JP5458563B2 - Storage and entry / exit methods - Google Patents

Description

  In the present invention, loading and unloading of a load such as FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements is continuously performed with a transport vehicle such as a vehicle, for example, storage of a stocker or the like. The present invention relates to a technical field of storage and a method for loading and unloading the storage.

  As a conveyance system provided with this kind of storage, for example, there is a system provided with a conveyance vehicle that conveys a load and a storage provided with a plurality of ports to which the load is transferred. Specifically, for example, the transport vehicle moves directly above one of the plurality of ports and transfers (that is, enters) the held load to one port. After this, it moves directly above another port that is different from one of the plurality of ports, and loads (ie, unloads) the load on the other port to the transport vehicle (see Patent Document 1).

JP 2007-005503 A

  However, according to the transport system described in Patent Document 1 described above, the transport vehicle performs warehousing by the first movement and performs warehousing by the subsequent second movement. That is, if the warehousing and the warehousing are continuously performed, the carriage moves from the position corresponding to one port for warehousing to the position corresponding to the other port for warehousing during the warehousing and unloading. Therefore, there is a technical problem that the conveyance efficiency is lowered.

  The present invention has been made in view of the above-described problems, for example, and it is an object of the present invention to provide a storage that enables efficient loading and unloading of goods and a method for loading and unloading such a storage. .

In order to solve the above-described problem, the storage of the present invention is such that the receipt of one load and the delivery of another load are continuously performed between the one load and the other load with a transport vehicle capable of moving up and down. And a plurality of shelf parts arranged in the casing or frame and capable of accommodating the one load and the other load, and an outer wall of the casing or wherein is set on the outside of one doorway provided in the outer frame of the frame, said a warehousing port the one load is mounting location from the transportation vehicle, wherein the outer wall or the one entrance is provided alongside and to the one entrance and vertical to the outer frame is set outside the other entrance provided a goods issue port which the other load to the transport vehicle is Ri issued taken, the one doorway Between the inside of the housing or the frame and the warehousing port. The other load is moved horizontally between the inside of the casing or the frame and the delivery port via the first outside / inside moving means for horizontally moving one load and the other entrance / exit. A second outside / inside moving means .

  According to the storage of the present invention, for example, when the receipt of one load and the delivery of another load are continuously performed, the one shelf portion and the other shelf portion are selectively horizontally moved. Here, “selective” means that, for example, at the time of warehousing, one shelf portion is selected as an object to be moved to the outside of the housing or the frame in order to function as a warehousing port, and vertical transfer by a transport vehicle is not hindered. This means that another shelf portion is selected as a target to be moved to the inside of the housing or the frame. Also, for example, at the time of delivery, contrary to the time of entry, other shelf parts are selected as objects to be moved outside the housing or frame in order to function as an exit port, and vertical transfer by a transport vehicle is not hindered. It also means that one shelf portion is selected as an object to be moved to the inside of the housing or frame. “Vertical transfer” means that, for example, one load and another load are moved up and down in the vertical direction to transfer between the transport vehicle and the storage port or the storage port. In the outer / inner moving means for performing the horizontal movement described above, for example, one shelf portion is provided above the other shelf portion in the vertical direction (that is, one shelf portion corresponds to “one shelf portion”). In this case, one shelf portion is moved horizontally and retracted from above the other shelf portion so as not to prevent the vertical transfer between the transport vehicle and the other shelf portion. On the other hand, for example, when the other shelf portion is provided above the one shelf portion in the vertical direction (that is, the other shelf portion corresponds to “one shelf portion”), the transport vehicle and the one shelf portion are provided. In order not to prevent the vertical transfer between them, the other shelf part is moved horizontally and retracted from above one shelf part. The outer / inner moving means is a first outer / inner moving means for one shelf part that selectively moves one shelf part horizontally and another shelf part that selectively horizontally moves another shelf part. And a second outside / inside moving means.

  Specifically, at the time of warehousing, for example, a single load such as FOUP is conveyed to the warehousing port by a transport vehicle such as OHT (Overhead Hoist Transport). Here, the “transport vehicle” is, for example, an overhead traveling vehicle, a gripper mechanism that holds a load, a hoist mechanism that lifts and lowers the load together with the gripper mechanism, and a load function that accommodates the gripper mechanism and the hoist mechanism and has a traveling function. It has a body part.

  One shelf part that functions as a warehousing port before or after the conveyance of such a conveyance vehicle is, for example, by an outer / inner movement means having a slider mechanism, a conveyor mechanism, etc. It is moved to the outside of the housing or the frame through one doorway provided in the outer frame. That is, one shelf portion is in a state of protruding out of the housing or frame. In this state, one load is typically transferred vertically or placed from the stopped transport vehicle to the warehousing port, which is one shelf portion moved to the outside of the housing or frame. . Specifically, for example, one load is lowered from the upper position of the warehousing port to the warehousing port by the lifting / lowering operation of the hoist mechanism or the like while being held by the gripper mechanism or the like in the transport vehicle. Furthermore, it is transferred to the warehousing port by the releasing operation of the gripper mechanism or the like.

  When the transfer to the warehousing port is completed in this manner, this time, the one shelf portion that functions as the warehousing port is moved to the inside of the housing or the frame by the outer / inner moving means. Subsequently, one load is moved from one shelf portion to a desired shelf portion among a plurality or a plurality of shelf portions by, for example, driving means including a vertical drive unit and a horizontal drive unit. That is, it is conveyed in the storage following the warehousing. Such in-storage conveyance may be performed in parallel with or in parallel with the operation relating to the delivery described below.

  On the other hand, at the time of delivery, other loads to be delivered such as FOUP, for example, in parallel with or in parallel with the operation related to the above-mentioned receipt, are driven from a desired shelf part among a plurality or a plurality of shelf parts by the driving means. Then, it is transported in the storage to another shelf part that functions as a delivery port. Subsequently, the other shelf portion is moved by the outer / inner movement means through the other wall of the housing or the frame provided on the outer wall of the housing or the outer frame of the frame and in the vertical direction with one doorway. Moved outward. In this state, the other load is moved to the outside of the casing or the frame, and has just finished entering the warehousing port, for example, from the warehousing port, which is the other shelf portion positioned in the vertical direction of the warehousing port described above. Typically, the transfer vehicle is vertically transferred or placed in the same manner as at the time of warehousing. Specifically, for example, other loads are held by a holding operation of a gripper mechanism or the like. Subsequently, the hoist mechanism and the like are moved up and down from the unloading port to a position above the unloading port by the lifting and lowering operation of the hoist mechanism and the like, and are transferred to the transport vehicle. Thereafter, another load transferred to the transport vehicle can be transported from the transport vehicle by being housed in the main body of the transport vehicle together with the gripper mechanism and the hoist mechanism, for example.

  Regarding the FOUP and other loads, the terminology defines two loads, one load that should be received and the other load that should be released, but one load and the other load as the same load, For example, the loading and unloading of one load may be performed continuously.

  For the combination of the warehousing port and one shelf part, and the combination of the evacuating port and other shelf part, the port and the shelf part are not handled separately, and one of the warehousing port and the shelf part, and the exit port and the shelf part. One may be used for both.

  As a result of the above, with respect to the warehousing port and the warehousing port (in other words, one shelf portion and the other shelf portion) selectively arranged in the same vertical direction, the transport vehicle can perform warehousing and warehousing by vertical transfer. It becomes possible to carry out continuously. At this time, as in the background art described above, it is not necessary to move from the warehousing port to the position corresponding to the warehousing port between the warehousing and the warehousing, and after placing one load from the trolley to the warehousing port. Then, at the same position, it is possible to take out another load from the delivery port to the transport vehicle. In addition, the operation relating to warehousing and the operation relating to unloading are performed at least partially in parallel in the storage, by means of outside / internal movement means independent of the means for moving one load and other loads in the storage. Is possible. Therefore, it is possible to shorten the time for loading / unloading and efficiently load / unload.

In one aspect of the storage of the present invention, the first outer / inner moving means is configured to be horizontally movable in a state where the one load is placed on one shelf portion included in the plurality of shelf portions. The second outside moving means is configured to be horizontally movable in a state where the other load is placed on the other shelf portion included in the plurality of shelf portions, and the one shelf The portion and the other shelf portion are arranged so that the transport vehicle is positioned below a track for transporting the one load and the other load when moved to the entry port or the exit port , respectively. The

  In this aspect, at the time of warehousing, for example, one shelf part at the uppermost stage is moved to the outside of the housing or the frame via one adjacent entrance / exit by the outer / inner moving means, and one shelf part is moved to the warehousing port Function as. Subsequently, the transport vehicle is stopped above the warehousing port, and one load is received from the transport vehicle to the warehousing port. Here, “adjacent to one doorway” indicates, for example, a shelf portion nearest to one doorway among a plurality of shelf portions provided in one stage.

