JP5466841B2 - Precision press machine - Google Patents

Description

  The present invention relates to a precision press apparatus capable of transferring a fine structure with a high degree of flatness, and more particularly, a substrate (a transfer object) to which a master plate (a fine structure transfer mold) having a fine uneven pattern formed on the surface is transferred. And a precision press apparatus applied to a fine structure transfer mold and a fine structure transfer apparatus for transferring and forming a fine uneven pattern on a substrate surface.

  Currently, a relatively inexpensive nano-level imprint apparatus is on sale for the fine structure transfer apparatus. Microstructure transfer devices can perform nano-level transfer, and these devices are generally called nanoimprint devices. Resin and glass are mainly used as the material of the transfer object, and there are two main types of nanoimprinting methods, the optical nanoimprinting device using ultraviolet rays and the thermal nanoimprinting device using heat, depending on the characteristics of these materials. It is classified. Examples of the transfer method include a parallel plate method using the principle of a general press device, a roller type sheet nano device, and the like.

  Here, in the parallel plate type nanoimprint apparatus, it is particularly important to increase the flatness of the press stage and the accuracy of the parallelism. Currently, the parallelism adjustment mechanism of the device can be adjusted by sliding a spherical bearing mechanism on the spherical surface of the press mechanism on either the pressure-receiving side or pressure-side of the press mechanism. A method of attaching an elastic body such as directly under the press stage can be mentioned.

  In recent years, the demand for larger size and higher task is increasing in the fine structure transfer apparatus. However, in parallel plate type nanoimprinting devices, the required pressure, required temperature, etc. vary greatly depending on the size and material of the object to be transferred, as well as the problem of flatness and accuracy reduction in parallelism as the size increases. Wide range and complicated control.

  As a press method, an apparatus using an air cylinder can be seen, but a servo press that can easily perform advanced control has become common. Since the nanoimprint apparatus itself is mainly a class of apparatus handled in the semiconductor field and is generally used in a clean room, there are not many places that employ a hydraulic cylinder in terms of dust generation and contamination.

  In a press that presses a part between two opposing surfaces, a mold holding plate including one surface is rotatably supported via a spherical bearing centered on a perpendicular to the surface, and the mold is held. A fixing means for stopping the rotation of the plate is attached, and an elastic sheet is easily attached to the one surface to provide followability (correction performance) against uneven thickness of the object to be pressed. There has been proposed a press capable of separating and taking out the pressed parts (see Patent Document 1).

  Also, the lower mold is formed with a convex spherical surface on the opposite side of the optical surface that transfers the shape to the material, and the mother mold that holds the lower mold is a concave spherical shape corresponding to the spherical shape of the lower mold The center of curvature of the convex spherical surface and the concave spherical surface is the position occupied by the pressed molded product on the central axis of the mold or the position within the thickness on the central axis of the molded product from the end surface on the central axis of the molded product. A press molding apparatus has been proposed in which the lower mold oscillates by contacting the upper mold with the upper mold during press molding, whereby the axes of the two molds coincide with each other and the inclination is automatically adjusted. (See Patent Document 2).

  Further, in nanoimprinting, a master holding means for holding a master having a pattern corresponding to information, a substrate holding means for holding a substrate to which a pattern of the master is transferred, and a fixing means for fixing between the master and the substrate, A pressure applying means for applying pressure between the master and the substrate, and an elastic body disposed between the master and the substrate holding means and arranged around the master and the substrate, and fixing between the master and the substrate by the fixing means There is provided a transfer device and a transfer method capable of applying pressure uniformly to the master and the substrate, and capable of easily separating the master and the substrate after transfer. It has been proposed (see Patent Document 3).

