JP4575250B2 - Scanning probe microscope - Google Patents

Description

  The present invention relates to a scanning probe microscope that measures various physical property information such as the surface shape and viscoelasticity of a sample by scanning the probe close to the surface of the sample.

  As a device for measuring samples of metals, semiconductors, ceramics, resins, polymers, biomaterials, insulators, etc. in a micro area and observing physical property information such as viscoelasticity of the sample and surface shape of the sample, etc. A probe microscope (SPM) is known.

  Among these scanning probe microscopes, those having a sample holder on which a sample is placed and a cantilever that has a probe at the tip close to the surface of the sample and close to the surface of the sample are well known. (For example, refer to Patent Document 1). Then, the sample holder and the probe are relatively scanned in the X and Y directions in the sample surface, and the sample holder or the probe is moved in the Z direction while measuring the displacement amount of the cantilever during the scanning, and the sample is moved. By controlling the distance between the probe and the probe, the surface shape and various physical property information are measured.

In addition, by combining an optical microscope and a scanning probe microscope, the measurement location on the sample surface can be identified from information obtained from bright field observation, dark field observation, differential interference observation, phase difference observation, fluorescence observation, etc. Then, a probe is positioned at a location to be measured, and surface shape and various physical property information are measured at a higher resolution by a scanning probe microscope. (For example, see Patent Document 2 and Patent Document 3)
FIG. 9 shows the configuration of a first conventional scanning probe microscope.

  In this prior art, a cantilever 224 having a probe at the tip on a support base 220, an optical lever optical system for detecting displacement of the cantilever, and triaxial fine movement for scanning the cantilever 224 with respect to a sample A mechanism is arranged to constitute a scanning probe microscope unit.

  The optical lever optical system includes a semiconductor laser 271, a collimating lens (not shown), a polarizing beam splitter 282, a quarter wavelength plate 283, reflecting mirrors 275, 277, 278, a condensing lens 284, and a four-division photodiode. The position sensor 273 is configured. The outgoing light emitted from the semiconductor laser 271 is converted into parallel light by the collimating lens. The converted parallel light passes through the polarization beam splitter 282. At this time, the direction of the semiconductor laser 271 is adjusted so that the p-polarized component is incident on the polarization beam splitter 282. The p-polarized component exiting the polarization beam splitter 282 passes through the quarter wavelength plate 283 and is converted into circularly polarized light. After that, the light path is converted by the reflection plate 275, passes through the condenser lens 284, is converted by the reflection plate 277 and the reflection plate 278, and is condensed on the back surface of the cantilever 224. The reflected light from the cantilever 224 passes through the optical path opposite to the optical path described above, is converted to s-polarized light by the quarter-wave plate 283, and enters the polarization beam splitter 282. The s-polarized component is reflected without being transmitted through the polarization beam splitter 282, is bent in the optical path, and enters the quadrant photodetector 273. When the cantilever 224 is bent, the spot on the quadrant photodetector 273 moves, and the deflection of the cantilever 224 can be detected by the output signal of the quadrant photodetector 273.

  The cantilever 224 is fixed to a Z-direction fine movement mechanism 223 of a three-axis fine movement mechanism composed of an X-direction fine movement mechanism 251, a Y-direction fine movement mechanism 222, and a Z-direction fine movement mechanism 223. The sample surface is scanned by 222, and the distance between the sample surface and the probe is controlled by the Z-direction fine movement mechanism 223.

  Here, two micrometers 261 and one differential micrometer 263 connected to the stepping motor 262 are attached to the support base material 220 to constitute a Z-axis coarse movement mechanism. In the Z-axis coarse movement mechanism, the tip of each micrometer head is placed on a base plate (not shown), and the scanning probe microscope unit is supported at three points. When the probe is brought close to the sample placed on the base plate, the probe and the sample are visually observed from the side of the unit, and the two micrometers 261 and 263 are brought close to each other in advance, and then the optical lever is used. While watching the signal of the optical system, the differential micrometer 263 is moved little by little by the stepping motor 262 to bring the probe and the sample close to each other.

  The scanning probe microscope unit configured as described above is mounted on a base plate of a commercially available inverted microscope and used for measuring a sample on the base plate.

  Next, FIG. 10A shows an overview of a second conventional example of a scanning probe microscope provided with an optical microscope.

  The inverted microscope used as the optical microscope is a commercially available inverted microscope. A scanning probe microscope unit 314 is attached to a base plate 311 attached to the frame 330 of the inverted microscope via a support column 313.

  The configuration of the scanning probe microscope unit 314 is shown in FIG. The scanning probe microscope unit 314 includes a cantilever holder 326 for holding a cantilever 328 provided with a probe 315 at the tip, a displacement detection mechanism 318 for detecting displacement of the cantilever 328, and a sample placed on a base plate 311. The three-axis fine movement mechanism 316 for relatively scanning the 342 and the probe 315 is configured.

  The triaxial fine movement mechanism 316 is composed of a cylindrical piezoelectric element. The distance between the probe 315 and the sample 342 is adjusted by expanding and contracting the piezoelectric element, and the probe 315 is moved in the plane of the sample 342 by bending the piezoelectric element. Scan with. An optical lever type displacement detection mechanism 318 is fixed to the tip of the cylindrical piezoelectric element, and a cantilever 328 is fixed via a cantilever holder 326 fixed to the displacement detection mechanism 318. The displacement detection mechanism 318 bends the emitted light from the semiconductor laser 320 in the direction of the cantilever 328 by the dichroic mirror 322, irradiates the back surface of the cantilever 328, and receives the reflected light from the back surface of the cantilever 328 by the spot position sensor 324. A deflection amount of the cantilever 328 is detected by a signal of the spot position sensor 324.

  The scanning probe microscope unit 314 is arranged between the illumination device 317 of the inverted microscope having the condenser lens 316 and the objective lens 332 arranged on the lower surface side of the sample 342, and the illumination light from the condenser lens 316 is cylindrical piezoelectric. The sample 342 is irradiated through the transmission hole 321 of the support portion 319 to which the element is fixed, the inside of the cylindrical piezoelectric element 316 and the optical lever dichroic mirror 322, and the light transmitted through the sample 342 is collected by the objective lens 332. It is illuminated and images of probe 315 and sample 342 are observed.

Here, the scanning probe microscope unit 314 is attached to the support column 313, and the Z-axis coarse movement mechanism for bringing the probe 315 close to the sample 342 along the optical axis direction of the inverted microscope is provided on the normal support unit 313.
JP 2000-346784 A Japanese Patent Laid-Open No. 10-19906 Japanese Patent Laid-Open No. 9-166602

  However, in the first conventional scanning probe microscope unit shown in FIG. 9, when the probe and the sample are brought close to each other, when the head portion of the differential micrometer 263 is moved up and down by the stepping motor 262, two micrometers are used. Using the head of the meter 261 as a fulcrum, the probe operates in a circular motion. For this reason, the positions of the sample and the probe tip are misaligned, making alignment difficult.