  On the other hand, at the time of delivery, for example, another shelf part located immediately below one shelf part is moved to the outside of the housing or the frame via another adjacent entrance, and the other shelf part functions as an exit port. . Subsequently, another load is unloaded from the unloading port to the transport vehicle immediately after the loading.

  In this way, by providing one shelf part and another shelf part at the uppermost stage and one stage below the uppermost stage, the ascending / descending distance of one load and the other load by vertical transfer is minimized, and It is possible to shorten the loading time. Further, by providing one shelf part and another shelf part adjacent to one entrance and another entrance, the horizontal movement distance of one shelf part or other shelf part by the outer / inner moving means is minimized. The travel time can be shortened. Therefore, it is possible to further reduce the time required for loading and unloading and to load and unload more efficiently.

  Contrary to the above-described example, the same effect as in the above-described example can be obtained even if one shelf portion is provided in the lowermost step and the other shelf portion is provided in the uppermost step.

In another aspect of the storage of the present invention, the transport vehicle transports the one load or the other load in a state where the one load or the other load is housed therein, and the one shelf portion or the other shelf portion is One of the one load and the other load is placed between the transfer vehicle for placing the one load or taking out the other load when moved to the entry port or the exit port . Has a distance shorter than the height of the minute.

  In this aspect, at the time of warehousing or at the time of warehousing, and at the time of continuous warehousing, for example, the transport vehicle is stopped at a stop position set in advance for the storage. Subsequently, one shelf portion is moved to the warehousing position functioning as the warehousing port by the outer / inner moving means. These stop position and warehousing position are located below the track, specifically, in the same vertical direction. Thereby, after placing one load on the warehousing port, the transport vehicle can continuously take out another load from the warehousing port at the same position.

  In another aspect of the storage of the present invention, the transport vehicle transports at least a part of the one load or the other load at the time of transport, and the one shelf portion or the other The shelf portion of the one load or the other load is placed between the shelf portion and the carrier vehicle on which the one load is placed or the other load is taken out when the shelf portion is moved to the outside. A distance shorter than the height of

  In this aspect, for example, on the side surface corresponding to the direction in which the one shelf portion and the other shelf portion are horizontally moved, at least a part of one load or another load (specifically, the main body of the transport vehicle) , The top of one load or the other load) is formed. For example, one shelf portion is provided at the top. In this case, at the time of warehousing, for example, the transport vehicle on which one load is to be placed is stopped at a stop position corresponding to the storage, and one load is loaded from the transport vehicle to the warehousing port (that is, one shelf portion). Reprinted. By this transfer, one load is lowered and its bottom surface comes into contact with the upper surface of the warehousing port, but the upper portion of one load is left inside the transport vehicle. Subsequently, the warehousing port is moved to the inside of the housing or the frame with one load placed thereon. At this time, the upper part of the one load is moved to the outside of the transport vehicle through the opening of the main body. Is done.

  On the other hand, for example, another shelf portion is provided at the uppermost stage. In this case, at the time of delivery, for example, a transport vehicle from which another load is to be taken out is stopped at a stop position corresponding to the storage. Subsequently, the exit port (that is, another shelf portion) is moved to the outside of the casing or the frame with another load placed thereon, and at this time, the upper part of the other load is opened to the main body. It moves to the inside of a conveyance vehicle via. Subsequently, another load is transferred from the delivery port to the transport vehicle. By this transfer, another load is raised and its bottom surface is separated from the upper surface of the exit port, but the lower portion of the other load is not accommodated inside the transport vehicle.

  Thus, for example, at the time of transfer, one load or another load is placed so that the upper part of one load or another load is located inside the transport vehicle, that is, between the transport vehicle and the entry port or the exit port. The entry port or the exit port may be installed at a distance shorter than the height of one load or another load with respect to the transport vehicle so that the lower part of the load is located. This makes it possible to configure the storage to be as high as possible with respect to the track, and to accommodate a large number of one load or other loads. In addition, when the height of the track is adjusted with respect to the warehousing port or the warehousing port, the ascending / descending distance due to the longitudinal transfer becomes the shortest, and the transfer time can be shortened.

  In another aspect of the storage of the present invention, the plurality of shelf parts include a plurality of a pair of shelf parts composed of the one shelf part and the other shelf part in a form arranged along the track, The pair of shelf portions are provided such that the distance between the centers of the two adjacent pair of shelf portions is greater than the length of the transport vehicle along the track.

  In this aspect, for example, two transport vehicles simultaneously enter a warehouse with respect to two warehouse ports arranged so as to be adjacent to each other along the track. Specifically, for example, the first transport vehicle enters the first warehousing port on the downstream side of the track, and simultaneously with this warehousing, the second warehousing port on the upstream side of the track. The second transport vehicle following the first transport vehicle enters the warehouse. In this case, the distance between the centers of these two warehousing ports is larger than the length in the direction along the track of one transport vehicle. Thereby, it is possible to stop the first transport vehicle above the first storage port and stop the second transport vehicle above the second storage port. Therefore, it becomes possible for a plurality of transport vehicles to enter or exit the storage at the same time via a plurality of entry / exit ports, and more efficiently than when only a pair of shelves are provided. The goods can be issued.

In another aspect of the storage of the present invention, when the one load is to be received, the first outside / internal movement means is controlled to horizontally move the one shelf portion to the storage port , After the one load is placed on the one shelf portion, the first outer / internal movement means is controlled so as to horizontally move the one shelf portion to the inside, and the other load is discharged. In a case where the other load is placed, the second outer / inner moving means is controlled to horizontally move the other shelf portion to the delivery port , and the other load is taken up. Later, it further comprises control means for controlling the second outer / inner moving means so as to horizontally move the other shelf portion inwardly.

  According to this aspect, when one load is to be received, the one shelf portion is placed outside the housing or the frame by the outer / inner moving means under the control of the control means having a controller, a processor, a memory, and the like. It can be moved horizontally and can function as a storage port that can be placed immediately. That is, one load can be stored in the storage through the storage port protruding outward from the housing or frame. However, in this case, it is assumed that there is no obstacle including, for example, the exit port above the entrance port. Further, under the control of the control means, the one shelf portion on which one load is transferred is horizontally moved to the inside of the housing or the frame by the outer / inner movement means. Therefore, it is possible to carry in the storage of the one load that has been received without delay from the transfer to the storage port.

  On the other hand, when another load should be delivered, the other shelf portion on which the other load is placed is moved horizontally to the outside of the housing or the frame by the outer / inner moving means under the control of the control means. Thus, it can function as a delivery port that can be taken out immediately. That is, another load can be delivered from the storage through the delivery port protruding outward from the housing or frame. However, in this case, it is assumed that there is no obstacle including the warehousing port, for example, above the warehousing port. Further, under the control of the control means, the other shelf portion from which another load is taken out is moved horizontally inside the casing or the frame by the outer / inner movement means. Therefore, it is possible to carry in the storage of other loads to be delivered next without delay from transfer to the transport vehicle.

  In this way, one shelf part and the other shelf part are horizontally moved to the inside and outside of the housing or the frame, so that the goods can be quickly and efficiently stored and received at the time of unloading after receiving. It is possible to efficiently carry in the storage of one loaded cargo or carry in the storage of another cargo to be delivered next.

  In this aspect, the mounting portion having a first mounting surface capable of supporting the one load and the other load from the bottom side, and the mounting portion is moved between the plurality of shelf portions. And a driving means that is capable of, when the one load is to be received, after the one shelf portion has been horizontally moved to the inside, the one load by the placement unit. When the other load is to be delivered by controlling the driving means to move the one shelf part to a shelf part other than the one shelf part among the plurality of shelf parts, Thus, the driving means may be controlled so as to move the other load from a shelf portion other than the other shelf portion to the other shelf portion among the plurality of shelf portions.

  According to this configuration, for example, when one load or another load is transported in the storage, a plurality of mounting portions are provided by a driving unit having, for example, an actuator, a slider, a motor, and a robot arm under the control of the control unit. Moved between each other's shelf parts. Specifically, for example, after one shelf portion supporting one load is horizontally moved to the inside of the housing or the frame, one load on the one shelf portion is made to be one shelf portion by the placement unit. It is moved to other shelf parts. Here, the “shelf part other than one shelf part” is, for example, a storage shelf part or another shelf part that functions as a delivery port, and when moved to the storage shelf part, Is at least temporarily accommodated in the storage. In this way, when one loaded cargo is immediately transferred from one shelf portion to a predetermined shelf, it immediately follows the first transport vehicle immediately after the first transport vehicle has finished warehousing. The second transport vehicle can be used for warehousing. Thereby, goods can be received efficiently and continuously.

