JP4456962B2 - SAMPLE DISPLAY DEVICE, SAMPLE DISPLAY DEVICE OPERATION METHOD, SAMPLE DISPLAY DEVICE OPERATION PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM OR RECORDED DEVICE - Google Patents

Description

  The present invention relates to a charged particle beam device such as a laser scanning microscope or a length measuring SEM, or a sample display device such as a scanning tunneling microscope (STM) or an atomic force microscope (AFM), and more particularly to a sample display including an observation optical system. Relates to the device.

  As a charged particle beam apparatus that obtains an observation image by detecting a signal obtained by irradiating a sample to be observed with a charged particle beam, for example, there are a transmission electron microscope and a scanning electron microscope using an electron beam. For example, an electron microscope freely refracts the traveling direction of electrons, and an imaging system such as an optical microscope is designed electro-optically. Electron microscopes include a transmission type that forms an image of electrons that have passed through a sample or specimen using an electron lens, a reflection type that forms an image of electrons reflected on the sample surface, and scans the sample surface with a focused electron beam. There are a scanning electron microscope that forms an image using secondary electrons from each scanning point, a surface emission type (field ion microscope) that forms an image of electrons emitted from a sample by heating or ion irradiation (for example, Patent Document 1). ).

  As an example of an electron microscope (EM), a scanning electron microscope (SEM) scans secondary electrons and reflected electrons generated when a sample to be observed is irradiated with a thin electron beam (electron probe). This is an apparatus for taking out mainly using a detector such as a secondary electron detector or a backscattered electron detector and displaying it on a display screen such as a cathode ray tube or an LCD to mainly observe the surface form of the sample. On the other hand, a transmission electron microscope (TEM) transmits an electron beam through a thin film sample, and at that time, electrons scattered and diffracted by atoms in the sample are obtained as an electron diffraction pattern or a transmission electron microscope image. Can mainly observe the internal structure of the substance.

  When an electron beam is irradiated onto a solid sample, it is transmitted through the solid by the energy of the electrons. At that time, due to the interaction with the nuclei and electrons that make up the sample, elastic collision, elastic scattering, and energy loss occur. Causes elastic scattering. By inelastic scattering, electrons in the shell of the sample element are excited, X-rays are excited, secondary electrons are emitted, and the corresponding energy is lost. The amount of secondary electrons emitted varies depending on the angle of collision. On the other hand, the reflected electrons scattered back by elastic scattering and emitted again from the sample are emitted in an amount specific to the atomic number. The SEM uses these secondary electrons and reflected electrons. The SEM irradiates a sample with electrons and detects emitted secondary electrons and reflected electrons to form an observation image.

  In addition, a fine surface shape measuring apparatus such as a scanning probe microscope (SPM) such as a scanning tunnel microscope (STM) or an atomic force microscope (AFM) is supported by a probe approaching or contacting a sample surface. The fine shape of the sample surface is observed from the displacement of the probe to be scanned while keeping the current, atomic force, etc. constant or the surface of the sample to be inspected. At this time, some have an observation optical system for knowing the position of the probe with respect to the sample. As an example, there is a type in which the probe and the objective lens of the observation optical system are switched and used. In this apparatus, an index (reticle) indicating the position of the probe is provided in the visual field of the observation optical system, so that the observation position of the probe can be optically observed.

Image data such as an electron microscope image and an atomic force microscope image obtained by a sample display device such as an electron microscope or an atomic force microscope can be used for other magnified observations using visible light such as an optical microscope or a digital microscope. Unlike the apparatus, it is displayed as an image expressed in monochrome gradation without color information. Since only images without color information have poor discriminability between images, methods such as adding character information for image discrimination and assigning colors according to the creation date, image name, and creator of the image have been developed. (For example, Patent Document 1).
JP-A-7-302572

