JP5062454B2 - Magnetic sensor - Google Patents

Description

  The present invention relates to a magnetic sensor that detects an angle formed by the direction of an external magnetic field with respect to a reference direction.

  In recent years, magnetic sensors have been widely used to detect the rotational position of an object in various applications such as detection of the rotational position of an automobile steering. Magnetic sensors are also used in linear encoders that detect linear displacement of an object. In a system in which such a magnetic sensor is used, generally, means (for example, a magnet) that generates an external magnetic field whose direction rotates in conjunction with the rotation or linear motion of an object is provided. The magnetic sensor detects an angle formed by the direction of the external magnetic field with respect to the reference direction. As a result, the rotational position and linear displacement of the object are detected.

  As a magnetic sensor, one having two bridge circuits (Wheatstone bridge circuits) is known as described in Patent Documents 1 to 4. In this magnetic sensor, each of the two bridge circuits includes four magnetoresistive elements (hereinafter also referred to as MR elements), detects the intensity of a component in one direction of the external magnetic field, and represents the intensity of the signal. Is output. The phases of the output signals of the two bridge circuits differ by ¼ of the period of the output signal of each bridge circuit. The angle formed by the direction of the external magnetic field with respect to the reference direction is calculated based on the output signals of the two bridge circuits.

JP 2003-65795 A JP-T-2004-504713 JP 2009-25319 A Japanese Patent No. 4273363

  In a magnetic sensor using an MR element, when the direction of the external magnetic field rotates, the waveform of the output signal corresponding to the resistance value of the MR element is ideally a sine curve (Sine waveform and cosine (Cosine) ) Including waveform). However, as described in Patent Document 2, it is known that the output signal waveform of the MR element may be distorted from a sine curve. If the output signal waveform of the MR element is distorted, an error may occur in the detection angle by the magnetic sensor. The cause of the distortion of the output signal waveform of the MR element can be broadly divided into an MR element and an external magnetic field.

  Here, taking as an example the case where the MR element is a GMR (giant magnetoresistive effect) element or a TMR (tunnel magnetoresistive effect) element, an example in which the output signal waveform of the MR element is distorted due to the MR element will be described. . The GMR element and the TMR element include a magnetization fixed layer whose magnetization direction is fixed, a free layer whose magnetization direction changes according to the direction of the external magnetic field, and a nonmagnetic layer disposed between the magnetization fixed layer and the free layer And have. As an example of the case where the output signal waveform of the MR element is distorted due to the MR element, there is a case where the magnetization direction of the magnetization fixed layer varies due to the influence of an external magnetic field or the like. This is likely to occur when the strength of the external magnetic field is relatively large. As another example when the output signal waveform of the MR element is distorted due to the MR element, the magnetization direction of the free layer coincides with the direction of the external magnetic field due to the influence of the free layer shape anisotropy, coercive force, etc. The case where it does not do is mentioned. This is likely to occur when the strength of the external magnetic field is relatively small.

  On the other hand, as an example of the case where the output signal waveform of the MR element is distorted from the sine curve due to the external magnetic field, there is a case where the direction of the external magnetic field or the intensity of the component in one direction of the external magnetic field does not change sinusoidally. . This may be the case when detecting the direction of the external magnetic field generated from the outer periphery of a rotating body in which one or more pairs of N poles and S poles are alternately arranged in a ring shape, or when multiple sets of N poles and S poles are alternately arranged. This is likely to occur when detecting the direction of the external magnetic field generated from the outer periphery of the moving body that is arranged in a straight line and moves in the direction in which the N and S poles are arranged.

  In Patent Document 2, two correction detection elements each having a reference magnetization axis inclined with respect to the main reference magnetization axis are electrically connected to a main detection element having a main reference magnetization axis to correct the detection angle. A magnetoresistive sensor is described. However, in this sensor, it is necessary to optimize the design of the correction detection element according to the design conditions such as the resistance, size, material, and external magnetic field strength of the main detection element and the correction detection element. There is a problem that the design is not easy.

  Until now, the problem that an error may occur in the detection angle of the magnetic sensor in the magnetic sensor using the MR element has been described. However, this problem applies to all magnetic sensors that detect the angle formed by the direction of the external magnetic field with respect to the reference direction.

  The present invention has been made in view of such problems, and an object thereof is a magnetic sensor for detecting an angle formed by the direction of an external magnetic field with respect to a reference direction, and a magnetic sensor capable of reducing an error in the detected angle. It is to provide a sensor.

  The magnetic sensor of the present invention detects the angle formed by the direction at the reference position of the external magnetic field whose direction rotates with respect to the reference direction. The magnetic sensor includes a first detection unit for detecting a first angle formed by the direction of the external magnetic field at the first position with respect to the first direction, and the direction of the external magnetic field at the second position is the second. And a second detection unit for detecting a second angle formed with respect to the direction.

  The first detection unit detects the intensity of a component in one direction of the external magnetic field and outputs a signal representing the intensity, and outputs of the first and second detection circuits And a first arithmetic circuit that calculates a first detection angle that is a detection value of the first angle based on the signal, the phase of the output signal of the first detection circuit, and the output signal of the second detection circuit Are different by an odd multiple of 1/4 of the period of the output signal of each detection circuit.

  The second detection unit detects the intensity of a component in one direction of the external magnetic field and outputs a signal representing the intensity, and outputs of the third and fourth detection circuits A second arithmetic circuit that calculates a second detection angle that is a detection value of the second angle based on the signal, and a phase of an output signal of the third detection circuit and an output signal of the fourth detection circuit Are different by an odd multiple of 1/4 of the period of the output signal of each detection circuit.

  The first detection angle includes a first angle error with respect to a theoretical value of the first angle assumed when the direction of the external magnetic field rotates ideally. The second detection angle includes a second angle error with respect to a theoretical value of the second angle assumed when the direction of the external magnetic field rotates ideally.

  In the magnetic sensor of the present invention, the first angle error and the second angle error periodically change with the same error period as the external magnetic field changes, and the first angle error and the first angle error change. The change in the angle error of 2 depends on the change in the direction of the external magnetic field. The error period is ½ of the rotation period in the direction of the external magnetic field. The first position and the second position are different from each other, and the deviation between the first position and the second position corresponds to an odd multiple of 1/2 of the error period. The magnetic sensor of the present invention further calculates a detected value of an angle formed by the direction of the external magnetic field at the reference position with respect to the reference direction based on the first detection angle and the second detection angle. An arithmetic circuit is provided.

  In the magnetic sensor of the present invention, the first position where the first detection unit detects the first angle and the second position where the second detection unit detects the second angle are set to 1 of the error period. Detecting the angle formed by the direction of the external magnetic field at the reference position with respect to the reference direction based on the first detection angle and the second detection angle by making the difference by an amount corresponding to an odd multiple of / 2. When calculating the value, it becomes possible to cancel the first angle error included in the first detection angle and the second angle error included in the second detection angle. Thereby, it is possible to reduce errors in the detection angle of the magnetic sensor.

  In the magnetic sensor of the present invention, each of the first to fourth detection circuits may include a pair of magnetic detection elements connected in series. In this case, each of the first to fourth detection circuits includes a Wheatstone bridge circuit including a first pair of magnetic detection elements connected in series and a second pair of magnetic detection elements connected in series. You may have. The magnetic detection element may be a magnetoresistive element. The magnetoresistive effect element includes a magnetization fixed layer whose magnetization direction is fixed, a free layer whose magnetization direction changes according to the direction of the external magnetic field, a nonmagnetic layer disposed between the magnetization fixed layer and the free layer, You may have. The magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the second detection circuit is orthogonal to the magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the first detection circuit, and the magnetoresistance in the fourth detection circuit. The magnetization direction of the magnetization fixed layer of the effect element may be orthogonal to the magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the third detection circuit.

  In the magnetic sensor of the present invention, the first angle error includes a component that changes in the error cycle depending on the change in the direction of the external magnetic field, and a second error cycle that depends on the change in the first detection angle. The second angle error includes a component that changes in the error period depending on the change in the direction of the external magnetic field, and a second error period that depends on the change in the second detection angle. The second error period is ¼ of the period of the output signal of each detection circuit, and the phase of the first detection angle and the phase of the second detection angle are the second error. It may be different by an odd multiple of 1/2 of the period.

  According to the magnetic sensor of the present invention, based on the first detection angle and the second detection angle, when calculating the detection value of the angle of the external magnetic field at the reference position with respect to the reference direction, It is possible to cancel the first angle error included in the first detection angle and the second angle error included in the second detection angle, thereby reducing the detection angle error of the magnetic sensor. There is an effect that it becomes possible.

1 is a perspective view showing a schematic configuration of a magnetic sensor according to a first embodiment of the invention. It is explanatory drawing which shows the definition of the direction and angle in the 1st Embodiment of this invention. It is a circuit diagram which shows the structure of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is a top view of the unit which integrated four bridge circuits in the magnetic sensor shown in FIG. FIG. 5 is a plan view showing a plurality of lower electrodes provided in one divided region in FIG. 4. It is a perspective view which shows a part of one MR element in FIG. FIG. 4 is a waveform diagram showing an aspect of waveform distortion of an output signal of a detection circuit in FIG. It is a wave form chart showing the relation between the 1st detection angle and the 1st angle error in a 1st embodiment of the present invention. It is explanatory drawing which shows the effect | action of angle error reduction in the 1st Embodiment of this invention. It is a wave form diagram which shows the relationship between the detected value of an angle and the angle error in the 1st Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the further another example of the usage method of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the further another example of the usage method of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 2nd Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 2nd Embodiment of this invention. It is a top view which shows the unit which integrated two bridge circuits in the 1st detection part of the magnetic sensor which concerns on the 2nd Embodiment of this invention. It is a circuit diagram which shows the structure of the magnetic sensor which concerns on the 3rd Embodiment of this invention. It is a circuit diagram which shows the structure of the magnetic sensor which concerns on the 4th Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 5th Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 5th Embodiment of this invention. It is a wave form diagram which shows the relationship between the external magnetic field in the 5th Embodiment of this invention, a 1st detection angle, and a 1st angle error. It is explanatory drawing which shows the effect | action of angle error reduction in the 5th Embodiment of this invention. It is a wave form diagram which shows the relationship between the detected value of an angle and the angle error in the 5th Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 6th Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 6th Embodiment of this invention. It is a block diagram which shows the structure of the magnetic sensor which concerns on the 7th Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 7th Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 7th Embodiment of this invention. It is explanatory drawing which shows the effect | action of angle error reduction in the 7th Embodiment of this invention. It is a wave form diagram which shows the relationship between the detected value of an angle and the angle error in the 7th Embodiment of this invention. It is explanatory drawing which shows the example of the usage method of the magnetic sensor which concerns on the 8th Embodiment of this invention. It is explanatory drawing which shows the other example of the usage method of the magnetic sensor which concerns on the 8th Embodiment of this invention. It is explanatory drawing which shows the effect | action of angle error reduction in the 8th Embodiment of this invention. It is a wave form diagram which shows the relationship between the detected value of an angle and the angle error in the 8th Embodiment of this invention.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, a schematic configuration of the magnetic sensor according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 is a perspective view showing a schematic configuration of a magnetic sensor according to the present embodiment. FIG. 2 is an explanatory diagram showing definitions of directions and angles in the present embodiment.

