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JP5445427B2 - Electroless plating solution filter control device - Google Patents

Electroless plating solution filter control device Download PDF

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JP5445427B2
JP5445427B2 JP2010243592A JP2010243592A JP5445427B2 JP 5445427 B2 JP5445427 B2 JP 5445427B2 JP 2010243592 A JP2010243592 A JP 2010243592A JP 2010243592 A JP2010243592 A JP 2010243592A JP 5445427 B2 JP5445427 B2 JP 5445427B2
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plating
plating solution
filter
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metallic
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JP2012097289A (en
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正美 益子
秀光 横山
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Nikon Corp
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Description

本発明は、無電解めっき用めっき液のろ過機を制御する無電解めっき液ろ過機制御装置に関するものである。   The present invention relates to an electroless plating solution filter control device for controlling a filter of a plating solution for electroless plating.

従来、被めっき物に対して、外部から電流を流すことなく、化学還元剤の作用によって、めっき液中の金属イオンを還元してめっきを施す無電解めっきが知られている(例えば、特許文献1参照)。   2. Description of the Related Art Conventionally, electroless plating is known in which plating is performed by reducing metal ions in a plating solution by the action of a chemical reducing agent without applying an electric current from the outside to an object to be plated (for example, Patent Documents). 1).

この無電解めっきに使用するめっき液は、無電解めっきを行うに連れてその液中に金属性副次生成物が発生することが避けられず、この金属性副次生成物を放置すると種々の不具合を起こすことになる。そのため、例えばギヤポンプやマグネットポンプとカートリッジフィルタを組み合わせたろ過機等によって、めっき液中の金属性副次生成物を一定時間毎又は連続的にろ過することが行われている。   The plating solution used for this electroless plating is unavoidable that metallic by-products are generated in the solution as the electroless plating is performed. It will cause problems. Therefore, for example, a metallic by-product in the plating solution is filtered at regular time intervals or continuously by a filter or the like that combines a gear pump, a magnet pump, and a cartridge filter.

特開昭59−143059号公報JP 59-143059 A

ここで、種々の要因により、前記しためっき液中の金属性副次生成物が大量に発生してしまうことがあり、そのときには、ろ過機での通常のろ過作業ではろ過しきれなくなってしまう場合がある。このような状態のまま、めっき作業やろ過機の運転を続けていると、ろ過機内部に対処しきれない金属性副次生成物が入り込んでしまい、ろ過機の部品を損傷する虞もある。そのため、一旦、めっき作業を中断すると共にろ過機の運転を停止して、金属性副次生成物を手動等で除去する作業が必要になる。   Here, due to various factors, a large amount of metallic by-products in the plating solution described above may be generated, and at that time, it may not be possible to completely filter by a normal filtering operation with a filter. There is. If the plating operation and the operation of the filter are continued in such a state, metallic by-products that cannot be dealt with enter the filter, and there is a possibility of damaging the components of the filter. For this reason, it is necessary to temporarily suspend the plating operation and stop the operation of the filter to remove the metallic by-product manually.

しかしながら、従来、めっき液中の金属性副次生成物の発生状況を監視するような手段はなく、そのため、発生状況を把握することはできなかった。そこで、定期的にめっき作業を中断すると共にろ過機の運転を停止して、金属性副次生成物の手動等での除去を行うしかなかったが、この方法では、めっき液中の金属性副次生成物がまだ少ない状態でも、所定の時間が立てばめっき作業を中断してろ過機の運転を停止することになり、作業効率が良くなかった。さらに、この方法では、逆にめっき液中の金属性副次生成物が大量に発生してしまっている状態でも、所定の時間が立っていなければめっき作業の中断やろ過機の運転の停止が行われず、その結果、前記したようなろ過機の部品の損傷の原因となる虞もあった。   However, conventionally, there has been no means for monitoring the state of occurrence of metallic by-products in the plating solution, and therefore the state of occurrence could not be grasped. Therefore, the plating operation was interrupted periodically and the filter operation was stopped to remove the metal by-product manually, etc., but with this method, the metal by-product in the plating solution was removed. Even when the amount of secondary products is still small, the plating operation is interrupted and the operation of the filter is stopped when a predetermined time is reached, and the working efficiency is not good. Furthermore, in this method, on the contrary, even if a large amount of metallic by-products in the plating solution has been generated, if the predetermined time does not stand, the plating operation can be interrupted or the filter operation can be stopped. As a result, there was a risk of causing damage to the parts of the filter as described above.

