst pad are separately provided, the surface flatness is high, and the catalyst pad having no cause of generating scratches such as burrs is used. A surface to be processed can be obtained, and further, only the catalyst can be exchanged through the catalyst pad while reusing the support surface plate, whereby an inexpensive and durable polishing tool can be obtained.

  In addition, since the elastic base material is deformed following the surface of the substrate (the surface of the workpiece) by providing the elastic base material made of an elastic body, even if the surface of the elastic base material has irregularities, the elastic base material The unevenness on the surface of the material can be prevented from being transferred to the surface of the substrate. In addition, an intermediate film made of carbon or chromium is interposed between the elastic base material and the conductive member so as to improve the adhesion between the elastic base material and the conductive member. Adhesion can be improved and the conductive member can be made difficult to peel off from the elastic substrate.

It is a top view which shows the whole structure of the planarization system provided with the grinding | polishing apparatus of embodiment of this invention. It is sectional drawing which shows the outline | summary of the grinding | polishing apparatus of the 1st Embodiment of this invention with which the planarization system shown in FIG. 1 is equipped. It is an expanded sectional view which shows the substrate holder of the grinding | polishing apparatus shown in FIG. FIG. 3 is an enlarged sectional view showing a polishing tool of the polishing apparatus shown in FIG. 2. FIG. 3 is a plan view showing a polishing tool of the polishing apparatus shown in FIG. 2. It is a top view which shows the support surface plate of the grinding | polishing tool of the grinding | polishing apparatus shown in FIG. It is the OA sectional view taken on the line of FIG. It is the OB sectional view taken on the line of FIG. It is an expanded sectional view which shows the other grinding | polishing tool used for the grinding | polishing apparatus shown in FIG. It is a top view which shows the support surface plate of the polishing tool shown in FIG. It is a top view which shows another support surface plate. It is an expanded sectional view which shows the further another polishing tool used for the grinding | polishing apparatus shown in FIG. It is sectional drawing which shows the outline | summary of the grinding | polishing apparatus of 2nd Embodiment of this invention with which the planarization system shown in FIG. 1 is equipped. FIG. 14 is an enlarged sectional view showing a polishing tool of the polishing apparatus shown in FIG. 13. It is an expanded sectional view which shows the polishing tool used for the polishing apparatus shown in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following example shows an example in which the surface of a single substrate (GaN substrate) made of GaN is polished to flatten the surface. It can also be applied to a bonded substrate (epitaxial substrate) in which GaN is placed on the surface of a substrate such as sapphire or SiC, and an impurity (dopant) is implanted into the GaN substrate or epitaxial substrate to form a p-type or n-type substrate. Is also applicable. Furthermore, the present invention can be applied to compound semiconductors such as GaP, GaAs, AlN, AlP, AlAs, InN, InP, and InAs other than GaN.

  FIG. 1 is a plan view showing an overall configuration of a planarization system including a polishing apparatus according to an embodiment of the present invention. This planarization system is for polishing the surface of a GaN substrate to planarize the surface. As shown in FIG. 1, the flattening system includes a substantially rectangular housing 1, and the inside of the housing 1 is cleaned with a load / unload unit 2, a polishing unit 3 and a partition by partition walls 1a, 1b, and 1c. It is divided into part 4. The load / unload unit 2, the polishing unit 3 and the cleaning unit 4 are assembled independently and exhausted independently.

  The load / unload unit 2 includes two or more (three in this example) front load units 200 on which substrate cassettes for stocking a large number of substrates (workpieces) are placed. These front load portions 200 are arranged adjacent to each other in the width direction (direction perpendicular to the longitudinal direction) of the planarization system. The front load unit 200 can be equipped with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). Here, SMIF and FOUP are sealed containers that can maintain an environment independent of the external space by accommodating a substrate cassette inside and covering with a partition wall.

  A traveling mechanism 21 is laid along the front load unit 200 in the load / unload unit 2, and a first transport mechanism as a first transport mechanism that can move along the arrangement direction of the substrate cassettes on the traveling mechanism 21. One transfer robot 22 is installed. The first transfer robot 22 can access the substrate cassette mounted on the front load unit 200 by moving on the traveling mechanism 21. The first transfer robot 22 has two hands on the upper and lower sides. For example, the upper hand is used when returning the substrate to the substrate cassette, and the lower hand is used when transferring the unprocessed substrate. By doing so, you can use the upper and lower hands properly.

  Since the load / unload unit 2 is an area where it is necessary to maintain the cleanest state, the inside of the load / unload unit 2 has a higher pressure than any of the outside of the apparatus, the polishing unit 3 and the cleaning unit 4. Always maintained. In addition, a filter fan unit (not shown) having a clean air filter such as a HEPA filter or a ULPA filter is provided above the traveling mechanism 21 of the first transfer robot 22. The clean air from which the gas has been removed is constantly blowing downward.

  The polishing unit 3 is a region where the substrate surface (surface to be processed) is polished, and the two polishing units 3 according to the first embodiment of the present invention that perform the first stage polishing and the second stage polishing continuously. It has polishing apparatuses 30A, 30B and two polishing apparatuses 30C, 30D according to the second embodiment of the present invention for performing the third stage polishing. These polishing apparatuses 30A to 30D are arranged along the longitudinal direction of the planarization system.

