JP5492623B2 - Inspection apparatus and inspection method - Google Patents

Description

  The present invention relates to an inspection apparatus for inspecting the quality of a member such as a metal member such as a heat insulator that covers an exhaust manifold of an automobile engine. More specifically, the present invention accurately relates to an uneven member whose surface is uneven. The present invention relates to an inspection apparatus capable of inspecting pass / fail.

  Up to now, for example, in the completion inspection of a product such as a metal product, the sound of hitting the product with a hammer or the like has been collected, and the quality of the product has been determined by the vibration spectrum of the sound.

  However, by hitting the product with a hammer or the like for completion inspection, the surface of the product is scratched or deformed in the case of a product with low strength in the first place. There was a problem of becoming. For example, a paper member having a low strength is easily deformed as compared with a metal member, and thus the above problem appears remarkably.

  For this reason, products that cannot be hammered using a hammer or the like are visually inspected by an inspector. However, in the case of such a visual inspection, skilled techniques for the inspection are required, and it has been difficult to efficiently perform an accurate inspection. Therefore, an inspection apparatus as shown below has been proposed (see Patent Document 1).

  The inspection apparatus proposed in Patent Document 1 collides air with a subject, detects the vibration of the subject that the air collides with a sensor using a magnet, and compares the vibration with the vibration characteristics of a non-defective product. This is an apparatus for determining the quality of a subject. It is said that this inspection apparatus can accurately inspect even a subject that cannot be hammered by a hammer or the like.

However, since vibration is detected by a sensor using a magnet, the vibration detection capability is low, and it is not possible to detect sufficiently accurate vibration.
In response to these problems, the laser beam is irradiated to the subject, the reflected laser beam reflected by the subject is received, and the vibration of the subject is detected by a laser Doppler type vibration sensor that detects vibration based on the phase difference. In addition, an inspection apparatus that determines the quality of a subject has been proposed (see Patent Document 2). According to this inspection apparatus, since it is possible to detect the vibration of the subject with high accuracy, it is said that accurate pass / fail judgment can be made.

  However, in the case of a metal product used for automobile parts, etc., for the member to be inspected, for example, a light weight that easily affects energy saving is strongly desired, and the metal material constituting the metal product is becoming thinner. It is out. Furthermore, there are also demands for additional effects such as an improvement in shape workability accompanying the complexity of the shape, a sound absorption effect that affects silence, and electromagnetic shielding properties.

  In response to such a demand, an aluminum metal plate 110 in which a metal thin plate is bent to form an uneven surface 110a such as a corrugated shape is often used (see FIG. 9). The aluminum metal plate 110 on which such a concavo-convex processed surface 110a is formed is formed by bending a ridge portion constituting the concavo-convex shape. It has a sound absorption effect based on the diffuse reflection effect and electromagnetic shielding properties.

  Even the aluminum metal plate 110 having such a concavo-convex concavo-convex surface 110a requires a sufficient strength and cannot use a product in which a defect such as a crack 150 has occurred. Therefore, it was necessary to accurately judge the quality.

  As described above, the aluminum metal plate 110 on which the concavo-convex processed surface 110a is formed uses a metal thin plate, so the local strength is low, and deformation occurs when a hammering test is performed with a hammer. It is necessary to inspect by the inspection method.

  However, for example, in the visual inspection of the person in charge of the inspection, since the uneven surface 110a is formed, it is difficult to visually detect the crack 150. In particular, when a crack 150 or the like is generated in a wrinkle portion due to bending, it cannot be found simply by visual observation, and visual inspection is not suitable as a product inspection of the aluminum metal plate 110 on which the uneven surface 110a is formed.

  On the other hand, even when the inspection apparatus proposed in Patent Document 2 capable of detecting vibration with high accuracy is used, the irradiated laser beam is uneven as shown in FIG. There is a problem in that vibration cannot be accurately detected because of irregular reflection by the processed surface 110a.

JP 2007-147513 A JP 2008-122155 A

  Therefore, the present invention provides an inspection apparatus and an inspection method capable of accurately determining whether or not a concave-convex member whose surface is formed in a concave-convex shape by subjecting a thin plate-like member to shape processing. With the goal.

  The present invention includes a fluid ejecting unit that ejects a fluid toward a subject to vibrate the subject, a vibration detecting unit that detects vibration of the subject that vibrates due to a collision of the ejected fluid, An inspection apparatus for inspecting the quality of the subject by the detected vibration, and subjecting the subject to shape processing on a thin plate member to make the surface uneven While forming the concavo-convex member formed, forming a crushed portion by crushing the concavo-convex shape in a part of the surface, the fixing support means supports and fixes the concavo-convex member in the crushed portion, The vibration detection means detects vibration in the crushing portion.

The fluid may be a gas such as air, a liquid, or a gel.
The sheet material member can be a metal sheet material member such as an aluminum sheet material member or an Fe-Al sheet material member, a paper sheet material member, or a resin sheet member.

