JP4896378B2 - Resolution evaluation chart for fluorescent microscope and fluorescent microscope adjustment method using the same - Google Patents

Description

  The present invention evaluates the imaging performance of a fluorescent microscope, particularly a high-performance and high-performance fluorescent microscope that illuminates a stained sample with light of multiple wavelengths from a highly functional laser light source to obtain high spatial resolution. The present invention relates to a resolution evaluation chart for a fluorescence microscope and a method for manufacturing the same, and a resolution evaluation method for a fluorescence microscope using the resolution evaluation chart for a fluorescence microscope.

  Optical microscope technology is old and various types of microscopes have been developed. In recent years, more advanced microscope systems have been developed due to advances in peripheral technologies such as laser technology and electronic image technology.

  Against this background, we propose a highly functional microscope that not only controls the contrast of the resulting image but also enables chemical analysis using the double resonance absorption process that occurs when the sample is illuminated with light of multiple wavelengths. (For example, refer to Patent Document 1).

  This microscope selects specific molecules using double resonance absorption and observes absorption and fluorescence due to specific optical transitions. This principle will be described with reference to FIGS. FIG. 8 shows the electronic structure of the valence electron orbital of the molecules constituting the sample. First, the electrons in the valence orbital of the molecule in the ground state (S0 state) shown in FIG. 8 are excited by light of wavelength λ1. Thus, the first electronic excitation state (S1 state) shown in FIG. 9 is assumed. Next, the second electron excitation state (S2 state) shown in FIG. 10 is obtained by exciting similarly with light of another wavelength λ2. In this excited state, the molecule emits fluorescence or phosphorescence and returns to the ground state as shown in FIG.

  In the microscope method using the double resonance absorption process, an absorption image and a light emission image are observed using the absorption process of FIG. 9 and the fluorescence and phosphorescence emission of FIG. In this microscope method, first, the molecules constituting the sample are excited to the S1 state as shown in FIG. 9 with light having a resonance wavelength λ1 by laser light or the like. At this time, the number of molecules in the S1 state within the unit volume is It increases as the intensity of light to be applied increases.

  Here, since the linear absorption coefficient is given by the product of the absorption cross section per molecule and the number of molecules per unit volume, in the excitation process as shown in FIG. The coefficient depends on the intensity of the light having the wavelength λ1 irradiated first. That is, the linear absorption coefficient with respect to the wavelength λ2 can be controlled by the intensity of the light with the wavelength λ1. This indicates that the contrast of the transmitted image can be completely controlled by the light of the wavelength λ1 when the sample is irradiated with the light of the two wavelengths of the wavelength λ1 and the wavelength λ2 and a transmission image by the wavelength λ2 is taken.

  Further, when the deexcitation process by fluorescence or phosphorescence in the excited state of FIG. 10 is possible, the emission intensity is proportional to the number of molecules in the S1 state. Therefore, image contrast can be controlled when used as a fluorescence microscope.

  Furthermore, the microscope method using a double resonance absorption process enables not only the above-described image contrast control but also chemical analysis. That is, since the outermost valence electron orbit shown in FIG. 8 has an energy level unique to each molecule, the wavelength λ1 varies depending on the molecule, and the wavelength λ2 is also unique to the molecule.

  Here, even when illuminating with a conventional single wavelength, it is possible to observe an absorption image or fluorescence image of a specific molecule to some extent, but generally the wavelength regions of absorption bands of several molecules overlap. It is impossible to accurately identify the chemical composition of the sample.

  On the other hand, in the microscope method using the double resonance absorption process, the molecules that absorb or emit light are limited by the two wavelengths of λ1 and λ2, so that the chemical composition of the sample can be identified more accurately than the conventional method. Become. In addition, when valence electrons are excited, only light having a specific electric field vector with respect to the molecular axis is strongly absorbed. Therefore, if the polarization direction of the wavelengths λ1 and λ2 is determined and an absorption or fluorescence image is taken, the same Even molecules can be used to identify the orientation direction.

  Recently, a fluorescence microscope having a high spatial resolution exceeding the diffraction limit using a double resonance absorption process has also been proposed (see, for example, Patent Document 2).

  FIG. 12 is a conceptual diagram of a double resonance absorption process in a molecule. A molecule in the ground state S0 is excited by light having a wavelength λ1 to S1, which is a first electronically excited state, and further excited by a second electron by light having a wavelength λ2. The state of being excited by the state S2 is shown. FIG. 12 shows that the fluorescence from S2 of certain molecules is extremely weak.

  In the case of molecules having optical properties as shown in FIG. 12, a very interesting phenomenon occurs. FIG. 13 is a conceptual diagram of the double resonance absorption process, similar to FIG. 12, where the horizontal X-axis represents the spread of the spatial distance, and the light of the wavelength region λ2 and the spatial region A1 irradiated with the light of wavelength λ2 is not irradiated. A space area A0 is shown.

  In FIG. 13, many molecules in the S1 state are generated by excitation of light of wavelength λ1 in the spatial region A0, and fluorescence emitted at the wavelength λ3 is seen from the spatial region A0. However, in the spatial region A1, since the light of wavelength λ2 is irradiated, most of the molecules in the S1 state are immediately excited to the higher S2 state and no S1 state molecule exists. Such a phenomenon has been confirmed by several molecules. Thereby, in the spatial region A1, the fluorescence of the wavelength λ3 is completely lost, and the fluorescence from the S2 state is not originally present. Therefore, in the spatial region A1, the fluorescence itself is completely suppressed (fluorescence suppression effect), and only from the spatial region A0. Fluorescence will be emitted.

  This is extremely important when considered from the field of application of a microscope. That is, in a conventional scanning laser microscope or the like, a laser beam is condensed into a micro beam by a condensing lens and scanned on an observation sample. The size of the micro beam at that time is determined by the numerical aperture and wavelength of the condensing lens. The diffraction limit is determined by, and in principle, no further spatial resolution can be expected.

  However, in the case of FIG. 13, two types of light of wavelength λ1 and wavelength λ2 are superposed spatially and the fluorescent region is suppressed by irradiation with light of wavelength λ2, for example, the light of wavelength λ1. Focusing on the irradiation region, the fluorescent region can be made narrower than the diffraction limit determined by the numerical aperture and wavelength of the condenser lens, and the spatial resolution can be substantially improved. Therefore, by utilizing this principle, it is possible to realize a super-resolution microscope using a double resonance absorption process exceeding the diffraction limit, for example, a fluorescence microscope having a nanoscale spatial resolution.

  On the other hand, as represented by the field of super-resolution fluorescence microscope technology, development of evaluation technology relating to the optical performance of the microscope is also remarkable.

  For example, for a bright-field transmission microscope, a method for objectively evaluating the imaging performance of the microscope has been established. In this evaluation method, basic imaging performance such as two-point resolution, line image distribution function, field of view, etc. is obtained by using a standard chart 51 for resolution evaluation as shown in FIG. Is evaluated.

  This standard chart 51 has a fixed fine line pattern mainly formed by vapor-depositing a metal thin film such as Cr on a glass substrate, and the line interval of the fine line pattern is the diffraction limit in the case of visible light. The accuracy is better than 100 nm.

  Therefore, by observing the standard chart 51 with a microscope, it is possible to measure the line image distribution function as a total microscope system from the diffracted thin line pattern, and to measure the image contrast of specific two adjacent lines. Thus, the two-point resolution can be accurately evaluated.

  In addition, regarding a fluorescence microscope, which is a typical dark field microscope, as described above, a fluorescence microscope having a nanoscale spatial resolution has been proposed, and thus there has been an increasing demand for highly accurate imaging performance evaluation. Yes.

  In order to meet this requirement, the present inventors formed a non-light-emitting portion by irradiating an electron beam to a light-emitting thin film containing a fluorescent material having a light emission center formed on a substrate and breaking the light emission center. We are developing a resolution evaluation chart for fluorescent microscopes. In this fluorescence microscope resolution evaluation chart, for example, a fluorescent material such as rhodamine 6G is mixed with polymethyl methacrylate (PMMA) dissolved in a solvent to form a luminescent material, as shown in FIG. Then, the light emitting thin film 56 is formed by casting or spin coating on a suitable substrate 55 and drying, and thereafter, the light emitting thin film 56 is irradiated with an electron beam, and the light emission center is destroyed by the energy of the electron beam so as not to emit light. It can be manufactured by forming the portion 57.

  According to this manufacturing method, since the beam diameter (diameter) of the electron beam is as very thin as about 10 nm, it is possible to draw, for example, an ultrafine wire having a width of 200 nm to 300 nm or a non-light emitting portion 57 having a very small area at an interval of 1 μm or less. It becomes.

  By irradiating excitation light that causes fluorescence using this resolution evaluation chart for a fluorescence microscope, the non-light-emitting portion 57 drawn with an electron beam in bright fluorescence can be observed as black, so that the resolution of the fluorescence microscope can be observed. Can be evaluated.

  According to the above method for producing a resolution evaluation chart for a fluorescence microscope, if the electron energy (acceleration voltage of the beam) or the injection amount (dose amount) of electrons is changed, as shown in FIG. It is also possible to add (change of gradation). The technical problems in this case include how much the dye concentration and film thickness of the light-emitting thin film 56 that is the light-emitting portion are set, and how much the acceleration voltage and dose amount of the electron beam are set.

  For example, if the acceleration voltage is increased or the dose amount is increased, the non-light-emitting portion 57 can be increased and the contrast can be increased. However, as shown in FIG. If you increase the line width increases. Moreover, this phenomenon also changes depending on the balance between the dye concentration and the film thickness of the light emitting thin film 56.

  As described above, in the above method for producing a resolution evaluation chart for a fluorescence microscope, obtaining high contrast is contrary to drawing (resolution) the non-light emitting portion 57 having a minute dimension. By optimizing the dose amount, it is possible to draw the non-light-emitting portion 57 having a line width of nanoscale order.

JP-A-8-184552 JP 2001-100102 A

  However, according to experimental studies by the present inventors, it has been found that the above-described method for manufacturing a fluorescence microscope resolution evaluation chart has the following points to be improved.

(1) Generally, when an organic material that is a thin film material is heated and melted, fluorescent dye molecules are mixed at that time, but in this case, fluorescent dye molecules having a low decomposition point temperature cannot be dissolved. In addition, usable fluorescent dye molecules are limited.

(2) Since it is difficult to uniformly disperse the fluorescent dye molecules in the dissolved organic material, density spots appear on the produced resolution evaluation chart. For this reason, when performing fluorescence observation, the fluorescence intensity varies depending on the location, and the resolution cannot be accurately evaluated.