  In addition, since the head portions of the three micrometers 261 and 263 are smaller in diameter than the size of the scanning probe microscope unit, the support rigidity of the scanning probe microscope unit is low and vibration noise is added to the measurement data due to vibration. End up. In addition, due to the temperature change at the measurement location, the micrometer head and the scanning probe microscope unit are thermally expanded, thereby degrading the measurement accuracy.

  Further, in the second conventional scanning probe microscope configured as shown in FIG. 10, since the scanning probe microscope unit 314 is cantilevered with respect to the support column 313, the support rigidity is low and vibration is caused. As a result, noise appears in the measurement data.

  In addition, in order to fully demonstrate the function of an inverted microscope combined with a scanning probe microscope and improve the alignment accuracy of the probe and sample before measurement by the scanning probe microscope, the objective lens can be exchanged and low magnification It is necessary to replace the objective lens with a high-magnification objective lens for measurement. A high-magnification objective lens has a working distance as small as several millimeters to several hundreds of micrometers, and a condenser lens with a numerical aperture of about 0.5 in order to ensure sufficient illumination efficiency. Needs to approach the sample to about 30 mm.

  In the conventional example of FIG. 10, since the height in the optical axis direction of the Z-axis coarse movement mechanism provided on the scanning probe microscope unit and the support column is increased, the condenser lens cannot be brought close to the sample. For this reason, only a condenser lens with a long working distance and a small numerical aperture can be used, and even if it is combined with an inverted microscope, the function of the inverted microscope cannot be fully used, and it is difficult to position the measured position with an optical microscope. .

  In view of such problems, the present invention provides a scanning probe microscope having a Z-axis coarse movement mechanism that has high support rigidity and can approach while moving straight in a direction perpendicular to the sample surface. At this time, in order to confirm the proximity state of the probe and the sample, the structure is such that both can be observed from the side.

  Furthermore, the present invention provides a scanning probe microscope having a Z-axis coarse movement mechanism that can be configured with a thin unit so that an objective lens and an illumination device can be sufficiently close to a sample when combined with an optical microscope.

  Furthermore, the present invention provides a scanning probe microscope that is not affected by temperature drift due to the measurement environment.

  In order to solve the above problems, a scanning probe microscope is configured by the following means in the present invention.

  In a scanning probe microscope in which the probe and the sample are relatively moved within a sample plane while controlling the distance in the height direction between the probe and the sample placed on the sample holder, the probe and the sample surface are The Z-axis coarse movement mechanism to be brought close has an upper surface moving table that moves in a direction perpendicular to the sample surface, and the Z-axis coarse movement mechanism is provided with a hollow opening from the upper surface to the lower surface. And a unit of a scanning probe microscope including either the probe or the sample holder in the hollow opening, and a structure in which a notch is provided from the outer periphery to the inner periphery of the side surface of the Z-axis coarse movement mechanism The scanning probe microscope unit was fixed to the upper surface moving table so that the probe and the sample surface could be brought close to each other.

  This Z-axis coarse movement mechanism is slidably connected in a direction parallel to the surface of the upper surface moving table and has a first moving portion and a second moving portion slidably connected to the first inclined portion. The upper surface moving table is fixed, the movement in the upper surface moving table surface is restricted, and the vertical moving unit is arranged to be movable in a direction orthogonal to the upper surface moving table, and the horizontal movement The upper surface moving table is moved in the direction perpendicular to the table surface by moving the portion in a direction parallel to the upper surface moving table and pushing the second inclined portion by the first inclined portion.

  Further, a second stage movable within the upper surface moving table surface is fixed on the upper surface moving table of the Z-axis coarse movement mechanism, and the scanning probe microscope unit is connected to the upper surface through the second stage. Fixed to a moving table.

  In addition, a part or all of the microscope illumination device is arranged in the hollow opening. At this time, the illumination apparatus includes a condenser lens having a numerical aperture of 0.5 or more.

  In addition, a sample holder having a transmission hole was arranged at a position facing the probe attached to the scanning probe microscope unit, and an objective lens was arranged on the side facing the probe with respect to the sample holder.

  In addition, a probe was disposed at a position facing the sample holder attached to the scanning probe microscope unit, and an objective lens was disposed at a position facing the sample holder with respect to the probe.

  In addition, an objective lens or a condenser lens is disposed in the hollow opening.

Furthermore, in the present invention, a sample holder or a probe is fixed to a base plate on which the Z-axis coarse movement mechanism is installed, and the sample holder, the base plate, the Z-axis coarse movement mechanism, and the scanning probe microscope unit are substantially included. Made of the same material. Furthermore, the material is a low expansion material having a thermal expansion coefficient of 4 × 10 ⁻⁶ / K or less, and 80% of the total mass of the sample holder, the base plate, the Z-axis coarse movement mechanism, and the scanning probe microscope unit. % Or more are made of the same material.

  By configuring the scanning probe microscope as described above, the scanning probe microscope unit can be supported over a wide range by the upper surface moving table surface surrounding the hollow opening, so that the support rigidity can be increased, and the scanning type The influence of vibration on the measurement image of the probe microscope can be reduced.

  Moreover, since the notch is provided from the outer peripheral portion to the inner peripheral portion of the Z-axis coarse movement mechanism, the state of the probe and the sample can be observed from the side surface, and the proximity state can be visually observed. In addition, since the probe can be moved in the sample plane by the second stage, alignment within the probe plane can be easily performed, and operability is improved.

  Furthermore, since the Z-axis coarse movement mechanism has a flat Z-stage structure, the overall height of the unit can be reduced, and a condenser lens or objective lens with a high numerical aperture can be brought closer to the sample. Observation performance is improved and positioning accuracy is improved.

  Further, even if each material expands due to heat, the amount of expansion can be compensated for each other, the influence of drift due to heat is suppressed, and the measurement accuracy of the scanning probe microscope is improved.

  Hereinafter, the scanning probe microscope of the present invention will be described with reference to the drawings.

  In this embodiment, the measurement is performed in a DFM mode (Dynamic Force Mode) in which the cantilever is moved close to the sample while vibrating near the resonance frequency, and scanning is performed while keeping the distance between the probe and the sample constant by the amount of change in amplitude and phase. Shall be performed.