  On the other hand, by providing color information in the image itself, the material can be inferred, and there is an advantage that it is excellent in visibility and useful for sensory understanding. As a method of giving color information to a microscope image such as an electron microscope image or an atomic force microscope image that does not have such color information, an optical camera capable of imaging in color when observing with an electron microscope or the like. A method of capturing a visible light image using the above and superimposing the visible light image on a microscope image is conceivable. However, in this method, it is necessary to capture both images at the same magnification, but the optical camera has a problem that it is difficult to overlap at a high magnification because the magnification that can be magnified is lower than that of an electron microscope and the resolution is lower. . In addition, since the aberrations of the two are different, the distortion of the image is different between the visible light image and the microscope image, and it is difficult to overlap them so as to match. In addition, the difference in depth of field also becomes a problem, and when observing at a high magnification with a visible light image, the depth of field becomes shallow, and the focus is only in a narrow range in the height direction, and color information is obtained. Becomes difficult. For these reasons, it has been difficult to realize a method for overlaying a visible light image and a microscope image.

  On the other hand, a method of directly coloring the microscopic image is also conceivable. For example, a method of coloring a microscope image by selecting a color from a color palette composed of specified colors can be considered. However, this method has a problem that it is difficult to select a subtle color that matches the color of the actual sample sample. When similar colors do not exist, it is troublesome because the user needs to synthesize the colors.

  The present invention has been made to solve such problems. The main object of the present invention is to provide a sample display device capable of easily coloring a microscopic image, a method for operating the sample display device, a sample display device operation program, and a computer-readable recording medium or recorded device. There is.

To achieve the above object, a sample display device of the present invention, an electron beam imaging unit for imaging the electron beam observation chestnut observation target, an image of imaging an electron beam observation setter in electron beam imaging unit a viewing condition setting unit for setting the observation conditions, and a display unit for displaying the electron beam observation chestnut imaged by electron beam imaging unit, for capturing a visible light image having color information for the same observation target The visible light imaging unit , a color selection unit for selecting a desired color to be colored on the electron beam observation basket from the visible light image, and a color that is selected by the color selection unit to color the electron beam observation basket The color selection unit includes a pointer that can be designated on the display unit, and a color display area for displaying the color of the part designated by the pointer, and coloring in the visible light image with the pointer By specifying the part of the color you want to be included in the specified part There is configured to be displayed on the color display region, a region that is displayed on the color display region for coloring the selected color in the color selection section, that is specifiable configured on the electron beam observation image. With this configuration, a desired color can be selected from the color image of the sample, and the electron beam observation basket can be colored with the selected color, so that an electron beam observation basket with color information can be easily obtained. In addition, by specifying a desired color part in the visible light image with a pointer such as a mouse pointer or an icon, it is possible to easily specify coloring, and further, the selected color can be confirmed in the color display area. Coloring work that is extremely easy to use can be realized.

Furthermore, in another sample display device of the present invention, the display unit is configured to display the electron beam observation rod and the visible light image on the same screen. According to this configuration, the electron beam observation basket and the visible light image are displayed side by side, and coloring work can be performed on the electron beam observation basket while referring to the color information in the visible light image. Furthermore, another sample display device of the present invention further includes a detachable stage for placing an observation object, and the visible light imaging unit is configured to be detachable with the stage pulled out. . Furthermore, the other sample display device of the present invention further includes a mechanism that holds the sample at a fixed magnification and a fixed focus distance that are lower than those of the electron microscope imaging unit.

Furthermore, another sample display device of the present invention is a visible light imaging unit for the visible light imaging unit to capture a visible light image having color information about an observation target. With this configuration, the sample display device can acquire a visible light image and an electron beam observation rod for the same observation target, and can also color the electron beam observation rod .

Furthermore, another sample display device of the present invention is configured such that a region for coloring the color selected by the color selection unit can be designated on the electron beam observation screen. With this configuration, a desired color can be colored in a desired region of the electron beam observation basket , and for example, highly flexible coloring such as coloring each part with a plurality of colors can be performed.

