JP4564866B2 - Transmission line fixture - Google Patents

Description

  The present invention relates to a fixture for fixing a bending transmission line such as a lead wire, a cable, and a tube.

  In various processing apparatuses, a power source, a signal, and the like necessary for the operation of the movable part constituting the processing apparatus are supplied to the movable part through a transmission line such as a lead wire or a tube. For example, in a cutting apparatus that cuts a wafer vertically and horizontally and divides it into individual devices, the movable part includes a holding means for holding the workpiece and a processing means for cutting the workpiece. The means is connected to a tube for transmitting a suction force for wafer adsorption, a power source for movement and rotation by a motor, a lead wire and a cable for transmitting a signal, and the like. In addition, the processing means includes lead wires and cables that transmit power and signals supplied to the motor that rotates the cutting blade, lead wires and cables that transmit power for driving the camera for imaging the cutting position, and cutting fluid. A tube or the like for distribution is connected.

  In the cutting apparatus, since the cutting blade provided in the processing means acts on the wafer held by the holding means by the relative movement of the holding means and the processing means, cutting is performed. Move with the movement of the holding means and the processing means. On the other hand, in order to prevent the various transmission lines from hindering the movement of the movable parts such as the holding means and the processing means, the transmission lines need to be fixed so as to follow the movement of the holding means and the processing means and move while bending. There is.

  Therefore, for example, various transmission lines are accommodated in a guide mechanism having a structure in which a plurality of frames are connected to each other by a hinge, such as a caterpillar, and the transmission line is also moved as the guide mechanism moves while bending. Conventionally, a transmission wire fixture configured to move while being bent has been used (see, for example, Patent Document 1). In this way, the processing apparatus configured to move the holding means and the processing means with the bending of the transmission line is not limited to the cutting apparatus, and such a fixing tool is also used in other processing apparatuses.

JP 2003-333738 A

  However, a fixture with a structure in which a plurality of frames are connected to each other by a hinge, such as a caterpillar, has a problem that it makes a rattling sound when moving, and there is a problem that it is uncomfortable. However, there is a problem that vibrations are generated, which adversely affects precision machining. Furthermore, there is a problem that a fixture configured like a caterpillar is relatively expensive, takes time to assemble, and increases costs.

  Therefore, the problem to be solved by the present invention is to enable the movement of the transmission line to be guided at low cost without generating sound or vibration when the transmission line moves with bending. That is.

The present invention relates to a transmission line fixture that is mounted on a processing apparatus that performs cutting or grinding, and that fixes a transmission line composed of a lead wire or a tube in a bendable manner, and supports the transmission line on the outer surface of a bending surface of a sheet member. A bendable sheet member having a width and a length and having flexibility that does not generate sound or vibration by bending; and a belt member that is constructed in the width direction of the sheet member and fixes a transmission line supported by the sheet member; And at least a fixed portion formed at both ends of the sheet member in the length direction and positioned at the base of the apparatus and the movable portion . The sheet member is made of, for example, polypropylene, but is not limited thereto.

  The belt member includes an end fixing belt member that fixes both ends of the transmission line in the length direction, and an arbitrary position fixing belt member that fixes an arbitrary position between the ends of the transmission line. A belt insertion hole into which the end fixing belt member and the arbitrary position fixing belt member installed in the width direction are inserted is formed.

This is the transmission-line fixture saw including a housing to a bendable flexible tube transmission lines loosely, transmission lines are accommodated through the flexible tube, fixed transmission line belt member via a flexible tube To do.

The arbitrary position fixing belt member includes a fastening belt and a spacer tube that accommodates the fastening belt, and the fastening belt is inserted into the belt insertion hole.

  In the present invention, since the various transmission lines are supported by the bendable and flexible sheet member and fixed by the fixing portion and the belt member, the transmission line is supported by the sheet member and the belt member. The support state has a degree of freedom. Therefore, even if connected to the movable part constituting the processing apparatus, the transmission line and the sheet member move while bending as the movement moves, so that the movement of the movable part is not hindered and sound and vibration are generated. There is no adverse effect on precision machining. In addition, since it can be configured at low cost and is easily assembled, the cost can be reduced.