  FIG. 1A is a front view of a scanning probe microscope according to the first embodiment of the present invention, and FIG. 1B is an enlarged view of a region indicated by symbol A in FIG.

  This scanning probe microscope 1 is a combination with a commercially available inverted microscope. As shown in FIGS. 1A and 1B, a scanning probe microscope unit base 3 installed on a vibration isolation table 2 and The scanning probe microscope unit 4 provided on the base plate 13 of the scanning probe microscope unit base 3, the XY stage 140 provided on the upper surface of the Z-axis coarse movement mechanism 110, the Z-axis coarse movement mechanism, and the scanning probe An optical microscope unit (inverted microscope) 8 provided below the microscope unit 4 and an illumination device 5 provided above the scanning probe microscope unit 4 and connected to the frame unit 50 of the optical microscope unit 8 are provided. .

  The optical microscope unit 8 is placed on the vibration isolation table 2 via the XY stage 31. The XY stage 31 functions as a sample position adjusting mechanism for aligning the sample with the center of the optical axis of the objective lens 10 installed in the optical microscope unit 8.

The scanning probe microscope unit base unit 3 includes a flat base plate 13 supported at four corners by four support columns 12 extending vertically from the vibration isolation table 2. The base plate 13 uses an invar material (thermal expansion coefficient: 0.5 to 2 × 10 ⁻⁶ / K), which is a low expansion material made of Fe-36Ni, in order to suppress thermal expansion.

  Here, the scanning probe microscope unit base unit 3 is not fixed to the frame unit 50 of the optical microscope unit 8 and is independent of the optical microscope unit 3.

  A base plate opening 15 is formed at the center of the base plate 13, and a sample holder 16 on which the sample S is placed is provided in the base plate opening 15. A sample holder opening 17 is formed. The sample holder 16 is finely moved along the Z direction by a sample fine movement mechanism 27 described later. The Z direction is a direction perpendicular to the surface of the sample S and the sample holder 16 and refers to the height direction of the scanning probe microscope 1 provided with an optical microscope.

  On the upper surface of the sample holder 16, the above-described scanning probe microscope unit 4 is installed. The scanning probe microscope unit 4 includes a probe fine movement mechanism portion 26 described later. The probe fine movement mechanism portion 26 is provided with a total of three crank-shaped crank fixing portions 30 on the left and right sides and the rear side. . The probe fine movement mechanism section 26 is fixed to the Z-axis coarse movement mechanism 110 via the XY stage 140 by the crank fixing section 30 so that the center thereof coincides with the sample holder opening section 17.

  The probe fine movement mechanism section 26 and the sample fine movement mechanism section 27 constitute a triaxial fine movement mechanism for a scanning probe microscope.

  On the lower surface of the probe fine movement mechanism portion 26, a cantilever holder 22 that supports the cantilever 20 and is used for measurement in air and measurement in solution is provided. In the center of the cantilever holder 22, a glass holder 23 made of glass is provided.

  When measurement is performed in a solution using the glass holder 23, a film due to the viscosity of the liquid is formed between the sample S and the glass holder 23 so that irregular reflection of illumination light at the time of measurement in the liquid is performed. To prevent.

  The cantilever 20 is not limited to a long one, but has a triangular shape in plan view, a bent probe for a near-field microscope having a circular cross section and a sharpened tip of an optical fiber, or a cantilever. Instead of this, a straight type probe for a scanning tunnel microscope or a near-field microscope is also included in the present invention.

  The cantilever 20 is provided above the sample holder opening 17. A sharpened probe 21 is provided at the front end of the cantilever 20, and the rear end is fixed to the cantilever holder 22. Thereby, the cantilever 20 is cantilevered so that the front end side where the probe 21 is provided becomes a free end. Further, the cantilever 20 is vibrated at a predetermined frequency and amplitude along the Z direction by a vibration means (not shown), and is further finely moved in the X and Y directions with respect to the sample holder 16 by the probe fine movement mechanism unit 26. It is supposed to be. The XY direction is a direction orthogonal to each other parallel to the surface of the sample S and the sample holder 16 and is orthogonal to the Z direction. Furthermore, the X direction refers to the width direction of the scanning probe microscope 1 with an optical microscope, and the Y direction refers to the depth direction of the scanning probe microscope 1.

  Further, in the vicinity of the probe fine movement mechanism section 26, a Z-axis coarse movement mechanism section 110 is provided for roughly moving the cantilever 20 in the Z direction by the motor driving section 112. A base 111 is fixed to the base plate 13 of the scanning probe microscope unit base 3. An XY stage 140 that acts as a probe position adjusting mechanism for moving the probe 21 in the XY plane is provided on the upper surface of the Z-axis coarse movement mechanism unit 110. A scanning probe microscope unit is provided on the upper surface of the XY stage 140. The crank fixing part 30 provided in two places on the left and right of 4 and a total of three places on the rear side is fixed.

  Here, the detailed structure of the Z-axis coarse movement mechanism 110 is shown in FIG. 2A is a plan view of the Z-axis coarse movement mechanism, FIG. 2B is a front view, and FIG. 2C is a cross-sectional view taken along line BB in FIG. 2A.

  Note that FIG. 2C has the same shape except for the micrometer 146 and the arm 144 when the sectional view taken along the line CC in FIG. 2A is taken. In addition, each drawing includes a portion that is indicated by a solid line, which is originally visible as a hidden line so that the configuration can be easily understood.

  The Z-axis coarse movement mechanism 110 has a “U” shape in plan view. That is, a hollow opening 113 penetrating from the top surface to the bottom surface is provided at the center of the Z-axis coarse movement mechanism 110 having a square shape in plan view. It has the structure of the notch which the side surface of the inner peripheral part penetrated from the part.

  The Z-axis coarse movement mechanism 110 has a base 111 having a “U” shape in plan view, and is also in the shape of “U” in a plan view. A horizontal moving portion 117 having an inclined surface 114 and having bottom surfaces 115 of left and right inclined surfaces fixed to the base 111 so as to be slidable in the front-rear direction by a linear guide 116 is further provided. A vertical moving portion 119 having a second inclined surface 118 from the side to the rear is fixed to the first inclined surface 114 via a linear guide 120 so as to be slidable along the inclined surface. The vertical moving unit 119 is fixed to a top surface moving table 121 having a U shape in a plan view, and the top surface moving table 121 is heightened by a cross roller guide 122 arranged in the height direction of the four corners of the table. Movement other than movement of direction is restricted.

  A motor drive unit 112 is installed on the right side of the Z-axis coarse movement mechanism 110. The motor drive unit 112 includes a stepping motor 123, a coupling 124, a ball screw 125, and a support 126 incorporating a bearing.