  As shown in FIG. 1, the magnetic sensor 1 according to the present embodiment detects an angle formed by the direction at the reference position of the external magnetic field MF whose direction rotates with respect to the reference direction. FIG. 1 shows a cylindrical magnet 2 as an example of means for generating an external magnetic field MF whose direction rotates. The magnet 2 has an N pole and an S pole that are arranged symmetrically about a virtual plane including the central axis of the cylinder. The magnet 2 rotates around the central axis of the cylinder. Thereby, the direction of the external magnetic field MF generated by the magnet 2 rotates around the rotation center C including the central axis of the cylinder. The magnetic sensor 1 is disposed so as to face one end face of the magnet 2. In addition, although the other example of the usage method of the magnetic sensor 1 is shown later, the means to generate the external magnetic field MF whose direction rotates is not limited to the magnet 2 shown in FIG.

  The magnetic sensor 1 includes a first detector 10 for detecting a first angle formed by the direction of the external magnetic field MF at the first position with respect to the first direction, and the direction of the external magnetic field at the second position. Includes a second detection unit 20 for detecting a second angle formed with respect to the second direction. In FIG. 1, in order to facilitate understanding, the first detection unit 10 and the second detection unit 20 are depicted as separate bodies. However, the first detection unit 10 and the second detection unit 20 are integrated. May be.

  Here, with reference to FIG. 2, the definition of the direction and angle in this Embodiment is demonstrated. First, a direction parallel to the rotation center C shown in FIG. 1 and directed from one end face of the magnet 2 toward the magnetic sensor 1 is defined as a Z direction. Next, two directions orthogonal to each other on a virtual plane perpendicular to the Z direction are defined as an X direction and a Y direction. In FIG. 2, the X direction is represented as a direction toward the right side, and the Y direction is represented as a direction toward the upper side. In addition, a direction opposite to the X direction is defined as -X direction, and a direction opposite to the Y direction is defined as -Y direction.

  The reference position PR is a position where the magnetic sensor 1 detects the external magnetic field MF. The reference position PR is, for example, a position where the first detection unit 10 is disposed. The reference direction DR is the Y direction. The angle formed by the direction DM of the external magnetic field MF at the reference position PR with respect to the reference direction DR is represented by the symbol θ. The direction DM of the external magnetic field MF is assumed to rotate clockwise in FIG. The angle θ is expressed as a positive value when viewed in the clockwise direction from the reference direction DR, and is expressed as a negative value when viewed in the counterclockwise direction from the reference direction DR.

  The first position P1 is a position where the first detection unit 10 detects the external magnetic field MF. In the present embodiment, the first position P1 coincides with the reference position PR. The first direction D1 is a reference direction when the first detection unit 10 represents the direction DM of the external magnetic field MF. In the present embodiment, the first direction D1 coincides with the reference direction DR. A first angle formed by the direction DM of the external magnetic field MF with respect to the first direction D1 is represented by the symbol θ1. The definition of the sign of the angle θ1 is the same as that of the angle θ. In the present embodiment, the angle θ1 matches the angle θ.

  The second position P2 is a position where the second detection unit 20 detects the external magnetic field MF. In the present embodiment, the second position P2 is the same position as the first position P1 in the rotation direction of the external magnetic field MF. In the present embodiment, in particular, the second position P2 coincides with the reference position PR and the first position P1. The second direction D2 is a reference direction when the second detection unit 20 represents the direction DM of the external magnetic field MF. In the present embodiment, the second direction D2 is parallel to the XY plane and is inclined by 45 ° with respect to the rotation direction of the external magnetic field MF with respect to the first direction D1. The reason will be described in detail later. A second angle formed by the direction DM of the external magnetic field MF with respect to the second direction D2 is represented by the symbol θ2. The definition of positive / negative of the angle θ2 is the same as that of the angle θ. In the present embodiment, the angle θ2 is 45 ° smaller than the angle θ. A direction rotated 90 ° from the second direction D2 is represented by a symbol D3.

  Next, the configuration of the magnetic sensor 1 will be described in detail with reference to FIG. FIG. 3 is a circuit diagram showing a configuration of the magnetic sensor 1. As described above, the magnetic sensor 1 includes the first detection unit 10 and the second detection unit 20. The first detection unit 10 includes first and second detection circuits 11 and 12 and a first arithmetic circuit 13. The first and second detection circuits 11 and 12 each detect the intensity of a component in one direction of the external magnetic field MF, and output a signal representing the intensity. The first arithmetic circuit 13 calculates a first detection angle θ1s that is a detection value of the first angle θ1 based on the output signals of the first and second detection circuits 11 and 12. The phase of the output signal of the first detection circuit 11 and the phase of the output signal of the second detection circuit 12 differ by an odd multiple of 1/4 of the period of the output signal of each detection circuit 11, 12.

  The configuration of the second detection unit 20 is basically the same as that of the first detection unit 10. That is, the second detection unit 20 includes third and fourth detection circuits 21 and 22 and a second arithmetic circuit 23. The third and fourth detection circuits 21 and 22 each detect the intensity of a component in one direction of the external magnetic field MF, and output a signal representing the intensity. The second arithmetic circuit 23 calculates a second detection angle θ2s that is a detection value of the second angle θ2 based on the output signals of the third and fourth detection circuits 21 and 22. The phase of the output signal of the third detection circuit 21 and the phase of the output signal of the fourth detection circuit 22 differ by an odd multiple of 1/4 of the period of the output signal of each detection circuit 21, 22.

  The magnetic sensor 1 is further configured based on the first detection angle θ1s obtained by the first detection unit 10 and the second detection angle θ2s obtained by the second detection unit 20, based on the external magnetic field MF. A third arithmetic circuit 30 is provided that calculates a detected value θs of an angle θ formed by the direction DM at the reference position PR with respect to the reference direction DR. In the present embodiment, the third arithmetic circuit 30 calculates θs by the following equation (1).

  θs = (θ1s + θ2s + π / 4) / 2 (1)

  The first detection circuit 11 includes a Wheatstone bridge circuit 14 and a difference detector 15. The Wheatstone bridge circuit 14 includes a power supply port V1, a ground port G1, two output ports E11 and E12, a first pair of magnetic detection elements R11 and R12 connected in series, and a second connected in series. A pair of magnetic detection elements R13 and R14. One end of each of the magnetic detection elements R11 and R13 is connected to the power supply port V1. The other end of the magnetic detection element R11 is connected to one end of the magnetic detection element R12 and the output port E11. The other end of the magnetic detection element R13 is connected to one end of the magnetic detection element R14 and the output port E12. The other ends of the magnetic detection elements R12 and R14 are connected to the ground port G1. A power supply voltage having a predetermined magnitude is applied to the power supply port V1. The ground port G1 is connected to the ground. The difference detector 15 outputs a signal corresponding to the potential difference between the output ports E11 and E12 to the first arithmetic circuit 13.

  The second detection circuit 12 includes a Wheatstone bridge circuit 16 and a difference detector 17. The Wheatstone bridge circuit 16 includes a power supply port V2, a ground port G2, two output ports E21 and E22, a first pair of magnetic detection elements R21 and R22 connected in series, and a second connected in series. A pair of magnetic detection elements R23 and R24. One end of each of the magnetic detection elements R21 and R23 is connected to the power supply port V2. The other end of the magnetic detection element R21 is connected to one end of the magnetic detection element R22 and the output port E21. The other end of the magnetic detection element R23 is connected to one end of the magnetic detection element R24 and the output port E22. The other ends of the magnetic detection elements R22 and R24 are connected to the ground port G2. A power supply voltage having a predetermined magnitude is applied to the power supply port V2. The ground port G2 is connected to the ground. The difference detector 17 outputs a signal corresponding to the potential difference between the output ports E21 and E22 to the first arithmetic circuit 13.

  The third detection circuit 21 includes a Wheatstone bridge circuit 24 and a difference detector 25. The Wheatstone bridge circuit 24 includes a power supply port V3, a ground port G3, two output ports E31 and E32, a first pair of magnetic detection elements R31 and R32 connected in series, and a second connected in series. A pair of magnetic detection elements R33 and R34. One end of each of the magnetic detection elements R31 and R33 is connected to the power supply port V3. The other end of the magnetic detection element R31 is connected to one end of the magnetic detection element R32 and the output port E31. The other end of the magnetic detection element R33 is connected to one end of the magnetic detection element R34 and the output port E32. The other ends of the magnetic detection elements R32 and R34 are connected to the ground port G3. A power supply voltage having a predetermined magnitude is applied to the power supply port V3. The ground port G3 is connected to the ground. The difference detector 25 outputs a signal corresponding to the potential difference between the output ports E31 and E32 to the second arithmetic circuit 23.