  The belt member is composed of an end portion fixing belt member and an arbitrary position fixing belt member, and both ends of the transmission line and an arbitrary position between both ends are fixed, so that the support state is more stable.

  When the transmission line is accommodated in the flexible tube in a loosely fitted state and the transmission line is fixed via the flexible tube, the degree of freedom of the transmission line is increased even inside the flexible tube. Further increase.

  The belt member includes a fastening belt and a spacer tube that accommodates the fastening belt, and the degree of freedom of the transmission line is maintained.

  As a processing apparatus on which the transmission line fixture according to the present invention is mounted, for example, there is a cutting apparatus 1 shown in FIG. The cutting device 1 is a device that cuts a workpiece such as a wafer, and as a movable portion that can be moved during processing, a holding means 2 that holds the workpiece, and cutting that cuts the workpiece. Means 3 are provided.

  In the holding means 2, a chuck table 21 is rotatably supported on a support plate 20, and the chuck table 21 is connected to a drive source 22 and is rotatable. The drive source 22 is fixed to a moving base 23, and the moving base 23 is arranged in parallel with the ball screw 24 while a nut inside thereof is screwed to a ball screw 24 arranged in the X-axis direction. It can slide with respect to the pair of guide rails 25. A motor 26 is connected to one end of the ball screw 24. As the ball screw 24 is rotated by being driven by the motor 26, the moving base 23 is guided by the guide rail 25 and moves in the X-axis direction. The table 21 is also configured to move in the same direction.

  The cutting means 3 has a configuration in which a cutting blade 32 is attached to the tip of a spindle 31 that is rotatably supported by a spindle housing 30. The spindle housing 30 is supported by a support portion 33, and the support portion 33 can be moved in a cutting direction (Z-axis direction) by a cutting feed means 34. The spindle 31 is connected to the motor 36 and is driven to rotate by the motor 36.

  The spindle housing 30 is fixed with an alignment means 4 for detecting the position of the workpiece to be cut. The alignment unit 4 includes an imaging unit 40 that images a workpiece. Based on the image acquired by the imaging unit 40, the position to be cut is determined by processing such as pattern matching with an image stored in advance. It can be detected (aligned).

  The notch feeding means 34 includes a ball screw 341 disposed in the Z-axis direction on one surface of the wall 340, a pulse motor 342 for rotating the ball screw 341, and a guide rail 343 disposed in parallel with the ball screw 341. A nut (not shown) inside the support portion 33 is screwed into the ball screw 341. The support portion 33 is driven by the pulse motor 342 and is guided by the guide rail 343 as the ball screw 341 rotates, and moves up and down in the Z-axis direction. The cutting means 3 supported by the support portion 33 also moves in the same direction. It is configured to move up and down.

  The wall 340 can be moved in the Y-axis direction by the index feeding means 35. The index feeding means 35 includes a ball screw 350 disposed in the Y-axis direction, a moving base 351 formed integrally with the wall portion 340 and having an internal nut screwed into the ball screw 350, and a pulse motor that rotates the ball screw 350. 352 and a guide rail 353 arranged in parallel with the ball screw 350, and a nut (not shown) inside the moving base 351 is screwed into the ball screw 350. The moving base 351 is driven by the pulse motor 352 and guided by the guide rail 353 as the ball screw 350 rotates, and moves in the Y-axis direction. The cutting means 3 also moves up and down in the Y-axis direction accordingly. It has a configuration.

  For example, as shown in FIG. 1, when the wafer W integrated with the ring-shaped frame F is cut and diced through the holding tape T, the wafer W is sucked and held by the chuck table 21, and the chuck table 21 The frame F is fixed by the frame support portion 27 disposed on the outer peripheral side.

