JP4412675B2 - Static elimination transport apparatus and static elimination method during conveyance - Google Patents

Description

  The present invention relates to a static elimination transport apparatus that performs static elimination when transporting a charged product or the like and a static elimination method during transport.

  Electronic devices such as liquid crystal panels, plasma displays, and semiconductor substrates are manufactured in a clean room. When static electricity is charged in an electronic device, the insulator that constitutes the electronic device is electrically destroyed or the electronic device is configured. There is a risk of static electricity damage due to short-circuiting of fine particles on the circuit. For this reason, in the manufacturing process of an electronic device, the technique which neutralizes the static electricity which generate | occur | produced in the electronic device using static neutralizers, such as a soft X-ray-type static elimination device and a discharge type ionizer, is known (for example, refer patent document 1). .)

In addition, static electricity generated in the electronic device is removed in a transporting process in which the electronic device that has undergone the manufacturing process is stored in a cassette or transferred to the next process. For example, as shown in FIGS. 10 and 11, a transfer chamber 110 is provided on the outlet side of the manufacturing facility 100, and a fan 120 for flowing clean air is disposed on the ceiling side of the transfer chamber 110. . Further, a discharge ionizer 130 is disposed on the upstream side of the airflow generated by the fan 120, and a transfer robot 140 is disposed on the downstream side. In a state where air ions are generated by the discharge ionizer 130, the transfer robot 140 holds the glass substrate (electronic device) M from the manufacturing equipment 100 side, and transfers the glass substrate M to the cassette 150 side to the cassette 150. Store. During this transfer, static electricity generated in the glass substrate M is neutralized by air ions and is neutralized.
JP 2006-221998 A

  By the way, when the static elimination space thickness, which is the thickness where air ions are present in the vicinity of the charged surface of the glass substrate M, is somewhat thick (for example, 10 cm or more), the static elimination effect (static elimination speed) by the static eliminator is near the charged surface. It greatly depends on the ion concentration and electric field strength. That is, the higher the ion concentration and the stronger the electric field strength, the higher the charge eliminating effect. On the other hand, in the static elimination method in the conveyance process as described above, the grounding member existing around the glass substrate M is the ceiling or wall of the transfer chamber 110 and the cassette 150 formed of a ground conductor. Since the distance D1 between the ceiling of the transfer chamber 110 and the glass substrate M is large (for example, 2 m or more), the electric field strength in the vicinity of the charging surface is weak, and a high charge removal effect cannot be obtained. Further, when the glass substrate M is held from the manufacturing equipment 100 side or when the glass substrate M is stored in the cassette 150, the distance D2 between the glass substrate M and the wall and the distance D3 between the glass substrate M and the cassette 150 are set. Although it is narrowed, it is difficult to sufficiently neutralize the glass substrate M because of a very short time. Furthermore, the wall surface of the transfer chamber 110 is positioned perpendicular to the charging surface (horizontal plane) of the glass substrate M, and the cassette 150 is positioned laterally (on the same horizontal plane) and is not opposed. For this reason, even if the glass substrate M is brought close to the wall of the transfer chamber 110 or the cassette 150 for a long time, a uniform and strong electric field cannot be formed over the entire charged surface of the glass substrate M, and the entire charged surface. It is difficult to remove the charge effectively.

  FIG. 12 shows an example of changes in the potential of the glass substrate M when the charge is eliminated by the above-described charge elimination method (change curve L1) and when the charge is not eliminated (change curve L2). In the drawing, reference symbol P1 indicates a time point immediately before the glass substrate M is lifted up in the manufacturing facility 100, reference character P2 indicates a time point when the glass substrate M is lifted up, reference symbol P3 indicates that the glass substrate M is being conveyed, and reference symbol P4 indicates the glass substrate M. The time when it is stored in the cassette 150 (the time when the transfer robot 140 releases the glass substrate M) is shown. As shown in this figure, it can be understood that the above-described static elimination method requires a long time for static elimination of the glass substrate M, and cannot be completely eliminated, so that effective (effective) static elimination cannot be performed. . As a result, if the glass substrate M is carried out with insufficient charge removal, the risk of static electricity failure increases. On the other hand, if a large number of static eliminators are installed in order to perform sufficient static elimination, the equipment cost will increase, and if the static elimination time is lengthened, productivity will be reduced.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a static elimination transport apparatus capable of effectively neutralizing and transporting a charged body and a static elimination method during transport.