  The fourth detection circuit 22 includes a Wheatstone bridge circuit 26 and a difference detector 27. The Wheatstone bridge circuit 26 includes a power supply port V4, a ground port G4, two output ports E41 and E42, a first pair of magnetic detection elements R41 and R42 connected in series, and a second connected in series. A pair of magnetic detection elements R43 and R44. One end of each of the magnetic detection elements R41 and R43 is connected to the power supply port V4. The other end of the magnetic detection element R41 is connected to one end of the magnetic detection element R42 and the output port E41. The other end of the magnetic detection element R43 is connected to one end of the magnetic detection element R44 and the output port E42. The other ends of the magnetic detection elements R42 and R44 are connected to the ground port G4. A power supply voltage having a predetermined magnitude is applied to the power supply port V4. The ground port G4 is connected to the ground. The difference detector 27 outputs a signal corresponding to the potential difference between the output ports E41 and E42 to the second arithmetic circuit 23.

  In the present embodiment, MR elements, particularly TMR elements, are used as all magnetic detection elements included in the Wheatstone bridge circuit (hereinafter referred to as bridge circuit) 14, 16, 24, and 26. A GMR element may be used in place of the TMR element. The TMR element or the GMR element includes a magnetization fixed layer whose magnetization direction is fixed, a free layer whose magnetization direction changes according to the direction of the external magnetic field MF, and a nonmagnetic layer disposed between the magnetization fixed layer and the free layer. And have a layer. In the TMR element, the nonmagnetic layer is a tunnel barrier layer. In the GMR element, the nonmagnetic layer is a nonmagnetic conductive layer. In the TMR element or the GMR element, the resistance value changes according to the angle formed by the magnetization direction of the free layer with respect to the magnetization direction of the magnetization fixed layer, and when this angle is 0 °, the resistance value becomes the minimum value. When the angle is 180 °, the resistance value becomes the maximum value. In the following description, the magnetic detection elements included in the bridge circuits 14, 16, 24, and 26 are referred to as MR elements. In FIG. 3, a solid arrow indicates the magnetization direction of the magnetization fixed layer in the MR element, and a white arrow indicates the magnetization direction of the free layer in the MR element.

  In the first detection circuit 11, the magnetization direction of the magnetization fixed layer in the MR elements R11 and R14 is the X direction, and the magnetization direction of the magnetization fixed layer in the MR elements R12 and R13 is the -X direction. In this case, the potential difference between the output ports E11 and E12 changes according to the intensity of the component in the X direction of the external magnetic field MF. Accordingly, the first detection circuit 11 detects the intensity of the component in the X direction of the external magnetic field MF and outputs a signal representing the intensity. When the first angle θ1 shown in FIG. 2 is 0 ° and 180 °, the intensity of the component in the X direction of the external magnetic field MF is zero. When the first angle θ1 is larger than 0 ° and smaller than 180 °, the intensity of the component in the X direction of the external magnetic field MF is a positive value. When the first angle θ1 is larger than 180 ° and smaller than 360 °, the intensity of the component in the X direction of the external magnetic field MF is a negative value.

  In the second detection circuit 12, the magnetization direction of the magnetization fixed layer in the MR elements R21 and R24 is the Y direction, and the magnetization direction of the magnetization fixed layer in the MR elements R22 and R23 is the -Y direction. In this case, the potential difference between the output ports E21 and E22 changes according to the intensity of the component in the Y direction of the external magnetic field MF. Therefore, the second detection circuit 12 detects the intensity of the component in the Y direction of the external magnetic field MF and outputs a signal representing the intensity. When the first angle θ1 shown in FIG. 2 is 90 ° and 270 °, the intensity of the component in the Y direction of the external magnetic field MF is zero. When the first angle θ1 is greater than or equal to 0 ° and less than 90 °, and greater than 270 ° and less than or equal to 360 °, the intensity of the component in the Y direction of the external magnetic field MF is a positive value. When the first angle θ1 is larger than 90 ° and smaller than 270 °, the intensity of the component in the Y direction of the external magnetic field MF is a negative value.

  In the example shown in FIG. 3, the magnetization direction of the MR magnetization fixed layer in the second detection circuit 12 is orthogonal to the magnetization direction of the magnetization fixed layer of the MR element in the first detection circuit 11. Ideally, the waveform of the output signal of the first detection circuit 11 is a sine waveform, and the waveform of the output signal of the second detection circuit 12 is a cosine waveform. In this case, the phase difference between the output signals of the detection circuits 11 and 12 is ¼ of the cycle of the output signals of the detection circuits 11 and 12. Here, when the output signal of the first detection circuit 11 is expressed as sin θ1s and the output signal of the second detection circuit 12 is expressed as cos θ1s, the first detection angle θ1s is calculated by the following equation (2). Can do. “Atan” represents an arc tangent.

  θ1s = atan (sin θ1s / cos θ1s) (2)

  Within the range of 360 °, the solution of θ1s in equation (2) has two values that differ by 180 °. However, it is possible to determine which of the two solutions of θ1s in Equation (2) is the true value of θ1s by the combination of the sign of sin θ1s and cos θ1s. That is, when sin θ1s is a positive value, θ1s is larger than 0 ° and smaller than 180 °. When sin θ1s is a negative value, θ1s is greater than 180 ° and smaller than 360 °. When cos θ1s is a positive value, θ1s is in the range of 0 ° to less than 90 ° and greater than 270 ° to 360 °. When cos θ1s is a negative value, θ1s is greater than 90 ° and smaller than 270 °. The first arithmetic circuit 13 obtains θ1s within a range of 360 ° by determining Expression (2) and the positive / negative combination of sin θ1s and cos θ1s. Note that the phase difference between the output signals of the detection circuits 11 and 12 is not limited to ¼ of the cycle of the output signal of the detection circuits 11 and 12, but the phase difference between the output signals of the detection circuits 11 and 12 is If it is an odd multiple of 1/4 of the period of the output signals 11 and 12, θ1s can be obtained.

  In the third detection circuit 21, the magnetization direction of the magnetization fixed layer in the MR elements R31 and R34 is the direction D3 shown in FIG. 2, and the magnetization direction of the magnetization fixed layer in the MR elements R32 and R33 is the direction D3. Is the opposite direction. In this case, the potential difference between the output ports E31 and E32 changes according to the intensity of the component in the direction D3 of the external magnetic field MF. Therefore, the third detection circuit 21 detects the intensity of the component in the direction D3 of the external magnetic field MF, and outputs a signal representing the intensity. When the second angle θ2 shown in FIG. 2 is 0 ° and 180 °, the intensity of the component in the direction D3 of the external magnetic field MF is zero. When the second angle θ2 is larger than 0 ° and smaller than 180 °, the intensity of the component in the direction D3 of the external magnetic field MF is a positive value. When the second angle θ2 is larger than 180 ° and smaller than 360 °, the intensity of the component in the direction D3 of the external magnetic field MF is a negative value.

  In the fourth detection circuit 22, the magnetization direction of the magnetization fixed layer in the MR elements R41 and R44 is the direction D2 shown in FIG. 2, and the magnetization direction of the magnetization fixed layer in the MR elements R42 and R43 is the direction D2. Is the opposite direction. In this case, the potential difference between the output ports E41 and E42 changes according to the intensity of the component in the direction D2 of the external magnetic field MF. Therefore, the fourth detection circuit 22 detects the intensity of the component in the direction D2 of the external magnetic field MF, and outputs a signal representing the intensity. When the second angle θ2 shown in FIG. 2 is 90 ° and 270 °, the intensity of the component in the direction D2 of the external magnetic field MF is zero. When the second angle θ2 is greater than or equal to 0 ° and less than 90 °, and greater than 270 ° and less than or equal to 360 °, the intensity of the component in the direction D2 of the external magnetic field MF is a positive value. When the second angle θ2 is larger than 90 ° and smaller than 270 °, the intensity of the component in the direction D2 of the external magnetic field MF is a negative value.

  In the example shown in FIG. 3, the magnetization direction of the MR magnetization fixed layer in the fourth detection circuit 22 is orthogonal to the magnetization direction of the magnetization fixed layer of the MR element in the third detection circuit 21. Ideally, the waveform of the output signal of the third detection circuit 21 is a sine waveform, and the waveform of the output signal of the fourth detection circuit 22 is a cosine waveform. In this case, the phase difference between the output signals of the detection circuits 21 and 22 is ¼ of the cycle of the output signals of the detection circuits 21 and 22. Here, when the output signal of the third detection circuit 21 is expressed as sin θ2s and the output signal of the fourth detection circuit 22 is expressed as cos θ2s, the second detection angle θ2s is calculated by the following equation (3). Can do.

  θ2s = atan (sin θ2s / cos θ2s) (3)

  The second arithmetic circuit 23 obtains θ2s within a range of 360 ° by the determination of the combination of positive and negative of sin θ2s and cos θ2s as in the above-described method of obtaining θ1s. Note that the phase difference between the output signals of the detection circuits 21 and 22 is not limited to ¼ of the cycle of the output signal of the detection circuits 21 and 22, but the phase difference between the output signals of the detection circuits 21 and 22 is the detection circuit. If it is an odd multiple of 1/4 of the cycle of the output signals of 21 and 22, θ2s can be obtained.

  Note that the second direction D2 shown in FIG. 2 may be inclined by −45 ° with respect to the rotation direction of the external magnetic field MF with respect to the first direction D1. In this case, the magnetization directions of the magnetization fixed layers of all the MR elements included in the third and fourth detection circuits 21 and 22 are set to a direction rotated by −90 ° from the direction shown in FIG. . In this case, the third arithmetic circuit 30 calculates θs using the following formula (4) instead of the formula (1).

  θs = (θ1s + θ2s−π / 4) / 2 (4)

  The first to third arithmetic circuits 13, 23, and 30 can be realized by a single microcomputer, for example.