  In the example of FIG. 1, a first transmission line fixture 6 a is disposed on the side of the guide rail 25 on the base 5. In the illustrated example, one end of the first transmission line fixture 6 a is fixed to the side of the guide rail 25, and the other end is fixed to the moving base 23. A second transmission line fixture 6b is disposed on the side of the guide rail 353 on the base 5. One end of the second transmission line fixture 6 b is fixed to the side of the guide rail 353, and the other end is fixed to the side surface of the wall portion 340.

  The first transmission line fixture 6a and the second transmission line fixture 6b are provided with a bendable sheet member 60, for example, as shown in FIG. The sheet member 60 is formed of polypropylene or the like and has flexibility. The sheet members 6a and 6b support at least one transmission line 7, and the base member 5 of the cutting apparatus 1 shown in FIG. Fixing parts 61a and 61b fixed to the parts are formed.

  The transmission line 7 supported by the sheet member 60 is fixed by a belt member 62 installed in the width direction of the sheet member 60. The belt member 62 in the example of FIG. 2 includes an end fixing belt member 62a that fixes both ends of the transmission line 7 in the length direction, and an arbitrary position fixing belt member that fixes an arbitrary position between both ends of the transmission line 7. 62b. Corresponding to this, the sheet member 60 is formed with a belt insertion hole 63a into which the end fixing belt member 62a is inserted and a belt insertion hole 63b into which the arbitrary position fixing belt member 62b is inserted. The fixing portions 61a and 61b in the example of FIG. 2 are provided with holes 64a and 64b for screwing, and these holes are formed in brackets 65a and 65b fixed to the end portion of the sheet member 60. The portions 61a and 61b may be formed at both end portions of the sheet member 60, and the brackets 65a and 65b are not necessarily required.

  As shown in FIG. 3, the arbitrary position fixing belt member 62 b can be configured such that the fastening belt 67 is accommodated in the hollow portion of the spacer tube 66. The fastening belt 67 includes a belt portion 67a and a fastening portion 67b for fastening the belt portion 67a. The belt portion 67a is inserted through the belt insertion hole 63b shown in FIG. The degree of freedom of the transmission line 7 is maintained.

  As shown in FIG. 4, the transmission wire 7 can be penetrated and accommodated in the hollow portion of the flexible tube 68. The flexible tube 68 can be bent similarly to the sheet member 60. In such a configuration, the belt member 62 fixes the transmission line 7 via the flexible tube 68.

  Returning to FIG. 1, in the first transmission line fixture 6a and the second transmission line fixture 6b, a plurality of transmission lines 7 are fixed. As the transmission line 7 fixed to be bent by the first transmission line fixing tool 6 a, a tube serving as a passage for air for sucking and holding the wafer W in the chuck table 21, and the frame F is supported by the frame support portion 27. For example, there are a tube serving as a passage for air, a power line and a signal line for transmitting a power source and a driving signal to the driving source 22. On the other hand, as the transmission line fixed to bendable by the second transmission line fixing tool 6b, the power line and the signal line for driving the pulse motor 342 to raise and lower the cutting means 3 and the spindle 31 are rotated. There are a power line and a signal line for driving the motor 36, a power line and a signal line for alignment processing, and the like.

  One fixing portion 61a constituting the first transmission line fixture 6a is fixed to the base 5 on the side of the guide rail 25, and the other fixing portion 61b constituting the first transmission line fixture 6a. Is fixed to the movable base 23. On the other hand, one fixing portion 61a constituting the second transmission line fixing tool 6b is fixed to the base 5 on the side of the guide rail 353, and the other fixing constituting the second transmission line fixing tool 6b. The part 61b is fixed to the wall part 340.

  When the wafer W is held on the chuck table 21, the chuck table 21 moves in the X-axis direction, and alignment with the imaging unit 40 in the X-axis direction is performed. At this time, the transmission line 7 fixed by the first transmission line fixture 6a moves together with the chuck table 21 while being bent.