(3) Since it is difficult to disperse the fluorescent dye molecules at a high concentration, it becomes a resolution evaluation chart with low luminance, and when the organic material layer containing the fluorescent dye molecules is thickened to increase the luminance, The thickness becomes several μm longer than the wavelength, and it becomes impossible to correspond to the evaluation of a high resolution microscope having a very shallow depth of focus.

  For this reason, it is difficult to produce a resolution evaluation chart that can be applied to the above-described fluorescence microscope having a nano-scale spatial resolution. Therefore, at present, there are two points that are objective standards for the spatial resolution of the fluorescence microscope. The resolution cannot be evaluated.

  This situation is particularly serious at the production site, and since the basic performance of the assembled microscope cannot be objectively checked, there are many scenes that rely on the experience of skilled workers in the production line. From such a background, it is desired to develop a resolution evaluation chart for a fluorescent microscope that can objectively and quantitatively evaluate the imaging performance of the super-resolution fluorescent microscope.

  Therefore, an object of the present invention made in view of the above points is an excellent versatility fluorescence that can be easily manufactured and the imaging performance of a super-resolution fluorescence microscope using two wavelengths can be objectively and quantitatively accurately evaluated. It is an object to provide a resolution evaluation method for a fluorescence microscope using a resolution evaluation chart for a microscope, a manufacturing method thereof, and a resolution evaluation chart for a fluorescence microscope.

The invention according to claim 1 for achieving the above object is a resolution evaluation chart for a fluorescence microscope used for evaluating the imaging performance of the fluorescence microscope,
A silicon substrate;
An organic thin film formed on the silicon substrate;
A fluorescent dye material having an emission center impregnated in the organic thin film by a dye vapor transport method;
A part of the organic thin film has a non-light-emitting portion formed by destroying a light emission center of the fluorescent dye material by irradiation with a particle beam .

The invention according to claim 2 is a resolution evaluation chart for a fluorescence microscope used for evaluating the imaging performance of the fluorescence microscope,
A silicon substrate;
An organic thin film formed on the silicon substrate;
A fluorescent dye material having an emission center impregnated in the organic thin film by a dye vapor transport method;
And characterized in that it has after the irradiation of the particle beam to a portion of the organic thin film, and a non-emitting portion formed by removing the organic thin film on a portion of the silicon substrate by etching the organic thin film To do.

The invention according to claim 3 is the resolution evaluation chart for fluorescence microscopes according to claim 1 or 2 , wherein the organic thin film is made of a material having no hydroxyl group.

The invention according to claim 4 is the resolution evaluation chart for a fluorescence microscope according to any one of claims 1 to 3 , wherein the organic thin film is
Polystyrene, poly (α-methylstyrene), polyindene, poly (4-methyl-1-pentene), polyvinylpyridine, polyvinyl formal, polyvinyl acetal, polyvinyl butyral, polyvinyl acetate, polyvinyl alcohol, polyvinyl chloride, polyvinylidene chloride, Polyvinyl methyl ether, polyvinyl ethyl ether, polyvinyl benzyl ether, polyvinyl methyl ketone, poly (N-vinyl carbazole), poly (N-vinyl pyrrolidone), polymethyl acrylate, polyethyl acrylate, polyacrylic acid, polyacrylonitrile, poly Methyl methacrylate, polyethyl methacrylate, polybutyl methacrylate, polybenzyl methacrylate, polycyclohexyl methacrylate, polymethacrylate, polymethacrylate , Polymethacrylonitrile, polyacetaldehyde, polychloral, polyethylene oxide, polypropylene oxide, polyethylene terephthalate, polybutylene terephthalate, polycarbonates (bisphenols + carbonic acid), poly (diethylene glycol bisallyl carbonates), 6-nylon, 6, 6-nylon, 12-nylon, 6,12-nylon, polyethyl aspartate, ethyl polyglutamate, polylysine, polyproline, poly (γ-benzyl-L-glutamate), poly (phenyl methacrylate), poly (t-butyl Methacrylate), poly (4-methylstyrene), poly (t-butylstyrene), methylcellulose, ethylcellulose, benzylcellulose, hydroxyethylcellulose, hydroxy Propylcellulose, acetylcellulose, cellulose triacetate, cellulose tributyrate, alkyd resin (phthalic anhydride + glycerin), fatty acid modified alkyd resin (fatty acid + phthalic anhydride + glycerin), unsaturated polyester resin (maleic anhydride + phthalic anhydride) + Propylene glycol), epoxy resins (bisphenols + epichlorohydrin), polyurethane resins, phenol resins, urea resins, melamine resins, xylene resins, toluene resins, guanamine resins, etc .;
Organic polysilanes such as poly (phenylmethylsilane), organic polygermanes or copolymers / copolycondensates thereof;
Carbon disulfide, carbon tetrafluoride, ethylbenzene, perfluorobenzene, perfluorocyclohexane, trimethylchlorosilane, etc. A group bonded as a side chain of a monomer unit, a crosslinking group, a copolymerization monomer unit, or a polymerization initiation terminal;
It is characterized by comprising an organic material.

The invention according to claim 5 is the resolution evaluation chart for a fluorescence microscope according to any one of claims 1 to 4 , wherein the fluorescent dye material has an excitation wavelength from the first electronic excited state to the second electronic excited state. The band is composed of molecules overlapping with the fluorescence wavelength band when deexcited by the fluorescence process from the first electronic excited state to the ground state vibration level.