本発明は、このような事情に鑑みてなされたものであり、無電解めっきにおけるめっき液中の金属性副次生成物の発生状況を把握することで、めっき液のろ過を効率的に行うことができ、ろ過機の損傷も防止することができる無電解めっき液ろ過機制御装置を提供することを目的とする。   The present invention has been made in view of such circumstances, and it is possible to efficiently filter the plating solution by grasping the generation state of metallic by-products in the plating solution in electroless plating. It is an object of the present invention to provide an electroless plating solution filter control device that can prevent damage to the filter.

かかる課題を解決するために、本発明は、めっき液(M)を入れて無電解めっきを行うめっき槽(20)と、前記めっき液(M)の出入り可能に前記めっき槽(20)に繋がれて、前記めっき液(M)中に発生する金属性副次生成物のろ過を行うめっき液ろ過機(30)と、前記めっき槽(20)内の前記めっき液(M)に挿入される陰極軸(40)と、前記めっき槽(20)及び前記陰極軸(40)に接続され、前記めっき槽(20)内に電位差を与えると共に、前記めっき槽(20)内の電流量の変動を検知することで前記めっき槽(20)内の前記めっき液(M)中の前記金属性副次生成物の発生状況を監視する監視装置(50)と、該監視装置(50)で監視された前記めっき槽(20)内の前記めっき液(M)中の前記金属性副次生成物の発生状況に応じて、前記めっき液ろ過機(30)の運転を制御する制御盤(60)と、を有する無電解めっき液ろ過機制御装置(10)としたことを特徴とする。   In order to solve such a problem, the present invention is connected to the plating tank (20) for performing electroless plating by adding a plating solution (M), and to the plating tank (20) so that the plating solution (M) can enter and exit. And inserted into the plating solution filter (30) for filtering the metallic by-product generated in the plating solution (M) and the plating solution (M) in the plating tank (20). The cathode shaft (40) is connected to the plating tank (20) and the cathode shaft (40), gives a potential difference in the plating tank (20), and changes the amount of current in the plating tank (20). A monitoring device (50) for monitoring the occurrence of the metallic by-product in the plating solution (M) in the plating tank (20) by detection, and the monitoring device (50) were used for monitoring. The metallic secondary in the plating solution (M) in the plating tank (20) Depending on the occurrence of Narubutsu, characterized in that the control panel for controlling the operation of the plating solution is filtered (30) and (60), the electroless plating solution filtration machine controller having a (10).

なお、ここでは、本発明をわかりやすく説明するため、実施の形態を表す図面の符号に対応付けて説明したが、本発明が実施の形態に限定されるものではないことは言及するまでもない。   Here, in order to explain the present invention in an easy-to-understand manner, the description has been made in association with the reference numerals of the drawings representing the embodiments. However, it is needless to mention that the present invention is not limited to the embodiments. .

本発明によれば、無電解めっきにおけるめっき液中の金属性副次生成物の発生状況を把握することで、めっき液のろ過を効率的に行うことができ、ろ過機の損傷も防止することができる無電解めっき液ろ過機制御装置を提供することができる。   According to the present invention, it is possible to efficiently filter the plating solution by preventing the occurrence of metallic by-products in the plating solution in electroless plating, and to prevent the filter from being damaged. It is possible to provide an electroless plating solution filter control device capable of performing

本発明の実施の形態に係る無電解めっき液ろ過装置を示す概略構成図である。It is a schematic block diagram which shows the electroless-plating liquid filtration apparatus which concerns on embodiment of this invention.

以下、本発明の実施の形態について説明する。   Embodiments of the present invention will be described below.

最初に、本発明の実施の形態に係る無電解めっき液ろ過機制御装置の構成について、図1を用いて説明する。図1は、本発明の実施の形態に係る無電解めっき液ろ過装置を示す概略構成図である。   Initially, the structure of the electroless-plating-solutions filter control apparatus which concerns on embodiment of this invention is demonstrated using FIG. FIG. 1 is a schematic configuration diagram showing an electroless plating solution filtering apparatus according to an embodiment of the present invention.

