JP5371099B2 - Visual inspection device and visual inspection method - Google Patents

Description

  The present invention relates to a visual inspection apparatus and a visual inspection method, and more particularly, to a visual inspection apparatus and a visual inspection method for a display panel that visually inspect defects in a display panel such as a liquid crystal display panel or a plasma display panel.

  In a display panel such as a liquid crystal display panel, a so-called lighting inspection is usually performed in the final inspection of the cell process, in which the panel is actually turned on to check for the presence of point defects, line defects, uneven defects, and the like. In this lighting inspection, normally, two types of inspection devices called an automatic inspection device and a visual inspection device are used alone or in combination.

  An automatic inspection device is an inspection device that takes a display panel on which a test pattern is displayed with a CCD camera or the like as image data, performs image processing on the image data with a computer, and automatically determines the presence or absence of defects. Since it does not involve visual judgment by the worker, there is an advantage that judgment of the presence or absence of defects is uniform, is objective, and has high processing capability. On the other hand, however, the automatic inspection apparatus has a drawback that it is difficult to set a threshold value when the software installed in the computer determines whether or not the image-processed data represents a defect. In other words, if the threshold value is set low in order to avoid omission of defect detection, the software determines that even dust and scratches on the panel are defects, so-called overdetection, and the product yield deteriorates. In contrast, if the threshold value is set high in order to avoid overdetection, an object that should be detected as a defect is overlooked, leading to a defect in defect detection.

  On the other hand, the visual inspection device is a device that inspects the display panel on which the test pattern is displayed by visually inspecting the presence or absence of defects, and the inspector visually determines the presence or absence of defects. It has an advantage that finer defect inspection is possible than an automatic inspection apparatus. However, the accuracy of defect detection in visual inspection equipment depends largely on the level of proficiency of the inspector, and there is a drawback that variations in the accuracy of defect detection cannot be avoided depending on the inspector, and the inspection takes time. There is an inconvenience that the efficiency is low.

  For this reason, it is also conceivable to combine both the automatic inspection device and the visual inspection device so as to complement each other's defects. However, in the combination of checking the inspection panel determined to be defective by the automatic inspection device with the visual inspection device, for example, if the threshold value in the automatic inspection device is set low to avoid defect detection failure, the automatic inspection device will be defective. If the number of panels judged to be increased increases, and all of these panels are sent to the visual inspection device and turned on one by one, visual inspection will take a very long time. There arises a disadvantage that the processing capacity is greatly reduced. Conversely, in order to suppress the number of panels to be inspected by the visual inspection apparatus, if the threshold value in the automatic inspection apparatus is set high, there is an inconvenience that an object that should be detected as a defect is overlooked and a defect detection failure occurs. In any case, the problem that the threshold setting in the automatic inspection apparatus is difficult is not solved.

  In order to solve this problem, for example, in Patent Documents 1 and 2, if an automatic inspection apparatus determines that there is a defect by analyzing the captured image data, an image of the panel is displayed on the monitor screen. An inspection system has been proposed in which an inspector can check whether there is a defect on a monitor screen. According to these inspection systems, the inspector only confirms on the monitor screen the images of the panels that are judged to be defective by the automatic inspection device. Compared with the case where it carries out, the advantage that visual inspection can be performed efficiently is acquired.

  However, in these conventional inspection systems, what is subject to visual inspection is not an actual display panel that is lit with a test pattern displayed, but is a display image of a display panel that is taken by an automatic inspection apparatus. Although it is a visual inspection, its inspection accuracy is limited by the sharpness and resolution of an image taken by an automatic inspection apparatus, and has the disadvantage that the original accuracy of visual inspection cannot be obtained.

JP 2001-289733 A JP 2004-279037 A

  The present invention has been made to solve the above-mentioned problems of the prior art, and is less dependent on the skill level of the inspector, and has a visual inspection apparatus and a visual inspection method with good inspection efficiency, and such visual inspection. It is an object to provide an inspection system including an inspection device.

  The present invention provides a visual inspection apparatus for a display panel having means for displaying a test pattern on a panel to be inspected, and obtains automatic test result information created by the test pattern storage means and the automatic inspection apparatus. Means for creating a marker pattern for a defect determined to be present in the inspection target panel by the automatic inspection apparatus based on the acquired automatic inspection result information, means for superimposing the created marker pattern on the test pattern, The problem is solved by providing a visual inspection apparatus having means for displaying a test pattern on which a marker pattern is superimposed on a panel to be inspected, and by providing an inspection system including such a visual inspection apparatus. Is.

