JP4512526B2 - Connection structure between integrated panel and fluidic device - Google Patents

Description

  The present invention relates to a connection structure between an integrated panel and a fluid device, and more specifically, a high-purity liquid or ultrapure water handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, food processing, chemical industry, and the like. Alternatively, the present invention relates to a connection structure for connecting a fluid integrated panel, which is expected to be demanded in the piping system of cleaning liquid, and a fluid device such as a pump, a valve, and an accumulator in a sealed state via a gasket.

  As the above connection structure, for example, there is one in which a valve, which is an example of a fluid device, and an integrated panel in which a fluid passage is formed are connected by connecting a pair of supply / exhaust flow paths to each other. A connection structure disclosed in Document 2 is known. The connection structure disclosed in Patent Document 1 is a structure in which a pair of supply / discharge channels are arranged close to each other, and are connected and connected in a liquid-tight manner with a plurality of bolts via independent ring-shaped gaskets. In the connection structure disclosed in Document 2, a pair of supply / exhaust flow paths are arranged close to each other, and a single gasket having a pair of flow path holes corresponding to the pair of supply / exhaust flow paths is provided as a single outer shell. It is connected and connected using a screw nut.

Each of the connection structures disclosed in Patent Documents 1 and 2 adopts a structure in which a large number of fluid devices are integrated and attached to a fluid block, that is, a so-called integrated piping structure. This is useful in that it can be realized.
JP 2001-82609 A Japanese Patent Laid-Open No. 10-169859

  In the connection structure disclosed in Patent Documents 1 and 2, effective sealing performance is obtained by tightening a bolt between a pair of flange portions sandwiched between gaskets until a predetermined surface pressure is reached. However, since it is inevitable that the bolt tightening force decreases with time, it is necessary to periodically perform additional tightening in order to prevent the tightening force from being reduced, that is, leakage from the connection portion due to torque reduction. When sealing with a gasket, a very high tightening force is required. Therefore, high strength is required for the fluid supply and discharge ports of the integrated panel and fluid device, and workability for connecting and connecting them is also required. But it was disadvantageous.

  The present invention has been made in view of such circumstances, and the object of the present invention is to perform additional tightening by devising a connection structure between the integrated panel and the fluid device in the fluid piping system. It is an object of the present invention to provide a connection structure between an integrated panel and a fluid device, which can maintain a good sealing property even if it is not necessary, and can improve its assembly workability.

According to the first aspect of the present invention, in the connection structure between the integrated panel and the fluid device, the first fluid supply / discharge of the integrated panel 1 having the first fluid supply / discharge port portion 1A in which the tubular fluid passages 3 and 4 are opened. The first fluid supply / exhaust port 2A includes the first fluid supply / discharge port 2A of the fluid device 2 including the second fluid supply / discharge port 2A in which the tubular fluid passages 7, 8 are opened. When the fluid passages 3, 4, 7, and 8 are connected in communication with each other by a ring-shaped gasket G interposed between 1A and the second fluid supply / discharge port 2A,
In the first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A, annular protrusions 11 and 21 are formed on the outer diameter side portions of the fluid passages 3, 4, 7, and 8 that open to the end surfaces. Formed,
The gasket G includes a fluid path W formed to communicate the fluid paths 3, 4, 7, and 8 corresponding to the first and second fluid supply / exhaust ports 1A and 2A, A pair of annular grooves 51, 51 formed on the outer diameter side portion of the fluid path W to be fitted to the annular protrusions 11, 21 formed on the end surfaces of the second fluid supply / discharge ports 1 A, 2 A; In order to form the annular groove 51, the inner and outer peripheral wall end portions 52, 53 formed to protrude in the axial center P direction of the first and second fluid supply / exhaust port portions 1A, 2A have flexibility. It is made up of prepared materials,
On the inner diameter side of the annular projections 11 and 21 on the end surfaces of the first and second fluid supply / discharge port portions 1A and 2A, annular presser portions 12 and 22 that can contact the peripheral wall end portion 52 on the inner diameter side are formed,
The annular presser portions 12 and 22 are tapered peripheral surfaces whose side peripheral surfaces on the annular protrusion side are inclined so that valleys 14 and 24 surrounded by the annular protrusions 11 and 21 are constricted. The peripheral wall end 52 on the inner diameter side has a tapered peripheral surface 52a that abuts on the tapered peripheral surfaces 12a and 22a of the annular pressing portions 12 and 22. It is formed into a tapered annular protrusion that can freely enter the valley portions 14 and 24, and
When the first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A are attracted to each other via the gasket G, the annular protrusion 11 of the first fluid supply / discharge port portion 1A and the gasket The annular groove 51 at one end of G, the annular protrusion 21 of the second fluid supply / exhaust port 2A, and the annular groove 51 at the other end of the gasket G are fitted together, and the annular pressing portion 12 , 22 and the taper peripheral surface 52a of the peripheral wall end portion 52 on the inner diameter side are press-contacted to form the seal portion S1 ,
The seal portion S1 is an end of the tapered circumferential surfaces 12a, 22a of the annular holding portions 12, 22 and the tapered circumferential surface 52a of the peripheral wall end portion 52 on the inner diameter side on the side far from the annular projections 11, 21. The inclination angle of the tapered peripheral surfaces 12a, 22a of the annular pressing portions 12, 22 and the inclination angle of the tapered peripheral surface 52a of the peripheral wall end portion 52 on the inner diameter side are made different from each other so as to be constituted by pressure contact between the portions. It is characterized by being set .

According to a second aspect of the present invention, in the connection structure between the integrated panel and the fluid device according to the first aspect , the projecting amount of the annular projections 11 and 21 in the direction of the axis P is such that the annular pressing portions 12 and 22 are connected. Is set in a state exceeding the protruding amount in the direction of the axis P.

According to a third aspect of the present invention, in the connection structure between the integrated panel and the fluid device according to the first or second aspect, the annular protrusions 11, 21 are arranged so that the annular protrusions 11, 21 can be easily inserted into the annular groove 51. Is characterized in that it is formed in a tapered shape with a chamfered inner peripheral corner and / or outer peripheral corner at the tip .

