JP4960139B2 - Gas circuit breaker and manufacturing method thereof - Google Patents

Description

  TECHNICAL FIELD The present invention relates to a gas circuit breaker that extinguishes an arc by blowing an arc extinguishing gas to the arc and a method for manufacturing the same.

  The gas circuit breaker has a structure in which the current is interrupted by separating the movable contact from the fixed contact, and the arc is extinguished by blowing an arc extinguishing gas to the arc generated at the time of the interruption. This gas circuit breaker is superior in breaking performance compared to vacuum circuit breakers, air circuit breakers, etc., so it is suitable for high power breaks compared to vacuum circuit breakers, air circuit breakers, etc., and can be made compact and lightweight. (See Patent Documents 1, 2, and 3).

  However, in recent years, there has been an increasing demand for further downsizing and weight reduction. Further, the compactness of the gas circuit breaker increases the time during which the components in the gas container come into contact with the high-temperature heat generated when the gas is shut off and the decomposition gas of the corrosive arc-extinguishing gas. Will be exposed to various conditions.

  A conventional general gas circuit breaker has a fixed main contact, a fixed arc contact and a movable main contact, and a movable arc contact arranged in a metal gas container. A nozzle for spraying SF6 gas is provided. The fixed main contact and the movable main contact are each electrically connected to the connection conductor.

  The movable main contact and the movable arc contact are mechanically coupled to a metal movable rod in order to move them when the circuit is opened and closed, and this movable rod is electrically insulated and insulated through an insulating operation rod. The operating rod is mechanically coupled to the operating mechanism via a metal seal rod. This seal rod is supported by a seal flange attached to the gas container via a rubber or resin seal member, and is configured to slide between the seal rod and the seal member when the contactor is in operation. . In addition to supporting the seal rod, the seal member prevents arc-extinguishing gas in the gas container from flowing into the operation mechanism box, and wear powder, moisture, and oil in the operation mechanism box are It also has a role to prevent entering.

  Usually, a resin such as rubber or fluororesin is used as the sealing material, but it is necessary to improve the wear resistance of these materials in order to extend the life of the gas circuit breaker and improve the reliability.

On the other hand, as an energy saving measure, reduction of the driving force of the movable rod and the seal rod has been proposed. For example, in Patent Document 1, driving energy is reduced by increasing the speed only in the initial stage of opening when high speed is required. In Patent Document 2, the driving force is reduced by reducing the contact area during opening and closing. Further, in Patent Document 3, the driving force is reduced by changing the link mechanism that moves the driving rod.
JP 2004-55420 A JP 2003-123602 A JP 2006-164673 A

  Although the techniques of the above-mentioned patent documents 1, 2, and 3 can certainly reduce the driving force of the movable contact, the largest driving force is required at the moment when the static state changes to the dynamic state at the time of opening. The above invention is not always sufficient.

  The present invention has been made in view of the above problems, and reduces the driving force at the start of movement that requires the largest amount of energy when driving the movable contact, thereby reducing the size, cost and energy saving of the operating mechanism. At the same time, the object is to improve the wear resistance of the seal member, to extend the life of the gas circuit breaker, and to improve the reliability.

  In order to achieve the above object, a gas circuit breaker according to the present invention includes a gas container sealed with an arc extinguishing gas, a stationary contact housed in the gas container, and housed in the gas container. A movable contact that can be brought into and out of contact with the fixed contact, a seal rod that is mechanically coupled to the movable contact and penetrates the gas container at a gas container penetrating portion, and an outside of the gas container An operating mechanism that is disposed and drives the movable contact by driving the seal rod; and the seal rod is slidably supported in the axial direction by the gas container penetrating portion, and the arc extinguishing gas in the gas container A gas circuit breaker having a seal member that prevents the gas from flowing out to the operation mechanism side, and at least a sliding surface of the seal member that slides with the seal rod is made of a wear-resistant and low-friction material. Cotin That the layers are formed, characterized by.

  The method for manufacturing a gas circuit breaker according to the present invention includes a gas container that can be filled and sealed with an arc extinguishing gas, a stationary contact housed in the gas container, and a stationary container housed in the gas container. A movable contact that can contact and disengage from the contact; a seal rod that is mechanically coupled to the movable contact and penetrates the gas container at a gas container penetrating portion; and is disposed outside the gas container, and An operating mechanism capable of driving the movable contact by driving a seal rod, and the seal rod is slidably supported in the axial direction by the gas container penetrating portion, and the arc extinguishing gas in the gas container is operated by the operation A gas circuit breaker manufacturing method comprising: a sealing member capable of preventing flow to the mechanism side, wherein at least a sliding surface of the sealing member sliding with the sealing rod is used by using a high frequency plasma CVD method. Wear and further comprising the step of forming a coating layer of amorphous carbon or diamond-like carbon, which is a low friction material, characterized by.