By the way, when a high load is required or when the transferred object is enlarged, the spherical mechanism itself is large in a structure that is received by a spherical surface as in the nanoprint technology described in Patent Document 1 or Patent Document 2. This increases the possibility of friction, wear and galling. In addition, in order to return the spherical bearing after following the inclination to its original horizontal state, an elastic body such as a spring must be used, and the mechanism in the vicinity of the press stage becomes complicated and the size is further increased. As a result, the price increases. In Patent Document 3, when a load is received by a spring, the spring becomes extremely large when a necessary load is large. In addition, there is a problem that soaking is difficult and the temperature raising time is long. In particular, in a thermal nanoprint press, it is essential that the surfaces of the pressure receiving portion and the pressure applying portion be in parallel. However, it is very difficult to process the pressurizing unit or the pressure receiving unit with high accuracy, and to process and adjust the pressure receiving unit and the guide of the pressurizing unit with high accuracy. Currently, in order to obtain a high degree of parallelism, a bearing made of a spherical body is provided directly under the pressure unit or pressure receiving unit, air or a fluid equivalent thereto, and a cushion using an elastic body, and the pressure receiving unit as a link mechanism in parallel Measures have been taken to provide a device for receiving pressure directly under the press stage. However, it is necessary to perform various work such as a heater and a cooling path on the press stage, and there is a problem that most of the mechanisms are easily increased in size and complexity.
JP 2005-52841 A JP 2003-54963 A Japanese Patent Laid-Open No. 2002-100079

  Therefore, paying attention to the difficulty of nano-level press because it is difficult to process and assemble parts of nano-level order, and because it is a press between rigid bodies, hold both on the master holding side and the substrate holding side. There is a problem to be solved in that it is possible to uniformly apply pressure to the master and the substrate by absorbing the inclination and the deflection between the guide portions that are slidably engaged.

  An object of the present invention is a nanoprint method, which is a pattern transfer technique for forming a structure having a fine shape, having a manufacturing process of a product having a fine or extremely fine processing pattern, and a structure around a press stage. Is to provide a fine structure transfer apparatus which is simple and has excellent parallelism adjustment.

In order to solve the above-described problems, a precision press device according to the present invention includes a pressure part that is slidably guided to a guide post via a cage, a pressure receiving part that is fixed to the guide post, the pressure part, and the pressure part. A press stage mounted on each facing surface of the pressure receiving unit, and a drive unit that drives the pressurizing unit via a bearing member; the bearing member abuts the pressurizing unit at a single point; This is a free bearing that makes the load applied to the pressure part uniform, and the tip of the free bearing is formed in a spherical surface that contacts the pressure part at the single point, and is driven by the drive part. At the time of pressurizing the pressurizing unit, a state in which a load is applied to the pressurizing unit at the single point is maintained, and between the pressurizing unit and the cage and / or the pressure receiving unit and the guide. between the posts, interposed a cylindrical elastic body, Is characterized by a uniform load applied to the two press stages copying face each other of the two press stages each other by tubular elastic body is deformed.

  According to this precision press apparatus, the mechanism for adjusting the parallelism is not disposed in the vicinity of the press stage, and is provided as an elastic body between the guide post and the pressurizing unit and / or the pressure receiving unit. The relative inclination and bending of the pressurizing part and the pressure receiving part are absorbed by this elastic body.

  According to the precision press device of the present invention, it is possible to realize a fine structure transfer device that has a simple structure and is inexpensive and can obtain a high degree of parallelism. Further, not only the structure of the mechanism itself for adjusting the parallelism is simple, but also the structure around the press stage is simplified. Around the press stage, a sensor for detecting the press state can be arranged, or a means for performing heat management such as a heater and a cooling path can be arranged. The parallelism can be tracked regardless of the size of the transfer object, from low pressure to high pressure.

  Hereinafter, an embodiment of a precision press apparatus according to the present invention will be described with reference to FIGS. 1 and 2. The embodiment of this precision press apparatus is applied as a fine structure transfer apparatus (nanoimprint apparatus) that performs press molding of an extremely fine pattern. 1 is basically a plurality of guide posts 4a, 4b, 4c, 4d (hereinafter collectively referred to as generic names) arranged in parallel with each other (three, preferably four as shown). The pressure receiving unit 1 is fixed to one end of the other component, and the pressure receiving unit 1 is disposed so as to face the pressure receiving unit 1 and slides on the guide post 4. And a drive unit 8 that drives the pressure unit 2 toward the pressure receiving unit 1 via a free bearing 9.

  The pressure receiving portion 1 is fixed to the guide post 4 by an adjustment nut 3. The adjusting nut 3 can be a fine screw or other screws. With the adjustment nut 3, the mounting height of the pressure receiving portion 1 relative to the guide post 4 can be adjusted at the 1/100 mm level during assembly, and the flatness of the pressure receiving portion 1 can be adjusted at the nano level even after assembly. it can. By providing three or more guide posts 4, preferably four as shown in the figure, the pressure receiving portion 1 can be uniformly guided. If the parallelism between the guides can be ensured, it is possible to use only two guide posts.