本発明の実施の形態に係る無電解めっき液ろ過機制御装置10は、無電解めっきにおけるめっき液中の金属性副次生成物の発生状況を監視・把握し、その発生状況に応じて、めっき液ろ過機の運転状態を制御する装置であり、図1に示すように、めっき槽20と、めっき液ろ過機30と、陰極軸40と、監視装置としての定電圧直流電源50と、制御盤60とを有している。以下、それぞれの構成について説明する。   The electroless plating solution filter control device 10 according to the embodiment of the present invention monitors and grasps the occurrence state of metallic by-products in the plating solution in electroless plating, and performs plating according to the occurrence state. As shown in FIG. 1, the apparatus controls the operating state of the liquid filter. As shown in FIG. 1, a plating tank 20, a plating liquid filter 30, a cathode shaft 40, a constant voltage DC power supply 50 as a monitoring device, and a control panel. 60. Hereinafter, each configuration will be described.

めっき槽20は、無電解めっきに使用するめっき液Mを入れておき、このめっき液Mに被めっき物(図示省略)を漬けることにより、めっき液Mの還元反応でその表面にめっきを施すためのものである。このめっき槽20には、後述するめっき液ろ過機30や陰極軸40、定電圧直流電源50等が種々の状態で繋がれている。また、このめっき槽20には、めっき液Mの温度を昇温させるヒータ等の昇温装置(図示省略)が設けられている。なお、本発明の実施の形態のめっき液Mは、被めっき物にニッケルめっきを施すめっき液である。   The plating tank 20 contains a plating solution M to be used for electroless plating, and a plating object M (not shown) is immersed in the plating solution M so that the surface is plated by a reduction reaction of the plating solution M. belongs to. The plating tank 20 is connected to a plating solution filter 30, a cathode shaft 40, a constant voltage DC power source 50, and the like, which will be described later, in various states. The plating tank 20 is provided with a temperature raising device (not shown) such as a heater for raising the temperature of the plating solution M. The plating solution M according to the embodiment of the present invention is a plating solution for performing nickel plating on an object to be plated.

めっき液ろ過機30は、めっき槽20で所定の温度に昇温されためっき液Mを、めっき槽20との間で循環させて、めっき液M中に発生した金属性副次生成物をろ過するものであり、ポンプ(図示省略)、ろ材(図示省略)、ハウジング33等で構成されている。本発明の実施の形態のポンプは、ステンレス製ギヤポンプであり、最大吐出量が18リットル/分の能力を持ったものとなっている。また、本発明の実施の形態のろ材は、ポア径1μmで全長は10インチのカートリッジ型ろ材である。また、ろ材を覆うハウジング33はステンレス製のものとなっている。また、めっき液ろ過機30は、めっき槽20とめっき液配管31,32で繋がれており、このめっき液配管31,32により、めっき液Mをめっき槽20とめっき液ろ過機30の間で出入り可能にしている。本発明の実施の形態のめっき液配管31,32は、吸込側と吐出側の双方とも、内径φ25mmのステンレス製配管となっている。なお、金属性副次生成物とは、被めっき物に付着した微細な不純物や当該被めっき物の表面から脱落しためっき微粒子等のめっき槽20内に存在している微粒子に、めっきが徐々に析出して成長して大きくなって粒状になったものである。   The plating solution filter 30 circulates the plating solution M heated to a predetermined temperature in the plating tank 20 between the plating tank 20 and filters the metallic by-product generated in the plating solution M. It comprises a pump (not shown), a filter medium (not shown), a housing 33, and the like. The pump according to the embodiment of the present invention is a stainless steel gear pump, and has a maximum discharge capacity of 18 liters / minute. The filter medium according to the embodiment of the present invention is a cartridge type filter medium having a pore diameter of 1 μm and a total length of 10 inches. The housing 33 that covers the filter medium is made of stainless steel. The plating solution filter 30 is connected by a plating tank 20 and plating solution pipes 31 and 32, and the plating solution M is transferred between the plating tank 20 and the plating solution filter 30 by the plating solution pipes 31 and 32. It is possible to go in and out. The plating solution pipes 31 and 32 of the embodiment of the present invention are stainless steel pipes having an inner diameter of φ25 mm on both the suction side and the discharge side. Note that the metallic by-product refers to fine impurities existing in the plating tank 20 such as fine impurities attached to the object to be plated and plating fine particles dropped from the surface of the object to be plated. It precipitates and grows up to become granular.

