JP5034884B2 - Chemical processing equipment - Google Patents

Description

  The present invention relates to a chemical processing apparatus that performs chemical processing while conveying an extremely thin and flexible long sheet-shaped workpiece such as a flexible substrate at a constant speed, and in particular, chemical processing can be performed without generating workpiece tarmi. The present invention relates to an improvement of a chemical processing apparatus that can be used.

  In recent years, electronic devices have increasingly used flexible substrates that are extremely thin and flexible. Corresponding to such a flexible substrate, Patent Document 1 discloses that a long sheet-like workpiece (substrate material) wound on a reel is continuously arranged with its width direction set in the vertical direction (that is, with the workpiece surface set in the vertical direction). A plating tank is placed between the workpiece supply device that supplies the workpiece and the workpiece winding device that continuously winds the workpiece on the reel with the width direction set to the vertical direction, and the workpiece (substrate material) is long. An apparatus for performing a plating process in a sheet form has been proposed.

However, since the plating apparatus described in Patent Document 1 has a structure in which only the upper end of a long sheet-like workpiece (substrate material) is clamped and transported, the workpiece is wide and extremely thick. If it is thin, there is a problem that tarmi occurs in the workpiece during the process of conveying the workpiece or the process of plating, making it difficult to stably convey the workpiece in the vertical direction. Was.
JP 2006-193794 A

  The present invention has been made paying attention to such problems, and the problem is that the long sheet-like workpiece is stable without causing workpiece tarmi even when the width of the long sheet-like workpiece is wide and extremely thin. An object of the present invention is to provide a chemical processing apparatus capable of performing chemical processing.

That is, the invention according to claim 1
A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down comprising a winding device, and a chemical treatment tank to perform chemical processing on the workpiece to be conveyed arranged and the width direction and in the vertical direction between the workpiece feeder and the work take-up device,
It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece when the chemical treatment tank is loaded into the chemical treatment tank, and the upper and lower end conveyance clamp groups are fixed to a pair of independently driven endless belts at equal intervals. Each time the workpiece is clamped and conveyed with its width direction set to the vertical direction, the upper and lower transfer clamps are opened sequentially when the workpiece is unloaded in the chemical treatment tank, and only the workpiece that has been chemically processed is moved in the vertical direction. In the chemical processing apparatus provided with a work conveying device to be wound on the reel of the work winding device,
The upper and lower end transport clamps are synchronized with each other by controlling the transport speed of the upper and lower end transport clamps by a pair of upper and lower independent servo motors that independently drive the pair of endless belts and a sensor that detects the amount of movement of the pair of endless belts. While transporting the workpiece,
The upper end conveyance clamp group is fixed to one endless belt arranged on the upper side, and the lower end conveyance clamp group is attached to the other endless belt arranged on the lower side so as to be movable in the vertical direction. The workpiece is transported while applying a force in the vertical direction by the weight of the lower end transport clamp group .

Next, the invention according to claim 2
In the chemical processing apparatus according to the invention of claim 1,
The thin film workpiece is chemically treated without generating workpiece tarmi .

According to the chemical processing apparatus of the present invention,
It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece when the long sheet workpiece is loaded into the chemical treatment tank, and the upper and lower end conveyance clamp groups are attached to a pair of independently driven endless belts at equal intervals. While the workpiece is clamped for each fixed size, the width direction of the workpiece is conveyed in the vertical direction, and when the workpiece is unloaded in the chemical treatment tank, the upper and lower end conveyance clamps are sequentially opened to perform only the chemically treated workpiece in the width direction. Is provided with a workpiece transfer device that causes the workpiece to be wound on a reel of the workpiece winding device.

  And since it is configured to convey while clamping the upper end and the lower end of the long sheet-like workpiece, even if the width of the workpiece is wide and the thickness is extremely thin, the step of carrying the workpiece or chemical treatment is performed. Since it is difficult for tarmi to occur during the process, the workpiece can be stably conveyed while the width direction of the workpiece is in the vertical direction.

Furthermore, the upper upper conveyor clamping group to an endless belt while being disposed on the side is fixed, a structure in which the lower end transport clamp group to the other endless belt is disposed on the lower side is attached in a movable into the vertical direction state Therefore, the work is transported while applying a force in the vertical direction by the weight of the lower end transport clamp group, so that it is possible to more reliably prevent the occurrence of work tarmi.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  1 is a side view of the chemical processing apparatus according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a diagram illustrating a state in which the upper end transport clamp of the work transport apparatus incorporated in the chemical processing apparatus is opened. FIG. 4 is an explanatory view showing a state in which the lower end conveyance clamp of the workpiece conveying device is opened, and FIG. 5 is a diagram in which the upper end and the lower end of the workpiece are clamped to the upper and lower end conveying clamps of the workpiece conveying device, respectively. It is explanatory drawing which shows the state conveyed by being carried.