The unevenness formed by the shape processing applied to the thin plate member can be an emboss formed by corrugation or embossing by bending.
The crushing portion can be a portion that is flattened by crushing irregularities such as the corrugation and embossing.

  According to the present invention, even if the surface of the concavo-convex member is formed into a concavo-convex shape, it is possible to accurately inspect the quality of the subject by oscillating with the fluid and accurately detecting the vibration caused by the vibration.

  Specifically, since the fixing support means supports the subject at the crushing portion of the uneven member whose surface is formed uneven by applying shape processing to the thin plate member, reliable support and fixation can be realized. . For example, when the fixed support by the fixed support means is unstable due to unevenness of the surface, if the subject is vibrated by ejecting the collision of the fluid ejected from the fluid ejecting means, the vibration is sufficiently excited even if the fluid collides Can not do it. However, since the fixing support means supports the subject in the crushing portion, the subject can be firmly fixed and can be vibrated reliably by the collision of the fluid. Therefore, it is possible to accurately detect the quality of the subject by accurately detecting vibration due to the vibration.

  In addition, since the vibration detecting means detects the vibration in the crushing portion, it is possible to detect the vibration of the subject that is the uneven member that is vibrated more accurately. Specifically, when there are concave and convex portions formed on the surface of the concavo-convex member, for example, the distance from the vibration detecting means is changed, or detection is performed at the boundary portion between the concave and convex portions. May not be able to be detected. However, since the vibration in the crushed portion obtained by crushing the unevenness on the surface is detected, the difference between the concave and convex portions on the surface is reduced, and the vibration can be detected accurately.

  Therefore, according to the present invention, even if the surface of the concavo-convex member has a concavo-convex shape, the subject is reliably vibrated by the fluid ejected from the fluid ejecting means, and the vibration due to the vibration is accurately detected by the crushing portion. It is possible to accurately inspect whether the subject is good or bad.

  As an aspect of the present invention, a storage means for storing the vibration characteristics of the concavo-convex member that is a non-defective product as a non-defective vibration characteristic, and a subject vibration characteristic that is a vibration characteristic of the subject is calculated from the vibration detected by the vibration detection means. Vibration characteristic calculating means, determination means for determining the quality of the subject by comparing the non-defective product vibration characteristics and the subject vibration characteristics may be provided.

According to the present invention, the quality of the subject can be determined more accurately based on the vibration detected by the vibration detecting means.
Specifically, when the object vibration characteristic, which is the vibration characteristic of the subject, is calculated from the vibration detected by the vibration detection means by the vibration characteristic calculation means, and the quality of the subject is determined, simply judging from the acquired vibration data Compared to the above, the determination process can be performed with a low load, and the quality can be determined more accurately.

  The storage means stores the vibration characteristics of the concavo-convex member, which is a non-defective product, as the non-defective vibration characteristics, and compares the non-defective vibration characteristics with the subject vibration characteristics to determine the quality of the subject. The pass / fail judgment can be made more accurately than the pass / fail judgment based only on the vibration.

  Further, as an aspect of the present invention, the uneven member is configured by a three-dimensional member formed in a three-dimensional shape, and the fluid ejecting means is provided at a vibration location away from the crushing portion in the three-dimensional member. The fluid can be ejected.

  By this invention, the quality of the whole three-dimensionally shaped member can be accurately determined. Specifically, a location where the vibration detection means detects vibration and a vibration location where the fluid ejection means ejects fluid are close to each other, and a defective location where a crack or the like occurs is a location where vibration is detected and a location where vibration is applied When the position is far from the vibration, the vibration transmitted from the place to be detected to the place where the vibration is detected is less influenced by the defective place, and accurate pass / fail judgment cannot be made. However, in the three-dimensional member, since the fluid ejecting means ejects the fluid to the vibration-excited part away from the crushing portion where the vibration is detected by the vibration detecting means, the influence on the vibration due to the defective part when a defect occurs. Can be detected and a more accurate pass / fail judgment can be made.

  Further, as an aspect of the present invention, the fluid is composed of gas, and the vibration detecting unit irradiates the crushing portion with laser light and receives the laser light reflected by the crushing portion. The vibration of the subject can be detected based on the phase difference.

  According to the present invention, it is possible to perform an accurate pass / fail judgment without being affected by the surrounding environment. Specifically, when the fluid is composed of a liquid or a gel-like body, the fluid ejected toward the subject remains on the subject surface, which may affect subsequent vibration. Further, when the fluid is composed of a liquid or a gel-like body, it is necessary to remove the liquid or the gel-like body fluid remaining on the surface of the subject after completion of the examination. However, since the fluid is composed of gas, the fluid that is ejected and vibrates the subject does not remain on the surface of the subject, and vibrations that are vibrated by the fluid can be accurately detected. In addition, there is no need to remove the fluid remaining on the surface like a liquid or gel.