Furthermore, another sample display device of the present invention includes a stage for placing an observation object, an electron gun for irradiating the observation object on the stage with an electron beam, and a second light emitted from the observation object. One or more detectors for detecting secondary electrons or reflected electrons, an electron beam imaging unit for forming an electron beam observation image based on information detected by the detector, and an electron beam imaging unit A display unit for displaying the observed electron beam image, applying an acceleration voltage to the electron gun based on predetermined image observation conditions, irradiating the observation object with the electron beam, and emitting from the observation object A sample display device capable of forming an electron beam observation image and displaying it on a display unit by scanning a desired region on the surface of the observation target while detecting secondary electrons or reflected electrons with a detector. Taking the visible light image having color information about the observation object And the visible light imaging section for, from the visible light image, and a color selection unit for selecting a desired color to be colored electron beam observation image, the color selected by the color selector, colored electron beam observation image A color selection unit, the color selection unit includes a pointer that can be designated on the display unit, and a color display area for displaying the color of the part designated by the pointer, and the visible light image is displayed with the pointer. By specifying the part of the color you want to color, the color included in the specified part is displayed in the color display area, and the color displayed in the color display area and selected by the color selection unit the area to be colored, that is specifiable configured on the electron beam observation image. With this configuration, a desired color can be selected from the color image of the sample, and the electron beam observation image can be colored to the selected color, so that an electron beam observation image having color information can be easily obtained.

In addition, the method for operating the sample display device of the present invention includes a step of capturing an electron beam observation rod having light and shade information of an observation object, obtaining a visible light image having color information for the same observation object, and a visible light image In order to select a desired color to be colored on the electron beam observation rod , the position of the color to be colored in the visible light image can be designated with a pointer that can be designated on the display unit that displays the captured visible light image. The color contained in the designated part is displayed in the color display area for displaying the color of the part designated by the pointer, and the color selected on the visible light image is changed to the electron beam observation screen. And coloring the designated area . With this configuration, a desired color can be selected from the color image of the sample, and the electron beam observation basket can be colored with the selected color, so that an electron beam observation basket with color information can be easily obtained.

Further, the operation program for the sample display device of the present invention captures an electron beam observation rod having the density information of the observation object, and also obtains an image acquisition function for imaging a visible light image having color information for the same observation object, and a visible image. from light image, a color selection function to select a desired color for coloring the electron beam observation chestnut, the color selected on the visible light image, thereby realizing a coloring function of coloring an electron beam observation chestnut on a computer, the color The selection function includes a pointer that can be designated on the display unit for displaying an electron beam observation image captured by the electron beam imaging unit, and a color display region for displaying the color of the part designated by the pointer. By specifying the color part you want to color in the visible light image with the pointer, the color included in the specified part is displayed in the color display area, and the color displayed in the color display area is displayed. Select with selection function An area to color the color that is, that is specifiable configured on the electron beam observation image. With this configuration, a desired color can be selected from the color image of the sample, and the electron beam observation basket can be colored with the selected color, so that an electron beam observation basket with color information can be easily obtained.

  The computer-readable recording medium or the recorded device of the present invention stores the above program. Recording media include CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray, HD A medium that can store a program such as a magnetic disk such as a DVD (AOD), an optical disk, a magneto-optical disk, a semiconductor memory, or the like is included. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recorded devices include general-purpose or dedicated devices in which the program is implemented in a state where it can be executed in the form of software, firmware, or the like. Furthermore, each process and function included in the program may be executed by computer-executable program software, or each part of the process or hardware may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

  According to the sample display device, the operation method of the sample display device, the sample display device operation program, and the computer-readable recording medium or the recorded device of the present invention, it is possible to color a microscope image very easily. This is because the present invention is configured to select a desired color from a visible light image obtained by imaging the same sample and to color the microscope image. According to this method, for example, it is not necessary to perform complicated alignment work such as a method of superimposing a camera image on a SEM image to copy color information, and it is not necessary to synthesize colors by itself. It is easy and easy to color microscopic images so that they can be easily recognized and grasped visually.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below includes a sample display device, a sample display device operation method, a sample display device operation program, and a computer-readable recording medium or recorded device for embodying the technical idea of the present invention. The present invention does not specify a sample display device, a method for operating the sample display device, a sample display device operation program, and a computer-readable recording medium or recorded device as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, but are merely described. It's just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  In this specification, the sample display device is connected to a computer, a printer, an external storage device or other peripheral devices for operation, control, input / output, display, and other processing connected thereto, for example, IEEE1394, RS- 232x, RS-422, RS-423, RS-485, serial connection such as USB, parallel connection, or electrically connected via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T . The connection is not limited to a physical connection using a wire, but may be a wireless connection using a wireless LAN such as IEEE 802.1x or OFDM, radio waves such as Bluetooth, infrared rays, optical communication, or the like. Further, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for storing observation image data or setting data.