The invention according to claim 6 is the resolution evaluation chart for a fluorescence microscope according to claim 5 , wherein the fluorescent dye material is
2,2 ″ -Dimethyl-p-terphenyl;
P-terphenyl (PTP);
3,3 ', 2'',3''-Tetramethyl-P-quaterphenyl(3,3', 2 '', 3 ''-Tetramethyl-P-quaterphenyl);
2,2 '''-Dimethyl-P-quaterphenyl;
2-Methyl-5-t-butyl-p-quaterphenyl;
2- (4-Biphenyl) -5- (4-t-butylphenyl) -1,3,4-oxyazole (BPBD-365) (2- (4-Biphenylyl) -5- (4-t-butylphenyl) -1,3,4-oxiazol (BPBD-365));
2- (4-biphenyl) -phenyl-1,3,4-oxadiazol (2- (4-Biphenylyl) -phenyl-1,3,4-oxadiazol);
2,5,2 '''', 5 ''''-Tetramethyl-p-quinquephenyl (2,5,2 '''' 5, ''''-Tetramethyl-p-quinquephenyl);
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-quink ephenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-quinquephenyl);
2,5-diphenyloxazol;
2,5-diphenylfuran;
p-Quanterphenyl (PQP);
2,5-bis- (4-biphenylyl) -1,3,4-oxadiazol (2,5-Bis- (4-biphenylyl) -1,3,4-oxadiazol);
p-Quaterphenyl-4-4 '''-disulfonic acid Disodiumsalt;
p-Quaterphenyl-4-4 '''-disulfonic acid Dipotassiumsalt;
4,4 '''-bis- (2-butyloctyloxy) -p-quanterphenyl;
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-sexiphenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-sexiphenyl);
2- (1-naphthyl) -5-phenyloxazol (2- (1-Naphthyl) -5-phenyloxazol);
2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid potassium salt (2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid Potassium Salt);
2- (4-biphenyl) -6-phenylbenzoxazole-1,3 (2- (4-Biphenylyl) -6-phenylbenzoxazol-1,3);
4,4'-Diphenylstilbene;
(1,1'-biphenyl) -4-sulfonic acid, 4,4 ''-1,2-ethene-diylbis-, dipotassium salt ([1,1'-Biphenyl] -4-sulfonic acid, 4,4 '' -1,2-ethene-diylbis-, dipotassium salt);
2,5-bis- (4-biphenylyl) -oxazole (2,5-Bis- (4-biphenylyl) -oxazol);
2,2 '-[(1,1'-biphenyl) -4,4'-diyldi-2,1-ethenediyl] -bis-benzenesulfonic acid disodium salt (2,2'-([1,1'- Biphenyl] -4,4'-diyldi-2,1-ethenediyl) -bis-benzenesulfonic acid Disodium Salt);
7-Amino-4-methylcarbostyryl;
1,4-di [2- (5-phenyloxazoly)] benzene (1,4-Di [2- (5-phenyloxazoly)] benzene);
7-hydroxy-4-methylcoumarin;
p-Bis (o-methylstyryl) -benzene;
Benzofuran, 2,2 '-(1,1'-biphenyl) -4,4'-diyl-bis-tetrasulfonic acid (Benzofuran, 2,2'-[1,1'-biphenyl] -4,4'- diyl-bis-tetrasulfonic-acid);
7-Dimethylamino-4-methylquinolom-2;
7-Amino-4-methylcoumarin;
2- (p-Dimethylaminostyryl) -pyridylmethyl Iodide;
7-diethylaminocoumarun;
7-Diethylamino-4-methylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-8-methylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8-methylqinolizino- [9 , 9a, 1-gh] -coumarin);
7-Diethylamino-4-trifluormethylcoumarin;
7-Dimethylamino-4-trifluormethylcoumarin;
7-Amino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1- gh] -coumarin);
7-Ethylamino-6-methyl-4-trifluormethylcoumarin;
7-Ethylamino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-9-carboethoxyquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9- carboethoxyquinolizino-[9,9a, 1-gh] coumarin);
2,3,5,6-1H, 4H-Tetrahydro-9- (3-pyridyl) -quinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro- 9- (3-pyridyl) -quinolizino- [9,9a, 1-gh] coumarin);
3- (2'-N-methylbenzimidazolyl) -7-n, n-diethylaminocoumarin (3- (2'-N-Methylbenzimidazolyl) -7-n, n-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino -[9,9a, 1-gh] -coumarin);
N-Methyl-4-trifluormethylpiperidino- [3,2-g] -coumarin;
2- (p-Dimethylaminostyryl) -benzothiazolylethyl Iodide;
3- (2'-Benzimidazolyl) -7-N, N-diethylaminocoumarin);
Brilliant sulfaflavin (Brillantsulfaflavin);
3- (2'-Benzothiazolyl) -7-diethylaminocoumarin (3- (2'-Benzothiazolyl) -7-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-8-trifluoromethylquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8 -trifluormethylquinolizino- [9,9a, 1-gh] coumarin);
3,3'-diethyloxacarbocyanine iodide; 3,3'-diethyloxacarbocyanine iodide;
3,3′-Dimethyl-9-ethylthiacarbocyanine iodide (3,3′-Dimethyl-9-ethylthiacarbocyanine Iodide);
Fluorescein disodium (Uranin) (Disodium Fluorescein (Uranin));
9- (o-Carboxyphenyl) -2,7-dichloro-6-hydroxy-3H-xanthen-3-one-2,7-dichlorofluorescein (fluorescein 548) (9- (o-Carboxyphenyl) -2,7- dichloro-6-hydroxy-3H-xanthen-3-on2,7-Dichlorofluorescien / Fluorescein 548);
Fluorol 555 (Fluorol 7GA);
o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzoic acid (rhodamine 560 (rhodamine 6G)) (o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzonic acid (Rhodamine 560 (Rhodamine 6G)));
2- [6- (Ethylamino) -3- (ethylimino) -2,7-dimethyl-3H-xanthen-9-yl] benzoic acid, perchlorate, (Rhodamine 575) (BenzoicAcid, 2- [6- (ethylamino) ) -3- (ethylimino) -2,7-dimethyl-3H-xanthen9-yl], perchlorate (Rhodamine 575));
Benzoic acid 2- [6- (ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethyl ester monochloride, rhodamine 590 (Benzonic Acid, 2- [6 -(ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethylester, monohydrochloride (Rhodamine 590));
1,3'-diethyl-4,2'-quinolyloxycarbocyanine iodide (1,3'-diethyl-4,2'-quinolyloxacarbocyanine Iodide);
1,1'-diethyl-2,2'-carbocyanine iodide (1,1'-diethyl-2,2'-carbocyanine Iodid);
2- [6- (Diethylamino) -3- (diethylimino) -3H-xanthen-9-yl] benzoic acid (rhodamine 610 (rhodamine B)) (2- [6- (diethylamino) -3- (diethylimino)- 3H-xanthen-9-yl] benzonic acid (Rhodamine 610 (Rhodamine B)));
Ethanaminium N-[(6-diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethyl hydroxide inner salt, sodium salt (Ethanaminium, N-[(6- diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethylhydroxid, inner salt, sodium salt);
Malachite Green;
3,3'-diethylthiacarbocyanine iodide (3,3'-diethylthiacarbocyanine iodide);
1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide; 1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide;
8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a' , 1-Echiai] xanthylium perchlorate (rhodamine 640) (8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H- diquinolizino [9,9a, 1-bc: 9 ', 9a', 1-hi] xanthylium Perchlorate (Rhodamine640));
4-Dicyanmethylene-2-methyl-6- (p-dimethylaminostyryl) -4H-pyran (DCM) ;
3,3'-diethyloxadicarbocyanine iodide; 3,3'-diethyloxadicarbocyanine iodide;
8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-Bc: 9 ' , 1-Echiai] xanthene (sulforhodamine 640) (8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc: 9 ', 1-hi] xanthene (Sulforhodamine 640));
5,9-Diaminobenzo [a] phenoxazonium Perchorate;
9-Diethylamino-5H-benzo (a) phenoxazin-5-one;
5-Amino-9-diethylimino (a) phenoxazonium Perchlorate;
3-Ethylamino-7-ethylimino-2,8-dimethylphenoxazin-5-ium Perchorate;
8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a, 1 -Heat eye] xanthylium perchlorate (8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1- bc: 9 ', 9a, 1-hi] xanthylium Perchlorate);
1-Ethyl-2- (4- (p-dimethylthyminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridinium Perchlorate);
Carbazine 122;
9-ethylamino-5-ethylimino-10-methyl-5H-benzo (e) phenoxazonium perchlorate; 9-Ethylamino-5-ethylimino-10-methyl-5H-benzo (a) phenoxazoniumPerchlorate;
3-Diethylamino-7-diethyliminophenoxazonium perchlorate;
3-Diethylthiadicarbocyanine Iodide;
Oxazine 750;
1-Ethyl-4- (4- (p-dimethylaminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-4- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridininum Perchlorate);
1,1 ', 3,3,3', 3'-hexamethylindodicarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindodicarbocyanine Iodide);
1,1'-Diethyl-4,4'-carbocyanine iodide (1,1'-Diethyl-4,4'-carbocyanine Iodide);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -1,3,3-trimethyl-3H-indolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -1,3,3-trimethyl-3H-indolium Perchlorate);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3-ethylbenzosoazolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3- ethylbenzothoazolium Perchlorate);
1,1'-Diethyl-2,2'-dicarbocyanine iodide (1,1'-Diethyl-2,2'-dicarbocyanine Iodide);
1-ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -quinolinodinium))-1,3-butadienyl) -pyridinium perchlorate (1 -Ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (i, j) -chinolinozinium))-1,3-buta dienyl) -pyridinium Perchlorate);
3,3'-Dimethyloxatricarbocyanine iodide (3,3'-DimethyloxatricarbocyanineIodide);
1-Ethyl-4- (p-dimethylaminophenyl) -1,3-butadienyl) -quinolinium perchlorate (1-Ethyl-4- (p-Dimethylaminophenyl) -1,3-buta dienyl) -quinolinium Perchlorate) ;
8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolizino [9,9a, 1-Beecy: 9 ', 9a', 1-Hetch Eye ] Xanthylium perchlorate (Rhodamine 800) (8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc : 9a ', 1-hi] xanthylium Perchlorate (Rhodamine800));
2- (6- (4-Dimethylaminophenyl) -2,4-neopentylene-1,3,5) -3-methylbenzothiazolium perchlorate (2- (6- (4-Dimethylaminophenyl) -2,4 -neopentylene-1,3,5) -3-methylbenzothiazoliumPerchlorate);
1,1 ', 3,3,3', 3'-hexamethylindotricarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindotricarbocyanine Iodide);
IR125;
3,3'-diethylthiatricarbocyanine iodide; 3,3'-diethylthiatricarbocyanine iodide;
IR144;
2- (6- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5-hexatrienyl) -3-methyl Benzothiazolium perchlorate (2- (6- (9- (2,3,6,7, -Tetrahydro-1H, 5H-benzo (i, j) -chinolizinium))-2,4-neopentylene-1, 3,5-hexatrienyl) -3-methyllbenzothiazolium Perchlorate);
3,3'-diethyl-9,11-neopentylenethiatricarbocyanine iodide; 3,3'-diethyl-9,11-neopentylenethiatricarbocyanine Iodide;
1,1 ', 3,3,3', 3'-hexamethyl-4,4 ', 5,5'-dibenzo-2,2'-indotricarbocyanine iodide (1,1', 3,3, 3 ', 3'-Hexamethyl-4,4', 5,5'-dibenzo-2,2'-indotricarbocyanine Iodide);
3,3'-diethyl-4,4 ', 5,5'-dibenzothiatricarbocyanine iodide (3,3'-diethyl-4,4', 5,5'-dibenzothiatricarbocyanine Iodide);
1,2'-Diethyl-4,4'-dicarbocyanine iodide (1,2'-Diethyl-4,4'-dicarbocyanine Iodide);
IR140;
2- (8- (4-p-dimethylaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium perchlorate (2- (8- (4-p-Dimethyhlaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR132;
2- (8- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5,7-octatetraenyl)- 3-methylbenzothiazolium perchlorate (2- (8- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (i, j) chinolizinium))-2,4-neopentylene-1 , 3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR26;
IR5;
Cis-1,2-dicyano-1,2-bis (2,4,5-trimethyl-3-thienyl) ethane (CMTE) (cis-1,2-Dicyano-1,2-bis (2,4,5 -trimethyl-3-thienyl) ethane (CMTE)),
Or any derivative molecule thereof.

The invention according to claim 7 is the resolution evaluation chart for a fluorescence microscope according to any one of claims 1 to 6, wherein the silicon substrate is λ / 4 or more with respect to a light source wavelength λ used in the fluorescence microscope. It has the following plane accuracy and roughness accuracy.

When the invention according to claim 8 is used to manufacture the resolution evaluation chart for a fluorescence microscope according to claim 1,
A thin film forming process for forming an organic thin film on a silicon substrate;
A dyeing step of impregnating the organic thin film with a fluorescent dye material having a luminescent center by a dye vapor transport method;
A non-light-emitting portion forming step of forming a non-light-emitting portion by irradiating a part of the organic thin film with a particle beam to destroy the light emission center of the fluorescent dye material;
It is characterized by including.

When the invention according to claim 9 is used to manufacture the resolution evaluation chart for a fluorescence microscope according to claim 2,
A thin film forming process for forming an organic thin film on a silicon substrate;
A dyeing step of impregnating the organic thin film with a fluorescent dye material having a luminescent center by a dye vapor transport method;
A non-light emitting part forming step of forming a non-light emitting part by removing the organic thin film on a part of the silicon substrate by etching the organic thin film after irradiating a part of the organic thin film with a particle beam; ,
It is characterized by including.

The invention according to claim 10 is the method for producing a resolution evaluation chart for a fluorescence microscope according to claim 8 or 9, wherein in the thin film forming step, an organic material is developed on the silicon substrate by hot pressing, casting or spin coating. Thus, the organic thin film is formed.

The invention according to claim 11 is the method for producing a resolution evaluation chart for a fluorescence microscope according to any one of claims 8 to 10 , wherein the staining step is an atmosphere having a glass transition temperature (Tg) or less of the organic thin film. Among them, the organic thin film is impregnated with the fluorescent dye material by a dye vapor transport method.

The invention according to claim 12 is the method for producing a resolution evaluation chart for a fluorescence microscope according to claim 8 or 9 , wherein an electron beam is used as the particle beam, and the acceleration voltage and / or the electron injection amount by the electron beam are: It adjusts according to the area | region of the said non-light-emitting part to form.

Invention of the resolution evaluation method of the fluorescence microscope which concerns on Claim 13 evaluates the resolution of a fluorescence microscope using the resolution evaluation chart for fluorescence microscopes as described in any one of Claims 1-7. It is.

  According to the resolution evaluation chart for a fluorescence microscope according to the present invention, since the organic thin film can be impregnated with a fluorescent dye material uniformly and at a high concentration, there is no unevenness in the fluorescence intensity, the fluorescence contrast ratio can be increased, and organic The thin film can have a thickness on the order of nm shorter than the wavelength used by the fluorescence microscope, so it can be applied to the evaluation of the imaging performance of a super-resolution fluorescence microscope with a high NA with a very shallow depth of focus, and the versatility can be improved. .

  Moreover, according to the method for producing a fluorescence microscope resolution evaluation chart according to the present invention, since various fluorescent dye materials can be used, a high-quality fluorescence microscope resolution evaluation chart can be easily produced.

  Furthermore, according to the resolution evaluation method of the fluorescence microscope according to the present invention, since there is no unevenness in the fluorescence intensity and the above-described resolution evaluation chart for fluorescence microscope is used, the imaging performance of the super-resolution fluorescence microscope using two wavelengths is also objective. And it can evaluate quantitatively and accurately.