  Further, since the vibration detecting means is configured to irradiate the crushing part with laser light, receive the laser light reflected by the crushing part, and detect the vibration of the subject based on the phase difference, the vibration detecting means depends on the surrounding environment. Therefore, accurate vibration can be detected. Specifically, when detecting the vibration of the subject, for example, by collecting the sound as sound, noise such as noise around the inspection apparatus is also detected, so that accurate vibration detection is difficult. On the other hand, since the vibration detection means is configured to irradiate the subject with laser light and receive reflected laser light and detect the vibration of the subject based on the phase difference, noise such as noise around the inspection apparatus. It is possible to detect only the vibrations excited by the fluid without including the vibrations caused by.

  In addition, when laser light is irradiated on another uneven surface, the laser light is reflected in various reflection directions by the unevenness of the surface and is irregularly reflected, but the vibration detection means irradiates the laser beam toward the crushing portion. This makes it easier to receive the reflected laser light. Therefore, the vibration of the subject can be detected more accurately by the laser light.

  Further, the present invention irradiates laser light to the subject that vibrates due to collision of the ejected gas, gas ejecting means for exciting the subject by ejecting gas toward the subject, Using an inspection apparatus comprising a laser-type vibration detecting unit that receives the laser light reflected by the surface of the subject and detects vibrations by a phase difference thereof, and a fixed support unit that fixedly supports the subject. An inspection method for inspecting the quality of a subject by detected vibrations, which is formed into a three-dimensional shape by subjecting a thin plate-like member to shape processing and subjecting the uneven member having a surface to be uneven to three-dimensional processing A crushing portion is formed by crushing a concavo-convex shape on a part of the surface of the subject formed of a three-dimensionally shaped member, and the subject is supported and fixed by the fixing support means at the crushing portion, and the gas ejection means From the above In the body-shaped member, the gas is ejected to a vibration location away from the crushing portion, the vibration in the crushing portion is detected by the vibration detecting means, and the vibration of the subject is detected from the vibration detected by the vibration detecting means. The object vibration characteristic, which is a characteristic, is calculated, and the non-defective vibration characteristic of the solid shape member, which is a non-defective product stored in the storage unit, is compared with the object vibration characteristic to determine whether the object is good or bad. It is characterized by determining.

  According to the present invention, even if the surface is a three-dimensionally shaped member, it is possible to accurately inspect the quality of the subject by vibrating with gas and accurately detecting vibration due to the vibration.

  Specifically, since the fixing support means supports the subject at the crushing portion in the three-dimensionally shaped member whose surface is formed in an uneven shape by applying shape processing to the thin plate material-like member, reliable support and fixation can be realized. . Therefore, the subject is firmly fixed to the fixed support means, and can be vibrated reliably by gas collision. Therefore, it is possible to accurately detect the vibration of the subject and accurately inspect the quality of the subject.

  In addition, the vibration characteristic calculation means calculates the object vibration characteristics that are the vibration characteristics of the subject from the vibrations detected by the vibration detection means, and determines whether the subject is good or bad. Thus, the determination process can be performed with a low load and the quality can be determined more accurately.

  The storage means stores the vibration characteristics of the concavo-convex member, which is a non-defective product, as the non-defective vibration characteristics, and compares the non-defective vibration characteristics with the subject vibration characteristics to determine the quality of the subject. The pass / fail judgment can be made more accurately than the pass / fail judgment based only on the vibration.

  Further, the location where the vibration detecting means detects vibration and the vibration-excited location where the fluid ejecting means ejects fluid are close to each other, and a defective location where a crack or the like has occurred is detected from the location where vibration is detected and the location where the vibration is applied. In the case of being away from each other, the vibration transmitted from the place to be detected to the place where the vibration is detected has less influence of the vibration due to the defective place, and an accurate pass / fail judgment cannot be made. However, in the three-dimensional member, since the fluid ejecting means ejects the fluid to the vibration-excited part away from the crushing portion where the vibration is detected by the vibration detecting means, the influence on the vibration due to the defective part when a defect occurs. Can be detected and a more accurate pass / fail judgment can be made.

  Further, when the fluid is composed of a liquid or a gel-like body, the fluid ejected toward the subject remains on the subject surface, which may affect subsequent vibration. Further, when the fluid is composed of a liquid or a gel-like body, it is necessary to remove the liquid or the gel-like body fluid remaining on the surface of the subject after completion of the examination. However, since the fluid is composed of gas, the fluid that is ejected and vibrates the subject does not remain on the surface of the subject, and vibrations that are vibrated by the fluid can be accurately detected. In addition, there is no need to remove the fluid remaining on the surface like a liquid or gel.

  Further, since the vibration detecting means is configured to irradiate the crushing part with laser light, receive the laser light reflected by the crushing part, and detect the vibration of the subject based on the phase difference, the vibration detecting means depends on the surrounding environment. Therefore, accurate vibration can be detected. Specifically, when the vibration of the subject is collected and detected, for example, as sound, noise such as noise around the inspection apparatus is also detected, so that accurate vibration detection is difficult. On the other hand, since the vibration detection means is configured to irradiate the subject with laser light and receive reflected laser light and detect the vibration of the subject based on the phase difference, noise such as noise around the inspection apparatus. It is possible to detect only the vibrations excited by the fluid without including the vibrations caused by.

