JP4955792B2 - Electronic component operation function measuring apparatus and electronic component operation function measuring method - Google Patents
Electronic component operation function measuring apparatus and electronic component operation function measuring method Download PDFInfo
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- JP4955792B2 JP4955792B2 JP2010104611A JP2010104611A JP4955792B2 JP 4955792 B2 JP4955792 B2 JP 4955792B2 JP 2010104611 A JP2010104611 A JP 2010104611A JP 2010104611 A JP2010104611 A JP 2010104611A JP 4955792 B2 JP4955792 B2 JP 4955792B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Testing Of Individual Semiconductor Devices (AREA)
- Led Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Description
本発明は、発光ダイオード(以下LED素子という)などの光学素子や受光素子の動作機能である発光や受光を検査したり、LSIチップの動作機能を検査する電子部品動作機能測定装置および電子部品動作機能測定方法に関する。 The present invention relates to an electronic component operation function measuring apparatus and electronic component operation for inspecting light emission and light reception which are operation functions of an optical element such as a light emitting diode (hereinafter referred to as an LED element) and a light receiving element, and inspecting an operation function of an LSI chip. It relates to a function measurement method.
近年、地球環境保護の観点から小型、長寿命、有害物質を含まないなど、省エネルギー用照明部品として、LEDの必要性が認識されてきている中、低価格LEDへの要求も非常に高まってきている。 In recent years, the need for LEDs as energy-saving lighting parts, such as small size, long life, and no harmful substances, has been recognized from the viewpoint of global environmental protection, and the demand for low-priced LEDs has increased greatly. Yes.
従来のLED素子の製造工程に関連する流動フローにおいて、基板上にアセンブリされた複数のLEDチップは、相互に電気的に接続されている。複数のLEDチップ個々の電気的特性や光学特性を測定して検査するためには、複数のLEDチップを分断して個片化した後に、各LEDチップを光らせてその光量を従来の発光測定装置により測定するなど電気的特性や光学特性を測定してテストを行う必要がある。これを特許文献1、2に示している。 In a flow flow related to a manufacturing process of a conventional LED element, a plurality of LED chips assembled on a substrate are electrically connected to each other. In order to measure and inspect the individual electrical characteristics and optical characteristics of a plurality of LED chips, after dividing the plurality of LED chips into individual pieces, each LED chip is illuminated and the amount of light is measured by a conventional light emission measuring device. It is necessary to test by measuring electrical characteristics and optical characteristics, such as by measuring. This is shown in Patent Documents 1 and 2.
特許文献1のチップ部品搬送装置では、複数のチップ部品を整列させて搬送させるフィーダと、チップ部品が垂直配置されると共に1個づつ保持可能な搬送溝を外周面に複数備える第1テーブルと、第1テーブルに対して直交しかつ隣接配置されると共に外周側面にチップ部品を吸着保持可能な第2テーブルとを備えている。第1テーブルと第2テーブルとは交互に間欠回転しており、フィーダから第1テーブルに、第1テーブルから第2テーブルにチップ部品の受け渡しが行われる。このチップ部品のそれぞれの面に対して検査が行われる。 In the chip component transport apparatus of Patent Document 1, a feeder that aligns and transports a plurality of chip components, a first table that includes a plurality of transport grooves that are vertically arranged and can be held one by one on the outer peripheral surface, And a second table that is disposed adjacent to and orthogonal to the first table and that can hold the chip component on the outer peripheral side surface. The first table and the second table are alternately intermittently rotated, and chip parts are transferred from the feeder to the first table and from the first table to the second table. An inspection is performed on each surface of the chip component.
なお、矩形のチップ部品の搬送方向が前後逆方向になっても、画像認識装置によりチップ部品の搬送方向が逆方向であると認識して、プローブの+−を自動的に逆転してチップ部品のLED素子を光らせて光量検査などを行うことができる。 Even if the conveyance direction of the rectangular chip component is reversed in the front-rear direction, the image recognition device recognizes that the conveyance direction of the chip component is the reverse direction, and automatically reverses the probe +-to the chip component. The LED element can be illuminated to perform a light quantity inspection or the like.
特許文献2のチップ部品供給装置では、バルクケースから矩形の長辺と平行に供給されるチップ部品を案内するレーンのピックアップポイントの手前に、レーンの中心角度が90度の湾曲部が設けられ、複数のチップ部品が並んでこの湾曲部において角度90度だけチップ部品が方向を転換された後に、ピックアップポイントにチップ部品が供給されるようになっている。 In the chip component supply device of Patent Document 2, a curved portion having a lane center angle of 90 degrees is provided in front of the lane pickup point for guiding the chip component supplied in parallel with the long side of the rectangle from the bulk case, A plurality of chip parts are arranged side by side, and the chip parts are supplied to the pickup point after the direction of the chip parts is changed by 90 degrees in the curved portion.
これによって、LED素子チップなどのチップ部品が互いに貼り付いている場合に、レーンの中心角度が90度の湾曲部を用いて、チップ部品同士の貼り付きを解除することができる。 Accordingly, when chip components such as LED element chips are adhered to each other, the adhesion of the chip components can be released using a curved portion having a lane center angle of 90 degrees.
特許文献1、2に開示されている上記従来の構成では、個々のチップ部品に個片化して電気的特性や光学特性の検査などを行っている。このため、チップ部品の個片化の課題として、個片化するための装置・人手・搬送と、テスト時にチップ部品を整列させる装置が必要となる。また、チップ部品の個片化によってキズ・カケ・汚れなどが発生する。さらに、複数のチップ部品が配列されたLED基板から自動的に個片のチップ部品に分離する方法もあるが、高価で複雑なローダ機構制御やカメラによる認識装置が必要となる。 In the above-described conventional configurations disclosed in Patent Documents 1 and 2, electrical characteristics and optical characteristics are inspected by dividing into individual chip parts. For this reason, as a problem of chip part separation, an apparatus, a manpower, a conveyance for the separation, and an apparatus for aligning the chip parts at the time of testing are required. In addition, scratches, nicks, dirt, etc. are generated by chip parts. Furthermore, although there is a method of automatically separating an LED substrate on which a plurality of chip components are arranged into individual chip components, an expensive and complicated loader mechanism control and a camera recognition device are required.
基板状態での流動課題としては、電気的配線パターンをチップ部品単位で分離形成する場合、配線パターンの生成に必要な電気的処理が複雑化する。また、チップ部品間距離を拡大する方法(テープ引伸)では、拡大装置が必要となるし、その位置精度も悪く、座標ずれによりプローブコンタクトが困難となる。さらに、絶縁物の嵌め込みによる絶縁法では、拡大装置・遮へい板の挿入が必要となる。 As a flow problem in the substrate state, when the electrical wiring pattern is separately formed on a chip component basis, the electrical processing necessary for generating the wiring pattern is complicated. Further, in the method of enlarging the distance between the chip parts (tape stretching), an enlarging device is required, the positional accuracy is poor, and the probe contact becomes difficult due to the coordinate deviation. Furthermore, in the insulation method by fitting an insulator, it is necessary to insert a magnifying device and a shielding plate.
何れにせよ、上記のようなテスト手法では、いずれも平面上の測定であることから、DC測定時の発光が光学特性の測定に影響するため、同時テストができない。 In any case, since all of the above-described test methods are measurements on a flat surface, the light emission at the time of DC measurement affects the measurement of the optical characteristics, so that a simultaneous test cannot be performed.
本発明は、上記従来の問題を解決するもので、チップ部品を個片化せずに複数のチップ部品を搭載した基板状態で、装置構成を大幅に簡略化して、各チップ部品の電気的特性や光学特性を容易に測定して検査することができる電子部品動作機能測定装置および電子部品動作機能測定方法を提供することを目的とする。 The present invention solves the above-mentioned conventional problems, and in the state of a substrate on which a plurality of chip parts are mounted without dividing the chip parts into individual pieces, the device configuration is greatly simplified, and the electrical characteristics of each chip part are Another object is to provide an electronic component operation function measuring apparatus and an electronic component operation function measuring method capable of easily measuring and inspecting optical characteristics.
本発明の電子部品動作機能測定装置は、裏面にシートが貼られた状態で個々に切断された複数の電子部品がマトリクス状に整列した複数個搭載の電子部品基板の状態で該電子部品の電気的動作機能を検査する電子部品動作機能測定装置であって、該電子部品基板を曲面または角部に沿わせて折り曲げて、前後に隣接する電子部品間の側面を離間させる電子部品側面離間手段と、当該電子部品の所定端子に接続させる端子接続手段と、該端子接続手段を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数の電子部品の電気的動作機能を測定する電気的動作機能測定手段とを有し、該電子部品側面離間手段として、断面が円形または多角形のロールおよび断面多角形の回転軸のいずれかを、一または複数配置するものであり、そのことにより上記目的が達成される。
The electronic component operation function measuring apparatus according to the present invention has a plurality of electronic components that are individually cut in a state where a sheet is pasted on the back surface, and a plurality of mounted electronic component substrates arranged in a matrix. An electronic component operation function measuring apparatus for inspecting a functional operation function, wherein the electronic component side surface separating means is configured to bend the electronic component substrate along a curved surface or a corner and separate the side surfaces between adjacent electronic components. Measuring the electrical operation function of the one or more electronic components while driving one or more electronic components connected via the terminal connection means; It possesses the electrical operating function measuring means for, as electronic component side spacing means, either the cross section is circular or polygonal roll and polygonal section of the rotating shaft, intended to one or more placement Ri, the object is achieved.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、前記電子部品の裏面または側面の端子に対して電気的に接続可能とするプローブピンと、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している。 Further preferably, the terminal connection means in the electronic component operation function measuring device of the present invention is a probe pin that can be electrically connected to a terminal on a back surface or a side surface of the electronic component, and the electron to the probe pin. Drive voltage output means capable of supplying a drive voltage for driving the component.
さらに、好ましくは、本発明の電子部品動作機能測定装置における電子部品の裏面に端子がある場合、前記端子接続手段は、検査時に、先端がニードル状の2本のプローブピンにより前記裏面シートを貫通して電子部品の端子に接続させる。 Further preferably, when there is a terminal on the back surface of the electronic component in the electronic component operation function measuring device of the present invention, the terminal connecting means penetrates the back sheet by two probe pins having a needle-like tip at the time of inspection. And connect to the terminals of the electronic component.
さらに、好ましくは、本発明の電子部品動作機能測定装置における電子部品が発光素子チップの場合に、前記電気的動作機能測定手段は、所定数の発光素子チップの周囲を覆い、該発光素子チップからの発光を外部に漏らさずに内面で反射させて所定方向に導く反射板と、該反射板からの光を光電変換して撮像信号を得る受光素子と、該受光素子からの撮像信号に基づいた該発光素子チップの発光とその閾値を比較して該発光素子チップの良否判定するチップ良否判定部とを有している。 Further preferably, when the electronic component in the electronic component operation function measuring device of the present invention is a light emitting element chip, the electrical operation function measuring means covers a predetermined number of light emitting element chips, and from the light emitting element chip. Based on the image pickup signal from the light receiving element that reflects the light emitted from the inside without leaking to the outside and guides it in a predetermined direction and photoelectrically converts the light from the light reflecting plate to obtain the image pickup signal A chip pass / fail judgment unit for judging the pass / fail of the light emitting element chip by comparing the light emission of the light emitting element chip and the threshold value thereof.
さらに、好ましくは、本発明の電子部品動作機能測定装置における電子部品がLSIチップまたは受光素子チップの場合に、前記電気的動作機能測定手段は、所定数のLSIチップまたは受光素子チップの前記端子接続手段を介した入出力値と該入出力値の閾値とを比較して該電子部品を良否判定するチップ良否判定部を有する。 Further preferably, when the electronic component in the electronic component operation function measuring device of the present invention is an LSI chip or a light receiving element chip, the electrical operation function measuring means is configured to connect the terminals of a predetermined number of LSI chips or light receiving element chips. A chip pass / fail judgment unit that judges the pass / fail of the electronic component by comparing the input / output value via the means and the threshold value of the input / output value.
さらに、好ましくは、本発明の電子部品動作機能測定装置におけるチップ良否判定部が判定した前記電子部品の判定結果がNGである場合、該電子部品の座標位置をNG情報として記憶部に記憶する。 Further preferably, when the determination result of the electronic component determined by the chip quality determination unit in the electronic component operation function measuring device of the present invention is NG, the coordinate position of the electronic component is stored in the storage unit as NG information.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、前記電子部品毎に該電子部品の端子にプローブピンを接続して該電子部品の光学的特性を検査するための第1端子接続手段と、該光学的特性を検査する複数の電子部品とは別の一行の複数の電子部品全体の端子に同時にプローブピンを接続して該電子部品の電気的特性を検査するための第2端子接続手段とを有する。 Further preferably, the terminal connection means in the electronic component operation function measuring apparatus of the present invention is a first connector for inspecting the optical characteristics of the electronic component by connecting a probe pin to the terminal of the electronic component for each electronic component. In order to inspect the electrical characteristics of the electronic component by simultaneously connecting the probe pin to the terminals of the plurality of electronic components in one row different from the one-terminal connecting means and the plurality of electronic components inspecting the optical characteristics Second terminal connection means.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面がテーパ面になっているコンタクトユニットと、該コンタクトユニットの下面直下で横方向に移動自在に構成され、該移動により該テーパ面を押し上げる楔状突起部が上面に設けられた長尺の移動軸と、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している。 Further preferably, the terminal connecting means in the electronic component operation function measuring device of the present invention comprises: a probe pin that is electrically connected to a back terminal of the electronic component; the probe pin is fixed to the upper surface; and the lower surface is a tapered surface A contact unit, a long moving shaft having a wedge-shaped protrusion formed on the upper surface, which is configured to be movable in a lateral direction immediately below the lower surface of the contact unit, and pushes up the tapered surface by the movement, and the probe pin Drive voltage output means capable of supplying a drive voltage for driving the electronic component.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面がエアープッシュの有無により縦方向に移動可能なように端面が開放されているコンタクトユニットと、該コンタクトユニットの端面開放口の下方位置で、横方向の長尺管で回転自在に構成され、該電子部品の配置間隔で角度を変えて、エアープッシュ用のエアー通気孔が所定間隔に複数形成された圧力エアー管と、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している。 Further preferably, the terminal connecting means in the electronic component operation function measuring device of the present invention comprises: a probe pin that is electrically connected to a back terminal of the electronic component; the probe pin is fixed to the upper surface; and the lower surface is an air push. Arrangement of the electronic component comprising a contact unit whose end face is open so that it can be moved in the vertical direction depending on the presence or absence, and a longitudinal long tube at a position below the end face opening of the contact unit. A pressure air tube in which a plurality of air push holes for air push are formed at predetermined intervals, and a drive voltage output means capable of supplying a drive voltage for driving the electronic component to the probe pin by changing the angle at intervals. And have.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面角部にアールが付いて縦方向に移動可能なように構成されているコンタクトユニットと、該コンタクトユニットの下面位置で、左右方向の長尺円形軸で回転自在に構成され、該電子部品の配置間隔で角度を変えて該電子部品毎に突出ドラム部が所定数づつ所定間隔に形成され、回転によって突出ドラム部がコンタクトユニットの下面を押し上げる回転ドラムと、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している。 Further preferably, the terminal connection means in the electronic component operation function measuring device of the present invention comprises: a probe pin that is electrically connected to a back surface terminal of the electronic component; the probe pin is fixed to the upper surface; The contact unit is configured to be movable in the vertical direction, and is configured to be rotatable by a long circular shaft in the left-right direction at the lower surface position of the contact unit. In other words, a predetermined number of protruding drum portions are formed for each electronic component at a predetermined interval, and the rotating drum pushes up the lower surface of the contact unit by rotation, and a driving voltage for driving the electronic component with respect to the probe pin Drive voltage output means that can supply the power.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、前記反射板に対してその下の絶縁シート61Bを介した直下位置で、該反射板と該絶縁シートと前記プローブピンとが一体化して、該反射板の先端が発光素子チップの表面に当接し、該プローブピンが該発光素子チップの側面端子に当接または離間するように構成されている。 Further preferably, the terminal connection means in the electronic component operation function measuring device of the present invention is a position directly below the reflection plate via the insulation sheet 61B below the reflection plate, the insulation sheet, and the probe pin. Are integrated so that the tip of the reflecting plate contacts the surface of the light emitting element chip, and the probe pin contacts or separates from the side terminal of the light emitting element chip.