In order to achieve the above object, the invention according to claim 1 is provided in a clean room in which clean air is supplied in a vertical flow from the top to the bottom, and the charged charged bodies are parallel to each other in the horizontal direction. A transfer robot that is transported in a state of being maintained horizontally by two arms disposed in the arm, and the transfer robot disposed so that the relative positional relationship with the arm is always constant, and the charged body is charged with electricity. A soft X-ray irradiator that neutralizes and neutralizes with air ions, and the charged body is placed on the support convex portion of the arm, and is positioned below the charged body and vertically with respect to the charged body. A conductive member that is disposed on the arm so as to be opposed to each other with a predetermined distance and is controlled to a predetermined potential, and the irradiation central axis of the soft X-ray irradiator is set to the lower surface of the charged body and the conductive member. This is located between the parts The features.

When the charged body is held by the arm of the transfer robot, the conductive member faces the charged body at a predetermined distance in the vertical direction, and the soft X-ray irradiator emits soft X-rays between the charged body and the conductive member. Air ions are located.

According to a second aspect of the present invention, in the static elimination transport apparatus according to the first aspect, the potential of the conductive member is set to a ground potential.

According to a third aspect of the present invention, in the static eliminating and conveying apparatus according to the first aspect, the conductive member is formed and arranged so as to be evenly opposed to the entire surface of the opposed charged body. Features.

According to the fourth aspect of the present invention, in a clean room in which clean air is supplied in a vertical flow from above to below, a charged charged body is provided by two arms disposed in parallel in the horizontal direction. Install a transfer robot that transports the charged body in a horizontal state, and the soft X-ray irradiator that neutralizes the electricity charged in the charged body with air ions and eliminates the charge so that the relative positional relationship with the arm is always constant. With the charged body placed on the support convex portion of the arm and placed on the support robot, the conductive member positioned below the charged body and controlled at a predetermined potential is placed in the vertical direction with the charged body. And a soft X-ray is irradiated with the irradiation center axis of the soft X-ray irradiator positioned between the lower surface of the charged body and the conductive member.

According to the first and fourth aspects of the present invention, in a state where the charged body is held by the holding portion of the transfer robot, the charged body and the conductive member are opposed to each other with a predetermined distance therebetween, and air ions are positioned between them. Is done. For this reason, when the charged body is held by the transfer robot, a strong and stable electric field is formed between the charged body and the conductive member (around the charged body), and air ions are generated under such a good electric field. Static elimination is performed effectively and stably. As a result, the charged body can be effectively discharged and transported.

Also, the soft X-ray irradiator is arranged on the transfer robot so that the relative positional relationship with the arm is always constant, and the irradiation central axis of the soft X-ray irradiator is positioned between the lower surface of the charged body and the conductive member. Since soft X-rays are irradiated , air ions can be positioned between the charged body and the conductive member in a good and stable manner, and the charged body can be effectively discharged. Furthermore, it is possible to carry out and carry out discharging at the same time by eliminating (by forming and supplying) air ions during transfer of the charged body. In other words, it is possible to carry out transport and static elimination efficiently in time.

Further, since the charged body is held by the support convex portions formed on the two arms arranged in parallel at a distance in the horizontal direction, the conductive member is opposed to almost the entire surface of the charged body. It becomes possible to enhance the effect of neutralizing the body.