  In addition, when laser light is irradiated on another uneven surface, the laser light is reflected in various reflection directions by the unevenness of the surface and is irregularly reflected, but the vibration detection means irradiates the laser beam toward the crushing portion. This makes it easier to receive the reflected laser light. Therefore, the vibration of the subject can be detected more accurately by the laser light.

  According to the present invention, it is possible to provide an inspection apparatus and an inspection method capable of accurately determining whether or not a rugged member has a rugged surface by applying shape processing to a thin plate member. .

The perspective view of a test | inspection workpiece | work. Explanatory drawing of the corrugated shape of an inspection work, and a press part. The block diagram of an inspection apparatus. The schematic explanatory drawing of the inspection condition by an inspection apparatus. Explanatory drawing about irradiation laser. Flow chart of pass / fail inspection. Explanatory drawing about a test result. Explanatory drawing about a quality determination. The top view of the aluminum metal plate in which the uneven | corrugated processed surface was formed.

An embodiment for carrying out the present invention will be described below with reference to the drawings.
FIG. 1 is an explanatory diagram of the inspection workpiece 100, and FIG. 2 is an explanatory diagram for bending the inspection workpiece 100.

Specifically, FIG. 1A shows a perspective view of the inspection work 100, and FIG. 1B shows a perspective view of an aluminum metal plate 110 constituting the inspection work 100.
2 (a) shows an end view of the AA cut portion in FIG. 1 (b), shows an end view of the BB cut portion in FIG. 2 (b), and FIG. 2 (c) shows a CC cut. The part end elevation is shown. 2D shows an end view of the DD cut portion in FIG. 1A, and FIG. 2E shows an end view of the EE cut portion in FIG.

  The inspection workpiece 100 is formed into a hollow, substantially quadrangular frustum shape by bending a thin plate-like aluminum metal plate 110 and three-dimensionally processing it. Specifically, the inspection workpiece 100 has a concavo-convex processed surface 110a processed into a concavo-convex shape by bending.

  Furthermore, the press part 101 which crushes the uneven | corrugated shape of the uneven | corrugated processed surface 110a is formed in the center of the upper surface 100a of the test | inspection workpiece | work 100 formed in the shape of a quadrangular pyramid. Further, in the inspection work 100, a part of the lower portion of the side surface 100b, which is a position away from the press unit 101, is set as an excitation point Ba that is excited by collision with excitation air Ka described later.

  As shown in FIG. 2, the concavo-convex processed surface 110a has a shape having a crease-like crease in both the vertical and horizontal directions. The inspection work 100 having the uneven surface 110a having such a shape has the advantages of excellent deformability and shape retention, and good sound absorption and silencing properties.

  Specifically, as shown in the cross-sectional view of FIG. 2A, the concavo-convex processed surface 110a of the aluminum metal plate 110 has a corrugated shape having ridges 112 that protrude in a mountain shape when seen from the lateral direction at regular intervals. In the raised portion 112, the first convex portion 113 having a narrow width and the first concave portion 114 having a narrower width are repeatedly provided in the lateral direction (see FIG. 2B). On the other hand, at the lower part between the raised parts 112, the second convex part 115 having a wide width and the second concave part 116 having a narrower width are repeated in the lateral direction (see FIG. 2C).

  The first convex portion 113 has a shape in which the top surface 113a is slightly curved downward and both sides 113b are reverse-shaped, and the first concave portion 114 has a flat bottom portion 114a. On the other hand, the second convex portion 115 has a flat top surface 115a, and the second concave portion 116 has a shape in which the bottom surface 116a is slightly curved upward and both sides 116b have a square shape. The raised portion 112, the first convex portion 113, the first concave portion 114, the second convex portion 115, and the second concave portion 116 constitute a wave-like processed portion 110a.

  Since the concavo-convex processed surface 110a has such a structure, the inspection workpiece 100 has good workability, in particular, high LDR (Limiting Drawing Ratio) or high limit drawing ratio, good drawability, and can be used for complicated and fine machining. It becomes.

  And as mentioned above, the press part 101 formed in the center of the upper surface 100a in the test | work 100 is formed by crushing the unevenness | corrugation of the uneven | corrugated processed surface 110a.

  More specifically, the uneven processing surface 110a in the press part 101 has the first convex part 113 crushed, the top surface 113a becomes flat, and both sides 113b having a reverse C-shape are formed on the bottom surface of the top surface 113a. The first convex portion 113 ′ is formed in close contact with the upper surface of the first concave portion 114 to form a substantially flat first convex portion 113 ′. Further, the bottom surface 116a becomes flat, and both sides 116b having a C-shape are in close contact with the lower surface of the second convex portion 115 and the upper surface of the bottom surface 116a to form a substantially flat second concave portion 116 ′. .