さらに、好ましくは、本発明の電子部品動作機能測定装置における端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、回転シャフトと、該回転シャフトの断面円形の互いに反対側に連結されたクランク状の上下のコンタクトユニットであって、両端面にそれぞれプローブピンが固定され、上下の互いに反対側に設けられた各複数の電子部品の裏面端子に対して、該回転シャフトの回転により同時に該各複数の電子部品の裏面端子と該プローブピンのそれぞれとを接続させるコンタクトユニットと、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している。 Further preferably, the terminal connection means in the electronic component operation function measuring device of the present invention is such that the probe pin electrically connected to the back terminal of the electronic component, the rotation shaft, and the opposite sides of the circular cross section of the rotation shaft A crank-shaped upper and lower contact unit connected to each other, each having a probe pin fixed to each end face, and the upper and lower electronic terminals provided on opposite sides of each of the plurality of electronic component back terminals. A contact unit for connecting the back terminals of each of the plurality of electronic components and each of the probe pins simultaneously by rotation; drive voltage output means for supplying a drive voltage for driving the electronic components to the probe pins; have.
本発明の電子部品動作機能測定方法は、裏面にシートが貼られた状態で個々に切断された複数の電子部品がマトリクス状に整列した複数個搭載の電子部品基板の状態で該電子部品の電気的動作機能を検査する電子部品動作機能測定方法であって、電子部品側面離間手段が、該電子部品基板を曲面または角部に沿わせて折り曲げて、前後に隣接する電子部品間の側面を離間させる電子部品側面離間ステップと、端子接続手段が、当該電子部品の所定端子に接続させる端子接続ステップと、電気的動作機能測定手段が、該端子接続手段を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数の電子部品の電気的動作機能を測定する電気的動作機能測定ステップとを有し、該電子部品側面離間手段として、断面が円形または多角形のロールおよび断面多角形の回転軸のいずれかを、一または複数配置するものであり、そのことにより上記目的が達成される。 The electronic component operation function measuring method according to the present invention is a method of measuring the electronic component in a state of a plurality of mounted electronic component substrates in which a plurality of electronic components cut individually with a sheet attached to the back surface are arranged in a matrix. Electronic component operation function measuring method for inspecting the functional operation function, wherein the electronic component side surface separation means bends the electronic component substrate along a curved surface or a corner to separate the side surfaces between adjacent electronic components. The electronic component side surface separation step, the terminal connecting means for connecting to the predetermined terminal of the electronic component, and the electrical operation function measuring means connected to the one or more electronic components via the terminal connecting means It possesses the electrical operating function measuring step of measuring an electrical operating functions of the one or more electronic components in a state of being driven, as electronic component side separating means, a circular cross section or One of rectangular roll and polygonal section of the rotating shaft, which makes one or more arrangements, the object is achieved.
上記構成により、以下、本発明の作用を説明する。 With the above configuration, the operation of the present invention will be described below.
本発明においては、電子部品基板を曲面または角部に沿わせて折り曲げて、前後に隣接する電子部品間の側面を離間させる電子部品側面離間手段と、当該電子部品の所定端子に接続させる端子接続手段と、端子接続手段を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数の電子部品の電気的動作機能を測定する電気的動作機能測定手段とを有している。 In the present invention, the electronic component substrate is bent along a curved surface or a corner, and the electronic component side surface separating means for separating the side surfaces between adjacent electronic components is connected to the predetermined terminal of the electronic component. And an electric operation function measuring means for measuring an electric operation function of the one or more electronic components while driving the one or more electronic components connected via the terminal connection means. .
これによって、チップ部品を個片化せずに複数のチップ部品を搭載した基板状態のままで、電子部品の電気的動作機能を測定するので、装置構成を大幅に簡略化して、各チップ部品の電気的特性や光学特性をより容易に測定して検査することが可能となる。 As a result, the electrical operation function of the electronic component is measured in the state of the substrate on which a plurality of chip components are mounted without dividing the chip components into individual pieces. Electrical characteristics and optical characteristics can be measured and inspected more easily.
以上により、本発明によれば、チップ部品を個片化せずに複数のチップ部品を搭載した基板状態のままで、電子部品の電気的動作機能を測定するので、装置構成を大幅に簡略化して、各チップ部品の電気的特性や光学特性をより容易に測定して検査することができる。 As described above, according to the present invention, since the electrical operation function of the electronic component is measured while the substrate is mounted with a plurality of chip components without separating the chip components, the device configuration is greatly simplified. Thus, the electrical characteristics and optical characteristics of each chip component can be measured and inspected more easily.
以下に、本発明の電子部品動作機能測定装置および電子部品動作機能測定方法の実施形態1〜8について図面を参照しながら詳細に説明する。なお、各図における構成部材のそれぞれの厚みや長さなどは図面作成上の観点から、図示する構成に限定されるものではない。 Embodiments 1 to 8 of the electronic component operation function measuring device and the electronic component operation function measuring method of the present invention will be described below in detail with reference to the drawings. In addition, each thickness, length, etc. of the structural member in each figure are not limited to the structure to illustrate from a viewpoint on drawing preparation.
(実施形態1)
図1は、本発明の実施形態1における電子部品動作機能測定装置の電子部品側面離間手段の要部構成例を模式的に示す斜視図である。図2はおよび図3は、本発明の実施形態1における電子部品動作機能測定装置の端子接続手段および電気的動作機能測定手段の要部構成例を模式的に示す断面図である。図4は、図2はおよび図3の反射板および電子部品の平面図である。
(Embodiment 1)
FIG. 1 is a perspective view schematically showing a configuration example of a main part of an electronic component side surface separation unit of the electronic component operation function measuring apparatus according to Embodiment 1 of the present invention. 2 and FIG. 3 are cross-sectional views schematically showing an exemplary configuration of main parts of the terminal connection means and the electrical operation function measurement means of the electronic component operation function measurement apparatus according to Embodiment 1 of the present invention. FIG. 4 is a plan view of the reflector and the electronic component shown in FIGS.
図1〜図4において、本実施形態1の電子部品動作機能測定装置1は、裏面に粘着シート(UVシート)が貼られた状態で個々に切断された複数の電子部品2がマトリクス状に整列した複数個搭載の電子部品基板3を曲面に沿わせて折り曲げ、折り曲げ方向前後に隣接する電子部品2間の側面を開口部4として開口させて離間させる電子部品側面離間手段5と、この折り曲げ方向前後の両側面が離間した電子部品2の側面または裏面の所定端子に電子部品2毎に順次接続させる端子接続手段6と、端子接続手段6を介して一または複数の電子部品2を駆動させた状態で一または複数の電子部品2の電気的動作機能(発光量など光学特性および電気的特性)を検査する電気的動作機能測定手段7とを有している。 1 to 4, the electronic component operation function measuring apparatus 1 according to the first embodiment has a plurality of electronic components 2 that are individually cut in a state in which an adhesive sheet (UV sheet) is pasted on the back surface. The electronic component side surface separating means 5 for bending the plurality of mounted electronic component substrates 3 along the curved surface and opening and separating the side surfaces between the adjacent electronic components 2 before and after the bending direction, and the bending direction. One or a plurality of electronic components 2 are driven via the terminal connection means 6 and the terminal connection means 6 for sequentially connecting each of the electronic components 2 to predetermined terminals on the side surface or the back surface of the electronic component 2 whose front and rear side surfaces are separated from each other. And an electrical operation function measuring means 7 for inspecting the electrical operation function (optical characteristics such as light emission amount and electrical characteristics) of one or a plurality of electronic components 2 in a state.
ここでは、本実施形態1の電子部品動作機能測定装置1を発光測定装置に適用して、電子部品2の動作機能としてLEDチップ21の光学特性(発光量や発光指向性など)および電気的特性(DC検査)などを測定する場合について説明する。 Here, the electronic component operation function measuring device 1 of the first embodiment is applied to a light emission measuring device, and the optical characteristics (emission amount, light emission directivity, etc.) and electrical characteristics of the LED chip 21 are used as the operation function of the electronic component 2. A case where (DC inspection) or the like is measured will be described.
電子部品2は、LSIチップの他に、半導体発光チップとしてのLEDチップや半導体受光チップとしての撮像チップおよび受光チップなどの光学素子などがあるが、ここではLEDチップ21について説明する。 In addition to the LSI chip, the electronic component 2 includes an LED chip as a semiconductor light emitting chip and an optical element such as an imaging chip and a light receiving chip as a semiconductor light receiving chip. The LED chip 21 will be described here.
電子部品基板3は、裏面に粘着シートが貼られた状態で縦方向および横方向に個々に切断された複数のLEDチップ21が列方向および行方向のマトリクス状に整列した複数個搭載されている。粘着シートは、多少の伸縮性があり、複数のLEDチップ21が整列した状態で保持可能である。LEDチップ21の+端子と−端子は、側面にある場合と裏面に有る場合とがあるが、ここでは、LEDチップ21の+端子と−端子が裏面に有る場合について説明する。LEDチップ21の表面中央にはレンズ22が設けられ、このレンズ22を通してLED発光を外部に出射させるようになっている。 The electronic component substrate 3 is mounted with a plurality of LED chips 21 that are individually cut in the vertical direction and the horizontal direction in a state where an adhesive sheet is pasted on the back surface, arranged in a matrix in the column direction and the row direction. . The pressure-sensitive adhesive sheet is somewhat stretchable and can be held in a state where a plurality of LED chips 21 are aligned. The + terminal and the − terminal of the LED chip 21 may be on the side surface or the back surface. Here, the case where the + terminal and the − terminal of the LED chip 21 are on the back surface will be described. A lens 22 is provided at the center of the surface of the LED chip 21, and LED light emission is emitted to the outside through the lens 22.
電子部品側面離間手段5は、ここでは断面が円形の筒型ロール51で構成されている。ロール51のサイズは、直径が小さくなるほど、電子部品基板3の粘着シートをロール51の曲面に沿わせて巻き付けた場合に、開口部4の開口が大きくなって、折り曲げ方向(列方向または縦方向)前後に隣接するLEDチップ21間の両側面をより離間させることができるが、基板上にアセンブリされた複数のLEDチップ21は相互に電気的に接続されているのを、電気的に互いに遮断して個々のLEDチップ21を発光させることができればよい。要するに、電子部品基板3をロール51の曲面に沿わせて折り曲げることにより、LEDチップ21間の電気的導通を遮断し、測定対象のLEDチップ21のみを発光制御することが可能となる。電子部品基板3をロール51の曲面に沿わせると、LEDチップ21の厚みによる内径と外径の差で隣接チップ間に離間距離が発生する。 Here, the electronic component side surface separation means 5 is constituted by a cylindrical roll 51 having a circular cross section. The size of the roll 51 is such that when the pressure-sensitive adhesive sheet of the electronic component substrate 3 is wound along the curved surface of the roll 51 as the diameter decreases, the opening of the opening 4 becomes large and the bending direction (row direction or longitudinal direction) ) Both side surfaces between the front and rear adjacent LED chips 21 can be further separated, but the plurality of LED chips 21 assembled on the substrate are electrically disconnected from each other. As long as the individual LED chips 21 can emit light. In short, by bending the electronic component substrate 3 along the curved surface of the roll 51, it is possible to cut off the electrical continuity between the LED chips 21 and control the light emission of only the LED chip 21 to be measured. When the electronic component substrate 3 is placed along the curved surface of the roll 51, a separation distance is generated between adjacent chips due to the difference between the inner diameter and the outer diameter due to the thickness of the LED chip 21.
端子接続手段6は、LEDチップ21の裏面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピンが付いた台座を押し上げて、2本のニードル状のプローブピンが粘着シートを貫通して接続させるようになっている。この2本のニードルピンが付いた台座は、LEDチップ21毎に、ロール51に巻かれた電子部品基板3の所定方向1行(横方向)の複数のLEDチップ21の直下にそれぞれ配置されている。よって、所定方向1行(横方向)の複数のLEDチップ21を順次発光させる場合は、2本のニードルピンが付いた台座を順次押し上げて、2本のプローブピンをLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のプローブピンから所定電源電圧を供給して順次発光させることができる。このとき、駆動電圧出力手段としての発光電圧出力源から2本のプローブピンに発光電圧を供給してLEDチップ21を発光駆動させる。 The terminal connecting means 6 pushes up the pedestal with the two needle-like probe pins insulated from each other with respect to the + terminal and the − terminal on the back surface of the LED chip 21 so that the two needle-like probe pins are The adhesive sheet is penetrated and connected. The pedestal with the two needle pins is arranged for each LED chip 21 directly below the plurality of LED chips 21 in one row (lateral direction) in the predetermined direction of the electronic component substrate 3 wound around the roll 51. Yes. Therefore, in order to sequentially emit a plurality of LED chips 21 in a predetermined direction (row), the pedestal with two needle pins is sequentially pushed up, and the two probe pins are connected to the + terminal of the LED chip 21. -It is possible to cause the LED chip 21 to emit light sequentially by supplying a predetermined power supply voltage from two probe pins by being electrically connected to the terminal. At this time, the LED chip 21 is driven to emit light by supplying the light emission voltage to the two probe pins from the light emission voltage output source as the drive voltage output means.
電気的動作機能測定手段7は、所定数(ここでは5個)のLEDチップ21の周囲を覆い、LEDチップ21からの発光を外部に漏らさずに内面で反射させて所定方向に導く反射板71と、反射板71からの光を光電変換して撮像信号を得る受光素子72(フォトダイオード)と、受光素子72からの撮像信号に基づいたLEDチップ21の発光量と閾値を比較してLEDチップ21の良否判定するチップ良否判定部73とを有し、端子接続手段6の2本のプローブピンを介して一または複数のLEDチップ21を発光させた状態で一または複数のLEDチップ21の発光量を検査する。 The electrical operation function measuring means 7 covers the periphery of a predetermined number (here, 5) of LED chips 21 and reflects the light emitted from the LED chips 21 on the inner surface without leaking to the outside and guides it in a predetermined direction. A light receiving element 72 (photodiode) that photoelectrically converts light from the reflecting plate 71 to obtain an imaging signal, and a light emitting amount and a threshold value of the LED chip 21 based on the imaging signal from the light receiving element 72 to compare the LED chip 21, a chip pass / fail judgment unit 73 for judging pass / fail, and light emission of one or a plurality of LED chips 21 in a state where one or a plurality of LED chips 21 are caused to emit light via two probe pins of the terminal connection means 6. Inspect the amount.
上記構成の電子部品動作機能測定装置1の発光測定方法について詳細に説明する。 The light emission measuring method of the electronic component operation function measuring apparatus 1 having the above configuration will be described in detail.
まず、裏面に粘着シートが貼られた状態で縦方向および横方向に個々に切断された複数のLEDチップ21が列方向および行方向のマトリクス状に整列した複数個搭載された電子部品基板3を、その先端を固定して、電子部品側面離間手段5としての円筒状のロール51に粘着シートが下になるように巻きつける。 First, an electronic component substrate 3 on which a plurality of LED chips 21 that are individually cut in a vertical direction and a horizontal direction and arranged in a matrix in the column direction and the row direction with an adhesive sheet pasted on the back surface is mounted. The tip is fixed, and the pressure sensitive adhesive sheet is wound around a cylindrical roll 51 as the electronic component side surface separation means 5.