監視装置(定電圧直流電源)50は、めっき槽20内に電位差を与えると共に、めっき槽20内の電流量の変動を検知するものであり、これにより、めっき槽20内のめっき液M中の金属性副次生成物の発生状況を監視するものである。また、本発明の実施の形態では、めっき槽20と後述する陰極軸40との間に一定の電圧を掛けることで、めっき槽20の底面21及び壁面22に無電解めっきが析出することを防止する定電圧直流電源50が、監視装置を兼ねるように構成されている。   The monitoring device (constant voltage DC power source) 50 gives a potential difference in the plating tank 20 and detects a change in the amount of current in the plating tank 20, and thereby, in the plating solution M in the plating tank 20. Monitors the occurrence of metallic by-products. In the embodiment of the present invention, electroless plating is prevented from being deposited on the bottom surface 21 and the wall surface 22 of the plating tank 20 by applying a constant voltage between the plating tank 20 and a cathode shaft 40 described later. The constant voltage DC power supply 50 is configured to serve also as a monitoring device.

この監視装置としての定電圧直流電源50は、陽極端子51と陰極端子52のそれぞれに電気ケーブル53,54が接続されており、この電気ケーブル53,54のうち、陽極端子51に接続された電気ケーブル53は、めっき槽20の上部と接続されている。また、陰極端子52に接続された電気ケーブル54は、めっき槽20内のめっき液Mに挿入された陰極軸40と接続されている。   In the constant voltage DC power supply 50 as the monitoring device, electric cables 53 and 54 are connected to an anode terminal 51 and a cathode terminal 52, respectively. Of these electric cables 53 and 54, an electric cable connected to the anode terminal 51 is connected. The cable 53 is connected to the upper part of the plating tank 20. The electric cable 54 connected to the cathode terminal 52 is connected to the cathode shaft 40 inserted into the plating solution M in the plating tank 20.

本発明の実施の形態の定電圧直流電源50は、最大電圧が6V、最大電流が2Aの容量であり、電圧計(図示省略)及び電流計(図示省略)を備えている。そして、具体的には、電圧を0.9Vに設定することで、めっき液Mが接触しているめっき槽20の表面に、めっきが析出することを防止制御する作用を持つようになっている。なお、0.9Vよりも電圧が低い場合は、めっきの析出を防止制御する作用はなくなり、0.9Vよりも電圧が高い場合は、めっき槽20の表面を溶解する作用が働いてしまうため、0.9Vに維持することが好ましい。そして,この状態であれば、通常、電流は流れることは無く、定電圧直流電源50内に配設された電流計は0Aを表示する。   The constant voltage DC power supply 50 according to the embodiment of the present invention has a capacity with a maximum voltage of 6 V and a maximum current of 2 A, and includes a voltmeter (not shown) and an ammeter (not shown). Specifically, by setting the voltage to 0.9 V, it has an action of preventing and controlling the deposition of plating on the surface of the plating tank 20 in contact with the plating solution M. . In addition, when the voltage is lower than 0.9V, the effect of preventing and controlling the deposition of plating is lost, and when the voltage is higher than 0.9V, the effect of dissolving the surface of the plating tank 20 works. It is preferable to maintain at 0.9V. In this state, no current normally flows, and the ammeter disposed in the constant voltage DC power supply 50 displays 0A.