  As shown in FIG. 2, the polishing apparatuses 30 </ b> A and 30 </ b> B according to the first embodiment of the present invention contain a treatment liquid 130 containing a Ga ion-containing neutral pH buffer solution. 132. A processing liquid supply nozzle (processing liquid supply unit) 133 that supplies the processing liquid 130 into the container 132 is disposed above the container 132. As the treatment liquid 130, for example, a solution obtained by adding Ga ions having a concentration of 10 ppm or more to a phosphate buffer solution having a pH of 6.86, for example, to bring the Ga ions of the treatment liquid 130 close to saturation. The pH of the pH buffer solution having a neutral liquidity (measured in terms of measurement at room temperature of 25 ° C.) is, for example, 6.0 to 8.0.

  A light transmissive polishing tool 134 is attached to the bottom of the container 132, and when the processing liquid 130 is injected into the container 132, the upper part of the polishing tool 134 is filled with the processing liquid 130. Yes.

  The container 132 is connected to the upper end of a rotatable rotating shaft 136, and an opening 132 a that extends in a ring shape around the rotating shaft 136 and is closed by a polishing tool 134 is formed on the bottom plate of the container 132. Has been. A light source 140 that emits excitation light, preferably ultraviolet rays, is disposed immediately below the opening 132a. As a result, the excitation light, preferably ultraviolet rays, radiated from the light source 140 passes through the opening 132a of the container 132, then passes through the inside of the polishing tool 134, and reaches above the polishing tool 134. ing.

  A substrate holder 144 is disposed above the container 132 and holds the substrate 142 in a detachable manner with the surface to be polished of the substrate 142 made of, for example, a GaN substrate facing downward. The substrate holder 144 is connected to the lower end of the main shaft 146 that can move up and down and rotate. In this example, a moving mechanism that relatively moves the polishing tool 134 and the substrate (GaN substrate) 142 held by the substrate holder 144 is configured by the rotating shaft 136 that rotates the container 132 and the main shaft 146 that rotates the substrate holder 144. However, either one may be provided.

  Further, in this example, a power source 148 for applying a voltage between the substrate 142 held by the substrate holder 144 and the polishing tool 134 is provided. A switch 150 is interposed in the conducting wire 152a extending from the anode of the power source 148.

  In this example, a so-called immersion type is disclosed in which the processing liquid 130 is filled in the container 132 and the polishing tool 134 and the substrate 142 held by the substrate holder 144 are immersed and processed, but the polishing tool 134 is disclosed. Alternatively, the processing liquid 130 may be dropped onto the surface of the substrate 142 by supplying the processing liquid 130 onto the surfaces of the substrate 142 and the polishing tool 134 and processed in the presence of the processing liquid.

  As shown in FIG. 3, the substrate holder 144 has a cover 160 that prevents the processing liquid 130 from entering the inside, and the drive flange 162 connected to the lower end of the main shaft 146 is formed inside the cover 160. The holder body 170 made of metal is connected via a rotation transmission part 168 having a universal joint 164 and a spring 166.

  A retainer ring 172 is disposed around the lower portion of the holder body 170 so as to be movable up and down, and a pressure space 176 can be formed on the lower surface (substrate holding surface) of the holder body 170 between the lower surface and the conductive rubber 174. In addition, a conductive rubber 174 is attached. An air introduction pipe 178 is connected to the pressure space 176 through an air introduction path extending through the holder body 170. Furthermore, a lead electrode 180 is provided on the flange portion of the metal holder main body 170, and a lead wire 152 a extending from the anode of the power source 148 is connected to the lead electrode 180.

  In order to suppress the surface material of the retainer ring 172 from adhering to the surface of the polishing tool 134 due to wear of the surface of the retainer ring 172 at the portion where the retainer ring 172 and the polishing tool 134 are in contact, at least of the surface of the retainer ring 172 The portion in contact with the polishing tool 134 is preferably composed of any one of glass such as quartz, sapphire, or zirconia, or ceramics such as alumina, zirconia, or silicon carbide. Examples of the conductive rubber 174 include conductive chloroprene rubber, conductive silicone rubber, and conductive fluororubber.

  As a result, when the back surface of the substrate 144 is held on the lower surface (substrate holding surface) of the holder main body 170 of the substrate holder 144 by suction or the like, the back surface of the substrate 144 and the conductive rubber 174 come into contact with each other and the back surface of the substrate 142 is energized. In addition, air is introduced into the pressure space 176 while energization of the back surface of the substrate 142 is maintained, and the substrate 142 can be pressed toward the polishing tool 134.

  With such a configuration, the substrate 142 can be held by the substrate holder 144 while energizing the substrate 142 with simple and low resistance. When the substrate 142 is held by the substrate holder 144 in contact with the conductive rubber 174, it is preferable that polar conductive grease can be filled between the conductive rubber 174 and the substrate 142.

  As shown in FIGS. 4 and 5, the polishing tool 134 has a number of concentric grooves 300 a at positions corresponding to the openings 132 a of the container 132, and the metal constituting the metal wiring inside the grooves 300 a. A support surface plate 300 on which wires 302 are arranged, and a catalyst on the surface excluding the through-holes 304a of a pad base material 304 having a plurality of through-holes 304a for passing at least one of light and ionic current inside. The catalyst pad 308 is formed by forming the layer 306 by vacuum deposition or the like.

  As shown in FIG. 6, the metal wire 302 is formed over the entire length in the diameter direction of the substrate 142 held by the substrate holder 144. As shown in FIG. 5, the region where the metal wire 302 is formed. Is provided with a through hole 304a.