  The pressurizing unit 2 is arranged to be slidable with respect to the guide post 4 via a cage 5 and an elastic body 6. The pressurizing portion 2 is formed with a slide hole through which each guide post 4 is inserted, and the elastic body 6 is fixed in such a manner as to fit into the slide hole. As the cage 5, for example, a linear motion guide bearing or the like can be used, and high alignment can be provided until the mold and the transfer object come into contact with each other. The elastic body 6 has a cylindrical shape made of, for example, urethane resin, is provided with a flange portion on one end side, and is positioned in contact with the upper surface of the pressure unit 2. A cage 5 is attached to the elastic body 6 in such a manner that the elastic body 6 is fitted into the cylindrical shape. The cage 5 is also formed in a cylindrical shape provided with a flange portion on one end side, and the flange portion is positioned in contact with the flange portion of the elastic body 6. Since the guide post 4 is inserted into the cylindrical shape of the cage 5, the cage 5 can slide on the guide post 4, and as a result, the pressurizing unit 2 is interposed via the cage 5 and the elastic body 6. The guide post 4 can be slid.

  Press stages 7 a and 7 b are provided on the opposing surface sides of the pressure receiving unit 1 and the pressurizing unit 2, respectively. On the press stages 7a and 7b, an original plate having a microfabrication formed on the surface is arranged on one side, and a substrate is arranged on the other side. The substrate is pressed against the original plate at the time of pressing so that the original plate is fine. Processing is transferred.

  The elastic body 6 is installed on the guide post 4 in order to adjust the flatness during pressing at the nano level. As the elastic body 6, the entire ram of the pressurizing unit 2 is held by the elastic body 6, so that the press stage 7 b or the entire pressurizing unit 2 is held by the elastic body 6, and the inclination and deflection of the pressurizing unit 2 are maintained. It absorbs and imitates the pressure receiving part 1.

  As the operation of this precision press apparatus, the pressurizing unit 2 is guided by the guide post 4 by the cage 5 and the elastic body 6, and the elastic body 6 is not distorted when swinging until it is pressurized. Highly accurate alignment. A drive unit 8 that drives the pressurizing unit 2 presses the pressurizing unit 2 via a free bearing 9. The free bearing 9 has a spherical tip, and the pressure receiving portion 1 and the pressurizing portion 2 follow in the press operation, that is, even when press stages 7a and 7b described later follow the elastic deformation of the elastic body 6. It is possible to apply a load to the pressurizing unit 2 at a single point. At the time of pressurization, the elastic body 6 undergoes elastic deformation, so that the relative inclination and bending of the pressure receiving unit 1 and the pressurizing unit 2 are absorbed. Accordingly, the copying of the pressure receiving portion 1 and the pressing portion 2 is maintained, a uniform load is applied to the press stage 7, and press molding can be performed with high flatness accuracy.

  The pressurizing unit 2 and the drive unit 8 are not fixed by bolts, are attached in a state where they can swing to some extent, such as stripper bolts, dampers, or springs, and are mounted on free bearings 9. Although the free bearing 9 is used as the interposing means for contacting the driving unit 8 and the pressurizing unit 2, it can be replaced with a free joint provided with a spherical bearing combining a spherical body and a spherical surface. is there.

  In this precision press apparatus, a servo motor, an air cylinder, a hydraulic cylinder, or the like can be used as a drive source of the drive unit 8.

  In this precision press apparatus, as the elastic body 6, one type or a plurality of types of elastic bodies having different elastic moduli can be used simultaneously. FIG. 3 is a cross-sectional view showing a main part of a precision press apparatus that simultaneously uses two types of elastic bodies 6 a and 6 a ′ having different elastic moduli as the elastic body 6. In this example, the elastic bodies 6a and 6a 'are configured as inner and outer double cylinders in a nested manner. By using such a plurality of types of elastic bodies, it is possible to respond to changes in the required pressure depending on the type of material for press molding and to follow the inclination of the mold. The elastic body 6 may be made of a resin other than urethane (silicon, polyimide, fluorine, polyethylene, etc.), a spring, or a damper.