  On the other hand, before the other shelf portion is horizontally moved to the outside of the housing or the frame, the other load placed on the shelf portion other than the other shelf portion by the placement portion is changed to the other shelf portion. Moved to. Here, the “shelf part other than the other shelf part” is, for example, a storage shelf part or one shelf part that functions as a warehousing port. As described above, when the preparation for unloading another load is performed before the loading, another load can be unloaded immediately after the loading. Thereby, it can be delivered efficiently and continuously.

  In this aspect, the drive means includes a horizontal drive unit that can reciprocate the placement unit in one horizontal direction, and a vertical drive unit that can reciprocate the placement unit in the vertical direction. One or a plurality of shelves are provided at a horizontal position that can be reached by the horizontal driving unit for each of the plurality of stages in the vertical direction, and the load is exchanged with the first mounting surface. Each of the second mounting surfaces may be configured so as to be able to be transferred.

  If constituted in this way, in the case of transport in the storage, among the plurality of shelf parts provided for each stage over a plurality of stages, toward the shelf part as the transport source, for example, a horizontal actuator, The placement unit is reciprocated in one horizontal direction by a horizontal drive unit such as a horizontal slider or a robot arm horizontal movement mechanism. Before and after the movement in one horizontal direction, the mounting portion is moved in the vertical direction by a vertical drive unit such as a vertical elevator, a vertical actuator, a robot arm vertical movement mechanism, etc. It is reciprocated. Thereafter, the load is transferred from the second placement surface to the first placement surface in the shelf portion as a transport source. Further, the placement unit is reciprocated in one horizontal direction by the horizontal drive unit toward the shelf part as the transport destination among the plurality of shelf parts. Before and after the movement in one horizontal direction, the placement unit is reciprocated in the vertical direction by the vertical drive unit toward the shelf as the transport destination. Thereafter, the load is transferred from the first placement surface to the second placement surface in the shelf portion as the transport destination. The delivery of the load between the mounting surfaces here is performed as follows.

  That is, the plurality of shelf portions have a plurality of placement surfaces (that is, second placement surfaces) arranged in a single row or a plurality of rows in the vertical direction. For example, m (where m is a natural number of 2 or more) in the vertical direction, n (where n is a natural number of 1 or more) columns in one horizontal direction, and the remaining horizontal direction (hereinafter simply “ The skeleton of the entire shelf is configured so as to be a thin and vertically elongated flat plate shape, such as only one row in the “thickness direction”. For example, in a state where a load is placed on the first placement surface, the placement unit is configured so that the inside of such a storage is two directions or two axes of a vertical direction and a horizontal direction by a vertical drive unit and a horizontal drive unit. It is configured to be movable in the direction.

  The first and second placement surfaces can transfer one load and the other load to each other. At the time of warehousing, for example, one shelf portion that functions as a warehousing port is moved to the outside of the housing or the frame, and one load is vertically transferred from the transport vehicle to the second placement surface of the one shelf portion. By this vertical transfer, one load is received in the storage. Subsequently, when one shelf portion is moved to the inside of the housing or frame, one load can be transported in the storage. Subsequently, one load on the second placement surface of one shelf portion is transferred to the first placement surface of the placement portion that is movable in the biaxial direction. For example, the first and second mounting surfaces are configured to support different portions (typically, a portion closer to the center and a portion closer to the periphery) on the bottom surface of the load (one load or the other load). It is possible to support a load (one load or another load) on either side. Specifically, when the placement unit is moved to a vertical position and a horizontal position where the second placement surface exists, the first placement surface supports one load instead of the second placement surface. Thus, transfer from the second placement surface to the first placement surface is performed. Typically, the first load is supported by the first placement surface by being moved by the vertical drive unit until the first placement surface becomes higher than the second placement surface. Thereby, the conveyance in the storage at the time of warehousing is started. Here, by a simple two-axis operation by the vertical drive unit and the horizontal drive unit, it is possible to quickly carry in the storage to any second mounting surface in the shelf portion.

  Subsequently, when the placement unit is moved to the vertical position and the horizontal position where the second placement surface to be used for storage exists, the second placement surface is replaced with the first placement surface. By supporting one load, transfer from the first placement surface to the second placement surface is performed. Typically, one load is supported by the second placement surface by being moved by the vertical drive unit until the first placement surface becomes lower than the second placement surface. Thereby, the conveyance in the storage at the time of goods receipt is complete | finished, and the storage in a shelf part is started.

  On the other hand, at the time of delivery, the placement unit is moved to a vertical position and a horizontal position where a second placement surface on which another load to be delivered is placed is present. Subsequently, instead of the second placement surface, the first placement surface is used to support the transfer from the second placement surface to the first placement surface. Typically, the other load is supported by the first placement surface by being moved by the vertical drive unit until the first placement surface becomes higher than the second placement surface. Thereby, the conveyance in the storage at the time of delivery is started. Subsequently, the placement unit is moved to the vertical position and the horizontal position where the second placement surface of the other shelf portion that functions as the delivery port exists. Here, the conveyance in the storage can be quickly performed from any second mounting surface by a simple two-axis operation by the vertical driving unit and the horizontal driving unit.

  Subsequently, instead of the first placement surface, the second placement surface of the other shelf portion is supported, whereby the other shelf portion is transferred to the second placement surface. Typically, the vertical driving unit moves the first placement surface until the first placement surface is lower than the second placement surface of the other shelf portion, so that the other load is the second placement surface of the other shelf portion. It will be supported by. As a result, the transport in the storage at the time of delivery is completed, and the transfer from the delivery port to the transport vehicle is possible.

  After that, the other shelf portion is moved to the outside of the housing or the frame with another load placed thereon, and the second loading of the other shelf portion is performed by the transport vehicle that is waiting at the same stop position as when entering the warehouse. Another load is vertically transferred from the placement surface to the transport vehicle. As a result of this vertical transfer, other cargo is delivered from the storage.

  As described above, by transferring the load between the first mounting surface and the second mounting surface, it is possible to shorten the transfer time of one load and another load in the transport in the storage. . Therefore, it is also possible to efficiently perform a plurality of continuous loading / unloading. The outer / inner moving means and the horizontal driving unit may share or share a mechanism or function at least partially.

The mode in which the transport vehicle transports one load and another load along the track is such that the transport vehicle travels along the track and the one port moved to the warehousing port or the unloading port . Travel control means for controlling the travel means to stop above the shelf portion or the other shelf portion, and the transport vehicle moves to the warehousing port when stopped by the travel control means The loading of the one load on the one shelf portion and the removal of the other load from the other shelf portion moved to the shipping port may be executed continuously.

  If comprised in this way, according to the conveyance instruction | indication from a conveyance controller, a conveyance vehicle will be stopped in a stop position by the traveling control means provided with CPU, ROM, RAM, memory, etc., for example. Then, one load is placed on the warehousing port by the transporting vehicle (that is, warehousing is performed), and then another load is taken out from the warehousing port provided in the vertical direction of the warehousing port (that is, Goods issue). In this way, by continuously entering and leaving the goods without moving the stop position, it is possible to shorten the time for entering and leaving, and to efficiently carry in and out.

In order to solve the above problems, the loading / unloading direction of the present invention is (I) a housing or frame, (II) arranged in the housing or frame and can accommodate the one load and the other load. A plurality of shelves, (III) set on the outside of one doorway provided on the outer wall of the housing or the outer frame of the frame, and the one load is placed from a transport vehicle that transports the load. (IV) set on the outer wall or the outer frame provided with the one doorway and outside the other doorway provided in line with the one doorway in the vertical direction. (V) a first port for horizontally moving the one load between the inside of the housing or the frame and the storage port via the one entrance. And (VI) through the other entrance / exit, the casing or And inner serial frame, between the unloading port, the second outer and inner moving means for the other of the load is horizontally moved, the vault having a, between the transport vehicle, the one of the load The loading and unloading method of continuously loading and unloading the other loads, and when the one load is to be loaded, the one shelf portion included in the plurality of shelf portions is horizontal to the loading port. A first control step for controlling the first outer / inner moving means to move, and the one shelf after the one load is placed on the one shelf portion following the first control step. A second control step of controlling the first outer / inner moving means to horizontally move the portion to the inside of the casing or the frame, and the case where the other load should be delivered following the second control step The other shelf parts included in the plurality of shelf parts in a state where the other loads are placed on the delivery port. To and a third control step of controlling said second outer and inner moving means so as to horizontally move.