制御盤60は、監視装置としての定電圧直流電源50で監視されためっき槽20内のめっき液M中の金属性副次生成物の発生状況に応じて、めっき液ろ過機30の運転を制御するものであり、この制御盤60は、定電圧直流電源50及びめっき液ろ過機30と、それぞれ信号ケーブル61,62で接続されている。また、制御盤60には、定電圧直流電源50から出力された電流の信号を受けて、めっき液ろ過機30の駆動を制御する連動式スイッチ(図示省略)が配設されている。また、この連動スイッチは、定電圧直流電源50から出力される電流量に応じて、めっき液ろ過機30の駆動制御が可能となっている。また、制御盤60には、この他に、めっき液ろ過機30の駆動を任意に制御する手動スイッチ(図示省略)も配設されている。また、制御盤60は、めっき液ろ過機30の駆動と停止を示す表示灯(図示省略)も有している。   The control panel 60 controls the operation of the plating solution filter 30 according to the state of occurrence of metallic by-products in the plating solution M in the plating tank 20 monitored by a constant voltage DC power supply 50 as a monitoring device. The control panel 60 is connected to the constant voltage DC power supply 50 and the plating solution filter 30 via signal cables 61 and 62, respectively. The control panel 60 is provided with an interlocking switch (not shown) that receives a current signal output from the constant voltage DC power supply 50 and controls the driving of the plating solution filter 30. In addition, this interlock switch can control the driving of the plating solution filter 30 according to the amount of current output from the constant voltage DC power supply 50. In addition to this, the control panel 60 is also provided with a manual switch (not shown) for arbitrarily controlling the driving of the plating solution filter 30. The control panel 60 also includes an indicator lamp (not shown) that indicates the driving and stopping of the plating solution filter 30.

次に、本発明の実施の形態の無電解めっき液ろ過機制御装置10を用いて行うめっき作業中のろ過制御法について、図1を用いて説明する。   Next, a filtration control method during plating performed using the electroless plating solution filter control device 10 according to the embodiment of the present invention will be described with reference to FIG.

まず、めっき液Mをめっき槽20に所定量入れ、制御盤60の手動スイッチによりめっき液ろ過機30を駆動させる。   First, a predetermined amount of the plating solution M is put into the plating tank 20, and the plating solution filter 30 is driven by a manual switch of the control panel 60.

次に、定電圧直流電源50のスイッチ(図示省略)を入れて定電圧直流電源50を作動させ、電圧を0.9Vに設定する。この時点では、めっき槽20と陰極軸40との間で電流はほとんど流れることはなく、定電圧直流電源50の電流計は0Aを示すこととなる。   Next, a switch (not shown) of the constant voltage DC power supply 50 is turned on to operate the constant voltage DC power supply 50, and the voltage is set to 0.9V. At this point, almost no current flows between the plating tank 20 and the cathode shaft 40, and the ammeter of the constant voltage DC power supply 50 shows 0A.

次に、制御盤60を連動式スイッチに切り替える。ここでは、定電圧直流電源50の電流計が0.3Aを示した時点で、めっき液ろ過機30を停止させるように設定した。そして、めっき槽20の昇温装置により、めっき槽20内のめっき液Mが所定の作業温度に昇温したら、被めっき物をめっき槽20内のめっき液Mに入れてめっき作業を開始する。   Next, the control panel 60 is switched to the interlocking switch. Here, when the ammeter of the constant voltage DC power supply 50 showed 0.3A, it set so that the plating solution filter 30 could be stopped. And if the plating solution M in the plating tank 20 is heated to a predetermined working temperature by the temperature raising device of the plating tank 20, the object to be plated is put into the plating solution M in the plating tank 20 and the plating operation is started.

このめっき作業を行っている間、同時にめっき液ろ過機30では、めっき液Mのろ過が行われており、金属性副次生成物がめっき液ろ過機30のろ材に捕獲されるようになっている。   While the plating operation is being performed, the plating solution M is filtered by the plating solution filter 30 at the same time, and the metallic by-product is captured by the filter medium of the plating solution filter 30. Yes.

そして、所定のめっき時間で処理した被めっき物は、めっき槽20内のめっき液Mから取り出し、引き続き、次の被めっき物をめっき槽20内のめっき液Mに入れてめっき作業を行う。   And the to-be-plated object processed by predetermined plating time is taken out from the plating solution M in the plating tank 20, and the next to-be-plated object is put into the plating solution M in the plating tank 20, and a plating operation is performed.