  Next, an example of the unit 40 in which the bridge circuits 14, 16, 24, and 26 in the magnetic sensor 1 are integrated will be described with reference to FIG. FIG. 4 is a plan view of the unit 40. The unit 40 includes a substrate 41 and bridge circuits 14, 16, 24, and 26 provided on the substrate 41. A plurality of ports of the bridge circuits 14, 16, 24, 26 are arranged on the substrate 41 in the vicinity of the periphery of the substrate 41. A circular MR element arrangement region is provided on the substrate 41. This MR element arrangement region is divided into 16 divided regions in the circumferential direction. MR elements R11 to R14, R21 to R24, R31 to R34, R41 to R44 are arranged in the 16 divided regions, respectively. In addition, wiring is formed on the substrate 41 to electrically connect a plurality of MR elements and a plurality of ports.

  Next, an example of the configuration of an arbitrary MR element in the unit 40 shown in FIG. 4 will be described with reference to FIGS. FIG. 5 is a plan view showing a plurality of lower electrodes provided in one divided region in FIG. FIG. 6 is a perspective view showing a part of one MR element in FIG. In this example, one MR element has a plurality of lower electrodes, a plurality of MR films, and a plurality of upper electrodes. As shown in FIG. 5, the plurality of lower electrodes 42 are arranged on the substrate 41 in one divided region. The individual lower electrodes 42 are elongated and the plurality of lower electrodes 42 are arranged so as to have a meander shape as a whole. A gap is formed between two lower electrodes 42 adjacent to each other in the longitudinal direction of the lower electrode 42. As shown in FIG. 6, MR films 50 are disposed on the upper surface of the lower electrode 42 in the vicinity of both ends in the longitudinal direction. The MR film 50 includes a free layer 51, a nonmagnetic layer 52, a magnetization fixed layer 53, and an antiferromagnetic layer 54 that are sequentially stacked from the lower electrode 42 side. The free layer 51 is electrically connected to the lower electrode 42. The antiferromagnetic layer 54 is made of an antiferromagnetic material and causes exchange coupling with the magnetization fixed layer 53 to fix the magnetization direction of the magnetization fixed layer 53. The plurality of upper electrodes 43 are disposed on the plurality of MR films 50. Each upper electrode 43 is elongated and is disposed on two lower electrodes 42 adjacent in the longitudinal direction of the lower electrode 42 to electrically connect the antiferromagnetic layers 54 of the two adjacent MR films 50. The plurality of upper electrodes 43 are arranged so as to have a meander shape as a whole, like the plurality of lower electrodes 42. With this configuration, the MR element shown in FIGS. 5 and 6 has a plurality of MR films 50 connected in series by a plurality of lower electrodes 42 and a plurality of upper electrodes 43. The arrangement of the layers 51 to 54 in the MR film 50 may be upside down from the arrangement shown in FIG.

  Next, the operation and effect of the magnetic sensor 1 will be described with reference to FIGS. In the magnetic sensor 1, the first detection unit 10 obtains a first detection angle θ <b> 1 s that is a detection value of the first angle θ <b> 1 based on the output signals of the first and second detection circuits 11 and 12. The second detection unit 20 obtains a second detection angle θ2s that is a detection value of the second angle θ2 based on the output signals of the third and fourth detection circuits 21 and 22. Then, based on the first detection angle θ1s and the second detection angle θ2s, the third arithmetic circuit 30 calculates the angle θ formed by the direction DM of the external magnetic field MF at the reference position PR with respect to the reference direction DR. The detection value θs is calculated.

  In the present embodiment, the waveforms of the output signals of the detection circuits 11, 12, 21, 22 are ideally sinusoidal. However, in practice, the output signal waveform of the MR element is distorted due to the MR element, so that the waveform of each output signal of the detection circuits 11, 12, 21, 22 is distorted from the sine curve. As a case where the output signal waveform of the MR element is distorted due to the MR element, for example, the magnetization direction of the magnetization fixed layer of the MR element varies due to the influence of the external magnetic field MF or the like, or the magnetization direction of the free layer of the MR element However, the direction of the external magnetic field MF may not coincide with the effect of the shape anisotropy of the free layer, coercive force, and the like. FIG. 7 shows an aspect of the waveform distortion of the output signal of the detection circuit. FIG. 7 shows the waveform of the output signal of the detection circuit 12 as a representative of the detection circuits 11, 12, 21, and 22. In FIG. 7, the horizontal axis indicates the angle θ, and the vertical axis indicates the output signal cos θ1s of the detection circuit 12. Reference numeral 60 denotes an ideal sine curve. Two waveforms denoted by reference numerals 61 and 62 are distorted due to the MR element.

  Since the waveforms of the output signals of the detection circuits 11 and 12 are distorted due to the MR elements as described above, the first detection angle θ1s is assumed when the direction DM of the external magnetic field MF rotates ideally. The first angle error dθ1 with respect to the theoretical value of one angle θ1 is included. Similarly, since the waveforms of the output signals of the detection circuits 21 and 22 are distorted due to the MR element, the second detection angle θ2s is a second value assumed when the direction DM of the external magnetic field MF rotates ideally. The second angle error dθ2 with respect to the theoretical value of the angle θ2 is included. The first angle error dθ1 and the second angle error dθ2 periodically change with the same error period as the direction DM of the external magnetic field MF changes, and the change in the first angle error dθ1 is the first change. Depending on the change in the detection angle θ1s, the change in the second angle error dθ2 depends on the change in the second detection angle θ2s. When the waveform of the output signal of the detection circuit is distorted as shown in FIG. 7, the error cycle is 1/4 of the cycle of the output signal of each detection circuit, that is, π / 2 (90 °).

  FIG. 8 shows the relationship between the first detected angle θ1s and the first angular error dθ1. In FIG. 8, the horizontal axis indicates the angles θ and θ1, and the vertical axis indicates the angle θ1, the first detection angle θ1s, and the first angle error dθ1. In FIG. 8, for the sake of convenience, the value of the angle θ and the first detection angle θ1s on the vertical axis is represented by a value obtained by subtracting 180 ° when the actual angle is in the range of 90 ° to 270 °. In the range of 270 ° to 360 °, the value is expressed by subtracting 360 °. In the same figure as FIG. 8 used in the following description, the same notation as in FIG. 8 is used. The relationship between the second detection angle θ2s and the second angle error dθ2 is the same as that in FIG.

  In the present embodiment, the phase of the first detection angle θ1s and the phase of the second detection angle θ2s are different from each other by 1/2 of the error period, that is, π / 4 (45 °). In order to realize this, in the present embodiment, the second direction D2 is inclined by 45 ° with respect to the rotation direction of the external magnetic field MF with respect to the first direction D1. According to the present embodiment, it is possible to cancel out the first angle error dθ1 and the second angle error dθ2. This will be described with reference to FIG. 9 and FIG. 9A shows the relationship between the first detection angle θ1s and the first angle error dθ1 shown in FIG. In FIG. 9, (b) shows the relationship between the second detection angle θ2s and the second angle error dθ2. In the example shown in FIG. 9, the amplitudes of the first angle error dθ1 and the second angle error dθ2 are ± 6.7 °. In the present embodiment, the phases of the first detection angle θ1s and the second detection angle θ2s are shifted by ½ of the error period, that is, an odd multiple of π / 4. Then, the detection value θs of the angle θ is calculated using the first detection angle θ1s and the second detection angle θ2s. Therefore, when calculating the detection value θs, the phase of the first angle error dθ1 and the phase of the second angle error dθ2 are opposite to each other. As a result, the first angular error dθ1 and the second angular error dθ2 are canceled out.

  FIG. 10 shows the relationship between the detected value θs calculated as described above and the angular error dθ included in the detected value θs. As shown in FIG. 10, the angle error dθ is significantly smaller than the first angle error dθ1 and the second angle error dθ2. In the example shown in FIG. 10, the amplitude of the angle error dθ is ± 0.3 °.

  Note that the phase difference between the first detection angle θ1s and the second detection angle θ2s is not limited to 1/2 of the error period, and may be an odd multiple of 1/2 of the error period. In this case, the first angular error dθ1 and the second angular error dθ2 are canceled out, and the angular error dθ included in the detected value θs can be greatly reduced. In the present embodiment, the first position P1 and the second position P2 are the same position in the rotation direction of the external magnetic field MF. In this case, the first direction D1 and the second direction D2 are different from each other by an angle in a space corresponding to an odd multiple of ½ of the error period with respect to the rotation direction of the external magnetic field MF. The phase difference between the angle θ1s and the second detection angle θ2s can be an odd multiple of 1/2 of the error period. In the example shown in FIG. 2, the first direction D1 and the second direction D2 are made to differ from each other by an angle on the space corresponding to ½ of the error period, that is, 45 ° with respect to the rotation direction of the external magnetic field MF. .

  In the present embodiment, the detection angle is corrected using the two detection units 10 and 20 having exactly the same configuration except for the magnetization direction of the magnetization fixed layer in the MR element. Therefore, even if the angle error in each detection unit is a function of temperature, the detection angle can be corrected by offsetting the angle error in each detection unit including the variation in the angle error due to temperature. Therefore, according to the present embodiment, it is possible to finally obtain an angle detection value with a small error variation due to temperature.

  Next, another example of how to use the magnetic sensor 1 will be described with reference to FIGS. FIGS. 11 and 12 each show an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 in which one or more pairs of N poles and S poles are alternately arranged in a ring shape. Show. In these examples, the paper surface in FIGS. 11 and 12 is the XY plane, and the direction perpendicular to the paper surface is the Z direction. The external magnetic field rotates around the Z direction. In the example shown in FIGS. 11 and 12, the rotating body 71 includes two sets of N poles and S poles. In this case, the external magnetic field rotates twice while the rotating body 71 rotates once.

  In the example shown in FIG. 11, the first direction D <b> 1 that is a reference direction when the first detection unit 10 represents the direction of the external magnetic field is set in the radial direction of the rotating body 71. The second direction D2, which is a reference direction when the second detection unit 20 represents the direction of the external magnetic field, is inclined by 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction D1 in the XY plane. ing.