  ADVANTAGE OF THE INVENTION According to this invention, the static friction coefficient and dynamic friction coefficient between the members which arise at the time of opening and closing of a gas circuit breaker can be reduced, and reduction in size, weight reduction, and energy saving can be achieved.

  The inventors measured the static friction coefficient and the dynamic friction coefficient of a metal material simulating a seal rod and a material simulating a support / seal member such as rubber or fluororesin. As a result, it has been found that the greatest energy is required at the start of driving the seal rod. That is, in order to reduce the driving force of the movable contact, it has become clear that a combination of materials having a small coefficient of static friction between the seal rod and the support / seal member is effective. Next, in order to reduce the static friction coefficient from such a point of view, the same friction coefficient was measured for seal rods and support / seal members with various coatings. As a result, it was found that the coefficient of static friction can be remarkably reduced by applying a silicon-based and amorphous carbon-based coating.

  On the other hand, since the support / seal material part is also required to have heat resistance and corrosion resistance against the decomposition gas of the arc extinguishing gas, a corrosion test in a high-temperature acid vapor was performed next. As a result, it was confirmed that the silicon-based coating material had insufficient corrosion resistance, but the amorphous carbon-based coating material exhibited good corrosion resistance. From the above results, it was found that by applying an amorphous carbon-based coating on the surface of the seal member, the coefficient of static friction can be reduced, and at the same time, the life and reliability of the support / seal material can be improved.

  This invention is made | formed based on said new knowledge. Next, a first embodiment of a gas circuit breaker according to the present invention will be described with reference to FIGS. Here, FIG. 1 is a longitudinal sectional view of a first embodiment of a gas circuit breaker according to the present invention. FIG. 2 is a partially enlarged longitudinal sectional view showing a support / seal portion of the seal rod in the gas circuit breaker of FIG. 1, and FIG. 3 is an enlarged sectional view of the seal member of FIG.

  In the gas circuit breaker, a fixed main contact 2 and a fixed arc contact 3 which are fixed contacts, and a movable main contact 4 and a movable arc contact 5 which are movable contacts are provided in a gas container 1 which is a sealed container. Has been placed. The movable arc contact 5 is provided with a nozzle 6 for spraying SF6 gas at the time of interruption. The fixed main contact 2 and the movable main contact 4 are electrically connected to the connection conductors 11 and 11a, respectively. The gas container 1 is a metal sealed container filled with SF6 gas which is an arc extinguishing gas.

  The movable main contact 4 and the movable arc contact 5 are mechanically coupled to a metal movable rod 7 for moving them when the circuit is opened and closed. The movable rod 7 is electrically insulated via an insulating operating rod 8, and the insulating operating rod 8 is mechanically coupled to the operating mechanism 12 via a metal seal rod 9. The seal rod 9 is supported by a seal flange 10 attached to the gas container 1 via a seal member (support / seal member) 14. When the contact is in operation, the seal rod 9 slides between the seal rod 9 and the seal member 14. It has a moving structure. In addition to supporting the seal rod 9, the seal member 14 prevents arc-extinguishing gas in the gas container from flowing into the operation mechanism box 13, and wear powder and moisture in the operation mechanism box 13. It also has a role of preventing oil from entering the gas container 1.

  In this embodiment, as shown in FIGS. 2 and 3, the transverse cross section of the seal member 14 is substantially circular. For example, synthetic rubber or fluororesin (for example, Teflon (trade name)) is used for the seal member 14. A coating layer (film) 25 made of a coating material having a corrosion resistance and a low friction coefficient is formed on the sliding surface of the seal member 14. As the coating material, for example, amorphous carbon or diamond-like carbon is preferable.

  As a method for forming the corrosion-resistant and low-friction coating layer 25 on the surface of the seal member 14, for example, a high-frequency plasma CVD method can be used. By using this manufacturing process, the coating layer 25 of amorphous carbon or diamond-like carbon is applied to the surface of an insulating material having low heat resistance such as rubber or fluororesin without causing deterioration or deformation of the base material. It becomes possible to form densely and uniformly.