  The catalyst pad 308 has substantially the same diameter (same shape) as the support surface plate 300 or a smaller diameter (smaller) than the support surface plate 300, and is screwed on the outer periphery of the support surface plate 300 or a double-sided tape is used. By attaching, it is detachably attached to the support surface plate 300. The polishing tool 134 itself is also detachably attached to the bottom plate of the container 132 by a mechanical fixing method such as screwing.

  As described above, the support surface plate 300 and the catalyst pad 308 are separated from each other, the surface flatness is high, and the catalyst pad 308 having no cause of scratches such as burrs is used. A less flat work surface can be obtained. In addition, when the catalyst layer 306 is worn, the polishing tool 134 is replaced. After the polishing tool 134 is removed from the bottom plate of the container 132, the catalyst pad 308 is detached from the support surface plate 300, and the replacement is performed. The catalyst pad is exchanged and the new catalyst pad is remounted on the polishing tool 300, and the new polishing tool with the new catalyst pad is mounted on the bottom plate of the container 132. As a result, the support surface plate 300 can be made a reusable, inexpensive and durable polishing tool 134.

  The support surface plate 300 is made of light transmissive resin such as glass such as synthetic quartz or acrylic. Examples of the material of the metal wire 302 constituting the metal wiring include platinum, gold, silver, copper, and aluminum. The pad base material 304 is made of, for example, glass, rubber, light transmissive resin, foamable resin, or nonwoven fabric.

  The catalyst pad 308 includes a catalyst layer 306 and a pad base material 304. The catalyst layer 306 is made of, for example, one or more of a noble metal, a transition metal, a ceramic solid catalyst, a basic solid catalyst, or an acidic solid catalyst. The noble metal is one or a combination of platinum, gold, silver, and the transition metal is at least Fe, Ni, Co, Cu, Cr, i, or molybdenum, or one or a combination of these compounds. . The basic solid catalyst or acidic solid catalyst is one or a combination of non-woven fabric, resin or metal, acidic or basic metal oxide, or glass imparted with an ion exchange function.

  In this example, one or a combination of the above catalysts is deposited on the surface of the pad base material 304 by vacuum deposition to form the catalyst layer 306. Thus, a uniform catalyst layer 306 with a desired thickness can be formed on the surface of the pad base material 304 by vacuum deposition.

  The catalyst pad 308 may be made of quartz glass alone. As described above, even when the catalyst pad 308 is made of quartz glass, the catalyst pad 304 is configured to be detachable from the support surface plate 308 as a structure different from the support surface plate 300, thereby supporting the surface plate 300. The metal line (metal wiring) 302 formed in the above can be reused.

  It is preferable to use an elastic body such as rubber as the pad base material 304. As a result, the catalyst pad 308 is deformed following the surface of the substrate 142 (the surface of the workpiece). Therefore, even if the surface of the catalyst pad 308 is uneven, the unevenness of the surface of the catalyst pad 308 is Transfer to the surface can be prevented. For example, when a resin is used for the pad base material 304 and the adhesion between the resin pad base material 304 and the catalyst layer 306 is weak, carbon is first vapor-deposited on the surface of the resin pad base material 304, Further, by depositing a catalyst for forming a catalyst layer by vapor deposition, the adhesion between the resin-made pad base material 304 and the catalyst layer is enhanced via carbon, and a catalyst pad having high overall adhesion can be obtained. it can.

  In this example, as shown in FIG. 8, the support surface plate 300 is provided with a through hole 300b, and the metal wires 302 reach the surface side of the support surface plate 300 through the through hole 300b. (Metal wiring) 302 is arranged along a groove 300a concentrically provided on the surface of the supporting surface plate 300, and a conductive wire 152b extending from the cathode of the power source 148 is connected to each metal wire 302. .

  9 and 10 show another polishing tool 134a used in the polishing apparatuses 30A and 30B. The polishing tool 134a differs from the polishing tool 134 shown in FIGS. 4 and 5 in that a metal film 312 serving as metal wiring is formed on the surface of the support surface plate 310 having a flat surface by vacuum deposition. A catalyst pad 308 having the same configuration as described above is detachably mounted on the surface of the support surface plate 310 by screwing or double-sided tape. The metal film (metal wiring) 312 includes a plurality of concentric metal films 312a arranged concentrically and one or more connection metal films 312b that linearly connect the concentric metal films 312a. Thus, the lead wire 152b extending from the cathode of the power source 148 is connected to the electrode portion 312c at the base end of the connecting metal film 312b.

  In this example, as shown in FIG. 10, the concentric metal film 312a is formed over the entire length in the diameter direction of the substrate 132 held by the substrate holder 144, and both sides of the retainer ring 172 are The region slightly protrudes from the region where the concentric metal film 312a is formed.

  As shown in FIG. 11, the support surface plate 310 is divided into a plurality of zones (5 zones in the drawing), and the concentric metal films 312a existing in each zone are individually connected to the plurality of connection metal films 312b. The polishing rate may be controlled for each zone by individually connecting each electrode portion 312c of each connection metal film 312b to a plurality of conductive wires extending from the cathodes of a plurality of power sources.