次に、ロール51を回転させて、電子部品基板3の複数のLEDチップ21の一行がロール頂上に来たときに、ロール51の回転を停止させ、反射板71を受光素子72と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。この場合、5個のLEDチップ21を空けて、次の反射板71が順次複数用意されている。 Next, when the roll 51 is rotated and one row of the plurality of LED chips 21 of the electronic component substrate 3 comes to the top of the roll, the rotation of the roll 51 is stopped and the reflecting plate 71 is lowered together with the light receiving element 72 to be predetermined. A plurality of LED chips 21 (here, 5) are covered with a reflecting plate 71. In this case, five LED chips 21 are provided, and a plurality of subsequent reflectors 71 are sequentially prepared.
続いて、筒状のロール51内で2本のニードル状のプローブピンが付いた台座をLEDチップ21毎にLEDチップ21と共に順次押し上げて、2本のニードル状のプローブピンを各LEDチップ21の裏面の+端子と−端子に順次接続して順次発光させる。順次発光させるときに、カウンタにて何番目のLEDチップ21が発光しているかをチップ良否判定部73に知らせる。 Subsequently, the pedestal with the two needle-like probe pins in the cylindrical roll 51 is sequentially pushed up together with the LED chip 21 for each LED chip 21, and the two needle-like probe pins are attached to each LED chip 21. The light is emitted sequentially by sequentially connecting the + terminal and the − terminal on the back surface. When sequentially emitting light, the chip quality determination unit 73 is informed of which LED chip 21 is emitting light by the counter.
このとき、受光素子72からの撮像信号に基づいて、チップ良否判定部73がLEDチップ21の発光量と閾値を比較してLEDチップ21の良否判定する。さらに、チップ良否判定部73が判定した結果がNG(不良)の場合は、その座標位置(アドレス情報)を記憶部(RAM)に記憶させておく。この座標位置(アドレス情報)は、複数のLEDチップ21のマトリクス状の並びにおいて、行方向をXとし、列方向をYとして座標(X、Y)でLEDチップ21の位置を特定する。この場合は、列方向Yが「1」として、行方向Xの位置番号が1〜5、11〜15、21〜25、・・の検査を実行し、座標(21、1)がNGの場合にこれを記憶部(RAM)に記憶させておく。 At this time, based on the imaging signal from the light receiving element 72, the chip quality determination unit 73 compares the light emission amount of the LED chip 21 and the threshold value to determine the quality of the LED chip 21. Furthermore, when the result determined by the chip pass / fail determination unit 73 is NG (defective), the coordinate position (address information) is stored in the storage unit (RAM). This coordinate position (address information) specifies the position of the LED chip 21 by coordinates (X, Y), where X is the row direction and Y is the column direction in the matrix arrangement of the plurality of LED chips 21. In this case, when the column direction Y is “1” and the position numbers in the row direction X are 1 to 5, 11 to 15, 21 to 25,..., And the coordinates (21, 1) are NG This is stored in a storage unit (RAM).
その後、複数の反射板71を受光素子22と共に一旦上げて、5個のLEDチップ21分だけシフトして再び、複数の反射板71を受光素子22と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。 Thereafter, the plurality of reflecting plates 71 are once lifted together with the light receiving elements 22, shifted by five LED chips 21, and then the plurality of reflecting plates 71 are lowered together with the light receiving elements 22 to reduce a predetermined number of LED chips 21 (here, 5) are covered with a reflector 71.
続いて、筒状のロール51内で2本のプローブピンが付いた台座をLEDチップ21毎にLEDチップ21と共に順次押し上げて2本のプローブピンを各LEDチップ21の裏面の+端子と−端子に順次接続して順次発光させる。順次発光させるときに、カウンタにて何番目のLEDチップ21が発光しているかをチップ良否判定部73に知らせる。 Subsequently, the pedestal with the two probe pins in the cylindrical roll 51 is sequentially pushed up together with the LED chip 21 for each LED chip 21, and the two probe pins are moved to the + terminal and the − terminal on the back surface of each LED chip 21. Are sequentially connected to emit light. When sequentially emitting light, the chip quality determination unit 73 is informed of which LED chip 21 is emitting light by the counter.
このとき、受光素子72からの撮像信号に基づいて、チップ良否判定部73がLEDチップ21の発光量と閾値を比較してLEDチップ21の良否判定する。さらに、チップ良否判定部73が判定した結果がNG(不良)の場合は、その座標位置(アドレス情報)を記憶部(RAM)に記憶させておく。この座標位置(アドレス情報)は、複数のLEDチップ21のマトリクス状の並びにおいて、行方向をXとし、列方向をYとして座標(X、Y)でLEDチップ21の位置を特定する。この場合は、列方向Yが「1」として、行方向Xの位置番号が6〜10、16〜20、26〜30、・・の検査を実行し、NGがなければ記憶部(RAM)へのNG情報は記憶されない。 At this time, based on the imaging signal from the light receiving element 72, the chip quality determination unit 73 compares the light emission amount of the LED chip 21 and the threshold value to determine the quality of the LED chip 21. Furthermore, when the result determined by the chip pass / fail determination unit 73 is NG (defective), the coordinate position (address information) is stored in the storage unit (RAM). This coordinate position (address information) specifies the position of the LED chip 21 by coordinates (X, Y), where X is the row direction and Y is the column direction in the matrix arrangement of the plurality of LED chips 21. In this case, it is assumed that the column direction Y is “1”, and the position numbers in the row direction X are 6 to 10, 16 to 20, 26 to 30... No NG information is stored.
これによって、一行の複数のLEDチップ21の発光量の測定検査が終了する。次に、ロール51をLEDチップ21の1個分だけ回転させて、電子部品基板3の複数のLEDチップ21の一行がロール頂上に来たときに、ロール51の回転を停止させ、複数の反射板71を受光素子22と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆い、次の一行の複数のLEDチップ21の発光量の測定検査を始める。これを繰り返して、所定列で所定行の複数のLEDチップ21の発光量の測定検査を実行することができる。 Thereby, the measurement inspection of the light emission amount of the plurality of LED chips 21 in one row is completed. Next, the roll 51 is rotated by one LED chip 21, and when one row of the plurality of LED chips 21 on the electronic component substrate 3 comes to the top of the roll, the rotation of the roll 51 is stopped and a plurality of reflections are performed. The plate 71 is lowered together with the light receiving element 22, the periphery of a predetermined number of LED chips 21 (here, five) is covered with the reflecting plate 71, and the measurement and inspection of the light emission amounts of the plurality of LED chips 21 in the next row is started. By repeating this, the measurement inspection of the light emission amounts of the plurality of LED chips 21 in a predetermined row in a predetermined column can be executed.
以上により、本実施形態1の電子部品動作機能測定方法は、電子部品側面離間手段5が、電子部品基板3を曲面または角部に沿わせて折り曲げて、前後に隣接するLEDチップ21間の側面を離間させる電子部品側面離間ステップと、端子接続手段6が、当該LEDチップ21の所定端子に接続させる端子接続ステップと、電気的動作機能測定手段7が、端子接続手段6を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数のLEDチップ21の電気的動作機能を測定する電気的動作機能測定ステップとを有する。 As described above, in the electronic component operation function measuring method according to the first embodiment, the electronic component side surface separating means 5 bends the electronic component substrate 3 along the curved surface or the corner, and the side surfaces between the LED chips 21 adjacent to each other in the front and rear directions. The electronic component side surface separating step for separating the terminal, the terminal connecting unit 6 for connecting to the predetermined terminal of the LED chip 21, and the electrical operation function measuring unit 7 are connected via the terminal connecting unit 6. Alternatively, an electrical operation function measuring step of measuring an electrical operation function of the one or more LED chips 21 in a state where a plurality of electronic components are driven.
以上により、本実施形態1によれば、粘着シートが貼られた状態で分断された複数のLEDチップ21がマトリクス状に整列した複数個搭載の電子部品基板のままで、電子部品基板3から粘着シートを剥がした個片化時のLEDチップ21のダメージ(割れ、欠けおよび汚れ)も抑えられた状態で光学測定するため、個々のLEDチップ21自体の搬送方向の整列や部品搬送時の位置合わせ機構を不要(複雑で高価なパーツフィーダやソート機構などが不要)で装置サイズもコンパクトにすることができると共に、個々のLEDチップ21の光学測定時の位置決めをも不要とすることができて、個々のLEDチップ21の光学測定および複数個のLEDチップ21の同時光学測定も容易できて、個々のLEDチップ21の光学測定値を座標データとしても正確に記憶部に保持することができる。 As described above, according to the first embodiment, the plurality of LED chips 21 divided in a state where the pressure-sensitive adhesive sheet is pasted are adhered to the electronic component substrate 3 while the plurality of mounted electronic component substrates are arranged in a matrix. Since the optical measurement is performed in a state where damage (breaking, chipping, and dirt) of the LED chip 21 when the sheet is separated into individual pieces is also suppressed, the alignment of the individual LED chips 21 themselves in the transport direction and the alignment at the time of component transport The mechanism is unnecessary (no complicated and expensive parts feeder or sort mechanism is required), the device size can be made compact, and the positioning of each LED chip 21 during optical measurement can also be made unnecessary. Optical measurement of each LED chip 21 and simultaneous optical measurement of a plurality of LED chips 21 can be facilitated. Also it can be held accurately in the storage unit as the data.
なお、本実施形態1では、電子部品動作機能測定装置1において、電子部品側面離間手段5が断面が円形の円筒型のロール51である場合について説明したが、これに限らず、電子部品動作機能測定装置1において、電子部品側面離間手段5が断面が四角形または5角形、さらには、一辺がLEDチップ21の幅に合わせた多角形の筒型のロールであってもよい。 In the first embodiment, in the electronic component operation function measuring apparatus 1, the case where the electronic component side surface separation means 5 is the cylindrical roll 51 having a circular cross section has been described. In the measuring apparatus 1, the electronic component side surface separation means 5 may be a rectangular or pentagonal roll whose cross section is a quadrangle or a pentagon, and a polygon whose side is matched to the width of the LED chip 21.
(実施形態2)
上記実施形態1では、電子部品側面離間手段5の断面が円形または多角形の筒型ロール方式について説明したが、本実施形態2では、電子部品側面離間手段5が断面4角形の回転軸を用いて電子部品基板3を吊り下げる簾方式について説明する。
(Embodiment 2)
In the first embodiment, the electronic component side surface separation means 5 has been described with respect to the cylindrical roll method in which the cross section of the electronic component side surface separation means 5 is circular or polygonal. However, in the second embodiment, the electronic component side surface separation means 5 uses a rotation shaft having a square cross section. A saddle method for hanging the electronic component board 3 will be described.
図5は、本発明の実施形態2における電子部品動作機能測定装置の電子部品側面離間手段および端子接続手段の要部構成例を模式的に示す斜視図である。なお、この場合、図2〜図4の電気的動作機能測定手段7を用い、図2および図3の端子接続手段6は用いず、端子接続手段6として、LEDチップ21の側面の端子だけに対して電気的に接続可能とするプローブピンを用いる。 FIG. 5 is a perspective view schematically showing a configuration example of main parts of the electronic component side surface separation means and the terminal connection means of the electronic component operation function measuring apparatus according to Embodiment 2 of the present invention. In this case, the electrical operating function measuring means 7 of FIGS. 2 to 4 is used, the terminal connecting means 6 of FIGS. 2 and 3 is not used, and only the terminal on the side surface of the LED chip 21 is used as the terminal connecting means 6. A probe pin that can be electrically connected is used.
図2〜図5において、本実施形態2の電子部品動作機能測定装置1Aは、裏面にシートが貼られた状態で個々に切断された複数の電子部品2がマトリクス状に整列した複数個搭載の電子部品基板3を断面4角形の角部に沿わせて折り曲げ、折り曲げ方向前後に隣接する電子部品2間の側面を開口部4として開口させて離間させる電子部品側面離間手段5Aと、この折り曲げ方向前後の両側面が離間した電子部品2の側面の所定端子に接続させる端子接続手段6Aと、端子接続手段6Aを介して一または複数の電子部品2を駆動させた状態で一または複数の電子部品2の電気的動作機能を測定する電気的動作機能測定手段7とを有している。 2 to 5, the electronic component operation function measuring apparatus 1A according to the second embodiment has a plurality of electronic components 2 that are individually cut in a state in which a sheet is pasted on the back side and arranged in a matrix. Electronic component side surface separation means 5A for bending the electronic component substrate 3 along the corners of the quadrangular cross section and opening and separating the side surfaces between the adjacent electronic components 2 before and after the bending direction, and the folding direction. 6A of terminal connection means connected to the predetermined terminal of the side surface of the electronic component 2 which the front and back both side surfaces were spaced apart, and one or a plurality of electronic components with the one or a plurality of electronic components 2 being driven via the terminal connection means 6A And an electric operation function measuring means 7 for measuring two electric operation functions.
ここでは、本実施形態2の電子部品動作機能測定装置1Aを発光測定装置に適用して、電子部品2の動作機能としてLEDチップ21の光学特性(発光量や発光指向性など)および電気的特性(DC検査)などを測定する場合について説明する。 Here, the electronic component operation function measuring device 1A of the second embodiment is applied to the light emission measurement device, and the optical characteristics (light emission amount, light emission directivity, etc.) and electrical characteristics of the LED chip 21 as the operation function of the electronic component 2 are described. A case where (DC inspection) or the like is measured will be described.
電子部品側面離間手段5Aは、ここでは断面が4角形の回転軸52で構成されている。基板上にアセンブリされた複数のLEDチップ21は相互に電気的に接続されているのを、電気的に互いに遮断して個々のLEDチップ21を発光させることができるように、電子部品基板3を回転軸52の角部に沿わせて角度90度折り曲げることにより、隣接したLEDチップ21間を大きく開口して電気的導通を遮断し、測定対象のLEDチップ21のみを発光制御することが可能となる。電子部品基板3を回転軸52の角部に沿わせると、LEDチップ21の厚みによる内径と外径の差で隣接チップ間に離間距離が大きく発生する。 Here, the electronic component side surface separating means 5 </ b> A is constituted by a rotating shaft 52 having a quadrangular cross section. The plurality of LED chips 21 assembled on the substrate are electrically connected to each other, so that the individual LED chips 21 can emit light by being electrically disconnected from each other. By bending 90 degrees along the corner of the rotating shaft 52, it is possible to open a large gap between adjacent LED chips 21 to cut off electrical continuity and control only the LED chip 21 to be measured. Become. When the electronic component substrate 3 is placed along the corner of the rotating shaft 52, a large separation distance is generated between adjacent chips due to the difference between the inner diameter and the outer diameter due to the thickness of the LED chip 21.
端子接続手段6Aは、LEDチップ21の側面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピン61を押し当てて電気的に接続させるようになっている。この2本のニードルピン61は、LEDチップ21毎に、回転軸52に巻かれた電子部品基板3の所定方向1行(横方向)の所定数のLEDチップ21の側面の端子にそれぞれ押し当てるように配置されている。よって、所定方向1行(横方向)の複数のLEDチップ21を順次発光させる場合は、2本のニードルピン61を順次、LEDチップ21の側面の端子に押し当てて、LEDチップ21に2本のプローブピン61から所定電源電圧を供給して順次発光させることができる。このとき、駆動電圧出力手段としての発光電圧出力源から2本のプローブピン61に発光電圧を供給してLEDチップ21を発光駆動させることができる。 The terminal connecting means 6A is configured to press and electrically connect two needle-like probe pins 61 that are insulated from each other to the + terminal and the − terminal on the side surface of the LED chip 21. The two needle pins 61 are pressed against the terminals on the side surfaces of a predetermined number of LED chips 21 in one predetermined row (lateral direction) of the electronic component substrate 3 wound around the rotating shaft 52 for each LED chip 21. Are arranged as follows. Therefore, when the plurality of LED chips 21 in a predetermined direction (horizontal direction) are caused to emit light sequentially, the two needle pins 61 are sequentially pressed against the terminals on the side surface of the LED chip 21, and two LED chips 21 are applied to the LED chip 21. A predetermined power supply voltage can be supplied from the probe pins 61 to sequentially emit light. At this time, the LED chip 21 can be driven to emit light by supplying the light emission voltage to the two probe pins 61 from the light emission voltage output source as the drive voltage output means.