  A male screw shaft 125 a of the ball screw 125 is fixed to the output shaft 123 a of the stepping motor 123 via a coupling 124. The screw shaft 125a of the male screw is housed in a bearing in the support 126 so that its end and tip can be rotated. A male screw shaft 125a is provided with a female screw, and a ball screw nut 125b having a bearing ball built therein is fitted therein. An arm 127 is attached to the ball screw nut 125b, and the arm 127 is fixed to the horizontal moving portion 117 described above. When the motor 123 is rotated in this state, the screw shaft 125a rotates through the coupling 124, and the ball screw nut 125b whose movement in the rotation direction is restricted moves in the front-rear direction. At this time, the horizontal moving portion 117 is also guided by the linear guide 116 attached to the base 111 via the arm 127 and operates in the front-rear direction.

  When the horizontal moving unit 117 moves in the front-rear direction, the first inclined surface 114 pushes the second inclined surface 118 of the vertical moving unit 119. At this time, since the upper surface moving table 121 connected to the vertical moving unit 119 is restricted from moving in the horizontal direction, the upper surface moving table 121 can be moved straight in the height direction.

  In addition, an XY stage 140 including an X movement table 141 that can move in the left-right direction and a Y movement table 142 that can move in the front-rear direction is provided on the top movement table 121 surface. ing. The X movement table 141 is guided in the left-right direction by a cross roller guide 143 provided along the left-right direction before and after the upper surface movement table 121, and the Y-movement table 142 is along the front-rear direction to the left and right of the Y movement table 142. Guided in the front-rear direction by the provided cross roller guide 144. Arms 145 and 146 serving as fulcrums are fixed to the X moving table 141 and the Y moving table 142, and the X moving table 141 is moved in the horizontal direction by a micrometer 147 fixed to the upper surface moving table 121 of the Z-axis coarse movement mechanism 110. The Y moving table 142 is pushed in the front-rear direction by the micrometer 148 fixed to the X moving table. Compression springs 149 and 150 are provided on the side facing each of the micrometers 147 and 148. By operating the micrometers 147 and 148, the XY stage 140 can be positioned at an arbitrary position.

The base 111, the horizontal moving unit 117, the vertical moving unit 118, the upper surface moving table 121, the X moving table 141, and the Y moving table 142 are low-expansion materials made of Fe-36Ni in order to suppress thermal expansion, like the base plate 13. A certain invar material (thermal expansion coefficient 0.5-2 × 10 ⁻⁶ / K) is used.

  When the Z-axis coarse movement mechanism 110 and the XY stage 140 are configured as described above and the scanning probe microscope unit 4 having a probe is disposed in the hollow opening 113 of the Z-axis coarse movement mechanism 110, the scanning probe microscope unit 4 Is the crank fixing portion 30 provided at the left and right and rear three loads, and is fixed to the Z-axis coarse movement mechanism 110 via the XY stage 140, so the support rigidity to the Z-axis coarse movement mechanism 110 is high, and the vibration The influence is suppressed and the quality of the measurement data of the scanning probe microscope is improved.

  Further, since the front side of the Z-axis coarse movement mechanism 110 and the XY stage 140 is an opening from the outer peripheral portion to the inner peripheral portion, the probe 21 and the sample S can be observed from the side surface, and when the sample is exchanged Since the sample can be placed from the side, operability is improved.

  FIG. 3 shows an enlarged plan view of the probe fine movement mechanism portion 26 of FIG.

  As shown in FIG. 3, the probe fine movement mechanism section 26 in this embodiment includes an outer frame 48 and an inner frame 49 having a rectangular frame shape with different width dimensions. The outer frame 48 and the inner frame 49 are made of Invar material. Is formed in a planar shape. Further, the outer frame 48 and the inner frame 49 are concentrically connected to each other via an X driving unit (first driving unit) 52 and a Y driving unit (first driving unit) 51, and The upper surfaces of the frame 48 and the inner frame 49 are flush with each other. The X drive unit 52 is installed in an X side cavity 60 formed in the outer frame 48 and extending in the Y direction, and the Y drive unit 51 is installed in a Y side cavity 57 similarly extending in the X direction. ing.

  The X drive unit 52 includes a stacked X-side piezoelectric element 61 oriented in the Y direction. The X-side piezoelectric element 61 is provided with a substantially rhombus X-side displacement enlarging mechanism 62 as viewed from above so as to surround the periphery thereof. The X-side displacement magnifying mechanism 62 is connected to the inner frame 49 via the X-side connecting portion 63.

  The Y drive unit 51 includes a laminated Y-side piezoelectric element 54 oriented in the X direction. Similarly to the above, the Y-side piezoelectric element 54 is provided with a substantially rhombic Y-side displacement magnifying mechanism portion 55, and the Y-side displacement magnifying mechanism portion 55 is connected to the inner frame 49 via the Y-side connecting portion 56. It is connected to.

  Parallel springs 67 are installed at the four corners of the inner frame 49.

  Then, by applying a voltage to the X-side piezoelectric element 61 and the Y-side piezoelectric element 54, the X-side displacement enlarging mechanism 62 and the Y-side displacement enlarging mechanism 55 are enlarged and reduced in the X direction and the Y direction, respectively. Thus, the inner frame 49 can be finely moved in the XY directions.

  A substantially rectangular substrate 68 is provided on the bottom surface of the inner frame 49. A probe side through hole 70 is formed in the center of the substrate 68 in the Z direction. And the illumination light from the light source 40 shown in FIG. 1 passes through this probe side through-hole 70.

  As described above, the cantilever 20 is provided on the lower surface of the substrate 68 via the cantilever holder 22, and the cantilever 20 is moved in the XY direction together with the substrate 68 and the cantilever holder 22 by the fine movement of the inner frame 49 in the XY direction. It is designed to be moved slightly.

  A Y-direction fine movement amount detection unit 73 and an X-direction fine movement amount detection unit 74 are provided on the upper surfaces of the outer frame 48 and the inner frame 49. The Y-direction fine movement amount detection unit 73 is fixed to the inner frame 49 and extends in the X direction, and a Y-direction target 77 that is fixed to the outer frame 48 and detects the amount of movement of the Y-direction target 77 in the Y direction. It has.

  Similarly, the X-direction fine movement amount detection unit 74 is fixed to the inner frame 49 and extends in the Y direction, and the X-direction target 80 is fixed to the outer frame 48 and detects the amount of movement of the X direction target 80 in the Y direction. And a direction sensor 81. Capacitance sensors are used as the Y direction sensor 78 and the X direction sensor 81, but are not limited thereto, and may be a strain gauge, an optical displacement system, a differential transformer, or the like.