  The marker pattern in the visual inspection apparatus of the present invention is preferably a defect type and / or a defect pattern displayed at a position corresponding to a position on the inspection target panel of a defect determined to be present on the inspection target panel by the automatic inspection apparatus. It is a pattern composed of one or more figures and / or symbols corresponding to the size. The visual inspection apparatus of the present invention allows the inspector to concentrate attention on a specific area on the inspection target panel by superimposing this marker pattern on the test target panel and superimposing it on the test pattern. Compared with the case where the entire panel is inspected from scratch, it is possible to carry out a visual inspection with high accuracy and less dependence on the skill level of the inspector. As a result, the processing capability of the entire inspection system including both the automatic inspection device and the visual inspection device is improved, and it becomes possible to set a low threshold value in the automatic inspection device to reduce defect detection omissions.

  Further, the visual inspection apparatus of the present invention includes a monitor screen, means for displaying a defect determined to be present on the panel to be inspected on the monitor screen, and one or a plurality of defects among the displayed defects. A visual inspection based on the means for enabling selection, the means for allowing the selected defect to be associated with a visual inspection result for the defect, and the defect and the visual inspection result associated therewith; It is desirable to provide means for creating result information. Thereby, the inspector can create visual inspection result information based on the result of the visual inspection performed. This visual inspection result information may be used as it is, and based on this visual inspection result information, the previously acquired automatic inspection result information can be rewritten and used as comprehensive inspection result information. .

  The means for displaying the defect determined that the automatic inspection apparatus is present on the inspection target panel on the monitor screen is preferably a means for displaying an image of the inspection target panel on which at least the marker pattern is displayed on the monitor screen. When the image of the inspection target panel on which the marker pattern is displayed is displayed on the monitor screen, the actual inspection target panel that is lit corresponds to the image of the inspection target panel displayed on the monitor screen. Therefore, there is an advantage that it becomes easy to select one or a plurality of defects from the defects displayed on the monitor screen.

  In the inspection system of the present invention, the means for displaying the test pattern on the panel in the visual inspection apparatus may be the means for displaying the test pattern on the inspection target panel in the automatic inspection apparatus. In this case, the means for displaying the test pattern on the panel is common to the automatic inspection device and the visual inspection device, and the marker pattern based on the automatic inspection result information is directly applied to the inspection panel that has been inspected by the automatic inspection device. It is possible to display and perform a visual inspection.

  The present invention also includes a step of bringing the inspection object panel into the inspection position of the visual inspection device, a step of obtaining automatic inspection result information created by the automatic inspection device for the inspection panel carried into the inspection position, and the acquired automatic inspection result information. A step of creating a marker pattern for a defect determined to be present in the inspection target panel by the automatic inspection apparatus, and a step of superimposing the created marker pattern on the test pattern and displaying it on the inspection target panel at the inspection position. The above-described problems are solved by providing a visual inspection method including the above.

  In the visual inspection method of the present invention, based on the automatic inspection result information created in the preceding automatic inspection, the marker pattern for the defect determined by the automatic inspection apparatus to be present in the inspection target panel is displayed on the inspection target panel. Therefore, the inspector can perform the visual inspection with higher efficiency and higher accuracy than the case where the entire area of the panel to be inspected is inspected from scratch without any deviation. For this reason, the inspection efficiency is improved, and the threshold value in the automatic inspection apparatus can be set low to reduce defect detection omission.

  According to the visual inspection device and the visual inspection method of the display panel of the present invention, the defect determined by the automatic inspection device to exist in the inspection target panel is displayed on the inspection target panel as a marker pattern superimposed on the test pattern. The inspector in the visual inspection apparatus can determine the presence or absence of a defect by concentrating attention on a specific area on the panel indicated by the marker pattern. Therefore, compared with the case where the entire panel is inspected evenly, the accuracy of defect detection is increased, and even an inexperienced inspector can efficiently perform a high-precision visual inspection, which increases the skill level of the inspector. There is an advantage that high-precision visual inspection that is less dependent can be efficiently performed.

  In particular, when the marker pattern is a pattern composed of one or more figures and / or symbols corresponding to the type and / or size of the defect, by looking at the marker pattern displayed on the panel, Since not only the position of the defect that may exist but also information on the type and size of the defect can be obtained, there is an advantage that the inspection efficiency is greatly increased.