  According to the first aspect of the present invention, when the first and second fluid supply / exhaust ports are pulled toward each other, the annular protrusions formed on each of the first and second fluid supply / exhaust ports, and the annular grooves formed on the one end surface and the other end surface of the gasket, respectively. However, the guide function is exerted by fitting each other by relative movement in the axial direction, and the first and second fluid supply / exhaust ports are relatively close to each other without being displaced, and each fluid supply / discharge port has an annular shape. A joined state is obtained in which the annular pressing portion formed on the inner diameter side of the protrusion and the peripheral wall end portion on the inner diameter side of the gasket are pressed as expected. In this joined state, the taper circumferential surfaces of the annular presser portion and the inner peripheral wall end are pressed against each other so that a seal portion is provided, that is, an independent seal portion is provided on the inner diameter side of the fitting portion between the annular protrusion and the annular groove. The first and second fluid supply / exhaust ports are formed by this seal portion, and can be connected in a state where leakage of fluid from these connection portions is reliably prevented. In addition, the fitting part between the annular projection and the annular groove that exhibits the guide function exhibits a labyrinth (maze) action, and if there is a leak from the seal part, the leaked fluid reaches the outer diameter side. Functions that make it difficult to do so can also be expected.

  The tapered peripheral surfaces of the first and second fluid supply / exhaust ports are angled so that their annular protrusions are retracted (recessed) in the axial direction. The pressure contact force in the seal portion when the pressure in the axial direction decreases due to a decrease in the pulling force between the first and second fluid supply / exhaust ports, etc., is moderate. It will be a thing. Therefore, the sealing function can be maintained even if the pressure contact force is reduced to some extent, which is a clearly advantageous effect as compared with the conventional structure that is simply pressed in the axial direction. In addition, the radial force generated by the tapered peripheral surface generates a force in a direction in which the width of the annular groove is narrowed, and the formation of the seal portion tightly fits the annular groove and the annular protrusion, and each fluid supply There is also an advantage that the retaining action between the outlet and the gasket is enhanced.

  As a result, a good sealing state can be reliably obtained by the guide function, a good sealing performance can be maintained even with little retightening, and the reliability is improved, and the assembling workability is also improved. A connection structure between the integrated panel and the fluidic device can be provided. For example, if such a connection structure is used in the piping system of a cleaning device in a semiconductor manufacturing facility, the area occupied by the device can be reduced while ensuring good sealing performance, and a large flow path is secured. As a result, it is possible to increase the circulation flow rate, increase the purity of the chemical solution, and contribute to the yield improvement.

According to the first aspect of the present invention, since only the end portion (the innermost diameter side end) far in the radial direction from the annular groove is pressed into contact with the seal portion, a reliable sealing action is obtained by a stronger surface pressure. Be able to. In addition, since the fluid is prevented from entering between the tapered peripheral surfaces, the fluid itself or a mixture or foreign matter in the fluid enters and stagnates, causing a decrease in the purity of the fluid. It is possible to provide a connection structure between an integrated panel and a fluid device, which is advantageous in that no disadvantage occurs.

According to the second aspect of the present invention, as the first and second fluid supply / exhaust ports are drawn toward each other, the annular protrusion first enters the annular groove, and then the tapered peripheral surfaces come into contact with each other. Therefore, the guide function by the fitting of the annular protrusion and the annular groove is surely exhibited. As a result, even if the integrated panel and the fluid device are assembled through the gaskets somewhat messed up, the seal part due to the pressure contact between the annular pressing part and the peripheral wall end part on the inner diameter side is surely exhibited as expected. There are advantages.

According to the invention of claim 3, the first and second fluids are formed so that the annular protrusion can easily enter the annular groove by chamfering the inner peripheral corner portion and / or the outer peripheral corner portion of the annular protrusion. Even in the state where the relative position between the supply / discharge port portion and the gasket is slightly deviated, the annular protrusion and the annular groove are reliably engaged with each other by being drawn together. As a result, even if the assembling operation for pulling the first and second fluid supply / exhaust ports through the gasket is somewhat rough, the above-described guide function by fitting the annular protrusion and the annular groove is achieved. It is possible to provide a connection structure between a preferred integrated panel and a fluid device that can be surely exhibited.

  Embodiments of a connection structure between an integrated panel and a fluid device according to the present invention will be described below with reference to the drawings. 1 to 3 show the connection structure between the integrated panel and the fluid device according to the first embodiment, and FIGS. 4 and 5 show the connection structure between the integrated panel and the fluid device according to the second and third embodiments, respectively. 12 shows another structure of the maintaining means, FIG. 6 shows a first separate structure, FIGS. 7 and 8 show a second separate structure, FIGS. 9 and 10 show a third separate structure, FIG. 11 shows a fourth separate structure, and FIG. There are five different structures. FIG. 13 shows another structure of the annular protrusion.

[Example 1]
The connection structure between the integrated panel and the fluid device according to the first embodiment is shown in FIGS. The connection structure between the integrated panel and the fluid device includes an integrated panel 1 in which a pair of circular fluid passages 3 and 4 are formed inside, and a valve mounted on the upper surface 1a of the integrated panel 1 via a ring-shaped gasket G ( Open / close valve, stop valve, etc.) 2 and is a single flow path type that shares a longitudinal axis P that is formed across the two. That is, a pair of connection structures are configured to be the same for supply and discharge.

  As shown in FIGS. 1 and 2, the integrated panel 1 has vertical vertical passages 3 a and 4 a that open in the panel upper surface 1 a inside a panel material (or block material) 5 made of fluororesin such as PFA or PTFE. And a pair of circular supply-side fluid passages 3 and 4 including lateral passages 3b and 4b are formed. A portion of the integrated panel 1 where the supply and discharge fluid passages 3 and 4 are opened is referred to as a first fluid supply and discharge port portion 1A. In the first fluid supply and discharge port portion 1A, circular tubular vertical passages 3a and 4a are provided. Are each formed in a passage having an axis P. The first fluid supply / exhaust port 1A has an annular shape centered on the axis P and protrudes upward from each of the outer diameter side portions of the fluid passages 3 and 4 that open to the upper end surface thereof. A lower first seal end t21 and a lower second seal end t22 having the inner and outer annular protrusions 21 are formed.