  In the example shown in FIG. 12, the first direction D1 and the second direction D2 are both in the XY plane while the angle formed by the first direction D1 and the second direction D2 is 45 °. It is inclined with respect to the radial direction of 71. The angles formed by the directions D1 and D2 with respect to the radial direction of the rotating body 71 are preferably equal in absolute value, that is, 22.5 ° and −22.5 °. This is because in this case, the positional relationship between the detection unit 10 and the external magnetic field is the same as the positional relationship between the detection unit 20 and the external magnetic field, and correction due to the difference in these positional relationships is unnecessary. is there.

  FIG. 13 and FIG. 14 show the directions of external magnetic fields generated from the outer peripheral portion of the moving body 72 in which a plurality of sets of N poles and S poles are alternately arranged in a straight line and move in the direction in which the N poles and S poles are arranged. Is detected by the magnetic sensor 1. In these examples, the paper surface in FIGS. 13 and 14 is the XY plane, and the direction perpendicular to the paper surface is the Z direction. The external magnetic field rotates around the Z direction.

  In the example illustrated in FIG. 13, the first direction D1 is set in a direction orthogonal to the moving direction of the moving body 72 in the XY plane. The second direction D2 is inclined 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction D1 in the XY plane.

  In the example shown in FIG. 14, the first direction D1 and the second direction D2 are both in the XY plane while the angle formed by the first direction D1 and the second direction D2 is 45 °. It is inclined with respect to the direction orthogonal to the moving direction of 72. Similarly to the example shown in FIG. 12, the angles formed by the directions D1 and D2 with respect to the direction orthogonal to the moving direction of the moving body 72 are equal in absolute value, that is, 22.5 ° and −22.5 °. It is preferable that

[Second Embodiment]
Next, a magnetic sensor according to a second embodiment of the invention will be described with reference to FIGS. In the magnetic sensor 1 according to the present embodiment, the first position P1 where the first detection unit 10 detects the external magnetic field MF, and the position where the second detection unit 20 detects the external magnetic field MF. The second positions P2 are different from each other. That is, in the present embodiment, the first detection unit 10 and the second detection unit 20 are arranged at different positions. The deviation between the first position P1 and the second position P2 corresponds to an odd multiple of 1/2 of the error period.

  FIG. 15 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 as in the examples shown in FIGS. 11 and 12 in the first embodiment. . In this example, the rotating body 71 includes two sets of N poles and S poles, and the external magnetic field rotates twice while the rotating body 71 rotates once. In this case, one cycle in the output signals of the detection circuits 11, 12, 21, 22, that is, 360 ° of the electrical angle corresponds to 1/2 rotation of the rotating body 71, that is, 180 ° of the rotating angle of the rotating body 71. The error period is ¼ of the period of the output signal of the detection circuit, which corresponds to 90 ° of the electrical angle and 45 ° of the rotation angle of the rotating body 71. In the present embodiment, the shift between the first position P1 and the second position P2 is an odd multiple of 1/2 of the error period, that is, an odd multiple of 45 ° of the electrical angle, and 22. It is an odd multiple of 5 °. FIG. 15 shows an example in which the shift between the first position P1 and the second position P2 is 22.5 ° of the rotation angle of the rotating body 71.

  Further, in the example shown in FIG. 15, when the first direction D1 that is a reference direction when the first detection unit 10 represents the direction of the external magnetic field and the second detection unit 20 represent the direction of the external magnetic field. The second direction D2 that is the reference direction is set in the radial direction of the rotating body 71. Accordingly, the phase difference between the first detection angle θ1s and the second detection angle θ2s is an odd multiple of 1/2 of the error period, that is, an odd multiple of 45 ° of the electrical angle, and 22. An odd multiple of 5 °.

  FIG. 16 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 as in the example shown in FIGS. 13 and 14 in the first embodiment. . In this example, when the moving body 72 moves by one pitch, that is, one set of N and S poles, the external magnetic field rotates once. In this case, one cycle in the output signals of the detection circuits 11, 12, 21, 22, that is, 360 ° of the electrical angle corresponds to one pitch of the moving body 72. The error period is ¼ of the period of the output signal of the detection circuit, which corresponds to ¼ pitch. In the present embodiment, the shift between the first position P1 and the second position P2 is an odd multiple of 1/2 of the error period, that is, an odd multiple of 1/8 pitch. FIG. 16 shows an example in which the shift between the first position P1 and the second position P2 is 1/8 pitch.

  In the example shown in FIG. 16, the first direction D1 and the second direction D2 are both set in a direction orthogonal to the moving direction of the moving body 72 in the XY plane. Thus, the phase difference between the first detection angle θ1s and the second detection angle θ2s is an odd multiple of 1/2 of the error period, that is, an odd multiple of 45 ° of the electrical angle, and an odd multiple of 1/8 pitch. .

  According to the present embodiment, as in the first embodiment, the phase difference between the first detection angle θ1s and the second detection angle θ2s is an odd multiple of 1/2 of the error period. The first angle error dθ1 and the second angle error dθ2 are canceled out, and the angle error dθ included in the detected value θs can be greatly reduced.

  FIG. 17 is a plan view illustrating an example of the unit 140 in which the bridge circuits 14 and 16 in the first detection unit 10 are integrated. The unit 140 includes a substrate 141 and bridge circuits 14 and 16 provided on the substrate 141. The plurality of ports of the bridge circuits 14 and 16 are arranged on the substrate 141 in the vicinity of the periphery of the substrate 141. A circular MR element arrangement region is provided on the substrate 141. This MR element arrangement region is divided into eight divided regions in the circumferential direction. MR elements R11 to R14 and R21 to R24 are arranged in these eight divided regions, respectively. In addition, wiring is formed on the substrate 141 to electrically connect a plurality of MR elements and a plurality of ports. A unit in which the bridge circuits 24 and 26 in the second detection unit 20 are integrated can also be configured in the same manner as the unit 140.

  In the present embodiment, since the first detection unit 10 and the second detection unit 20 are arranged at different positions, the first position P1 and the second detection unit 20 are not attached to each other due to the mounting accuracy of the detection units 10 and 20. 2 is shifted from a desired value, and the phase difference between the first detection angle θ1s and the second detection angle θ2s can be shifted from an odd multiple of 45 ° of the desired electrical angle. There is sex. Here, a deviation amount from a desired value of the phase difference between the first detection angle θ1s and the second detection angle θ2s is represented as ± α. In the present embodiment, the value of ± α can be estimated from the phase difference of the peaks of the first detection angle θ1s and the second detection angle θ2s. Then, by calculating θs using the following equation (5) instead of equation (1), it becomes possible to correct the amount of deviation ± α and detect a more accurate angle θ. .

  θs = (θ1s + θ2s + π / 4 ± α) / 2 (5)

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment.

[Third Embodiment]
Next, a magnetic sensor according to a third embodiment of the invention will be described with reference to FIG. FIG. 18 is a circuit diagram showing a configuration of the magnetic sensor 1 according to the present embodiment. In the magnetic sensor 1 according to the present embodiment, each of the detection circuits 11, 12, 21, and 22 has a half bridge circuit instead of the Wheatstone bridge circuit, and does not have a difference detector.

  The detection circuit 11 includes a pair of magnetic detection elements (MR elements) R11 and R12 connected in series and provided between the power supply port V1 and the ground port G1. An output signal of the detection circuit 11 is obtained from the connection point of the magnetic detection elements R11 and R12. The detection circuit 12 includes a pair of magnetic detection elements (MR elements) R21 and R22 connected in series and provided between the power supply port V2 and the ground port G2. The output signal of the detection circuit 12 is obtained from the connection point of the magnetic detection elements R21 and R22.

  The detection circuit 21 has a pair of magnetic detection elements (MR elements) R31 and R32 connected in series and provided between the power supply port V3 and the ground port G3. The output signal of the detection circuit 21 is obtained from the connection point of the magnetic detection elements R31 and R32. The detection circuit 22 includes a pair of magnetic detection elements (MR elements) R41 and R42 connected in series and provided between the power supply port V4 and the ground port G4. The output signal of the detection circuit 22 is obtained from the connection point of the magnetic detection elements R41 and R42.

  The magnetization direction of the magnetization fixed layer of each magnetic detection element (MR element) R11, R12, R21, R22, R31, R32, R41, R42 is the magnetization fixed layer of the magnetic detection element (MR element) of the same sign in FIG. Is the same as the magnetization direction.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment.

[Fourth Embodiment]
Next, a magnetic sensor according to a fourth embodiment of the invention will be described with reference to FIG. FIG. 19 is a circuit diagram showing a configuration of the magnetic sensor 1 according to the present embodiment. In the magnetic sensor 1 according to the present embodiment, an AMR (anisotropic magnetoresistive effect) element is used as all the magnetic detection elements in the bridge circuits 14, 16, 24 and 26. In this case, the output signals of the detection circuits 11, 12, 21, and 22 change by two cycles while the external magnetic field rotates once. Therefore, the period of the output signal of the detection circuits 11, 12, 21, and 22 in the present embodiment corresponds to 1/2 rotation of the external magnetic field, and the detection circuits 11, 12, 21, and 22 in the first embodiment. Becomes 1/2 of the cycle of the output signal. In the present embodiment, the error period is also ½ of the error period in the first embodiment.

  In the present embodiment, the second direction D2, which is the reference direction when the second detection unit 20 represents the direction of the external magnetic field, is the direction of the external magnetic field by the first detection unit 10 in the XY plane. The rotation direction of the external magnetic field is inclined by 22.5 ° with respect to the first direction D1, which is the reference direction when expressed.

  In the present embodiment, the third arithmetic circuit 30 calculates θs using the following equation (6) instead of the equation (1).

  θs = (θ1s + θ2s + π / 8) / 2 (6)

  In the present embodiment, the second direction D2 may be inclined by −22.5 ° with respect to the rotation direction of the external magnetic field with respect to the first direction D1 in the XY plane. In this case, the third arithmetic circuit 30 calculates θs using the following formula (7) instead of the formula (6).