  FIG. 12 shows still another polishing tool 134b used in the polishing apparatuses 30A and 30B. The polishing tool 134b is different from the polishing tool 134 shown in FIGS. 4 and 5 in that, for example, a fluorine resin or acrylic is used between the support surface plate 314 having a flat surface and the catalyst pad 308, and the thickness is For example, a light-transmitting wiring film 316 having a thickness of 10 to 500 μm is interposed. A wiring pattern 318 for forming metal wiring is formed on the upper surface of the wiring film 316 by vapor deposition or the like. The wiring pattern (metal wiring) 318 has a plurality of concentric metal films arranged concentrically as shown in FIG. 10, for example, but a plurality of concentric shapes arranged concentrically as shown in FIG. The metal film may be divided into a plurality of zones.

  A heater 158 (see FIG. 2) as a temperature control mechanism for controlling the temperature of the substrate 142 held by the holder 144 is embedded in the substrate holder 144 so as to extend into the rotating shaft 146. A processing liquid supply nozzle 133 that supplies the processing liquid 130 controlled to a predetermined temperature by a heat exchanger as a temperature control mechanism to the inside of the container 132 is disposed above the container 132. Further, a fluid flow path (not shown) as a temperature control mechanism for controlling the temperature of the polishing tool 134 is provided inside the polishing tool 134.

  As is known from the Arrhenius equation, the higher the reaction temperature, the higher the chemical reaction. For this reason, by controlling at least one of the temperatures of the substrate 142, the treatment liquid 130, and the polishing tool 134 to control the reaction temperature, it is possible to improve the stability of the processing speed while changing the processing speed. .

  In the polishing apparatuses 30A and 30B, as shown in FIG. 1, the surface (upper surface) of the polishing tool 134 is conditioned so as to have good flatness and appropriate roughness, for example, a conditioning mechanism (conditioner) 190 made of a polishing pad. Is provided. That is, the surface (upper surface) of the polishing tool 134 is conditioned by the conditioning mechanism (conditioner) 190 to have a surface roughness of about 0.1 to 1 μm of PV (Peak-Valley). At this time, a slurry containing abrasive grains is supplied to the surface of the polishing tool 134 as necessary.

  Further, the polishing apparatuses 30A and 30B are provided with a photocurrent damage amount measuring device 201 having the light source 140 as a part and a photoluminescence light damage amount measuring device 201 having the light source 140 as a part. Yes. That is, the conductive line 152 c that extends from the power source 148 and is held by the substrate holder 144 and is connected to the substrate 142 and the conductive line 152 c that extends from the power source 148 and is connected to the metal film (metal wiring) 154 of the polishing tool 134. The photometer type damage amount measuring apparatus 201 is constituted by the ammeter 204 installed in the conducting wire 152c and the light source 140. A switch 206 is interposed in the conducting wire 152c. Further, the photoluminescence light reflected by the surface of the substrate 134 is subjected to spectrum analysis, and the photoluminescence light type damage amount is measured by the spectroscope 208 that measures the intensity of a wavelength (for example, 365 nm) corresponding to the band gap of the substrate W and the light source 140. A measuring device 202 is configured.

  In this example, the light source 140 that irradiates the substrate 134 with the excitation light to oxidize the surface of the substrate is also used as the light source of the photocurrent damage amount measuring device 201 and the photoluminescence damage amount measuring device 202. However, a light source dedicated to the photocurrent damage amount measuring device 201 and the photoluminescence light damage amount measuring device 202 may be provided separately from the light source 140.

  As shown in FIG. 13, the polishing apparatuses 30 </ b> C and 30 </ b> D according to the second embodiment of the present invention rotate freely with a rotatable rotary table 230 having a flat upper surface and a peripheral portion of the rotary table 230. Between the upper surface of the table 230, there is a ring-shaped weir member 236 that forms a container 234 that holds water 232 therein. As the water 232, for example, weakly acidic water, water in which air is dissolved, or electrolytic ion water is used. The pH of this weakly acidic water or water in which air is dissolved is, for example, 3.5 to 6.0, preferably 3.5 to 5.5, and the pH of the electrolytic ion water is, for example, 3.5 to 6. 0, preferably 3.5 to 5.5, or 8.0 or more.

This weakly acidic water having a pH of 3.5 to 6.0 is added to, for example, pure water or tap water without adding an acid, a pH buffering agent, or an oxidizing agent (H ₂ O ₂ , ozone water, persulfate, etc.). Manufactured by dissolving CO ₂ or the like. In this way, weakly acidic water having a pH of 3.5 to 6.0 is used without adding an acid, a pH buffering agent, or an oxidizing agent (H ₂ O ₂ , ozone water, persulfate, etc.). As a result, it is possible to perform polishing while preventing the occurrence of etch pits on the surface (surface to be polished) of the substrate 142 while suppressing a decrease in the polishing rate.

In this example, a water supply line (water supply unit) 241 is located above the turntable 230, extends from a pure water supply source (not shown), and has a gas dissolver 238 and a heat exchanger 240 installed therein. Has been placed. As a result, a gas such as CO ₂ or air is dissolved in pure water sent from a pure water supply source by the gas dissolver 236, so that the pH is 3.5 to 6, preferably 3.5 to 5.5. The water 232 is poured into the container 234 partitioned by the dam member 236, and the temperature of the water 232 injected into the container 234 is adjusted to a predetermined temperature by the heat exchanger 240 as necessary. . Note that pure water or tap water having a pH of 3.5 to 6, preferably 3.5 to 5.5 by being left in the atmosphere may be used.