  As shown in FIGS. 1 and 2, the valve (an example of a fluid device) 2 has a valve case 6 made of a fluororesin such as PFA or PTFE and having a circular shape when viewed in the vertical direction. The lower end portion is arranged in a vertical direction in a state in which it opens vertically to the lateral side of the supply side fluid passage 7 and a circular supply side fluid passage 7 arranged in a vertical direction so as to protrude downward from the bottom surface 6a. It is formed in the second fluid supply / exhaust port portion 2 </ b> A having a round tubular discharge side fluid passage 8. That is, in the second fluid supply / exhaust port portion 2A, each of the cylindrical supply-side fluid passages 7 and 8 is formed as a passage having an axis P. That is, at the lower end of the valve case 6, a pair of fluorocarbon resin mounting flanges 9 made of PFA, PTFE or other materials having a pair of bolt insertion holes 9a is formed to project downward, and a pipe having fluid passages 7 and 8 Each mounting flange 9 is formed by a portion 9A and a flange portion (outward flange) 9B. A supply-side mounting flange 9 is formed on the upper first seal end t11 having an annular protrusion 11 protruding downward, and a discharge-side mounting flange 9 is an upper second seal end t12 having an annular protrusion 11 protruding upward. Is formed.

  The pair of gaskets G are the same as each other, and the structure thereof will be described by taking the supply side gasket G as an example. The gasket G includes a tubular fluid path W formed to communicate the longitudinal passage 3a and the supply side fluid passage 7 which are fluid passages corresponding to the upper and lower fluid supply / discharge ports 1A and 2A on the supply side. In order to fit into the annular projection 11 of the upper first seal end t11 and the annular projection 21 of the upper second seal end t12 formed on the end surfaces of the first and second fluid supply / exhaust ports 1A and 2A, respectively. It is made of a fluororesin such as PFA or PTFE having a pair of upper and lower annular grooves 51, 51 formed in the outer diameter side portion of the fluid path W.

  That is, the cross-sectional shape of the gasket G includes a pair of upper and lower annular grooves 51, 51 and an inner peripheral wall 54 and an outer peripheral wall 55 for forming the annular grooves 51, 51. The depth and width are the same in the vertical direction, and the inner and outer peripheral walls 54 and 55 are also left and right symmetrical, and are longitudinal along the axis P direction of the first and second fluid supply / discharge ports 1A and 2A. The center Z and the horizontal center line X orthogonal to the vertical center line Z are formed in a substantially H shape that is line symmetric (may be substantially line symmetric). The upper and lower ends of the inner peripheral wall 54 are formed on tapered inner peripheral surfaces 52a and 52a in which the upper and lower ends of the fluid path W, which is the inner peripheral surface 54a, incline outwardly, and are formed on the upper and lower ends of the outer peripheral wall 55. The upper and lower end portions of the outer peripheral surface 55a are also formed on tapered outer peripheral surfaces 53a and 53a inclined inward.

  Inside the annular projection 21 at the lower first seal end t21 of the first fluid supply / discharge port portion 1A of the integrated panel 1 and the annular projection 11 at the upper first seal end t11 of the second fluid supply / discharge port portion 2A of the valve 2 And on the outer diameter side, inner and outer peripheral wall end portions 52a and 53a that are formed to project in the direction of the axis P in order to form the annular groove 51 in the gasket G are fitted into the annular groove 51 and the annular protrusions 11 and 21. An annular presser protrusion (an example of an annular presser portion) 12, 13, 22, and 23 that prevents expansion and deformation is formed.

  The structure relating to the annular pressing protrusion will be described with respect to the gasket G and the upper first seal end t11. The inner and outer annular presser protrusions 12 and 13 are symmetrical, and the valley protrusions 14 and 15 surrounded by these and the annular protrusions 11 are in the form of a constricted shape (upper constricted shape). The peripheral surface is formed into a tapered annular protrusion having a tapered outer peripheral surface 12a and a tapered inner peripheral surface 13a. That is, the upper first seal end t11 is a general term for the annular protrusion 11 and the annular presser protrusions 12 and 13 and the troughs 14 and 15 formed on both the inner and outer sides.

  The upper ends of the inner and outer peripheral walls 54 and 55 of the gasket G have a tapered inner peripheral surface 52a and a tapered outer peripheral surface 53a that respectively contact the tapered outer peripheral surface 12a and the tapered inner peripheral surface 13a of the annular presser protrusions 12 and 13. 14 and 15 has tapered annular seal protrusions (an example of peripheral wall end portions) 52 and 53 which can freely enter, and in the joined state (see FIG. 1), are upper end portions of the inner and outer peripheral walls 54 and 55. The annular seal protrusions 52 and 53 enter the corresponding valley portions 14 and 15, the tapered outer peripheral surface 12a of the upper first seal end t11 and the tapered inner peripheral surface 52a of the gasket G are in pressure contact, and the upper first seal end The tapered inner peripheral surface 13a of the part t11 and the tapered outer peripheral surface 53a of the gasket G are configured to be in pressure contact with each other.

  That is, the upper seal portion g11 is formed at the upper end portion of the gasket G by the annular groove 51 and the inner and outer annular seal protrusions 52 and 53, and similarly, the lower seal portion g12 is formed at the lower end portion. The upper seal part g11 is fitted with the upper first seal end part t11 to form the fitting seal part 10, and the lower seal part g12 is fitted with the lower second seal end part t21 to form the fitting seal part 10. To do.

  The fitting structure of the fitting seal portion 10 will be described in detail with respect to the upper first seal end t11 and the upper seal portion g11 of the gasket G. As shown in FIGS. And the inner and outer annular seal protrusions 52 and 53 are symmetrical to each other, and are between the included angle α ° of the entire inner and outer valley portions 14 and 15 and the orientation angle β ° of the entire inner and outer annular seal protrusions 52 and 53. Is set to α ° <β °, preferably α ° + (20 to 40 °) = β °. With this configuration, in the joined state (described later) in which the upper annular protrusion 11 and the annular groove 51 of the upper first seal end t11 are fitted, the upper inner annular pressing protrusion 12 and the upper inner annular sealing protrusion 52 are The taper outer peripheral surface 12a and the taper inner peripheral surface 52a are brought into pressure contact with each other at the innermost diameter side portion (see the phantom line in FIG. 3), and the fluid passing through the fluid passage W passes between the outer taper peripheral surfaces 12a and 52a. An advantage of functioning as a primary seal portion (an example of a seal portion) S1 that prevents entry into the space is obtained.