  Under such a configuration, when the inner frame 49 is finely moved in the X direction, the X direction target 80 is also finely moved in the X direction, and the X direction sensor 81 detects the amount of fine movement in the X direction. When the inner frame portion 49 is finely moved in the Y direction, the Y direction target 77 is also finely moved in the Y direction, and the Y direction sensor 78 detects the amount of fine movement in the Y direction. That is, the X direction sensor 81 detects the amount of fine movement in the X direction of the cantilever 20 via the X direction target 80 and the inner frame portion 49, and the Y direction sensor 78 also detects the Y direction target 77 and the inner frame portion 49. Thus, it functions as fine movement amount detection means for detecting the fine movement amount of the cantilever 20 in the Y direction.

  The X direction sensor 81 and the Y direction sensor 78 are electrically connected to a calculation unit (calculation unit) 83, and detection results from the X direction sensor 81 and the Y direction sensor 78 are input to the calculation unit 83. It is like that. The calculation unit 83 calculates an error of the fine movement amount of the cantilever 20 in the X and Y directions based on the detection result and the applied voltage and the fine movement amount. That is, the calculation unit 83 functions as a calculation unit. Further, the calculation unit 83 is electrically connected to a control unit 84 that performs various controls, and inputs a calculation result to the control unit 84. The control unit 84 controls the probe fine movement mechanism unit 27 to operate linearly with respect to the applied voltage.

  Further, as shown in FIG. 1, the probe fine movement mechanism 26 receives a laser light source 44 that emits laser light as a probe displacement detection means, and a laser light from the laser light source 44, for example, a photodetector 45 divided into four parts. And are provided. The laser light source 44 and the photo detector 45 are disposed opposite to each other at an angle above the cantilever 20. The laser light emitted from the laser light source 44 reaches the upper surface of the cantilever 20 and is reflected there, and the reflected light reaches the photodetector 45.

  In addition, the above-described illumination device 5 is provided above the probe fine movement mechanism unit 26. The illumination device 5 includes a light source 40 that emits illumination light, and a condenser lens 41 (numerical aperture 0.52, working distance 30 mm) for condensing the illumination light from the light source 40. The condenser lens 41 is disposed above the center of the probe fine movement mechanism unit 26 by the illumination support column 42 connected to the frame unit 50 of the inverted microscope unit 8 and is supported so as to be vertically movable with respect to the probe fine movement mechanism unit 26. . The illumination device 5 is not fixed to the scanning probe microscope unit base 3.

  Further, as shown in FIGS. 4 and 5, the sample fine movement mechanism portion 27 in this embodiment includes a mechanism main body portion 86 formed in a substantially rectangular shape, and the thickness of the mechanism main body portion 86 from the mechanism main body portion 86. And an extending portion 87 extending in a direction (that is, the X direction) intersecting the direction (that is, the Z direction). The mechanism main body 86 and the extension 87 are made of Invar material.

  The thickness dimension R of the extending portion 87 is set smaller than the thickness dimension M of the mechanism main body. The upper surface of the extension portion 87 and the upper surface of the mechanism main body portion 86 are substantially the same, and thereby, a space J is provided below the extension portion 87.

  A sample holder side through hole 109 oriented in the Z direction is formed in the extending portion 87, and the sample holder 16 described above is provided in the sample holder side through hole 109.

  The mechanism main body 86 is provided with a main body fixing portion 91 extending in the direction opposite to the extending direction of the extending portion 87. The main body fixing portion 91 is fixed to a predetermined position of the table 13 shown in FIG. 1, and thereby the mechanism main body portion 86 is cantilevered.

  A hollow portion 93 is provided in the mechanism main body 86. The first parallel spring 101 is provided at the end of the upper inner wall portion 94 of the cavity portion 93 in the X direction where the main body fixing portion 91 is provided, and the extending portion 87 is provided. On the other end, a second parallel spring 102 is provided. On the other hand, of the both ends in the X direction of the lower inner wall 97, the third parallel spring 103 is provided at the end where the extending portion 87 is provided, and the end where the main body fixing portion 91 is provided. A fourth parallel spring 104 is provided. Further, a lower wall portion 95 extending downward from the upper inner wall portion 94 is provided in the vicinity of the second parallel spring 102, and upward from the lower inner wall portion 97 in the vicinity of the fourth parallel spring 104. An upper wall 96 extending in the direction is provided. That is, the lower wall portion 95 and the upper wall portion 96 are extended in opposite directions to be opposed to each other.

  And between these lower wall part 95 and the upper wall part 96, one end is fixed to the lower wall part 95, and the other end is fixed to the upper wall part 96. The piezoelectric element 90 is disposed, and a Z drive unit (second drive unit) 85 is configured.

  The Z drive unit 85 is physically separated and provided separately from the X drive unit 52 and the Y drive unit 51 described above with reference to FIG. 3, and functions independently.

  Furthermore, a bottom wall 107 extending in the X direction is provided at the lower end of the mechanism main body 86. Of the two ends in the X direction of the bottom wall portion 107, the end portion on which the main body fixing portion 91 is provided is integrally fixed to the side wall of the mechanism main body portion 86, and the extending portion 87 is provided. One end is a free end. A Z-direction fine movement amount detection unit 108 connected to the calculation unit 83 is provided at the tip of the bottom wall 107. Although a capacitance sensor is used for the Z-direction fine movement amount detection unit 108, the present invention is not limited to this, and a strain gauge, an optical displacement system, a differential transformer, or the like may be used.

  Under such a configuration, when a voltage is applied to the Z-side piezoelectric element 90, the Z-side piezoelectric element 90 expands and contracts. When the Z-side piezoelectric element 90 is extended, the lower wall portion 95 and the upper wall portion 96 are pressed outward in the X direction, and the upper wall portion 96 rotates around the fixed end in the clockwise direction in FIG. The lower wall portion 95 also rotates clockwise around the fixed end, and as a result, is guided by the first to fourth parallel springs 101, 102, 103, 104, and the extension portion 87 moves in the Z direction. The sample holder 16 connected to the extending portion 87 moves in the Z direction. At this time, the fine movement amount of the mechanism main body 86 is detected by the Z-direction fine movement detection unit 108. That is, the Z-direction fine movement amount detection unit 108 functions as fine movement amount detection means that detects the movement of the bottom surface of the Z drive unit and detects the fine movement amount of the sample holder 16 in the Z direction via the mechanism main body 86. It is. Then, the calculation unit 83 calculates an error in the fine movement amount in the Z direction of the sample holder 16 based on the applied voltage and the actual fine movement amount in accordance with the detection result of the Z direction fine movement amount detection unit 108. ing. The calculation result is input to the control unit 84, and the control unit 84 controls the stage fine movement mechanism unit 27 to operate linearly with respect to the applied voltage.