According to the second aspect of the present invention, since the potential of the conductive member is set to the ground potential, for example, by grounding the conductive member via the grounded transfer robot, the potential of the conductive member can be easily and It becomes possible to control stably.

According to the third aspect of the present invention, since the conductive member is formed and disposed so as to be evenly opposed across the entire surface of the opposite charged body, an even and stable electric field is formed around the entire surface of the charged body. Thus, it is possible to remove the entire surface of the charged body uniformly and effectively.

  The present invention will be described below based on the illustrated embodiments.

(Embodiment 1)
FIG. 1 is a schematic configuration diagram showing a static elimination transfer device 1 according to this embodiment. The static elimination transport apparatus 1 is an apparatus that transfers (conveys) a glass substrate (charged body) M, which is a flat panel display substrate manufactured by the manufacturing facility 100, to the cassette 150 side while discharging, and stores it in the cassette 150. It mainly includes a transfer robot 2 and a soft X-ray irradiator (static eliminator) 3. Here, the same components as those described in FIGS. 10 and 11 will be described with the same reference numerals. In addition, the transfer chamber 110 is provided in a temperature-controlled clean room, and clean air from the fan filter unit 120 is supplied in a vertical flow and circulated through a return chamber or return duct (not shown). Yes.

  The transfer robot 2 is a robot that holds and transfers a charged glass substrate M, and is installed between the outlet side of the manufacturing equipment 100 in the transfer chamber 110 and the cassette 150. In this embodiment, the floor surface Grounded and fixed to. The transfer robot 2 includes a base 21 positioned at the lowest position, a first link 22 positioned higher than the base 21, a second link 23 positioned higher than the first link 22, and a highest position. And two arms (holding portions) 24 for performing the above operation. The first link 22 can freely rotate (rotate about the vertical axis) and swing (swing about the horizontal axis) relative to the base portion 21, and the second link 23 can be the first link. 22 can be swung freely. As shown in FIGS. 2 and 3, the two arms 24 are arranged in parallel in a flat bar shape, and are swingable with respect to the second link 23, that is, surfaces formed by the two arms 24, that is, two The plane including the arm 24 is controlled so as to be always positioned horizontally. As a result, the glass substrate M lifted up on the outlet side of the manufacturing facility 100 is held by the arm 24, and can be transferred to the cassette 150 side with the plate surface of the glass substrate M kept horizontal and stored in the cassette 150. It is like that.

  The arm 24 is provided with a conductive wire mesh plate (conductive member) 4. The wire mesh plate 4 is a wire mesh-like flat plate and is disposed so as to penetrate the two arms 24 in parallel with the surface formed by the two arms 24. In addition, the size (area) of the metal mesh plate 4 is set to the same size as the glass substrate M, and faces the entire plate surface of the opposing glass substrate M in a state where the glass substrate M is held by the arm 24. It is arranged like this. Further, on the upper surface side of each arm 24, two support protrusions 24 a protruding upward are formed along the longitudinal direction, and the glass substrate M and the metal mesh plate 4 are held with the glass substrate M held (mounted). The height of the support convex portion 24a is set so that the distance (gap) H is 3 cm. Thereby, in the state which hold | maintained the glass substrate M, the metal-mesh board 4 opposes the whole plate surface of the glass substrate M, and the space | interval becomes uniform in the whole surface. That is, the metal mesh plate 4 is evenly opposed on the entire surface of the glass substrate M.

  Here, the distance H between the glass substrate M and the metal mesh plate 4 is set to 3 cm, which takes into account the charge removal effect and the storage property of the glass substrate M. That is, it is a distance allowed as a storage interval of the glass substrate M in the cassette 150 and is a distance in which air ions by the soft X-ray irradiator 3 described later are formed in the entire gap between the glass substrate M and the metal mesh plate 4. 1 to 4 cm is considered appropriate, and is set to 3 cm in this embodiment. As described above, in this embodiment, the distance H is set to 3 cm, but it has been confirmed that when the distance H is set to 1 to 20 cm, a good static elimination effect can be obtained. In this range, the glass substrate M The distance H may be set in consideration of the size and the storage interval.