  According to this embodiment, since the coefficient of static friction between the seal rod 9 and the seal member 14 that require the most energy when the seal rod 9 is driven can be reduced, the operation mechanism can be made compact, low in cost, and energy-saving. It becomes possible. Furthermore, since the wear resistance of the seal member 14 can be improved, the reliability can be improved in addition to extending the life.

  Further, by using a synthetic rubber or fluororesin having a large deformability and an appropriate elastic coefficient as the seal member 14, the compatibility with the seal rod 9 is improved and the gas container 1 constituting the gas circuit breaker is turned off. It is possible to prevent leakage of arc gas and mixing of oil, dust and the like from the operation mechanism 12. Further, since these materials have corrosion resistance against the arc-extinguishing gas decomposition gas, the gas circuit breaker can be continuously used until the next inspection even when the coating layer is damaged.

  Next, a second embodiment of the gas circuit breaker according to the present invention will be described with reference to FIG. 4 and FIG. However, parts that are the same as or similar to those in the first embodiment are denoted by common reference numerals, and redundant description is omitted. FIG. 4 is a longitudinal sectional view showing a support / seal part of the seal rod 9 in the second embodiment of the gas circuit breaker according to the present invention. FIG. 5 is an enlarged cross-sectional view of the seal member of FIG.

  In this embodiment, the cross-sectional shape of the seal member 14 is a rectangle. A portion where the seal member 14 is in contact with the seal rod 9 is a flat surface, and a corrosion-resistant and low-friction coating layer 25 is formed on the flat surface.

  According to this configuration, when the seal member 14 is pressed against the seal rod 9, the deformation amount of the seal member 14 can be reduced, whereby the corrosion-resistant and low-friction coating layer applied to the surface of the seal member 14. Damage can be suppressed.

  As the low friction coating layer 25 formed on the surface of the seal member 14, it is preferable to use amorphous carbon or diamond-like carbon, as in the first embodiment.

  In the seal rod 9 configured as described above, the coefficient of static friction with the seal member 14 can be further reduced, and the drive mechanism can be further reduced in size, cost, and energy can be reduced. Further, it is possible to prevent the sliding surface from being galvanized, and the sliding surface from being scratched or worn on the seal rod, so that stable sliding and sealing characteristics can be maintained over a long period of time.

  Next, a third embodiment of the gas gas circuit breaker according to the present invention will be described with reference to FIG. FIG. 6 is a partial longitudinal sectional view showing a seal rod in the third embodiment of the gas circuit breaker according to the present invention. Portions that are the same as or similar to those in the first or second embodiment are denoted by common reference numerals, and redundant description is omitted.

  In this embodiment, a low-abrasion coating layer 27 is formed on a portion of the seal rod 9 that contacts the seal member 14. Other parts are the same as those in the first or second embodiment. The material of the seal rod 9 is preferably, for example, carbon steel, low alloy steel, alloy steel, or aluminum alloy. The coating layer 27 is preferably made of amorphous carbon or diamond-like carbon, for example.

  With such a configuration, the coefficient of static friction with the seal member 14 can be further reduced, and the drive mechanism can be further reduced in size, cost, and energy can be reduced. Further, it becomes possible to prevent the sliding surface from being galvanized, and the sliding surface to be scratched or worn on the seal rod 9, so that stable sliding and sealing characteristics can be maintained over a long period of time.

  The coating layer 27 of the seal rod 9 is formed of amorphous carbon, diamond-like carbon, or the like using a plasma CDV method or a sputtering method. By using such a manufacturing process, an amorphous carbon or diamond-like carbon film is not deteriorated or deformed on the surface of the seal rod 9 made of aluminum alloy which is inferior in heat resistance as well as steel materials. It becomes possible to coat densely and uniformly.

  Next, a fourth embodiment of the gas circuit breaker according to the present invention will be described with reference to FIG. FIG. 7 is a partial longitudinal sectional view showing a seal rod in the fourth embodiment of the gas circuit breaker according to the present invention. Portions that are the same as or similar to those in the first to third embodiments are denoted by common reference numerals, and redundant description is omitted.

  This embodiment is a modification of the third embodiment. Before the coating layer 27 of amorphous carbon or diamond-like carbon is formed on the sliding surface of the seal rod 9, a metal carbide or metal is used as the base layer 28. A nitride or a metal material containing these is provided. Other parts are the same as those of the third embodiment.