上記構成の電子部品動作機能測定装置1Aの発光測定方法について詳細に説明する。 The light emission measuring method of the electronic component operation function measuring apparatus 1A having the above configuration will be described in detail.
まず、裏面に粘着シートが貼られた状態で縦方向および横方向に個々に切断された複数のLEDチップ21が列方向および行方向のマトリクス状に整列した複数個搭載の電子部品基板3を、その先端を固定して、電子部品側面離間手段5Aとしての断面4角形の回転軸52に粘着シート31が下になるように巻き付ける。 First, a plurality of mounted electronic component substrates 3 in which a plurality of LED chips 21 individually cut in the vertical direction and the horizontal direction are arranged in a matrix in the column direction and the row direction with the adhesive sheet pasted on the back surface, The tip is fixed, and the adhesive sheet 31 is wound around the rotary shaft 52 having a quadrangular cross section as the electronic component side surface separating means 5A.
次に、断面4角形の回転軸52を回転させて、電子部品基板3の複数のLEDチップ21の一行が回転軸52の上面位置に来たときに、回転軸52の回転を停止させ、反射板71を受光素子72と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。この場合、5個のLEDチップ21を空けて、次の反射板71が順次複数用意されている。 Next, the rotation shaft 52 having a quadrangular cross section is rotated, and when one row of the plurality of LED chips 21 of the electronic component board 3 comes to the upper surface position of the rotation shaft 52, the rotation of the rotation shaft 52 is stopped and reflected. The plate 71 is lowered together with the light receiving element 72 and the periphery of a predetermined number of LED chips 21 (here, 5) is covered with the reflection plate 71. In this case, five LED chips 21 are provided, and a plurality of subsequent reflectors 71 are sequentially prepared.
続いて、断面4角形の回転軸52の角部に巻き付けられて、隣接する前後のLEDチップ21間が角部に沿って大きく直角に開口して側面同士が大きく離間し、回転軸52の上面に位置し、かつ上面が反射板71で覆われたLEDチップ21の側面の+端子と−端子に対して、2本のニードル状のプローブピン61を押し当てて、2本のニードル状のプローブピン61から所定電圧をLEDチップ21の側面の+端子と−端子に供給して発光させる。順次発光させるときに、カウンタにて何番目のLEDチップ21が発光しているかをチップ良否判定部73に知らせる。 Subsequently, it is wound around the corner of the rotary shaft 52 having a quadrangular cross section, the adjacent front and rear LED chips 21 are opened at a right angle along the corner, and the side surfaces are greatly separated from each other. The two needle-like probe pins 61 are pressed against the + terminal and the − terminal on the side surface of the LED chip 21 whose upper surface is covered with the reflecting plate 71, and two needle-like probes A predetermined voltage is supplied from the pin 61 to the + terminal and the − terminal on the side surface of the LED chip 21 to emit light. When sequentially emitting light, the chip quality determination unit 73 is informed of which LED chip 21 is emitting light by the counter.
このとき、受光素子72からの撮像信号に基づいて、チップ良否判定部73がLEDチップ21の発光量と閾値を比較してLEDチップ21の良否判定する。さらに、チップ良否判定部73が判定した結果がNG(不良)の場合は、その座標位置(アドレス情報)を記憶部(RAM)に記憶させておく。この座標位置(アドレス情報)は、複数のLEDチップ21のマトリクス状の並びにおいて、行方向をXとし、列方向をYとして座標(X、Y)でLEDチップ21の位置を特定する。この場合は、列方向Yが「1」として、行方向Xの位置番号が1〜5、11〜15、21〜25、・・の検査を実行し、座標(21、1)がNGの場合にこれを記憶部(RAM)に記憶させておく。これは上記実施形態1の場合と同様である。 At this time, based on the imaging signal from the light receiving element 72, the chip quality determination unit 73 compares the light emission amount of the LED chip 21 and the threshold value to determine the quality of the LED chip 21. Furthermore, when the result determined by the chip pass / fail determination unit 73 is NG (defective), the coordinate position (address information) is stored in the storage unit (RAM). This coordinate position (address information) specifies the position of the LED chip 21 by coordinates (X, Y), where X is the row direction and Y is the column direction in the matrix arrangement of the plurality of LED chips 21. In this case, when the column direction Y is “1” and the position numbers in the row direction X are 1 to 5, 11 to 15, 21 to 25,..., And the coordinates (21, 1) are NG This is stored in a storage unit (RAM). This is the same as in the case of the first embodiment.
その後、複数の反射板71を受光素子22と共に一旦上げて、5個のLEDチップ21分だけシフトして再び、複数の反射板71を受光素子22と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。 Thereafter, the plurality of reflecting plates 71 are once lifted together with the light receiving elements 22, shifted by five LED chips 21, and then the plurality of reflecting plates 71 are lowered together with the light receiving elements 22 to reduce a predetermined number of LED chips 21 (here, 5) are covered with a reflector 71.
続いて、回転軸52の上面に位置し、かつ上面が反射板71で覆われたLEDチップ21の側面の+端子と−端子に対して、2本のニードル状のプローブピン61を押し当てて、2本のニードル状のプローブピン61から所定電圧をLEDチップ21の側面の+端子と−端子に供給してLEDチップ21の発光を行う。順次発光させるときに、カウンタにて何番目のLEDチップ21が発光しているかをチップ良否判定部73に知らせる。 Subsequently, two needle-like probe pins 61 are pressed against the + terminal and the − terminal on the side surface of the LED chip 21 which is located on the upper surface of the rotating shaft 52 and whose upper surface is covered with the reflection plate 71. A predetermined voltage is supplied from the two needle-like probe pins 61 to the + terminal and the − terminal on the side surface of the LED chip 21 to cause the LED chip 21 to emit light. When sequentially emitting light, the chip quality determination unit 73 is informed of which LED chip 21 is emitting light by the counter.
このとき、受光素子72からの撮像信号に基づいて、チップ良否判定部73がLEDチップ21の発光量と閾値を比較してLEDチップ21の良否判定する。さらに、チップ良否判定部73が判定した結果がNG(不良)の場合は、その座標位置(アドレス情報)を記憶部(RAM)に記憶させておく。この座標位置(アドレス情報)は、複数のLEDチップ21のマトリクス状の並びにおいて、行方向をXとし、列方向をYとして座標(X、Y)でLEDチップ21の位置を特定する。この場合は、列方向Yが「1」として、行方向Xの位置番号が6〜10、16〜20、26〜30、・・の検査を実行し、NGがなければ記憶部(RAM)へのNG情報は記憶されない。これは上記実施形態1の場合と同様である。 At this time, based on the imaging signal from the light receiving element 72, the chip quality determination unit 73 compares the light emission amount of the LED chip 21 and the threshold value to determine the quality of the LED chip 21. Furthermore, when the result determined by the chip pass / fail determination unit 73 is NG (defective), the coordinate position (address information) is stored in the storage unit (RAM). This coordinate position (address information) specifies the position of the LED chip 21 by coordinates (X, Y), where X is the row direction and Y is the column direction in the matrix arrangement of the plurality of LED chips 21. In this case, it is assumed that the column direction Y is “1”, and the position numbers in the row direction X are 6 to 10, 16 to 20, 26 to 30... No NG information is stored. This is the same as in the case of the first embodiment.
これによって、一行の複数のLEDチップ21の発光量の測定検査が終了する。次に、断面4角形の回転軸52をLEDチップ21の1個分だけ角度90度だけ回転させて、電子部品基板3の次の複数のLEDチップ21の一行が回転軸52の上面に来たときに、回転軸52の回転を停止させ、複数の反射板71を受光素子22と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆い、次の一行の複数のLEDチップ21の発光量の測定検査を始める。これを繰り返して、所定列で所定行の複数のLEDチップ21の発光量の測定検査を実行することができる。 Thereby, the measurement inspection of the light emission amount of the plurality of LED chips 21 in one row is completed. Next, the rotation shaft 52 having a square cross section is rotated by an angle of 90 degrees by one LED chip 21, and one row of the next plurality of LED chips 21 on the electronic component substrate 3 comes to the upper surface of the rotation shaft 52. Sometimes, the rotation of the rotating shaft 52 is stopped, the plurality of reflecting plates 71 are lowered together with the light receiving elements 22, and the periphery of a predetermined number of LED chips 21 (here, five) is covered with the reflecting plate 71. The measurement inspection of the light emission amount of the LED chip 21 is started. By repeating this, the measurement inspection of the light emission amounts of the plurality of LED chips 21 in a predetermined row in a predetermined column can be executed.
本実施形態2の場合は、上記実施形態1の場合と比べて、隣接する前後のLEDチップ21間が角部に沿って大きく直角に開口して側面同士が大きく離間するため、上面が反射板71で覆われたLEDチップ21の側面の+端子と−端子に対して、2本のニードル状のプローブピン61を押し当て易い。 In the case of the second embodiment, compared to the case of the first embodiment, the adjacent front and rear LED chips 21 are opened at a right angle along the corners and the side surfaces are greatly separated from each other. The two needle-like probe pins 61 are easily pressed against the + terminal and the − terminal on the side surface of the LED chip 21 covered with 71.
以上により、本実施形態2によれば、断面4角形の回転軸52(回転シャフト)に電子部品基板3を沿わせると、電子部品基板3の厚みによる内径と外径の差により、隣接する前後のLEDチップ21間が角部に沿って大きく直角に開口して側面同士が大きく離間するため、相互に導通状態にあるチップ間をより確実に絶縁することができて、この開口したLEDチップ21の側面の端子に、2本のニードル状のプローブピン61を押し当て易く、この基板状態のままでテスト工程をより容易かつ確実に実施することができる。 As described above, according to the second embodiment, when the electronic component substrate 3 is placed along the rotation shaft 52 (rotary shaft) having a quadrangular cross section, due to the difference between the inner diameter and the outer diameter due to the thickness of the electronic component substrate 3, Since the LED chips 21 are opened at a right angle along the corners and the side surfaces are separated from each other, the chips that are in a conductive state can be more reliably insulated from each other. The two needle-like probe pins 61 can be easily pressed against the terminal on the side surface, and the test process can be carried out more easily and reliably in this substrate state.
なお、本実施形態2では、電子部品側面離間手段5Aが断面4角形の回転軸52を用いて電子部品基板3を吊り下げる簾方式とすることにより、プローブポイントが1つの回転軸上で数箇所設定できる場合について説明したが、これに限らず、図14に示すように、電子部品側面離間手段5Aとして、断面4角形の回転軸52を上下に2つ配置し、下側の回転軸52から上側の回転軸52に電子部品基板3を巻きつけるように構成してもよい。この場合、端子接続手段6Aとして、LEDチップ21の側面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピン61を押し当てて電気的に接続させるが、これを2箇所で行うことになる。即ち、プローブピン61のLEDチップ21への接続動作を回転軸52毎に行うことになる。また同様に、断面円形のロール51を上下に2つ配置し、下側のロール51から上側のロール51に電子部品基板3を巻きつけるようにして、電子部品側面離間手段5を構成するようにしてもよい。この場合、端子接続手段6として、LEDチップ21の底面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピン61を押し当てて電気的に接続させるが、これをロール51毎に行うことになる。これらの回転軸52やロール51の数は、3箇所に設けてもよいし、4箇所に設けてもよい。要するに、電子部品側面離間手段は、断面が円形または多角形のロールおよび断面多角形の回転軸のいずれかを、一または複数配置し、一または複数配置毎に端子接続手段を設ければよい。 In the second embodiment, the electronic component side surface separating means 5A employs a scissors method in which the electronic component substrate 3 is suspended using the rotation shaft 52 having a quadrangular cross section, so that probe points are located at several locations on one rotation shaft. Although the case where it can be set has been described, the present invention is not limited to this, and as shown in FIG. You may comprise so that the electronic component board | substrate 3 may be wound around the upper rotating shaft 52. FIG. In this case, as the terminal connecting means 6A, two needle-like probe pins 61 that are insulated from each other are pressed against and electrically connected to the + terminal and the − terminal on the side surface of the LED chip 21. It will be done in two places. That is, the connecting operation of the probe pin 61 to the LED chip 21 is performed for each rotating shaft 52. Similarly, the electronic component side surface separation means 5 is configured by arranging two rolls 51 having a circular section in the upper and lower directions and winding the electronic component substrate 3 from the lower roll 51 to the upper roll 51. May be. In this case, as the terminal connection means 6, two needle-like probe pins 61 that are insulated from each other are pressed against and electrically connected to the + terminal and the − terminal on the bottom surface of the LED chip 21. This is performed for each roll 51. The number of these rotating shafts 52 and rolls 51 may be provided at three locations or at four locations. In short, the electronic component side surface separation means may be configured by arranging one or a plurality of rolls having a circular or polygonal cross section and a rotating shaft having a polygonal cross section, and providing a terminal connecting means for each arrangement.
これによって、電子部品側面離間手段5Aが断面4角形の回転軸52を用いて電子部品基板3を吊り下げる簾方式とすることにより、検査するプローブポイントが1つの回転軸上で数箇所設定できるが、回転軸52を増やすことで検査するプローブポイントを更に増加させることができる。 As a result, the electronic component side surface separating means 5A employs a saddle method in which the electronic component substrate 3 is suspended using the rotation shaft 52 having a quadrangular cross section, so that several probe points to be inspected can be set on one rotation shaft. The probe points to be inspected can be further increased by increasing the rotation shaft 52.
なお、本実施形態2では、基板上にアセンブリされた複数のLEDチップ21は相互に電気的に接続されているのを、電気的に互いに遮断して個々のLEDチップ21を発光させることができるように、電子部品基板3を回転軸52の角部に沿わせて角度90度(断面4角形)折り曲げることにより、隣接したLEDチップ21間を大きく開口して電気的導通を遮断し、測定対象のLEDチップ21のみを発光制御することが可能となる場合について説明したが、開口角度が90度に限らず、回転軸52を例えば3箇所に増やした場合に、開口角度は角度90度よりも減少するが、プローブコンタクトが可能な角度であれば問題がない。 In the second embodiment, the plurality of LED chips 21 assembled on the substrate are electrically connected to each other, so that the individual LED chips 21 can emit light by being electrically disconnected from each other. In this way, by bending the electronic component board 3 along the corner of the rotating shaft 52 at an angle of 90 degrees (cross-sectional quadrangular shape), a large opening is formed between adjacent LED chips 21 to cut off the electrical continuity, and the measurement object However, the opening angle is not limited to 90 degrees, and when the rotation shaft 52 is increased to, for example, three positions, the opening angle is more than 90 degrees. However, there is no problem as long as the probe contact is possible.
(実施形態3)
上記実施形態1では、電子部品側面離間手段5の断面が円形または多角形の筒型ロール方式について説明したが、本実施形態3では、上記上記実施形態1の所定列で所定行の複数のLEDチップ21の発光量の測定検査に加えて、この1行の複数のLEDチップ21の発光量の測定検査の前後の1行の複数のLEDチップ21についてDC検査などの電気的検査を行う場合について説明する。
(Embodiment 3)
In the first embodiment, the electronic component side surface separation means 5 has been described with respect to the cylindrical roll method in which the cross section of the electronic component side surface separating means 5 is circular or polygonal. However, in the third embodiment, a plurality of LEDs in a predetermined row in the predetermined column of the first embodiment. In addition to the measurement inspection of the light emission amount of the chip 21, an electrical inspection such as a DC inspection is performed on the plurality of LED chips 21 in one row before and after the measurement inspection of the light emission amount of the plurality of LED chips 21 in one row. explain.