  Further, the potential of the metal mesh plate 4 is set (controlled) to the ground potential. That is, the wire mesh plate 4 is grounded via the transfer robot 2. As described above, in this embodiment, the potential of the metal mesh plate 4 is set to the ground potential. However, the potential may be controlled to a potential other than the ground potential, for example, approximately equal to the potential of the glass substrate M. That is, as will be described later, it is only necessary that the potential of the metal mesh plate 4 is controlled so that a strong and stable electric field is formed around the glass substrate M.

  The soft X-ray irradiator 3 is a static eliminator that neutralizes static electricity charged on the glass substrate M with air ions and eliminates static electricity. That is, in this embodiment, air ions are generated by ionizing molecules in the air by irradiating the air with a soft X-ray having a wavelength of 0.5 to 2 mm. Then, air ions having a polarity opposite to the polarity of the static electricity charged on the glass substrate M are combined with the static electricity to neutralize and neutralize the static electricity. The soft X-ray irradiator 3 is disposed at the upper end portion of the second link 23 of the transfer robot 2 and follows the arm 24 of the transfer robot 2. That is, with the movement of the arm 24 due to the rotation and swing of the links 22 and 23, the soft X-ray irradiator 3 also moves according to the links 22 and 23, and the relative positional relationship between the arm 24 and the soft X-ray irradiator 3 is reached. Is always constant.

  Further, the soft X-ray irradiator 3 is disposed so that the soft X-rays are irradiated around the entire upper and lower surfaces of the glass substrate M held by the arm 24. That is, the soft X-ray irradiator 3 is arranged so that air ions are formed (positioned) between the upper surface side of the glass substrate M and between the glass substrate M and the metal mesh plate 4. By providing the soft X-ray irradiator 3 in this way, air ions are always good and stable around the upper and lower surfaces of the glass substrate M during the movement of the arm 24, that is, during the conveyance of the glass substrate M. It is supposed to be formed. Here, it is desirable to dispose the soft X-ray irradiator 3 so that the irradiation central axis of the soft X-ray irradiator 3 is located between the lower surface of the glass substrate M and the wire mesh plate 4. This is because air ions can be formed more evenly over the entire space between the glass substrate M and the metal mesh plate 4 having the highest static elimination effect.

  Next, the operation of the static elimination transport apparatus 1 having such a configuration and the static elimination method during transport by the static elimination transport apparatus 1 will be described. Here, when the soft X-ray irradiator 3 is operated before the glass substrate M is held and the soft X-ray is continuously irradiated (case 1), immediately after the glass substrate M is held, the soft X-ray irradiator 3 is used. And the case of continuing to irradiate with soft X-rays (Case 2) will be described. Further, the glass substrate M is processed in a manufacturing process (previous process) in the manufacturing facility 100, transported to the outlet side of the manufacturing facility 100 by the transport roller 101, and lifted up by the lift pins 102.

  In case 1, first, the glass substrate M that has been lifted up is held by the arm 24 of the transfer robot 2 while the soft X-ray irradiator 3 is operating. Next, the links 22 and 23 are driven to transfer the glass substrate M to the cassette 150 side while maintaining the plate surface of the glass substrate M horizontal. Subsequently, the glass substrate M is accommodated in the cassette 150, and the arm 24 is detached from the glass substrate M. On the other hand, during this transfer, static electricity charged on the glass substrate M is neutralized by the air ions formed by the soft X-ray irradiator 3, and the charge is eliminated.

  In case 2, first, the glass substrate M that has been lifted up is held by the arm 24 of the transfer robot 2, and immediately thereafter, the soft X-ray irradiator 3 is operated. Thereafter, like the case 1, the glass substrate M is transferred to the cassette 150 side and stored in the cassette 150. Then, after the soft X-ray irradiator 3 is operated, the glass substrate M is neutralized by the soft X-ray irradiator 3.