  In the following examples, SEM will be described. However, the sample display device of the present invention can also be used in TEM and other charged particle beam devices. Moreover, you may utilize for the composite type | mold microscope provided with the function of two or more microscopes among an optical microscope, a laser microscope, an atomic force microscope, an electrostatic force microscope, a near field microscope, etc. An SEM according to an embodiment embodying the present invention will be described with reference to FIG. In general, an SEM generates an electron beam of accelerated electrons to reach a sample, a sample chamber (chamber) in which the sample is placed, an exhaust system for evacuating the sample chamber, and an operation for image observation Consists of systems. The electron microscope 100 in FIG. 1 shows a configuration of an electron beam imaging unit 42A as a microscope image imaging unit 42 for observing a microscope image with a charged particle beam using such a member. Further, the operation program for the electron microscope installed in the computer 1 in FIG. 1 is used to set the image observation conditions and various operations of the electron microscope and display them on the display unit 28 that displays the observation image.

  The optical system includes an electron gun 7 that generates an electron beam of accelerating electrons, a lens system that narrows and narrows the bundle of accelerated electrons, and a detector that detects secondary electrons and reflected electrons generated from the sample. A scanning electron microscope 100 shown in FIG. 1 includes an electron gun 7 that irradiates an electron beam as an optical system, and a gun alignment coil 9 that corrects the electron beam irradiated from the electron gun 7 so as to pass through the center of the lens system. A condenser lens that is a converging lens 12 for narrowing down the size of an electron beam spot, an electron beam deflection scanning coil 18 that scans the electron beam converged by the converging lens 12 on the sample 20, and a sample 20 that accompanies scanning. A secondary electron detector 21 for detecting emitted secondary electrons and a reflected electron detector 22 for detecting reflected electrons are provided.

  The sample chamber 31 includes a sample stage 33, a sample introduction device, an X-ray detection spectrometer, and the like. The sample stage 33 (stage) has X, Y, Z movement, rotation, and tilt functions. The exhaust system is necessary for the electron beam of accelerating electrons to reach the sample without losing energy as much as possible while passing through the gas component, and a rotary pump and an oil diffusion pump are mainly used.

  The operation system displays and observes secondary electron images, backscattered electron images, X-ray images, etc., and performs adjustment of irradiation current, focusing, and the like. If the output of the secondary electron image, etc., is an analog signal, film shooting with a photographic machine was common, but in recent years it has become possible to output an image converted into a digital signal, such as data storage, image processing, printing, etc. A wide variety of processes are possible. The SEM of FIG. 1 includes a display unit 28 that displays an observation image such as a secondary electron image and a reflected electron image, and a printer 29 for printing. Further, the operation system includes guidance means for guiding (guidance) a setting item setting procedure necessary for setting at least an acceleration voltage or a spot size (diameter of incident electron beam bundle) as an image observation condition.