  First, a chemical processing apparatus according to the present invention is a work supply apparatus 2 that continuously supplies a long sheet-shaped work 1 wound around a reel with its width direction set up and down as shown in FIGS. And a work take-up device 3 that continuously winds the work 1 on a reel with the width direction thereof being an up-down direction, and the work 1 is disposed between the work supply device 2 and the work take-up device 3. A chemical treatment tank 4 for performing chemical treatment such as plating, and an untreated workpiece 1 is carried into the chemical treatment tank 4 with its width direction set to the vertical direction, and the processed work 1 is set to the vertical direction with respect to the width direction. The main part is comprised by the workpiece conveyance apparatus 20 carried out in this way.

  That is, a workpiece supply device 2 for supplying a long sheet-like workpiece 1 wound on a reel, a workpiece winding device 3 for winding the workpiece 1 on a reel, and the workpiece supply device 2 and the workpiece winding device 3. A chemical treatment tank 4 is provided between them, and the chemical treatment tank 4 is composed of a plurality of tanks according to necessary steps. Further, since the workpiece 1 is continuously conveyed from the workpiece supply device 2 to the workpiece winding device 3 with its width direction set to the vertical direction, the upper end and the lower end of the workpiece 1 are clamped at the time of loading into the chemical treatment tank 4, respectively. A workpiece transfer device 20 is provided for transferring the workpiece.

  The workpiece transfer device 20 is arranged to face a plurality of upper end transfer clamps 5 for clamping the upper end of the workpiece 1 and a plurality of lower end transfer clamps 6 for clamping the lower end of the workpiece 1 and an upper pulley 101 covered with rubber through a predetermined distance. An upper endless belt 81 wound between the upper pulley 121 and attached to the upper end conveying clamp 5 group, and a lower pulley 122 disposed opposite to the lower pulley 102 covered with rubber through a predetermined distance. A lower endless belt 82 wound around and attached to the lower end transport clamp 6 group, and provided on the upper pulley 101 and the lower pulley 102, respectively, and independently drives the upper endless belt 81 and the lower endless belt 82. A pair of upper and lower independent servo motors 91, 92 and the endless belts 81, 82 A photoelectric sensor 11 for detecting the movement amount of each endless belt by detecting marks (not shown) provided in the vicinity and provided on each endless belt, and the vicinity of the outer peripheral surfaces of the upper pulley 101 and the lower pulley 102 Of the upper end transport clamp 5 group and the lower end transport clamp 6 group at the timing when the rollers 21 and 22 (see FIGS. 3 and 4) attached to the upper end transport clamp 5 group and the lower end transport clamp 6 group contact each other. An arc-shaped contact plate 7 is provided in which each clamp is opened.

  When the workpiece 1 is loaded into the chemical treatment tank 4, the rollers 21 and 22 attached to the upper end transport clamp 5 group and the lower end transport clamp 6 group are pressed against the abutting plate 7 to release each clamp, and The upper end and lower end of the workpiece 1 supplied from the workpiece supply device 2 with the width direction set to the vertical direction from the workpiece supply device 2 at the timing when the contacts of the rollers 21 and 22 with the contact plate 7 are finished and the clamps are closed. The 5 group and the lower end transport clamp 6 group are smoothly clamped, and the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached to a pair of endless belts 81 and 82 that are independently driven at regular intervals, respectively. Then, the workpiece 1 is carried into the chemical treatment tank 4 with its width direction set up and down while being clamped.

  When the chemically treated workpiece 1 is carried out in the chemical treatment tank 4, the rollers 21 and 22 attached to the upper end conveyance clamp 5 group and the lower end conveyance clamp 6 group are sequentially pressed against the abutting plate 7, and each clamp is moved. Only the workpiece 1 that has been opened and chemically treated is wound on the reel of the workpiece winding device 3 with its width direction set to the vertical direction.

  The upper endless belt 81 and the lower endless belt 82 to which the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached are directly connected to the servo motors 91 and 92 which are independently driven and to the servo motors 91 and 92. The rubber-coated upper pulley 101 and lower pulley 102 rotate without slipping, and the mark provided on each endless belt is detected by the photoelectric sensor 11 and converted into a moving amount of each endless belt. The upper and lower transfer clamps 5 and 6 are controlled by independent servo motors 91 and 92 based on the amount, and the workpiece 1 is moved while the upper transfer clamps 5 and the lower transfer clamps 6 are synchronized. It can be transported.