  As described above, according to the static elimination transport apparatus 1 and the static elimination method, in a state where the glass substrate M is held by the arm 24, the metal mesh plate 4 set to the ground potential and the glass substrate M face each other, and air is interposed therebetween. Ions are formed. For this reason, a strong and stable electric field is formed between the glass substrate M and the metal mesh plate 4 (around the glass substrate M), and neutralization by air ions is effectively and stably performed under such a good electric field. Done. In addition, since the metal mesh plate 4 is evenly opposed across the entire surface of the glass substrate M, a uniform and stable electric field is formed around the entire surface of the glass substrate M, and the entire surface of the glass substrate M is uniformly and effectively neutralized. Is possible.

  Further, as described above, since air ions are always formed well and stably around the upper and lower surfaces of the glass substrate M during the conveyance of the glass substrate M, the glass substrate M can always be effectively neutralized. It becomes. In addition, by performing static elimination during conveyance as described above, it is possible to perform conveyance and static elimination efficiently in time by performing conveyance and static elimination at the same time. As a result, the glass substrate M that has undergone the manufacturing process can be effectively and efficiently discharged and transported.

  FIG. 4 shows an example of a change in the potential of the glass substrate M when the charge is removed by the charge removal transport device 1. In the figure, the curve L3 shows the case 1 and the curve L4 shows the case 2. A curve L2 indicates a case where static elimination is not performed. Further, symbol P1 indicates a time point immediately before the glass substrate M is lifted up, symbol P2 indicates a point in time when the glass substrate M is lifted up, symbol P3 indicates that the glass substrate M is being transported, and symbol P4 indicates that the glass substrate M is stored in the cassette 150. The time when the arm 24 is detached from the glass substrate M is shown.

  As shown in this figure, in both cases 1 and 2, it can be seen that the glass substrate M has been discharged more effectively than the conventional charge removal method (curve L1 in FIG. 12). That is, in case 1 (curve L3), the maximum potential of the glass substrate M is about 0.2 to 0.3 kV, and the charge is completely removed in about 2 seconds from the holding. In the case 2 (curve L4), the maximum potential of the glass substrate M is about 1 kV, and the charge is completely removed in about 3 seconds from the holding. Further, at P4 when the arm 24 is detached from the glass substrate M, a new charge is generated between the arm 24 and the contact portion (hand pad) of the glass substrate M. In the conventional static elimination method, this charge is eliminated. I couldn't. On the other hand, in both cases 1 and 2, it was confirmed that such charge was completely discharged.

(Embodiment 2)
FIG. 5 is a schematic configuration diagram showing the static elimination transport apparatus 11 according to this embodiment. In this embodiment, the arrangement position of the soft X-ray irradiator 3 is different from that of the first embodiment, and the same components as those of the first embodiment are described with the same reference numerals.

  The soft X-ray irradiator 3 is installed and fixed between the exit side of the manufacturing facility 100 and the transfer robot 2. That is, a vertically extending installation pole 5 is installed between the exit side of the manufacturing facility 100 and the transfer robot 2, and the soft X-ray irradiator 3 is arranged at the upper end of the installation pole 5 so that the irradiation port faces upward. Is attached. Further, in a state where the glass substrate M is carried (transferred) into the transfer chamber 110 by the arm 24 of the transfer robot 2, as shown in FIG. The installation height and position of the soft X-ray irradiator 3 are set so that the entire periphery of the metal mesh plate 4 is irradiated. By installing the soft X-ray irradiator 3 as described above, soft X-rays are irradiated perpendicularly to the plate surface of the glass substrate M from below, and the glass substrate M, the metal mesh plate 4, and the like through the mesh of the metal mesh plate 4. During this period, soft X-rays are irradiated to form air ions.