  The SEM shown in FIG. 1 is connected to a computer 1, uses the computer 1 as a console for operating the electron microscope 100, stores image observation conditions and image data, and performs image processing and computation as necessary. . A central processing unit 2 composed of a CPU, LSI, or the like shown in FIG. 1 controls each block constituting the scanning electron microscope 100. By controlling the electron gun high-voltage power supply 3, an electron beam is generated from an electron gun 7 including a filament 4, a Wehnelt 5, and an anode 6. The electron beam 8 generated from the electron gun 7 does not necessarily pass through the center of the lens system, but passes through the center of the lens system by controlling the gun alignment coil 9 by the gun alignment coil control unit 10. Make corrections. Next, the electron beam 8 is narrowed down by a condenser coil which is a converging lens 12 controlled by a converging lens control unit 11. The converged electron beam 8 passes through an astigmatism correction coil 17 that deflects the electron beam 8, an electron beam deflection scanning coil 18, an objective lens 19, and an objective lens aperture 13 that determines the beam opening angle of the electron beam 8. To the sample 20. The astigmatism correction coil 17 is controlled by the astigmatism correction coil controller 14 to control the scanning speed and the like. Similarly, the electron beam deflection scanning coil 18 is controlled by the electron beam deflection scanning coil control unit 15 and the objective lens 19 is controlled by the objective lens control unit 16, respectively. When the electron beam 8 scans the sample 20, information signals such as secondary electrons and reflected electrons are generated from the sample 20, and these information signals are detected by the secondary electron detector 21 and the reflected electron detector 22, respectively. The The detected secondary electron information signal passes through the secondary electron detection amplification unit 23, and the reflected electron information signal is detected by the reflected electron detector 22 and then passes through the reflected electron detection amplification unit 24, and A / D converted. A / D conversion is performed by the devices 25 and 26 and is sent to the image data generation unit 27 to be configured as image data. This image data is sent to the computer 1, displayed on a display unit 28 such as a monitor connected to the computer 1, and printed by a printer 29 as necessary. The exhaust system pump 30 evacuates the sample chamber 31. An exhaust control unit 32 connected to the exhaust system pump 30 adjusts the degree of vacuum, and controls from high vacuum to low vacuum according to the sample 20 and observation purpose.

The electron gun 7 is a source that generates accelerated electrons having a certain energy. The tip of a W-shaped tip is formed in addition to a thermal electron gun that emits electrons by heating a W (tungsten) filament or a LaB6 filament. There is a field emission electron gun that emits electrons by applying a strong electric field to the device. The lens system is equipped with a converging lens, an objective lens, an objective lens aperture, an electron beam deflection scanning coil, an astigmatism correction coil, and the like. The converging lens further converges and narrows the electron beam generated by the electron gun. The objective lens is a lens for finally focusing the electron probe on the sample. The objective lens stop is used to reduce aberrations. The detector includes a secondary electron detector that detects secondary electrons and a reflected electron detector that detects reflected electrons. Since secondary electrons have low energy, they are captured by the collector, converted into photoelectrons by a scintillator, and signal amplified by a photomultiplier tube. On the other hand, a scintillator or a semiconductor type is used for detection of reflected electrons.
(Sample stage 33)

  The observation position is positioned by physically moving the sample stage 33 on which the sample 20 is placed. In this case, the observation positioning means is constituted by the sample stage 33. The sample stage 33 can be moved and adjusted in various directions so that the observation position of the sample 20 can be adjusted. The movement and adjustment directions are such that the observation position of the sample stage 33 is moved and adjusted, so that movement and fine adjustment in the X-axis and Y-axis directions and the R-axis (rotation) direction, which are the plane directions of the sample stage 33, are possible. In addition, the T-axis direction of the sample stage 33 can be adjusted to adjust the tilt angle of the sample, and the Z-axis direction of the sample stage 33 can be adjusted to adjust the distance (working distance) between the objective lens and the sample. It is.

The positioning of the observation image and the movement of the observation visual field are not limited to the method of physically moving the sample stage, and for example, a method of shifting the scanning position of the electron beam irradiated from the electron gun (image shift) can also be used. Or the method of using both together can also be utilized. Alternatively, a method of once capturing image data over a wide range and processing the data in software can be used. In this method, since the data is once captured and processed in the data, the observation position can be moved by software, and there is an advantage that does not involve hardware movement such as movement of the sample stage or scanning of the electron beam. There is. As a method of capturing large image data in advance, for example, there is a method of acquiring a plurality of image data at various positions and acquiring image data of a wide area by connecting these image data. Alternatively, the acquisition area can be increased by acquiring image data at a low magnification.
(Sample display device operation program)