  According to the loading / unloading method of the present invention, similarly to the above-described storage of the present invention, a loading port and a loading port that are selectively arranged in the same vertical direction (in other words, one shelf portion and another shelf portion) On the other hand, the conveyance vehicle can continuously carry in and out by vertical transfer. At this time, as in the background art described above, it is not necessary to move the transport vehicle to the position corresponding to the exit port during the entry and exit, and after placing one load from the transport vehicle to the entry port, At the same position, another load can be taken out from the delivery port to the transport vehicle.

  In one aspect of the loading / unloading method of the present invention, the storage has a mounting portion having a first mounting surface capable of supporting the one load and the other load from the bottom side, and the mounting portion. Drive means that is movable between the plurality of shelf parts, and when the one load is to be received, the one shelf part is horizontally moved inward by the second control step. After being performed, the shelf other than the one shelf portion among the plurality of shelf portions from the one shelf portion to the one load by the placement unit before or after the third control step. A fourth control step for controlling the driving means so as to move to a portion, and when the other load should be delivered, the first and second control steps may be performed before or after or in parallel with the first control step. Prior to the three control steps, the other load is loaded into the other shelf among the plurality of shelf portions by the placement unit. From the shelf portions other than the minute further and a fifth control step of controlling said drive means to move to the other ledge.

  According to this aspect, in the fourth control step, for example, in parallel with the third control step in which the other shelf portion is moved to the outside for delivery, the received one load is a shelf other than the one shelf portion. Moved to part. Thus, it becomes possible to cope with continuous warehousing by quickly transferring one load to the storage shelf portion.

  In addition, by the fifth control process, for example, before the first control process in which one shelf part is moved outward for warehousing, other loads to be delivered from other shelf parts other than the other shelf parts. Moved to the shelf part. In this way, by transferring other loads to other shelf parts prior to warehousing and unloading, for example, immediately after ending warehousing, it is possible to respond quickly to unloading, and continuous unloading It is also possible to respond. Therefore, it becomes possible to load and unload more efficiently.

  In addition, also in the loading / unloading method of this invention, it is possible to take the various aspects similar to the various aspects in the storage of this invention mentioned above.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The configuration of the storage according to the embodiment will be described with reference to FIGS. 1 to 5. FIG. 1 shows the appearance of a manufacturing system including a storage according to the embodiment, and FIG. 2 schematically shows the internal structure of the storage shown in FIG. 3 schematically shows the internal structure of the storage shown in FIG. 1, and the operation state at the time of delivery by the transport vehicle. FIG. 4 shows the engagement state of the shelf portion and the mounting portion according to the embodiment. These show the operation state of the outer / inner moving means according to the embodiment.

  In FIG. 1, the manufacturing system 100 includes a rail 1, a vehicle 2, a stocker 10, a manufacturing instruction unit 30, a transport instruction unit 31, a transport controller 32, and a stocker controller 33. The manufacturing system 100 controls the vehicle 2 to transport the FOUP 3 to the stocker 10 and controls the stocker 10 to transport the FOUP 3 inside the stocker 10. In the present embodiment, the FOUP 3 to be transferred from the vehicle 2 to the stocker 10 is transferred, and the FOUP 3 to be transferred from the stocker 10 to the vehicle 2 is transferred.

  The rail 1 serves as a track for the vehicle 2 to travel. In the present embodiment, the stocking port P1 and the stocking port P2 of the stocker 10 are set below a predetermined position of the rail 1.

  The vehicle 2 is an OHT (overhead traveling vehicle) driven by a linear motor as an example of the “conveyor vehicle” according to the present invention, and travels along the rail 1 and transports the FOUP 3. The vehicle 2 includes a main body 2a and a vertical movement unit 5.

  The main body 2a has a space in which the FOUP 3 can be accommodated. The main body 2a has an open bottom so that the accommodated FOUP 3 can be moved below the main body 2a. A vertical movement unit 5 is attached to the top wall inside the main body 2a.

  2 and 3, the up-and-down moving unit 5 includes a hoist 5a, a belt 5b, and a gripper 5c. The hoist 5a includes a motor (not shown), and controls the motor to feed the belt 5b downward or to wind up the belt 5b. One end of the belt 5b is fixed to a winding shaft (not shown) of the hoist 5a, and the other end is fixed to the upper surface of the gripper 5c. Both end portions of the gripper 5c are bent inward. The gripper 5 c is displaced between a gripping position for gripping the flange 4 attached to the top of the FOUP 3 at both bent ends and a release position for releasing the gripped flange 4. The hoist 5a moves the gripper 5c in the vertical direction by the feeding operation or the winding operation of the belt 5b. The vehicle 2 may further include an adjustment mechanism for finely adjusting a body position (for example, a position in two horizontal directions and a rotation direction) for gripping the FOUP 3 to be stored or the FOUP 3 to be output.

  When the vehicle 2 transfers the FOUP 3 to or from the stocker 10 (that is, when the vehicle 2 is simply placed, simply delivered, or continuously entered and exited), the stocker 10 has an entry port P1 and an exit port P2. It stops at the transfer position corresponding to the upper side. When the vehicle 2 in the transfer position is received, the gripper 5c holding the FOUP 3 (specifically, the flange 4) is lowered by the hoist 5a to the entry port P1 (that is, shown in FIG. 2). The gripping FOUP 3 is released by the gripper 5c. With this release, the FOUP 3 to be received is received from the vehicle 2 to the stocker 10.

  On the other hand, when the vehicle 2 in the transfer position is unloaded, the gripper 5c with the FOUP 3 released is lowered by the hoist 5a to the unloading port P2 (that is, shown in FIG. 3), and the unloading port P2 is moved by the gripper 5c. The gripper 5c is raised again to the inside of the main body 2a by the hoist 5a. With this rise, the FOUP 3 to be delivered is delivered from the stocker 10 to the vehicle 2. The vehicle 2 does not change the transfer position when performing the above-described loading and unloading continuously.

  As an example of the “load” according to the present invention, the FOUP 3 is transported in the stocker 10 for entering and leaving the vehicle 2, adjusting the storage position, and the like (that is, transporting in the storage). In FIG. 4, the FOUP 3 has recesses 4a and 4b on the bottom surface. The recessed part 4a is formed in the size corresponding to the convex part 16 provided in the shelf part 15 mentioned later. On the other hand, the recessed part 4b is formed in the size corresponding to the convex part 12 provided in the mounting part 11 mentioned later.

(Storage only)
Next, the structure and operation of the stocker 10 will be described with reference to FIGS. The stocker 10 is provided adjacent to the rail 1 as an example of the “storage” according to the present invention, and can accommodate a plurality of FOUPs 3. In the present embodiment, the stocker 10 continuously performs the FOUP 3 warehousing process and the FOUP 3 voting process to be unloaded with the vehicle 2.

  In FIG. 2, the stocker 10 includes a main body 10 a, an in-storage transport device 19, a plurality of shelf parts 15, and two slide parts 21.

  As an example of the “casing or frame” according to the present invention, the main body portion 10a is partially opened on the side surface on the rail 1 side in order to load and unload the FOUP 3. Specifically, the main body 10a has an opening H1 (in other words, an example of “one entrance / exit” according to the present invention) for entering the FOUP 3 to be stored, and the FOUP 3 to be output to the outside. The opening H2 (that is, an example of “another entrance / exit” according to the present invention) is formed.

  The in-storage transport device 19 is, for example, a stacker or a stacker robot, and includes a placement unit 11, a horizontal drive unit 13, and a vertical drive unit 14, and the FOUP 3 between the plurality of shelf portions 15 is controlled by the stocker controller 33. Is transferred (that is, transported in the storage).

  The placement unit 11 is moved in one horizontal direction by the horizontal drive unit 13 and in the vertical direction by the vertical drive unit 14 in order to transfer the FOUP 3 between the plurality of shelf portions 15. The placement unit 11 has a first placement surface 11a on the upper surface.

  In FIG. 4, the first placement surface 11a contacts the bottom surface of the FOUP 3 when transferring the FOUP 3 placed on any of the shelf portions 15 (that is, indicated by a dotted line in FIG. 4A). The FOUP 3 is supported from the bottom side. On the first placement surface 11a, a convex portion 12 is formed as a support member. As shown in FIG. 4B, the convex portion 12 is formed in a size corresponding to the concave portion 4b of the FOUP 3, and is engaged with the concave portion 4b during transfer.