  In this precision press apparatus, the shape of the elastic body 6 has been described as a cylindrical body with a flange having a flange formed at one end, but is not limited thereto, and may be a cylindrical body such as a cylindrical shape, a circular shape, or a square shape. It is also possible to form an elastic body that can be copied by the pressure receiving unit 1 and the pressure unit 2.

  In this precision press apparatus, the contact portion where the free bearing 9 contacts the pressurizing unit 2 when the drive unit 8 presses the pressurizing unit 2 is a single point, but a plurality of points are evenly arranged. It can also be configured. Even when a plurality of points are arranged, the points are arranged uniformly, so that the load is uniformly applied to the pressure unit 2 and the press stage 7b.

  FIG. 4 is a longitudinal sectional view showing another embodiment of the precision press apparatus according to the present invention. In the embodiment shown in FIG. 4, as compared with the embodiment shown in FIG. 1, the elastic bodies 6 </ b> A and 6 </ b> B for following the inclination of the forming die of the press stages 7 a and 7 b with respect to the guide post 4 are pressurized. Instead of being provided in the portion 2, the pressure receiving portion 1 is provided. The elastic bodies 6A and 6B are configured as flange-type cylindrical bodies and are fixed to the pressure receiving portion 1 by being sandwiched between the adjusting nuts 3a and 3a '. In this embodiment, the relative inclination and the bending of the pressure receiving part 1 and the pressure applying part 2 are absorbed by the elastic bodies 6A and 6B provided only on the pressure receiving part 1 side. The pressurizing unit 2 is slidable with respect to the guide post 4 via the cage 5. Other configurations are the same as those of the embodiment shown in FIGS.

  FIG. 5 is a longitudinal sectional view showing still another embodiment of the precision press apparatus according to the present invention. In the embodiment shown in FIG. 5, compared with the embodiment shown in FIG. 1, the elastic body 6 for following the inclination of the mold of the press stages 7 a and 7 b with respect to the guide post 4 is provided with the pressurizing unit 2. In addition to being provided in the pressure receiving portion 1, the pressure receiving portion 1 is also provided. On the pressure receiving part 1 side, the elastic bodies 6A and 6B are configured as flange-shaped cylindrical bodies, and are fixed to the pressure receiving part 1 by being sandwiched between the adjusting nuts 3a and 3a '. In this embodiment, the elastic bodies 6a and 6b are also provided on the pressing part 2 side. Therefore, the relative inclination and the bending of the pressure receiving part 1 and the pressurizing part 2 are absorbed by the elastic bodies 6A and 6B and the elastic bodies 6a and 6b provided in the pressure receiving part 1 and the pressurizing part 2, respectively. The pressurizing unit 2 is slidable with respect to the guide post 4 via the cage 5. Other configurations are the same as those of the embodiment shown in FIGS.

  FIG. 6 is a longitudinal sectional view showing still another embodiment of the precision press apparatus according to the present invention. In the embodiment shown in FIG. 6, in the embodiment shown in FIG. 3, the drive unit 8 and the free bearing 9 are moved from the side that is the pressurizing unit 2 in the example shown in FIG. 3 to the side that is the pressure receiving unit 1. Has been. Therefore, in the embodiment shown in FIG. 6, reference numeral 1 indicates a pressurizing part as a movable part, and reference numeral 2 indicates a pressure receiving part as a fixed part. In addition, the movable part moved with the drive part 8 can be installed in any direction of up and down, right and left, and press molding is possible in any case.

  In the precision press apparatus, a thermocouple, a heater, a cooling path, a stamper, and the like can be attached to the press stages 7a and 7b. That is, in this precision press apparatus, the relative inclination and bending between the pressure receiving portion 1 and the pressure portion 2 are not absorbed by the press stages 7a and 7b and their surroundings, but the guide post 4 and the pressure portion 2 are not absorbed. And / or absorbed between the pressure receiving unit 1 and the press stages 7a and 7b and the space around the press stages 7a and 7b have a margin, and the degree of freedom in arranging thermocouples, heaters, cooling paths, stampers, etc. increases. A great margin can be given in the design of various types of precision press equipment.