  As for the Z direction, the amount of fine movement may be simply detected by the Z direction fine movement amount detection unit 108 and displayed as being above the height of the scanning probe microscope image.

  The sample fine movement mechanism 27 configured as described above is small and highly rigid, and has a higher resonance frequency than that of the probe fine movement mechanism section 26 and can operate at high speed.

  Further, in this embodiment, as shown in FIG. 1, an objective lens 10 is provided in the space J. That is, a revolver (arrangement changing means) 9 is provided at the upper end of the inverted microscope unit 8, and a plurality of objective lenses 10 having different magnifications are provided on the revolver 9. The arrangement of the plurality of objective lenses 10 is changed by rotating the revolver 9 so that the plurality of objective lenses 10 can be selectively arranged at the observation position K in the space J. It has become.

  Here, the observation position K is a position below the sample holder 16 and coincides with the sample holder opening 17 and is a position for observing the sample S.

  The objective lens 10 can be moved up and down in the Z direction by operating a focusing dial 8a provided in the inverted microscope 8 at the observation position K.

  When exchanging a plurality of objective lenses by rotating the revolver, the sample fine movement mechanism 27 and the base plate 13 escape so that the trajectory of the objective lens does not interfere with the scanning probe microscope unit 4 and the scanning probe microscope unit base 3. Is provided.

  Here, the objective lens 10 is often replaced with the sample S in focus. At this time, in order to eliminate interference with the base plate 13, it is necessary to reduce the thickness of the base plate. In the present invention, since the optical microscope unit 8 and the scanning probe microscope unit base unit 3 are configured independently, the area of the base plate 13 can be increased, and the thickness of the portion other than the central portion of the base plate 13 is increased. In addition, even if the mass is increased by increasing the thickness, the base plate can be supported by the support column 12 independent of the optical microscope unit 8, so that the scanning probe microscope unit base unit 3 has high rigidity. It became possible to make it.

  In the scanning probe microscope configured as described above, the scanning probe microscope unit 4 and the Z-axis coarse movement mechanism 110 can be configured to be thin, and there is a space in which the objective lens 10 can be exchangeably disposed below the base plate 13. Therefore, the scanning probe microscope unit 4 can be placed in a narrow space between the condenser lens 41 and the objective lens, the performance of the optical microscope can be fully utilized, and the alignment accuracy can be improved.

  In addition, since the probe 21 moves straight along the sample surface, it moves along the optical axis when the probe 21 and the sample are brought close to each other along the Z axis. The alignment accuracy to the place is also improved.

The probe fine movement mechanism 26, the sample fine movement mechanism 27, the scanning probe microscope unit 4 including the sample holder 16 attached to the sample fine movement mechanism, the Z-axis coarse movement mechanism 110, the XY stage 140, and the scanning probe microscope unit base 3 The base plate 13 is made of substantially the same material and is made of an invar material (thermal expansion coefficient 0.5 to 2 × 10 ⁻⁶ / K), which is a low expansion metal with little strain due to temperature, and suppresses strain due to temperature itself. Even when a strain occurs, it is configured to compensate each other for the amount of strain.

  Here, since it is impossible to make the material substantially the same with 100% of the same material, the scanning probe microscope unit 4, the Z-axis coarse movement mechanism 110, and the XY stage are used in this embodiment. 140, 80% of the total mass of the base plate 13 of the scanning probe microscope unit base part 3 was made of Invar material.

  For example, the frame of the cantilever holder 22 attached to the probe fine movement mechanism 26 is made of titanium with an emphasis on lightness, and holds the glass holder 23. Also, the guide part of the Z-axis coarse movement mechanism part 110, the motor drive part 112, the piezoelectric elements of the sample mechanism part 27 and the probe fine movement mechanism part 26, screws used in each unit, probe displacement detection means 44, 45, etc. Due to cost and functional problems, materials other than Invar were used.

  Further, since the column 12 of the scanning probe microscope unit base 3 does not affect the scanning probe microscope image itself even if it expands and contracts due to temperature, it is made of stainless steel and the cost is reduced. You may comprise with material.

In addition, as a low expansion metal, you may use the super invar material (thermal expansion coefficient 0-1.5 * 10 < ^-6 > / K) which uses Fe-32Ni-5Co as a component. In addition, other than the low expansion material, if the material is substantially the same, the amount of strain due to temperature can be compensated for each other, so that temperature drift can be suppressed.

  Next, the operation of the scanning probe microscope 1 having the optical microscope according to the present embodiment configured as described above will be described.

  First, the scanning probe microscope unit 4 is removed from the Z-axis coarse movement mechanism 110 and placed on the sample S on the sample holder 16 from the front side of the Z-axis coarse movement mechanism. Then, the scanning probe microscope unit 4 is fixed to the XY stage 140 on the Z-axis coarse movement mechanism 110. Then, illumination light is irradiated from the light source 40 toward the sample S. The illumination light passes through the probe-side through hole 70, passes through the sample S, and further passes through the sample holder-side opening 17, thereby reaching the objective lens 10 disposed at the observation position K. As a result, the state of the sample S can be observed through the objective lens 10, and the entire optical microscope 8 is moved by the XY stage 31 to specify the measurement site on the sample S.

  At this time, when the revolver 9 is turned, the original objective lens 10 moves out of the observation position K through the space J, and the other objective lens 10 is arranged at the observation position K. Thereby, the objective lens 10 having an appropriate magnification is selected.

  When the focusing dial 8a is operated, the objective lens 10 moves upward, the objective lens 10 comes close to the sample S, and focusing can be performed.

  As a result, the sample S is optically observed, and according to the result, measurement by the probe microscope is performed.

  In order to perform measurement with the probe microscope, the position of the surface of the sample S and the position of the probe 21 are aligned by the probe position adjusting mechanism 140 while viewing the optical image of the inverted microscope 8.

  Next, the positions of the laser light source 44 and the photo detector 45 are adjusted. That is, position adjustment is performed so that the laser light L emitted from the laser light source 44 is reflected by the upper surface of the cantilever 20 and is incident on the photodetector 45 reliably.

  The adjustment of the laser light source and the photodetector, which are the probe displacement detection means, may be performed first.

  Thereafter, while visually observing the sample S and the probe 21 from the side, the motor 123 is driven, the cantilever 20 is coarsely moved by the Z-axis coarse movement mechanism 110, and the cantilever 20 is brought close to the sample. Then, the probe 21 at the tip of the cantilever 20 is positioned near the surface of the sample S.