  A relationship of d1> d2 is set between the width d1 of the upper annular protrusion 11 and the width d2 of the upper annular groove 51, and preferably d1 × (0.6 to 0.8) = d2. It is good to set it as a relationship. A relationship of h1 <h2 is set between the protrusion length h1 of the upper annular protrusion 11 and the depth h2 of the upper annular groove 51. With these configurations, the upper annular protrusion 11 and the upper annular groove 51 are in strong pressure contact with the inner and outer side peripheral surfaces of the upper annular protrusion 11 and the corresponding inner peripheral surfaces of the upper annular groove 51 in detail. The secondary seal portion S2 that exhibits excellent sealing performance that prevents fluid leakage is formed, and the tapered outer peripheral surface 12a of the upper inner annular presser protrusion 12 and the tapered inner peripheral surface 52a of the upper inner annular seal protrusion 52 are formed. There is an advantage that the primary seal portion S1 described above is satisfactorily formed.

  As shown in FIG. 3, the fitting seal portion 10 has a height h3 along the axial center P direction of the annular presser protrusions 12 and 22 (13, 23) and a protrusion length h1 of the annular protrusion 11 (21). In addition to the relationship of h1> h3 shown in FIG. 3, the relationship may be a relationship of h1 = h3 or a relationship of h1 <h3. Further, in order to make the secondary seal portion S2 on the inner diameter side function reliably, when the radii with respect to the axial centers P of the annular protrusion 11 (21) and the annular groove 51 are R1 and R2, R1 <R2 is established. It is convenient to set. Further, the structure may be such that the peripheral wall end 52 on the inner diameter side and the annular protrusion 11 (21) are pressed against each other, but the secondary seal portion S2 is not formed.

  Further, the tip of the inner annular presser projection 12 and the tips of the annular seal projections 52 and 53 are formed in a shape cut so as not to have a pin angle, that is, the inclined cut surface 12b and the cut surfaces 52b and 53b. . With these configurations, even if the tip of the upper inner annular presser protrusion 12 is slightly spread and deformed toward the fluid passage W side, the shape is originally cut, so that a recess having a triangular shape that is wide open in the middle of the fluid passage W is formed. As much as possible, the fluid existing in the dent can easily flow out, and substantially no liquid pool is generated. In addition, the opening angle of the recess, that is, the included angle between the inclined cut surface 12b and the tapered inner peripheral surface 52a is sufficiently large, and the possibility of liquid accumulation due to surface tension is avoided. Further, since the inner peripheral corner and the outer peripheral corner at the tip of the annular protrusion 11 have a chamfered chamfered shape 11a, the press-fitting movement into the narrow annular groove 51 can be smoothly performed without inconvenience such as galling. Yes.

  As shown in FIG. 13 (a), the annular protrusion 11 is formed in a tapered shape in cross section with the chamfered shape portion 11a of the inner peripheral corner portion and outer peripheral corner portion of the tip thereof clearly enlarged. It is good also as a structure made easy to enter the annular groove 51. If constituted in this way, even if the relative position at the time of the assembly of the first and second fluid supply / exhaust ports 1A, 2A and the gasket G is slightly deviated from the expected appropriate state, the taper surface The inner or outer chamfered shape portion 11 a serves as a fitting guide, and the annular protrusion 11 is reliably guided into the annular groove 51. In this case, the fitting seal portion 10 (secondary seal portion S2) is provided by a fitting portion between the root portion of the annular protrusion 11 and the tip portion of the annular groove 51.

  As shown in FIG. 13 (b), the chamfered portion 11a may be further enlarged so that the inner and outer side peripheral surfaces of the annular protrusion 11 are all tapered to form a tapered side peripheral surface 11a. . In this case, the function of the fitting guide is strengthened, and the ease of entering the annular protrusion 11 into the annular groove 51 is further facilitated. In this case, in order to provide the fitting seal portion 10 (secondary seal portion S2), a wedge effect is generated in which the annular protrusion 11 pushes the annular groove 51, and the tip of the annular groove 51 and the root portion of the annular protrusion 11 are formed. Is pressed in a circumferential manner with a line contact or an extremely small area, and a sealing function can be generated more reliably. These structures shown in FIGS. 13A and 13B may be applied to other annular protrusions 21.

  The outer annular presser protrusion 13 has a lower end inner peripheral portion 9b for forming the lower end portion of the valve case 6 in a state following the tapered inner peripheral surface 13a of the annular presser protrusion 13, and the inner annular presser protrusion 13 The overall shape is different from 12. The lower first seal end t21 also has an upper end inner peripheral portion 5b for forming the upper end portion of the panel material 5 in a state following the tapered inner peripheral surface 23a of the annular presser protrusion 23. The shape of the inner annular pressing protrusion 22 is different from that of the inner annular pressing protrusion 22. The upper and lower inner peripheral portions 5b and 9b function as guides when the upper and lower seal portions g11 and g12 are fitted to the upper and lower first seal end portions t11 and t21, and the taper inner peripheral surface. The function of preventing the outer peripheral wall 55 of the gasket G from expanding and deforming together with 13a and 23a can also be exhibited.

  As shown by phantom lines in FIG. 6, if the ring-shaped attachment / detachment flange 1 f that projects laterally is integrally formed on the outer peripheral wall 55 of the gasket G, the first or second fluid supply / exhaust port 1 </ b> A, 2 </ b> A When extracting the gasket G, there is an advantage that the flange 1f can be easily removed by pulling it with a tool or fingers. In this case, the thickness of the desorption flange 1f is set to a value smaller than the gap between the first and second fluid supply / exhaust port portions 1A and 2A in the joined state.

  The fitting seal part 10 will be further described in detail. As shown in FIGS. 2 and 3, the opening angle (opening angle of the valleys 14 and 15) D of the tapered peripheral surfaces 12 a and 13 a of the annular pressing protrusions 12 and 13 is a value in the range of 50 to 70 degrees (50 ° ≦ D ° ≦ 70 °) and the sharp angle E of the tapered peripheral surfaces 52a and 53a of the annular seal protrusions (peripheral wall end portions) 52 and 53 is a value in the range of 60 to 80 degrees (60 ° ≦ D ° ≦ 80 °). The opening angle D and the sharpness angle E are set so that the opening angle D plus 10 to 20 degrees becomes the sharpening angle E [D ° + (10 to 20 °) = E °]. Yes. More preferable values are an opening angle D of 69 to 71 degrees (D ° = 70 ± 1 °), a sharpness angle E of 79 to 81 degrees (E ° = 80 ± 1 °), and a sharpening angle E of the opening angle D + 9. It may be set to ˜11 degrees (E ° −D ° = 10 ± 1 °).