このようにして繰り返しめっき作業を行っている間に、めっき槽20内のめっき液M中には、金属性副次生成物が徐々に発生し,次第に増え出してくる。また、これにより、定電圧直流電源50によるめっき析出防止作用を超えて、めっき槽20内の底面21や壁面22に、めっきが析出してくる。そして、めっき槽20内の金属性副次生成物と陰極軸40との間では電気分解が生じ、定電圧直流電源50の電流計の値が徐々に上昇を示すようになる。   During the repeated plating operation in this way, metallic by-products are gradually generated in the plating solution M in the plating tank 20 and gradually increase. This also causes plating to deposit on the bottom surface 21 and the wall surface 22 in the plating tank 20, exceeding the plating deposition preventing effect of the constant voltage DC power supply 50. Then, electrolysis occurs between the metallic by-product in the plating tank 20 and the cathode shaft 40, and the value of the ammeter of the constant voltage DC power supply 50 gradually increases.

これについて詳述する。まず、めっき槽20内の金属性副次生成物の発生量が少ない状態では、その金属性副次生成物はめっき液ろ過機30に吸い込まれてろ材に捕獲され、めっき槽20内のめっき液Mは清浄な状態に保たれる。しかし、めっき槽20内の金属性副次生成物の発生量が多くなってくると、その金属性副次生成物がめっき液ろ過機30に吸い込まれきれずにめっき槽20内に蓄積するようになる。この場合、金属性副次生成物は、めっき槽20内の底面21や壁面22と接触しているため陽極となり、電圧が負荷されていることから電気分解が生じ、陰極軸40との間に電流が流れるようになるものである。   This will be described in detail. First, in a state where the amount of metallic by-products generated in the plating tank 20 is small, the metallic by-products are sucked into the plating solution filter 30 and captured by the filter medium, and the plating solution in the plating tank 20 is obtained. M is kept clean. However, as the amount of metallic by-products generated in the plating tank 20 increases, the metallic by-products are not sucked into the plating solution filter 30 and accumulate in the plating tank 20. Become. In this case, the metallic by-product becomes an anode because it is in contact with the bottom surface 21 and the wall surface 22 in the plating tank 20, and electrolysis occurs due to the voltage being applied, and between the cathode shaft 40. The current flows.

そして、さらにめっき作業を行ううちに、定電圧直流電源50の電流計の値が予め設定していた0.3Aを示すと、この電流が定電圧直流電源50を通じて、制御盤60に信号として入ることで、同時にめっき液ろ過機30の駆動を停止させる。これにより、めっき液ろ過機30内部に多量の金属性副次生成物が吸い込まれることが無くなり、めっき液ろ過機30の部材の損傷を防止することができる。   Then, if the value of the ammeter of the constant voltage DC power supply 50 indicates 0.3 A which has been set in advance during the further plating operation, this current enters the control panel 60 through the constant voltage DC power supply 50 as a signal. Thus, the driving of the plating solution filter 30 is stopped simultaneously. As a result, a large amount of metallic by-product is not sucked into the plating solution filter 30, and damage to the members of the plating solution filter 30 can be prevented.

なお、この時点で行っていためっき作業は継続され、所定の時間を経過した後に取り出す。この後、めっき液Mを別の槽(図示省略)に移し替えて、金属性副次生成物を小容器で掬い出す等により除去する。そして、清浄な状態になっためっき液Mを元のめっき槽20に戻し、めっき作業を再開する。   The plating operation performed at this time is continued and taken out after a predetermined time has elapsed. Thereafter, the plating solution M is transferred to another tank (not shown), and the metallic by-product is removed by squeezing out in a small container. Then, the plating solution M in a clean state is returned to the original plating tank 20 and the plating operation is resumed.

以上のように、本発明の実施の形態の無電解めっき液ろ過機制御装置10は、めっき液Mを入れて無電解めっきを行うめっき槽20と、めっき液Mの出入り可能にめっき槽20に繋がれて、めっき液M中に発生する金属性副次生成物のろ過を行うめっき液ろ過機30と、めっき槽20内のめっき液Mに挿入される陰極軸40と、めっき槽20及び陰極軸40に接続され、めっき槽20内に電位差を与えると共に、めっき槽20内の電流量の変動を検知することでめっき槽20内のめっき液M中の金属性副次生成物の発生状況を監視する監視装置としての定電圧直流電源50と、監視装置としての定電圧直流電源50で監視されためっき槽20内のめっき液M中の金属性副次生成物の発生状況に応じて、めっき液ろ過機30の運転を制御する制御盤60と、を有することを特徴とする。   As described above, the electroless plating solution filter control device 10 according to the embodiment of the present invention includes the plating bath 20 that performs the electroless plating with the plating solution M, and the plating bath 20 that allows the plating solution M to enter and exit. The plating solution filter 30 is connected to filter the metallic by-product generated in the plating solution M, the cathode shaft 40 is inserted into the plating solution M in the plating bath 20, the plating bath 20 and the cathode. It is connected to the shaft 40, gives a potential difference in the plating tank 20, and detects the occurrence of metallic by-products in the plating solution M in the plating tank 20 by detecting fluctuations in the current amount in the plating tank 20. The constant voltage DC power supply 50 as a monitoring device to be monitored, and plating according to the state of occurrence of metallic by-products in the plating solution M in the plating tank 20 monitored by the constant voltage DC power supply 50 as the monitoring device. Control to control the operation of the liquid filter 30 A board 60, and having a.