  Next, the operation of the static elimination transport apparatus 11 having such a configuration and the static elimination method during transport by the static elimination transport apparatus 11 will be described. First, in a state where the soft X-ray irradiator 3 is operating, the glass substrate M is held by the arm 24 of the transfer robot 2, and the glass substrate M is transferred to a position directly above the soft X-ray irradiator 3. The glass substrate M is neutralized by maintaining this position for a certain period of time, and then the glass substrate M is transferred to the cassette 150 side and stored in the cassette 150.

  According to this static elimination conveyance apparatus 11 and the static elimination method, in the state which hold | maintained the glass substrate M with the arm 24, since the metal-mesh board 4 and the glass substrate M have opposed, the glass substrate M similarly to Embodiment 1. FIG. It becomes possible to discharge the entire surface uniformly and effectively. Moreover, since soft X-rays are irradiated perpendicularly to the plate surface of the glass substrate M (metal mesh plate 4), soft X-rays are irradiated more uniformly around the entire surface of the glass substrate M, and air ions are more evenly distributed. It is formed. As a result, even when the plate area of the glass substrate M is large, it is possible to remove charges uniformly and effectively over the entire surface.

  FIG. 7 shows an example of a change curve L5 of the potential of the glass substrate M when the charge is removed by the charge removal transport device 11. As shown in FIG. As shown in this figure, since the static elimination is not performed until the glass substrate M is located immediately above the soft X-ray irradiator 3, the potential of the glass substrate M is high, but the position is directly above the soft X-ray irradiator 3. Immediately after this, the potential drops sharply, and it is recognized that the charge is removed in a short time.

  Although the embodiment of the present invention has been described above, the specific configuration is not limited to the above embodiment, and even if there is a design change or the like without departing from the gist of the present invention, Included in the invention. For example, in Embodiment 1, air ions are formed by irradiating soft X-rays between the upper surface side of the glass substrate M and between the glass substrate M and the metal mesh plate 4, but air ions formed in other spaces are used. May be supplied between the upper surface side of the glass substrate M and between the glass substrate M and the wire mesh plate 4. Furthermore, in the above embodiment, the soft X-ray irradiator 3 is used as a static eliminator, but other static eliminators such as a corona discharge ionizer may be used.

  Further, the arm 24 of the transfer robot 2 may be slidable. That is, as shown in FIGS. 8 and 9, the arm 24 includes a first arm 241 and a second arm 242, the first arm 241 is disposed on the second link 23, and the second arm 242 is slidably disposed with respect to the first arm 241. Further, the metal mesh plate 4 is disposed on the first arm 241. The second arm 242 is placed on the first arm 241 while the glass substrate M is held and transferred to the cassette 150 side. On the other hand, when the glass substrate M is stored in the cassette 150, the second arm 242 is slid forward, and only the second arm 242 and the glass substrate M are positioned in the cassette 150. As a result, even if the distance H between the glass substrate M and the metal mesh plate 4 is secured wide so that soft X-rays are irradiated more evenly around the entire surface of the glass substrate M, the first arm 241 remains in the cassette 150. Therefore, the storage interval of the glass substrates M can be kept within an allowable range. That is, it is possible to narrow the storage interval of the glass substrates M while ensuring a high charge removal effect.

  Further, the glass substrate M is held by placing the glass substrate M on the arm 24 of the transfer robot 2, but the glass substrate M is held by suction or the like so that the glass substrate M is positioned below the arm 24. It may be. At this time, in the second embodiment, the soft X-ray irradiator 3 may be installed above the arm 24 so that the soft X-rays are directed toward the glass substrate M according to the airflow generated by the fan filter unit 120. Of course, the transfer robot 2 may be capable of traveling, and can be applied to charge removal and transfer of electronic devices (charged bodies) other than the glass substrate M, such as a semiconductor substrate. Further, the conductive member is not limited to the metal mesh plate 4, but is constituted by a rod, a plate in which a plurality of punch holes are formed, or a flat plate according to the shape of the charged body or the type of static eliminator. It may be a deformed plate having a shape or irregularity. In the case where the lift pins 102 and the metal mesh plate 4 interfere with each other, the edge of the glass substrate M may be held on the manufacturing equipment 100 side, and the metal mesh plate 4 may be divided so as not to interfere.