  By using such a configuration, even when the surface of the amorphous carbon or diamond-like carbon film that is the outer coating layer 27 is deformed under a compressive load, the hard underlayer 28 suppresses deformation of the film. It becomes possible. As a result, even when a heavy load or a non-uniform load is applied to the film, damage and peeling can be suppressed and stable performance can be maintained over a long period of time.

  Further, as a modification of the third and fourth embodiments, a coating layer 27 of amorphous carbon or diamond-like carbon is formed on the sliding surface of the seal rod 9, and then the surface of the coating layer 27 is mechanically applied. It is also good to polish it. By performing such polishing, the coefficient of static friction between the seal rod 9 and the seal member 14 can be further reduced, and peeling of the coating layer (film) 27 can be suppressed, so that the drive mechanism is compact. In addition to conversion, stable performance can be maintained over a long period of time.

  The embodiments specifically described above are merely examples, and the present invention is not limited thereto.

  Next, a test for confirming the effect of the support / seal structure of the seal rod of the gas heat shield according to the present invention will be described.

  Since an actual gas circuit breaker is difficult to evaluate quantitatively, a simulated test body that simulates only the portion shown in FIG. 2 or FIG. 4 was used. That is, the seal rod 9 is configured to be sandwiched by the seal flange 10 via the seal member 14. In the simulation test, the portion corresponding to the seal flange 10 was a steel pushing jig, and was tightened by applying a load from the outside of the pushing jig by hydraulic pressure. At that time, the tightening pressure was adjusted to be the same as the actual machine. In such a state, the seal rod 9 was moved downward at a constant speed, the force for pulling down the seal rod 9 at that time was measured, and the static friction coefficient and the dynamic friction coefficient were calculated.

  As shown in FIGS. 2 and 3, the first embodiment has a structure in which both sides of a steel seal rod 9 are sandwiched between rubber seal members 14 having a circular cross section. A diamond-like carbon coating layer 25 having a thickness of about 1 μm was formed on the surface of the rubber seal member 14 having a circular cross section by high-frequency plasma CVD. A comparative example 1 having the same shape as in Example 1 and having the coating layer 25 made of a fluororesin (specifically, Teflon (trade name)) was used. Moreover, the same test was done by making the thing which has not coated anything into the comparative example 2. FIG.

  Several types of coating methods for amorphous carbon and diamond-like carbon have been proposed, but the high-frequency plasma CDV can be coated on insulators such as rubber and resin even at a low temperature of 150 ° C. or lower, so that the heat resistance is low. Even the base material is the most suitable process without deterioration or deformation.

  Amorphous carbon and diamond-like carbon films are materials having excellent corrosion resistance, but Teflon is also a material having excellent corrosion resistance.

  As a result of the test, the load when the seal rod 9 was lowered showed a tendency to rise greatly at the moment of operation and then rapidly decrease. FIG. 8 shows the result of obtaining the static friction coefficient from the load that suddenly rises, and obtaining the dynamic friction coefficient from the lowered load thereafter. Further, FIG. 9 shows the result of repeating the above test and measuring the number of times until the coating film is damaged / peeled.

  From the results shown in FIG. 8, a large difference is not recognized in the dynamic friction coefficient, but when the static friction coefficient is coated with diamond-like carbon (Example 1), nothing is coated (Comparative Example 2). It was confirmed that it can be reduced to ½ or less compared to. On the other hand, when the Teflon coating was applied (Comparative Example 1), a good coefficient of friction value was shown, but as shown in FIG. It was found that it is not suitable for repeated use.

  Next, a rubber having a rectangular cross section simulating the sealing member 14 as shown in FIG. 4 is used, and a diamond-like carbon coating layer 25 is formed on the surface thereof with a thickness of about 1 μm as shown in FIG. Example 2 was adopted. The coating layer 25 was formed by high frequency plasma CVD.

  FIG. 10 shows the measurement results of the static friction coefficient and the dynamic friction coefficient of a rubber having a circular cross section coated with diamond-like carbon (Example 1) and a rubber having a rectangular cross section (Example 2). The rubber having the rectangular cross section has a larger contact area with the square rod (seal rod 9), which is the counterpart material, than the rubber having the circular cross section, so both the static friction coefficient and the dynamic friction coefficient tend to be slightly larger. It can be seen that it can be significantly reduced as compared with the case where nothing is coated (Comparative Example 2), in the same degree as when the Teflon shown in FIG.