  Thereby, in the press part 101 of the upper surface 100a in the inspection work 100, both the outer surface and the inner surface of the inspection work 100 can constitute a substantially flat surface portion.

  In the above description, the inspection work 100 is composed of the aluminum metal plate 110 on which the concavo-convex surface 110a is formed, but may be composed of a paper plate or a resin plate on which the concavo-convex surface 110a is formed.

Next, the inspection apparatus 1 that inspects the quality of the inspection workpiece 100 will be described.
The inspection device 1 includes a control unit 10, a laser unit 20, a vibration unit 30, and a fixed unit 40.

  The control unit 10 includes a control device 11, a display device 12, a storage device 13, an AD conversion device 14, an operation device that is an input device such as a mouse and a keyboard, a storage medium reading device that reads various storage media such as a DVD-RAM, Alternatively, a storage medium read / write device and a transmission / reception device configured by a communication device such as a LAN board connectable to a network are provided.

The control device 11 includes a CPU, a ROM, and a RAM, and executes various control processes according to a program stored in the storage device 13.
The display device 12 is a device configured by a liquid crystal monitor, a CRT display, or the like to display various information.

The storage device 13 is composed of a storage device such as a hard disk, and includes various data including non-defective average vibration characteristic data and defective average vibration characteristic data, and a determination program, a vibration characteristic calculation program, or a control program for controlling various devices. It is a device for storing various programs including it.
The AD conversion device 14 is a device that performs analog conversion of the output signal output from the control device 11.

The laser unit 20 includes a laser controller 21 and a laser head sensor 22.
The laser controller 21 is connected to the AD conversion device 14 of the control unit 10, and switches laser irradiation ON / OFF for the laser head sensor 22 based on the analog output signal from the AD conversion device 14. It is a controller that controls the reception of reflected laser light.

  Based on the control of the laser controller 21, the laser head sensor 22 irradiates the laser beam Lg from the laser head 22 a toward the press part 101 of the inspection work 100 and receives the reflected laser light Lc reflected by the press part 101. It is a configuration that can.

  The vibration unit 30 includes a pressure accumulating tank 31, an electromagnetic valve 32, and a pressure reducing valve 33 connected to the injection nozzle 33a in order from the upstream side. In this order, air ejected from the injection nozzle 33a accumulates pressure. The tank 31 and the pressure reducing valve 33 are connected so as to be conductive.

  The pressure accumulating tank 31 is a tank that takes in air from outside and pressurizes and stores air to be ejected as vibration air Ka to the inspection work 100 by the vibration unit 30.

The solenoid valve 32 is connected to the AD converter 14 of the control unit 10 and is switched to switch ON / OFF of the ejection of air stored in the pressure accumulating tank 31 based on an analog output signal from the AD converter 14. It is a valve.
The pressure reducing valve 33 is an adjustment valve that is arranged on the downstream side of the electromagnetic valve 32 and adjusts the pressure of the air that has passed through the electromagnetic valve 32 to an appropriate pressure according to the strength and properties of the inspection work 100.

The fixed unit 40 is composed of a negative pressure tank 41, an electromagnetic valve 42, and a fixed base 43 in order from the downstream side, and in this order, negative pressure air is connected to be conductive.
The negative pressure tank 41 is a tank for generating negative pressure air for fixing the inspection work 100 with the fixing base 43.

The solenoid valve 42 is connected to the AD converter 14 of the control unit 10 and switches ON / OFF of the negative pressure air stored in the negative pressure tank 41 based on an analog output signal from the AD converter 14. It is a switching valve.
The fixing base 43 is a fixing base for fixing the inspection work 100, and is configured such that negative pressure air for fixing the inspection work 100 acts from above.

  As shown in FIG. 4, the inspection apparatus 1 configured as described above places the press part 101 of the inspection work 100 on the upper surface of the fixed base 43 and causes negative pressure air from the fixed unit 40 to act on the fixed base 43. Can be supported and fixed.

  Further, the excitation air Ka can be ejected to the excitation point Ba at the lower part of the side surface 100b which is a position away from the press part 101 of the inspection work 100 by the injection nozzle 33a of the excitation unit 30. Further, the laser head 22a of the laser unit 20 irradiates the press part 101 formed on the upper surface 100a of the inspection work 100 with the laser light Lg, receives the reflected laser light Lc reflected by the press part 101, and The vibration of the press part 101 can be detected based on the phase difference.

  At this time, since the laser head 22a (FIG. 4) irradiates the laser light Lg to the press portion 101 formed on the upper surface 100a of the inspection work 100, the reflected laser light Lc can be received with high probability.

  Specifically, as shown in FIG. 5A, when the concavo-convex processed surface 110a that is not the press portion 101 is irradiated with the laser beam Lg, for example, the laser beam Lg1 irradiated to the center of the top surface 113a is reflected as it is. Therefore, the reflected laser beam Lc1 can be received. Further, since the laser beam Lg2 irradiated to the bottom 114a of the first recess 114 is also reflected as it is, the reflected laser beam Lc2 can be received.