  In FIG. 2, the horizontal drive unit 13 is driven on a horizontal guide 17 extending in one horizontal direction by a motor (not shown) as an example of the “drive unit” according to the present invention. The horizontal driving unit 13 is connected to the mounting unit 11 and reciprocates the mounting unit 11 along the horizontal guide 17 in one horizontal direction (that is, the left-right direction in FIG. 2).

  The vertical drive unit 14 is driven on a vertical guide 18 extending in the vertical direction by a motor (not shown) as an example of the “drive unit” according to the present invention. A center portion of the horizontal guide 17 is fixed to the vertical drive unit 14. The vertical drive unit 14 reciprocates the horizontal guide 17 along the vertical guide 18 in the vertical direction (that is, the vertical direction in FIG. 2). During this reciprocating movement, the placement portion 11 is located at the center of the horizontal guide 17. In this way, the placement unit 11 is moved by the horizontal drive unit 13 and the vertical drive unit 14 in the biaxial directions of the vertical direction and the horizontal one direction.

  The plurality of shelf portions 15 are composed of a total of 14 shelf portions, with seven rows in the vertical direction, two rows in one horizontal direction in each step, and one row in the thickness direction in each step. Each shelf portion 15 has a second placement surface 15a on the upper surface, and the FOUP 3 is placed on the second placement surface 15a. In FIG. 4, the convex part 16 is formed in the 2nd mounting surface 15a as a supporting member. As shown in FIG. 4A, the convex portion 16 is formed in a size corresponding to the concave portion 4a of the FOUP 3, and is engaged with the concave portion 4a during mounting (storage).

  Next, the form of the 1st mounting surface 11a and the 2nd mounting surface 15a is demonstrated. 5 specifically corresponds to the A1-A1 cross section in FIG. 2, and shows two shelf portions 15 (in other words, the second placement surface 15a) installed at the uppermost stage of the stocker 10. FIG. Yes. Of the two shelf portions 15, the shelf portion 15i on the opening H1 side is a storage shelf portion 15i described later.

  When viewed from the upper surface side of the stocker 10, the second placement surface 15a is formed in a U shape like a horseshoe, and the first placement surface 11a is formed like an island filling the center of the U shape. . That is, the first placement surface 11a and the second placement surface 15a have mutually complementary planar shapes. The FOUP 3 is transferred between the first placement surface 11a and the second placement surface 15a.

  In the present embodiment, as shown in FIGS. 4 and 5, the first placement surface 11a is located inside the second placement surface 15a when viewed in plan, and the first placement surface 11a. Is smaller than the outer shape of the second mounting surface 15a. However, conversely, both of the outer dimensions of the first mounting surface 11a are smaller than the outer shape of the second mounting surface 15a so that the first mounting surface 11a is positioned outside the second mounting surface 15a. May be configured.

(Transport operation in storage)
Next, the transfer operation of the FOUP 3 inside the stocker 10 (that is, the transfer operation in the storage) by the transfer device 19 in the storage will be described with reference to FIGS.

  3 and 4, the in-storage transport device 19 moves the FOUP 3 placed on the storage shelf portion 15 i, which will be described later on the rail 1 side, from the top two shelf portions to the second from the top. It transfers to the shelf part 15 (namely, arrange | positioned in the dashed-two dotted line P4 in FIG. 3) among the two shelf parts 15 of a step | paragraph on the opposite side to the rail 1. FIG. In this case, the placement unit 11 located in the two-dot chain line P3 is moved directly below the second placement surface 15a of the storage shelf portion 15i. At this time, the placement unit 11 is moved to the approximate center of the horizontal guide 17 by the horizontal drive unit 13, and then moved to a predetermined vertical position along the vertical guide 18 by the vertical drive unit 14. This predetermined vertical position is below the second placement surface 15a of the storage shelf portion 15i. Thereafter, the placement unit 11 at a predetermined vertical position is moved to a predetermined horizontal position along the horizontal guide 17 by the horizontal driving unit 13. As shown in FIG. 4A, this predetermined horizontal position is a position where the convex portion 12 of the mounting portion 11 exists in the vertically downward direction of the concave portion 4 b of the FOUP 3.

  The placement unit 11 moved to the predetermined vertical position and the horizontal position is raised by the vertical drive unit 14. Due to this rise, the placement portion 11 passes through the center of the storage shelf portion 15i and becomes higher than the second placement surface 15a of the storage shelf portion 15i as shown in FIG. 4B. At this time, the concave portion 4a of the FOUP 3 and the convex portion 16 of the storage shelf portion 15i are disengaged, and the FOUP 3 is supported by the first placement surface 11a instead of the second placement surface 15a. The FOUP 3 is transferred from the second mounting surface 15a to the first mounting surface 11a by engaging the 11 convex portions 12 and the concave portion 4b of the FOUP 3 with each other.

  The placement unit 11 to which the FOUP 3 has been transferred is moved directly above the second placement surface 15a of the shelf portion 15 in the area P4. At this time, the placement unit 11 is moved to a predetermined horizontal position in one horizontal direction by the horizontal drive unit 13. This predetermined horizontal position is a position where the concave portion 4a of the FOUP 3 exists in the vertically upward direction of the convex portion 16 of the shelf portion 15 in the area P4. The placement unit 11 moved to a predetermined horizontal position is lowered by the vertical drive unit 14. Due to this lowering, the placement portion 11 passes through the center of the shelf portion 15 in the area P4 and becomes lower than the second placement surface 15a of the shelf portion 15 as shown in FIG. At this time, the engagement of the convex portion 12 of the mounting portion 11 and the concave portion 4b of the FOUP 3 in the area P4 is disengaged, and the FOUP 3 is supported by the second mounting surface 15a instead of the first mounting surface 11a. The concave portion 4a and the convex portion 16 of the placement portion 11 are engaged with each other, whereby the FOUP 3 is transferred from the first placement surface 11a to the second placement surface 15a. Thereby, the transfer operation of the FOUP 3 from the warehousing shelf portion 15i to the storage shelf portion 15 in the area P4 is completed. In addition, if this transfer process is performed in the reverse order, it will be the transfer operation | movement from the shelf part 15 for storage to the shelf part 15i for warehousing.

  In FIG. 2, the shelf portion 15 provided on the rail 1 side of the two uppermost shelf portions 15 is referred to as a storage shelf portion 15 i, and the rail 1 of the two shelf portions 15 in the second stage from the top. Let the shelf part 15 provided in the side (namely, directly under the shelf part 15i for warehousing) be the shelf part 15o for warehousing. Among the plurality of shelf portions 15, the remaining shelf portions 15 except the entry shelf portion 15i and the exit shelf portion 15o are storage shelf portions 15 for storing the FOUP 3 (that is, for example, two points in FIG. As indicated by chain lines P3 and P4).

  In FIG. 5, each of the two slide portions 21 includes a main body portion 22 and a support portion 23. The main body portion 22 includes an actuator (not shown), and drives the actuator to move the support portion 23 in a horizontal direction orthogonal to the vertical direction of the rail 1. The support portion 23 is fixed to the bottom surface of the storage shelf portion 15i or the storage shelf portion 15o, and supports the storage shelf portion 15i or the storage shelf portion 15o from the bottom side.

  The two slide portions 21 are composed of a warehousing slide portion 21i and a warehousing slide portion 21o. The warehousing slide portion 21i functions as a part of the “outside / inside moving means” according to the present invention, and the warehousing shelf portion 15i can be horizontally moved between the inside and the outside of the main body portion 10a through the opening H1. is there. Specifically, when the warehousing shelf portion 15i is moved to the inside of the main body 10a, it is located on the left side of the uppermost stage and moves the FOUP 3 to and from the mounting portion 11 as shown in FIG. It can be loaded. In addition, when the storage shelf portion 15i is moved to the outside of the main body 10a, as shown in FIG. 2, the storage shelf portion 15i is positioned in the uppermost horizontal direction and below the rail 1, and receives the FOUP 3 from the vehicle 2. Functioning as a warehousing port (indicated by a two-dot chain line P1 in FIG. 2).

  The exit slide portion 21o functions as a part of the “outside / inside movement means” according to the present invention, and the exit shelf portion 15o can be horizontally moved between the inside and the outside of the main body portion 10a through the opening H2. is there. Specifically, when the shelf part 15o for delivery is moved to the inside of the main body part 10a, the shelf part 15o is located on the left side of the second stage from the top, as shown in FIG. FOUP3 can be transferred between them. Further, when the storage shelf portion 15o is moved to the outside of the main body 10a, as shown in FIG. 3, the shelf portion 15o is positioned in the horizontal direction of the second step from the top and below the rail 1, and the vehicle 2 It functions as a delivery port for delivering the FOUP 3 (indicated by a two-dot chain line P2 in FIG. 3). Note that the exit slide portion 21o can simply function as an exit port. That is, if it is possible to transfer the FOUP 3 to be unloaded between the unloading slide portion 21o moved to the outside of the main body 10a and the mounting portion 11, the unloading shelf portion 15o is placed inside and outside the main body 10a. It is the gist of not having to move horizontally between the two.