  Further, according to the inspection system of the present invention including the automatic inspection device and the visual inspection device of the present invention, the inspection efficiency of the visual inspection device is high. There is an advantage that defect detection failure can be prevented. In addition, by setting the threshold value in the automatic inspection apparatus low, even if the proportion of panels that are judged to be defective in the automatic inspection apparatus increases, the subsequent visual inspection apparatus can efficiently perform high-precision visual inspection. As a result, there is no risk of overdetection in the entire inspection system, and there is an advantage that the yield of the product is not lowered more than necessary.

It is a conceptual diagram which shows an example of the test | inspection system of this invention. It is the schematic which shows an example of the visual inspection apparatus of this invention. It is a conceptual diagram of the test | inspection part of a visual inspection apparatus. It is a figure which shows an example of the marker displayed on a panel. It is a figure which shows the other example of the marker displayed on a panel. It is a figure which shows the further another example of the marker displayed on a panel. It is a figure which shows an example of a marker pattern.

  Hereinafter, the present invention will be described in detail with reference to the drawings, taking as an example the case where the inspection panel is a liquid crystal display panel, but the present invention is not limited to the illustrated one.

  FIG. 1 is a conceptual diagram showing an example of the inspection system of the present invention. In FIG. 1, 1 is an inspection system of the present invention, 2 is an automatic inspection device, 3 is a visual inspection device of the present invention, 4 is a network such as a LAN installed in a factory, and 5 is a management server. is there. As shown in the figure, the automatic inspection device 2, the visual inspection device 3, and the management server 5 are connected via the network 4 in a wired or wireless manner at all times or at any time, and can exchange data and commands as necessary. As a whole, the inspection system 1 of the present invention is formed.

  The automatic inspection device 2 is a normal automatic inspection device, means for displaying a test pattern on the inspection target panel, image data acquisition means for acquiring the display screen of the inspection target panel on which the test pattern is displayed as image data, and acquisition Image processing means for analyzing the image data, means for creating automatic inspection result information based on the analyzed image data, and storage means for storing the created automatic inspection result information.

  For example, as in the visual inspection apparatus 3 to be described later, the automatic inspection apparatus 2 takes in the inspection object panel, sets it on the set stage and conveys it to the inspection section, and the inspection panel conveyed to the inspection section. An alignment camera that performs alignment, a probe unit that contacts an electrode of the inspection panel, an inspection unit that supplies a signal to the probe unit, lights the inspection panel, and displays a test pattern, and a storage device that stores the test pattern By these, it is comprised so that a test pattern can be displayed on an inspection object panel. The storage device that stores the test pattern may be on the management server 5.

  The automatic inspection apparatus 2 includes an imaging device such as a television camera or a CCD camera as image data acquisition means for capturing the display screen of the inspection target panel on which the test pattern is displayed as image data. As an image processing means for analyzing and means for creating automatic inspection result information based on the analyzed image data, a computer and a program for causing the computer to perform the above-described image processing and automatic inspection result information are provided. ing. The computer provided in the automatic inspection device 2 stores the created automatic inspection result information in a storage device provided in the automatic inspection device 2, a storage device provided in the management server 5, or both. .

  Each inspection panel inspected by the automatic inspection apparatus 2 is given an identification ID using, for example, a two-dimensional barcode, an IC tag, etc., and a computer provided in the automatic inspection apparatus 2 Uses an appropriate means such as a TV camera, a CCD camera, or an IC tag reader to read the identification ID of each inspection panel by the loader unit or the inspection unit. The created automatic inspection result information is associated with the identification ID of the read inspection panel, the storage device provided in the automatic inspection device 2, the storage device provided in the management server 5, or the It will be stored in both. At this time, the image data captured for the inspection panel and / or the analysis result of the image data may be stored together.

  FIG. 2 is a schematic view showing an example of the visual inspection device 3 of the present invention. In FIG. 2, reference numeral 6 denotes a loader unit, and 7 denotes an inspection unit. These loader unit 6 and inspection unit 7 form a visual inspection device 3. 8 is a monitor screen provided in the inspection unit 7, 9 and 9 are alignment cameras provided in the inspection unit 7, 10 and 10 are probe units similarly provided in the inspection unit 7, and 11 is an inspection panel.