  However, since the laser beam Lg3 irradiated to the non-center portion of the top surface 113a is reflected by the inclined top surface 113a, the reflected laser beam Lc cannot be received by the laser head 22a (FIG. 4). In addition, the laser beam Lg4 irradiated to the bent R portion 113r between the top surface 113a and both sides 113b is also reflected by the R-shaped corner portion, so that the reflected laser beam Lc cannot be received by the laser head 22a. The bottom 114a is also irradiated with the laser light Lg from directly above by the laser head 22a. Therefore, the laser light Lg is applied to the portion at the first convex portion 113 that is hidden by the inverted C-shaped bent R portion 113r. Never happen. Therefore, on the upper surface 100a of the inspection work 100 on which the concavo-convex processed surface 110a is formed, the reflected laser light Lc can be received only at the intermediate portion of the bottom portion 114a and the central portion of the top surface 113a.

  Thus, the probability that the laser beam Lg can be irradiated from the laser head 22a and the reflected laser beam Lc reflected is low, and the convenience of the inspection apparatus is low.

  On the other hand, as shown in FIG. 5B, in the press part 101 in which the unevenness on the uneven surface 110a is crushed, the top surface 113a ′ is also flat, and therefore the top surface 113a ′ and both sides 113b ′ The reflected laser beam Lc reflected by the laser beam Lg irradiated from the laser head 22a can be received at a portion other than the bent R portion 113r ′, which is the corner portion of the laser beam (see the reflection laser receivable range in FIG. 5B). ). Therefore, the light reception probability of the reflected laser light Lc is very high.

  Subsequently, the quality inspection of the inspection work 100 using the inspection apparatus 1 will be described with reference to FIGS. 6 shows a flowchart of pass / fail inspection in the inspection apparatus 1, FIG. 7 shows an explanatory diagram of the detected vibration, and FIG. 8 shows a graph for explaining a pass / fail judgment method. More specifically, FIG. 7A shows a graph of vibration waveforms in the press unit 101 acquired by the laser unit 20, and FIG. 7B shows vibration waveforms of a non-defective product (OK) and a defective product (NG). The vibration spectrum waveform calculated from

  First, when performing a pass / fail inspection, the inspection work 100 is set on the fixed base 43 (step s1). At this time, as described above, the press unit 101 of the inspection work 100 is placed on the fixed base 43 and the fixed unit 40 is operated by a signal from the control device 11 via the AD converter 14. Then, negative pressure air is applied to fix the inspection work 100 to the fixed base 43.

  Then, after finely adjusting the positions and directions of the laser head 22a and the injection nozzle 33a according to the set inspection work 100, the electromagnetic valve 32 is controlled to direct the excitation air from the injection nozzle 33a toward the excitation point Ba. (Step s2). The ejection of the vibration air from the injection nozzle 33a is stopped by the control of the control device 11 after a predetermined time has elapsed.

  The laser unit 20 detects the vibration of the inspection workpiece 100 that vibrates due to the collision of the excitation air ejected from the electromagnetic valve 32a (step s3). In addition, as shown in FIG. 7A, the laser unit 20 detects vibration from before the start of ejection of the vibration air by the vibration unit 30 under the control of the control device 11, and is predetermined after the ejection of the vibration air. Vibration is detected along with time information until the time has passed.

  The control device 11 that has detected the vibration by the laser unit 20 performs spectrum analysis on the vibration data detected in step s3 by the vibration characteristic calculation program, and calculates the vibration data obtained as the vibration data obtained by acquiring the vibration spectrum ( Step s4).

  Then, the control device 11 reads the non-defective product average vibration property data and the defective product average vibration property data as shown in FIG. 7B from the storage device 13, and uses the determination program to obtain the acquired vibration property data calculated in step s4. Then, the quality determination is performed by comparing with the good product average vibration characteristic data and the defective product average vibration characteristic data (step s5).

  Specifically, a certain frequency range for the acquired average vibration characteristic waveform S1 based on the acquired vibration characteristic data, the good average vibration characteristic waveform Sg based on the non-defective average vibration characteristic data, and the defective average vibration characteristic waveform Sb based on the defective average vibration characteristic data. As shown in FIG. 8 which is a graph of FIG. 8, the determination by the determination program performed in step s5 is that the acquired average vibration characteristic waveform S1 is not equal to the non-defective average vibration characteristic waveform Sg for the determination frequency points Pn set at predetermined intervals. It is determined whether or not it falls within the range between the non-defective product average vibration characteristic waveform Sb.