  Next, the procedure for operating the electron beam imaging unit 42A to capture an electron beam image will be described based on the user interface screen of the operation program of the sample display device (here, electron microscope) in FIG. The sample display device operation program is installed in the computer 1 and can be executed in FIG. The computer 1 in which the sample display device operation program is installed performs data transmission / reception and communication with devices such as the electron microscope 100, and acquires and sets necessary information. Communication is performed by serial communication via an RS-232C cable or a USB cable, for example. However, the present invention is not limited to this mode, and a mode in which a sample display device operation program is incorporated in the sample display device itself such as an electron microscope can be appropriately adopted. The sample display device operation program performs processing such as imaging of an electron beam observation image, generation of a three-dimensional image based on a plurality of parallax images, display, operation, measurement, and the like on the generated three-dimensional image. This is also a program for performing the operations for observing an image with an electron microscope with one program and reconstructing a three-dimensional image based on the obtained electron beam observation image. The program can be easily operated by the user in a different environment. However, each function can be realized by a separate program. In this case, each program can be called from a dedicated menu screen or the program can be linked to a button indicating each function. Thus, it is possible to make the environment easy for the user to operate.

  In the example of the user interface screen of the sample display device operation program shown in FIG. 2 and the like, it goes without saying that the layout, shape, display method, size, color scheme, pattern, etc. of each input column and each button can be changed as appropriate. . By changing the design, the layout can be made easier to display, easier to evaluate and judge, and easy to operate. For example, the detailed setting screen can be displayed as a separate window, or a plurality of screens can be displayed within the same display screen. In addition, on the user interface screens of these programs, ON / OFF operations for numerically provided buttons and input fields, designation of numerical values and command inputs, etc. are specified by input connected to a computer incorporating a sample display device operation program. In the department. In this specification, “pressing” includes not only physically touching and operating buttons, but also clicking or selecting with an input unit and pseudo-pressing. The input / output device is connected to the computer by wire or wirelessly, or is fixed to the computer or the like. Examples of general input units include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. These input / output devices are not limited to program operations, but can also be used for hardware operations such as sample display devices. Furthermore, a touch screen or a touch panel is used for the display itself of the display unit 28 that displays the interface screen, so that the user can directly input or operate the screen by hand, or voice input or other existing input is possible. Means can be used, or these can be used in combination.

The electron microscope operation program shown in FIG. 2 shows an operation screen in the manual observation mode. The manual observation mode is a mode in which the user can set image observation conditions. The operation screen shown in this figure includes a first display area 47 that displays an imaged observation image, a second display area 48 that displays a position display, a wide area diagram, an e-preview, and a comparison image, and an image of the observation image. Corresponding to image correction setting means 601 for setting correction, individual condition setting means 603 for individually setting image observation conditions such as detector, acceleration voltage, vacuum degree, and spot size, and previously stored image files A file correspondence condition setting unit 604 for setting one condition from image observation conditions, a preview setting unit 605 for setting a preview function, a magnification setting unit 611 for setting a magnification of an observation image, and the like, as a visual field setting unit, and an observation visual field An observation visual field movement setting unit 612 for setting the movement of the image, contrast / brightness setting means 613 for setting the contrast and brightness, and adjustment of astigmatism. It provided with astigmatism adjustment setting unit 614, and an optical axis adjusting setting unit 615 sets an adjustment of the optical axis. In the manual observation mode, in the image correction setting means 601, the sharpness setting means 601a for setting the sharpness, the highlight setting means 601b for setting the highlight, the gamma correction setting means 601c for setting the gamma correction, and the brightness of the observation image. A luminance distribution diagram (histogram) 601d indicating the distribution and overrange extraction setting means 601e are displayed. The overrange extraction setting means is configured to extract and display the overranged area. Specifically, when the “overrange check” column, which is one mode of the overrange extraction setting unit 601e, is checked in a state where the observation image is displayed, the overrange region that has become the under region or the over region of the observation image is changed. Are displayed in a manner different from the intermediate color area. Also, the image observation conditions can be individually set by the individual condition setting means 603 as described above. Items that can be set by the individual condition setting means 603 include a “detector” box 603a, an “acceleration voltage” box 603b, a “vacuum degree” box 603c, a “spot size” box 603d, etc. Aberration adjustment setting means, optical axis adjustment setting means, and the like may be included. Further, a “read from file” button (file correspondence condition setting means) 404 can set one condition from image observation conditions corresponding to an image file stored previously. Further, the above-described preview function is executed by an “e preview setting” button 605 which is an aspect of the preview setting unit.
(Visible light imaging unit 44A)