  Embodiments of the present invention will be described below with reference to the drawings.

  In the method for producing a resolution evaluation chart for a fluorescence microscope in the first embodiment of the present invention, first, an organic thin film is formed on a substrate (thin film forming step), and then the fluorescent dye having a luminescent center in the formed organic thin film The material is impregnated by the dye vapor transport method (dyeing process), and then a part of the organic thin film impregnated with the fluorescent dye material is irradiated with a particle beam to destroy the luminescent center of the fluorescent dye material, thereby removing the non-luminescent part. Then, a resolution evaluation chart for a fluorescence microscope is manufactured.

  Here, unlike the thin film deposition method described above, the dye vapor transport method forms a photoactive thin film of ultrathin, high concentration, and high quality thin film using a thermal equilibrium process. As shown in FIG. The organic compound molecules 1 such as the sublimated fluorescent dye molecules are transported in the sealed container 2 onto the polymer thin film 4 formed on the glass substrate 3 to form a thin film of the organic compound 1 on the surface of the polymer thin film 4. And is widely applicable to sublimable organic compounds. FIG. 2 shows a dye thin film formation model on the surface of the polymer thin film 4 by this dye vapor transport method.

  In addition, polymers that form organic compound thin films by the dye vapor transport method are not limited to those formed by spin coating methods, casting methods, hot press methods, etc., and are produced by various manufacturing methods such as injection-molded polymers. Can be used. The reason is that the penetration depth of organic compound molecules, particularly fluorescent dye molecules, into the polymer by the dye vapor transport method is very deep, for example, 100 μm, and the polymer can be uniformly dyed at a high concentration.

For example, diallylethene dyes (cis-1,2-Dicyano, 2-bis (2,4,5-trimethyl-3-thienyl) ethene; C ₁₈ H ₁₈ N ₂ S ₂ = 326.49) Although it is a fluorescent dye molecule having a very wide range of applicability as a material, it is an organic compound that is extremely sublimable and suitable for forming a high-concentration thin film.

According to an experiment by the present inventors, in FIG. 1, the above-mentioned diallylethene fluorescent dye material and the polymer thin film 4 laminated on the glass substrate 3 by a spin coating method or a hot press method are placed in a glass pipe having a diameter of 15 mm. The ampule (sealed container 2) is formed by burning and sealing the glass pipe with a burner while maintaining a vacuum level of 10 ⁻² Pa or less with a turbo molecular pump or a rotary pump. When placed in an electric furnace or a blast dryer 5 in which a heater is wound around the pipe and left at a temperature of about 100 ° C. for about 24 hours, the polymer thin film 4 on the glass substrate 3 can be dyed at a high concentration and uniformly. It was confirmed. In particular, if the heating temperature is controlled below the glass transition temperature (Tg) of the polymer, the polymer phase transition can be suppressed and the smoothness of the polymer surface can be maintained.

  This method can also impregnate dense polymers such as injection molded polycarbonate (PC), for example at a rate of 3 μm / h, with a concentration of 7 mol / l and an absorbance of approximately 1. (See, for example, Toshiko Mizoguro et al., “Coloring Materials” Vol. 75 No. 3 pp111-116, 2002). In addition, the depth and concentration of impregnation for the polymer can be controlled by temperature and time, and production control is very simple.

  By the way, the impregnation process of the fluorescent dye molecule by the dye vapor transport method is the element of 1) the sublimation speed of the fluorescent dye molecule, 2) the chemical affinity between the polymer and the fluorescent dye molecule, and 3) the thermal diffusion process in the polymer. Depends on. Hereinafter, these elements will be described.

1) Sublimation speed of fluorescent dye molecules Normally, the fluorescent dye molecules in an ampule are in a crystalline state. Therefore, the higher the control temperature of the ampule, the faster the sublimation speed from the crystal surface and the higher the moving speed in vacuum. Become. Thereby, the dye vapor pressure on the polymer surface is increased, the establishment of the fluorescent dye molecules that collide with the polymer surface is increased, and the probability of the fluorescent dye molecules impregnated in the polymer is increased. Naturally, basic physical properties such as the molecular weight of the fluorescent dye molecule also affect the sublimation rate.

2) Chemical affinity between the polymer and the fluorescent dye molecule Whether the fluorescent dye molecule that has reached the polymer surface can enter the inside of the polymer depends on the affinity between the polymer and the fluorescent dye molecule. For example, diallylethene-based fluorescent dye molecules are well adsorbed on the polymer surface in polycarbonate, polymethyl methacrylate, polybenzyl methacrylate, etc., and diffuse quickly inside the polymer, but in polyhydroxypropyl methacrylate having hydrosyl groups, , No movement / dispersion. This is because the affinity is as low as possible, so even if the fluorescent dye molecule collides with the polymer surface, it only diffuses into the vacuum.

3) Thermal diffusion process in the polymer The fluorescent dye molecules once diffused in the polymer are subsequently dispersed in the polymer by the thermal diffusion process. Naturally, if the management temperature of the ampoule is high, the thermal kinetic energy of the fluorescent dye molecule is high and the diffusion rate in the polymer is high. Further, when the control temperature is increased, the molecular chains constituting the polymer are elongated by thermal vibration, and consequently the moving speed in the polymer is increased.

  The inventors have experimentally confirmed that the polymer can be impregnated with the following series of fluorescent dye molecules by the dye vapor transport method by carefully managing the processes described in 1), 2) and 3) above. is doing.