  The manufacturing instruction unit 30 is a main controller in the semiconductor element manufacturing factory, creates a manufacturing schedule indicating a semiconductor element manufacturing process, and instructs the transfer instruction unit 31 to transfer the FOUP 3 based on the manufacturing schedule.

  The conveyance instruction unit 31 is an MCS (Material Control System), receives an instruction from the production instruction unit 30, and creates a conveyance schedule based on the production schedule. The transport instruction unit 31 instructs the transport controller 32 to transport the FOUP 3 and also instructs the stocker controller 33 to transport the FOUP 3 in the storage based on the transport schedule.

  The transport controller 32 receives an instruction from the transport instruction unit 31, controls the vehicle 2, transports the FOUP 3 along the rail 1, and transfers the FOUP 3 to / from a work device (not shown) and the stocker 10. To do.

  The stocker controller 33 receives instructions from the transport instruction unit 31, controls each unit of the stocker 10, transfers the FOUP 3 to and from the vehicle 2, transports the FOUP 3 inside the stocker 10, and loads the FOUP 3 Store in place.

  The transport controller 32 moves the vehicle 2 to a predetermined stop position corresponding to the stocker 10 when the FOUP 3 is transferred to or from the stocker 10 (that is, when the FOUP 3 is loaded or unloaded, or continuous loading and unloading is performed). Stop. The transfer controller 32 controls the vehicle 2 stopped at the stop position at the time of warehousing, and transfers the FOUP 3 held by the vehicle 2 to the warehousing shelf portion 15i moved below the rail 1 to the warehousing shelf portion 15i. To the second mounting surface 15a. As a result of this transfer, the FOUP 3 is stored in the stocker 10. On the other hand, at the time of delivery, the vehicle 2 stopped at the stop position is controlled, and the FOUP 3 placed on the delivery shelf portion 15o is moved from the delivery shelf portion 15o moved below the rail 1 to the vehicle 2 side. It is transferred (that is, gripped by the gripper 5c and lifted up). With this transfer, the FOUP 3 is delivered from the stocker 10.

  The stocker controller 33 controls the slide unit 21 to transfer the FOUP 3 to or from the vehicle 2 (that is, when the FOUP 3 is moved in or out, or the continuous loading and unloading is performed), and the warehousing shelf portion 15i. And either one of the shelf parts 15o for delivery is moved below the rail 1. The stocker controller 33 controls the in-storage transport device 19 when the stored FOUP 3 is placed on the storage shelf portion 15i at the time of storage, and stores the stored FOUP 3 in any storage shelf. Transfer to part 15. The stocker controller 33 controls the warehousing slide portion 21 i to move the empty warehousing shelf portion 15 i on which the FOUP 3 is not placed below the rail 1. By this movement, the warehousing shelf portion 15i functions as a warehousing port. On the other hand, when the FOUP 3 to be delivered is not placed on the delivery shelf portion 15o at the time of delivery, the storage in-storage transport device 19 is controlled to store any FOUP 3 to be delivered. Transfer from the shelf portion 15 to the exit shelf portion 15o. The stocker controller 33 controls the delivery slide portion 21 o to move the delivery shelf portion 15 o on which the FOUP 3 to be delivered is placed below the rail 1. By this movement, the exit shelf portion 15o functions as an exit port.

(First entry / exit operation process)
Next, the 1st loading / unloading operation | movement process of this embodiment is demonstrated with reference to FIG. FIG. 6 is a flowchart showing the first loading / unloading operation process of the present embodiment.

  In FIG. 6, first, the transfer instruction unit 31 determines whether or not there is a request for delivery from the stocker 10 based on the transfer schedule of the semiconductor element manufacturing process (step S31). As a result of this determination, when it is determined that there is no request (step S31: NO), preparation for leaving the store in steps S32 and S33 is omitted, and the process of step S34 is executed.

  On the other hand, as a result of the determination in step S31, when it is determined that there is a request for shipping (step S31: YES), the storage device in the storage P15 stores the storage stored in the storage shelf portion 15 by the storage device 19 in the storage. The power FOUP 3 is transferred to the placement unit 11 (that is, taken out from the storage shelf portion 15) (step S32). Subsequently, the placement unit 11 in a state where the FOUP 3 to be delivered is placed is moved downward through the delivery shelf part 15o, and the FOUP 3 to be delivered is moved from the placement part 11 to the delivery shelf part 15o. (Step S33).

  Next, the transport instruction unit 31 determines whether or not the vehicle 2 has arrived at a predetermined stop position corresponding to the stocker 10 based on the transport schedule, and whether the arrived vehicle 2 should enter the warehouse. Alternatively, it is determined whether or not to perform the delivery (step S34). If it is determined by this determination that the vehicle 2 does not arrive (step S34: not arrived), the process of step S31 is executed again.

  On the other hand, as a result of the determination in step S34, when it is determined that the vehicle 2 is going out (step S34: outgoing vehicle), the process in step S38 is executed. On the other hand, when it is determined that the vehicle 2 is to be warehousing (step S34: warehousing vehicle), under the control of the transport controller 32, the FOUP 3 to be warehousing is transferred from the vehicle 2 to the warehousing area P1. Is transferred to the storage rack portion 15i (step S35). Subsequently, under the control of the stocker controller 33, the warehousing shelf portion 15o is horizontally moved inside the main body 10a (step S36). By this horizontal movement, the received FOUP 3 can be transported in the storage by the storage transport device 19.

  Subsequently, the stocker controller 33 determines whether or not the FOUP 3 to be delivered is present at the delivery port P2 (step S37). If it is determined that there is no FOUP 3 to be delivered (step S37: NO), the process of step S41 is executed. On the other hand, when there is a FOUP 3 to be delivered (step S37: YES), the delivery shelf portion 15o is horizontally moved out of the stocker 10 with the FOUP 3 to be delivered placed (step S38). Subsequently, under the control of the transport controller 32, the FOUP 3 to be unloaded is transferred from the unloading shelf portion 15o in the unloading area P2 to the vehicle 2 by vertical transfer by the vehicle 2 (step S39).

  Subsequently, the stocker controller 33 determines whether or not the received FOUP 3 is in the storage shelf portion 15i that has been moved to the inside of the main body 10a by the process of step S36 (step S40). If there is no FOUP 3 that has been received here (step S40: NO), the series of storage / exit operation processing is terminated, and the processing of step S31 is executed again. On the other hand, when the received FOUP 3 still exists (step S40: YES), the FOUP 3 placed on the warehousing shelf portion 15i at the transport position is transferred to the placement unit 11 by the in-storage transport device 19. It is transferred (that is, taken out from the storage shelf portion 15i) (step S41). Subsequently, the placement unit 11 on which the received FOUP 3 is placed is moved from the upper side to the lower side of the storage shelf part 15 in the area P4, and the received FOUP 3 is moved from the placement unit 11 to the storage shelf. Transferred to the portion 15 (step S42). Thereby, a series of loading / unloading operation processing is completed.

  Thus, according to the stocker 10 of this embodiment, with respect to the warehousing port P1 and the evacuation port P2 (in other words, the warehousing shelf part 15i and the warehousing shelf part 15o) selectively arranged in the same vertical direction. Thus, the vehicle 2 can be continuously loaded and unloaded by vertical transfer. That is, it is not necessary to move the vehicle 2 to the position corresponding to the shipping port P2 during the loading and unloading, and after the FOUP 3 to be loaded from the vehicle 2 to the loading port P1 is placed, The FOUP 3 to be delivered to the vehicle 2 can be taken out from the delivery port P2. Further, in the stocker 10, at least partially parallel storage of the FOUP 3 previously received, movement of the warehousing shelf portion 15 i below the rail 1, or transfer of the FOUP 3 to be evacuated to the shed shelf portion 15 o is performed. Can be performed. Therefore, it is possible to shorten the time for loading / unloading and efficiently load / unload.

  In addition, according to this embodiment, although the exit port P2 is arrange | positioned under the entrance port P1, conversely, the exit port P2 may be arrange | positioned above the entrance port P1.