  FIG. 11 shows the results of examining the damage / peeling behavior of the coating film when the pressing load of the seal flange 10 (pressing jig) is changed. From the results shown in FIG. 11, when the same tightening load is applied, the circular cross section (Example 1) has a greater amount of rubber deformation than the rectangular cross section (Example 2), and therefore the coating film is likely to be damaged or peeled off. It was confirmed. Therefore, when high sealing performance is necessary, it is clear that damage and peeling of the coating film can be avoided by using a sealing member having a rectangular cross section.

  Next, a test showing the effect of coating the sliding surface (seal surface) of the seal rod 9 will be described. In each of Examples 3 to 6, as in Example 2, as shown in FIGS. 4 and 5, a rubber having a rectangular cross section simulating the seal member 14 is used, and the surface thereof is shown in FIG. A diamond-like carbon coating layer 25 was formed to a thickness of about 1 μm. The coating layer 25 was formed by high frequency plasma CVD.

  In Example 3, the seal rod 9 was made of a low alloy, and a diamond-like carbon coating layer 27 having a thickness of about 2 μm was formed on the surface thereof by sputtering (see FIG. 6). In Example 4, the seal rod 9 was made of an aluminum alloy, and a diamond-like carbon coating layer 27 having a thickness of about 2 μm was formed on the surface thereof by sputtering.

  In Example 5, the seal rod 9 is made of an aluminum alloy, and a base layer 28 having a thickness of about 2 μm mainly composed of silicon carbide is first formed on the surface thereof. A sputtering method is formed on the base layer 28. Thus, a diamond-like carbon coating layer 27 having a thickness of about 2 μm was formed (see FIG. 7). Further, in Example 6, as in Example 5, the base layer 28 is formed on the surface of the seal rod 9, the diamond-like carbon coating layer 27 is formed on the base layer 28, and then the coating layer 27 is formed. The surface of was finished by mechanical polishing.

  With respect to these Examples 3 to 6, the same static friction coefficient and dynamic friction coefficient as those of Example 1 and Example 2 were measured. Further, for Example 4 and Example 5, the damage / peeling behavior of the coating film was evaluated by repeated tests.

  Examples of the method for forming the coating layer 27 of amorphous carbon or diamond-like carbon on the surface of the metal substrate of the seal rod 9 include a plasma CVD method, a sputtering method, and an ion deposition method. From the viewpoint of matching the hardness with the coating layer 25 of amorphous carbon or diamond-like carbon formed on the surface of the sealing member 14, the high-frequency plasma CVD method is suitable. When providing as the formation 28, the sputtering method which can be coated in the same apparatus is suitable.

  FIG. 12 shows the measurement results of the friction coefficient. Compared with the case where the diamond-like carbon coating layer 25 is formed only on the surface of the rubber which is the seal member 14 (Example 2), the diamond-like carbon coating layer 27 is also formed on the seal rod 9 (Example). 3 and 4), the coefficient of friction tends to decrease, and it can be seen that the effect is effective in reducing the coefficient of static friction. On the other hand, as the material for the seal rod 9, the aluminum alloy base material (Example 4) is less effective in reducing the friction coefficient than the low alloy steel base material (Example 3). This is presumably because in the case of a metal substrate having low rigidity, the influence of elastic deformation of the substrate itself is large. In Example 5 (FIG. 7), by providing the hard underlayer 28, the friction coefficient equivalent to that of the low alloy base material is shown, and the damage / peeling life of the film is also greatly improved as shown in FIG. Is possible. By using a low specific gravity material such as an aluminum alloy for a drive mechanism such as a seal rod, the drive mechanism can be made more compact.

  On the other hand, since the surface of the coating film generally has minute irregularities, it is possible to further reduce the friction coefficient by mechanically polishing the coating surface (Example 6).