  θs = (θ1s + θ2s−π / 8) / 2 (7)

  Similar to the first embodiment, also in the present embodiment, the phase difference between the first detection angle θ1s and the second detection angle θ2s is an odd multiple of 1/2 of the error period. The first angle error dθ1 and the second angle error dθ2 are canceled out, and the angle error dθ included in the detected value θs can be greatly reduced.

  In the present embodiment, when the magnetic sensor 1 is used as in the examples shown in FIGS. 11 to 14, the second direction D2 is set to the outside in the XY plane with respect to the first direction D1. Tilt 22.5 ° in the direction of rotation of the magnetic field. When the magnetic sensor 1 is used as in the example shown in FIG. 12, the angle formed by each of the directions D1 and D2 with respect to the radial direction of the rotating body 71 is equal to the absolute value, that is, 11.25 °. It is preferably −11.25 °. Similarly, when the magnetic sensor 1 is used as in the example shown in FIG. 14, the angles formed by the directions D1 and D2 with respect to the direction orthogonal to the moving direction of the moving body 72 are equal in absolute value. Preferably the values are 11.25 ° and −11.25 °.

  Further, in the present embodiment, similarly to the second embodiment, the first detection unit 10 and the second detection unit 20 are arranged at different positions, and the first position P1 and the second position P2 are arranged. May be different from each other. In this case, the shift between the first position P1 and the second position P2 is set to an amount corresponding to an odd multiple of 1/2 of the error period. In this case, when the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 shown in FIG. 15 is detected by the magnetic sensor 1, the deviation between the first position P1 and the second position P2 is the rotating body. The rotation angle of 71 is an odd multiple of 11.25 °. Further, when the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 shown in FIG. 16 is detected by the magnetic sensor 1, the deviation between the first position P1 and the second position P2 is 1/16. It is an odd multiple of the pitch.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment. In the present embodiment, a Hall element may be used instead of the AMR element.

[Fifth Embodiment]
Next, a magnetic sensor according to a fifth embodiment of the invention will be described. The magnetic sensor 1 according to the present embodiment is suitable for reducing an angle error that occurs due to an external magnetic field. First, the reason why an angle error occurs due to an external magnetic field will be described with reference to FIGS. FIG. 20 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 in which one or more sets of N poles and S poles are alternately arranged in a ring shape. In this example, the component of the external magnetic field in the radial direction of the rotating body 71 is Hr, and the component of the external magnetic field orthogonal to Hr in the XY plane is Hθ. In FIG. 21, the magnetic sensor 1 indicates the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 in which a plurality of sets of N poles and S poles are alternately arranged in a straight line and moves in the direction in which the N poles and S poles are arranged. An example of detection is shown. In this example, the external magnetic field component in the direction orthogonal to the moving direction of the moving body 72 in the XY plane is Hr, and the external magnetic field component orthogonal to Hr in the XY plane is Hθ.

  Here, in the example shown in FIG. 20 or FIG. 21, consider a case where the first detection unit 10 detects the direction of the external magnetic field to obtain the first detection angle θ1s. FIG. 22 shows an example of the relationship between Hr, Hθ, θ1s and the first angular error dθ1 in this case. In FIG. 22, the horizontal axis indicates the angle θ formed by the direction DM of the external magnetic field MF with respect to the reference direction DR, and the vertical axis indicates Hr, Hθ, θ1s, and dθ1. In the example shown in FIG. 20 or FIG. 21, the direction of the external magnetic field and the intensity of the component in one direction of the external magnetic field may not change sinusoidally. In this case, the first detection angle θ1s includes the first angle error dθ1. In this case, the change in the first angular error dθ1 depends on the change in the direction of the external magnetic field. The error period of the first angle error dθ1 is ½ of the rotation period in the direction of the external magnetic field. Similarly, when the second detection unit 20 detects the direction of the external magnetic field to obtain the second detection angle θ2s, the second detection angle θ2s changes depending on the change in the direction of the external magnetic field. 2 angular errors dθ2.

  Next, the configuration of the magnetic sensor 1 according to the present embodiment will be described with reference to FIGS. In the magnetic sensor 1 according to the present embodiment, the first position P1 where the first detection unit 10 detects the external magnetic field MF, and the position where the second detection unit 20 detects the external magnetic field MF. The second positions P2 are different from each other. That is, in the present embodiment, the first detection unit 10 and the second detection unit 20 are arranged at different positions. The deviation between the first position P1 and the second position P2 corresponds to an odd multiple of 1/2 of the error period. This corresponds to an odd multiple of 1/4 of the period of rotation in the direction of the external magnetic field. 20 and 21 show an example in which the shift between the first position P1 and the second position P2 is an amount corresponding to 1/2 of the error period.

  Further, in the example shown in FIG. 20, when the first detection unit 10 represents the direction of the external magnetic field, the first direction D1, which is a reference direction, and the second detection unit 20 represents the direction of the external magnetic field. The second direction D2 that is the reference direction is set in the radial direction of the rotating body 71. In the example shown in FIG. 21, both the first direction D1 and the second direction D2 are set in a direction orthogonal to the moving direction of the moving body 72 in the XY plane. In these examples, the phase difference between the first detection angle θ1s and the second detection angle θ2s is ¼ of the rotation period in the direction of the external magnetic field (electrical angle 90 °). In these examples, the third arithmetic circuit 30 calculates θs by the following equation (8).

  θs = (θ1s + θ2s + π / 2) / 2 (8)

  Next, with reference to FIG. 23 and FIG. 24, it will be described that the angle error generated due to the external magnetic field can be reduced by the magnetic sensor 1 according to the present embodiment. In FIG. 23, (a) shows the relationship between the first detected angle θ1s and the first angular error dθ1. In FIG. 23, (b) shows the relationship between the second detection angle θ2s and the second angle error dθ2. In the example shown in FIG. 23, the amplitudes of the first angle error dθ1 and the second angle error dθ2 are ± 5.45 °. In the present embodiment, the first position P1 and the second position P2 are shifted by an amount corresponding to an odd multiple of 1/2 of the error period (electrical angle 90 °). Then, the detection value θs of the angle θ is calculated using the first detection angle θ1s and the second detection angle θ2s. Therefore, when calculating the detection value θs, the phase of the first angle error dθ1 and the phase of the second angle error dθ2 are opposite to each other. As a result, the first angular error dθ1 and the second angular error dθ2 are canceled out.

  FIG. 24 shows the relationship between the detected value θs calculated as described above and the angle error dθ included in the detected value θs. As shown in FIG. 24, the angle error dθ is significantly smaller than the first angle error dθ1 and the second angle error dθ2. In the example shown in FIG. 24, the amplitude of the angle error dθ is ± 0.6 °.

  The shift amount between the first position P1 and the second position P2 is not limited to an amount corresponding to 1/2 of the error period, but may be an amount corresponding to an odd multiple of 1/2 of the error period. In this case, the first angular error dθ1 and the second angular error dθ2 are canceled out, and the angular error dθ included in the detected value θs can be greatly reduced.

  In the present embodiment, the phase difference between the first detection angle θ1s and the second detection angle θ2s is not limited to the electrical angle of 90 °, and may be an arbitrary magnitude. When the phase difference between the first detection angle θ1s and the second detection angle θ2s is β, the third arithmetic circuit 30 calculates θs by the following equation (9).

  θs = (θ1s + θ2s + β) / 2 (9)

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment. In the present embodiment, the detection circuits 11, 12, 21, and 22 may be configured in the third or fourth embodiment.

[Sixth Embodiment]
Next, a magnetic sensor according to a sixth embodiment of the invention will be described. The magnetic sensor 1 according to the present embodiment makes it possible to reduce both an angular error component caused by an MR element and an angular error component caused by an external magnetic field. .

  First, referring to FIG. 25 and FIG. 26, the angular error may include an angular error component caused by the MR element and an angular error component caused by the external magnetic field. Will be described. FIG. 25 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 as in the example shown in FIG. FIG. 26 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 as in the example shown in FIG. In these examples, as described in the fifth embodiment, the first and second detection angles θ1s and θ2s may each include an angular error component generated due to an external magnetic field. In addition, as described in the first embodiment, the first and second detection angles θ1s and θ2s may each include an angular error component generated due to the MR element.

  Therefore, the first angle error dθ1 at the first detection angle θ1s and the second angle error dθ2 at the second detection angle θ2s are respectively the first error component generated due to the external magnetic field and the MR element. And a second error component generated due to the error. The first error component changes with a first error period of 1/2 of the rotation period in the direction of the external magnetic field, that is, an electrical angle of 180 °, depending on the change in the direction of the external magnetic field. The second error component changes with a second error cycle of ¼ of the cycle of the output signals of the detection circuits 11, 12, 21, and 22, that is, an electrical angle of 90 °.

  Next, the configuration of the magnetic sensor 1 according to the present embodiment will be described. In the magnetic sensor 1 according to the present embodiment, similarly to the fifth embodiment, the first detection unit 10 and the second detection unit 20 are arranged at different positions, and the first position P1 and the second detection unit 20 are arranged. The positions P2 are different from each other. The shift between the first position P1 and the second position P2 corresponds to an odd multiple of ½ of the first error period (electrical angle 90 °). This corresponds to an odd multiple of 1/4 of the period of rotation in the direction of the external magnetic field. 25 and 26 show an example in which the shift between the first position P1 and the second position P2 is set to an amount corresponding to 1/2 of the first error period (electrical angle 90 °).

  In the present embodiment, the phase of the first detection angle θ1s and the phase of the second detection angle θ2s are different by an odd multiple of ½ of the second error period (electrical angle 45 °). . Specifically, in the example shown in FIG. 25, the second direction D2 is inclined 45 ° from the radial direction of the rotating body 71 in the XY plane. As a result, the phase difference between the first detection angle θ1s and the second detection angle θ2s becomes an electrical angle of 135 °, which is three times 1/2 of the second error period (electrical angle of 45 °). In the example shown in FIG. 26, the second direction D2 is inclined 45 ° from the direction orthogonal to the moving direction of the moving body 72 in the XY plane. Also in this case, the phase difference between the first detection angle θ1s and the second detection angle θ2s becomes an electrical angle of 135 °, which is three times 1/2 of the second error period (electrical angle of 45 °).