  The electron microscope 100 can be equipped with a visible light imaging unit that performs imaging with visible light in addition to the observation of the electron beam observation image using the electron beam imaging unit 42A described above. The visible light image captured by the visible light imaging unit can be arbitrarily used by the user. For example, during observation of the SEM image, a sample to be observed can be confirmed with a color image, or used for a wide area image of an electron beam observation image. It is generally used for an auxiliary purpose of electron beam observation. The electron microscope 100 according to the present embodiment is configured to switch a plurality of imaging systems of an electron beam imaging unit that images using these electron beams and a visible light imaging unit that images using visible light. . FIG. 3 shows a block diagram of an electron microscope configured such that the electron beam imaging unit 42A and the visible light imaging unit 44A can be switched. The visible light imaging unit 44A is not limited to a configuration in which the visible light imaging unit 44A is always installed in the sample chamber 31 and is automatically switched by the imaging switching control unit 46 and the like. Can be removed and switched to observation using the normal electron beam imaging unit 42A. Although the manual attachment of the visible light imaging unit 44A requires more time for attachment and detachment than a method in which the imaging unit is placed in the sample chamber 31 and mechanically switched automatically, visible light imaging is performed in the sample chamber 31 when not in use. The part 44A does not get in the way, and the mechanism for automatic switching of the imaging part can be eliminated, so that the configuration in the sample chamber 31 can be simplified, and an advantage that it can be realized with an inexpensive and simple configuration is obtained. . Hereinafter, how the detachable visible light imaging unit 44A is mounted on the electron microscope will be described with reference to FIG.

  The electron microscope 300 shown in FIG. 4 pulls out a front panel 52 that constitutes the front surface of the sample chamber 31 and opens the sample chamber 31 to the outside. The front panel 52 is connected to the front surface of the electron microscope main body 50 so as to be freely drawable according to a pair of guide rods 54. Since the inside of the sample chamber 31 is reduced to a vacuum during observation, the inside of the sample chamber 31 is set to normal pressure when the front panel 52 is opened. A horizontal table 56 is fixed to the inside of the front panel 52, that is, on the side wall of the front surface of the sample chamber 31, and the sample table 33 and its moving mechanism are provided on the horizontal table 56. Thereby, the sample stage 33 can be pulled out together by pulling out the front panel 52, and the sample is set on the sample stage 33 in this state. In the example of FIG. 4, the sample is inserted into a sample holder (not shown), and the sample is placed on the sample table 33 by setting the sample holder on the sample table 33. On the sample stage 33, a holder holding hole 58 (shown in FIG. 5 (a)) is formed at the center as a sample holder holding part for setting the sample holder. The holder holding hole 58 is configured to have a size capable of inserting the sample holder.