  Further, the cut angle Ds of the inclined cut surface 12b of the annular presser protrusion 12 is set to 49 to 51 degrees (Ds ° = 50 ° ± 1 °), and the end cut surfaces 52b and 53b of the peripheral wall end portions 52 and 53 are formed. The angle of attack Es is set to 124 to 126 degrees (Es ° = 125 ° ± 1 °). With such an angle setting, the tapered outer peripheral surface 12a and the tapered inner peripheral surface 52a come into contact with each other in an annular line contact state, and the seal lip effect is exhibited in the primary seal portion S1. Further, a sealing action is also generated between the tapered inner peripheral surface 13a and the tapered outer peripheral surface 53a at the outer diameter side end portions thereof. Although not shown, when the inner peripheral portion 9b at the lower end does not exist (when the cross-sectional shape of the fitting portion with the gasket G in the integrated panel or the fluid device is symmetrical), the outer annular presser protrusion 13 is provided. Also, an inclined cut surface similar to the inclined cut surface 12b is formed, and the seal lip effect is produced.

  In other words, the tapered peripheral surfaces of the annular seal protrusions (peripheral wall end portions) 52 and 53 with respect to the drawing direction, which is the direction in which the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A are drawn together. 52a, 53a (tapered inner circumferential surface 52a, tapered outer circumferential surface 53a) has a sharp angle E of the taper circumferential surfaces 12a, 13a (tapered outer circumferential surface 12a) on the annular projection 11 side of the annular pressing projections 12, 13 with respect to the pulling direction. The opening angle D of the taper inner peripheral surface 13a) is set to a value obtained by adding 10 to 20 degrees, preferably 10 degrees or almost 10 degrees. The sharp angle E is set to 60 to 80 degrees, preferably 80 degrees or almost 80 degrees.

  When the sharp angle E and the opening angle D are set to obtuse values close to 90 degrees as described above, the annular presser protrusions 12 and 13 are closer to each other in the drawing direction (axial direction) than their radial width. Since the protrusion amount is reduced and the strength and rigidity are relatively improved, the expansion of the annular seal protrusions 52 and 53 is restricted, but the self (annular pressing protrusions 12 and 13) may expand in the radial direction and be deformed. There is an advantage that it can be more effectively suppressed. Then, by inserting the annular seal protrusions 52 and 53 into the valleys 14 and 15, the taper peripheral surfaces 52a and 53a can reduce the component force that radially pushes the annular retainer protrusions 12 and 13, and the annular retainer also from this point. The expansion deformation of the protrusions 12 and 13 in the radial direction can be suppressed.

  Next, the maintenance means I will be described. As shown in FIGS. 2 and 3, the maintaining means I includes the first fluid supply / exhaust port portion 1 </ b> A of the integrated panel 1 and the second fluid supply / discharge port portion 2 </ b> A of the valve 2 that are attracted to each other via the gasket G. By the drawing action, the upper first seal end t11 of the first fluid supply / discharge port portion 1A, the upper seal portion g11 of the gasket G, and the lower first seal end of the second fluid supply / discharge port portion 2A The part t21 and the lower seal part g12 of the gasket G are fitted together to maintain the joined state in which each fitting seal part 10 is formed. That is, the annular projection 11 of the second fluid supply / exhaust male port portion 2A and the annular groove 51 on the upper side of the gasket G, and the annular projection 21 of the first fluid supply / exhaust male port portion 1A and the annular groove on the lower side of the gasket G are provided. 51 are fitted together.

  The specific structure of the maintaining means I includes a pair of bolts 66 inserted into the bolt insertion holes 9a of the flange portion 9B of the second fluid supply / exhaust port portion 2A, and the first fluid corresponding to the pair of bolt insertion holes 9a, 9a. Nut portions 67 and 67 formed in the supply / exhaust port portion 1A (in the panel material 5), and the valve 2 is attached to the integrated panel 1 by a tightening operation by screwing the bolt 66 to the nut portion 67. It is comprised in the maintenance means I with a drawing function which can be drawn and can maintain the drawing state. Further, when the pressure contact force of each fitting seal portion 10 is reduced due to aging, creep, or the like, it can be dealt with by tightening the bolt 66, and good sealing performance can be maintained. It is.

[Example 2]
FIG. 4 shows a connection structure between the integrated panel and the fluid device according to the second embodiment. This is a structure for connecting and connecting the filter 2 which is an example of the fluid device and the integrated panel 1, and the connection structure itself is the same as that according to the first embodiment shown in FIGS. Accordingly, the same parts are denoted by the same reference numerals, and the description thereof is omitted.

  The filter 2 includes a main body case 2K, a lower case 2B, and a filter body 2C. The lower case 2B has a supply-side fluid passage 7, a discharge-side fluid passage 8, and the fluid passages 7 and 8 in a horizontal state. A pair of mounting flanges 9 and 9 are formed so as to project from each other. These mounting flanges 9 and 9 and the integrated panel 1 are connected and connected via a gasket G.

Example 3
As shown in FIG. 5, the connection structure between the integrated panel and the fluid device according to the third embodiment is a connection structure between the integrated panel 1 and a regulator 2 that is an example of the fluid device. The regulator 2 has a casing 2C composed of an upper case, an intermediate case, and a lower case, and a bellows (not shown) in which an outer peripheral portion is sandwiched between the upper case and the intermediate case, and between the intermediate case and the lower case. And a return spring (not shown) accommodated in the lower case, and the like.

  The casing 2C is integrally provided with a pair of mounting flanges 9 and 9 formed to project laterally, and the regulator 2 uses the mounting flanges 9 and 9 to attach the gasket G to the upper surface 1a of the integrated panel 1. Are connected and connected. The connection structure between the mounting flange 9 and the upper surface 1a of the integrated panel 1 through the gasket G is the same as that according to the first embodiment shown in FIGS. 1 to 3, and the detailed description thereof is omitted.

Example 4
A connection structure between the integrated panel and the fluidic device according to the fourth embodiment is shown in FIGS. This is different from the first embodiment only in the maintenance means I, and the maintenance means I having the first separate structure will be described. 6 and 7, parts corresponding to those of the first embodiment shown in FIGS. As shown in FIGS. 6 and 7, the maintaining means I having the first different structure is provided on the outer peripheral portion of the first fluid supply / exhaust port portion 1 </ b> A having a circular shape in plan view formed on the upper surface of the integrated panel 1. An annular fluid is formed on a cylindrical nut 81 formed with a male screw 1n and having a female screw 81n that can be screwed to the male screw 1n, and an outward flange 9 formed at the lower end of the valve case 6 of the valve 2. The split ring 82 is divided into two or three or more split rings 82 that interfere with each other in the direction of the axis P of the passage 7. Direction in which both fluid supply / discharge port portions 1A, 2A approach each other via gasket G by tightening operation of cylindrical nut 81 by screwing female screw 81n to male screw 1n of first fluid supply / discharge port portion 1A It is comprised in the maintenance means I with the attracting function which can be attracted | sucked and can maintain a attracted state.

  The opening 83 a of the inward flange 83 formed on the valve 2 side (upper side) of the cylindrical nut 81 is set to a minimum inner diameter dimension sufficient to allow passage of the outward flange 9. The outer diameter of the split ring 82 is set to be slightly smaller than the inner diameter of the female screw 81n so that it can enter the cylindrical nut 81, and the inner diameter is the circular second fluid supply / exhaust port of the valve 2 It is set to a minimum dimension that can be fitted onto the outer diameter portion of the portion 2A. In this case, in order to equip the split ring 82, the axial length of the thin portion excluding the outward flange 9 in the second fluid supply / exhaust port portion 2 </ b> A is divided by the axial length of the cylindrical nut 81. It is necessary to set a value exceeding the sum of the thickness of the mold ring 82. Specifically, as shown in FIG. 7 (b), the length d3 between the cylindrical nut 81 and the outward flange 9 in a state of being in contact with the root portion 6t of the valve case 6 has a split ring. The condition is that the thickness is greater than the thickness d4 of 82 (d3> d4).

  Further, between the inner back end portion of the female screw 81 n and the inward flange 83 in the cylindrical nut 81, the split ring 82 is slidable in the axial direction and covers the width of the split ring 82. An inner peripheral surface portion 81m having a length in the axial center P direction is formed on a flat inner peripheral surface concentrically with the axial center P. That is, an inner diameter portion 81 a between the female screw 81 n of the cylindrical nut 81 and the inward flange 83 is formed on a flat inner peripheral surface concentric with the supply-side fluid passage 7, and the inner peripheral surface portion 81 m has an inner diameter. While the fitting tolerance is set to be slightly larger than the outer diameter of the split ring 82 having a rectangular cross section, the outer diameter portion of the second fluid supply / discharge port portion 2A is connected to the supply-side fluid passage 7. Concentrically formed on a flat outer peripheral surface, the outer diameter of the outer diameter portion and the inner diameter of the split ring 82 are formed to have substantially the same diameter. As a result, when the cylindrical nut 81 is screwed, the split ring 82 is tilted and bent, or the pressing force in the direction of the axis P due to the screwing of the cylindrical nut 81 is applied to the outward flange 9. It is possible to prevent the inconvenience of not being transmitted well, effectively pushing the outward flange 9 and pulling the first and second fluid supply / exhaust port portions 1A and 2A toward each other well. Has been.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I having the first different structure is as follows. First, as shown in FIG. 7A, the tubular flange 81 is fitted over the outer periphery of the second fluid supply / exhaust port portion 2A of the valve 2 by passing through the outward flange 9 (up to the innermost side). Move until it touches the root 6t). Next, as shown in FIG. 7B, the split ring 82 is fitted between the outward flange 9 and the tip of the cylindrical nut 81 and fitted to the second fluid supply / exhaust port portion 2 </ b> A. At this time or before that, the gasket G is attached to the end face of one of the fluid supply / discharge ports 1A, 2A through temporary fitting of the annular protrusions 11, 21, 31, 41 and the annular grooves 51, 61. May be. Next, the first fluid supply / exhaust port portion 1A is applied to the second fluid supply / discharge port portion 2A via the gasket G, and the cylindrical nut 81 is slid in this state before the tightening operation [see FIG. 7 (c)]. By doing so, the connection state shown in FIG. 6 is obtained. In FIG. 7, the integrated panel 1 and the valve 2 stacked one above the other are drawn in a lying state for convenience of drawing.

Example 5
8 and 9 show a connection structure between the integrated panel and the fluidic device according to the fifth embodiment. This is different from the first embodiment only in the maintaining means I, and the second different structure maintaining means I will be described. 8 and 9, portions corresponding to those of the first embodiment shown in FIGS. The second separate structure maintaining means I includes first and second truncated frustoconical ends formed by expanding the first and second fluid supply / exhaust port portions 1A and 2A so that the diameter increases toward the end surface side. Portions 1D, 2D, a first tapered inner peripheral surface 84a that contacts the tapered outer peripheral surface 1d of the first truncated frustoconical end 1D, and a tapered outer peripheral surface 2d of the second truncated frustoconical end 2D. A split presser ring 85 including a pair of half arc members 84 and 84 having an inner circumferential surface having a substantially square cross section by the second taper inner circumferential surface 84b that abuts, and the half arc members 84 and 84. And a nut 87 formed on one half arc member 84.

  In the state in which the pair of half arc members 84 are covered over the first truncated frustoconical end portion 1D and the second truncated frustoconical end portion 2D in the joined state, the other half arc member 84 is covered. When the bolts 86 and nuts 87 passed through the insertion holes 84h are tightened, the half arc members 84 and 84 pivotally supported by the fulcrum Q at one end are attracted to each other so that the tapered surfaces contact each other. The fluid supply / exhaust port portions 1A and 2A are attracted to each other by the force of contact. The split mold retaining ring 85 is preferably made of a fluororesin material, but may be made of other materials such as an aluminum alloy.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the second different structure maintaining means I is as follows. First, as shown in FIG. 9A, a preliminary coupling operation is performed in which the first and second fluid supply / exhaust ports 1A and 2A are lightly connected and connected via the gasket G. Next, as shown in FIG. 9 (b), the first and second truncated frustoconical end portions 1 </ b> D and 2 </ b> D that are pre-connected are covered with a split retainer ring 85 and tightened with a bolt 86. By tightening the bolts 86, the gasket G is deeply fitted into the fluid supply / discharge ports 1A and 2A, and the connected state of the integrated panel 1 and the valve 2 is obtained as shown in FIG. 9C.

Example 6
A connection structure between the integrated panel and the fluidic device according to Example 6 is shown in FIG. This is different from the first embodiment only in the maintaining means I, and the third different structure maintaining means I will be described. In FIG. 10, portions corresponding to those of the first embodiment shown in FIGS. The third different structure maintaining means I includes a first fluid supply / exhaust port 1A having a protruding shape that is circular in a plan view and formed on the upper surface of the integrated panel 1 with a male screw 1n on the outer periphery. A flange portion 9 formed at the lower end portion of the valve case 6 with a male screw 9n on the outer peripheral portion in the two-fluid supply / discharge port portion 2A, and female screws 91n, 92n that can be screwed to the male screws 1n, 9n. The first and second ring nuts 91 and 92 have an engagement ring 93 having a substantially U-shaped cross section that can be fitted into the outer peripheral grooves 91m and 92m of the ring nuts 91 and 92.

  Both the ring nuts 91 and 92 and the engagement ring 93 are made of, for example, a fluororesin such as PFA or PTFE, and have a certain degree of flexibility. Therefore, the procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I of the third separate structure was integrated by engaging the engagement rings 93 with the ring nuts 91 and 92 in advance. First and second ring nuts 91 and 92 are formed, and the integrated first and second ring nuts 91 and 92 are drawn together through a gasket G to be in an assembled state. The first and second fluid supply / discharge port portions 1A and 2A are screwed to form a connection structure between the integrated panel and the fluid device. Of course, in this case, it is a condition that the male screws 1n and 9n are identical to each other, and after the screwing, the ring nuts 91 and 92 can be turned to be tightened more strongly or to be tightened later.

  The following assembly procedure is also possible. That is, in a state where the respective ring nuts 91 and 92 are screwed to the corresponding male screws 1n and 9n, both fluid supply / discharge port portions 1A and 2A are drawn through the gasket G, and the gasket G is pressed against the seal. The drawing process of connecting in a state is performed. This drawing step is performed using a dedicated drawing means different from the maintenance means I. Then, the engagement ring 93 is forcibly expanded and deformed in the outer peripheral grooves 91m and 92m of the first and second ring nuts 91 and 92 that are screwed to the male screws 1n and 9n, respectively. By doing so, a connection structure between the integrated panel and the fluidic device is formed. That is, the engagement ring 93 is engaged with the ring nuts 91 and 92 by forcible fitting.

  The maintenance means I having this configuration literally has only the function of maintaining the seal connection state via the gasket G of the first and second fluid supply / exhaust port portions 1A, 2A. However, since the ring nuts 91 and 92 and the engagement ring 93 can be rotated relative to each other, both of the ring nuts 91 and 92 can be independently rotated, and the seal pressure contact is caused by a change with time, creep or the like. When the force decreases, it is possible to perform a retightening operation by forcibly turning one or both of the ring nuts 91 and 92.

Example 7
FIG. 11 shows a connection structure between the integrated panel and the fluid device according to the seventh embodiment. This is different from the first embodiment only in the maintaining means I, and the fourth different structure maintaining means I will be described. As shown in FIG. 11, the fourth different structure maintaining means I has a protrusion-like first fluid supply which is formed on the upper surface of the integrated panel 1 and has a male screw 1n on the outer peripheral portion and has a circular shape in plan view. The exhaust port 1A, the flange portion 9 formed at the lower end of the valve case 6 with the external thread 9n on the outer periphery of the second fluid supply / exhaust port 2A, and these male screws 1n, 9n can be screwed together. And a cylindrical nut 101 having a female screw 101n.

  The cylindrical nut 101 is formed with a turn inner peripheral portion 101a having a diameter larger than that of the male screws 1n and 9n between the female screw 101n on the distal end side and the inward flange 102 on the proximal end side. Reference numeral 102 denotes an inner diameter that interferes with the flange portion 9 in the axial center P direction. In the assembled state shown in FIG. 11, the male screw 9n of the fluid device 2 is accommodated in the inner peripheral part 101a of the turn, and only the male screw 1n and the female screw 101n of the integrated panel 1 are screwed together. Thus, the first and second fluid supply / exhaust port portions 1A and 2A are maintained in a state of being attracted to each other.

  To assemble, first, the female screw 101n of the cylindrical nut 101 is screwed into the male screw 9n of the flange portion 9 of the fluid device 2 and tightened. In this state, the female screw 101n is screwed into the male screw 1n of the integrated panel 1 via the gasket G and tightened. Then, since the cylindrical nut 101 is idled relative to the male screw 9n of the flange portion 9, only the integrated panel 1 is screwed by tightening, and as a result, the integrated panel 1 and the fluid device 2 are drawn, The drawing state in which the fluid passages 3 and 7 are connected in a sealed state by the gasket G is maintained, and the holding means I having a drawing function is configured.

Example 8
FIG. 12 shows a connection structure between the integrated panel and the fluid device according to the eighth embodiment. This is different from the first embodiment only in the maintaining means I, and the maintaining means I having the fifth separate structure will be described. The fifth different structure maintaining means I is a compromise of the first different structure maintaining means I shown in FIG. 6 and the fourth different structure maintaining means I shown in FIG. 12, a first fluid supply / exhaust port 1 </ b> A that has a circular shape in a plan view formed on the upper surface of the integrated panel 1 with a male screw 1 n on the outer periphery, and a second fluid supply / discharge A flange portion 9 formed at the lower end portion of the valve case 6 with a male screw 9n on the outer peripheral portion in the mouth portion 2A, and a cylindrical nut 111 having a female screw 111n that can be screwed to both the male screws 1n and 9n. , And a split ring 112.