図6は、本発明の実施形態3における電子部品動作機能測定装置の電子部品側面離間手段および電気的動作機能測定手段の要部構成例を模式的に示す構成図である。図7は、本発明の実施形態3における電子部品動作機能測定装置の端子接続手段の要部構成例を模式的に示す構成図である。 FIG. 6 is a block diagram schematically showing an example of the configuration of the main parts of the electronic component side surface separation means and the electrical operation function measurement means of the electronic component operation function measurement apparatus according to Embodiment 3 of the present invention. FIG. 7 is a configuration diagram schematically showing a configuration example of a main part of the terminal connecting means of the electronic component operation function measuring apparatus according to Embodiment 3 of the present invention.
図6および図7において、本実施形態1の電子部品動作機能測定装置1Bは、裏面にシートが貼られた状態で個々に分断された複数のLEDチップ21がマトリクス状に整列した複数個搭載の電子部品基板3を曲面に沿わせて折り曲げ、折り曲げ方向前後に隣接するLEDチップ21間の側面を開口部4として開口させて離間させる電子部品側面離間手段5と、この折り曲げ方向前後の両側面が離間したLEDチップ21毎の裏面の所定端子に順次接続させる光学テスト用端子接続および、光学テストを行う1行の複数のLEDチップ21とは別の列の1行の複数のLEDチップ21に対して電気的テストを行うために、折り曲げ方向前後の両側面が離間した1行の全複数のLEDチップ21の裏面の所定端子に同時に接続させる電気的テスト用端子接続を行う端子接続手段6Bと、端子接続手段6Bを介して一または複数のLEDチップ21を駆動させた状態で一または複数の電子部品2の電気的動作機能(光学テストおよび電気的テスト)を検査する電気的動作機能測定手段7とを有している。 6 and 7, the electronic component operation function measuring apparatus 1B according to the first embodiment has a plurality of LED chips 21 that are individually divided in a state where a sheet is pasted on the back surface and are arranged in a matrix. The electronic component substrate 3 is bent along a curved surface, and the side surfaces between the LED chips 21 adjacent to each other in the front and rear directions in the bending direction are opened as openings 4 to be separated from each other. An optical test terminal connection for sequentially connecting to a predetermined terminal on the back surface of each spaced LED chip 21 and a plurality of LED chips 21 in one row in a column different from the plurality of LED chips 21 in one row performing the optical test In order to perform an electrical test, an electrical test that is simultaneously connected to predetermined terminals on the back surface of a plurality of LED chips 21 in a row in which both side surfaces before and after the bending direction are separated from each other are performed. Terminal connection means 6B for performing terminal connection, and an electrical operation function (optical test and electrical test) of one or a plurality of electronic components 2 in a state where one or a plurality of LED chips 21 are driven via the terminal connection means 6B And an electrical operation function measuring means 7 for inspecting.
端子接続手段6Bは、LEDチップ21の裏面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピンが付いた台座を押し上げて、2本のニードル状のプローブピンが粘着シートを貫通して接続させるようになっている。この2本のニードルピンが付いた台座は、光学テスト時には、LEDチップ21毎に、ロール51に巻かれた電子部品基板3の1行(横方向)の複数のLEDチップ21の直下にそれぞれ配置されている。よって、1行(横方向)の複数のLEDチップ21を順次発光させる光学テストの場合は、2本のニードルピンが付いた台座を順次押し上げて、2本のプローブピンをLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のプローブピンから所定電源電圧を供給して順次発光させることができる。このとき、駆動電圧出力手段としての発光電圧出力源から2本のプローブピンに発光電圧を供給してLEDチップ21を発光駆動させる。 The terminal connecting means 6B pushes up the pedestal with the two needle-like probe pins insulated from each other with respect to the + terminal and the − terminal on the back surface of the LED chip 21 so that the two needle-like probe pins are The adhesive sheet is penetrated and connected. The pedestal with the two needle pins is arranged immediately below the plurality of LED chips 21 in one row (lateral direction) of the electronic component substrate 3 wound around the roll 51 for each LED chip 21 during the optical test. Has been. Therefore, in the case of an optical test in which a plurality of LED chips 21 in one row (horizontal direction) sequentially emit light, the pedestal with two needle pins is sequentially pushed up, and the two probe pins are connected to the + terminal of the LED chip 21. The LED chip 21 can be made to emit light sequentially by supplying a predetermined power supply voltage from two probe pins. At this time, the LED chip 21 is driven to emit light by supplying the light emission voltage to the two probe pins from the light emission voltage output source as the drive voltage output means.
この2本のニードルピンが付いた台座は、所定入力電圧に対する出力電流または出力電圧がどの程度かをテストするDCテストなどの電気的テスト時には、1行の複数のLEDチップ21の直下にそれぞれ配置されており、2本のニードルピンが付いた台座を全て同時に押し上げて、2本のプローブピンをLEDチップ21の+端子と−端子に全て電気的に接続させてLEDチップ21に2本のプローブピンから所定電源電圧を供給して、1行の複数のLEDチップ21の全てに所定入力電圧を供給してLEDチップ21毎の各出力電圧を同時に得ることができる。このLEDチップ21毎の各出力電圧に基づいて所定の閾値と比較してLEDチップ21の電気的特性の良否判定を行うことができる。 The pedestal with the two needle pins is disposed immediately below the plurality of LED chips 21 in one row at the time of an electrical test such as a DC test for testing the output current or the output voltage with respect to a predetermined input voltage. The two pedestals with two needle pins are pushed up at the same time, and the two probe pins are all electrically connected to the positive terminal and the negative terminal of the LED chip 21 so that two probes are connected to the LED chip 21. A predetermined power supply voltage is supplied from a pin, a predetermined input voltage is supplied to all of the plurality of LED chips 21 in one row, and each output voltage for each LED chip 21 can be obtained simultaneously. Based on each output voltage for each LED chip 21, it can be compared with a predetermined threshold value to determine whether the electrical characteristics of the LED chip 21 are good or bad.
このように、本実施形態3によれば、LEDチップ21の光学特性の良否判定と電気的特性の良否判定とを、電子部品側面離間手段5としての断面が円形の筒型ロール53での測定位置を異ならせるだけで、同時に検査することができて検査時間の大幅な短縮になる。ここでは、光学特性の良否判定と電気的特性の良否判定とは、角度180度異なる位置で行うようにしたが、これに限らず、光学特性の良否判定と電気的特性の良否判定のいずれか一方位置に対してその前後角度90度の位置で他方を行ってもよい。 As described above, according to the third embodiment, whether the optical characteristics of the LED chip 21 are good or bad and whether the electrical characteristics are good or bad are measured by the cylindrical roll 53 having a circular cross section as the electronic component side surface separation means 5. By simply changing the position, the inspection can be performed at the same time, which greatly reduces the inspection time. Here, the optical property pass / fail determination and the electrical property pass / fail determination are performed at positions different by an angle of 180 degrees. However, the present invention is not limited to this, and either the optical property pass / fail determination or the electrical property pass / fail determination is made. You may perform the other at the position of the 90 degree front-back angle with respect to one position.
したがって、端子接続手段6Bは、LEDチップ21毎にLEDチップ21の端子にプローブピンを接続してLEDチップ21の光学的特性を検査するための第1端子接続手段6と、光学的特性を検査する複数のLEDチップ21とは別の一行の複数のLEDチップ21全体の端子に同時にプローブピンを接続してLEDチップ21の電気的特性を検査するための第2端子接続手段62とを有している。 Accordingly, the terminal connection means 6B is connected to the first terminal connection means 6 for inspecting the optical characteristics of the LED chip 21 by connecting the probe pin to the terminal of the LED chip 21 for each LED chip 21, and inspecting the optical characteristics. And a second terminal connection means 62 for inspecting the electrical characteristics of the LED chip 21 by simultaneously connecting probe pins to the terminals of the entire LED chip 21 in a row different from the plurality of LED chips 21. ing.
(実施形態4)
上記実施形態1では、光学テスト時に、LEDチップ21毎に順次、2本のプローブピンをその台座と共に押し上げてLEDチップ21の+端子と−端子に2本のプローブピンを電気的に接続させてLEDチップ21を順次発光させるように構成したが、本実施形態4では、この1行の複数のLEDチップ21を複数個(ここでは5個)のブロックでそれぞれ順次一つずつ発光させる楔方式の具体例について説明する。
(Embodiment 4)
In the first embodiment, at the time of the optical test, the two probe pins are sequentially pushed up together with the pedestal for each LED chip 21 to electrically connect the two probe pins to the + terminal and the − terminal of the LED chip 21. Although the LED chips 21 are configured to emit light sequentially, in the fourth embodiment, a plurality of LED chips 21 in one row are sequentially emitted one by one in a plurality of (here, 5) blocks. A specific example will be described.
図8(a)〜図8(c)は、本発明の実施形態4における電子部品動作機能測定装置の端子接続手段の第1例を模式的に示す楔方式の構成図である。 FIG. 8A to FIG. 8C are wedge-type configuration diagrams schematically showing a first example of the terminal connection means of the electronic component operation function measuring apparatus according to Embodiment 4 of the present invention.
図8(a)〜図8(c)に示すように、第1例の楔方式の端子接続手段6Bは、LEDチップ21の裏面の+端子と−端子に対して電気的に接続可能であり、互いに絶縁された2本のニードル状プローブピンであるコンタクトピン63と、上面に2本のコンタクトピン63が所定間隔(+端子と−端子の間隔と同間隔)で固定され、下面が上下(縦方向)動可能なように傾斜が付いたテーパ面となっているコンタクトユニット64と、コンタクトユニット64のテーパ面の下方位置で、長尺軸で左右方向(横方向)に移動自在に構成され、上面に長尺方向所定間隔に楔状突起部65aが配設された移動軸65とを有している。 As shown in FIGS. 8A to 8C, the wedge-type terminal connection means 6B of the first example can be electrically connected to the + terminal and the − terminal on the back surface of the LED chip 21. The contact pins 63 which are two needle-like probe pins insulated from each other and the two contact pins 63 are fixed to the upper surface at a predetermined interval (the same interval as the interval between the + terminal and the − terminal), and the lower surface is vertically ( The contact unit 64 has a tapered surface that is inclined so that it can move, and is configured to be movable in the left-right direction (lateral direction) on the long shaft at a position below the tapered surface of the contact unit 64. And a moving shaft 65 provided with wedge-shaped projections 65a at predetermined intervals in the longitudinal direction on the upper surface.
上面に2本のコンタクトピン63が付いたコンタクトユニット64は、LEDチップ21の裏面毎に上下動自在に構成されている。即ち、コンタクトピン63およびコンタクトユニット64は、光学テスト時に、LEDチップ21毎に、ロール51に巻かれた電子部品基板3の1行(横方向)の複数のLEDチップ21の直下にそれぞれ配置されている。 The contact unit 64 having two contact pins 63 on the upper surface is configured to be movable up and down for each rear surface of the LED chip 21. In other words, the contact pin 63 and the contact unit 64 are arranged immediately below the plurality of LED chips 21 in one row (lateral direction) of the electronic component substrate 3 wound around the roll 51 for each LED chip 21 during the optical test. ing.
上記構成の端子接続手段6Bの動作について説明する。 The operation of the terminal connecting means 6B having the above configuration will be described.
まず、図8(a)から図8(b)に示すように、光学テスト時に、反射板71を受光素子72と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。この場合、5個のLEDチップ21を空けて、次の反射板71が順次複数用意されている。 First, as shown in FIG. 8A to FIG. 8B, during the optical test, the reflecting plate 71 is lowered together with the light receiving element 72, and the periphery of the predetermined number of LED chips 21 (here, five) is reflected on the reflecting plate 71. Cover with. In this case, five LED chips 21 are provided, and a plurality of subsequent reflectors 71 are sequentially prepared.
この状態で、移動軸65が右側に移動して、移動軸65の上面にある楔状突起部65aのテーパ面が、2本のコンタクトピン63が付いたコンタクトユニット64の下面のテーパ面を押し上げて、ここでは第1番目、第11番目および第21番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給して発光させる。第1番目、第11番目および第21番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が行われる。要するに、楔状突起部65aを1チップ分移動させると、2本のコンタクトピン63が付いたコンタクトユニット64が持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けてLEDチップ21の裏面の+端子と−端子に接続する。 In this state, the moving shaft 65 moves to the right side, and the tapered surface of the wedge-shaped protrusion 65a on the upper surface of the moving shaft 65 pushes up the tapered surface of the lower surface of the contact unit 64 with the two contact pins 63 attached. Here, two needle-like contact pins 63 penetrate the adhesive sheet 31 (UV sheet) with respect to the + terminal and the − terminal on the back surface of each of the first, eleventh and twenty-first LED chips 21. And make an electrical connection. As described above, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and the LED chip 21 is supplied with a predetermined power supply voltage from the two contact pins 63 to emit light. An optical test (inspection of whether the amount of light is equal to or greater than a threshold value) is performed on each of the first, eleventh and twenty-first LED chips 21 that have emitted light. In short, when the wedge-shaped protrusion 65a is moved by one chip, the contact unit 64 with the two contact pins 63 is lifted, and the two contact pins 63 penetrate through the adhesive sheet 31 (UV sheet), so that the LED chip 21 Connect to the + and-terminals on the back.
続いて、図8(b)から図8(c)に示すように、移動軸65を更に右側に移動して、移動軸65の上面にある楔状突起部65aのテーパ面が、2本のコンタクトピン63が付いたコンタクトユニット64の下面のテーパ面を押し上げて、ここでは第2番目、第7番目および第12番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給してLEDチップ21を発光させる。第2番目、第12番目および第22番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が行われる。要するに、楔状突起部65aを更に1チップ分移動させると、先ほどのコンタクトユニット64は下がって元の位置に戻り、次のコンタクトユニット64が2本のコンタクトピン63と共に持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けて次のLEDチップ21の裏面の+端子と−端子に接続する。 Subsequently, as shown in FIG. 8B to FIG. 8C, the moving shaft 65 is further moved to the right side, and the tapered surface of the wedge-shaped protrusion 65a on the upper surface of the moving shaft 65 has two contacts. The tapered surface of the lower surface of the contact unit 64 with the pin 63 is pushed up, and here, two pieces of the second, seventh and twelfth LED chips 21 have a positive terminal and a negative terminal. The needle-like contact pin 63 penetrates the adhesive sheet 31 (UV sheet) and is electrically connected. In this way, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and a predetermined power supply voltage is supplied to the LED chip 21 from the two contact pins 63 to emit light from the LED chip 21. Let An optical test (inspection of whether the amount of light is equal to or greater than a threshold value) is performed on each of the second, twelfth, and twenty-second light-emitting LED chips 21. In short, when the wedge-shaped protrusion 65a is further moved by one chip, the previous contact unit 64 is lowered and returned to the original position, and the next contact unit 64 is lifted together with the two contact pins 63, and the adhesive sheet 31 (UV sheet). ) Pass through the two contact pins 63 and connect to the + terminal and the − terminal on the back surface of the next LED chip 21.
この動作が繰り返されて、第1〜第5番目、第11〜第15番目および第21〜25番目の各5個の発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)が完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 This operation is repeated, and an optical test (inspection of whether the amount of light is equal to or greater than the threshold) of each of the five light-emitting LED chips 21 of 1st to 5th, 11th to 15th and 21st to 25th. Complete. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
次に、複数の反射板71を受光素子22と共に一旦上げて、光学テストが完了したLEDチップ21の5個分を超えて右側にシフトして再び、複数の反射板71を受光素子22と共に下ろして次の所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。 Next, the plurality of reflecting plates 71 are once lifted together with the light receiving elements 22, shifted to the right side over five LED chips 21 for which the optical test has been completed, and then the plurality of reflecting plates 71 together with the light receiving elements 22 are lowered. Then, the periphery of the next predetermined number of LED chips 21 (here, five) is covered with a reflecting plate 71.