  On the other hand, the cutting unit 3 and the alignment unit 4 move in the Y-axis direction in order to position the imaging unit 40 directly above the wafer W. Then, the imaging unit 40 images the surface of the wafer W, and the alignment unit 4 detects the position where the wafer W is to be cut. When the cutting unit 3 and the alignment unit 4 move in the Y-axis direction, the transmission line 7 fixed to the second transmission line fixture 6b is bent and one end thereof moves together with the wall 340.

  In both the first transmission line fixture 6a and the second transmission line fixture 6b, the sheet member 60 supports the transmission line 7 and the transmission line 7 is fixed by the belt member 62 as shown in FIG. Therefore, no sound or vibration is generated by bending of the transmission line 7 or bending of the sheet member 60. Further, it is easy to bundle the transmission lines and fix them to the respective transmission line fixtures.

  In the above example, the case where the transmission line fixture of the present invention is mounted on the cutting apparatus has been described. However, the present invention can also be applied to a processing apparatus having a configuration in which a transmission line is connected to a movable portion, such as a grinding apparatus.

It is a perspective view which shows the cutting device by which the transmission wire fixing tool which concerns on this invention was mounted. It is a perspective view which shows the transmission line fixing tool. It is sectional drawing which shows schematically an example of the arbitrary position fixing belt member which comprises the same transmission wire fixing tool. It is sectional drawing which shows the state in which the transmission line was accommodated in the flexible tube.

Explanation of symbols

1: Cutting device 2: Holding means 20: Base 21: Chuck table 22: Drive source 23: Moving base 24: Ball screw 25: Guide rail 26: Motor 27: Frame support part 3: Cutting means 30: Spindle housing 31: Spindle 32: Cutting blade 33: Support part 34: Cutting feed means 340: Wall part 341: Ball screw 342: Pulse motor 343: Guide rail 35: Indexing feed means 350: Ball screw 351: Moving base 352: Pulse motor 353: Guide rail 36: Motor 4: Alignment means 40: Imaging unit 5: Base 6a: First transmission line fixture, 6b: Second transmission line fixture 60: Sheet member 61a, 61b: Fixing unit 62: Belt member 62a: End fixing belt member 62b: Arbitrary position fixing belt member 63a, 63b Belt insertion holes 64a, 64b: holes 65a, 65b: brackets 66: spacer tube 67: fastening belt 67a: belt portion 67b: fastening portion 68: flexible tube 69: lead wire 7: transmission line W: wafer T: holding tape F: flame

Claims (2)

A transmission wire fixture that is mounted on a processing device that performs cutting or grinding, and that flexibly fixes a transmission wire composed of a lead wire or a tube,
A bendable sheet member having a width and a length for supporting the transmission line on the outer surface of the bent surface of the sheet member, and having flexibility so as not to generate sound and vibration due to the bending, and to be installed in the width direction of the sheet member A belt member for fixing the transmission line supported by the sheet member; and at least a fixed portion formed at both ends in the length direction of the sheet member and positioned at the base and the movable portion of the apparatus ,
The belt member is composed of an end fixing belt member that fixes both ends in the length direction of the transmission line, and an arbitrary position fixing belt member that fixes an arbitrary position between the ends of the transmission line. The seat member is formed with a belt insertion hole into which the end fixing belt member laid in the width direction and the arbitrary position fixing belt member are inserted,
The transmission line is received through the flexible tube that is accommodated in a loosely fitted state and is bent, and the belt member fixes the transmission line via the flexible tube, and the arbitrary position fixing belt member Is composed of a fastening belt and a spacer tube that accommodates the fastening belt, and the fastening belt is inserted into the belt insertion hole and fastened while maintaining the degree of freedom of the transmission line on the back surface of the sheet member. Transmission line fixture.   The transmission wire fixture according to claim 1, wherein the sheet member is made of polypropylene.

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