  FIG. 7 shows a front view of a nanoprint apparatus to which the precision press apparatus according to the present invention is applied. In FIG. 7, 1 is a pressure receiving portion fixed to the guide post 4, 2 is a pressurizing portion that is slidably guided to the guide post 4 via a cage, and 3 is an adjustment nut, which is higher than the guide post 4. Fixed to be adjustable. 5 is a cage, and 16 is an operation panel. The pressure of the pressurizing unit and the pressure receiving unit in the chamber is increased / decreased, the temperature is increased / decreased, the chamber is vacuum controlled, and menus and recipes are provided. Set automatic temperature control. 17 is a heater temperature controller for the pressure receiving unit and the pressurizing unit, 18 is a pressure indicator for displaying the pressure of the pressurizing unit, and 19 is a display for displaying the degree of vacuum in the chamber. Reference numeral 20 denotes a vacuum chamber, which is a chamber in which the interior is evacuated to perform transfer from the original plate to the substrate. Reference numeral 21 denotes a frame or cover that prevents dust and the like from entering the apparatus. A caster 22 is used when moving the entire apparatus. Reference numeral 23 denotes an adjuster for adjusting the height in order to obtain a level when the apparatus is installed. Reference numeral 24 denotes an anchor seat which is fixed to the base when the levelness is adjusted by adjusting the height of the adjuster. Reference numeral 25 denotes an operation button, which has a power ON / OFF function.

8 and 9 show the structure of the press stages 7a and 7b of the apparatus of the present invention. FIG. 8 is a sectional view of the press stage, and FIG. 9 is a perspective view.
In FIG. 8, 10 is a top plate, 11 is a cooling / heating plate, and a heater 15 and a cooling passage are installed in the cooling / heating plate 11. Reference numeral 12 denotes a heat insulating material connected to the cooling and heating plate 11 so that heat heated by the heater 15 is not dissipated. In addition, a cooling hole is provided in the heat insulating material 12, and the cooling refrigerant returns from another hole provided in the heat insulating material 12 again via the cooling and heating plate 11. In FIG. 8, 13 is a cooling medium inlet and 14 is a cooling medium outlet. Examples of the cooling medium include air, gas, water, and oil.

  The heaters 15 are arranged on the cooling and heating plate 11 at approximately equal intervals, and cooling passages (tubes) are also arranged at substantially equal intervals between the heaters. By arranging them at regular intervals in this way, there is an effect of making the heat distribution on the top plate uniform, that is, an effect of eliminating temperature unevenness. As shown in FIG. 9, the heater 15 uses a linear heater, is connected to the power supply line from one side, and controls the temperature rise and fall by turning the power on and off.

  In addition, the top plate 10 and the cooling and heating plate 11 have been made of stainless steel, but since the thermal conductivity is high by adopting a Cu alloy, the temperature of the press stage can be controlled in a short time, and the transfer time can be reduced. Can be shortened, and the efficiency is improved.

  FIG. 10 shows a plan view of the cooling and heating plate 11 of the press stage of the apparatus of the present invention. In FIG. 10, reference numeral 15 denotes a heater, 13 and 14 which are blank portions indicate cooling passages, 13 indicates a cooling medium inlet, and 14 indicates a cooling medium outlet. The cooling medium is inserted from the upper left cooling medium inlet, the medium exiting from the upper right cooling medium outlet is inserted from the right side of the second stage cooling passage, and the refrigerant discharged from the left side of the second stage cooling path is cooled by the third stage. In this configuration, the cooling medium is sent in the cooling passage sequentially. With such a configuration, it is possible to cool the top plate uniformly and in a short time.

  FIG. 11 shows another embodiment in which the flow of the cooling medium is changed. The configuration of FIG. 11 includes a first-stage cooling passage (blank portion in the drawing), a third-stage cooling passage (blank portion in the drawing), and a fifth-stage cooling passage (blank portion in the drawing) from the left side. The coolant flows, and the cooling medium flows from the right side to the second-stage cooling passage (blank portion in the figure), the fourth-stage cooling passage (blank portion in the figure), and the sixth-stage cooling passage (blank portion in the figure). It is the structure which flows in. Thus, the cooling effect of the press stage can be enhanced by flowing the cooling refrigerant from the left and right. In addition, there is an effect of reducing the temperature unevenness of the top plate.

The apparatus of the present invention has been researched and developed as a technique of thermal nanoimprint and optical nanoimprint, which is a technique for forming a concavo-convex pattern of nanoscale (nanometer is one billionth of a meter). The thermal nanoimprinting device related to this development has improved the heating / cooling mechanism to suppress the temperature variation in the surface of the transfer stage, while greatly reducing the 120 ° temperature rise / fall time to 4 minutes, as well as the device structure and components. As a result, the nanoimprint device of the same level has been reduced in size and price. By using this apparatus, a nanoscale structure can be formed within 10 minutes for workpiece sizes up to Φ150 mm. The specifications of this nanoimprinting device are as follows.