  As described above, the static eliminating / conveying device and the neutralizing method during conveyance according to the present invention are extremely useful as an apparatus and method that can effectively neutralize and convey a charged body.

It is a schematic block diagram which shows the static elimination conveying apparatus which concerns on Embodiment 1 of this invention. FIG. 2 is an enlarged plan view showing the periphery of an arm of a transfer robot of the static elimination transfer apparatus of FIG. 1. It is YY sectional drawing of FIG. It is the figure showing an example of the change of the electric potential of the glass substrate at the time of static elimination with the static elimination conveyance apparatus of FIG. It is a schematic block diagram which shows the static elimination conveying apparatus which concerns on Embodiment 2 of this invention. It is the schematic plan view seen from the ZZ direction of FIG. It is the figure showing an example of the change of the electric potential of the glass substrate at the time of static elimination with the static elimination conveyance apparatus of FIG. It is a figure which shows the modification of the arm of the conveyance robot in embodiment of this invention. It is a figure which shows the state which the 2nd arm of the arm of FIG. 8 slid ahead. It is a schematic block diagram which shows the static elimination method at the time of the conventional conveyance. It is the schematic plan view seen from the XX direction of FIG. It is the figure showing an example of the change of the electric potential of the glass substrate at the time of static elimination with the static elimination method of FIG.

1, 11 Static elimination transfer device 2 Transfer robot 24 Arm (holding part)
3 Soft X-ray irradiator (static eliminator)
4 Wire mesh plate (conductive member)
5 Installation pole 100 Manufacturing equipment 110 Transfer chamber 120 Fan filter unit 150 Cassette M Glass substrate (charged body)

Claims (4)

Installed in a clean room where clean air is supplied in a vertical flow from the top to the bottom, and the charged charged body is transported in a state where it is maintained horizontally by two arms arranged in parallel at intervals in the horizontal direction. A transfer robot
A soft X-ray irradiator that is disposed in the transfer robot so that the relative positional relationship with the arm is always constant, and neutralizes the electricity charged in the charged body with air ions to eliminate static electricity;
In a state where the charging member is placed on the support convex portion of the arm, the charging member is located below the charging member and is disposed on the arm so as to face the charging member in a vertical direction with a predetermined distance therebetween. A conductive member controlled to a predetermined potential;
With
A static elimination transport apparatus, wherein an irradiation central axis of the soft X-ray irradiator is positioned between a lower surface of the charged body and the conductive member.   The static elimination conveyance apparatus according to claim 1, wherein a potential of the conductive member is set to a ground potential.   2. The charge eliminating and conveying apparatus according to claim 1, wherein the conductive member is formed and disposed so as to be evenly opposed to the entire surface of the opposite charged body. Transporting a charged charged body in a clean room where clean air is supplied in a vertical flow from the top to the bottom in a state where it is maintained horizontally by two arms arranged in parallel at intervals in the horizontal direction. established a robot, charged electricity disposed in the transfer robot such that the arm and the relative positional relationship between the soft X-ray irradiator for discharge neutralized by air ions is always constant to the charging member, wherein With the charged body placed on the support convex part of the arm, a conductive member positioned below the charged body and controlled to a predetermined potential is opposed to the charged body in a vertical direction at a predetermined distance. A neutralizing method during transport, wherein the soft X-ray irradiator is irradiated with soft X-rays with an irradiation center axis of the soft X-ray irradiator positioned between the lower surface of the charged body and the conductive member.

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