  The cylindrical nut 111 is formed with a turn inner peripheral portion 111a having a diameter larger than that of the male screws 1n and 9n between the female screw 111n on the distal end side and the inward flange 113 on the proximal end side. 113 is formed in what has the internal diameter part 113a of the grade which does not interfere with the flange part 9 in the axial center P direction. The split ring 112 is such that a circular ring is divided into three or more pieces (eg, consisting of three fan-shaped members of less than 120 degrees), and the inward flange 113 and the female screw 111n are passed over. It is possible to enter the inner peripheral part 111a from the outside and to form a ring shape in the inner peripheral part 111a. Further, it is also possible to configure the split ring 112 from a single C-shaped body having flexibility such that it can be inserted into the inner peripheral portion 111a by bending to some extent in the radial direction like a snap ring. .

  The assembly using the maintenance means I according to the fifth separate structure is as follows. That is, the split ring 112 is turned into the inner peripheral portion 111a in advance according to the above-described procedure, and the subsequent steps are the same as in the case of the maintaining means I having the fourth separate structure. Therefore, further explanation of the assembly procedure is omitted.

[Other Examples]
The “fluid device” in the present invention is a generic name for valves, pumps, accumulators, fluid storage containers, heat exchangers, regulators, pressure gauges, flow meters, heaters, flange pipes, etc. It is defined as Further, as a means for maintaining with a pulling function, a turnbuckle type (eg, in the structure shown in FIG. 10, one of the male screws 1n and 9n is a reverse screw and a turnbuckle nut straddling both the male screws 1n and 9n is screwed) (A structure to be worn) is also possible. Further, the annular presser protrusions 13 and 23 are replaced with the annular retainer wall portions 13 and 23. The annular retainer protrusions 12 and 22 and the annular retainer wall portions 13 and 23 are collectively referred to as an “annular retainer portion”. Shall be defined.

Sectional drawing which shows connection structure of integrated panel and valve (Example 1) Sectional drawing of the principal part of the gasket used for the connection structure of FIG. Enlarged sectional view of the main part showing details of the fitting structure between the gasket and fluid device Sectional drawing which shows the connection structure of an integrated panel and a bellows type valve (Example 2) Sectional drawing which shows connection structure of integrated panel and filter (Example 3) Sectional drawing of the principal part which shows the 1st another structure of the maintenance means with a drawing function (Example 4) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the 2nd another structure of the maintenance means with a drawing function (Example 5) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the 3rd another structure of the maintenance means with a drawing function (Example 6) Sectional drawing of the principal part which shows the 4th another structure of the maintenance means with a drawing function (Example 7) Sectional drawing of the principal part which shows the 5th another structure of the maintenance means with a drawing function (Example 8) (A), (b) is sectional drawing of the principal part which shows another shape of an annular protrusion both

DESCRIPTION OF SYMBOLS 1 Integrated panel 1A 1st fluid supply / exhaust part 1n Male thread part 2 Fluid device 2A 2nd fluid supply / exhaust part 3,4 Fluid path of integrated panel 7, 8 Fluid path of fluid device 9a Through hole 9B Outward flange 10 Mating seal part 11, 21 Annular protrusion 12, 13, 22, 23 Annular pressing part 12a, 13a, 22a, 23a Tapered peripheral surface 14, 15, 24, 25 Valley part 51 Annular groove 52, 53 Peripheral wall end part 52a, 53a Tapered peripheral surface 66 Bolt 67 Nut part 81 Cylindrical nut 81n Female thread part 82 Split ring 83 Inward flange 83a Opening G Gasket I Maintaining means P Shaft center S1 Seal part W Fluid path X Center line orthogonal to center line Z Center line along the axial direction

Claims (3)

A fluid device having the first fluid supply / discharge port portion of the integrated panel having a first fluid supply / discharge port portion in which a tubular fluid passage opens, and the second fluid supply / discharge port portion in which a tubular fluid passage opens. The second fluid supply / exhaust port is connected in communication with the fluid passage being sealed by a ring-shaped gasket interposed between the first fluid supply / exhaust port and the second fluid supply / discharge port. Hits the,
In the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion, an annular protrusion is formed on an outer diameter side portion of each fluid passage that opens to each end face,
The gasket is formed on a fluid path formed to communicate the fluid passages corresponding to each other of the first and second fluid supply / exhaust ports, and on end surfaces of the first and second fluid supply / discharge ports. A pair of annular grooves formed in an outer diameter side portion of the fluid path to be fitted to each of the annular protrusions, and shafts of the first and second fluid supply / exhaust ports to form the annular grooves. The inner and outer peripheral wall ends projecting in the center direction, and is made of a material having flexibility,
On the inner diameter side of the annular protrusion on the end surfaces of the first and second fluid supply / exhaust port portions, an annular pressing portion capable of contacting the peripheral wall end on the inner diameter side is formed,
The annular retainer portion has a tapered annular projection having a tapered circumferential surface whose side circumferential surface on the annular projection side is inclined so that a trough surrounded by the annular projection and the annular projection is recessed. The peripheral wall end on the inner diameter side is formed as a tapered annular protrusion that has a tapered circumferential surface that abuts against the tapered circumferential surface of the annular pressing portion and can enter the valley. And
When the first fluid supply / exhaust port and the second fluid supply / discharge port are attracted to each other via the gasket, the annular protrusion of the first fluid supply / discharge port and the annular end of the gasket A groove, and the annular protrusion of the second fluid supply / exhaust port and the annular groove at the other end of the gasket are fitted together, and the tapered circumferential surface of the annular holding portion and the peripheral wall end on the inner diameter side Configured so that a seal portion is formed by pressure contact with the tapered peripheral surface of the portion ,
The seal portion is configured by pressure contact between only the end portions on the side farther in the radial direction from the annular protrusion between the tapered peripheral surface of the annular pressing portion and the tapered peripheral surface of the peripheral wall end on the inner diameter side. A connection structure between an integrated panel and a fluid device in which the inclination angle of the tapered peripheral surface of the annular pressing portion and the inclination angle of the tapered peripheral surface of the peripheral wall end on the inner diameter side are set differently . The connection structure between the integrated panel and the fluid device according to claim 1 , wherein a protruding amount of the annular protrusion in the axial direction is set to be larger than a protruding amount of the annular pressing portion in the axial direction. . The said annular protrusion is formed in the cross-sectional taper shape by which the inner peripheral corner | angular part and / or outer peripheral corner | angular part of the front-end | tip were chamfered so that it might be easy to put the said annular protrusion in the said annular groove. Connection structure between integrated panel and fluidic device.

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