  Nanoimprint technology, which is attracting attention as one of the next generation microfabrication technologies, has been researched and developed for practical application mainly in Japan, the US and Europe. Nanoimprinting is a processing technique for forming a concavo-convex pattern by pressing a mold (also referred to as a mold, a stamper, or a template) formed with a nanoscale concavo-convex pattern against a transfer material such as a polymer. Development of semiconductors, optical devices, next-generation storage devices, biodevices, and the like has been promoted using this technology, and improvement of productivity has become an issue for practical use. In particular, thermal nanoimprinting is a technique for pressing a mold onto a material to be softened by heating to a glass transition temperature or higher, so that the temperature rise / fall time is a bottleneck for high throughput.

  Against this background, a new thermal nanoimprinting device was developed with the goal of increasing throughput. A significant review of the heater structure and components based on thermal analysis has prevented temperature variations during heating and shortened heating time. Furthermore, the cooling time has been significantly shortened by utilizing the cooling control technology that has been cultivated in the mold for injection-molded optical disks. In addition, by redesigning the vacuum chamber structure of the conventional machine, the internal volume of the chamber can be reduced, and the apparatus can be downsized and the deaeration time can be greatly shortened.

  Further, by making full use of the precision processing technology of the plastic molding mold possessed by the present applicant, the transfer stage surface is a high-precision stage with a flatness of several μm and a surface accuracy of several nm. Furthermore, in consideration of work such as mold setting work and transfer stage exchange, the work take-out portion is made larger than that of the conventional machine, thereby improving maintainability.

  The feature of the apparatus of the present invention is that the heating / cooling mechanism is improved, and the industry's top class heating / cooling time 4 (60 ° → 180 ° → 60 °) is realized. Furthermore, the device structure and parts have been reviewed, and the device of the same level (Φ6 inch) has become smaller and less expensive. Regarding the transfer size (width, length, sheet thickness), this apparatus is compatible with max 6 inch Φ. The sheet thickness is not questioned. In addition, double-sided transfer is possible. The transfer material can be transferred to a thermoplastic resin such as PS (polystyrene), PC (polycarbonate), or PMMA (PMME) or a thermosetting resin.

  The maximum heating temperature is 300 ° C. The cooling method employs two methods of water cooling (rapid cooling) and N2 (nitrogen) gas cooling (removal cooling) in order to perform temperature adjustment with high accuracy. The degree of vacuum is 1.33 kPa (10 Torr) or less. The maximum load of this device is 98 kN (10 t). Although the transfer speed depends on the pattern shape to be transferred, the transfer can be performed in 10 minutes or less in the basic process. Further shortening is possible by optimizing process conditions.

  As a pressurizing method, a two-stage pressure control method is employed in order to transfer a fine nanostructure with high accuracy. The two-stage pressurization is a pressurization method in which the first pressurization is performed by torque control of the servo motor accompanying the stage ascending, and then the main pressurization is performed.

  For transfer to a large area, this apparatus is compatible with a maximum of Φ6 inch, but in the development of the apparatus by the present applicant so far, there is a record of transfer to a maximum Φ12 inch. The transfer with a high aspect ratio is usually a transfer with an aspect ratio of 2 or less. As the minimum transfer size, there is a record of transferring a dot pattern of Φ70 nm and H110 nm as the minimum transfer size. In general, it is considered that the through hole cannot be processed using a nanoimprint technique. Since the transfer accuracy may be lowered due to the temperature distribution of the material to be transferred and the influence of bubble accumulation on the mold-shaped concave pattern, this apparatus uses a vacuum atmosphere. In addition, an automatic peeling mechanism can be provided by providing an automatic peeling mechanism as an option.

  The transfer material can be a thermoplastic material or a thermosetting resin, but a crystalline resin can be transferred although it is difficult to transfer. As for the transfer to the resin applied on the substrate, it is possible to apply a thermoplastic resin or a thermosetting resin to a Si (silicon) substrate or a glass substrate and transfer it. The mold material is Si (silicon), Ni (nickel), quartz, or the like. The mold can be manufactured using a semiconductor manufacturing technique such as photolithography or an electron beam direct drawing method.