2,2 ″ -Dimethyl-p-terphenyl;
P-terphenyl (PTP);
3,3 ', 2'',3''-Tetramethyl-P-quaterphenyl(3,3', 2 '', 3 ''-Tetramethyl-P-quaterphenyl);
2,2 '''-Dimethyl-P-quaterphenyl;
2-Methyl-5-t-butyl-p-quaterphenyl;
2- (4-Biphenyl) -5- (4-t-butylphenyl) -1,3,4-oxyazole (BPBD-365) (2- (4-Biphenylyl) -5- (4-t-butylphenyl) -1,3,4-oxiazol (BPBD-365));
2- (4-biphenyl) -phenyl-1,3,4-oxadiazol (2- (4-Biphenylyl) -phenyl-1,3,4-oxadiazol);
2,5,2 '''', 5 ''''-Tetramethyl-p-quinquephenyl (2,5,2 '''' 5, ''''-Tetramethyl-p-quinquephenyl);
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-quink ephenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-quinquephenyl);
2,5-diphenyloxazol;
2,5-diphenylfuran;
p-Quanterphenyl (PQP);
2,5-bis- (4-biphenylyl) -1,3,4-oxadiazol (2,5-Bis- (4-biphenylyl) -1,3,4-oxadiazol);
p-Quaterphenyl-4-4 '''-disulfonic acid Disodiumsalt;
p-Quaterphenyl-4-4 '''-disulfonic acid Dipotassiumsalt;
4,4 '''-bis- (2-butyloctyloxy) -p-quanterphenyl;
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-sexiphenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-sexiphenyl);
2- (1-naphthyl) -5-phenyloxazol (2- (1-Naphthyl) -5-phenyloxazol);
2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid potassium salt (2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid Potassium Salt);
2- (4-biphenyl) -6-phenylbenzoxazole-1,3 (2- (4-Biphenylyl) -6-phenylbenzoxazol-1,3);
4,4'-Diphenylstilbene;
(1,1'-Biphenyl) -4-sulfonic acid, 4,4 ''-1,2-ethene-diylbis-, dipotassium salt ([1,1'-Biphenyl] -4-sulfonic acid, 4,4 '' -1,2-ethene-diylbis-, dipotassium salt);
2,5-bis- (4-biphenylyl) -oxazole (2,5-Bis- (4-biphenylyl) -oxazol);
2,2 '-[(1,1'-biphenyl) -4,4'-diyldi-2,1-ethenediyl] -bis-benzenesulfonic acid disodium salt (2,2'-([1,1'- Biphenyl] -4,4'-diyldi-2,1-ethenediyl) -bis-benzenesulfonic acid Disodium Salt);
7-Amino-4-methylcarbostyryl;
1,4-di [2- (5-phenyloxazoly)] benzene (1,4-Di [2- (5-phenyloxazoly)] benzene);
7-hydroxy-4-methylcoumarin;
p-Bis (o-methylstyryl) -benzene;
Benzofuran, 2,2 '-(1,1'-biphenyl) -4,4'-diyl-bis-tetrasulfonic acid (Benzofuran, 2,2'-[1,1'-biphenyl] -4,4'- diyl-bis-tetrasulfonic-acid);
7-Dimethylamino-4-methylquinolom-2;
7-Amino-4-methylcoumarin;
2- (p-Dimethylaminostyryl) -pyridylmethyl Iodide;
7-diethylaminocoumarun;
7-Diethylamino-4-methylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-8-methylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8-methylqinolizino- [9 , 9a, 1-gh] -coumarin);
7-Diethylamino-4-trifluormethylcoumarin;
7-Dimethylamino-4-trifluormethylcoumarin;
7-Amino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1- gh] -coumarin);
7-Ethylamino-6-methyl-4-trifluormethylcoumarin;
7-Ethylamino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-9-carboethoxyquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9- carboethoxyquinolizino-[9,9a, 1-gh] coumarin);
2,3,5,6-1H, 4H-Tetrahydro-9- (3-pyridyl) -quinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro- 9- (3-pyridyl) -quinolizino- [9,9a, 1-gh] coumarin);
3- (2'-N-methylbenzimidazolyl) -7-n, n-diethylaminocoumarin (3- (2'-N-Methylbenzimidazolyl) -7-n, n-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino -[9,9a, 1-gh] -coumarin);
N-Methyl-4-trifluormethylpiperidino- [3,2-g] -coumarin;
2- (p-Dimethylaminostyryl) -benzothiazolylethyl Iodide;
3- (2'-Benzimidazolyl) -7-N, N-diethylaminocoumarin);
Brilliant sulfaflavin (Brillantsulfaflavin);
3- (2'-Benzothiazolyl) -7-diethylaminocoumarin (3- (2'-Benzothiazolyl) -7-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-8-trifluoromethylquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8 -trifluormethylquinolizino- [9,9a, 1-gh] coumarin);
3,3'-diethyloxacarbocyanine iodide; 3,3'-diethyloxacarbocyanine iodide;
3,3′-Dimethyl-9-ethylthiacarbocyanine iodide (3,3′-Dimethyl-9-ethylthiacarbocyanine Iodide);
Fluorescein disodium (Uranin) (Disodium Fluorescein (Uranin));
9- (o-Carboxyphenyl) -2,7-dichloro-6-hydroxy-3H-xanthen-3-one-2,7-dichlorofluorescein (fluorescein 548) (9- (o-Carboxyphenyl) -2,7- dichloro-6-hydroxy-3H-xanthen-3-on2,7-Dichlorofluorescien / Fluorescein 548);
Fluorol 555 (Fluorol 7GA);
o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzoic acid (rhodamine 560 (rhodamine 6G)) (o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzonic acid (Rhodamine 560 (Rhodamine 6G)));
2- [6- (Ethylamino) -3- (ethylimino) -2,7-dimethyl-3H-xanthen-9-yl] benzoic acid, perchlorate, (Rhodamine 575) (BenzoicAcid, 2- [6- (ethylamino) ) -3- (ethylimino) -2,7-dimethyl-3H-xanthen9-yl], perchlorate (Rhodamine 575));
Benzoic acid 2- [6- (ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethyl ester monochloride, rhodamine 590 (Benzonic Acid, 2- [6 -(ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethylester, monohydrochloride (Rhodamine 590));
1,3'-diethyl-4,2'-quinolyloxycarbocyanine iodide (1,3'-diethyl-4,2'-quinolyloxacarbocyanine Iodide);
1,1'-diethyl-2,2'-carbocyanine iodide (1,1'-diethyl-2,2'-carbocyanine Iodid);
2- [6- (Diethylamino) -3- (diethylimino) -3H-xanthen-9-yl] benzoic acid (rhodamine 610 (rhodamine B)) (2- [6- (diethylamino) -3- (diethylimino)- 3H-xanthen-9-yl] benzonic acid (Rhodamine 610 (Rhodamine B)));
Ethanaminium N-[(6-diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethyl hydroxide inner salt, sodium salt (Ethanaminium, N-[(6- diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethylhydroxid, inner salt, sodium salt);
Malachite Green;
3,3'-diethylthiacarbocyanine iodide (3,3'-diethylthiacarbocyanine iodide);
1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide; 1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide;
8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a' , 1-Echiai] xanthylium perchlorate (rhodamine 640) (8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H- diquinolizino [9,9a, 1-bc: 9 ', 9a', 1-hi] xanthylium Perchlorate (Rhodamine640));
4-Dicyanmethylene-2-methyl-6- (p-dimethylaminostyryl) -4H-pyran (DCM) ;
3,3'-diethyloxadicarbocyanine iodide; 3,3'-diethyloxadicarbocyanine iodide;
8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-Biecy: 9 ' , 1-Echiai] xanthene (sulforhodamine 640) (8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc: 9 ', 1-hi] xanthene (Sulforhodamine 640));
5,9-Diaminobenzo [a] phenoxazonium Perchorate;
9-Diethylamino-5H-benzo (a) phenoxazin-5-one;
5-Amino-9-diethylimino (a) phenoxazonium Perchlorate;
3-Ethylamino-7-ethylimino-2,8-dimethylphenoxazin-5-ium Perchorate;
8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a, 1 -Heat eye] xanthylium perchlorate (8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1- bc: 9 ', 9a, 1-hi] xanthylium Perchlorate);
1-Ethyl-2- (4- (p-dimethylthyminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridinium Perchlorate);
Carbazine 122;
9-ethylamino-5-ethylimino-10-methyl-5H-benzo (e) phenoxazonium perchlorate; 9-Ethylamino-5-ethylimino-10-methyl-5H-benzo (a) phenoxazoniumPerchlorate;
3-Diethylamino-7-diethyliminophenoxazonium perchlorate;
3-Diethylthiadicarbocyanine Iodide;
Oxazine 750;
1-Ethyl-4- (4- (p-dimethylaminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-4- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridininum Perchlorate);
1,1 ', 3,3,3', 3'-hexamethylindodicarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindodicarbocyanine Iodide);
1,1'-Diethyl-4,4'-carbocyanine iodide (1,1'-Diethyl-4,4'-carbocyanine Iodide);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -1,3,3-trimethyl-3H-indolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -1,3,3-trimethyl-3H-indolium Perchlorate);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3-ethylbenzosoazolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3- ethylbenzothoazolium Perchlorate);
1,1'-Diethyl-2,2'-dicarbocyanine iodide (1,1'-Diethyl-2,2'-dicarbocyanine Iodide);
1-ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -quinolinodinium))-1,3-butadienyl) -pyridinium perchlorate (1 -Ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (i, j) -chinolinozinium))-1,3-buta dienyl) -pyridinium Perchlorate);
3,3'-Dimethyloxatricarbocyanine iodide (3,3'-DimethyloxatricarbocyanineIodide);
1-Ethyl-4- (p-dimethylaminophenyl) -1,3-butadienyl) -quinolinium perchlorate (1-Ethyl-4- (p-Dimethylaminophenyl) -1,3-buta dienyl) -quinolinium Perchlorate) ;
8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolizino [9,9a, 1-Beecy: 9 ', 9a', 1-Hetch Eye ] Xanthylium perchlorate (Rhodamine 800) (8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc : 9a ', 1-hi] xanthylium Perchlorate (Rhodamine800));
2- (6- (4-Dimethylaminophenyl) -2,4-neopentylene-1,3,5) -3-methylbenzothiazolium perchlorate (2- (6- (4-Dimethylaminophenyl) -2,4 -neopentylene-1,3,5) -3-methylbenzothiazoliumPerchlorate);
1,1 ', 3,3,3', 3'-hexamethylindotricarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindotricarbocyanine Iodide);
IR125;
3,3'-diethylthiatricarbocyanine iodide; 3,3'-diethylthiatricarbocyanine iodide;
IR144;
2- (6- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5-hexatrienyl) -3-methyl Benzothiazolium perchlorate (2- (6- (9- (2,3,6,7, -Tetrahydro-1H, 5H-benzo (i, j) -chinolizinium))-2,4-neopentylene-1, 3,5-hexatrienyl) -3-methyllbenzothiazolium Perchlorate);
3,3'-diethyl-9,11-neopentylenethiatricarbocyanine iodide; 3,3'-diethyl-9,11-neopentylenethiatricarbocyanine Iodide;
1,1 ', 3,3,3', 3'-hexamethyl-4,4 ', 5,5'-dibenzo-2,2'-indotricarbocyanine iodide (1,1', 3,3, 3 ', 3'-Hexamethyl-4,4', 5,5'-dibenzo-2,2'-indotricarbocyanine Iodide);
3,3'-diethyl-4,4 ', 5,5'-dibenzothiatricarbocyanine iodide (3,3'-diethyl-4,4', 5,5'-dibenzothiatricarbocyanine Iodide);
1,2'-Diethyl-4,4'-dicarbocyanine iodide (1,2'-Diethyl-4,4'-dicarbocyanine Iodide);
IR140;
2- (8- (4-p-dimethylaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium perchlorate (2- (8- (4-p-Dimethyhlaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR132;
2- (8- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5,7-octatetraenyl)- 3-methylbenzothiazolium perchlorate (2- (8- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (i, j) chinolizinium))-2,4-neopentylene-1 , 3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR26;
IR5;
Cis-1,2-dicyano-1,2-bis (2,4,5-trimethyl-3-thienyl) ethane (CMTE) (cis-1,2-Dicyano-1,2-bis (2,4,5 -trimethyl-3-thienyl) ethane (CMTE))

  Table 1 shows an example of the dye content in the polymer when invaded by the dye vapor transport method. In Table 1, CMTE, ie cis-1,2-dicyano-1,2-bis (2,4,5-trimethyl-3-thienyl) ethane (diallylethene), was left in an ampoule at 95 ° C. for 168 hours, DCM That is, 4-dicyanmethylene-2-methyl-6- (p-dimethylaminostyryl) -4H-pyran was allowed to stand at 110 ° C. for 240 hours. The pigment content (wt%) was measured spectroscopically using infrared light or ultraviolet light. In the polymers shown in Table 1, PS represents polystyrene, and PMMA represents poly (methyl methacrylate).

  Other representative fluorescent dye molecules, rhodamine 6G and rhodamine B, were also confirmed to be dispersed in the polymer under substantially the same conditions. Further, regarding the polymer, it was confirmed that the fluorescent dye molecules can be well dispersed in the following polymers in addition to those shown in Table 1.

  Poly (α-methylstyrene), polyindene, poly (4-methyl-1-pentene), polyvinylpyridine, polyvinyl formal, polyvinyl acetal, polyvinyl butyral, polyvinyl acetate, polyvinyl alcohol, polyvinyl chloride, polyvinylidene chloride, polyvinylmethyl Ether, polyvinyl ethyl ether, polyvinyl benzyl ether, polyvinyl methyl ketone, poly (N-vinyl carbazole), poly (N-vinyl pyrrolidone), polymethyl acrylate, polyethyl acrylate, polyacrylic acid, polyacrylonitrile, polymethacrylic acid Ethyl, polybutyl methacrylate, polybenzyl methacrylate, polycyclohexyl methacrylate, polymethacrylic acid, polymethacrylamide, polymethacrylonitrile, polyacetate Rudehydr, Polychloral, Polyethylene oxide, Polypropylene oxide, Polyethylene terephthalate, Polybutylene terephthalate, Polycarbonates (bisphenols + carbonic acid), Poly (diethylene glycol / bisallyl carbonate), 6-nylon, 6,6-nylon, 12-nylon , 6,12-nylon, ethyl polyaspartate, ethyl polyglutamate, polylysine, polyproline, poly (γ-benzyl-L-glutamate), methylcellulose, ethylcellulose, benzylcellulose, hydroxyethylcellulose, hydroxypropylcellulose, acetylcellulose, cellulose Triacetate, cellulose tributyrate, alkyd resin (phthalic anhydride + glycerin), fatty acid modified alkyd resin ( Fatty acid + phthalic anhydride + glycerin), unsaturated polyester resin (maleic anhydride + phthalic anhydride + propylene glycol), epoxy resin (bisphenols + epichlorohydrin), polyurethane resin, phenol resin, urea resin, melamine resin, xylene resin , Resins such as toluene resin and guanamine resin; organic polysilanes such as poly (phenylmethylsilane), organic polygermane or copolymers / copolycondensates thereof; carbon disulfide, carbon tetrafluoride, ethylbenzene, perfluorobenzene, Polymer compounds obtained by plasma polymerization of normally non-polymerizable compounds such as perfluorocyclohexane, trimethylchlorosilane, etc., or the residue of the dye in the above polymer compounds are side chains of monomer units, crosslinking groups, copolymer monomer units Or as a polymerization initiation terminal Those coupled to form.

  The method for manufacturing a fluorescence microscope resolution evaluation chart according to the present embodiment is particularly excellent in the following points.