  A catalyst pad 242 is attached to the upper surface of the turntable 230 so as to be positioned inside the container 234 that is partitioned by a weir member 236, and when the water 232 is injected into the container 234, Is filled with water 232. Inside the rotary table 230, a fluid flow path 230a for controlling the temperature of the rotary table 230 is provided.

  A substrate holder 244 is disposed above the container 234 that is partitioned by the weir member 236 and holds the substrate 142 such as a GaN substrate detachably with the surface to be polished facing downward. The main shaft 246 is connected to the lower end of the main shaft 246 that can move up and down and rotate. The substrate holder 244 and the main shaft 246 have the same configuration as the substrate holder 144 and the main shaft 146 shown in FIG.

  As shown in FIG. 14, the polishing tool 242 is provided with a groove 260a for effectively supplying a treatment liquid (water) 232 having a shear A hardness of 50 to 90 and having a concentric or spiral shape on the surface. An elastic base material 260 made of an elastic body, an intermediate layer 262 formed on the surface of the elastic base material 260 by vacuum deposition or the like, and a conductive member 264 formed on the surface of the intermediate layer 262 by vacuum deposition or the like. Have. As described above, the conductive member 264 is provided on the surface of the elastic base material 260 with the intermediate layer 262 interposed therebetween, so that the conductive member 264 has irregularities of long / single period on the surface (surface to be polished) of the substrate 142. Can be easily followed. Instead of the groove 260a, a hole for effectively supplying the treatment liquid (water) may be provided.

  The thickness of the elastic base material 260 is, for example, 0.5 to 5 mm, and examples of the elastic material constituting the elastic base material 260 include rubber, resin, foamable resin, and non-woven fabric. Moreover, you may make it comprise an elastic base material by overlapping the elastic material of two or more layers from which an elasticity modulus differs.

  The intermediate layer 262 has a thickness of 1 to 10 nm, for example, and is interposed between the elastic base material 260 and the conductive member 264 in order to improve the adhesion between the elastic base material 260 and the conductive member 264. It is made of, for example, chromium or graphite (SP2 bond) carbon having good adhesion to both the material 260 and the conductive member 264. When the intermediate layer 262 is formed on the surface of the elastic substrate 260 by vacuum deposition, it is preferable to use an ion sputtering deposition method in order to suppress expansion and deterioration of the elastic substrate 260 due to high temperature. The same applies to the case where the conductive member 264 is formed on the surface of the intermediate layer 262 by vacuum deposition.

  The conductive member 264 has a thickness of 100 to 1000 nm, for example. If the thickness is 100 nm or less, the conductive member 264 is worn out by polishing for about 1 hour and is not practical. If the thickness is 1000 nm or more, cracks are generated on the surface of the conductive member 264 during polishing. This is because there is a fear. As the conductive member 264, platinum is preferably used, but other noble metals such as gold, transition metals (Ag, Fe, Ni, Co) that are insoluble or slightly soluble in the water 232 (dissolution rate of 10 nm / h or less). Etc.), graphite, conductive resin, conductive rubber or the like may be used.

  As is known from the Arrhenius equation, the higher the reaction temperature, the higher the chemical reaction. For this reason, by controlling at least one of the temperatures of the substrate 142, the water 232, and the turntable 230 to control the reaction temperature, it is possible to improve the stability of the processing speed while changing the processing speed.

  FIG. 15 shows another polishing tool 242a used in the polishing apparatuses 30C and 30D. The polishing tool 242a is different from the polishing tool 242 shown in FIG. 14 in that the polishing tool 242a is provided with a support surface plate 280 made of light-transmitting glass such as synthetic quartz or light-transmitting resin such as acrylic. An elastic base material 282 made of an elastic body having a large number of through holes 282a inside is laminated on the upper surface of the support surface plate 280, and an intermediate layer 284 is formed on the surface of the elastic base material 282 excluding the through holes 282a. A conductive member 286 is laminated on the upper surface of the layer 284 by vacuum deposition or the like.

  In the polishing apparatuses 30C and 30D, as shown in FIG. 1, the surface (upper surface) of the polishing tool 134 is conditioned so as to have good flatness and appropriate roughness, for example, a conditioning mechanism (conditioner) 190 including a polishing pad. Is provided.

  According to the polishing apparatuses 30C and 30D, while the substrate 142 and the catalyst pad 242 held by the substrate holder 244 are immersed in the water 232, the surface of the substrate 142 and the conductive member 264 such as platinum on the catalyst pad 242 are mutually connected. The surface of the substrate 142 can be polished by making the relative movement while making contact. The polishing may be performed while supplying water 232 from the water supply line 241 between the substrate 142 held by the substrate holder 244 and the catalyst pad 242.

The polishing mechanism is considered as follows. That is, when the surface of the substrate 142 and the conductive member 264 such as platinum of the catalyst pad 242 are moved relative to each other while being in contact with each other, distortion occurs at the contact portion, and the valence band electrons are excited to the conduction band and become electrons. -Hole pairs are generated. Next, electrons excited in the conduction band move to a conductive member 264 such as platinum (having a high work function), and holes remain on the substrate surface. Remaining in the hole in the water 232 of the OH ^- ions or H _{2 O} molecules act, as a result, only the contact portion is oxidized. Then, since the oxides of Ga, Al, and In are soluble in a weak acid or weak alkali such as a carbon dioxide solution, the oxide formed in the contact portion dissolves in the water 232 and is released from the surface of the substrate 142. Removed.