(Second entry / exit operation process)
Next, a second loading / unloading operation process other than the loading / unloading operation process of the present embodiment will be described with reference to FIG. FIG. 7 is a flowchart showing the second loading / unloading operation process. In the second embodiment, the warehousing port P11 is set to the shelf part on the opening H2 side of the two stage parts of the second stage from the top, and the delivery port P12 is opened to the two shelf parts of the uppermost stage. Set to the shelf portion on the H1 side. That is, the warehousing shelf portion P11 and the warehousing shelf portion P12 are provided such that the warehousing port P1 and the warehousing port P2 described above are arranged in reverse.

  In FIG. 7, first, similarly to steps S31 to S35 shown in FIG. 6, it is first determined whether or not there is a request for delivery from the stocker 10 based on the transport schedule of the semiconductor element manufacturing process (step S31). ), When it is determined that there is no request (step S31: NO), the process of step S34 is executed.

  On the other hand, when it is determined that there is a request for delivery (step S31: YES), the FOUP 3 to be delivered stored in the storage shelf portion 15 of the area P3 is transferred to the placement unit 11 (step S32). ) When the placement unit 11 in the state where the FOUP 3 to be delivered is placed is moved, the FOUP 3 to be delivered is transferred from the placement unit 11 to the delivery shelf portion 15o (step S33).

  Next, it is determined whether or not the vehicle 2 has arrived at a predetermined stop position corresponding to the stocker 10 based on the transport schedule, and whether the arrived vehicle 2 should enter or leave the store. Determination is made (step S34). If it is determined by this determination that the vehicle 2 does not arrive (step S34: not arrived), the process of step S31 is executed again.

  On the other hand, as a result of the determination in step S34, when it is determined that the vehicle 2 is going out (step S34: outgoing vehicle), the process in step S50 is executed. On the other hand, when it is determined that the vehicle 2 is to be warehousing (step S34: warehousing vehicle), the FOUP 3 to be warehousing is transferred from the vehicle 2 to the warehousing shelf portion 15i in the warehousing area P1 by vertical transfer by the vehicle 2. Transferred (step S35). Subsequently, the stocker controller 33 determines whether or not the FOUP 3 to be delivered is present at the delivery port P2 (step S37). As a result of this determination, when there is no FOUP 3 to be delivered (step S37: NO), the warehousing shelf portion 15o is horizontally moved inside the main body 10a (step S36). By this horizontal movement, the received FOUP 3 can be transported in the storage by the storage transport device 19. Subsequently, the process of step S41 is executed.

  On the other hand, when there is a FOUP 3 to be delivered (step S37: YES), the delivery shelf portion 15o is horizontally moved out of the stocker 10 with the FOUP 3 to be delivered placed (step S38). Subsequently, the FOUP 3 to be delivered is transferred from the delivery shelf portion 15o in the delivery area P2 to the vehicle 2 by vertical transfer by the vehicle 2 (step S39).

  Subsequently, in the same manner as in steps S40 to S42 shown in FIG. 6, it is determined whether or not the received FOUP 3 is in the storage rack portion 15i moved to the inside of the main body 10a (step S40). ). If there is no FOUP 3 that has been received here (step S40: NO), the series of storage / exit operation processing is terminated, and the processing of step S31 is executed again. On the other hand, when the received FOUP 3 still exists (step S40: YES), the FOUP 3 placed on the storage shelf portion 15i inside the stocker 10 is transferred to the placement unit 11 (step S41). ), The placement unit 11 in a state where the received FOUP 3 is placed is moved downward from above the storage shelf portion 15 in the area P4, and the received FOUP 3 is moved from the placement unit 11 to the storage shelf portion 15. (Step S42). Thereby, a series of loading / unloading operation processing is completed.

  As described above, according to the second loading / unloading operation process, even if the loading port is set in a position vertically below the rail 1 and close to the rail 1 and the loading port is set below the loading port, Similar to the first loading / unloading operation process, the vehicle 2 stopped at the position corresponding to the loading port can continuously perform loading and unloading at the same stop position. Moreover, it is also possible to freely set the positions of the warehousing port and the evacuation port according to the installation space, for example. Regarding the effect of enabling the port to be set freely, for example, the stocker having many steps, the entry port and the exit port are set immediately below the rail 1 to shorten the lifting distance of the gripper 5c. This makes it possible to reliably reduce the time required for loading and unloading.

  In addition, about the vehicle 2 applied to this embodiment, the FOUP3 gripped by the gripper 5c at the time of transfer between the warehousing port or the warehousing port is located outside (in other words, below) the main body portion 10a. The transfer may be performed in a state where at least a part of the FOUP 3 is located inside the main body 10a.

  FIG. 8 shows another form of the vehicle 2 applied to this embodiment. In FIG. 8, a vehicle 102 includes a main body 102 a and the same gripping portion 5 as the vehicle 2 of FIG. 1, and travels along a track 101. The track 101 is laid at a position lower than the track 1 in FIG. 1 corresponding to the ceiling height in the semiconductor element manufacturing factory. The height at which the track 101 is laid is slightly larger than the height of the upper surface of the main body 10 a of the stocker 10. In this case, the distance between the bottom surface of the vehicle 102 stopped at the stop position in the stocker 10 (that is, indicated by a dotted line in FIG. 8) and the storage rack portion 15i functioning as a storage port is one FOUP3. It is shorter than the height.

  In the main body 102a of the vehicle 102, the side surface on the stocker 10 side (that is, the right side surface of the main body 102a in FIG. 8) is at least partially released on both side surfaces in two directions orthogonal to the traveling direction. As shown in FIG. 8, by releasing the right side surface, the FOUP 3 placed on the storage shelf portion 15i while being located inside the main body portion 102a is released by the slide portion 21 from the right side surface of the main body portion 102a. And the inside of the stocker 10 through the opening of the stocker 10. As described above, by releasing the right side surface of the vehicle 102, it is possible to further shorten the ascending / descending distance of the FOUP 3, and it is possible to more reliably reduce the time required for loading and unloading.

  In addition, about the slide part 21 applied to this embodiment, the shelf part 15i, 15o is moved by driving the actuator of the main-body part 22 and moving the support part 23 horizontally, However, The structure of a slide part is limited to this. Not.

  FIG. 9 shows another form than the slide part applied to this embodiment. In FIG. 9, the slide portion 41 includes a ball screw including a screw shaft 42 and a nut 43, and a motor 44. The screw shaft 42 is connected to the motor 44 through a gear. The nut 43 is fixed to the bottom surface of the shelf portion 135i that supports the central portion of the FOUP 3, and supports the shelf portion 135i. The slide portion 41 drives the motor 44 and rotates the screw shaft 42 to move the shelf portion 135i in one horizontal direction.

  Moreover, FIG. 10 shows another form from the slide part applied to this embodiment, and the slide part of FIG. In FIG. 10, the slide part 51 includes a linear actuator 52, a support part 53, a motor 54, a roller 55, and a linear guide 56. The linear actuator 52 moves in one horizontal direction as the motor 54 rotates. A support portion 53 is fixed to one end of the shelf portion 135o, and a roller 55 is fixed to an end opposite to the one end. The roller 55 is guided by the linear guide 56 and moves in one horizontal direction as the shelf portion 135o moves. The slide unit 51 drives the motor 54 and moves the linear actuator 52, thereby moving the shelf portion 135o in one horizontal direction.

  In such a slide part 51, when the storage shelf portion is provided immediately above the storage shelf portion 135o, the FOUP 3o to be output is placed prior to the storage, as shown in FIG. In this state, the exit shelf portion 135o is horizontally moved to the outside of the stocker 10 and is further installed outward from below the rail 1. At the time of warehousing, through the space between the linear actuator 52 and the linear guide 56 in the slidable slide 51, the FOUP 3i to be warehousing is moved down to the warehousing shelf moved to the lower side of the rail 1, and is moved to the warehousing shelf. Reprinted. When unloading is requested after this transfer, the gripper 5c of the vehicle 2 is raised to above the FOUP 3i to be unloaded. Then, the exit shelf portion 135o is horizontally moved toward the inside of the stocker 10 and installed below the rail 1. Then, the FOUP 3 to be unloaded is gripped by the gripper 5c and transferred from the unloading shelf portion 135o to the vehicle 2.

  The stocker 10 of the present embodiment includes a pair of warehousing shelf portions 15i and a warehousing shelf portion 15o provided in the upper and lower stages, but depending on the number of stockers 10 accommodated, the pair of warehousing shelf portions described above. And a plurality of shelf parts for delivery, and together with this, a single entry shelf part or delivery shelf part, or a pair of entry shelf parts or exits provided adjacent to the same shelf A shelf portion may be provided.