  1) In a fluorescence microscope resolution evaluation chart, it is necessary to impregnate a fluorescent dye molecule into a polymer layer having a thickness equal to or less than the wavelength used. This is because in the case of a fluorescence microscope using a high NA objective lens, the depth of focus is extremely shallow, and if the position of the observation sample is not accurately moved to the focus, it will be out of focus (so-called out-of-focus), resulting in a microscope system connection. This is because the image performance cannot be accurately evaluated. In this situation, even when an observation sample having a thickness is used, a similar situation occurs because fluorescent images from other than the focal plane are observed in an overlapping manner.

  Therefore, it is necessary to make the fluorescent active layer, that is, the polymer layer impregnated with fluorescent dye molecules, as thin as possible. This is strongly desired as the resolution of a microscope in recent years increases, and the thickness is required to be thinner than the wavelength of illumination light of the microscope, for example, several hundred nm or less. In this regard, the dye vapor transport method is advantageous in that the fluorescent dye molecules can be injected into the polymer at a high concentration such that the absorbance is approximately 1 as described above.

  2) It is extremely advantageous also in the pattern drawing process which is indispensable in the resolution evaluation chart manufacturing process. That is, in pattern drawing, a non-light emitting portion is patterned by irradiating a particle beam, particularly an electron beam, and destroying the light emitting center in the thin film. Therefore, preferably, a polymer is formed on a conductive band substrate such as a silicon wafer. By developing, it becomes possible to perform drawing processing with an accuracy of nm order.

  In this way, if a conductive substrate is selected, combined with the fact that the polymer layer can be made thinner than the wavelength of light, there is no charge-up caused by electron beam irradiation. Therefore, drawing processing on the order of nm far exceeding the wavelength size of light is possible, and it can be used as a resolution evaluation chart that can objectively evaluate the imaging performance of the optical microscope.

  3) Furthermore, the resolution evaluation chart for a fluorescence microscope produced in the present embodiment has specifications that can be applied to the resolution evaluation of the latest super-resolution fluorescence microscope (for example, see Japanese Patent No. 3350442). This super-resolution fluorescence microscope irradiates light of two colors, and the excitation wavelength band from the first electronic excited state to the second electronic excited state is the vibration level from the first electronic excited state to the ground state. In addition, fluorescent dye molecules overlapping with the fluorescence wavelength band when deexcited by the fluorescence process are used for the fluorescent label.

  4) In addition, in this embodiment, since the polymer can be directly developed on the optically polished silicon wafer, it is possible to prevent impairing the plane accuracy and roughness accuracy of the resolution evaluation chart. In general, if there are irregularities of λ / 4 or more with respect to the light source wavelength λ used in the fluorescence microscope, serious wavefront aberration occurs on the sample surface, making it impossible to evaluate the performance of the microscope system alone. The resolution evaluation chart for a fluorescence microscope manufactured according to the embodiment can constantly maintain a plane accuracy and a roughness accuracy of λ / 10 or more.

  3 and 4 show a fluorescence microscope resolution evaluation chart manufactured according to this embodiment. FIG. 3 is a plan view of the whole, and FIG. 4A is a plan view schematically showing details of the chart. FIG. 4 and FIG. 4B are cross-sectional views of FIG. In this resolution evaluation chart 11 for a fluorescence microscope, a PMMA thin film 13 having a thickness of 5000 mm is formed on a silicon wafer 12 optically polished with an accuracy of λ / 10 with respect to a wavelength λ of a light source used in the fluorescence microscope by spin coating. Thereafter, the PMMA thin film 13 is dyed with DCM by the dye vapor transport method and then electron beam drawing is performed to destroy the light emission center of the DCM, and 10 non-light emitting portions 14 having a line width of 1 μm are formed at a pitch of 2 μm. A 1 μm pattern portion 15, a 3 μm pattern portion 17 having 10 non-light emitting portions 16 having a line width of 3 μm at a pitch of 6 μm, and a 5 μm pattern portion 19 having 10 non-light emitting portions 18 having a line width of 5 μm at a pitch of 10 μm. Between 1 μm pattern portion 15 and 3 μm pattern portion 17 and between 3 μm pattern portion 17 and 5 μm pattern portion 19 It is obtained by formed at 5μm respectively.

Note that the spin coating speed condition for forming the PMMA thin film on the silicon wafer is appropriately set in the range of 1000 rpm to 10,000 rpm according to the film thickness of the PMMA thin film 13 to be formed, the coating time, and the temperature. For dyeing the PMMA thin film 13, the silicon wafer 12 on which the PMMA thin film 13 is formed and DCM are placed in an ampule with a vacuum degree of 10 ⁻² Pa or less formed by a glass pipe having a diameter of 15 mm. The PMMA thin film 13 was uniformly dyed with DCM at a high concentration by placing it in an electric furnace or a blow dryer having a heater wrapped around the trunk pipe and leaving it at a temperature of about 110 degrees for about 240 hours. Furthermore, the drawing conditions with an electron beam are, for example, an acceleration voltage of 50 keV, a beam current of 100 pA, and a drawing time of 0.9 μs per point. However, if the beam current is in the range of 10 μA to 1 pA, the exposure time and / or acceleration voltage Good drawing is possible by adjustment.

  Next, a second embodiment of the method for producing a resolution evaluation chart for a fluorescence microscope according to the present invention will be described.

  In this embodiment, first, an organic thin film is formed on a substrate in a thin film forming process, and then, in a dyeing process, a fluorescent dye material having an emission center is impregnated into the organic thin film by a dye vapor transport method, and then non-light emitting Until the part of the organic thin film impregnated with the fluorescent dye material in the partial formation step is irradiated with the electron beam, it is the same as in the first embodiment, but in this embodiment, in the non-light emitting partial formation step, After the electron beam irradiation, the organic thin film is developed (etched), and the portion of the organic thin film irradiated with the electron beam is removed from the substrate, thereby forming a non-light emitting portion and manufacturing a resolution evaluation chart for a fluorescence microscope.

  FIG. 5 is a schematic enlarged view of a resolution evaluation chart for a fluorescence microscope manufactured according to the present embodiment. FIG. 5A is a plan view and FIG. 5B is a cross-sectional view. In this fluorescence microscope resolution evaluation chart 21, a PMMA thin film 23 is formed on a silicon wafer 22 to a thickness of 5000 mm by spin coating in the same manner as described with reference to FIGS. After the PMMA thin film 23 is dyed with DCM and electron beam writing is performed, development (etching) is performed, and the portion of the PMMA thin film 23 irradiated with the electron beam is removed from the silicon wafer 22 to obtain a line width of 1 μm. 1 μm pattern portion 25 having 10 non-light emitting portions 24 at a pitch of 2 μm, 3 μm pattern portion 27 having 10 non-light emitting portions 26 having a line width of 3 μm at a pitch of 6 μm, and non-light emitting portions 28 having a line width of 5 μm at a pitch of 10 μm. 5 μm pattern portions 29 having 10 pieces at a distance between the 1 μm pattern portion 25 and the 3 μm pattern portion 27 and Each of the 3 μm pattern portion 27 and the 5 μm pattern portion 29 is formed with a space of 5 μm.

  FIG. 6 is an electron microscope (SEM) photograph of a resolution evaluation chart for a fluorescence microscope manufactured according to the present embodiment. FIG. 6A shows an SEM photograph of 30000 times the 1 μm pattern portion 25, and FIG. ) Shows a 10,000 times SEM photograph of the 3 μm pattern portion 27, and FIG. 6C shows a 10,000 times SEM photograph of the 5 μm pattern portion 29.

  6A to 6C, according to the present embodiment, the width of the non-light emitting portion 24 is approximately 1.100 μm for the 1 μm pattern portion 25 and the non-light emitting portion for the 3 μm pattern portion 27. In the pattern portion 29 having a width of approximately 3.104 μm and approximately 5 μm, the width of the non-light-emitting portion 28 is approximately 5.045 μm, and a desired pattern can be accurately formed. In addition, in the fluorescence microscope resolution evaluation chart 11 shown in FIGS. 3 and 4 in which development processing is not performed, similarly, a desired pattern can be accurately formed.

  FIG. 7 is a photomicrograph of the fluorescence microscope resolution evaluation chart 21 shown in FIG. 5 using the latest laser scanning fluorescence microscope. The excitation wavelength of this fluorescence microscope is the green line of the He—Ne laser (wavelength λ: 543.5 nm), and the design resolution is 0.8 μm based on the Rayleigh resolution norm.

  As is apparent from FIG. 7, according to this fluorescence microscope, it can be seen that the drawing line (non-light emitting portion) of the 1 μm pattern portion (1 μm line and space) is barely decomposed. Therefore, by using this fluorescence microscope resolution evaluation chart 21, the resolution expected for the fluorescence microscope can be accurately evaluated. The same applies to the fluorescence microscope resolution evaluation chart 11 shown in FIGS. 3 and 4.

  In the above embodiment, one evaluation chart having a 1 μm pattern portion, a 3 μm pattern portion, and a 5 μm pattern portion is formed on a silicon wafer. However, a plurality of such evaluation charts can be formed on a single silicon wafer. In this way, since the evaluation chart can be easily positioned during the resolution evaluation, the resolution evaluation can be performed quickly.

It is a figure for demonstrating the pigment | dye vapor | steam transport method. It is a figure which shows the pigment | dye thin film formation model to the polymer thin film surface by a pigment | dye vapor transport method. It is a top view which shows the resolution evaluation chart for fluorescence microscopes manufactured with the manufacturing method by 1st Embodiment of this invention. It is the top view and sectional drawing which expand the detail of the resolution evaluation chart for fluorescence microscopes shown in FIG. 3 typically. It is the top view and sectional drawing which expand and show the details of the resolution evaluation chart for fluorescence microscopes manufactured with the manufacturing method by a 2nd embodiment of the present invention typically. It is an electron micrograph of the resolution evaluation chart for fluorescence microscopes shown in FIG. It is a microscope picture by the laser scanning fluorescence microscope of the resolution evaluation chart for fluorescence microscopes shown in FIG. It is a conceptual diagram which shows the electronic structure of the valence orbit of the molecule | numerator which comprises a sample. It is a conceptual diagram which shows the 1st electronic excitation state of the molecule | numerator of FIG. Similarly, it is a conceptual diagram which shows a 2nd electronic excitation state. Similarly, it is a conceptual diagram which shows the state which returns from a 2nd electronic excitation state to a ground state. It is a conceptual diagram for demonstrating the double resonance absorption process in a molecule | numerator. Similarly, it is a conceptual diagram for explaining a double resonance absorption process. It is a figure which shows the standard chart for resolution evaluation used with a transmission microscope. It is a figure for demonstrating the resolution evaluation chart for fluorescence microscopes under development. It is a figure which shows the light-and-dark state of the non-light-emission part shown in FIG. It is a figure which shows the diffusion state of the incident electron by the acceleration voltage of an electron beam.

Explanation of symbols

11, 21 Resolution evaluation chart for fluorescence microscope 12, 22 Silicon wafer 13, 23 PMMA thin film 14, 24 Non-light emitting part 15, 25 1 μm pattern part 16, 26 Non-light emitting part 17, 27 3 μm pattern part 18, 28 Non-light emitting part 19 , 29 5μm pattern part

Claims (13)

A fluorescence microscope resolution evaluation chart used for evaluating the imaging performance of a fluorescence microscope,
A silicon substrate;
An organic thin film formed on the silicon substrate;
A fluorescent dye material having an emission center impregnated in the organic thin film by a dye vapor transport method;
A resolution evaluation chart for a fluorescence microscope, characterized in that a part of the organic thin film has a non-light-emitting portion formed by destroying a light emission center of the fluorescent dye material by irradiation with a particle beam. A fluorescence microscope resolution evaluation chart used for evaluating the imaging performance of a fluorescence microscope,
A silicon substrate;
An organic thin film formed on the silicon substrate;
A fluorescent dye material having an emission center impregnated in the organic thin film by a dye vapor transport method;
And characterized in that it has after the irradiation of the particle beam to a portion of the organic thin film, and a non-emitting portion formed by removing the organic thin film on a portion of the silicon substrate by etching the organic thin film A resolution evaluation chart for a fluorescence microscope. The resolution evaluation chart for a fluorescence microscope according to claim 1 or 2, wherein the organic thin film is made of a material having no hydroxyl group. The organic thin film
Polystyrene, poly (α-methylstyrene), polyindene, poly (4-methyl-1-pentene), polyvinylpyridine, polyvinyl formal, polyvinyl acetal, polyvinyl butyral, polyvinyl acetate, polyvinyl alcohol, polyvinyl chloride, polyvinylidene chloride, Polyvinyl methyl ether, polyvinyl ethyl ether, polyvinyl benzyl ether, polyvinyl methyl ketone, poly (N-vinyl carbazole), poly (N-vinyl pyrrolidone), polymethyl acrylate, polyethyl acrylate, polyacrylic acid, polyacrylonitrile, poly Methyl methacrylate, polyethyl methacrylate, polybutyl methacrylate, polybenzyl methacrylate, polycyclohexyl methacrylate, polymethacrylate, polymethacrylate , Polymethacrylonitrile, polyacetaldehyde, polychloral, polyethylene oxide, polypropylene oxide, polyethylene terephthalate, polybutylene terephthalate, polycarbonates (bisphenols + carbonic acid), poly (diethylene glycol bisallyl carbonates), 6-nylon, 6, 6-nylon, 12-nylon, 6,12-nylon, polyethyl aspartate, ethyl polyglutamate, polylysine, polyproline, poly (γ-benzyl-L-glutamate), poly (phenyl methacrylate), poly (t-butyl Methacrylate), poly (4-methylstyrene), poly (t-butylstyrene), methylcellulose, ethylcellulose, benzylcellulose, hydroxyethylcellulose, hydroxy Propylcellulose, acetylcellulose, cellulose triacetate, cellulose tributyrate, alkyd resin (phthalic anhydride + glycerin), fatty acid modified alkyd resin (fatty acid + phthalic anhydride + glycerin), unsaturated polyester resin (maleic anhydride + phthalic anhydride) + Propylene glycol), epoxy resins (bisphenols + epichlorohydrin), polyurethane resins, phenol resins, urea resins, melamine resins, xylene resins, toluene resins, guanamine resins, etc .;
Organic polysilanes such as poly (phenylmethylsilane), organic polygermanes or copolymers / copolycondensates thereof;
Carbon disulfide, carbon tetrafluoride, ethylbenzene, perfluorobenzene, perfluorocyclohexane, trimethylchlorosilane, etc. A group bonded as a side chain of a monomer unit, a crosslinking group, a copolymerization monomer unit, or a polymerization initiation terminal;
The resolution evaluation chart for a fluorescence microscope according to any one of claims 1 to 3, wherein the resolution evaluation chart is made of any organic material. In the fluorescent dye material, the excitation wavelength band from the first electronic excited state to the second electronic excited state overlaps with the fluorescence wavelength band when the first electronic excited state is deexcited by the fluorescence process from the ground state to the vibration level. The resolution evaluation chart for a fluorescence microscope according to any one of claims 1 to 4, wherein the resolution evaluation chart is a molecule composed of a molecule. The fluorescent dye material is
2,2 ″ -Dimethyl-p-terphenyl;
P-terphenyl (PTP);
3,3 ', 2'',3''-Tetramethyl-P-quaterphenyl(3,3', 2 '', 3 ''-Tetramethyl-P-quaterphenyl);
2,2 '''-Dimethyl-P-quaterphenyl;
2-Methyl-5-t-butyl-p-quaterphenyl;
2- (4-Biphenyl) -5- (4-t-butylphenyl) -1,3,4-oxyazole (BPBD-365) (2- (4-Biphenylyl) -5- (4-t-butylphenyl) -1,3,4-oxiazol (BPBD-365));
2- (4-biphenyl) -phenyl-1,3,4-oxadiazol (2- (4-Biphenylyl) -phenyl-1,3,4-oxadiazol);
2,5,2 '''', 5 ''''-Tetramethyl-p-quinquephenyl (2,5,2 '''' 5, ''''-Tetramethyl-p-quinquephenyl);
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-quink ephenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-quinquephenyl);
2,5-diphenyloxazol;
2,5-diphenylfuran;
p-Quanterphenyl (PQP);
2,5-bis- (4-biphenylyl) -1,3,4-oxadiazol (2,5-Bis- (4-biphenylyl) -1,3,4-oxadiazol);
p-Quaterphenyl-4-4 '''-disulfonic acid Disodiumsalt;
p-Quaterphenyl-4-4 '''-disulfonic acid Dipotassiumsalt;
4,4 '''-bis- (2-butyloctyloxy) -p-quanterphenyl;
3,5,3 '''', 5 ''''-Tetra-t-butyl-p-sexiphenyl (3,5,3 '''' 5, ''''-Tetra-t-butyl-p-sexiphenyl);
2- (1-naphthyl) -5-phenyloxazol (2- (1-Naphthyl) -5-phenyloxazol);
2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid potassium salt (2- (4-Biphenylyl) -6-phenylbenzoxazotetrasulfonic acid Potassium Salt);
2- (4-biphenyl) -6-phenylbenzoxazole-1,3 (2- (4-Biphenylyl) -6-phenylbenzoxazol-1,3);
4,4'-Diphenylstilbene;
(1,1'-Biphenyl) -4-sulfonic acid, 4,4 ''-1,2-ethene-diylbis-, dipotassium salt ([1,1'-Biphenyl] -4-sulfonic acid, 4,4 '' -1,2-ethene-diylbis-, dipotassium salt);
2,5-bis- (4-biphenylyl) -oxazole (2,5-Bis- (4-biphenylyl) -oxazol);
2,2 '-[(1,1'-biphenyl) -4,4'-diyldi-2,1-ethenediyl] -bis-benzenesulfonic acid disodium salt (2,2'-([1,1'- Biphenyl] -4,4'-diyldi-2,1-ethenediyl) -bis-benzenesulfonic acid Disodium Salt);
7-Amino-4-methylcarbostyryl;
1,4-di [2- (5-phenyloxazoly)] benzene (1,4-Di [2- (5-phenyloxazoly)] benzene);
7-hydroxy-4-methylcoumarin;
p-Bis (o-methylstyryl) -benzene;
Benzofuran, 2,2 '-(1,1'-biphenyl) -4,4'-diyl-bis-tetrasulfonic acid (Benzofuran, 2,2'-[1,1'-biphenyl] -4,4'- diyl-bis-tetrasulfonic-acid);
7-Dimethylamino-4-methylquinolom-2;
7-Amino-4-methylcoumarin;
2- (p-Dimethylaminostyryl) -pyridylmethyl Iodide;
7-diethylaminocoumarun;
7-Diethylamino-4-methylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-8-methylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8-methylqinolizino- [9 , 9a, 1-gh] -coumarin);
7-Diethylamino-4-trifluormethylcoumarin;
7-Dimethylamino-4-trifluormethylcoumarin;
7-Amino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydroquinolizino- [9,9a, 1- gh] -coumarin);
7-Ethylamino-6-methyl-4-trifluormethylcoumarin;
7-Ethylamino-4-trifluormethylcoumarin;
2,3,5,6-1H, 4H-Tetrahydro-9-carboethoxyquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9- carboethoxyquinolizino-[9,9a, 1-gh] coumarin);
2,3,5,6-1H, 4H-Tetrahydro-9- (3-pyridyl) -quinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro- 9- (3-pyridyl) -quinolizino- [9,9a, 1-gh] coumarin);
3- (2'-N-methylbenzimidazolyl) -7-n, n-diethylaminocoumarin (3- (2'-N-Methylbenzimidazolyl) -7-n, n-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-9-acetylquinolizino -[9,9a, 1-gh] -coumarin);
N-Methyl-4-trifluormethylpiperidino- [3,2-g] -coumarin;
2- (p-Dimethylaminostyryl) -benzothiazolylethyl Iodide;
3- (2'-Benzimidazolyl) -7-N, N-diethylaminocoumarin);
Brilliant sulfaflavin (Brillantsulfaflavin);
3- (2'-Benzothiazolyl) -7-diethylaminocoumarin (3- (2'-Benzothiazolyl) -7-diethylaminocoumarin);
2,3,5,6-1H, 4H-Tetrahydro-8-trifluoromethylquinolidino- [9,9a, 1-gh] -coumarin (2,3,5,6-1H, 4H-Tetrahydro-8 -trifluormethylquinolizino- [9,9a, 1-gh] coumarin);
3,3'-diethyloxacarbocyanine iodide; 3,3'-diethyloxacarbocyanine iodide;
3,3′-Dimethyl-9-ethylthiacarbocyanine iodide (3,3′-Dimethyl-9-ethylthiacarbocyanine Iodide);
Fluorescein disodium (Uranin) (Disodium Fluorescein (Uranin));
9- (o-Carboxyphenyl) -2,7-dichloro-6-hydroxy-3H-xanthen-3-one-2,7-dichlorofluorescein (fluorescein 548) (9- (o-Carboxyphenyl) -2,7- dichloro-6-hydroxy-3H-xanthen-3-on2,7-Dichlorofluorescien / Fluorescein 548);
Fluorol 555 (Fluorol 7GA);
o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzoic acid (rhodamine 560 (rhodamine 6G)) (o- (6-Amino-3-imino-3H-xanthen-9-yl) -benzonic acid (Rhodamine 560 (Rhodamine 6G)));
2- [6- (Ethylamino) -3- (ethylimino) -2,7-dimethyl-3H-xanthen-9-yl] benzoic acid, perchlorate, (Rhodamine 575) (BenzoicAcid, 2- [6- (ethylamino) ) -3- (ethylimino) -2,7-dimethyl-3H-xanthen9-yl], perchlorate (Rhodamine 575));