  The loader unit 6 has a function of taking a liquid crystal panel to be inspected with a mechanical hand from a transport device (not shown), setting the liquid crystal panel on a set stage movable in the XYZθ directions, and transporting the liquid crystal panel to the inspection unit 7. In the inspection unit 7, alignment is performed using the alignment cameras 9 and 9 and the set stage so that the inspection panel 11 set on the set stage is at a predetermined inspection position. When the alignment is completed, the probe units 10 and 10 are pressed against the electrodes of the inspection panel 11, the inspection panel 11 is turned on, and a test pattern and the like are displayed. This is visually inspected by an inspector, and a visual inspection is performed. The inspection panel 11 that has been inspected is transported to the loader unit 6 and returned to the external transport device. These operations in the visual inspection apparatus 3 are performed under the control of a computer accommodated in the inspection unit 7.

  FIG. 3 is a conceptual diagram showing a configuration of the inspection unit 7. In FIG. 3, 12 is a computer, 13 is a storage device, 14 is an input / output device, 15 is a test pattern storage device, 16 is a marker pattern creation device, 17 is a pattern synthesis device, 18 is a test pattern or the like on the liquid crystal panel 11. It is a drive device to display. As shown in FIG. 3, the computer 12, the storage device 13, the input / output device 14, the test pattern storage device 15, the marker pattern creation device 16, and the monitor screen 8 are connected by signal lines. It is connected to the network 4 by wire or wireless.

  Hereinafter, the operation of the visual inspection device 3 of the present invention and the visual inspection method of the present invention will be described with reference to FIGS. 2 and 3. First, when an inspector (not shown) instructs the computer 12 to start panel inspection via the input / output device 14, the computer 12 sends a command to the loader unit 6 and waits on the external transfer device. The panel 11 is taken in, set on the set stage, and conveyed to the inspection unit 7. When the conveyance of the inspection panel 11 to the inspection unit 7 is completed, the computer 12 sends a command to the inspection unit 7, and uses the alignment cameras 9 and 9 and the set stage to move the inspection panel 11 that has been conveyed to the inspection unit 7. Align to a predetermined inspection position.

  The identification ID attached to the inspection panel 11 is read by an appropriate reading means provided in the inspection unit 7 and temporarily stored in the storage device 13 as in the automatic inspection apparatus 2 described above. It is displayed on the monitor screen 8. The identification ID attached to the inspection panel 11 may be read by the loader unit 6.

  When the reading of the identification ID is completed, the computer 12 automatically or after waiting for a command from the input / output device 14, the automatic inspection result for the inspection panel 11 of the read identification ID via the network 4. Request to send information. This request is made to the automatic inspection apparatus 2 when the automatic inspection result information is stored in the storage device of the automatic inspection apparatus 2, and to the management server 5 when stored in the management server 5. It is done. When the automatic inspection result information of the inspection panel 11 is received from the automatic inspection device 2 or the management server 5, the computer 12 transmits it to the marker pattern creation device 16.

  The marker pattern creation device 16 creates a marker pattern for the inspection panel 11 based on the transmitted automatic inspection result information. The marker pattern creation by the marker pattern creation device 16 is performed as follows, for example. That is, the marker pattern creation device 16 determines whether the defect is, for example, a point defect, a line, or the like for each of one or more defects determined to be present on the inspection panel 11 based on the transmitted automatic inspection result information. It is determined whether the defect is a defect or a mura defect, and the determination result is stored in the storage device 13 in association with each defect. If the marker pattern creation device 16 has its own storage device, it may be stored in that storage device. The type of defect can be determined based on position information of individual defects included in the automatic inspection result information. If the transmitted automatic inspection result information already contains information on the type of each defect, it may be used as it is.

  The storage device in the storage device 13 or the marker pattern creation device 16 stores a correspondence table of defect types, figures or symbols to be displayed as markers, and their colors. For example, the point defect marker graphic is “circle”, the color is “red”, the line defect marker symbol is “×”, the color is “green”, and the uneven defect marker graphic is “square”. A correspondence relationship such as “blue” for the color is stored in the correspondence table. Incidentally, these marker figures or symbols and their colors are merely examples. Of course, it is possible to make each figure correspond to another figure or symbol, or another color, and the figure and symbol set in the correspondence table and their colors can be determined by, for example, an inspector. Setting and changing can be performed as appropriate from the input / output device 14 via the computer 12. Further, these markers or figures or symbols may be blinked or added with a symbol such as an arrow to facilitate the attention of the inspector.