  This precision press machine can perform parallel and uniform pressurization regardless of the applied pressure and the size of the transfer object, and is fine or super-high in the fields of optical devices, display devices, biodevices, storage media, etc. A fine pattern can be transferred to the substrate.

1 is a schematic cross-sectional view showing an embodiment of a precision press device according to the present invention. The schematic perspective view of the precision press apparatus shown in FIG. The fragmentary figure which shows the elastic body installation of the precision press apparatus shown in FIG. 1, and another elastic body installation. The schematic sectional drawing which shows another embodiment of the precision press apparatus by this invention. The schematic sectional drawing which shows another embodiment of the precision press apparatus by this invention. The schematic sectional drawing which shows another embodiment of the precision press apparatus by this invention. 1 is a schematic view of a main body of a nanoprint apparatus according to the present invention. The schematic of the pre-stage of the precision press apparatus by this invention. The bird's-eye view of the prestige of the precision press apparatus by this invention. The top view of the press stage of this invention. The top view of another press stage of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pressure receiving part 2 Pressurizing part 3 Adjustment nut 4 Guide post 5 Cage 6 Elastic body 7 Press stage 8 Drive part 9 Free bearing 10 Top plate 11 Heating / cooling plate 12 Heat insulating material 13 Cooling medium inlet 14 Cooling medium outlet 15 Heater 16 Operation Panel 17 Heater temperature controller 18 Pressure display device 19 Vacuum degree display 20 Vacuum chamber 21 Frame 22 Caster 23 Adjuster 24 Anchor seat 25 Operation button

Claims (8)

A pressure part that is slidably guided to the guide post via a cage; a pressure receiving part that is fixed to the guide post; a press stage that is mounted on each opposing surface of the pressure part and the pressure receiving part; and A driving unit for driving the pressurizing unit via the bearing member;
The bearing member is a free bearing that abuts against the pressurizing portion to apply a load, and a tip portion of the free bearing is formed in a spherical surface that abuts the pressurizing portion at a single point, When applying pressure to the pressurizing unit by driving the drive unit, maintaining a state of applying a load at the single point to the pressurizing unit,
A cylindrical elastic body is interposed between the pressurizing unit and the cage and / or between the pressure receiving unit and the guide post, and both the cylindrical elastic bodies are deformed to deform the both. A precision press apparatus characterized in that the surfaces of the press stage follow each other and the load applied to both the press stages is made uniform . In the precision press apparatus of Claim 1,
The precision press apparatus characterized in that two or more guide posts are arranged in parallel around each other and around the press stage . In the precision press apparatus of Claim 1 or 2,
The elastic body is height-adjusted between the pressurizing part and the cage for slidingly guiding the pressurizing part to the guide post and / or the pressure receiving part and the pressure receiving part with respect to the guide post. It is mounted between the adjustment nuts that can be fixed, absorbs the relative inclination between the pressure part and the pressure receiving part during pressurization, and enables press molding with high flatness accuracy. <br/> Precision press machine characterized by In the precision press apparatus as described in any one of Claims 1-3,
The precision press apparatus characterized in that the elastic body is composed of one type or a plurality of types of elastic bodies having different elastic moduli . In the precision press apparatus as described in any one of Claims 1-4,
The precision press apparatus characterized in that the elastic body is formed in a cylindrical body having a flange at one end and having various cross-sections such as a circle, an ellipse, a square, and a polygon . In the precision press apparatus as described in any one of Claims 1-5,
The precision press device, wherein the cage for slidingly guiding the pressurizing portion to the guide post is a linear guide bearing . In the precision press apparatus as described in any one of Claims 1-6,
A precision press apparatus characterized in that in order to obtain parallelism by installing the elastic body in the pressurizing unit or the pressure receiving unit, the movable direction can be installed freely in the vertical and horizontal directions . In the precision press apparatus as described in any one of Claims 1-7,
One of the press stages is mounted with an original plate serving as a transfer source having a surface formed with an ultrafine pattern, and the other press stage is mounted with a substrate serving as a transfer destination of the ultrafine pattern of the original plate. A precision press apparatus characterized by being applied to a fine structure transfer apparatus that performs press molding of the ultrafine pattern of the original plate onto the substrate .

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