With the sample placed on the sample stage 33 in this way, the visible light imaging unit 44A is attached to the sample stage 33 to capture a visible light image. With the configuration in which the visible light imaging unit 44A is fixed on the movable sample stage 33, the visible light imaging unit 44A is always held at a predetermined position on the sample stage 33 regardless of the position of the sample stage 33. Accordingly, the sample placed on the sample stage 33 can be reliably captured without being aware of the current position of the sample stage 33, and a visible light image can be easily captured. In the conventional electron microscope, the visible light imaging unit is fixed to a fixed position such as a side wall in the sample chamber. Therefore, it is necessary to adjust the position of the sample stage so that the sample can be imaged by the fixed visible light imaging unit. It was. In this method, after grasping the current position of the sample stage, it is necessary to adjust the position of the sample stage by calculating so that the sample on the sample stage is just in the visual field of the visible light imaging unit, which is extremely complicated and troublesome. Met. In particular, the sample stage has many movement parameters of five axes, that is, the XY plane, the Z axis in the height direction, the R axis in the rotation direction, and the T axis in the tilt direction. It was a very time-consuming task. Furthermore, after imaging a visible light image, an alignment operation to another imaging unit must be performed for observation by charged particle beam imaging. When switching from the electron beam observation to the visible light image once, it is necessary to align the position from the electron beam imaging unit to the visible light imaging unit and then perform the alignment again in the original electron beam imaging unit. It takes more time and effort. Moreover, since electron beam observation is performed at an extremely high magnification such as a single field of view of several microns, the same position cannot always be reproduced accurately due to errors in each part such as deflection and backlash. There is a risk that the field of view will be different due to errors. Therefore, it is desirable to simplify such adjustment work as much as possible. On the other hand, according to the configuration in which the visible light imaging unit 44A is fixed on the sample stage 33 as in the present embodiment, the relative relationship between the sample stage 33 and the visible light imaging unit 44A even if the sample stage 33 moves. Since the positional relationship does not change, the above alignment operation can be made unnecessary, and a visible light image can be captured very easily.
(Holding mechanism)

A visible light imaging unit 44A shown in FIG. 4 includes a rod-shaped rod 62 that constitutes a holding mechanism, and an imaging camera unit 60 that performs the central function of the visible light imaging unit 44A. As shown in FIG. 4, the rod 62 stands upright on the sample stage 33, and holds the camera unit 60 fixed to the upper end apart from the upper part of the sample stage 33. An insertion hole 64 for detachably inserting the rod 62 is formed on the upper surface of the sample stage 33 as a mounting mechanism for connecting the visible light imaging unit 44A. The insertion hole 64 is opened at the tip of a pipe 66 that protrudes from the upper surface of the sample stage 33. On the other hand, a boss 68 is formed at the tip of the rod 62 and is formed in a size and shape that can be inserted and held in the open end of the pipe 66. With this configuration, the boss 68 is inserted into the pipe 66 so that the holding mechanism stands upright on the sample stage 33, and the visible light imaging unit 44A is held. The configuration in which the pipe 66 is previously projected from the sample stage 33 as the mounting mechanism allows the user to easily visually recognize the position of the pipe 66 when mounting the visible light imaging unit 44A. There is an advantage that can be done with an easy electron microscope. The pipe 66 itself may be configured to be detachable. Thereby, when the imaging of a visible light image is not performed, the pipe 66 can be removed and the inside of the sample chamber 31 can be cleared.
(Camera unit 60)

The camera unit 60 is a member that captures a visible light image, and an optical camera, a digital camera, or the like can be used. Preferably, a CCD image sensor, a C-MOS image sensor, or the like is used. A visible light image captured by a CCD or C-MOS can be electrically transmitted, processed, processed, etc., and can be easily handled. The camera unit 60 has a desired magnification. For example, the camera unit 60 having a fixed magnification of 1 to 20 times is set in the visible light imaging unit 44A. In the example of FIG. 4, a camera unit 60 with a double magnification is used. Further, the visible light imaging unit 44A including the camera units 60 having different fixed magnifications can be exchanged and set on the sample stage 33. The visible light image captured by the camera unit 60 is sent to the imaging switching control unit 46 and displayed on the display unit 28. In the case where an image is captured using an optical camera for the camera unit 60, a visible light image can be obtained with a paper medium or the like by development.
(Focus distance)

  By adopting a fixed magnification for the camera unit 60, the in-focus distance is uniquely determined. Therefore, by adjusting the length of the rod 62 in advance so that the distance between the camera unit 60 and the sample matches the in-focus distance, it is possible to always take an image at the in-focus distance. The length of the rod 62 takes into consideration the mounting position of the camera unit 60 to the holding mechanism, the length of the mounting mechanism of the sample stage 33, and the like, and the camera unit 60 and the sample set on the sample stage 33. Designed to match the in-focus distance. