JP4714594B2 - Stage equipment - Google Patents

Description

  The present invention relates to a stage apparatus in which a stage plate can freely move on a specific plane.

As a prior art of a camera shake correction device for correcting camera shake (image blur) by sliding a stage plate mounted with an image sensor or a correction lens on a plane orthogonal to the optical axis, for example, a stage plate It is known that a non-movable metal sphere is brought into contact with the camera body at at least three locations so that the stage plate can be moved by the metal sphere.
The stage plate of the camera shake correction apparatus can be linearly moved on a plane orthogonal to the optical axis in the X direction and the Y direction orthogonal to each other, and can further rotate on this plane. Therefore, this camera shake correction apparatus can correct not only camera shake (image shake) in the X direction and Y direction but also camera shake (rotation shake) in the rotation direction.
JP-A-2005-316222

When the stage plate is supported by a metal ball as in the above-described camera shake correction apparatus, a relatively large frictional resistance is generated between the metal ball and the stage plate when the stage plate is moved (rotated). This frictional resistance is a factor that decreases the accuracy of movement control of the stage plate and varies the operation.
Furthermore, if the interval (relative position) between the metal balls is not set accurately, the stage plate will not be orthogonal to the optical axis. However, if it is attempted to increase the position accuracy of the metal sphere, the manufacturing cost of the hand shake correction device increases.

  An object of the present invention is to provide a stage apparatus that can be manufactured at a lower cost than a conventional stage apparatus and that can reduce resistance when the stage plate is moved as much as possible.

The stage device according to the present invention includes a drive yoke plate and a base yoke plate facing substantially parallel, a stage plate positioned between the drive yoke plate and the base yoke plate and slidable on a specific plane, and the base yoke. A plate that is fixed to a surface of the plate facing the stage plate and that constitutes a driving magnetic circuit between the driving yoke plate and the base yoke plate; and a magnet provided on the stage plate, When an electric current flows in a state where it is located in a magnetic field, the coil moves between the drive coil that generates a driving force for sliding the stage plate and the stage plate, and between the base yoke plate and the magnet. An adsorption yoke plate having a saturation magnetic flux amount smaller than that of the drive yoke plate constituting the adsorption magnetic circuit, and a gap between the adsorption yoke plate and the magnet, and A magnetic fluid that is attracted to the attraction yoke plate and the magnet by receiving the magnetic force of the magnet and holds the gap between the attraction yoke plate and the magnet while allowing the stage plate to slide. It is said.

  Preferably, the driving coil is fixed to a surface of the stage plate facing the magnet, and the attraction yoke plate is fixed to a surface of the driving coil facing the magnet.

  It is preferable to provide a movement range restricting means for restricting the movement range of the stage plate within a range in which the attracting yoke plate and the magnet maintain a facing relationship.

  The movement range restriction means includes, for example, a movement range restriction hole that penetrates the stage plate, a movement range restriction pin that connects the drive yoke plate and the base yoke plate and penetrates the movement range restriction hole so as to be relatively movable, Can be configured.

  The magnetic fluid is preferably an oily magnetic fluid.

  A magnetic circuit for driving in the Y direction between the magnet for X constituting the magnetic circuit for driving in the X direction between the driving yoke plate and the base yoke plate, and the driving yoke plate and the base yoke plate. And a specific X direction driving force is applied to the stage plate when a current flows in a state where the driving coil is located in the magnetic flux of the X direction driving magnetic circuit. An X direction driving coil to be applied, and a Y direction driving coil to apply a driving force in the Y direction perpendicular to the X direction to the stage plate when a current flows in a state of being located in the magnetic flux of the Y direction driving magnetic circuit Are preferably provided.

  If the attraction yoke plate is a single member facing the X magnet and Y magnet, the number of parts can be reduced.

  A camera incorporating the stage device, an image sensor or a correction lens fixed to the stage plate, a vibration detection sensor for detecting vibrations in the X direction and Y direction of the camera, and the vibration detection sensor Based on the vibration information, a camera shake correction apparatus is provided by including control means for supplying a current to the camera for correcting camera shake of the X direction drive coil and the Y direction drive coil.

According to the present invention, the stage plate is slidably supported by utilizing the characteristic that the magnetic fluid filled in the magnetic field of the magnetic circuit for adsorption is concentrated in the magnetic field, so that the resistance when the stage plate moves is reduced. It becomes possible to make it very small compared with the past.
Further, since the magnetic fluid is a component that freely changes its outer shape, the stage plate is positioned on a specific plane regardless of the positional accuracy of the magnetic fluid in the stage apparatus. Therefore, the stage apparatus using the present invention is easier to assemble than the conventional structure in which the front and rear surfaces of the stage plate are sandwiched by the hard member, and the manufacturing cost can be kept low.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. In the following description, as indicated by arrows in FIGS. 1 and 2, the left-right direction of the digital camera 20 (hand shake correction device 30) is defined as the X direction, the up-down direction is defined as the Y direction, and the front-rear direction is defined as the Z direction.
As shown in FIG. 1, an optical system including a plurality of lenses L1, L2, and L3 is disposed in a digital camera 20 (lens barrel), and a camera shake correction device (stage) is disposed behind the lens L3. Device) 30 is provided.

The hand shake correction device 30 has a structure shown in FIGS.
As shown in FIG. 2 to FIG. 8, the hand shake correction device 30 includes a base yoke plate 31 having a rectangular shape in front view made of a magnetic material such as soft iron, and a magnetic body such as soft iron having the same front shape as the base yoke plate 31. And a driving yoke plate 32 located behind the base yoke plate 31. Four columnar columns 33 extending rearward are projected from the four corners of the rear surface of the base yoke plate 31, and the rear end surfaces of the columns 33 are formed at the four corners of the front surface of the drive yoke plate 32. It is fixed. The base yoke plate 31 and the drive yoke plate 32 are parallel to each other. A square opening 34 is formed in the central portion of the base yoke plate 31. On both sides of the rectangular opening 34 on the rear surface of the base yoke plate 31, two cylindrical movement range restriction pins (movement range restriction means) 35 are provided so as to extend rearward. The rear end surface of the restriction pin 35 is fixed to the front surface of the drive yoke plate 32.
The front surface of the base yoke plate 31 is fixed to the inner surface of the camera body by a fixing screw (not shown).

X magnets MX in which S poles and N poles are arranged in the X direction are fixed to the left and right ends of the rear surface of the base yoke plate 31, respectively. These left and right X magnets MX are arranged in the X direction, and the positions in the Y direction coincide with each other. Then, when the base yoke plate 31 and the drive yoke plate 32 pass the magnetic flux of the X magnet MX, the X direction drive magnetism is provided between the base yoke plate 31 and the left and right X magnets MX and the drive yoke plate 32. A circuit MCX is formed (see FIG. 8; although not shown, an X-direction driving magnetic circuit MCX is also formed on the other X magnet MX side).
On the other hand, a pair of Y magnets MY in which the S pole and the N pole are arranged in the Y direction are fixed to the lower end portion of the rear surface of the base yoke plate 31. These left and right Y magnets MY are aligned with each other in the X direction, and the positions in the Y direction coincide with each other. As shown in FIG. 8, the base yoke plate 31 and the driving yoke plate 32 pass the magnetic flux of the left and right Y magnets MY, whereby the base yoke plate 31 and the left and right Y magnets MY and the driving yoke plate 32 are passed. A Y-direction driving magnetic circuit MCY is formed between them (not shown, but the Y-direction driving magnetic circuit MCY is also formed on the other Y magnet MY side).

  Between the base yoke plate 31 and the drive yoke plate 32, a flat electric substrate (stage plate) 40 parallel to the base yoke plate 31 and the drive yoke plate 32 is located. A reinforcing plate (stage plate) 41 having the same front shape as that of the electric substrate 40 is fixed to the rear surface of the electric substrate 40, and the electric substrate 40 and the reinforcing plate 41 are integrated. The electric board 40 and the reinforcing plate 41 are provided with a pair of left and right movement range restriction holes (movement range restriction means) 42 penetrating them in the Z direction. The left and right movement range restriction holes 42 are both rectangular holes, and the right and left movement range restriction pins 35 penetrate the left and right movement range restriction holes 42. The electric board 40 and the reinforcing plate 41 can move on the XY plane including the X direction and the Y direction with respect to the base yoke plate 31 from the initial position shown in FIG. 3 (not only linear movement but also rotation). The movement range of the electric board 40 and the reinforcing plate 41 on the XY plane is limited by the left and right movement range restriction pins 35 and the movement range restriction hole 42.

A CCD (imaging device) 45 is fixed to the center of the front surface of the electric substrate 40. As shown in FIG. 3, the CCD 45 has a rectangular shape when viewed from the front, and in FIG. 3 (when the electric board 40 is at the initial position), a pair of upper and lower X direction side edges 45X parallel to the X direction, A pair of left and right Y direction side edges 45Y parallel to the Y direction are provided. The front surface of the CCD 45 is an imaging surface 46 orthogonal to the optical axis O, and the center of the imaging surface 46 is located on the optical axis O when the electric substrate 40 is in the initial position.
A CCD holder 47 surrounding the CCD 45 is fixed to the front surface of the electric substrate 40. As shown in FIG. 4, the front end portion of the CCD holder 47 projects forward of the base yoke plate 31 through the rectangular opening 34. A window hole 48 is formed in the front wall of the CCD holder 47. An optical low-pass filter 49 is fitted and fixed between the front wall of the CCD holder 47 and the CCD 45, and the space between the optical low-pass filter 49 and the front wall of the CCD holder 47 is kept airtight. The imaging surface 46 of the CCD 45 is an imaging surface on which an image transmitted through the lenses L1 to L3 and the optical low-pass filter 49 is formed.

The X-direction drive coil (drive unit) CX having the same specifications is fixed to the left and right ends of the front surface of the electric board 40. The X-direction drive coil CX is a coil parallel to the XY plane in which the coil wire is wound in a spiral shape more than 100 times (winded in the direction parallel to the electric substrate 40 or in the thickness direction of the electric substrate 40). Yes, the left and right X-direction drive coils CX are aligned in a direction parallel to the X-direction side 45X (aligned in the X direction in FIG. 3). In other words, the positions of the left and right X-direction drive coils CX in the direction parallel to the Y-direction side 45Y (the positions in the Y-direction in FIG. 3) match. The left and right X direction driving coils CX face the left and right X magnets MX in the Z direction regardless of the position of the electric board 40 and the reinforcing plate 41 (inside the left and right X direction driving magnetic circuit MCX). To position).
The X direction driving coil CX, the base yoke plate 31, the driving yoke plate 32, and the X magnet MX constitute X direction driving means.
Furthermore, Hall elements SX located at the center of the left and right X-direction driving coils CX are fixed to the left and right sides of the front surface of the electric substrate 40, respectively. The Hall element SX detects the X direction positions of the left and right X direction driving coils CX using the magnetic flux density distribution of the corresponding X direction driving magnetic circuit MCX.

A Y-direction drive coil (drive unit) CYA and a Y-direction drive coil (drive unit) CYB having the same specifications are fixed to the lower end of the front surface of the electric board 40. Both the Y-direction driving coil CYA and the Y-direction driving coil CYB have coil wires wound in a spiral shape more than 100 times (in the direction parallel to the electric board 40 and in the thickness direction of the electric board 40). ) The coil is parallel to the XY plane, and the Y-direction driving coil CYA and the Y-direction driving coil CYB are arranged along the lower X-direction side 45X (in FIG. 3, they are arranged in the X direction). . In other words, the Y-direction driving coil CYA and the Y-direction driving coil CYB have the same position in the direction parallel to the Y-direction side 45Y (Y-direction position in FIG. 3). The Y-direction driving coil CYA and the Y-direction driving coil CYB are opposed to the left and right Y magnets MY in the Z direction regardless of the position of the electric board 40 and the reinforcing plate 41 (left and right Y direction driving coils). Located in the magnetic circuit MCY).
The Y direction drive coil CYA and the Y direction drive coil CYB, the base yoke plate 31, the drive yoke plate 32, and the Y magnet MY constitute a Y direction drive means.
Further, a pair of Hall elements SY positioned inside the Y-direction driving coil CYB and the Y-direction driving coil CYB are respectively fixed to the left and right portions of the lower end portion of the front surface of the electric board 40. The Hall element SY detects the Y-direction positions of the corresponding Y-direction driving coils CYA and CYB using the magnetic flux density distribution of the corresponding Y-direction driving magnetic circuit MCY.
The above-described X-direction driving coil CX, Y-direction driving coil CYA, Y-direction driving coil CYB, Hall element SX, and Hall element SY are all control means C including a CPU or the like built in the camera (FIG. 1). Is electrically connected).

Further, the front side of the left and right X-direction driving coils CX, Y-direction driving coils CYA and Y-direction driving coils CYB is a suction yoke plate that is an integrally formed product with a concave shape in front view made of a magnetic material such as soft iron. The rear surface of the (drive unit) 50 is fixed. The suction yoke plate 50 includes a pair of left and right vertical portions 51 and a horizontal portion 52 that connects lower end portions of the left and right vertical portions 51. Since the suction yoke plate 50 is made of a material that is thinner than the base yoke plate 31 and the drive yoke plate 32 or a magnetic material having a low saturation magnetic flux density, the saturation magnetic flux amount depends on the base yoke plate 31 and the drive yoke plate. Less than 32. As shown in FIG. 3, the left and right vertical portions 51 face (overlap) the left and right X magnets MX, respectively, and the horizontal portion 52 faces the left and right Y magnets MY in the Z direction. Yes (overlapping). The vertical portion 51 and the horizontal portion 52 maintain this facing relationship (overlapping relationship) regardless of the position of the electric substrate 40 and the reinforcing plate 41.
Therefore, an attraction magnetic circuit MCCX is formed between the left and right X magnets MX and the left and right ends of the base yoke plate 31 and the attraction yoke plate 50 (the left and right vertical portions 51) (see FIG. 8). Although not shown, the magnetic circuit MCCX for adsorption is similarly configured on the other X magnet MX side). Further, an attraction magnetic circuit MCCY is formed between the left and right Y magnets MY and the lower end portions of the base yoke plate 31 and the attraction yoke plate 50 (horizontal portion 52) (see FIG. 8, not shown). However, the magnetic circuit MCCY for attraction is similarly configured on the other X magnet MY side).

Furthermore, two minute gaps respectively formed between the left and right vertical parts 51 and the left and right X magnets MX and two minute gaps respectively formed between the horizontal part 52 and the left and right Y magnets MY include: Each of them is filled with an oily magnetic fluid ML. The magnetic fluid ML filled in the minute gap between the left and right vertical portions 51 and the left and right X magnets MX is affected by the magnetic field of the left and right attracting magnetic circuits MCCX, thereby causing the front and left and right sides of the left and right vertical portions 51 to be The left and right vertical portions 51 and the left and right X magnets MX are coupled to each other so as to be movable relative to the rear surfaces of the X magnets MX. On the other hand, the magnetic fluid ML filled in the minute gap between the horizontal portion 52 and the left and right Y magnets MY is affected by the magnetic field of the left and right attracting magnetic circuits MCCY, thereby causing the front of the horizontal portion 52 and the left and right Y It attracts | sucks to the rear surface of the magnet MY, respectively, and couple | bonds the horizontal part 52 and the left and right Y magnet MY so that relative movement is possible.
As described above, since the saturation magnetic flux amount of the adsorption yoke plate 50 is smaller than the saturation magnetic flux amount of the base yoke plate 31 and the drive yoke plate 32, the magnetic fluid ML can be used with the appropriate adsorption force to the X magnet MX and the Y magnet MY. The suction yoke plate 50 and the magnets MX and MY are held at appropriate intervals. That is, the magnetic fluid ML filled in the above four regions allows the electric substrate 40 and the reinforcing plate 41 to move on the XY plane (linear movement on the XY plane and rotation on the XY plane), and the electric substrate 40. And the reinforcing plate 41 is always maintained in a state parallel to the XY plane. Therefore, the electric board 40 and the reinforcing plate 41 do not move backward from the state of FIGS. 4 to 6 and FIG.

The camera shake correction apparatus 30 configured as described above performs a camera shake correction operation by causing a current to flow from the control means C to the X direction driving coil CX, the Y direction driving coil CYA, and the Y direction driving coil CYB.
That is, when a current is passed through the X direction driving coil CX, a driving force in the direction of the arrow FX1 or FX2 in FIG. 3 is generated in the X direction driving coil CX. Further, when a current is passed through the Y-direction driving coils CYA and CYB, a driving force in the direction of the arrow FY1 or FY2 in FIG. 3 is generated in the Y-direction driving coils CYA and CYB.
As is well known, when the camera body vibrates in the X direction or Y direction due to camera shake, the camera is detected by a vibration detection sensor S (see FIG. 1, electrically connected to the control means C) built in the camera body. While detecting the movement distance (hand shake amount) of the body in the X and Y directions, the Hall element SX and the Hall element SY grasp the relative positions of the CCD 45 (the magnets MX and MY) relative to the camera body in the X and Y directions. If the CCD 45 is linearly moved by the same distance as the amount of camera shake in the opposite direction to the camera shake direction with respect to the camera body, the camera shake (image shake) of the CCD 45 is corrected. Therefore, if the current flows from the control means C to each of the X direction driving coils CX and the Y direction driving coils CYA and CYB so that the CCD 45 performs such a linear movement, camera shake in the X direction and the Y direction of the CCD 45 will occur. It is corrected.

  Further, since the electric board 40 and the reinforcing plate 41 (CCD 45) can be rotated relative to the base yoke plate 31 and the driving yoke plate 32, the control means C flows to the Y direction driving coil CYA and the Y direction driving coil CYB. When the directions of the currents are reversed, and the driving forces in the opposite directions are generated in the Y direction driving coil CYA and the Y direction driving coil CYB, the electric board 40 and the reinforcing plate 41 (CCD 45) rotate. Therefore, when the camera body rotates on the XY plane, the vibration detection sensor S detects the rotation amount (camera shake amount) of the camera body, and the electric board 40 and the reinforcing plate 41 (CCD 45) are opposite to the rotation shake direction. If a current is passed from the control means C to the Y-direction drive coil CYA and the Y-direction drive coil CYB so as to rotate by the same distance as the rotation amount (hand shake amount), so-called rotational shake is corrected.

  When the electric board 40 and the reinforcing plate 41 are moved (rotated) in this way, the X direction and the Y direction with respect to the X magnet MX and the Y magnet MY of the suction yoke plate 50 integrated with the electric board 40 and the reinforcing plate 41 are combined. , The outer shape of each magnetic fluid ML filled in each of the four regions slightly changes. However, the friction resistance between the magnetic fluid ML and the electric substrate 40 and the magnets MX and MY generated when the magnetic fluid ML changes the outer shape is extremely small. Accordingly, in the hand movement correction device 30 of the present embodiment, the electric substrate 40 and the reinforcing plate 41 are moved as compared with the conventional case where the front surface of the electric substrate 40 and the rear surface of the reinforcing plate 41 are sandwiched by a plurality of metal balls. The resistance when rotating can be greatly reduced. Therefore, the movement (rotation) of the electric board 40 and the reinforcing plate 41 can be accurately controlled as compared with the conventional camera shake correction device, and the movement (rotation) state of the electric board 40 and the reinforcing plate 41 is stabilized.

  Furthermore, since the magnetic fluid ML is a freely deformable component, the filling position accuracy of the magnetic fluid ML in the hand shake correction device 30 does not become a problem. That is, the magnetic fluid ML maintains its posture so that the electric substrate 40 and the reinforcing plate 41 are orthogonal to the optical axis O regardless of the filling position accuracy. Therefore, when the mounting position accuracy of the hard member (metal sphere) that holds the electric board 40 and the reinforcing plate 41 is lowered as in the conventional camera shake correction device, the electric board 40 and the reinforcing plate 41 are orthogonal to the optical axis O. Compared to the structure that does not occur, the hand shake correction device 30 of the present embodiment is easy to assemble, and therefore the manufacturing cost can be kept low.

  Further, the adsorption yoke plate 50 is constituted by a plurality of plate-like members respectively facing the X magnets MX (X direction driving coils CX) and Y magnets MY (Y direction driving coils CYA, CYB). However, since it is configured by a single plate-like member, an increase in the number of parts is suppressed. Furthermore, as compared with the case where the suction yoke plate 50 is constituted by a plurality of plate-like members, the hand shake correction device 30 can be easily assembled.

Although the present invention has been described using one embodiment, the present invention is not limited to this embodiment, and can be implemented with various modifications.
For example, although the oil-based fluid is used as the magnetic fluid ML, in principle, an aqueous fluid may be used as the magnetic fluid ML.
Further, it goes without saying that an image pickup device other than a CCD, for example, a CMOS image sensor can be used.
Further, although the Hall elements SX and XY are used as position change detection sensors in the X direction and the Y direction, sensors other than the Hall elements, for example, an MR sensor or an MI sensor can be used.

Further, as shown in FIG. 9, the CCD 45 is disposed behind the lens L3, and the camera shake correction device 30 is disposed between the lens L1 and the lens L2 (or between the lens L2 and the lens L3). A circular mounting hole 60 may be formed in the electric board 40 and the reinforcing plate 41 of the apparatus 30, and the correction lens CL having a circular shape in front view may be fitted and fixed in the mounting hole 60. With such a structure, it is possible to perform camera shake correction (rotation correction) even when the correction lens CL is moved in the XY plane. Furthermore, a camera shake correction apparatus using such a correction lens CL can be applied to a silver halide camera by omitting the CCD 45.
Of course, the present invention can be applied to a stage apparatus (an apparatus in which a specific member linearly moves or rotates in the X direction or the Y direction) having a different use from the hand movement correction apparatus.

1 is a longitudinal side view of a digital camera including a camera shake correction device according to an embodiment of the present invention. It is the disassembled perspective view which looked at the hand-shake correction apparatus from the front. It is a rear view of the camera-shake correction apparatus which fractures | ruptures and shows the drive yoke board. It is sectional drawing which follows the IV-IV arrow line of FIG. It is sectional drawing which follows the VV arrow line of FIG. It is sectional drawing which follows the VI-VI arrow line of FIG. It is a rear view of a base yoke plate and a magnet. It is an enlarged view of the lower half part of FIG. 6 for demonstrating a magnetic circuit. It is a side view which shows typically the inside of the digital camera of the modification using a correction lens.

Explanation of symbols

20 Digital camera (camera)
30 Hand shake correction device (stage device)
31 Base yoke plate 32 Driving yoke plate 33 Support column 35 Movement range restriction pin (movement range restriction means)
40 Electric board (stage board)
41 Reinforcement plate (stage plate)
42 Movement range regulation hole (Movement range regulation means)
45 CCD (imaging device)
50 Suction yoke plate (drive unit)
51 Vertical portion 52 Horizontal portion 60 Mounting hole C Control means CL Correction lens CX X direction drive coil (drive portion)
CYA CYB Y direction drive coil (drive unit)
MCX X-direction driving magnetic circuit MCY Y-direction driving magnetic circuit MCCX Suction magnetic circuit MCCY Suction magnetic circuit ML Magnetic fluid MX X magnet MY Y magnet S Vibration detection sensor SX SY Hall element (position sensor)
O Optical axis

Claims (8)

A driving yoke plate and a base yoke plate facing each other substantially in parallel;
A stage plate that is located between the drive yoke plate and the base yoke plate and is slidable on a specific plane;
A magnet fixed to a surface of the base yoke plate facing the stage plate and constituting a driving magnetic circuit between the driving yoke plate and the base yoke plate;
A driving coil that is provided on the stage plate and generates a driving force for sliding the stage plate when a current flows in a state of being located in the magnetic flux of the driving magnetic circuit;
An attraction yoke plate that moves together with the stage plate and constitutes an attraction magnetic circuit between the base yoke plate and the magnet and has a smaller saturation magnetic flux amount than the drive yoke plate;
It is located in the gap between the attraction yoke plate and the magnet, is attracted to the attraction yoke plate and the magnet by receiving the magnetic force of the attraction magnetic circuit, and allows the stage plate to slide. A magnetic fluid for maintaining a gap between the yoke plate for adsorption and the magnet;
A stage apparatus comprising: The stage apparatus according to claim 1 , wherein
The driving coil is fixed to the surface of the stage plate facing the magnet,
A stage device in which the attraction yoke plate is fixed to a surface of the driving coil facing the magnet. The stage apparatus according to claim 1 or 2 ,
A stage apparatus comprising a movement range regulating means for limiting a movement range of the stage plate to a range in which the attraction yoke plate and the magnet maintain a facing relationship. The stage apparatus according to claim 3 , wherein
The moving range regulating means is
A movement range limiting hole penetrating the stage plate;
A stage device comprising: a movement range restriction pin that connects the drive yoke plate and the base yoke plate and penetrates the movement range restriction hole so as to be relatively movable. The stage apparatus according to any one of claims 1 to 4 ,
A stage apparatus in which the magnetic fluid is an oily magnetic fluid. The stage apparatus according to any one of claims 1 to 5 ,
A magnetic circuit for driving in the Y direction between the magnet for X constituting the magnetic circuit for driving in the X direction between the driving yoke plate and the base yoke plate, and the driving yoke plate and the base yoke plate. Comprising a magnet for Y comprising
An X-direction driving coil that applies a specific X-direction driving force to the stage plate when a current flows in a state where the driving coil is positioned in the magnetic flux of the X-direction driving magnetic circuit;
A stage device comprising: a Y direction driving coil that applies a driving force in the Y direction perpendicular to the X direction to the stage plate when a current flows in a state of being located in the magnetic flux of the Y direction driving magnetic circuit. The stage apparatus according to claim 6 , wherein
A stage device in which the attraction yoke plate is a single member facing the X magnet and the Y magnet. A camera shake correction device using a stage device according to claim 6 or 7 ,
A camera incorporating the stage device;
An image sensor or a correction lens fixed to the stage plate;
A vibration detection sensor for detecting vibrations in the X direction and Y direction of the camera;
And a control means for causing a current to flow through the X-direction driving coil and the Y-direction driving coil so as to correct camera shake based on vibration information detected by the vibration detection sensor. Camera shake correction device.

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