そして、本発明の実施の形態の無電解めっき液ろ過機制御装置10によれば、無電解めっきにおけるめっき液M中の金属性副次生成物の発生状況を把握することで、めっき液Mのろ過を効率的に行うことができ、めっき液ろ過機30の損傷も防止することができる無電解めっき液ろ過機制御装置10を提供することができる。   And according to the electroless-plating-solution filter control apparatus 10 of embodiment of this invention, by grasping | ascertaining the generation | occurrence | production state of the metallic by-product in the plating solution M in electroless plating, It is possible to provide the electroless plating solution filter control device 10 that can efficiently perform the filtration and prevent the plating solution filter 30 from being damaged.

また、本発明の実施の形態の無電解めっき液ろ過機制御装置10は、上記構成に加えて、監視装置が、めっき槽20と陰極軸40との間に一定の電圧を掛ける定電圧直流電源50を含むことを特徴とする。 In addition to the above configuration, the electroless plating solution filter control device 10 according to the embodiment of the present invention is a constant voltage DC power source in which the monitoring device applies a constant voltage between the plating tank 20 and the cathode shaft 40. characterized in that it comprises a 50.

そして、本発明の実施の形態の無電解めっき液ろ過機制御装置10によれば、上記作用効果に加えて、監視装置が定電圧直流電源50を含むことで、装置の構成を簡単にすることができ、定電圧直流電源と監視装置を別々に配設するよりもコストを抑えることができる。 And according to the electroless-plating-solution-filter control apparatus 10 of embodiment of this invention, in addition to the said effect, the monitoring apparatus contains the constant voltage DC power supply 50 , and simplifies the structure of an apparatus. Therefore, the cost can be reduced as compared with the case where the constant voltage DC power source and the monitoring device are separately provided.

なお、以上説明した実施の形態は、本発明の理解を容易にするために記載されたものであって、本発明を限定するために記載されたものではない。   The embodiment described above is described in order to facilitate understanding of the present invention, and is not described in order to limit the present invention.

例えば、前記した実施の形態では、定電圧直流電源50が監視装置を兼ねるように構成されていたが、本発明はこれに限るものではなく、定電圧直流電源と監視装置が別々に設けられる構成となっていても良い。但し、前記した実施の形態のような定電圧直流電源が監視装置を兼ねる構成の方が、装置の構成を複雑化させずに簡単にすることができ、別々に配設するよりもコスト低減を図ることができるという利点はある。   For example, in the above-described embodiment, the constant voltage DC power supply 50 is configured to serve also as the monitoring device. However, the present invention is not limited to this, and the constant voltage DC power supply and the monitoring device are provided separately. It may be. However, the configuration in which the constant voltage DC power supply also serves as the monitoring device as in the above-described embodiment can be simplified without complicating the configuration of the device, and the cost can be reduced compared to the case where they are separately provided. There is an advantage of being able to plan.

また、前記した実施の形態では、被めっき物にニッケルめっきを施すようになっていたが、本発明はこれに限るものではなく、銅、銀等の他の種類めっきを施す装置にも適用可能である。   Further, in the above-described embodiment, nickel plating is applied to the object to be plated, but the present invention is not limited to this, and can be applied to an apparatus for performing other types of plating such as copper and silver. It is.