Benzoic acid 2- [6- (ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethyl ester monochloride, rhodamine 590 (Benzonic Acid, 2- [6 -(ethylamino) -3- (ethylimino) -2,7-dimethyl-3X-xanthen-9-yl] -ethylester, monohydrochloride (Rhodamine 590));
1,3'-diethyl-4,2'-quinolyloxycarbocyanine iodide (1,3'-diethyl-4,2'-quinolyloxacarbocyanine Iodide);
1,1'-diethyl-2,2'-carbocyanine iodide (1,1'-diethyl-2,2'-carbocyanine Iodid);
2- [6- (Diethylamino) -3- (diethylimino) -3H-xanthen-9-yl] benzoic acid (rhodamine 610 (rhodamine B)) (2- [6- (diethylamino) -3- (diethylimino)- 3H-xanthen-9-yl] benzonic acid (Rhodamine 610 (Rhodamine B)));
Ethanaminium N-[(6-diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethyl hydroxide inner salt, sodium salt (Ethanaminium, N-[(6- diethylamino) -9- (2,4-disulfophenyl) -3H-xanthen-3-ylidene] -N-ethylhydroxid, inner salt, sodium salt);
Malachite Green;
3,3'-diethylthiacarbocyanine iodide (3,3'-diethylthiacarbocyanine iodide);
1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide; 1,3′-diethyl-4,2′-quinolylthiacarbocyanine iodide;
8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a' , 1-Echiai] xanthylium perchlorate (rhodamine 640) (8- (2-Carboxyphenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H- diquinolizino [9,9a, 1-bc: 9 ', 9a', 1-hi] xanthylium Perchlorate (Rhodamine640));
4-Dicyanmethylene-2-methyl-6- (p-dimethylaminostyryl) -4H-pyran (DCM) ;
3,3'-diethyloxadicarbocyanine iodide; 3,3'-diethyloxadicarbocyanine iodide;
8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-Bc: 9 ' , 1-Echiai] xanthene (sulforhodamine 640) (8- (2,4-Disulfophenyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc: 9 ', 1-hi] xanthene (Sulforhodamine 640));
5,9-Diaminobenzo [a] phenoxazonium Perchorate;
9-Diethylamino-5H-benzo (a) phenoxazin-5-one;
5-Amino-9-diethylimino (a) phenoxazonium Perchlorate;
3-Ethylamino-7-ethylimino-2,8-dimethylphenoxazin-5-ium Perchorate;
8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolidino [9,9a, 1-Beecy: 9 ', 9a, 1 -Heat eye] xanthylium perchlorate (8- (Trifluoromethyl) -2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1- bc: 9 ', 9a, 1-hi] xanthylium Perchlorate);
1-Ethyl-2- (4- (p-dimethylthyminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridinium Perchlorate);
Carbazine 122;
9-ethylamino-5-ethylimino-10-methyl-5H-benzo (e) phenoxazonium perchlorate; 9-Ethylamino-5-ethylimino-10-methyl-5H-benzo (a) phenoxazoniumPerchlorate;
3-Diethylamino-7-diethyliminophenoxazonium perchlorate;
3-Diethylthiadicarbocyanine Iodide;
Oxazine 750;
1-Ethyl-4- (4- (p-dimethylaminophenyl) -1,3-butadienyl) -pyridinium perchlorate (1-Ethyl-4- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -pyridininum Perchlorate);
1,1 ', 3,3,3', 3'-hexamethylindodicarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindodicarbocyanine Iodide);
1,1'-Diethyl-4,4'-carbocyanine iodide (1,1'-Diethyl-4,4'-carbocyanine Iodide);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -1,3,3-trimethyl-3H-indolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3- butadienyl) -1,3,3-trimethyl-3H-indolium Perchlorate);
2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3-ethylbenzosoazolium perchlorate (2- (4- (p-Dimethylaminophenyl) -1,3-butadienyl) -3- ethylbenzothoazolium Perchlorate);
1,1'-Diethyl-2,2'-dicarbocyanine iodide (1,1'-Diethyl-2,2'-dicarbocyanine Iodide);
1-ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -quinolinodinium))-1,3-butadienyl) -pyridinium perchlorate (1 -Ethyl-4- (4- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (i, j) -chinolinozinium))-1,3-buta dienyl) -pyridinium Perchlorate);
3,3'-Dimethyloxatricarbocyanine iodide (3,3'-DimethyloxatricarbocyanineIodide);
1-Ethyl-4- (p-dimethylaminophenyl) -1,3-butadienyl) -quinolinium perchlorate (1-Ethyl-4- (p-Dimethylaminophenyl) -1,3-buta dienyl) -quinolinium Perchlorate) ;
8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-Diquinolizino [9,9a, 1-Beecy: 9 ', 9a', 1-Hetch Eye ] Xanthylium perchlorate (Rhodamine 800) (8-Cyano-2,3,5,6,11,12,14,15-octahydro-1H, 4H, 10H, 13H-diquinolizino [9,9a, 1-bc : 9a ', 1-hi] xanthylium Perchlorate (Rhodamine800));
2- (6- (4-Dimethylaminophenyl) -2,4-neopentylene-1,3,5) -3-methylbenzothiazolium perchlorate (2- (6- (4-Dimethylaminophenyl) -2,4 -neopentylene-1,3,5) -3-methylbenzothiazoliumPerchlorate);
1,1 ', 3,3,3', 3'-hexamethylindotricarbocyanine iodide (1,1 ', 3,3,3', 3'-Hexamethylindotricarbocyanine Iodide);
IR125;
3,3'-diethylthiatricarbocyanine iodide; 3,3'-diethylthiatricarbocyanine iodide;
IR144;
2- (6- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5-hexatrienyl) -3-methyl Benzothiazolium perchlorate (2- (6- (9- (2,3,6,7, -Tetrahydro-1H, 5H-benzo (i, j) -chinolizinium))-2,4-neopentylene-1, 3,5-hexatrienyl) -3-methyllbenzothiazolium Perchlorate);
3,3'-diethyl-9,11-neopentylenethiatricarbocyanine iodide; 3,3'-diethyl-9,11-neopentylenethiatricarbocyanine Iodide;
1,1 ', 3,3,3', 3'-hexamethyl-4,4 ', 5,5'-dibenzo-2,2'-indotricarbocyanine iodide (1,1', 3,3, 3 ', 3'-Hexamethyl-4,4', 5,5'-dibenzo-2,2'-indotricarbocyanine Iodide);
3,3'-diethyl-4,4 ', 5,5'-dibenzothiatricarbocyanine iodide (3,3'-diethyl-4,4', 5,5'-dibenzothiatricarbocyanine Iodide);
1,2'-diethyl-4,4'-dicarbocyanine iodide; 1,2'-diethyl-4,4'-dicarbocyanine iodide;
IR140;
2- (8- (4-p-dimethylaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium perchlorate (2- (8- (4-p-Dimethyhlaminophenyl) -2,4-neopentylene-1,3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR132;
2- (8- (9- (2,3,6,7-tetrahydro-1H, 5H-benzo (eye, je) -2,4-neopentylene-1,3,5,7-octatetraenyl)- 3-methylbenzothiazolium perchlorate (2- (8- (9- (2,3,6,7-Tetrahydro-1H, 5H-benzo (i, j) chinolizinium))-2,4-neopentylene-1 , 3,5,7-octatetraenyl) -3-methylbenzothiazolium Perchlorate);
IR26;
IR5;
Cis-1,2-dicyano-1,2-bis (2,4,5-trimethyl-3-thienyl) ethane (CMTE) (cis-1,2-Dicyano-1,2-bis (2,4,5 -trimethyl-3-thienyl) ethane (CMTE)),
The resolution evaluation chart for a fluorescence microscope according to claim 5, comprising any one of the above molecules or a derivative molecule thereof. The fluorescence microscope according to any one of claims 1 to 6, wherein the silicon substrate has a plane accuracy and a roughness accuracy of λ / 4 or more with respect to a light source wavelength λ used in the fluorescence microscope. Resolution evaluation chart. In producing the resolution evaluation chart for a fluorescence microscope according to claim 1,
A thin film forming process for forming an organic thin film on a silicon substrate;
A dyeing step of impregnating the organic thin film with a fluorescent dye material having an emission center by a dye vapor transport method;
A non-light-emitting portion forming step of forming a non-light-emitting portion by irradiating a part of the organic thin film with a particle beam to destroy the light emission center of the fluorescent dye material;
A method for producing a resolution evaluation chart for a fluorescence microscope, comprising: In producing the resolution evaluation chart for a fluorescence microscope according to claim 2,
A thin film forming process for forming an organic thin film on a silicon substrate;
A dyeing step of impregnating the organic thin film with a fluorescent dye material having a luminescent center by a dye vapor transport method;
A non-light emitting part forming step of forming a non-light emitting part by removing the organic thin film on a part of the silicon substrate by etching the organic thin film after irradiating a part of the organic thin film with a particle beam; ,
A method for producing a resolution evaluation chart for a fluorescence microscope, comprising: 10. The fluorescence microscope resolution evaluation chart according to claim 8, wherein the thin film forming step forms the organic thin film by developing an organic material on the silicon substrate by hot pressing, casting or spin coating. Manufacturing method. 11. The dyeing process, wherein the organic thin film is impregnated with the fluorescent dye material by a dye vapor transport method in an atmosphere below the glass transition temperature (Tg) of the organic thin film. A method for producing a resolution evaluation chart for a fluorescence microscope according to one item. 10. The fluorescence according to claim 8, wherein an electron beam is used as the particle beam, and an acceleration voltage and / or an electron injection amount by the electron beam is adjusted according to a region of the non-light emitting portion to be formed. Manufacturing method of resolution evaluation chart for microscope. The resolution evaluation method of the fluorescence microscope characterized by evaluating the resolution of a fluorescence microscope using the resolution evaluation chart for fluorescence microscopes as described in any one of Claims 1-7.

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