  In the example shown in FIGS. 25 and 26, the third arithmetic circuit 30 calculates θs by the following equation (10).

  θs = (θ1s + θ2s + π / 2 + π / 4) / 2 (10)

  As described above, in the present embodiment, the first position P1 and the second position P2 are shifted by an amount corresponding to an odd multiple of 1/2 of the first error period (electrical angle 90 °). Yes. Thereby, when calculating the detection value θs, the phase of the first error component in the first angle error dθ1 and the phase of the first error component in the second angle error dθ2 are opposite to each other. . As a result, the first error component in the first angular error dθ1 and the first error component in the second angular error dθ2 are canceled out.

  Further, in the present embodiment, the phase of the first detection angle θ1s and the phase of the second detection angle θ2s are different by an odd multiple of 1/2 of the second error period (electrical angle 45 °). . Thereby, when calculating the detection value θs, the phase of the second error component in the first angle error dθ1 and the phase of the second error component in the second angle error dθ2 are opposite to each other. . As a result, the second error component in the first angular error dθ1 and the second error component in the second angular error dθ2 are canceled out.

  With the above operation, according to the present embodiment, it is possible to reduce both the angular error component caused by the MR element and the angular error component caused by the external magnetic field.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first or fifth embodiment. In the present embodiment, the detection circuits 11, 12, 21, and 22 may be configured in the third or fourth embodiment.

[Seventh Embodiment]
Next, a magnetic sensor according to a seventh embodiment of the invention will be described. As in the sixth embodiment, the magnetic sensor 1 according to the present embodiment has both an angular error component caused by the MR element and an angular error component caused by the external magnetic field. It is possible to reduce.

  FIG. 27 is a block diagram showing a configuration of the magnetic sensor 1 according to the present embodiment. As shown in FIG. 27, the magnetic sensor 1 according to the present embodiment includes first and second composite detection units 110A and 110B and a fourth arithmetic circuit 111. The fourth arithmetic circuit 111 can be realized by a microcomputer, for example.

  The configuration of the composite detection units 110A and 110B is the same as that of the magnetic sensor 1 according to the fifth embodiment. Specifically, the composite detection unit 110 </ b> A includes the first detection unit 10 </ b> A, the second detection unit 20 </ b> A, and the first detection unit 10 </ b> A, the second detection unit 20, and the third arithmetic circuit 30. A third arithmetic circuit 30A is provided. Similarly, the composite detection unit 110B includes the first detection unit 10B, the second detection unit 20B, and the third configuration having the same configuration as the first detection unit 10, the second detection unit 20, and the third arithmetic circuit 30. The arithmetic circuit 30B is provided.

  The first composite detection unit 110A obtains a detection value θAs of the angle θA that the direction of the external magnetic field at the first reference position PRA forms with respect to the first reference direction DRA. Similarly, the second composite detection unit 110B obtains the detected value θBs of the angle θB that the direction of the external magnetic field at the second reference position PRB forms with respect to the second reference direction DRB. Based on the detection values θAs and θBs obtained by the composite detection units 110A and 110B, the fourth arithmetic circuit 111 calculates the detection value θs of the angle θ that the direction of the external magnetic field at the reference position PR forms with respect to the reference direction DR. calculate.

  The relative positional relationship between the detection units 10A and 20A is the same as the relative positional relationship between the detection units 10 and 20 in the fifth embodiment. The relative positional relationship between the detection units 10B and 20B is the same as the relative positional relationship between the detection units 10 and 20 in the fifth embodiment. In the present embodiment, detection units 10B and 20B are arranged at positions shifted from detection units 10A and 20A by an amount corresponding to 1/8 of the rotation period in the direction of the external magnetic field, that is, an electrical angle of 45 °. ing.

  FIG. 28 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 as in the example shown in FIG. In this example, the detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. The detection units 10B and 20B are compared with the detection units 10A and 20A by an amount corresponding to 1/8 of the rotation period in the direction of the external magnetic field (45 ° of the electrical angle), that is, the rotation angle of the rotating body 71 is 22. It is arranged at a position shifted by 5 °. In this example, the reference direction when the detection units 10A, 20A, 10B, and 20B indicate the direction of the external magnetic field is set to the radial direction of the rotating body 71.

  FIG. 29 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 as in the example shown in FIG. In this example, the detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. The detection units 10B and 20B are compared with the detection units 10A and 20A by an amount corresponding to 1/8 of the rotation period in the direction of the external magnetic field (45 ° of electrical angle), that is, 1/8 pitch of the moving body 72. It is arranged at a shifted position. In this example, the reference direction when the detection units 10A, 20A, 10B, and 20B indicate the direction of the external magnetic field is set to a direction orthogonal to the moving direction of the moving body 72 in the XY plane. ing.

  In the example shown in FIGS. 28 and 29, the phase of the detection value θAs and the phase of the detection value θBs differ by an electrical angle of 45 °.

  Next, operations and effects of the magnetic sensor 1 according to the present embodiment will be described with reference to FIGS. 30 and 31. FIG. Similar to the sixth embodiment, also in this embodiment, the angle error in the detection angle of the detection units 10A, 20A, 10B, and 20B is the first error component generated due to the external magnetic field and the MR. And a second error component generated due to the element.

  The first composite detection unit 110A obtains a detection value θAs of the angle θA that the direction of the external magnetic field at the first reference position PRA forms with respect to the first reference direction DRA. The second composite detection unit 110B obtains a detection value θBs of the angle θB that the direction of the external magnetic field at the second reference position PRB forms with respect to the second reference direction DRB. Based on the principle described in the fifth embodiment, the first error component is reduced in the detected values θAs and θBs. However, the detected values θAs and θBs include the second error component.

  In the present embodiment, an angle formed by the fourth arithmetic circuit 111 with respect to the reference direction DR by the direction of the external magnetic field based on the detection values θAs and θBs obtained by the composite detection units 110A and 110B. A detected value θs of θ is calculated. At this time, the phase of the detected value θAs and the phase of the detected value θBs differ by 1/2 of the second error period (electrical angle 45 °). The fourth arithmetic circuit 111 calculates θs by the following equation (11).

  θs = (θAs + θBs + π / 4) / 2 (11)

  In the present embodiment, when the detection value θs is calculated, the phase of the second error component in the detection value θAs and the phase of the second error component in the detection value θBs are opposite to each other. As a result, the second error component in the detection value θAs and the second error component in the detection value θBs are canceled out. This will be described with reference to FIGS. 30 and 31. FIG.

  In FIG. 30, (a) shows the relationship between the detected value θAs and the angular error dθA included therein. In FIG. 30, (b) shows the relationship between the detected value θBs and the angular error dθB included therein. The main component of the angle errors dθA and dθB is the second error component. Therefore, the period of the angle errors dθA and dθB is the second error period (electrical angle 90 °). In the example shown in FIG. 30, the amplitudes of the angle errors dθA and dθB are ± 0.6 °. In the present embodiment, as described above, the phase of the detection value θAs and the phase of the detection value θBs are different from each other by ½ of the second error period (electrical angle 45 °). Therefore, when calculating the detection value θs, the phase of the angle error dθA and the phase of the angle error dθB are opposite to each other. Thereby, the angle error dθA and the angle error dθB are canceled out.

  FIG. 31 shows the relationship between the detected value θs calculated as described above and the angle error dθ included in the detected value θs. As shown in FIG. 31, the angle error dθ is significantly smaller than the angle errors dθA and dθB. In the example shown in FIG. 31, the angular error dθ has an amplitude of ± 0.09 °. Note that the phase difference between the detected value θAs and the detected value θBs is not limited to ½ of the second error period, but may be an odd multiple of ½ of the second error period.

  With the above operation, according to the present embodiment, it is possible to reduce both the angular error component caused by the MR element and the angular error component caused by the external magnetic field.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first or fifth embodiment. In the present embodiment, the detection circuit may be configured as in the third or fourth embodiment.

[Eighth Embodiment]
Next, a magnetic sensor according to an eighth embodiment of the invention will be described. As in the sixth and seventh embodiments, the magnetic sensor 1 according to the present embodiment has an angular error component caused by the MR element and an angular error component caused by the external magnetic field. Both of them can be reduced.

  As in the seventh embodiment, the magnetic sensor 1 according to the present embodiment includes first and second composite detection units 110A and 110B and a fourth arithmetic circuit 111. The basic configuration of the magnetic sensor 1 according to the present embodiment is as shown in FIG. However, as described below, the composite detection units 110A and 110B in the present embodiment are different from the composite detection units 110A and 110B in the seventh embodiment.

  The configuration of the composite detection units 110A and 110B in the present embodiment is the same as that of the magnetic sensor 1 according to the first embodiment. Specifically, the composite detection unit 110 </ b> A includes the first detection unit 10 </ b> A, the second detection unit 20 </ b> A, and the first detection unit 10 </ b> A, the second detection unit 20, and the third arithmetic circuit 30. A third arithmetic circuit 30A is provided. Similarly, the composite detection unit 110B includes the first detection unit 10B, the second detection unit 20B, and the third configuration having the same configuration as the first detection unit 10, the second detection unit 20, and the third arithmetic circuit 30. The arithmetic circuit 30B is provided.

  The first composite detection unit 110A obtains a detection value θAs of the angle θA that the direction of the external magnetic field at the first reference position PRA forms with respect to the first reference direction DRA. Similarly, the second composite detection unit 110B obtains the detected value θBs of the angle θB that the direction of the external magnetic field at the second reference position PRB forms with respect to the second reference direction DRB. Based on the detection values θAs and θBs obtained by the composite detection units 110A and 110B, the fourth arithmetic circuit 111 calculates the detection value θs of the angle θ that the direction of the external magnetic field at the reference position PR forms with respect to the reference direction DR. calculate.