The contact pressure between the surface of the substrate 142 and the conductive member 264 such as platinum of the catalyst pad 242 eliminates the warp of the substrate 142, the substrate 142 slips out, or the conductive member 264 of the catalyst pad 242 In order to prevent the material 260 from being peeled off, for example, 0.1 to 1.0 kgf / cm ² is preferable, and about 0.4 kgf / cm ² is particularly preferable.

  A substrate in which the elastic base material 260 and the intermediate layer 262 of the polishing tool 242 are both made of conductive members, and a conductive wire 272a extending from the anode of the power source 270 is held by the substrate holder 244 as indicated by a virtual line in FIG. 142, connecting the conductive wire 272b extending from the cathode to the elastic base material 260 of the polishing tool 242, and applying a voltage between the conductive member 264 of the polishing tool 242 and the substrate 142 held by the substrate holder 244, The surface of 142 may be polished. Thereby, the polishing rate can be increased.

  Returning to FIG. 1, between the polishing apparatuses 30 </ b> A and 30 </ b> B and the cleaning unit 4, four transport positions along the longitudinal direction (first transport position TP <b> 1 and second transport in order from the load / unload unit 2 side). A first linear transporter 5 is disposed as a second (linear motion) transport mechanism for transporting the substrate between the position TP2, the third transport position TP3, and the fourth transport position TP4). A reversing machine 31 for reversing the substrate received from the first transport robot 22 of the load / unload unit 2 is disposed above the first transport position TP1 of the first linear transporter 5, and below that is disposed. A lifter 32 that can be moved up and down is arranged. Also, a pusher 33 that can be moved up and down below the second transfer position TP2, a pusher 34 that can be moved up and down below the third transfer position TP3, and a pusher 34 that can move up and down below the fourth transfer position TP4. Possible lifters 35 are respectively arranged.

  On the side of the polishing apparatuses 30C and 30D, adjacent to the first linear transporter 5, there are three transfer positions along the longitudinal direction (the fifth transfer position TP5, the sixth transfer position in order from the load / unload unit 2 side). A second linear transporter 6 serving as a second (linear motion) transport mechanism for transporting the substrate between the transport position TP6 and the seventh transport position TP7 is disposed. A lifter 36 that can be moved up and down below the fifth transport position TP5 of the second linear transporter 6, a pusher 37 below the sixth transport position TP6, and a pusher 38 below the seventh transport position TP7. Are arranged respectively. Further, a pure water replacement unit 192 having a ridge and a pure water nozzle is provided between the polishing apparatus 30C and the pusher 37, and a pure water replacement portion 192 having a ridge and a pure water nozzle is also provided between the polishing apparatus 30D and the pusher 38. A water replacement part 194 is arranged.

  As can be understood from the fact that slurry is used during polishing, the polishing portion 3 is the most dirty (dirty) region. Therefore, in this example, exhaust is performed from the periphery of the polishing unit such as a surface plate so that the particles in the polishing unit 3 are not scattered outside, and the pressure inside the polishing unit 3 is adjusted to the outside of the apparatus, Particles are prevented from being scattered by using a negative pressure more than that of the cleaning unit 4 and the load / unload unit 2. Further, usually, an exhaust duct (not shown) is provided below the polishing portion such as a surface plate, and a filter (not shown) is provided above, and the air is cleaned via these exhaust duct and filter. Air is ejected and a downflow is formed.

  The cleaning unit 4 is an area for cleaning a substrate, and includes a second transfer robot 40, a reversing machine 41 for inverting the substrate received from the second transfer robot 40, and three cleaning units 42, 43, 44 for cleaning the substrate. And a dry unit 45 for rinsing the cleaned substrate with pure water and spin-drying, and a third transport unit for transporting the substrate between the reversing machine 41, the cleaning units 42, 43, 44 and the drying unit 45. A robot 46 is provided. The second transfer robot 40, the reversing machine 41, the cleaning units 42 to 44, and the drying unit 45 are arranged in series along the longitudinal direction, and the second transfer robot 40, the reversing machine 41, and the cleaning units 42 to 44 are arranged. And the 3rd conveyance robot 46 is arrange | positioned so that driving | running | working is possible between the drying unit 45 and the 1st linear transporter 5. FIG. A filter fan unit (not shown) having a clean air filter is provided above the cleaning units 42 to 44 and the drying unit 45, and clean air from which particles are removed by this filter fan unit is always below. It is blowing out towards. Further, the inside of the cleaning unit 4 is constantly maintained at a pressure higher than that of the polishing unit 3 in order to prevent inflow of particles from the polishing unit 3.

  The partition 1a surrounding the polishing unit 3 is provided with a shutter 50 positioned between the reversing machine 31 and the first transport robot 22, and when the substrate is transported, the shutter 50 is opened to open the first transport robot. The substrate is transferred between the machine 22 and the reversing machine 31. Further, the partition wall 1b surrounding the polishing unit 3 is provided with a shutter 53 positioned at a position facing the CMP apparatus 30B and a shutter 54 positioned at a position facing the polishing apparatus 30C.

  Next, a process for planarizing the surface of the substrate using the planarization system having such a configuration will be described.