The longitudinal cross-sectional view of 1st Embodiment of the gas circuit breaker which concerns on this invention. The partial expanded longitudinal cross-sectional view which shows the support and seal part of the seal rod in the gas circuit breaker of FIG. The expanded sectional view of the sealing member of FIG. The longitudinal cross-sectional view which shows the partial support and seal part of the seal rod in 2nd Embodiment of the gas circuit breaker which concerns on this invention. The expanded sectional view of the sealing member of FIG. The fragmentary longitudinal cross-section which shows the seal rod in 3rd Embodiment of the gas circuit breaker which concerns on this invention. The fragmentary longitudinal cross-section which shows the seal rod in 4th Embodiment of the gas circuit breaker which concerns on this invention. The table | surface which shows the measurement result of the friction coefficient about Example 1, the comparative example 1, and the comparative example 2. FIG. The table | surface which shows the result of the damage and peeling test of the coating layer (film | membrane) about Example 1, the comparative example 1, and the comparative example 2. FIG. The table | surface which shows the measurement result of the friction coefficient about Example 1 and Example 2. FIG. The table | surface which shows the result of the damage and peeling test of a coating film at the time of changing the load added to the seal flange about Example 1 and Example 2. FIG. The table | surface which shows the measurement result of the friction coefficient about Example 2 thru | or Example 6. FIG. The table | surface which shows the result of the damage and peeling test of the coating layer about Example 4 and Example 5. FIG.

Explanation of symbols

1 ... Gas container 2 ... Fixed main contact (fixed contact)
3 ... Fixed arc contact (fixed contact)
4 ... Movable main contact (movable contact)
5 ... Movable arc contact (movable contact)
DESCRIPTION OF SYMBOLS 6 ... Nozzle 7 ... Movable rod 8 ... Insulation operation rod 9 ... Seal rod 10 ... Seal flange 11, 11a ... Connection conductor 12 ... Operation mechanism 13 ... Operation mechanism box 14 ... Seal member 25, 27 ... Coating layer 28 ... Underlayer

Claims (12)

A gas container filled with an arc-extinguishing gas and sealed;
A stationary contact housed in the gas container;
A movable contact accommodated in the gas container and capable of contacting and detaching from the fixed contact;
A seal rod that is mechanically coupled to the movable contact and penetrates the gas container at a gas container penetrating portion;
An operation mechanism that is arranged outside the gas container and drives the movable contact by driving the seal rod;
A seal member that supports the seal rod slidably in the axial direction at the gas container penetrating portion, and prevents the arc-extinguishing gas in the gas container from flowing out to the operation mechanism side;
A gas circuit breaker comprising:
A gas circuit breaker characterized in that a coating layer of a wear-resistant and low-friction material is formed on at least a sliding surface of the sealing member that slides with the sealing rod.   The gas circuit breaker according to claim 1, wherein the coating layer formed on the seal member is amorphous carbon or diamond-like carbon.   The gas circuit breaker according to claim 1 or 2, wherein a material of the seal member is synthetic rubber or fluororesin.   The gas circuit breaker according to any one of claims 1 to 3, wherein the sliding surface of the seal member is a flat surface.   The gas circuit breaker according to any one of claims 1 to 4, wherein the coating layer formed on the seal member is formed using a high frequency plasma CVD method.   6. The coating layer of a low friction material is formed on at least a sliding surface of the seal rod that slides with the seal member. 6. Gas circuit breaker.   The gas circuit breaker according to claim 6, wherein the coating layer formed on the seal rod is made of amorphous carbon or diamond-like carbon.   The gas circuit breaker according to claim 6 or 7, wherein the coating layer formed on the seal rod is formed by using a plasma CVD method or a sputtering method.   The material of the seal rod is carbon steel, low alloy steel, alloy steel, aluminum alloy, or a combination thereof, and a base layer is provided in a portion where the coating layer of the seal rod is formed. The gas circuit breaker according to any one of claims 6 to 8, wherein the gas circuit breaker is characterized. Gas circuit breaker according to claim 9 wherein the underlying layer is to be a metallic material, characterized by.   11. The gas circuit breaker according to claim 6, wherein a surface of the coating layer of the seal rod is smoothed by mechanical polishing. A gas container that can be filled and sealed with an arc-extinguishing gas;
A stationary contact housed in the gas container;
A movable contact accommodated in the gas container and capable of contacting and detaching from the fixed contact;
A seal rod that is mechanically coupled to the movable contact and penetrates the gas container at a gas container penetrating portion;
An operating mechanism arranged outside the gas container and capable of driving the movable contact by driving the seal rod;
A seal member that supports the seal rod so as to be slidable in the axial direction at the gas container penetrating portion, and prevents the arc-extinguishing gas in the gas container from flowing out to the operation mechanism side;
A method of manufacturing a gas circuit breaker comprising:
Forming a coating layer of amorphous carbon or diamond-like carbon, which is a wear-resistant and low-friction material, on at least a sliding surface of the seal member that slides with the seal rod using a high-frequency plasma CVD method; A method of manufacturing a gas circuit breaker.

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