  Next, the marker pattern creation device 16 should display the individual defects based on the position information of the individual defects included in the transmitted automatic inspection result information and the type of the defect determined earlier. The address of the cell in the inspection panel 11 that forms the marker is calculated. For example, when the first defect is a point defect, the marker pattern creation device 16 reads out from the correspondence table between the defect type and the marker that the marker is “circle” and the color is “red”. In the inspection panel 11, the address of a cell that draws a “circle” centered on a cell that is assumed to have a point defect is calculated. The calculated cell address is stored as a marker pattern for the first defect in the storage device 13 or the storage device in the marker pattern creation device 16 together with the color of the marker.

Based on the calculated address of the cell, "circle" as a marker to be displayed on the test panel 11 is, for example, in FIG. 4, but shown as M _1. As shown in FIG. 4, the marker M ₁ is displayed on the inspection panel 11 as a “circle” having an appropriate radius centered on the point defect D ₁ determined to be a defect by the automatic inspection apparatus. In FIG. 4, for convenience of explanation, the point defect D ₁ is shown together with the marker M ₁ , but the defect D ₁ is an object for the inspector to visually determine the presence or absence of the defect. It is not displayed on the inspection panel 11. Further, in FIG. 4, but not attached color marker M _1, the marker M ₁ is actually a color that is set to a marker of the point defects in the correspondence table, test panels, for example, "red" 11 is displayed.

The radius of the “circle” as the marker M ₁ may be set to an appropriate size. If the radius of the “circle” is too small, it is difficult to find the “circle” on the inspection panel 11, and if it is too large, the area surrounded by the “circle” is too wide, and “ Since the meaning of displaying “circle” on the inspection panel 11 is lost, it is not preferable. The radius of the “circle” as the marker is preferably set so that the inspector can appropriately set and change from the input / output device 14 via the computer 12.

  In addition, when there are a plurality of point defects and “circles” as markers for the individual point defects overlap, the marker pattern creation device 16 calculates the address of the cell that is the center of the plurality of point defects by calculation. The cell address may be calculated so that a “circle” of a radius covering a plurality of point defects centered on the cell is displayed.

  When the second defect is, for example, a line defect, the marker pattern creation device 16 reads out from the correspondence table between the defect type and the marker that the marker is “x” and the color is “green”. In the inspection panel 11, an address of a cell in which a symbol “x” is drawn at both ends of a cell row that is assumed to have a line defect is calculated. The calculated cell address is stored as a marker pattern for the second defect in the storage device 13 or the storage device in the marker pattern creation device 16 together with the color of the marker.

Based on the calculated cell address, “x” as a marker displayed on the inspection panel 11 is, for example, as shown as M ₂ and M _{2 in} FIG. 5 (FIG. 4 markers _{M 1} and the defect _{D 1} shown in are also shown). As shown in FIG. 5, the markers M ₂ and M ₂ have the inspection panel 11 as two “x” symbols with the two ends of the line defect D ₂ determined as a defect in the automatic inspection apparatus as intersections of the two lines. Will be displayed. In FIG. 5, for convenience of explanation, the line defect D ₂ is shown together with the markers M ₂ and M ₂ , but the defect D ₂ is an object for which the inspector determines the presence or absence by visual inspection. It is a thing and is not displayed on the inspection panel 11. Further, in FIG. 5, but not attached color marker M _2, M _2, the marker M _2, M ₂ is actually the color that is set to a marker of line defects in the correspondence table, for example, “Green” is displayed on the inspection panel 11.

In FIG. 5, the markers M ₂ and M ₂ are displayed as a set of _{two in} a position sandwiching both ends of the line defect D ₂ , but the symbol “×” is displayed only at one end of the line defect D _2. it "may be displayed, one of the" × "symbol position where the middle line defect D ₂ may also be displayed. Further, only one end of a line defect D _2, or when only the central portion for displaying the symbol "×" is changing the size of the symbol "×" in accordance with the length of the line defect D _2, line defects D _{If the} symbol “x” is displayed large when ₂ is long and the symbol “x” is displayed small when ₂ is short, the size of the symbol “x” indicates that the line defect D ₂ is supposed to exist. You can know the approximate length and it is convenient.

  If the third defect is, for example, a mura defect, the marker pattern creation device 16 reads from the correspondence table between the defect type and the marker that the marker is “square” and the color is “blue”. In the inspection panel 11, the address of the cell displaying the “square” surrounding the area where the mura defect is present is calculated. The calculated cell address is stored as a marker pattern for the third defect in the storage device 13 or the storage device in the marker pattern creation device 16 together with the color of the marker.

Based on the calculated address of the cell, "square" as a marker to be displayed on the test panel 11 is, for example, in FIG. 6, but shown as M ₃ (in FIG. 6, shown in Figure 5 Markers M ₁ , M ₂ , M ₂ and defects D ₁ , D ₂ are also shown). As shown in FIG. 6, the marker M ₃ is displayed on the inspection panel 11 as a “square” surrounding the mura defect D ₃ determined as a defect in the automatic inspection apparatus. In FIG. 6, for convenience of explanation, a mura defect D ₃ is also shown together with the marker M ₃ , but the defect D ₃ is an object for which an inspector determines the presence or absence by visual observation. It is not displayed on the inspection panel 11. Further, in FIG. 6, but not attached color marker M _3, the marker M ₃ are, in fact, the color that is set to a marker of mura defects in the correspondence table, test panels, for example, "blue" 11 is displayed.

  By repeating the above operation, the marker pattern creation device 16 calculates the addresses of the marker cells to be displayed for all the defects included in the received automatic inspection result information, and stores them together with the color of the marker. The marker pattern is created by storing in the storage device in the device 13 or the marker pattern creation device 16. The created marker pattern is, for example, a pattern as shown in FIG. The marker pattern can be displayed on the monitor screen 8 and the contents thereof can be confirmed.

  When the creation of the marker pattern is completed, the computer 12 transmits the marker pattern created by the marker pattern creation device 16 to the pattern synthesis device 17 automatically or after waiting for a command from the input / output device 14 and performs a test. An appropriate test pattern stored in the pattern storage device 15 is transmitted to the pattern synthesis device 17. The transmitted marker pattern and test pattern are combined and superimposed by the pattern combining device 17, sent to the driving device 18, and displayed on the inspection panel 11.

  One or a plurality of types of test patterns are stored in the test pattern storage device 15, and the inspector selects the type of test pattern to be transmitted from the input / output device 14 to the pattern synthesis device 17 via the computer 12. You can select and specify each. In addition, the test pattern stored in the test pattern storage device 15 can be changed, updated, and replaced by the inspector as appropriate from the input / output device 14 via the computer 12.

  As described above, when the test pattern and the marker pattern are displayed on the inspection panel 11 in a superimposed state, the inspector concentrates the attention on the displayed marker pattern portion, and the automatic inspection apparatus. The presence or absence of each defect determined to be present in step 1 is visually inspected.

  The display of the marker pattern on the inspection panel 11 can be collectively turned on / off by the inspector issuing a command to the computer 12 via the input / output device 14. Accordingly, the inspector can turn off the display of the marker pattern and display only the test pattern on the inspection panel 11 when not necessary, and can perform the inspection when necessary. Can be inspected by displaying both the test pattern and the marker pattern on the inspection panel 11 as described above.

  In addition, when necessary, the inspector selects one or a plurality of markers from the markers constituting the marker pattern by issuing a command to the computer 12 via the input / output device 14, and individually selects each marker. In addition, the display on the inspection panel 11 can be turned on / off, blinked, or the color can be changed. Therefore, the inspector, for example, may turn off the display on the inspection panel 11 for a marker that has been visually inspected or a marker that is considered unnecessary, or vice versa. It is possible to improve the efficiency of the visual inspection by turning on the display on the inspection panel 11 to display or blinking or changing the color to make it easy to see. The target marker can be selected on the monitor screen by, for example, displaying a marker pattern on the monitor screen and touching the marker to be selected with a finger or clicking with a mouse.

  During the visual inspection by the inspector, the monitor screen 8 displays an image of the inspection panel on which the test pattern and the marker pattern are displayed together with the identification ID of the inspection panel 11 to be inspected. The image of the inspection panel is created by the computer 12 based on the output of the pattern synthesizer 17 and sent to the monitor screen 8, for example. As described below, the inspector can input the result of the inspection visually performed on the inspection panel 11 to the computer 12 via the image of the inspection panel displayed on the monitor screen 8.

For example, if the marker pattern as shown in FIG. 7 is displayed together with a test pattern to the test panel 11, the inspector, on the test panel 11, the presence of point defects in the region of the circular indicated by markers M ₁ When it is determined that the point defect is “present” or “not present” as a result of visual inspection, the inspector corresponds to the marker M ₁ on the image of the inspection panel displayed on the monitor screen 8. Touch the part with your finger or select it by clicking with the mouse, and specify either “Yes” or “No” on the open window or pull-down menu, or it will be displayed on the monitor screen 8 By touching one of the selection buttons “Yes” or “No” with a finger or clicking with the mouse, the visual inspection result of the defect is related to the defect. Only, it is possible to input to the computer 12.

  That is, the image of the inspection panel on which the marker pattern displayed on the monitor screen 8 is displayed is a means for displaying defects determined by the automatic inspection apparatus to be present on the inspection panel 11 and is displayed to the inspector. It is a means that makes it possible to select one defect from among the determined defects. In addition, a defect “present” or “none” option displayed in the window or pull-down menu that opens when a defect is selected, and a defect “present” or “none” selection displayed on the monitor screen 8 are selected. The button would be a means that allows the inspector to associate the selected defect with the visual inspection result for that defect.

  There may be a plurality of defects selected by the inspector on the monitor screen 8. In this case, the visual inspection results for the selected defects are collectively associated with the plurality of defects, and the computer 12 is selected. Can be entered. In the above example, an inspection panel image in which both the marker pattern and the test pattern are displayed is displayed on the monitor screen 8, but the inspection panel image displayed on the monitor screen 8 is Only the marker pattern may be displayed.

  The means for enabling the automatic inspection apparatus to select one or more defects from the defects determined to be present on the inspection panel 11 is not limited to the image of the inspection panel displayed on the monitor screen 8. . For example, each defect displayed in the image of the inspection panel displayed on the monitor screen 8 is numbered, a list corresponding to the number is displayed on the monitor screen 8, and the target defect is selected and selected. The input of the visual inspection result for the defect may be performed on the list.

  By repeating the operations as described above, the inspector inspects all areas on the inspection panel 11 determined to be defective by the automatic inspection apparatus based on the marker pattern displayed on the inspection panel 11. The result is input to the computer 12 via the monitor screen 8. The input inspection result is stored in the storage device 13 as visual inspection result information in association with the identification ID of the inspection panel 11. The visual inspection result information created in this way may be used as visual inspection result information separately from the automatic inspection result information, or based on the visual inspection result information, the corresponding inspection panel automatic The inspection result information may be rewritten, new inspection result information may be created, and used as comprehensive inspection result information.

  As described above, according to the visual inspection device 3 of the present invention and the visual inspection method of the present invention, the position or region on the inspection panel 11 that the automatic inspection device 2 has determined to be defective during the lighting inspection of the inspection panel 11. Is displayed on the inspection panel 11 together with the test pattern, so that the inspector can concentrate on the visual inspection only on the portion where the marker pattern is displayed. Even if it exists, a highly accurate visual inspection can be performed efficiently.

  Further, according to the visual inspection apparatus 3 of the present invention, even if the marker pattern cannot be displayed on the inspection panel 11, the monitor screen 8 displays the inspection panel on which the marker pattern and the test pattern are displayed. Since the image is displayed, the inspector can know the position or area determined to be a defect on the inspection panel 11 while looking at the monitor screen 8, and can perform a highly accurate visual inspection efficiently. is there.

  Therefore, according to the inspection system 1 of the present invention, an example of which is shown in FIG. 1, the threshold for defect determination in the automatic inspection apparatus 2 is set low, and the risk of defect detection omission is minimized. Even if the percentage of panels judged defective and defective is increased by setting the threshold value low, the subsequent visual inspection device 3 of the present invention performs high-precision visual inspection. Therefore, there is no fear that the yield of the product is unnecessarily lowered. Thus, in the inspection system 1 of the present invention, the difficulty in setting the threshold in the automatic inspection apparatus, which has been a problem in the past, can be overcome, and highly accurate inspection can be efficiently performed without omission of defect detection. Is possible.

  In the inspection system 1 of the present invention, if necessary, the means for displaying the test pattern on the panel to be inspected in the automatic inspection apparatus 2 and the means for displaying the test pattern on the panel in the visual inspection apparatus 3 are the same. Also good. In this case, the automatic inspection apparatus 2 and the visual inspection apparatus 3 become a comprehensive inspection apparatus in which elements lacking each other are added and integrated, except for means for displaying a test pattern on the inspection target panel. In the apparatus, first, an automatic inspection is performed, and after the result is created as automatic inspection result information, a visual inspection can be performed using the same apparatus. In this case, since the inspection panel 11 is transported to the inspection unit 7 and the position is aligned only once, there is an advantage that the efficiency is high.

  Further, in the example described above, only the panel that is determined to be defective in the automatic inspection apparatus 2 is subjected to visual inspection by the visual inspection apparatus 3, but if necessary, the automatic inspection apparatus You may make it perform the visual inspection by the visual inspection apparatus 3 about all the panels test | inspected by 2. FIG.

  The visual inspection apparatus and inspection system of the present invention, and the display panel targeted by the visual inspection method of the present invention are not limited to liquid crystal display panels, but include plasma display panels, EL display panels, field emission display panels, electronic paper, etc. It is intended for all display panels that automatically and visually inspect for defects on the panel.

  As described above, according to the visual inspection apparatus of the present invention and the inspection system and visual inspection method provided with the visual inspection apparatus, since it is possible to efficiently perform a defect inspection of a display panel with high accuracy and without omission of detection, The present invention has a great industrial applicability in the industrial field related to the manufacture of display panels.

DESCRIPTION OF SYMBOLS 1 Inspection system 2 Automatic inspection apparatus 3 Visual inspection apparatus 4 Network 5 Management server 6 Loader part 7 Inspection part 8 Monitor screen 9 Alignment camera 10 Probe unit 11 Inspection panel 12 Computer 13 Memory | storage device 14 Input / output device 15 Test pattern memory | storage device 16 Marker Pattern creation device 17 Pattern synthesis device 18 Drive device

Claims (9)

A visual inspection apparatus for a display panel comprising means for displaying a test pattern on a panel to be inspected, the visual inspection apparatus comprising: a test pattern storage means; means for acquiring automatic inspection result information created by the automatic inspection apparatus; Means for creating a marker pattern for a defect determined to be present in the panel to be inspected by the automatic inspection apparatus based on the acquired automatic inspection result information, means for superimposing the created marker pattern on the test pattern, and a marker pattern A visual inspection apparatus comprising: means for displaying a superimposed test pattern on a panel to be inspected; and means for individually turning on / off the display of the marker pattern on the panel to be inspected for each marker .   The marker pattern is displayed at a position corresponding to the position on the inspection target panel of the defect that the automatic inspection apparatus determines to be present on the inspection target panel, and one or more figures corresponding to the type and / or size of the defect and The visual inspection device according to claim 1, wherein the visual inspection device is a symbol. A monitor screen, a means for displaying a defect determined to be present in the panel to be inspected by the automatic inspection apparatus on the monitor screen, a means for allowing one or more defects to be selected from the displayed defects, Means for allowing the selected defect to be associated with the visual inspection result for the defect, and means for creating visual inspection result information based on the defect and the visual inspection result associated therewith. The visual inspection apparatus according to claim 1 or 2 . The visual inspection apparatus according to claim 3, further comprising means for rewriting the acquired automatic inspection result information based on the generated visual inspection result information to create inspection result information. A display panel inspection system equipped with an automatic inspection device and a visual inspection device, wherein the automatic inspection device displays a means for displaying a test pattern on the inspection target panel and a display screen of the inspection target panel on which the test pattern is displayed. Image data acquisition means for capturing as data, image processing means for analyzing the acquired image data, means for creating automatic inspection result information based on the analyzed image data, and storage means for storing the generated automatic inspection result information An inspection system, wherein the visual inspection device is the visual inspection device according to any one of claims 1 to 4 . 6. The inspection system according to claim 5, wherein the means for displaying the test pattern on the panel to be inspected in the automatic inspection apparatus is means for displaying the test pattern on the panel in the visual inspection apparatus. Automatic inspection based on the process of bringing the panel to be inspected into the inspection position of the visual inspection apparatus, the process of acquiring automatic inspection result information created by the automatic inspection apparatus for the inspection panel carried into the inspection position, and the acquired automatic inspection result information step apparatus creates a marker pattern for defect is determined to exist in the inspection target panel, it viewed including the step of displaying on the panel to be inspected in the inspection position by superimposing a marker pattern generated in the test pattern, further testing including visual inspection method the step of turning on and off separately for each marker display of the marker pattern to the target panel. The marker pattern is displayed at a position corresponding to the position on the inspection target panel of the defect that the automatic inspection apparatus determines to be present on the inspection target panel, and one or more figures corresponding to the type and / or size of the defect and 8. The visual inspection method according to claim 7 , wherein the visual inspection method is a symbol.   A step of displaying a defect determined to be present on the panel to be inspected by the automatic inspection apparatus on the monitor screen, a step of selecting one or more defects from the displayed defects, and a visual inspection of the selected defect The visual inspection method according to claim 7 or 8, comprising a step of associating a result and a step of creating visual inspection result information based on a defect and a visual inspection result associated with the defect.

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