  One substrate is taken out from the substrate cassette mounted on the front load unit 200 by the first transfer robot 22 and transferred to the reversing machine 31. The reversing device 31 reverses the substrate by 180 ° and then places the substrate on the lifter 32 at the first transport position TP1. The second transporter 5 moves laterally and transports the substrate on the lifter 32 to one of the first transport position TP1 and the third transport position TP3. Then, the polishing apparatus 30A receives the substrate from the pusher 32 by the substrate holder 144, and the polishing apparatus 30B receives the substrate from the pusher 34 by the substrate holder 144, and performs the first-stage polishing and the second-stage polishing of the substrate surface. Do.

That is, in the polishing apparatus 30A, the substrate holder 144 holding the substrate 142 such as a GaN substrate with the surface (surface to be processed) facing downward is moved above the container 132, the substrate holder 144 is lowered, and the substrate 142 is moved to the container. It is immersed in the treatment liquid 130 held inside 132. In this manner, in the state where the processing liquid 130 exists between the substrate 142 and the polishing tool 134, excitation light, preferably ultraviolet rays, is emitted from the light source 140, and excitation light, preferably ultraviolet rays, is emitted to the surface (lower surface) of the substrate 142. Irradiate. The wavelength of the excitation light irradiated at this time is equal to or less than the wavelength corresponding to the band gap of the workpiece, and the band gap of GaN is 3.42 eV. Therefore, when processing a GaN substrate, it is 365 nm or less, for example, 312 nm. Preferably there is. Thereby, when processing a GaN substrate, GaN is oxidized and Ga oxide (Ga ₂ O ₃ ) is generated on the surface of the GaN substrate.

At this time, the switch 150 of the power source 148 is turned ON, and a voltage at which the polishing tool 134 becomes a cathode is applied between the polishing tool 134 and the substrate 142 held by the substrate holder 144. Thus, when processing the GaN substrate, the generation of Ga oxide on the surface of the GaN substrate _(Ga 2 _{O 3)} is promoted.

Next, with the excitation light, preferably ultraviolet rays, emitted from the light source 140, and further, with the voltage applied between the polishing tool 134 and the substrate 142, the rotating shaft 136 is rotated to rotate the polishing tool 134. At the same time, the substrate holder 144 is rotated to lower the substrate 142 while rotating, and the surface of the polishing tool 134 is brought into contact with the surface of the substrate 142 at a surface pressure of preferably about 0.01 to 1.0 kgf / cm ² . If the surface pressure is less than 0.01 kgf / cm ² , the warpage of the substrate 142 may be corrected and the entire substrate 142 may not be uniformly polished, and the surface pressure should be 1.0 kgf / cm ² or more. This is because a mechanical defect may occur on the surface of the substrate 142. As a result, the portion that contacts the Ga oxide polishing tool 134 formed on the surface of the substrate 142 such as a GaN substrate, that is, the Ga oxide formed on the tip of the convex portion of the surface of the substrate 142 having the unevenness is selectively selected. The first stage polishing is performed mainly for the purpose of removing the surface damage of the substrate 142. The polishing rate in the first stage polishing is, for example, about 1000 nm / h.

  At the time of this first stage polishing, for example, the photoluminescence light is measured by performing a vector analysis of the light reflected on the surface of the substrate 134 by the spectroscope 208 of the photoluminescence damage measuring device 202, thereby measuring the first photoluminescence light. Detect the end point of stage polishing.

  When the polishing of the first stage is finished, the switch 150 is turned off while the excitation light from the light source 140, preferably ultraviolet rays, continues to be applied, and the voltage application between the polishing tool 134 and the substrate 142 is stopped. Thus, the second stage polishing is performed mainly for the purpose of improving the surface roughness of the substrate 142. The polishing rate in the second stage polishing is, for example, about 200 nm / h. At the time of this second stage polishing, for example, the switch 206 is turned ON, and the current flowing along the conductive wire 152c connecting the substrate 142 and the metal film (metal wiring) 154 of the polishing tool 134 is changed to the photocurrent type damage amount measuring apparatus 201. In this way, the end point of the second stage polishing is detected.

  After the second stage polishing is completed, the emission of excitation light, preferably ultraviolet rays, from the light source 140 is stopped, the substrate holder 144 is raised, and then the rotation of the substrate 142 is stopped. The substrate surface is rinsed with pure water as necessary, and then transferred to the pusher 33 at the second transport position TP2. The first transporter 5 transports the substrate on the pusher 33 to the lifter 35. Similarly, in the polishing apparatus 30B, the substrate holder 144 receives the substrate 142 from the pusher 34, performs the first stage polishing and the second stage polishing, and then transfers the polished substrate 142 to the fourth transport. Delivered to the lifter 35 at position TP4.

  The second transfer robot 40 receives the substrate from the lifter 35 and places it on the lifter 36 at the fifth transfer position TP5. The second transporter 6 moves laterally and transports the substrate on the lifter 36 to one of the sixth transport position TP6 or the seventh transport position TP7.

The polishing apparatus 30C receives the substrate from the pusher 37 by the substrate holder 244 and performs the third stage polishing. In other words, the substrate holder 244 holding the substrate 142 such as a GaN substrate with the surface (surface to be processed) facing downward is moved above the container 234 and lowered while rotating the substrate holder 244, and the substrate 142 is moved to the container 234. For example, 100-1000 hPa (0.1-1.0 kgf / cm ² ) is applied to the conductive member 264 such as platinum of the rotating polishing tool 242 by being immersed in the water 232 held inside and further lowered. The surface of the substrate 142 is preferably brought into contact with the contact pressure (pressing force) of about 400 hPa (0.4 kgf / cm ² ). As described above, in the water 232, the surface of the substrate 142 and the conductive member 264 such as platinum of the polishing tool 242 are moved relative to each other while being in contact with each other. Perform stage polishing. The third stage of polishing may be performed while supplying water 232 between the conductive member 264 such as platinum of the polishing tool 242 and the surface of the substrate 142 through the water supply line 241.