  From this state, the probe 21 is vibrated at a predetermined frequency and amplitude along the Z direction via the cantilever 20 by a vibration means (not shown).

  Then, a voltage is applied to the X-side piezoelectric element 61 and the Y-side piezoelectric element 54 shown in FIG. Then, the X-side piezoelectric element 61 and the Y-side piezoelectric element 54 expand and contract, and the inner frame 49 slightly moves in the XY direction via the X-side displacement enlarging mechanism 62 and the Y-side displacement enlarging mechanism 55. As a result, the probe 21 performs a raster scan on the sample S at a predetermined scanning speed.

  At this time, if the inner frame 49 is finely moved in the XY direction, the X direction target 81 and the Y direction target 78 are finely moved in the X direction and the Y direction, respectively, and the fine movement amounts in the X and Y directions are the X direction sensor 81 and the Y direction sensor. 78. These detection results are input to the calculation unit 83 to calculate an error in the fine movement amount of the cantilever 20 in the X and Y directions, and this calculation result is input to the control unit 84. As described above, by correcting the fine movement amount in the XY directions, the movement is linear in the XY directions without being affected by the hysteresis and creep of the X-side piezoelectric element 61 and the Y-side piezoelectric element 54.

  When scanning, if the distance between the probe 21 and the surface of the sample S changes according to the unevenness of the sample S, the probe 21 receives a repulsive force or an attractive force due to an atomic force or an intermittent contact force. The state changes, and the amplitude and phase change. This change in amplitude and phase is detected as an output difference (referred to as a DIF signal) between two different pairs of divided surfaces of the photodetector 45. This DIF signal is input to a Z voltage feedback circuit (not shown). The Z voltage feedback circuit applies a voltage to the Z-side piezoelectric element 90 shown in FIG. 4 so that the amplitude and phase are the same by the DIF signal.

  The Z-side piezoelectric element 90 repeats expansion and contraction at a high speed when a voltage is applied. When the Z-side piezoelectric element 90 expands and contracts, the sample holder 16 moves in the Z direction at a very high frequency via the extending portion 87, and the sample S on the sample holder 16 moves in the Z direction. Thereby, the distance between the probe 21 and the surface of the sample S is always kept constant during the scanning.

  When the sample holder 16 moves in the Z direction, the fine movement amount of the mechanism main body 86 is detected by the Z direction fine movement amount detection unit 108, and an error in the fine movement amount of the sample holder 16 in the Z direction according to the detection result. Is calculated. Then, the calculation result is input to the control unit 84 and can be operated linearly in the Z direction.

  The fine movement amount may be detected by the Z direction movement amount detection unit 108 and displayed as height information of the SPM image. In this case, faster scanning is possible.

  In this way, the voltage applied to the X-side, Y-side, and Z-side piezoelectric elements 61, 54, and 90, or the signals of the X-direction, Y-direction, and Z-direction sensors 81, 78, and 108 are input to the control unit 84, The shape image of the surface of the sample S can be measured by imaging. Further, by measuring various forces and physical actions acting between the probe 21 and the sample S, various kinds of viscoelasticity, surface potential distribution of the sample S, leakage magnetic field distribution on the surface of the sample S, near-field optical image, and the like. Measurement of physical property information can be performed.

  By configuring the scanning probe microscope as described above, the apparatus rigidity can be secured, and as a result, the influence of sound and floor vibration is suppressed, and the measurement accuracy of the scanning probe microscope is improved.

  Further, since the functions of a commercially available microscope such as an objective lens, an objective lens exchange function, and a high-efficiency illumination device can be used as they are, the system can be handled easily.

  Next, a second embodiment of the present invention will be described.

  FIG. 6 shows a second embodiment of the present invention.

  In FIG. 6, the same components as those shown in FIGS. 1 to 5 are denoted by the same reference numerals, and the description thereof is omitted.

  This embodiment and the first embodiment have the same basic configuration, and differ in the following points.

  That is, the scanning probe microscope 1 in this embodiment is combined with an upright microscope. That is, the upright microscope 8 is provided with a light source 40, and a condenser lens 41 is provided at the upper end of the light source 40. A stage fine movement mechanism 27 is provided above the condenser lens 41. The stage fine movement mechanism unit 27 includes a cylindrical Z-side piezoelectric element 34, and the Z-side piezoelectric element 34 is installed in the Z direction. The Z-side piezoelectric element 34 is formed with a cylindrical hole (stage-side through-hole) 33 directed in the Z direction, and illumination light from the light source 40 is passed through the cylindrical hole 33.

  The objective lens 10 is provided at the observation position K above the probe fine movement mechanism unit 26. Here, the observation position K refers to a position where the cantilever 20 or the sample S is observed from above the probe fine movement mechanism 26. The objective lens 10 is moved up and down at the observation position K. When the objective lens 10 is moved downward, the objective lens 10 is inserted into the internal space of the probe fine movement mechanism 26.

  Under such a configuration, the illumination light from the light source 40 passes through the sample S through the cylindrical hole 33. When the objective lens 10 is moved downward and inserted in the direction of the probe-side through hole 70, the objective lens 10 comes close to the cantilever 20 or the sample S.

  As described above, the stage fine movement mechanism portion 27 is provided with the cylindrical hole 33, and the illumination light is passed through the cylindrical hole 110, so that the measurement can be performed with high accuracy without disturbing the progress of the illumination light.

  Here, the Z-axis coarse movement mechanism 110 and the XY stage 140 are the same as those in the first embodiment, and the scanning probe microscope unit 4 is disposed in the hollow opening 113 of the Z-axis coarse movement mechanism 110. Therefore, the height in the optical axis direction can be reduced, and the objective lens 10 can be inserted into the probe-side fine movement mechanism 26 in the hollow opening 113, so that the objective lens 10 is further attached to the cantilever 20 and the sample S. It is possible to make them close to each other, and a high-precision objective lens can be provided to perform highly accurate measurement.

 The structure of the Z-axis coarse movement mechanism of the scanning probe microscope of the present invention is not limited to the shapes of the first embodiment and the second embodiment. For example, as shown in FIG. Is also possible. Further, the notch from the outer peripheral portion to the inner peripheral portion does not necessarily have to penetrate from the top surface to the bottom surface. FIG. 8 is an example of this case, FIG. 8 (a) is a plan view showing the shape of the Z-axis coarse movement mechanism, and FIG. 8 (b) is a front view. As shown in this figure, the structure may have a notch 160 from the outer periphery to the inner periphery only from the bottom to the middle in the height direction when viewed from the front. Further, the Z-axis coarse movement mechanism and the XY stage mechanism are not limited to the above embodiments.