  The relative positional relationship between the detection units 10A and 20A is the same as the relative positional relationship between the detection units 10 and 20 in the first embodiment. The relative positional relationship between the detection units 10B and 20B is the same as the relative positional relationship between the detection units 10 and 20 in the first embodiment. In the present embodiment, the detection units 10B and 20B are arranged at positions shifted from the detection units 10A and 20A by an amount corresponding to ¼ of the rotation period in the direction of the external magnetic field, that is, an electrical angle of 90 °. ing.

  FIG. 32 shows an example in which the direction of the external magnetic field generated from the outer peripheral portion of the rotating body 71 is detected by the magnetic sensor 1 as in the example shown in FIG. In this example, the detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. The detection units 10B and 20B are compared with the detection units 10A and 20A by an amount corresponding to ¼ of the rotation period in the direction of the external magnetic field (90 ° of the electrical angle), that is, 45 ° It is arranged at a position shifted by only.

  In the example shown in FIG. 32, the first direction in each of the detection units 10 </ b> A and 10 </ b> B is set to the radial direction of the rotating body 71. The second direction in the detection unit 20A is inclined 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction in the detection unit 10A in the XY plane. Similarly, the second direction in the detection unit 20B is inclined by 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction in the detection unit 10B in the XY plane. The detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. 12, and the detection units 10B and 20B are rotated in the direction of the external magnetic field with respect to the detection units 10A and 20A. You may arrange | position in the position shifted | deviated by the quantity equivalent to 1/4 (90 degrees of electrical angles) of the period, ie, 45 degrees of the rotation angle of the rotary body 71. FIG.

  FIG. 33 shows an example in which the magnetic sensor 1 detects the direction of the external magnetic field generated from the outer peripheral portion of the moving body 72 as in the example shown in FIG. 13. In this example, the detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. The detection units 10B and 20B have an amount corresponding to ¼ of the rotation period in the direction of the external magnetic field (90 ° of the electrical angle), that is, the ¼ pitch of the moving body 72 with respect to the detection units 10A and 20A. It is arranged at a shifted position. In this example, the first direction in each of the detection units 10A and 10B is set to a direction orthogonal to the moving direction of the moving body 72 in the XY plane. The second direction in the detection unit 20A is inclined 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction in the detection unit 10A in the XY plane. Similarly, the second direction in the detection unit 20B is inclined by 45 ° with respect to the rotation direction of the external magnetic field with respect to the first direction in the detection unit 10B in the XY plane. The detection units 10A and 20A are arranged at the same positions as the detection units 10 and 20 shown in FIG. 14, and the detection units 10B and 20B are rotated with respect to the detection units 10A and 20A. You may arrange | position in the position which shifted | deviated by the quantity equivalent to 1/4 (90 degrees of electrical angles) of the period, ie, the 1/4 pitch of the moving body 72. FIG.

  In the example shown in FIGS. 32 and 33, the phase of the detection value θAs and the phase of the detection value θBs differ by an electrical angle of 90 °.

  Next, with reference to FIG. 34 and FIG. 35, the effect | action and effect of the magnetic sensor 1 which concern on this Embodiment are demonstrated. Similar to the sixth and seventh embodiments, in the present embodiment, the angle error in the detection angles of the detection units 10A, 20A, 10B, and 20B is the first error component generated due to the external magnetic field. And a second error component generated due to the MR element.

  The first composite detection unit 110A obtains a detection value θAs of the angle θA that the direction of the external magnetic field at the first reference position PRA forms with respect to the first reference direction DRA. The second composite detection unit 110B obtains a detection value θBs of the angle θB that the direction of the external magnetic field at the second reference position PRB forms with respect to the second reference direction DRB. Based on the principle described in the first embodiment, the second error component is reduced in the detected values θAs and θBs. However, the detected values θAs and θBs include the first error component.

  In the present embodiment, an angle formed by the fourth arithmetic circuit 111 with respect to the reference direction DR by the direction of the external magnetic field based on the detection values θAs and θBs obtained by the composite detection units 110A and 110B. A detected value θs of θ is calculated. At this time, the phase of the detected value θAs and the phase of the detected value θBs differ by 1/2 of the first error period (electrical angle 90 °). The fourth arithmetic circuit 111 calculates θs by the following equation (12).

  θs = (θAs + θBs + π / 2) / 2 (12)

  In the present embodiment, when the detection value θs is calculated, the phase of the first error component in the detection value θAs and the phase of the first error component in the detection value θBs are opposite to each other. As a result, the first error component in the detection value θAs and the first error component in the detection value θBs are canceled out. This will be described with reference to FIGS. 34 and 35. FIG.

  In FIG. 34, (a) shows the relationship between the detected value θAs and the angle error dθA included in the detected value θAs. In FIG. 34, (b) shows the relationship between the detected value θBs and the angular error dθB included therein. The main component of the angle errors dθA and dθB is the first error component. Therefore, the period of the angle errors dθA and dθB is the first error period (electrical angle 180 °). In the present embodiment, as described above, the phase of the detection value θAs and the phase of the detection value θBs are different from each other by ½ of the first error period (electrical angle 90 °). Therefore, when calculating the detection value θs, the phase of the angle error dθA and the phase of the angle error dθB are opposite to each other. Thereby, the angle error dθA and the angle error dθB are canceled out.

  FIG. 35 shows the relationship between the detected value θs calculated as described above and the angle error dθ included in the detected value θs. As shown in FIG. 35, the angle error dθ is significantly smaller than the angle errors dθA and dθB. Note that the phase difference between the detected value θAs and the detected value θBs is not limited to 1/2 of the first error period, but may be an odd multiple of 1/2 of the first error period.

  With the above operation, according to the present embodiment, it is possible to reduce both the angular error component caused by the MR element and the angular error component caused by the external magnetic field.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first or fifth embodiment. In the present embodiment, the detection circuit may be configured as in the third or fourth embodiment.

  In addition, this invention is not limited to said each embodiment, A various change is possible. For example, the arrangement of the plurality of detection units in each embodiment is an example, and the arrangement of the plurality of detection units can be variously changed within a range that satisfies the requirements described in the claims.

  DESCRIPTION OF SYMBOLS 1 ... Magnetic sensor, 10 ... 1st detection part, 11 ... 1st detection circuit, 12 ... 2nd detection circuit, 13 ... 1st arithmetic circuit, 14, 16, 24, 26 ... Wheatstone bridge circuit, 20 ... 2nd detection part, 21 ... 3rd detection circuit, 22 ... 4th detection circuit, 23 ... 2nd arithmetic circuit, 30 ... 3rd arithmetic circuit.

Claims (7)

A magnetic sensor for detecting an angle of an external magnetic field whose direction rotates with respect to a reference direction at a reference position,
A first detection unit for detecting a first angle formed by the direction of the external magnetic field at the first position with respect to the first direction;
A second detection unit for detecting a second angle formed by the direction of the external magnetic field at the second position with respect to the second direction;
The first detection unit detects first and second detection circuits for detecting the intensity of a component in one direction of the external magnetic field and outputs a signal representing the intensity; and the first and second detection circuits A first arithmetic circuit that calculates a first detection angle that is a detection value of the first angle based on an output signal of the circuit, and a phase of the output signal of the first detection circuit and a second The phase of the output signal of the detection circuit differs by an odd multiple of 1/4 of the period of the output signal of each detection circuit,
The second detection unit detects the intensity of a component in one direction of the external magnetic field, and outputs a signal representing the intensity, and the third and fourth detection circuits A second arithmetic circuit that calculates a second detection angle that is a detection value of the second angle based on an output signal of the circuit, and a phase of an output signal of the third detection circuit and a fourth The phase of the output signal of the detection circuit differs by an odd multiple of 1/4 of the period of the output signal of each detection circuit,
The first detection angle includes a first angle error with respect to a theoretical value of the first angle assumed when the direction of the external magnetic field rotates ideally,
The second detection angle includes a second angle error with respect to a theoretical value of the second angle assumed when the direction of the external magnetic field rotates ideally,
The first angle error and the second angle error periodically change with the same error period with a change in the direction of the external magnetic field, and the change in the first angle error and the second angle. The change in error depends on the change in the direction of the external magnetic field,
The error period is ½ of the rotation period in the direction of the external magnetic field,
The first position and the second position are different from each other, and a shift between the first position and the second position corresponds to an odd multiple of 1/2 of the error period,
The magnetic sensor further calculates a detected value of an angle formed by a direction at a reference position of the external magnetic field with respect to a reference direction based on the first detection angle and the second detection angle. A magnetic sensor comprising a circuit.   2. The magnetic sensor according to claim 1, wherein each of the first to fourth detection circuits includes a pair of magnetic detection elements connected in series.   Each of the first to fourth detection circuits has a Wheatstone bridge circuit including a first pair of magnetic detection elements connected in series and a second pair of magnetic detection elements connected in series. The magnetic sensor according to claim 2.   4. The magnetic sensor according to claim 2, wherein the magnetic detection element is a magnetoresistive effect element.   The magnetoresistive effect element includes a magnetization fixed layer whose magnetization direction is fixed, a free layer whose magnetization direction changes according to the direction of the external magnetic field, and a non-magnetic layer disposed between the magnetization fixed layer and the free layer. The magnetic sensor according to claim 4, further comprising a magnetic layer. The magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the second detection circuit is orthogonal to the magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the first detection circuit,
The magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the fourth detection circuit is orthogonal to the magnetization direction of the magnetization fixed layer of the magnetoresistive effect element in the third detection circuit. 5. The magnetic sensor according to 5. The first angle error includes a component that changes in the error cycle depending on a change in the direction of the external magnetic field, and a component that changes in a second error cycle depending on the change in the first detection angle. Including
The second angle error is a component that changes in the error period depending on a change in the direction of the external magnetic field, and a component that changes in the second error period depending on a change in the second detection angle. Including
The second error period is 1/4 of the period of the output signal of each detection circuit;
The phase of the first detection angle and the phase of the second detection angle are different from each other by an odd multiple of ½ of the second error period. Magnetic sensor.

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