  After finishing the third stage of polishing, the water 232 remaining on the substrate surface is replaced with pure water by the pure water replacement unit 192 and returned to the sixth transport position TP6. Similarly, in the polishing apparatus 30D, the substrate holder 142 receives the substrate 142 from the pusher 38, performs the third stage polishing (surface finish polishing), and purifies the water 232 remaining on the substrate surface after the polishing process. The water replacement unit 192 replaces with pure water and returns to the seventh transport position TP7. Thereafter, the substrate after the replacement with pure water is moved to the fifth transport position TP5 by moving the second transporter 6 laterally.

  The second transfer robot 40 takes out the substrate from the fifth transfer position TP5 and transfers it to the reversing machine 41. The reversing machine 41 reverses the substrate by 180 ° and then transports the substrate to the first cleaning unit. The third transport unit 46 transports the substrate from the first cleaning unit 42 to the second cleaning unit 43, where the substrate is cleaned.

  Then, the third transport robot 46 transports the cleaned substrate to the third cleaning unit 44, where the substrate is cleaned with pure water, and then transported to the drying unit 45, where the substrate is rinsed with pure water. After that, spin dry by rotating at high speed. The first transfer robot 22 receives the substrate after spin drying from the drying unit 45 and returns it to the substrate cassette mounted on the front load unit 200.

DESCRIPTION OF SYMBOLS 3 Polishing part 30A, 30B, 30C, 30D Polishing apparatus 134 Polishing tool 130 Processing liquid 132 Container 136 Rotating shaft 140 Light source 142 GaN substrate 144 Substrate holder 146 Spindle 154 Metal film (metal wiring)
230 rotating table 230 water 232 container 238 gas dissolver 241 water supply line (water supply unit)
242 Polishing pad 244 Substrate holder 246 Rotating shaft 260, 282 Elastic base material 262.284 Intermediate layer 264, 286 Conductive member 300, 310, 314 Support surface plate 302 Metal wire (metal wiring)
304 pad base material 306 catalyst layer 308 catalyst pad 312 metal film (metal wiring)
316 Wiring film 318 Wiring pattern (metal wiring)

Claims (10)

A light-transmitting support surface plate with metal wiring formed on the surface;
At least partially in contact with the substrate surface is from the catalyst, possess a catalyst pad having a plurality of through holes for passing the at least one light and ion current therein,
The catalyst pad is attached to the surface of the support surface plate,
The polishing tool according to claim 1, wherein the catalyst comprises at least one of a noble metal, a transition metal, a ceramic solid catalyst, a basic solid catalyst, or an acidic solid catalyst .   The metal wiring is formed by embedding a metal wire in a groove formed on the surface of the supporting surface plate, forming a metal wiring pattern on the surface of the supporting surface plate, or forming a wiring film on which the metal wiring pattern is formed on the surface of the supporting surface plate. The polishing tool according to claim 1, wherein the polishing tool is formed by arranging.   2. The polishing tool according to claim 1, wherein the metal wiring is formed by a metal film pattern vacuum-deposited on the surface of the supporting surface plate.   The polishing tool according to any one of claims 1 to 3, wherein the support surface plate is made of glass or light-transmitting resin.   The polishing tool according to claim 1, wherein the catalyst pad is made of quartz glass.   The catalyst pad includes a noble metal, a transition metal, or a metal oxide film having acidity or basicity on the surface of a pad base material made of glass, rubber, light transmissive resin, foamable resin, or nonwoven fabric. The polishing tool according to any one of claims 1 to 4, wherein the polishing tool is formed by vapor deposition. The polishing tool according to claim 1, wherein the catalyst pad is detachably attached to the support surface plate. A container for holding the treatment liquid;
The polishing tool according to any one of claims 1 to 7, wherein the polishing tool is disposed so as to be immersed in the processing liquid in the container.
A substrate holder that holds the substrate and is immersed in the processing solution in the container to contact the polishing tool;
A moving mechanism for relatively moving the polishing tool and the substrate held by the substrate holder while contacting each other;
A polishing apparatus comprising at least one of a light source for irradiating light onto a substrate surface held by the substrate holder and immersed in the processing liquid in the container and a power source for applying a bias potential to the substrate. The polishing tool according to any one of claims 1 to 7,
A substrate holder for holding the substrate and contacting the polishing tool;
A moving mechanism for relatively moving the polishing tool and the substrate held by the substrate holder while contacting each other;
A treatment liquid supply unit for supplying a treatment liquid to a contact portion between the polishing tool and the substrate held by the substrate holder;
A polishing apparatus comprising at least one of a light source for irradiating light onto a substrate surface held by the substrate holder and immersed in the processing liquid in the container and a power source for applying a bias potential to the substrate.   10. The polishing apparatus according to claim 8, wherein the treatment liquid is made of a pH buffer having a neutral liquidity containing Ga ions, and the substrate is made of a compound semiconductor containing Ga element. .

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