上記検査動作が繰り返されて、第6〜第10番目、第16〜第20番目および第26〜30番目が各5個の順次発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)が完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 The above-described inspection operation is repeated, and the sixth to tenth, sixteenth to twentieth and twenty-sixth to thirtieth optical tests of each of the five LED chips 21 that emit light sequentially (inspection of whether the light quantity is equal to or greater than a threshold ) Is completed. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
以上によって、1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことができる。その後、ロール54を所定距離だけ回転させて、次の1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことになる。 As described above, an optical test can be performed by sequentially emitting light from a plurality of LED chips 21 in one row (lateral direction). Thereafter, the roll 54 is rotated by a predetermined distance, and the next one row (horizontal direction) of the plurality of LED chips 21 is caused to emit light sequentially to perform an optical test.
(実施形態5)
上記実施形態1では、光学テスト時に、LEDチップ21毎に順次、2本のプローブピンをその台座と共に押し上げてLEDチップ21の+端子と−端子に2本のプローブピンを電気的に接続させてLEDチップ21を順次発光させるように構成したが、本実施形態5では、この1行の複数のLEDチップ21を複数個(ここでは5個)のブロックでそれぞれ順次一つずつ発光させるエアープッシュ方式の具体例について説明する。
(Embodiment 5)
In the first embodiment, at the time of the optical test, the two probe pins are sequentially pushed up together with the pedestal for each LED chip 21 to electrically connect the two probe pins to the + terminal and the − terminal of the LED chip 21. Although the LED chips 21 are configured to emit light sequentially, in the fifth embodiment, an air push method in which the plurality of LED chips 21 in one row sequentially emit light one by one in a plurality of (here, 5) blocks. A specific example will be described.
図9(a)〜図9(c)は、本発明の実施形態5における電子部品動作機能測定装置の端子接続手段の第2例を模式的に示すエアープッシュ方式の構成図である。 FIGS. 9A to 9C are air push configuration diagrams schematically showing a second example of the terminal connection means of the electronic component operation function measuring apparatus according to the fifth embodiment of the present invention.
図9(a)〜図9(c)に示すように、第2例のエアープッシュ方式の端子接続手段6Cは、LEDチップ21の裏面の+端子と−端子に対して電気的に接続可能であり、互いに絶縁された2本のニードル状プローブピンであるコンタクトピン63と、上面に2本のコンタクトピン63が所定間隔(+端子と−端子の間隔と同間隔)で固定され、下面がエアープッシュの有無により上下(縦方向)動可能なように開放されているコンタクトユニット66と、コンタクトユニット66の開放口の下方位置で、左右方向の長尺管で回転自在に構成され、LEDチップ21の配置間隔で角度を変えてエアー通気孔67aが所定数(ここでは5個)づつ所定間隔に形成された圧力エアー管67とを有している。 As shown in FIGS. 9A to 9C, the air push type terminal connection means 6 </ b> C of the second example can be electrically connected to the + terminal and the − terminal on the back surface of the LED chip 21. There are two needle-like probe pins insulated from each other, and the two contact pins 63 are fixed to the upper surface at a predetermined interval (the same interval as the + terminal and the-terminal), and the lower surface is air. The LED unit 21 is configured to be freely rotatable by a left and right long tube at a position below the opening of the contact unit 66 that can be moved up and down (vertically) by the presence or absence of a push. The pressure air pipes 67 are formed with predetermined numbers (five here) of air vent holes 67a at predetermined intervals by changing the angle according to the arrangement interval.
上面に2本のコンタクトピン63が付いたコンタクトユニット66は、LEDチップ21の裏面毎に上下動自在に構成されている。即ち、コンタクトピン63およびコンタクトユニット66は、光学テスト時に、LEDチップ21毎に、ロール51に巻かれた電子部品基板3の1行(横方向)の複数のLEDチップ21の直下にそれぞれ同じ数だけ配置されている。 The contact unit 66 having two contact pins 63 on the upper surface is configured to be movable up and down for each rear surface of the LED chip 21. That is, the same number of contact pins 63 and contact units 66 are provided immediately below the plurality of LED chips 21 in one row (lateral direction) of the electronic component substrate 3 wound around the roll 51 for each LED chip 21 during the optical test. Just arranged.
上記構成の端子接続手段6Cの動作について説明する。 The operation of the terminal connecting means 6C having the above configuration will be described.
まず、図9(a)から図9(b)に示すように、光学テスト時に、反射板71を受光素子72と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。この場合、5個のLEDチップ21を空けて、次の反射板71が順次複数用意されている。 First, as shown in FIGS. 9A to 9B, during the optical test, the reflecting plate 71 is lowered together with the light receiving elements 72, and the reflecting plate 71 surrounds a predetermined number of LED chips 21 (here, five). Cover with. In this case, five LED chips 21 are provided, and a plurality of subsequent reflectors 71 are sequentially prepared.
この状態で、長尺の圧力エアー管67が所定角度だけ回転して、圧力エアー管67のエアー通気孔67aが、2本のコンタクトピン63が付いたコンタクトユニット66の下面開放口の直下に来て、エアー通気孔67aからその下面開放口に向けてエアープッシュしてコンタクトユニット66を2本のコンタクトピン63と共に押し上げ、ここでは第1番目、第11番目および第21番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給して発光させる。第1番目、第11番目および第21番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が行われる。要するに、圧力エアー管67を角度360度/チップ数N(Nは5個)の角度分だけ回転させると、2本のコンタクトピン63が付いたコンタクトユニット66がエアープッシュされて持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けてLEDチップ21の裏面の+端子と−端子に接続する。 In this state, the long pressure air pipe 67 rotates by a predetermined angle, and the air vent hole 67a of the pressure air pipe 67 comes immediately below the lower surface opening of the contact unit 66 with the two contact pins 63 attached. Then, air contact is pushed from the air vent 67a toward the lower surface opening and the contact unit 66 is pushed up together with the two contact pins 63. Here, each of the first, eleventh and twenty-first LED chips 21 is pushed. Two needle-like contact pins 63 penetrate the adhesive sheet 31 (UV sheet) and are electrically connected to the + terminal and the − terminal on the back surface. As described above, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and the LED chip 21 is supplied with a predetermined power supply voltage from the two contact pins 63 to emit light. An optical test (inspection of whether the amount of light is equal to or greater than a threshold value) is performed on each of the first, eleventh and twenty-first LED chips 21 that have emitted light. In short, when the pressure air pipe 67 is rotated by an angle of 360 degrees / the number of chips N (N is 5), the contact unit 66 with the two contact pins 63 is pushed up and lifted, and the adhesive sheet 31 The two contact pins 63 penetrate through the (UV sheet) and connect to the + terminal and the − terminal on the back surface of the LED chip 21.
続いて、図9(b)から図9(c)に示すように、圧力エアー管67を更に所定角度だけ回転させて、次のエアー通気孔67aが、2本のコンタクトピン63が付いたコンタクトユニット66の下面開放口の直下に来て、そのエアー通気孔67aからその下面開放口に向けてエアープッシュしてそのコンタクトユニット66だけを2本のコンタクトピン63と共に押し上げる。ここでは、第2番目、第12番目および第22番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給してLEDチップ21を発光させる。第2番目、第12番目および第22番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が行われる。要するに、圧力エアー管67を更に1チップ分の角度(角度360度/チップ数5)だけ回転させると、先ほどのコンタクトユニット66はエアープッシュが無くなって下がって元の位置に戻り、次のコンタクトユニット66が2本のコンタクトピン63と共にエアープッシュにより持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けて次のLEDチップ21の裏面の+端子と−端子に接続する。 Subsequently, as shown in FIGS. 9B to 9C, the pressure air pipe 67 is further rotated by a predetermined angle so that the next air vent 67a is a contact with two contact pins 63 attached thereto. It comes directly below the lower surface opening of the unit 66, and air is pushed from the air vent hole 67 a toward the lower surface opening to push up only the contact unit 66 together with the two contact pins 63. Here, two needle-like contact pins 63 penetrate the adhesive sheet 31 (UV sheet) with respect to the + terminal and the − terminal on the back surface of each of the second, twelfth and twenty-second LED chips 21. And make an electrical connection. In this way, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and a predetermined power supply voltage is supplied to the LED chip 21 from the two contact pins 63 to emit light from the LED chip 21. Let An optical test (inspection of whether the amount of light is equal to or greater than a threshold value) is performed on each of the second, twelfth, and twenty-second light-emitting LED chips 21. In short, when the pressure air pipe 67 is further rotated by an angle corresponding to one chip (angle 360 degrees / number of chips 5), the previous contact unit 66 returns to its original position without air push, and returns to the next contact unit. 66 is lifted together with the two contact pins 63 by air push, and the two contact pins 63 penetrate through the adhesive sheet 31 (UV sheet) to connect to the + terminal and the − terminal on the back surface of the next LED chip 21.
この動作が繰り返されて、第1〜第5番目、第11〜第15番目および第21〜25番目の各5個の順次発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)が完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 This operation is repeated, and an optical test (inspection of whether the amount of light is equal to or greater than a threshold value) of each of the five LED chips 21 that sequentially emit light, the first to fifth, the 11th to 15th, and the 21st to 25th. Is completed. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
次に、複数の反射板71を受光素子22と共に一旦上げて、光学テストが完了したLEDチップ21の5個分を超えて右側にシフトして再び、複数の反射板71を受光素子22と共に下ろして次の所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。 Next, the plurality of reflecting plates 71 are once lifted together with the light receiving elements 22, shifted to the right side over five LED chips 21 for which the optical test has been completed, and then the plurality of reflecting plates 71 together with the light receiving elements 22 are lowered. Then, the periphery of the next predetermined number of LED chips 21 (here, five) is covered with a reflecting plate 71.
上記検査動作が繰り返されて、第6〜第10番目、第16〜第20番目および第26〜30番目が各5個の発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)が完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 The above-described inspection operation is repeated, and the sixth to tenth, sixteenth to twentieth, and twenty-sixth to thirtieth optical tests of each of the five light-emitting LED chips 21 (inspection of whether the amount of light is equal to or greater than a threshold) Is completed. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
以上によって、1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことができる。その後、ロール54を所定距離だけ回転させて、次の1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことになる。 As described above, an optical test can be performed by sequentially emitting light from a plurality of LED chips 21 in one row (lateral direction). Thereafter, the roll 54 is rotated by a predetermined distance, and the next one row (horizontal direction) of the plurality of LED chips 21 is caused to emit light sequentially to perform an optical test.
したがって、端子接続手段6Cは、LEDチップ21の裏面端子に対して電気的に接続するプローブピンであるコンタクトピン63と、該コンタクトピン63が上面に固定され、下面がエアープッシュの有無により縦方向に移動可能なように端面が開放されているコンタクトユニット66と、コンタクトユニット66の端面開放口の下方位置で、横方向の長尺管で回転自在に構成され、LEDチップ21の配置間隔で角度を変えて、エアープッシュ用のエアー通気孔67aが所定間隔に複数形成された圧力エアー管67と、コンタクトピン63に対してLEDチップ21を駆動させる駆動電圧を供給可能とする駆動電圧出力手段(図示せず)とを有している。 Accordingly, the terminal connecting means 6C includes a contact pin 63 that is a probe pin that is electrically connected to the back surface terminal of the LED chip 21, and the contact pin 63 is fixed to the upper surface, and the lower surface is in the vertical direction depending on the presence or absence of air push. The contact unit 66 is open at the end face so that it can be moved to the right, and is configured to be rotatable by a long horizontal tube at a position below the end face opening of the contact unit 66. And a driving voltage output means for supplying a driving voltage for driving the LED chip 21 to the contact pin 63 and a pressure air pipe 67 having a plurality of air push holes 67a formed at predetermined intervals. (Not shown).
(実施形態6)
上記実施形態1では、光学テスト時に、LEDチップ21毎に順次、2本のプローブピンをその台座と共に押し上げてLEDチップ21の+端子と−端子に2本のプローブピンを電気的に接続させてLEDチップ21を順次発光させるように構成したが、本実施形態6では、この1行の複数のLEDチップ21を複数個(ここでは5個)のブロックでそれぞれ順次一つずつ発光させる回転ドラム方式の具体例について説明する。
(Embodiment 6)
In the first embodiment, at the time of the optical test, the two probe pins are sequentially pushed up together with the pedestal for each LED chip 21 to electrically connect the two probe pins to the + terminal and the − terminal of the LED chip 21. Although the LED chips 21 are configured to emit light sequentially, in the sixth embodiment, a rotating drum system in which the plurality of LED chips 21 in one row are sequentially emitted one by one in a plurality of (here, 5) blocks. A specific example will be described.
図10(a)〜図10(c)は、本発明の実施形態6における電子部品動作機能測定装置の端子接続手段の第3例を模式的に示す回転ドラム方式の構成図である。 FIG. 10A to FIG. 10C are configuration diagrams of a rotating drum system schematically showing a third example of the terminal connecting means of the electronic component operation function measuring apparatus according to Embodiment 6 of the present invention.
図10(a)〜図10(c)に示すように、第3例の回転ドラム方式の端子接続手段6Dは、LEDチップ21の裏面の+端子と−端子に対して電気的に接続可能であり、互いに絶縁された2本のニードル状プローブピンであるコンタクトピン63と、上面に2本のコンタクトピン63が所定間隔(+端子と−端子の間隔と同間隔)で固定され、下面角部にアールが付いて上下(縦方向)動可能なように構成されているコンタクトユニット68と、コンタクトユニット68の下面位置で、左右方向の長尺円形軸で回転自在に構成され、LEDチップ21の配置間隔で角度を変えて突出ドラム部69aが所定数(ここでは5個)づつ所定間隔に形成された回転ドラム69とを有している。 As shown in FIGS. 10A to 10C, the rotary drum type terminal connecting means 6 </ b> D of the third example can be electrically connected to the + terminal and the − terminal on the back surface of the LED chip 21. The contact pin 63, which is two needle-like probe pins insulated from each other, and the two contact pins 63 are fixed to the upper surface at a predetermined interval (the same interval as the interval between the + terminal and the − terminal), and the lower surface corner portion The contact unit 68 is configured to be movable up and down (vertically) with a rounded corner, and is configured to be rotatable on a long circular axis in the left-right direction at the lower surface position of the contact unit 68. The projecting drum portion 69a has a rotating drum 69 formed at a predetermined interval by a predetermined number (here, five) by changing the angle at the arrangement interval.
上面に2本のコンタクトピン63が付いたコンタクトユニット68は、LEDチップ21の裏面毎に上下動自在に構成されている。即ち、コンタクトピン63およびコンタクトユニット68は、光学テスト時に、LEDチップ21毎に、ロール51に巻かれた電子部品基板3の1行(横方向)の複数のLEDチップ21の直下にそれぞれ同じ数だけ配置されている。 The contact unit 68 having two contact pins 63 on the upper surface is configured to be movable up and down for each rear surface of the LED chip 21. That is, the same number of contact pins 63 and contact units 68 are provided immediately below the plurality of LED chips 21 in one row (lateral direction) of the electronic component substrate 3 wound around the roll 51 for each LED chip 21 during the optical test. Just arranged.
上記構成の端子接続手段6Dの動作について説明する。 The operation of the terminal connecting means 6D having the above configuration will be described.
まず、図10(a)から図10(b)に示すように、光学テスト時に、反射板71を受光素子72と共に下ろして所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。この場合、5個のLEDチップ21を空けて、次の反射板71が順次複数用意されている。 First, as shown in FIGS. 10 (a) to 10 (b), during an optical test, the reflecting plate 71 is lowered together with the light receiving elements 72, and the reflecting plate 71 surrounds a predetermined number of LED chips 21 (here, five). Cover with. In this case, five LED chips 21 are provided, and a plurality of subsequent reflectors 71 are sequentially prepared.
この状態で、長尺の回転ドラム69が所定角度だけ回転して、回転ドラム69の突出ドラム部69aが、2本のコンタクトピン63が付いたコンタクトユニット68の下面の直下に移動して、コンタクトユニット68を2本のコンタクトピン63と共に押し上げ、ここでは第1番目、第11番目および第21番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給して発光させる。第1番目、第11番目および第21番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が同時に行われる。要するに、回転ドラム69を角度360度/チップ数N(Nは5個)の角度分だけ回転させると、2本のコンタクトピン63が付いたコンタクトユニット68が突出ドラム部69aにより持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けてLEDチップ21の裏面の+端子と−端子に接続する。 In this state, the long rotating drum 69 rotates by a predetermined angle, and the protruding drum portion 69a of the rotating drum 69 moves to a position directly below the lower surface of the contact unit 68 with the two contact pins 63 to contact the contacts. The unit 68 is pushed up together with the two contact pins 63, and here, two needle-like contact pins with respect to the + terminal and the − terminal on the back surface of the first, eleventh and twenty-first LED chips 21. 63 penetrates and is electrically connected to the adhesive sheet 31 (UV sheet). As described above, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and the LED chip 21 is supplied with a predetermined power supply voltage from the two contact pins 63 to emit light. An optical test (inspection of whether the amount of light is equal to or greater than a threshold) is simultaneously performed on the first, eleventh and twenty-first LED chips 21 that have emitted light. In short, when the rotary drum 69 is rotated by an angle of 360 degrees / the number of chips N (N is 5), the contact unit 68 with the two contact pins 63 is lifted by the protruding drum portion 69a, and the adhesive sheet 31 The two contact pins 63 penetrate through the (UV sheet) and connect to the + terminal and the − terminal on the back surface of the LED chip 21.
続いて、図10(b)から図10(c)に示すように、回転ドラム69を更に所定角度だけ回転させて、次の突出ドラム部69aが、2本のコンタクトピン63が付いたコンタクトユニット68の下面直下に来て、その突出ドラム部69aがコンタクトユニット68の下面を2本のコンタクトピン63と共に押し上げる。ここでは、第2番目、第12番目および第22番目の各LEDチップ21の裏面の+端子と−端子に対して、2本のニードル状のコンタクトピン63が粘着シート31(UVシート)を貫通して電気的に接続する。このように、2本のコンタクトピン63をLEDチップ21の+端子と−端子に電気的に接続させてLEDチップ21に2本のコンタクトピン63から所定電源電圧を供給してLEDチップ21を発光させる。第2番目、第12番目および第22番目の各発光したLEDチップ21に対して光学テスト(光量が閾値以上かどうかの検査)が行われる。要するに、回転ドラム69を更に1チップ分の角度(角度360度/チップ数5)だけ回転させると、先ほどのコンタクトユニット68は一番目の突出ドラム部69aから降りて下がって元の位置に戻り、次のコンタクトユニット68が2本のコンタクトピン63と共に2番目の突出ドラム部69aにより持ち上がり、粘着シート31(UVシート)を2本のコンタクトピン63が突き抜けて次のLEDチップ21の裏面の+端子と−端子に接続する。 Subsequently, as shown in FIGS. 10B to 10C, the rotating drum 69 is further rotated by a predetermined angle, and the next protruding drum portion 69 a is a contact unit having two contact pins 63. The projecting drum portion 69 a pushes up the lower surface of the contact unit 68 together with the two contact pins 63. Here, two needle-like contact pins 63 penetrate the adhesive sheet 31 (UV sheet) with respect to the + terminal and the − terminal on the back surface of each of the second, twelfth and twenty-second LED chips 21. And make an electrical connection. In this way, the two contact pins 63 are electrically connected to the + terminal and the − terminal of the LED chip 21, and a predetermined power supply voltage is supplied to the LED chip 21 from the two contact pins 63 to emit light from the LED chip 21. Let An optical test (inspection of whether the amount of light is equal to or greater than a threshold value) is performed on each of the second, twelfth, and twenty-second light-emitting LED chips 21. In short, when the rotating drum 69 is further rotated by an angle of one chip (angle 360 degrees / number of chips 5), the contact unit 68 descends from the first projecting drum portion 69a and returns to the original position. The next contact unit 68 is lifted together with the two contact pins 63 by the second protruding drum portion 69a, and the two contact pins 63 penetrate through the adhesive sheet 31 (UV sheet), and the + terminal on the back surface of the next LED chip 21 Connect to the-and-terminals.
この動作が繰り返されて、第1〜第5番目、第11〜第15番目および第21〜25番目の各5個が順次発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)が完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 By repeating this operation, the optical test of the LED chip 21 in which each of the first to fifth, 11th to 15th, and 21st to 25th light emitting elements sequentially emits light (inspection of whether the amount of light is equal to or greater than a threshold value). Is completed. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
次に、複数の反射板71を受光素子22と共に一旦上げて、光学テストが完了したLEDチップ21の5個分を超えて右側にシフトして再び、複数の反射板71を受光素子22と共に下ろして次の未検査の所定数のLEDチップ21(ここでは5個)の周囲を反射板71で覆う。 Next, the plurality of reflecting plates 71 are once lifted together with the light receiving elements 22, shifted to the right side over five LED chips 21 for which the optical test has been completed, and then the plurality of reflecting plates 71 together with the light receiving elements 22 are lowered. The periphery of the next predetermined number of uninspected LED chips 21 (here, five) is covered with a reflecting plate 71.
上記検査動作が繰り返されて、第6〜第10番目、第16〜第20番目および第26〜30番目の各5個が発光したLEDチップ21の光学テスト(光量が閾値以上かどうかの検査)を完了する。上記実施形態1の場合と同様に、NGのLEDチップ21の座標情報を記憶部(RAM)に記憶しおく。 The above-described inspection operation is repeated, and an optical test of the LED chip 21 in which each of the sixth to tenth, sixteenth to twentieth and twenty-sixth to thirty-five lights emits light (inspection whether the light amount is equal to or greater than a threshold value) To complete. As in the case of the first embodiment, the coordinate information of the NG LED chip 21 is stored in the storage unit (RAM).
以上によって、1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことができる。その後、ロール54を所定距離だけ回転させて、次の1行(横方向)の複数のLEDチップ21を順次発光させて光学テストを行うことになる。 As described above, an optical test can be performed by sequentially emitting light from a plurality of LED chips 21 in one row (lateral direction). Thereafter, the roll 54 is rotated by a predetermined distance, and the next one row (horizontal direction) of the plurality of LED chips 21 is caused to emit light sequentially to perform an optical test.
したがって、端子接続手段6Dは、LEDチップ21の裏面端子に対して電気的に接続するプローブピンであるコンタクトピン63と、コンタクトピン63が上面に固定され、下面角部にアールが付いて縦方向に移動可能なように構成されているコンタクトユニット68と、コンタクトユニット68の下面位置で、横方向の長尺円形軸で回転自在に構成され、LEDチップ21の配置間隔で角度を変えてLEDチップ21毎に突出ドラム部69aが所定数づつ所定間隔に形成され、回転によって突出ドラム部69aがコンタクトユニット68の下面を押し上げる回転ドラム69と、コンタクトピン63に対してLEDチップ21を駆動させる駆動電圧を供給可能とする駆動電圧出力手段(図示せず)とを有している。
(実施形態7)
図11は、本発明の実施形態7における電子部品動作機能測定装置の端子接続手段の第4例を模式的に示す反射板およびプローブ一体化方式の構成図である。
Accordingly, the terminal connecting means 6D includes a contact pin 63 that is a probe pin that is electrically connected to the back surface terminal of the LED chip 21, and the contact pin 63 is fixed to the upper surface, and a rounded corner is attached to the lower surface corner portion in the vertical direction. The contact unit 68 is configured so as to be movable at the lower surface of the contact unit 68, and is configured to be rotatable by a long circular axis in the lateral direction at the lower surface position of the contact unit 68. The driving drum 69 is formed with a predetermined number of protruding drum portions 69a at every predetermined interval, and the driving drum 69 drives the LED chip 21 relative to the contact pin 63 with the rotating drum 69 that pushes up the lower surface of the contact unit 68 by rotation. Drive voltage output means (not shown).
(Embodiment 7)
FIG. 11: is a block diagram of the reflector and probe integrated system which shows typically the 4th example of the terminal connection means of the electronic component operation function measuring apparatus in Embodiment 7 of this invention.
図11に示すように、電子部品側面離間手段5としての断面多角形のロール55に電子部品基板3が巻かれ、LEDチップ21の表面および側面の端子に、反射板71Aと絶縁シート61Bを介した直下で、反射板71Aと絶縁シート61Bとプローブピン61Aとが一体化して各先端が当接(反射板71Aが表面に当接、プローブピン61Aが側面端子に当接)するように構成されている。EDチップ21の側面の+端子と−端子に対して、互いに絶縁された2本のニードル状のプローブピン61Aを両側から押し当てて電気的に接続させるようになっている。この2本のプローブピン61Aは、LEDチップ21毎に、断面多角形のロール55に巻かれた電子部品基板3の所定方向1行(横方向)の所定数のLEDチップ21の側面の端子にそれぞれ押し当てるように配置されている。よって、所定方向1行(横方向)の複数のLEDチップ21を順次発光させる場合は、反射板71A直下の2本のニードル状のプローブピン61Aを反射板71Aの裏面に沿って順次、LEDチップ21の側面上方の端子に押し当てて、LEDチップ21に2本のプローブピン61Aから所定電源電圧を供給して順次発光させることができる。このとき、駆動電圧出力手段としての発光電圧出力源から2本のプローブピン61Aに発光電圧を供給してLEDチップ21を発光駆動させることができる。絶縁シート61Bは、プローブピン61Aと反射板71Aとを電気的に絶縁するためのシート部材である。 As shown in FIG. 11, the electronic component substrate 3 is wound around a roll 55 having a polygonal cross section as the electronic component side surface separating means 5, and a reflector 71 </ b> A and an insulating sheet 61 </ b> B are interposed on the surface and side terminals of the LED chip 21. The reflecting plate 71A, the insulating sheet 61B, and the probe pin 61A are integrated directly below each other, and each tip is in contact (the reflecting plate 71A is in contact with the surface and the probe pin 61A is in contact with the side terminal). ing. Two needle-like probe pins 61A that are insulated from each other are pressed against and electrically connected to the + terminal and the − terminal on the side surface of the ED chip 21. The two probe pins 61A are connected to the terminals on the side surfaces of a predetermined number of LED chips 21 in one predetermined row (lateral direction) of the electronic component substrate 3 wound around the roll 55 having a polygonal cross section for each LED chip 21. They are arranged to press each other. Therefore, when the plurality of LED chips 21 in a predetermined direction (horizontal direction) are caused to emit light sequentially, the two needle-like probe pins 61A immediately below the reflecting plate 71A are sequentially led along the back surface of the reflecting plate 71A. The LED chip 21 is pressed against a terminal on the upper side of the side 21, and a predetermined power supply voltage is supplied from the two probe pins 61A to the LED chip 21 to sequentially emit light. At this time, the LED chip 21 can be driven to emit light by supplying a light emission voltage to the two probe pins 61A from a light emission voltage output source as a drive voltage output means. The insulating sheet 61B is a sheet member for electrically insulating the probe pin 61A and the reflecting plate 71A.
したがって、本実施形態7の端子接続手段は、反射板71Aに対してその下の絶縁シート61Bを介した直下位置で、反射板71Aと絶縁シー61Bトとプローブピン61Aとが一体化して、反射板71Aの先端がLEDチップ21の表面に当接し、プローブピン61AがLEDチップ21の側面端子に当接または離間自在に構成されている。
(実施形態8)
図12は、本発明の実施形態8における電子部品動作機能測定装置の端子接続手段の第5例を模式的に示すシャフト方式の構成図、図13は図12の端子接続手段の縦断面図である。
Therefore, the terminal connecting means of the seventh embodiment is such that the reflecting plate 71A, the insulating sheet 61B, and the probe pin 61A are integrated at a position directly below the reflecting plate 71A via the insulating sheet 61B below the reflecting plate 71A. The tip of the plate 71A is in contact with the surface of the LED chip 21, and the probe pin 61A is configured to be in contact with or separated from the side surface terminal of the LED chip 21.
(Embodiment 8)
FIG. 12 is a block diagram of a shaft system schematically showing a fifth example of the terminal connection means of the electronic component operation function measuring apparatus according to Embodiment 8 of the present invention, and FIG. 13 is a longitudinal sectional view of the terminal connection means of FIG. is there.
図12および図13に示すように、本実施形態8の端子接続手段6Eは、電子部品側面離間手段5としての断面円形のロール56に電子部品基板3が巻かれており、所定数(ここでは5個)のLEDチップ21の裏面に同時にコンタクトピン63Eが当接すると共に、角度180度反対側の所定数(ここでは5個)のLEDチップ21の裏面にも同時にコンタクトピン63Eを当接させることができる。中央部の回転シャフト69Eが回転することにより上下に連結されたクランク状の各コンタクトユニット68Eを介してその先端部設けられた複数のコンタクトピン63Eが5個のLEDチップ21の裏面の+端子と−端子に対して、互いに絶縁された2本のニードル状のコンタクトピン63Eが5組同時に押し当てて電気的に接続させることができるようになっている。この2本のコンタクトピン63Eの5組は、その角度180度反対側にも2本のコンタクトピン63Eの5組が設けられており、LEDチップ21毎に、断面円形のロール56に巻かれた電子部品基板3の1行(横方向)の所定数のLEDチップ21の裏面の端子と、その反対側の電子部品基板3の1行(横方向)の所定数のLEDチップ21の裏面の端子とにそれぞれ同時に押し当てることができる。よって、1行(横方向)の複数のLEDチップ21とその反対側の1行(横方向)の複数のLEDチップ21を同時に導通して検査することができる。この場合も、駆動電圧出力手段としての発光電圧出力源から2本のコンタクトピン63Eに所定の発光電圧などの駆動電圧を供給して、LEDチップ21を発光駆動させたり所定の出力電圧を得たりすることができる。 As shown in FIG. 12 and FIG. 13, the terminal connecting means 6E of the eighth embodiment has the electronic component substrate 3 wound around a roll 56 having a circular cross section as the electronic component side surface separating means 5, and a predetermined number (here, The contact pins 63E are simultaneously in contact with the back surfaces of the five (5) LED chips 21, and the contact pins 63E are also simultaneously in contact with the back surfaces of a predetermined number (here, five) of the LED chips 21 opposite to the angle of 180 degrees. Can do. A plurality of contact pins 63E provided at the tip of each of the LED pins 21 are connected to the + terminals on the back surface of each of the five LED chips 21 through the crank-shaped contact units 68E connected vertically by rotating the central rotation shaft 69E. -Two pairs of needle-shaped contact pins 63E insulated from each other can be pressed against each other simultaneously to be electrically connected. Five sets of the two contact pins 63E are provided on the opposite side of the angle 180 degrees, and five sets of the two contact pins 63E are provided, and each LED chip 21 is wound around a roll 56 having a circular cross section. Terminals on the back surface of a predetermined number of LED chips 21 in one row (horizontal direction) of the electronic component substrate 3 and terminals on the back surface of a predetermined number of LED chips 21 in one row (horizontal direction) of the electronic component substrate 3 on the opposite side. Can be pressed at the same time. Therefore, a plurality of LED chips 21 in one row (lateral direction) and a plurality of LED chips 21 in one row (lateral direction) on the opposite side can be simultaneously conducted and inspected. Also in this case, a driving voltage such as a predetermined light emitting voltage is supplied from the light emitting voltage output source as the driving voltage output means to the two contact pins 63E to drive the LED chip 21 to emit light or obtain a predetermined output voltage. can do.