  FIG. 11 shows another form than the stocker 10 of the present embodiment. In FIG. 11, the stocker 110 includes two sets of the above-described pair of warehousing shelf portions 15 i and the warehousing shelf portion 15 o, and also includes a pair of warehousing shelf portions 115 i and an unloading shelf portion 115 o that are adjacent to each other. The plurality of storage shelf portions 15 i and 115 i and the storage shelf portions 15 o and 115 o are selectively used by the stocker controller 33. For example, a plurality of warehousing according to the contents of the currently requested loading / unloading, the vacancy of the loading unit 11 or the loading status, the emptying of the loading shelf portion or the loading shelf portion, the loading status or the moving position, etc. The shelf portions 15i and 115i and the exit shelf portions 15o and 115o may be appropriately selected as the entry port or the exit port. In particular, in a transport system including a large number of stockers and a large number of vehicles 2, it is possible to further improve the transport efficiency by properly using the warehousing shelf portion or the unloading shelf portion.

  In the stocker 110, two pairs of the storage shelf portion 15i and the storage shelf portion 15o are provided adjacent to each other, but the distance L1 between the centers of the two storage shelf portions 15i is the vehicle 2 Is set larger than the length in the traveling direction. That is, the two vehicles 2 can be stopped simultaneously at the stop positions corresponding to the two storage shelf portions 15i. For this reason, when many ports are provided in the stocker, when a large number of FOUPs 3 are simultaneously loaded and unloaded by a large number of vehicles 2, it is possible to further improve the conveyance efficiency.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. Moreover, it is included in the technical scope of the present invention.

It is a perspective view which shows the external appearance of a manufacturing system provided with the storage of embodiment. It is sectional drawing which shows typically the internal structure of the storage of FIG. 1 with the operation state at the time of warehousing with a conveyance vehicle. It is sectional drawing which shows typically the internal structure of the storage of FIG. 1 with the operation state at the time of the delivery by a conveyance vehicle. It is sectional drawing which shows the engagement state of the 1st and 2nd mounting surface of FIG. It is a top view which shows the operation state to the horizontal one direction of the mounting part of FIG. It is a flowchart which shows the 1st loading / unloading operation | movement process of embodiment. It is a flowchart which shows the 2nd loading / unloading operation | movement process of embodiment. It is sectional drawing which shows typically the other example of the conveyance vehicle which concerns on this invention. It is a top view which shows the other example of the outer / inner moving means which concerns on this invention. It is a top view which shows the other example of the outer / inner moving means which concerns on this invention. It is a perspective view which shows the external appearance of an example of a manufacturing system provided with the storage which concerns on this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Rail, 2 ... Vehicle (ceiling traveling vehicle), 3 ... FOUP (load), 10 ... Stocker (storage), 11 ... Mounting part, 13 ... Horizontal drive part, 14 ... Vertical drive part, 15 ... Shelf part , 21 ... Slide part, 33 ... Stocker controller, 100 ... Manufacturing system

Claims (10)

The storage of one load and the discharge of another load are continuously performed between the one load and the other load with a transport vehicle capable of moving up and down, respectively,
A housing or frame;
A plurality of shelf parts arranged in the housing or frame and capable of accommodating the one load and the other load;
It is set outside the one entrance provided in the outer wall of the casing or the outer frame of the frame, and a warehousing port on which the one load is placed from the transport vehicle,
It is set on the outer wall or the outer frame in which the one entrance is provided and outside the other entrance provided in parallel with the one entrance, and the other load is taken out to the transport vehicle. A shipping port,
First outer / inner moving means for horizontally moving the one load between the inside of the housing or the frame and the warehousing port via the one doorway;
Storage comprising: second outside / inside moving means for horizontally moving the other load between the inside of the casing or the frame and the delivery port via the other entrance / exit Warehouse. The first outer / inner moving means is configured to be horizontally movable in a state where the one load is placed on one shelf part included in the plurality of shelf parts,
The second outside moving means is configured to be horizontally movable in a state where the other load is placed on the other shelf portion included in the plurality of shelf portions,
The one shelf portion and the other shelf portion are positioned below a track on which the transport vehicle transports the one load and the other load when moved to the entry port or the exit port, respectively. The storage according to claim 1, wherein the storage is arranged as follows. The transport vehicle transports the one load or the other load in a state of being housed during transport,
When the one shelf part or the other shelf part is moved to the warehousing port or the evacuation port, the one load is placed between the one or the transporting vehicle, and the other load is taken out. The storage according to claim 2, wherein the storage has a distance shorter than a height of one of the one load and the other load. The plurality of shelf parts include a plurality of a pair of shelf parts composed of the one shelf part and the other shelf part in an array along the track,
The pair of shelf parts are provided such that a distance between the centers of each of the two adjacent pair of shelf parts is larger than a length in a direction along the track of the transport vehicle. Item 4. The storage according to item 2 or 3. When the one load is to be received, the first outer / inner moving means is controlled to horizontally move the one shelf portion to the storage port, and the one load is placed on the one shelf portion. The first outer / inner moving means to horizontally move the one shelf portion inwardly after being placed,
When the other load is to be unloaded, the second outside / internal movement means is controlled to horizontally move the other shelf portion to the unloading port in a state where the other load is placed, The control means for controlling the second outer / inner moving means so as to horizontally move the other shelf portion to the inside after another load is picked up. The storage according to any one of the items. A mounting portion having a first mounting surface capable of supporting the one load and the other load from the bottom side thereof;
The mounting unit further comprising driving means movable between the plurality of shelf parts,
The control means includes
When the one load is to be received, after the one shelf portion is horizontally moved inward, the one load is transferred from the one shelf portion to the plurality of shelf portions by the placement unit. Controlling the drive means to move to a shelf part other than one shelf part,
When the other load is to be delivered, the drive unit moves the other load from the shelf portion other than the other shelf portion to the other shelf portion among the plurality of shelf portions by the placement unit. The storage according to claim 5, wherein the means is controlled. The driving means includes
A horizontal driving unit capable of reciprocating the mounting unit in one horizontal direction;
A vertical drive unit capable of reciprocating the mounting unit in the vertical direction;
The plurality of shelves are provided at one or more horizontal positions reachable by the horizontal driving unit for each of the plurality of steps in the vertical direction, and the one shelf portion is provided between the first mounting surface and the first mounting surface. The storage according to claim 6, further comprising a second placement surface configured to be able to transfer the load or the other load to each other. The transport vehicle is
Traveling means for traveling along the track;
Traveling control means for controlling the traveling means to stop above the one shelf part or the other shelf part moved to the warehouse port or the exit port;
When the transport vehicle is stopped by the travel control means, the transport vehicle places the one load on the one shelf portion that has been moved to the warehousing port, and the other vehicle that has been moved to the shed port. The storage according to any one of claims 2 to 7, wherein the other loads are continuously taken out from the shelf portion. (I) a case or a frame, (II) a plurality of shelf parts arranged in the case or frame and capable of accommodating the one load and the other load, (III) an outer wall of the case or the It is set outside the one entrance provided in the outer frame of the frame, and is provided with an entry port on which the one load is placed from the transport vehicle for transporting the load, and (IV) the one entrance is provided. An outlet port that is set on the outer wall or the outer frame and outside the other entrance provided in line with the one entrance in the vertical direction, and from which the other load is taken out to the transport vehicle, (V) A first outer / inner moving means for horizontally moving the one load between the inside of the housing or the frame and the warehousing port via one doorway; and (VI) the other doorway Between the inside of the housing or the frame and the exit port, A second outer and inner moving means for horizontally moving the serial other load, a stocker having a between the transport vehicle, performing warehousing and unloading of the other of the load of the one of the load continuously It is a loading and unloading method,
A first control step for controlling the first outer / inner moving means to horizontally move one shelf part included in the plurality of shelf parts to the entry port when the one load is to be received;
After the first load is placed on the one shelf part following the first control step, the first outer part is moved horizontally to the inside of the housing or the frame. A second control step for controlling the inner moving means;
When the other load is to be delivered following the second control step, the other shelf portions included in the plurality of shelf portions are horizontally moved to the delivery port while the other loads are placed. And a third control step for controlling the second outside / inside moving means. The storage has a placement portion having a first placement surface capable of supporting the one load and the other load from the bottom side, and the placement portion between the plurality of shelf portions. Drive means that is movable,
In the case where the one load is to be received, after the one shelf part is horizontally moved inward by the second control step, before or after the third control step, A fourth control step of controlling the driving means to move the one load from the one shelf portion to a shelf portion other than the one shelf portion among the plurality of shelf portions by a section;
When the other load is to be delivered, the other load is placed by the placement unit before or after the first and second control steps, or before the third control step. 10. The fifth control step of controlling the driving means so as to be moved from a shelf portion other than the other shelf portion to the other shelf portion among a plurality of shelf portions. Entry / exit method.

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