また、前記した実施の形態における各種数値は、これに限るものではなく、本発明の範囲内で適宜変更可能である。例えば、めっき液ろ過機30を停止させる設定電流量を前記した実施の形態の値よりも下げることで、金属性副次生成物の発生がより少ない時点でめっき液ろ過機30の駆動を停止させることができる。   Moreover, the various numerical values in the above-described embodiment are not limited to this, and can be appropriately changed within the scope of the present invention. For example, by lowering the set current amount for stopping the plating solution filter 30 below the value of the above-described embodiment, the driving of the plating solution filter 30 is stopped at a time when the generation of metallic by-products is less. be able to.

また、前記した実施の形態では、めっき液M中の金属性副次生成物が所定量を超えた場合、めっき液ろ過機30を停止させるように制御していたが、本発明はこれに限るものではない。めっき液ろ過機の性能や仕様等によっては、例えば、当該めっき液ろ過機のろ過機能を上げたり下げたりするように制御したり、ろ過状態を通常モードから金属性副次生成物が大量である場合に使用する別モードに変更するように制御したりする等、めっき液ろ過機を停止させる以外の制御を行うようになっていても良い。   Moreover, in above-mentioned embodiment, when the metal by-product in the plating solution M exceeded predetermined amount, it controlled to stop the plating solution filter 30, but this invention is limited to this. It is not a thing. Depending on the performance and specifications of the plating solution filter, for example, the filtration function of the plating solution filter is controlled to be raised or lowered, or the filtration state is changed from the normal mode to a large amount of metallic by-products. Control other than stopping the plating solution filter, such as changing to another mode to be used in some cases, may be performed.

10 無電解めっき液ろ過機制御装置
20 めっき槽
21 底面
22 壁面
30 めっき液ろ過機
31,32 めっき液配管
40 陰極軸
50 定電圧直流電源(監視装置)
51 陽極端子
52 陰極端子
53,54 電気ケーブル
60 制御盤
61,62 信号ケーブル
M めっき液
10 Electroless Plating Solution Filter Control Device 20 Plating Tank 21 Bottom 22 Wall 30 Plating Filter 31, 32 Plating Pipe 40 Cathode Shaft 50 Constant Voltage DC Power Supply (Monitoring Device)
51 Anode terminal 52 Cathode terminal 53, 54 Electric cable 60 Control panel 61, 62 Signal cable M Plating solution

Claims (2)

めっき液を入れて無電解めっきを行うめっき槽と、
前記めっき液の出入り可能に前記めっき槽に繋がれて、前記めっき液中に発生する金属性副次生成物のろ過を行うめっき液ろ過機と、
前記めっき槽内の前記めっき液に挿入される陰極軸と、
前記めっき槽及び前記陰極軸に接続され、前記めっき槽内に電位差を与えると共に、前記めっき槽内の電流量の変動を検知することで前記めっき槽内の前記めっき液中の前記金属性副次生成物の発生状況を監視する監視装置と、
該監視装置で監視された前記めっき槽内の前記めっき液中の前記金属性副次生成物の発生状況に応じて、前記めっき液ろ過機の運転を制御する制御盤と、
を有することを特徴とする無電解めっき液ろ過機制御装置。
A plating tank for performing electroless plating with a plating solution;
A plating solution filter connected to the plating tank so that the plating solution can come in and out, and performing filtration of metallic by-products generated in the plating solution;
A cathode shaft inserted into the plating solution in the plating tank;
The metallic secondary in the plating solution in the plating tank by being connected to the plating tank and the cathode shaft, giving a potential difference in the plating tank, and detecting a change in the amount of current in the plating tank. A monitoring device for monitoring the generation status of the product;
A control panel for controlling the operation of the plating solution filter according to the state of occurrence of the metallic by-product in the plating solution in the plating tank monitored by the monitoring device;
An electroless plating solution filter control device characterized by comprising:
前記監視装置は、前記めっき槽と前記陰極軸との間に一定の電圧を掛ける定電圧直流電源を含むことを特徴とする請求項1に記載の無電解めっき液ろ過機制御装置。 2. The electroless plating solution filter control device according to claim 1, wherein the monitoring device includes a constant voltage DC power source that applies a constant voltage between the plating tank and the cathode shaft.
JP2010243592A 2010-10-29 2010-10-29 Electroless plating solution filter control device Expired - Fee Related JP5445427B2 (en)

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