  For example, as shown in FIG. 8, at the determination frequency point Pn, the acquired average vibration characteristic waveform S1 falls within the range between the non-defective product average vibration characteristic waveform Sg and the defective product average vibration characteristic waveform Sb. At the next determination frequency point Pn + 1, since the acquired average vibration characteristic waveform S1 exceeds the non-defective average vibration characteristic waveform Sg, it is determined as “NG”. Furthermore, “OK” is determined at the determination frequency points Pn + 2 and Pn + 3, and “NG” is determined at the determination frequency point Pn + 4 because the acquired average vibration characteristic waveform S1 is lower than the defective average vibration characteristic waveform Sb.

  In this way, the above determination is repeated at all the determination frequency points Pn set at predetermined intervals, and the ratio of the number of determination frequency points Pn of the determination result “OK” to the number of determination frequency points Pn is set. calculate.

  If the ratio of the number of determination frequency points Pn of the determination result “OK” is equal to or greater than the reference value (step s6: Yes), the control device 11 indicates that the determination result is “good” on the display device 12. (Step s7). Conversely, if the ratio of the number of determination frequency points Pn of the determination result “OK” is equal to or less than the reference value (step s6: No), the control device 11 indicates that the determination result is “defective product” on the display device 12. It is output that there was (step s8). And the result is memorize | stored in the memory | storage device 13, and this good quality inspection process is complete | finished. The inspection work 100 (A to J) is inspected by such an inspection method. The results of setting the reference value to “0.700” are shown in Table 1 below.

このように検査装置１を用いて検査ワーク１００を検査することにより、凹凸加工面１１０ａが形成された検査ワーク１００であっても、加振エアーによって加振し、その加振エアーによる振動を正確に検出して検査ワーク１００の良否を正確に検査することができる。

By inspecting the inspection workpiece 100 using the inspection apparatus 1 as described above, even the inspection workpiece 100 having the uneven surface 110a is vibrated with the vibration air and the vibration due to the vibration air is accurately detected. It is possible to accurately inspect whether the inspection workpiece 100 is good or bad.

  Specifically, since the fixing base 43 supports the inspection work 100 in the press portion 101 of the inspection work 100 in which the aluminum metal plate 110 is subjected to shape processing to form the uneven surface 110a, reliable support and fixation are realized. Can do. Therefore, the inspection work 100 is firmly fixed to the fixed base 43 and can be reliably vibrated by the collision of the vibration air. Therefore, it is possible to accurately inspect the quality of the inspection work 100 by accurately detecting the vibration caused by the vibration.

  Further, the acquired vibration characteristic, which is the vibration characteristic of the inspection work 100, is calculated from the vibration detected by the laser unit 20 by the control device 11 that executes the vibration characteristic calculation program, and is simply acquired in order to determine the quality of the inspection work 100. Compared with the case of determining from vibration data, the determination process can be performed with a low load and the quality can be determined more accurately.

  In addition, the vibration characteristics of the non-defective product are stored in the storage means 13 as the non-defective product vibration characteristics, and the quality of the inspection work 100 is determined by comparing the good product vibration characteristics with the acquired vibration characteristics. Therefore, the pass / fail judgment can be made more accurately than the pass / fail judgment.

  Further, the press unit 101 where the laser unit 20 detects vibration and the vibration point Ba where the vibration unit 30 ejects vibration air are close to each other, and a defective portion such as a crack 150 (FIG. 9) detects vibration. In the case where the position is away from the press unit 101 and the excitation point Ba, the vibration transmitted from the excitation point Ba to the press unit 101 that detects the vibration is less affected by the vibration due to the defective portion, and accurate pass / fail judgment is performed. Can not. However, in the inspection work 100, since the vibration unit 30 ejects vibration air to the vibration point Ba away from the press unit 101 that detects vibration by the laser unit 20, a defect such as a crack 150 occurs. It is possible to detect the influence of the defective portion on the vibration and perform a more accurate pass / fail judgment.

  In addition, by using the inspection apparatus 1, it is possible to make an accurate quality determination without being affected by the surrounding environment. Specifically, when a liquid or a gel-like body is ejected from the vibration unit 30 instead of the excitation air, the liquid or the gel-like body ejected toward the inspection work 100 remains on the surface of the inspection work 100. There is a risk of affecting the vibration. Further, when the liquid or gel-like body is ejected, it is necessary to remove the liquid or gel-like body remaining on the surface of the inspection work 100 after the inspection is completed. However, since the vibration air is ejected, the vibration air that is ejected and vibrates the inspection work 100 does not remain on the surface of the inspection work 100, and the vibration that is vibrated by the vibration air can be accurately detected. In addition, there is no need to remove the vibration air remaining on the surface like a liquid or gel.

  Further, since the laser unit L that irradiates the press unit 101 with the laser beam Lg, receives the reflected laser beam Lc reflected by the press unit 101, and detects the vibration of the inspection work 100 by the phase difference is used, Regardless of this, accurate vibration can be detected.

  Specifically, when the vibration of the inspection work 100 is collected and detected as sound, for example, noise such as noise around the inspection apparatus is also detected, so that accurate vibration detection is difficult. On the other hand, since the laser unit 20 that irradiates the inspection workpiece 100 with the laser beam Lg and receives the reflected laser beam Lc and detects the vibration of the inspection workpiece 100 based on the phase difference is used, noise around the inspection apparatus, etc. It is possible to detect only vibrations excited by vibration air without including vibrations due to noise.