In addition, the probe is operated by the Z-axis coarse movement mechanism, but the configuration may be such that the sample side is moved by the Z-axis coarse movement mechanism to be close to the probe.

  Further, the optical microscope is not an essential element, and only a scanning probe microscope may be used. In combination with an optical microscope, a scanning probe microscope unit may be mounted on the frame of the optical microscope.

  In the first and second embodiments, the X-side piezoelectric element 61, the Y-side piezoelectric element 54, and the Z-side piezoelectric element 90 are laminated piezoelectric elements. However, the present invention is not limited to this, and can be changed as appropriate. It is. For example, a stack type piezoelectric element or a voice coil can be used.

  The probe fine movement mechanism unit 26 and the stage fine movement mechanism unit 27 may be integrated.

  In addition, although observation is performed in the DFM mode, the present invention is not limited to this, and can be applied to various modes such as contact AFM. Furthermore, it can be applied to a near-field microscope. When applied to a near-field microscope, an objective lens having a high NA can be used, so that the efficiency of collecting near-field signals can be improved.

It is a block diagram which shows 1st Example of the scanning probe microscope which concerns on this invention, (a) is a front view, (b) is an enlarged view of the area | region shown with the code | symbol A in (a). It is a block diagram of the Z-axis coarse movement mechanism and XY stage of the scanning probe microscope shown in FIG. 1, (a) is a top view. (B) is a front view, (c) is a BB line sectional view of (a). It is a top view which shows the probe fine movement mechanism part of the scanning probe microscope shown in FIG. It is a top view which shows the sample fine movement mechanism part of the scanning probe microscope shown in FIG. It is a bottom view which shows the sample fine movement mechanism part of the scanning probe microscope shown in FIG. It is a front view which shows 2nd Example of the scanning probe microscope which concerns on this invention. It is a top view which shows the shape of the Z-axis coarse movement mechanism of 3rd Example of the scanning probe microscope which concerns on this invention. It is a block diagram which shows the Z-axis coarse movement mechanism of 4th Example of the scanning probe microscope which concerns on this invention, (a) is a top view, (b) is a front view. It is the 1st general-view figure of the conventional scanning probe microscope. It is the 2nd general-view figure of the conventional scanning probe microscope, Comprising: (a) is a general-view figure, (b) is a detailed figure of the scanning probe microscope part of (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Scanning probe microscope 2 Vibration isolator 3 Scanning probe microscope unit base part 4 Scanning probe microscope unit 5 Illuminating device 8 Optical microscope part (inverted microscope)
9 Revolver 10 Objective lens 12 Strut 13 Base plate 16 Sample holder 20 Cantilever 21 Probe 22 Cantilever holder 26 Probe fine movement mechanism 27 Sample fine movement mechanism 30 Crank fixing part 31 XY stage 40 Light source 41 Condenser lens 42 Illumination post 44 Laser light source (probe displacement detection) means)
45 Photodiode (probe displacement detection means)
50 Optical microscope frame part 110 Z axis coarse movement mechanism part 111 Base 112 Motor drive part 113 Hollow opening part 117 Horizontal movement part 119 Vertical movement part 121 Upper surface movement table 123 Stepping motor 125 Ball screw 140 XY stage (probe position adjustment mechanism)
141 X movement table 142 Y movement table S Sample

Claims (12)

A scanning probe microscope unit having a Z-axis coarse movement mechanism for bringing the probe and the sample surface close to each other, a sample holder for placing the sample, and a probe holder for fixing the probe;
A scanning probe microscope comprising: a base plate supporting the scanning probe microscope unit;
The Z-axis coarse adjustment mechanism includes a top surface moving table which moves the sample plane perpendicular direction, and a base portion which is fixed directly on the disposed on the bottom surface of the Z-axis coarse adjustment mechanism base plate, the upper surface It is composed of a hollow opening provided from the moving table to the base part, and a notch provided from the outer peripheral part to the inner peripheral part of the side surface of the Z-axis coarse movement mechanism surrounding the periphery of the hollow opening part ,
At least a part of the scanning probe microscope unit including only one of the sample holder or the probe holder of the scanning probe microscope unit is disposed in the hollow opening via the upper surface moving table. A scanning probe microscope. A sample holder having a transmission hole is disposed on the side facing the probe holder provided in the scanning probe microscope unit disposed in the hollow opening via the upper surface moving table, and the probe is disposed on the sample holder. The scanning probe microscope according to claim 1 , wherein an objective lens is disposed on the opposite side. A probe is disposed on the side facing the sample holder provided in the scanning probe microscope unit disposed in the hollow opening via the upper surface moving table, and an object is positioned at a position facing the sample holder with respect to the probe. The scanning probe microscope according to claim 1 , wherein a lens is disposed. The scanning probe microscope according to any one of claims 1 to 3, wherein a part or all of the illumination device is disposed in the hollow opening. The scanning probe microscope according to claim 4 , wherein the illumination device includes a condenser lens having a numerical aperture of 0.5 or more. Scanning probe microscope according to any one of claims 1 to 5, characterized in that the objective lens or a condenser lens is disposed in the hollow opening. Either the sample holder or the probe is fixed to the base plate on which the Z-axis coarse movement mechanism is installed, and the sample holder, the base plate, the Z-axis coarse movement mechanism, and the scanning probe microscope unit are substantially the same. scanning probe microscope according to any one of constituted claims 1 to 6 in the material.   The scanning probe microscope according to claim 7, wherein a material of the scanning probe microscope unit is a low expansion material.   The scanning probe microscope according to claim 7 or 8, wherein 80% or more of the total mass of the Z-axis coarse movement mechanism, the base plate, the sample holder, and the scanning probe microscope unit is made of the same material. The scanning probe microscope according to claim 8 or 9, wherein a thermal expansion coefficient of the material is 4 × 10 ^-6 / K or less. The Z-axis coarse movement mechanism is slidably connected in a direction parallel to the surface of the upper surface moving table and has a first inclined portion, and a second slidably connected to the first inclined portion. The upper surface moving table is fixed, the movement in the upper surface moving table surface is restricted, and the vertical moving unit is arranged to be movable in a direction orthogonal to the upper surface moving table surface, The horizontal moving part is moved in a direction parallel to the upper surface moving table surface, and the second inclined part is pushed by the first inclined part to move the upper surface moving table in a direction perpendicular to the table surface. scanning probe microscope according to any one of claims 1 to 10. A second stage movable within an upper surface moving table surface is fixed on an upper surface moving table of the Z-axis coarse movement mechanism, and the scanning probe microscope unit is connected to the upper surface moving table via the second stage. scanning probe microscope according to any one of the fixed claims 1 to 11 in.

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