  By the way, it is difficult in terms of mechanical assembly accuracy to mechanically arrange the distance between the upper end conveyance clamp 5 group and the lower end conveyance clamp 6 group in correspondence with the width dimension of the long sheet-like workpiece 1. For this reason, as shown in FIG. 3, the upper end transport clamp 5 group is fixed to the upper endless belt 81 as a reference position during transport, and the upper end transport clamp 5 group is transported to the position of the upper pulley 101 covered with rubber. The position is regulated by the groove 13 provided in the upper pulley 101 to obtain a reference position during conveyance of the upper pulley 101. On the other hand, as shown in FIGS. 4 and 5, the lower end transport clamp 6 group is provided with a long hole 100 in the lower end transport clamp 6 group and a stopper 200 of the lower endless belt 82 fitted into the long hole 100. The lower end conveying clamps 6 group can move freely in the vertical direction. And it is comprised so that the force to a perpendicular direction may be applied to the said workpiece | work 1 continuously by the dead weight of 6 groups of lower end conveyance clamps.

  By adopting such a configuration, the reference position when the workpiece 1 is conveyed is determined by the upper end conveying clamp 5 group, and the workpiece 1 can be conveyed while following the width of the workpiece 1. However, since it is necessary to determine the position of the lower end transport clamp 6 group with respect to the lower end transport clamp 6 group before the start of clamping where the workpiece 1 does not exist, a dedicated bearing 14 is provided in the lower end transport clamp 6 group as shown in FIG. A positioning plate 15 for determining the position of the lower end transport clamp 6 group is attached to the lower end clamp position before the start of clamping.

  The chemical processing apparatus according to the present invention is configured to convey while clamping the upper end and the lower end of a long sheet-like workpiece, respectively, even when the workpiece is wide and extremely thin, Since it is difficult for work tarmi to occur during the chemical treatment process, it is possible to stably convey the work while keeping the width direction of the work up and down. Therefore, it has industrial applicability used in chemical processing apparatuses such as plating of flexible substrates.

The side view of the chemical processing apparatus which concerns on this invention. The top view of the chemical processing apparatus which concerns on this invention. Explanatory drawing which shows the state by which the upper end conveyance clamp of the workpiece conveyance apparatus integrated in the chemical processing apparatus which concerns on this invention was open | released. Explanatory drawing which shows the state by which the lower end conveyance clamp of the workpiece conveyance apparatus was open | released. Explanatory drawing which shows the state in which the upper end and lower end of a workpiece | work are clamped and conveyed by the upper and lower end conveyance clamp of a workpiece conveyance apparatus, respectively.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Work 2 Work supply apparatus 3 Work take-up apparatus 4 Chemical processing tank 5 Upper end conveyance clamp 6 Lower end conveyance clamp 7 Abutting plate 11 Photoelectric sensor 13 Groove 14 Bearing 15 Positioning plate 20 Work conveyance apparatus 21 Roller 22 Roller 81 Upper endless belt 82 Lower Side endless belt 91 Servo motor 92 Servo motor 100 Elongated hole 101 Upper pulley covered with rubber 102 Lower pulley 121 covered with rubber Upper pulley 122 Lower pulley 200 Stopper

Claims (2)

A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down comprising a winding device, and a chemical treatment tank to perform chemical processing on the workpiece to be conveyed arranged and the width direction and in the vertical direction between the workpiece feeder and the work take-up device,
It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece when the chemical treatment tank is loaded into the chemical treatment tank, and the upper and lower end conveyance clamp groups are fixed to a pair of independently driven endless belts at equal intervals. Each time the workpiece is clamped and conveyed with its width direction set to the vertical direction, the upper and lower transfer clamps are opened sequentially when the workpiece is unloaded in the chemical treatment tank, and only the workpiece that has been chemically processed is moved in the vertical direction. In the chemical processing apparatus provided with a work conveying device to be wound on the reel of the work winding device,
The upper and lower end transport clamps are synchronized with each other by controlling the transport speed of the upper and lower end transport clamps by a pair of upper and lower independent servo motors that independently drive the pair of endless belts and a sensor that detects the amount of movement of the pair of endless belts. While transporting the workpiece,
The upper end conveyance clamp group is fixed to one endless belt arranged on the upper side, and the lower end conveyance clamp group is attached to the other endless belt arranged on the lower side so as to be movable in the vertical direction. The chemical processing apparatus is characterized in that the workpiece is conveyed while applying a force in a vertical direction by the weight of the lower end conveying clamp group . The chemical processing apparatus according to claim 1, wherein the thin film workpiece is chemically processed without generating workpiece tarmi.

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