  In addition, when the surface of the inspection work 100 other than the press unit 101 is irradiated with the laser beam Lg, the laser beam Lg is reflected in various reflection directions due to the unevenness of the surface and diffusely reflected, but the laser unit 20 is applied to the press unit 101. By irradiating the laser beam Lg toward, it becomes easy to receive the reflected laser beam Lc. Therefore, the vibration of the inspection workpiece 100 can be detected more accurately by the laser beam Lg.

In the correspondence between the configuration of the present invention and the above-described embodiment, the subject and the three-dimensionally shaped member of the present invention correspond to the inspection work 100,
Similarly,
The fluid supports vibration air,
The fluid ejection means and the gas ejection means correspond to the vibration unit 30;
The vibration detection means and the laser type vibration detection means correspond to the laser unit 20,
The fixing support means corresponds to the fixing unit 40,
The uneven member corresponds to the aluminum metal plate 110 on which the uneven surface 110a is formed,
The crushing part corresponds to the pressing part 101,
The storage means corresponds to the storage device 13,
Good product vibration characteristics correspond to good product average vibration characteristics data,
The subject vibration characteristic corresponds to the acquired vibration characteristic data,
The vibration characteristic calculation means corresponds to the control device 11 that executes the vibration characteristic calculation program in step s4.
The determination means corresponds to the control device 11 that executes the determination program in step s5,
The excitation location corresponds to the excitation point Ba,
The reflected laser light corresponds to the reflected laser light Lc,
The present invention is not limited only to the configuration of the above-described embodiment, and many embodiments can be obtained.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 11 ... Control apparatus 13 ... Memory | storage device 20 ... Laser unit 30 ... Excitation unit 40 ... Fixed unit 100 ... Inspection workpiece 101 ... Press part 110 ... Aluminum metal plate 110a ... Concavity and convexity processing surface Ba ... Excitation point Lg ... Laser beam Lc ... Reflected laser beam

Claims (5)

Fluid ejecting means for ejecting fluid toward the subject to vibrate the subject, vibration detecting means for detecting vibration of the subject that vibrates due to collision of the ejected fluid, and fixing the subject An inspection device that includes a fixed support means for supporting, and inspects the quality of the subject by the detected vibration,
The subject is formed by a concavo-convex member whose surface is formed into a concavo-convex shape by subjecting a thin plate material-like member to shape processing, and a crushing portion is formed by crushing the concavo-convex shape in a part of the surface,
The fixing support means supports and fixes the concavo-convex member at the crushing portion,
The inspection apparatus, wherein the vibration detection means detects vibration in the crushing portion. Storage means for storing the vibration characteristics of the concavo-convex member which is a non-defective product as non-defective vibration characteristics;
Vibration characteristic calculating means for calculating a subject vibration characteristic which is a vibration characteristic of the subject from the vibration detected by the vibration detecting means;
The inspection apparatus according to claim 1, further comprising a determination unit that compares the non-defective product vibration characteristics with the subject vibration characteristics to determine whether the subject is good or bad. The concavo-convex member is composed of a three-dimensional member formed in a three-dimensional shape,
The inspection apparatus according to claim 1, wherein the fluid ejecting unit ejects the fluid to a vibration-excited portion separated from the crushing portion in the three-dimensionally shaped member. The fluid is composed of a gas,
The vibration detection unit is configured to irradiate the crushing portion with laser light, receive the laser light reflected by the crushing portion, and detect the vibration of the subject based on the phase difference. The inspection apparatus according to any one of 1 to 3. A gas jetting means for jetting a gas toward the subject to vibrate the subject, and irradiating the subject that vibrates due to collision of the jetted gas with a laser beam, The subject is detected by the detected vibration using an inspection apparatus including a laser-type vibration detecting unit that receives the reflected laser beam and detects a vibration based on a phase difference thereof, and a fixed support unit that fixes and supports the subject. An inspection method for inspecting the quality of
Concavity and convexity on a part of the surface of the subject formed by a three-dimensionally shaped member obtained by subjecting a thin plate-like member to three-dimensional processing on a concave-convex member whose surface is formed into a concave-convex shape. Crush to form a crushed part,
The subject is supported and fixed by the fixing support means in the crushing portion,
From the gas jetting means, the gas is jetted to a place to be vibrated away from the crushing portion in the three-dimensionally shaped member,
Detecting vibration in the crushing portion by the vibration detecting means;
Calculating a subject vibration characteristic which is a vibration characteristic of the subject from the vibration detected by the vibration detection means;
An inspection method for determining whether a subject is good or bad by comparing the non-defective vibration characteristics, which are vibration characteristics of the three-dimensionally shaped member, which is a non-defective product stored in advance in a storage unit, with the subject vibration characteristics.

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