したがって、端子接続手段6Eは、LEDチップ21の裏面端子に対して電気的に接続するプローブピンであるコンタクトピン63Eと、回転シャフト69Eと、回転シャフト69Eの断面円形の互いに反対側に連結されたクランク状の上下のコンタクトユニット68Eであって、両端面にそれぞれコンタクトピン63Eが固定され、上下の互いに反対側に設けられた各複数のLEDチップ21の裏面端子に対して、回転シャフト69Eの回転により同時に各複数のLEDチップ21の裏面端子とコンタクトピン63Eのそれぞれとを接続可能とするコンタクトユニット68Eと、コンタクトピン63Eに対してLEDチップ21を駆動させる駆動電圧を供給可能とする駆動電圧出力手段(図示せず)とを有している。 Accordingly, the terminal connecting means 6E is coupled to the contact pins 63E, which are probe pins that are electrically connected to the back terminal of the LED chip 21, the rotating shaft 69E, and the rotating shaft 69E on the opposite sides of the circular cross section. A crank-shaped upper and lower contact unit 68E, with contact pins 63E fixed to both end faces, and rotation of the rotary shaft 69E with respect to the back terminals of the plurality of LED chips 21 provided on the opposite sides of the upper and lower sides. The contact unit 68E capable of connecting the back terminals of the plurality of LED chips 21 and the contact pins 63E simultaneously, and the drive voltage output capable of supplying the drive voltage for driving the LED chips 21 to the contact pins 63E. Means (not shown).
なお、上記実施形態1〜8では、電子部品2が発光素子チップの場合に、電気的動作機能測定手段7は、所定数の発光素子チップとしてのLEDチップ21の周囲を覆い、LEDチップ21からの発光を外部に漏らさずに内面で反射させて所定方向に導く反射板71と、反射板71からの光を光電変換して撮像信号を得る受光素子72と、受光素子72からの撮像信号に基づいたLEDチップ21の発光とその閾値を比較してLEDチップ21の良否判定するチップ良否判定部73とを有する場合について説明したが、これに限らず、電子部品2がLSIチップまたは受光素子チップの場合に、電気的動作機能測定手段7は、所定数のLSIチップまたは受光素子チップの端子接続手段6を介した入出力値と入出力値の閾値とを比較して電子部品2を良否判定するチップ良否判定部を有する場合についても、本発明を適用することができて、本発明の目的を達成することができる。 In the first to eighth embodiments, when the electronic component 2 is a light emitting element chip, the electrical operation function measuring unit 7 covers the periphery of the LED chips 21 as a predetermined number of light emitting element chips. Are reflected on the inner surface without leaking to the outside and guided in a predetermined direction, a light receiving element 72 that photoelectrically converts light from the reflecting plate 71 to obtain an imaging signal, and an imaging signal from the light receiving element 72 The case of having the chip pass / fail judgment unit 73 for judging the pass / fail of the LED chip 21 by comparing the light emission of the LED chip 21 and the threshold value thereof has been described. However, the present invention is not limited to this, and the electronic component 2 is an LSI chip or a light receiving element chip. In this case, the electrical operation function measuring means 7 compares the input / output value via the terminal connection means 6 of the predetermined number of LSI chips or light receiving element chips with the threshold value of the input / output value, For the case where the goods 2 with the acceptability determining chip quality determination unit also to be able to apply the present invention, it is possible to achieve the object of the present invention.
以上のように、本発明の好ましい実施形態1〜8を用いて本発明を例示してきたが、本発明は、この実施形態1〜8に限定して解釈されるべきものではない。本発明は、特許請求の範囲によってのみその範囲が解釈されるべきであることが理解される。当業者は、本発明の具体的な好ましい実施形態1〜8の記載から、本発明の記載および技術常識に基づいて等価な範囲を実施することができることが理解される。本明細書において引用した特許、特許出願および文献は、その内容自体が具体的に本明細書に記載されているのと同様にその内容が本明細書に対する参考として援用されるべきであることが理解される。 As mentioned above, although this invention has been illustrated using preferable Embodiment 1-8 of this invention, this invention should not be limited and limited to this Embodiment 1-8. It is understood that the scope of the present invention should be construed only by the claims. It is understood that those skilled in the art can implement an equivalent range based on the description of the present invention and the common general technical knowledge from the description of specific preferred embodiments 1 to 8 of the present invention. Patents, patent applications, and documents cited herein should be incorporated by reference in their entirety, as if the contents themselves were specifically described herein. Understood.
本発明は、発光ダイオード(以下LED素子という)などの光学素子や受光素子の動作機能である発光や受光を検査したり、LSIチップの動作機能を検査する電子部品動作機能測定装置および電子部品動作機能測定方法の分野において、チップ部品を個片化せずに複数のチップ部品を搭載した基板状態のままで、電子部品の電気的動作機能を測定するので、装置構成を大幅に簡略化して、各チップ部品の電気的特性や光学特性をより容易に測定して検査するができる。 The present invention relates to an electronic component operation function measuring apparatus and electronic component operation for inspecting light emission and light reception which are operation functions of an optical element such as a light emitting diode (hereinafter referred to as an LED element) and a light receiving element, and inspecting an operation function of an LSI chip. In the field of function measurement methods, the electrical operation function of electronic components is measured in the state of a substrate with multiple chip components mounted without dividing the chip components into individual pieces, greatly simplifying the device configuration, Electrical characteristics and optical characteristics of each chip component can be measured and inspected more easily.
1、1A,1B 電子部品動作機能測定装置
2 電子部品
21 LEDチップ
22 レンズ
3 電子部品基板
31 粘着シート(UVシート)
4 開口部
5、5A 電子部品側面離間手段
51、53〜56 ロール
52 回転軸(回転シャフト)
6、6A〜6E 端子接続手段
61、61A、62 プローブピン
61B 絶縁シート
63、63E コンタクトピン(プローブピン)
64、66、68、68E コンタクトユニット
65 移動軸
65a 楔状突起部
67 圧力エアー管
67a エアー通気孔
69 回転ドラム
69a 突出ドラム部
69E 回転シャフト
7 電気的動作機能測定手段
71 反射板
72 受光素子
73 チップ良否判定部
71A 反射板
1, 1A, 1B Electronic component operation function measuring device 2 Electronic component 21 LED chip 22 Lens 3 Electronic component substrate 31 Adhesive sheet (UV sheet)
4 Opening 5, 5A Electronic component side surface separation means 51, 53-56 Roll 52 Rotating shaft (Rotating shaft)
6, 6A-6E Terminal connection means 61, 61A, 62 Probe pin 61B Insulating sheet 63, 63E Contact pin (probe pin)
64, 66, 68, 68E Contact unit 65 Moving shaft 65a Wedge-shaped projection 67 Pressure air pipe 67a Air vent hole 69 Rotating drum 69a Projecting drum 69E Rotating shaft 7 Electrical operation function measuring means 71 Reflector 72 Light receiving element 73 Chip pass / fail Judgment part 71A Reflector
Claims (13)
該電子部品基板を曲面または角部に沿わせて折り曲げて、前後に隣接する電子部品間の側面を離間させる電子部品側面離間手段と、当該電子部品の所定端子に接続させる端子接続手段と、該端子接続手段を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数の電子部品の電気的動作機能を測定する電気的動作機能測定手段とを有し、
該電子部品側面離間手段として、断面が円形または多角形のロールおよび断面多角形の回転軸のいずれかを、一または複数配置する電子部品動作機能測定装置。 Electronic component operation function measurement for inspecting the electrical operation function of a plurality of electronic component substrates in which a plurality of electronic components cut individually with a sheet on the back surface are arranged in a matrix. A device,
Bending the electronic component substrate along a curved surface or a corner, separating the side surfaces between adjacent electronic components, and terminal connecting means for connecting to predetermined terminals of the electronic component; It possesses the electrical operating function measuring means for measuring the electrical operating functions of the one or more electronic components in a state of driving the one or more electronic components that are connected via the terminal connection means,
An electronic component operation function measuring device in which one or a plurality of rolls having a circular or polygonal cross section and a rotating shaft having a polygonal cross section are arranged as the electronic component side surface separation means .
前記端子接続手段は、前記電子部品毎に該電子部品の端子にプローブピンを接続して該電子部品の光学的特性を検査するための第1端子接続手段と、該光学的特性を検査する複数の電子部品とは別の一行の複数の電子部品全体の端子に同時にプローブピンを接続して該電子部品の電気的特性を検査するための第2端子接続手段とを有する電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 2 ,
The terminal connection means includes a first terminal connection means for connecting a probe pin to a terminal of the electronic component for each electronic component and inspecting optical characteristics of the electronic component, and a plurality of terminals for inspecting the optical characteristics. Electronic component operation function measuring device comprising: second terminal connection means for simultaneously connecting probe pins to terminals of all of a plurality of electronic components in a line different from the electronic component of the electronic component and inspecting the electrical characteristics of the electronic component .
前記端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面がテーパ面になっているコンタクトユニットと、該コンタクトユニットの下面直下で横方向に移動自在に構成され、該移動により該テーパ面を押し上げる楔状突起部が上面に設けられた長尺の移動軸と、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 1,
The terminal connection means includes a probe pin that is electrically connected to a back surface terminal of an electronic component, a contact unit having the probe pin fixed to the upper surface, and a lower surface having a tapered surface, and a lower portion of the contact unit. It is configured to be movable in the horizontal direction, and it can supply a long moving shaft with a wedge-shaped projection on the top surface that pushes up the tapered surface by the movement, and a drive voltage for driving the electronic component to the probe pin An electronic component operation function measuring device having drive voltage output means.
前記端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面がエアープッシュの有無により縦方向に移動可能なように端面が開放されているコンタクトユニットと、該コンタクトユニットの端面開放口の下方位置で、横方向の長尺管で回転自在に構成され、該電子部品の配置間隔で角度を変えて、エアープッシュ用のエアー通気孔が所定間隔に複数形成された圧力エアー管と、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 1,
The terminal connecting means includes a probe pin that is electrically connected to the back terminal of the electronic component, and the probe pin is fixed to the upper surface, and the end surface is opened so that the lower surface can be moved in the vertical direction with or without air push. The air unit is configured to be freely rotatable by a long horizontal tube at a position below the open end face of the contact unit and the end face of the contact unit. An electronic component operation function measuring device comprising: a plurality of pressure air tubes formed at predetermined intervals; and drive voltage output means capable of supplying a drive voltage for driving the electronic component to the probe pin.
前記端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、該プローブピンが上面に固定され、下面角部にアールが付いて縦方向に移動可能なように構成されているコンタクトユニットと、該コンタクトユニットの下面位置で、左右方向の長尺円形軸で回転自在に構成され、該電子部品の配置間隔で角度を変えて該電子部品毎に突出ドラム部が所定数づつ所定間隔に形成され、回転によって突出ドラム部がコンタクトユニットの下面を押し上げる回転ドラムと、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 1,
The terminal connection means includes a probe pin that is electrically connected to a back surface terminal of the electronic component, and the probe pin is fixed to the upper surface and is configured to be movable in the vertical direction with rounded corners on the lower surface. The contact unit and the bottom surface of the contact unit are configured to be rotatable by a long circular shaft in the left-right direction, and a predetermined number of projecting drum portions are provided for each electronic component by changing the angle according to the arrangement interval of the electronic components. A rotating drum which is formed at a predetermined interval and whose projecting drum portion pushes up the lower surface of the contact unit by rotation; and a driving voltage output means capable of supplying a driving voltage for driving the electronic component to the probe pin. Electronic component operation function measuring device.
前記端子接続手段は、前記反射板に対してその下の絶縁シートを介した直下位置で、該反射板と該絶縁シートと前記プローブピンとが一体化して、該反射板の先端が発光素子チップの表面に当接し、該プローブピンが該発光素子チップの側面端子に当接または離間するように構成されている電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 4 ,
The terminal connecting means is located immediately below the reflecting plate via an insulating sheet below, and the reflecting plate, the insulating sheet, and the probe pin are integrated, and the tip of the reflecting plate is the light emitting element chip. An electronic component operation function measuring device configured to abut on a surface and have the probe pin abut or separate from a side terminal of the light emitting element chip.
前記端子接続手段は、電子部品の裏面端子に対して電気的に接続するプローブピンと、回転シャフトと、該回転シャフトの断面円形の互いに反対側に連結されたクランク状の上下のコンタクトユニットであって、両端面にそれぞれプローブピンが固定され、上下の互いに反対側に設けられた各複数の電子部品の裏面端子に対して、該回転シャフトの回転により同時に該各複数の電子部品の裏面端子と該プローブピンのそれぞれとを接続させるコンタクトユニットと、該プローブピンに対して該電子部品を駆動させる駆動電圧を供給可能とする駆動電圧出力手段とを有している電子部品動作機能測定装置。 In the electronic component operation function measuring device according to claim 1,
The terminal connecting means is a probe pin that is electrically connected to a back terminal of an electronic component, a rotating shaft, and a crank-shaped upper and lower contact unit coupled to opposite sides of a circular cross section of the rotating shaft. The probe pins are fixed to both end faces, and the back terminals of the plurality of electronic components provided on the opposite sides of the upper and lower sides are simultaneously rotated by the rotation of the rotating shaft and the back terminals of the plurality of electronic components. An electronic component operation function measuring device comprising: a contact unit for connecting each of the probe pins; and a drive voltage output means capable of supplying a drive voltage for driving the electronic component to the probe pin.
電子部品側面離間手段が、該電子部品基板を曲面または角部に沿わせて折り曲げて、前後に隣接する電子部品間の側面を離間させる電子部品側面離間ステップと、端子接続手段が、当該電子部品の所定端子に接続させる端子接続ステップと、電気的動作機能測定手段が、該端子接続手段を介して接続した一または複数の電子部品を駆動させた状態で当該一または複数の電子部品の電気的動作機能を測定する電気的動作機能測定ステップとを有し、
該電子部品側面離間手段として、断面が円形または多角形のロールおよび断面多角形の回転軸のいずれかを、一または複数配置する電子部品動作機能測定方法。
Electronic component operation function measurement for inspecting the electrical operation function of a plurality of electronic component substrates in which a plurality of electronic components cut individually with a sheet on the back surface are arranged in a matrix. A method,
The electronic component side surface separation means bends the electronic component substrate along a curved surface or a corner, and separates the side surfaces between adjacent electronic components, and the terminal connection means includes the electronic component. A terminal connection step for connecting to the predetermined terminal, and the electrical operation function measuring means drives the one or more electronic parts connected via the terminal connection means in an electrically driven state. possess the electrical operating function measuring step of measuring the operating function,
An electronic component operation function measuring method in which one or a plurality of rolls having a circular or polygonal cross section and a rotating shaft having a polygonal cross section are arranged as the electronic component side surface separation means .
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JP4054473B2 (en) * | 1999-02-22 | 2008-02-27 | 株式会社アドバンテスト | Electronic component testing apparatus and electronic component testing method |
JP4876356B2 (en) * | 2001-09-05 | 2012-02-15 | ソニー株式会社 | Method for manufacturing circuit element built-in substrate and method for manufacturing electric circuit device |
WO2007007406A1 (en) * | 2005-07-13 | 2007-01-18 | Advantest Corporation | Test equipment of electronic component |
JP4670562B2 (en) * | 2005-09-27 | 2011-04-13 | 住友電気工業株式会社 | Substrate inspection apparatus and substrate inspection method |
JP2007153578A (en) * | 2005-12-07 | 2007-06-21 | Tokyo Weld Co Ltd | Chip component carrying device |
JP2007178132A (en) * | 2005-12-27 | 2007-07-12 | Matsushita Electric Ind Co Ltd | Semiconductor inspection system and semiconductor inspection method |
TW200837377A (en) * | 2007-03-05 | 2008-09-16 | Chroma Ate Inc | Tester for testing side-emitting LED components |
-
2010
- 2010-04-28 JP JP2010104611A patent/JP4955792B2/en not_active Expired - Fee Related
-
2011
- 2011-04-14 TW TW100113032A patent/TWI416143B/en not_active IP Right Cessation
- 2011-04-27 KR KR1020110039794A patent/KR101284526B1/en not_active IP Right Cessation
- 2011-04-28 CN CN2011101085535A patent/CN102253349A/en active Pending
Also Published As
Publication number | Publication date |
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TWI416143B (en) | 2013-11-21 |
JP2011232262A (en) | 2011-11-17 |
TW201202722A (en) | 2012-01-16 |
KR20110120248A (en) | 2011-11-03 |
CN102253349A (en) | 2011-11-23 |
KR101284526B1 (en) | 2013-07-16 |
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