JP5286053B2 - Clean room equipment and operation method thereof - Google Patents

Description

  The present invention relates to a clean room facility required in various manufacturing fields and an operation method thereof.

  For example, clean room devices are used in fields that require high cleanliness, such as semiconductor manufacturing fields, food manufacturing fields, and medical fields. The clean room apparatus has a configuration in which a plurality of fan filter units are attached to the ceiling surface of a clean room where semiconductor manufacturing or the like is installed, and the floor surface of the clean room is configured with a ventilating grating floor or the like. Further, a letter shaft is provided on the side of the clean room. By operating the fan filter unit, the air in the ceiling space is passed through the filter and supplied to the clean room as clean air (see, for example, Patent Documents 1 and 2). The air supplied in this way becomes a downflow, passes through the grating floor on the lower surface of the clean room together with dust in the clean room, and returns to the ceiling space again from the under floor space via the letter shaft. Thereby, the clean room is maintained in a clean state.

  Further, Patent Document 1 discloses a configuration in which air in the vicinity of the ceiling is eliminated by returning the air in the clean room from the vent hole to the ceiling back space. Moreover, the said patent document 2 shows the structure which discharges the smoke in a clean room by connecting a smoke exhaust pipe to a ceiling surface.

JP 11-351627 A Utility Model Registration No. 2518038

  For example, in a semiconductor manufacturing factory or the like, as shown in FIG. 1, a clean room facility 100 in which a plurality of clean room apparatuses A 'and B' are arranged adjacent to each other is used. Air-conditioned air is supplied from the air supply duct 101 to the ceiling space of each of the clean room apparatuses A ′ and B ′. A plurality of fan filter units 103 are respectively installed on the ceiling surface of the clean room 102 provided in each of the clean room apparatuses A ′ and B ′, and the air in the ceiling space is filtered by the operation of the fan filter units 103. The air is supplied to each clean room 102 as clean air. The air thus supplied flows down and passes through the grating floor on the lower surface of the clean room together with the dust in the clean room 102, and is returned from the under floor space to the ceiling back space again via the letter shaft 104. Thereby, the clean room 102 of each clean room apparatus A ', B' is maintained in a clean state.

  By the way, in the clean room facility 100 in which a plurality of clean room devices A ′ and B ′ are arranged adjacent to each other as described above, for example, when a fire occurs in one clean room device B ′, the fire has occurred in common sense. In the clean room apparatus B ′, the operation of the fan filter unit 103 is stopped. On the other hand, in the adjacent clean room apparatus A ', the operation of the fan filter unit 103 is continued in order to maintain the clean room 102 in a clean state.

  However, when the operation of the fan filter unit 103 installed in the clean room apparatus B ′ is stopped and the operation of the fan filter unit 103 installed in the clean room apparatus A ′ is continued, it is compared with the space behind the ceiling of the clean room apparatus B ′. Thus, the space behind the ceiling of the clean room apparatus A ′ becomes negative pressure. Due to this pressure difference, there is a problem that fire and smoke are sucked into the air supply duct 101 from the clean room apparatus B '. In addition, there is a concern that the fire moves to the exhaust duct made of, for example, PVC installed in each of the clean room apparatuses A 'and B' and spreads.

  An object of the present invention is to prevent attraction of fire and smoke from a clean room device in which a fire has occurred to another clean room device in a clean room facility having a plurality of clean room devices.

In order to achieve such an object, according to the present invention, a clean room in which air in a ceiling space is supplied to a clean room by a fan filter unit, and air that has flowed from the clean room to the space under the floor is returned to the ceiling space again through a letter shaft. A clean room facility equipped with a plurality of devices, each of which has a ceiling space, an underfloor space, and a return shaft, and an air supply duct for introducing air from outside the system to the ceiling space is provided for each clean room device. Air is supplied from the main air supply duct arranged outdoors to the ceiling space of each clean room device via each air supply duct , and each air supply duct is provided with an open / close damper , and the system is connected to the clean room or the underfloor space. an exhaust duct for discharging air to the outside is provided for each clean room devices, each exhaust duct argument outdoors Issued is connected to the main exhaust duct, and opening and closing the damper in the exhaust duct is provided, the event of a fire in one clean room devices, opening and closing the damper of the air supply duct provided in the clean room system in which the fire has occurred A clean room facility is provided in which the open / close damper of the exhaust duct is closed . In this clean room facility, when a fire occurs in a certain clean room device, the open / close damper provided in the air supply duct of the clean room device in which the fire has occurred and the open / close damper provided in the exhaust duct are closed, and the fire Control is performed so as to stop the supply and exhaust of air to and from the clean room device where the fan has occurred and stop the fan filter unit. This prevents intrusion of fire, smoke, and heat from the clean room device where the fire has occurred into another clean room device. Each air supply duct is directly introduced into the clean room device from outside the system without passing through other clean room devices, and each exhaust duct is removed from the clean room device without passing through other clean room devices. It may be drawn directly to.

  In addition, according to the present invention, a clean room having a plurality of clean room devices that supply air in the ceiling space to the clean room with the fan filter unit and return the air that has flowed from the clean room to the under floor space to the ceiling space again through the return shaft. In each clean room device, there is an air supply duct that introduces air from outside the system into the ceiling space and an exhaust duct that discharges air from the clean room or under the floor space to the outside of the system. When a fire occurs, the fan filter unit installed in the clean room apparatus where the fire has occurred is stopped, and the supply air from the supply duct and the exhaust duct to the clean room apparatus where the fire has occurred are stopped. The operation method of the clean room equipment is characterized by stopping. It is subjected.

  If the fan filter unit installed in a clean room device that does not cause a fire cannot be stopped in this operation method of the clean room equipment, the fan filter unit installed in the clean room device that does not cause a fire is the minimum required. It may be the amount of operation.

  In a clean room facility having a plurality of clean room devices, when a fire occurs in a certain clean room device, the open / close damper provided in the air supply duct of the clean room device in which the fire has occurred and the open / close damper provided in the exhaust duct are closed, Stop supplying and exhausting air to the clean room device where the fire occurred. Thereby, it can avoid that a fire and smoke approach into another clean room apparatus through an air supply duct or an exhaust duct. In addition, the fan filter unit installed in the clean room device where the fire occurred is stopped, while the operation amount of the fan filter unit installed in the clean room device where the fire does not occur is reduced to reduce the clean room where the fire occurred. Reduce the pressure difference between the ceiling space of the apparatus and the ceiling space of the clean room apparatus where no fire has occurred as much as possible. Thereby, the attraction of fire and smoke from the clean room apparatus in which a fire has occurred to another clean room apparatus can be prevented.

  Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. FIG. 2 is an explanatory diagram of the clean room facility 1 according to the embodiment of the present invention. In addition, in this specification and drawing, about the component which has the substantially same function structure, duplication description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  This clean room facility 1 has two clean room apparatuses A and B arranged adjacent to each other. In the present invention, the clean room apparatuses A and B are the ceiling space 10 and the clean room that can supply clean air to the clean rooms 15 while being separated from each other by a partition 30 described later. 15, a unit including the underfloor space 21, the return shaft 22, and the like. In the ceiling space 10 of each of the clean room apparatuses A and B, an air supply duct 11 having a blowing opening at the end is arranged. A main air supply duct 12 is installed outside the clean room devices A and B, and fresh air or conditioned air made by an air conditioner (not shown) is supplied from the main air supply duct 12 through the air supply duct 11. Air is supplied to the ceiling space 10 of the clean room apparatuses A and B.

  Each air supply duct 11 is provided with an open / close damper 13 such as a motor damper. By the opening / closing operation of the opening / closing damper 13, it is possible to switch between a state of supplying air to the ceiling back space 10 of each of the clean room devices A and B and a state of stopping. Each air supply duct 11 is directly introduced into the clean room apparatus from outside the system without passing through another clean room apparatus. That is, the air supply duct 11 for supplying air to the ceiling space 10 of the clean room apparatus A is directly (clean room apparatus) from the main air supply duct 12 arranged outside the clean room apparatuses A and B (for example, machine rooms and outdoors). It is introduced into the clean room apparatus A (without passing through B). Similarly, the air supply duct 11 for supplying air to the ceiling space 10 of the clean room apparatus B is directly (clean room) from the main air supply duct 12 arranged outside the clean room apparatuses A and B (for example, machine rooms and outdoors). It is introduced into the clean room apparatus B (without passing through the apparatus A).

  Each of the clean room devices A and B is provided with a clean room 15. Inside each clean room 15, for example, a manufacturing device 16 such as a semiconductor manufacturing apparatus is installed. A plurality of fan filter units 17 are respectively installed on the ceiling surface of each clean room 15, and by operating these fan filter units 17, the air in the ceiling space 10 is passed through the filter, and clean air is supplied to each clean room 15. It is supplied inside. Thus, the inside of each clean room 15 is maintained in a clean environment.

The lower surface of each clean room 15 is a grating floor 20. The air supplied into each clean room 15 by the operation of the fan filter unit 17 becomes a downflow, passes through the grating floor 20 together with the dust in the clean room 15 , and is discharged to the underfloor space 21.

  At the side of each clean room 15, a letter shaft 22 is provided. Further, in each of the clean room apparatuses A and B, a fan coil unit 23 is disposed between the underfloor space 21 and the letter shaft 22. The air discharged together with the dust in the clean room 11 through the grating floor 20 and discharged into the underfloor space 21 passes through the fan coil unit 23 and undergoes sensible heat exchange, and is returned to the ceiling space 10 again via the letter shaft 22. It has become.

  An exhaust duct 25 having an intake opening at the end is provided below the manufacturing equipment 16 installed in each clean room 15. A main exhaust duct 26 is installed outside the clean room apparatuses A and B, and air in the vicinity of each manufacturing device 16 installed in the clean room apparatuses A and B is supplied by the operation of an exhaust fan (not shown). The air is exhausted from the exhaust duct 25 to the outside of the clean room facility 1 through the main exhaust duct 26 in an amount that is equal to or slightly less than the amount of air supplied from the duct 11. Each exhaust duct 25 is directly drawn out of the system from the clean room device without passing through another clean room device. That is, the exhaust duct 25 provided in the clean room apparatus A is drawn from the clean room apparatus A directly (without passing through the clean room apparatus B) to the outside of the clean room apparatuses A and B (for example, the machine room and the outdoors), and the main exhaust duct. 26. Similarly, the exhaust duct 25 provided in the clean room apparatus B is drawn directly from the clean room apparatus B (without passing through the clean room apparatus A) to the outside of the clean room apparatuses A and B (for example, the machine room and the outdoors), and the main exhaust. It is connected to the duct 26.

  Each exhaust duct 25 is provided with an open / close damper 27 such as a motor damper. By the opening / closing operation of the opening / closing damper 27, it is possible to switch between the state of exhausting from the clean room apparatuses A and B to the outside and the state of stopping the exhaust.

  The partition 30 is divided between the two clean room devices A and B (between the ceiling back space 10, the clean room 15, and the underfloor space 21 of each clean room device A and B). A non-combustible material is used for the partition 30. Note that a material having low heat resistance may be used for the partition 30.

  In the clean room facility 1 according to the embodiment of the present invention configured as described above, when the clean room 15 of each clean room device A, B is maintained in a clean environment, as shown in Table 1, each clean room device A, The open / close damper 13 provided in the B air supply duct 11 is opened, the fan filter unit 17 installed on the clean room 15 ceiling of each clean room device A, B is operated, and the exhaust duct of each clean room device A, B is operated. All the open / close dampers 27 provided at 25 are opened.

  Thus, the conditioned air is supplied to the ceiling space 10 of each of the clean room apparatuses A and B through the air supply duct 11. Then, the air in the ceiling space 10 becomes clean air and is supplied into each clean room 15, and further, the air supplied into each clean room 15 becomes downflow and is grating together with dust in the clean room 11. It passes through the floor 20 and is discharged into the underfloor space 21. The air thus discharged into the underfloor space 21 passes through the fan coil unit 23 and is temperature-controlled, and is returned to the ceiling space 10 again through the letter shaft 22.

  Further, the air in the vicinity of each manufacturing device 16 installed in the clean room 15 of each of the clean room devices A and B is exhausted from the exhaust duct 25 to the outside of the clean room facility 1 through the main exhaust duct 26. Thus, the inside of each clean room 15 is maintained in a clean environment, and operations such as semiconductor manufacturing are suitably performed. In addition, when maintaining the clean room 15 of each clean room apparatus A and B in this way in a clean environment, the operation amount of each fan filter unit 17 is enlarged, and the frequency | count of ventilation of the clean room 15 shall be about 40-60 times.

  On the other hand, in this clean room facility 1, as shown in FIG. 3, for example, it is assumed that a fire has occurred in the clean room 15 of the clean room apparatus B. In such a case, as shown in Table 2, the open / close damper 13 provided in the air supply duct 11 of the clean room device B where the fire has occurred is closed, and the fan filter unit 17 installed on the ceiling of the clean room 15 of the clean room device B The operation is stopped and the open / close damper 27 provided in the exhaust duct 25 of the clean room apparatus B is closed. On the other hand, for the clean room apparatus A where no fire has occurred, the open / close damper 13 provided in the air supply duct 11 is opened, the fan filter unit 17 is operated, and the open / close damper 27 provided in the exhaust duct 25 is opened. Leave open.

  Thus, the supply of air to the clean room apparatus B where a fire has occurred is stopped to prevent the fire from spreading. Further, by closing the open / close damper 13 provided in the air supply duct 11 of the clean room apparatus B and closing the open / close damper 27 provided in the exhaust duct 25, the air supply duct 11 and the exhaust duct 25 are used. It is possible to prevent fire and smoke from entering another clean room apparatus A. As described above, each air supply duct 11 is directly introduced to the clean room device from outside the system without passing through another clean room device, and each exhaust duct 25 is passed through the other clean room device without passing through the other clean room device. Since it is drawn directly out of the system from the clean room device, it is possible to avoid spreading to other clean room devices through the air supply duct 11 and the exhaust duct 25. That is, as in the illustrated example, even when a fire occurs in the clean room apparatus B, the air supply duct 11 and the exhaust duct 25 do not pass through the clean room apparatus A and are outside (for example, a machine room or the outside). Since it is drawn out, it is possible to avoid spreading the fire directly to the clean room apparatus A through the air supply duct 11 and the exhaust duct 25.

  Moreover, about the clean room apparatus A where the fire has not generate | occur | produced, the clean state required for the manufacturing equipment 16 can be maintained by continuing operating the fan filter unit 17, and the contamination of the manufacturing equipment 16 can be prevented. However, for the clean room apparatus A, the operation amount of the fan filter unit 17 is reduced more than usual, and the pressure difference between the ceiling back space 10 of the clean room apparatus B and the ceiling back space 10 of the clean room apparatus A is reduced as much as possible. In this case, for example, it is desirable that the operation amount of each fan filter unit 17 installed in the clean room apparatus A be as small as possible within a range where contamination of the manufacturing equipment 16 installed in the clean room apparatus A can be prevented. For example, if the operation amount of each fan filter unit 17 installed in the clean room device A is reduced so that the ventilation frequency of the clean room 15 of the clean room device A is, for example, about 10 times, the clean room device B is transferred to the clean room device A. Can prevent the attraction of fire and smoke. In addition, when reducing the operation amount of the fan filter unit 17 of the clean room apparatus A in this way, the operation amount of each fan filter unit 17 may be reduced, but some of the fan filter units 17 among the plurality of fan filter units 17 may be reduced. It is also possible to reduce the amount of blown air by operating only 17 and reducing the number of operating units.

  When the operation of the fan filter unit 17 of the clean room apparatus B is stopped, it may not be possible to effectively prevent attraction of fire and smoke from the ceiling back space 10 of the clean room apparatus B to the ceiling back space 10 of the clean room apparatus A. Conceivable. In such a case, the operation of the fan filter unit 17 of the clean room apparatus B may be left as it is and the fire spread may be prevented. Alternatively, the operations of both fan filter units 17 of the clean room apparatuses A and B may be stopped.

  As mentioned above, although an example of preferable embodiment of this invention was demonstrated, this invention is not limited to the form of illustration. It will be apparent to those skilled in the art that various changes or modifications can be made within the scope of the ideas described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, the example in which the two clean room devices A and B are disposed adjacent to each other has been described, but the two clean room devices A and B may be separated from each other. In addition, the present invention can be applied not only to the two clean room apparatuses A and B but also to a clean room facility including three or more two clean room apparatuses. The open / close damper 13 provided in the air supply duct 11 and the open / close damper 27 provided in the exhaust duct 25 can use any open / close damper other than the motor damper. The present invention is not limited to the semiconductor manufacturing field, and can be applied to a wide range of fields such as a food manufacturing field and a medical field.

  The present invention can be used in various manufacturing fields, medical fields, and the like.

It is a top view of the clean room equipment for demonstrating a prior art. It is explanatory drawing of the clean room equipment concerning embodiment of this invention. It is explanatory drawing of the clean room equipment concerning embodiment of this invention, and has shown the state where the fire broke out.

Explanation of symbols

A, B Clean room device 1 Clean room equipment 10 Ceiling space 11 Air supply duct 12 Main air supply duct 13 Opening / closing damper 15 Clean room 16 Manufacturing equipment 17 Fan filter unit 20 Grating floor 21 Underfloor space 22 Letter shaft 23 Fan coil unit 25 Exhaust duct 26 Main exhaust duct 27 Open / close damper 30 Partition

Claims (5)

A clean room facility equipped with a plurality of clean room devices that supply air in the back space to the clean room with a fan filter unit and return the air that has flowed from the clean room to the space under the floor to the back space through the return shaft.
Each clean room facility has a ceiling space, a floor space and a letter shaft,
An air supply duct for introducing air from outside the system to the ceiling space is provided for each clean room device, and air is supplied from the main air supply duct arranged outdoors to the ceiling space of each clean room device via each air supply duct. It is, and closing the damper is provided in each air supply duct,
Exhaust ducts for exhausting air from the clean room or under-floor space to the outside of the system are provided for each clean room device.Each exhaust duct is drawn to the outside and connected to the main exhaust duct, and an open / close damper is provided for each exhaust duct. ,
When a fire occurs in a certain clean room device, the open / close damper of the air supply duct and the open / close damper of the exhaust duct provided in the clean room device where the fire has occurred are closed .   2. The clean room facility according to claim 1, wherein the open / close damper provided in each air supply duct and the open / close damper provided in each exhaust duct are motor dampers. A clean room facility operating method comprising a plurality of clean room devices for supplying air from the ceiling space to the clean room with a fan filter unit and returning the air that has flowed from the clean room to the under floor space to the ceiling space again through the return shaft.
An air supply duct that introduces air into the ceiling space from outside the system and an exhaust duct that exhausts air outside the system from the clean room or under-floor space are provided for each clean room device.
When a fire occurs in a certain clean room device, the fan filter unit installed in the clean room device in which the fire has occurred is stopped, and the supply air and the exhaust duct from the supply duct to the clean room device in which the fire has occurred A method of operating a clean room facility, characterized by stopping exhaust to the room.   The operation method of the clean room facility according to claim 3, wherein the fan filter unit installed in the clean room apparatus in which no fire has occurred is not stopped.   The operation method of the clean room facility according to claim 4, wherein the fan filter unit installed in the clean room apparatus in which no fire has occurred reduces the amount of operation.

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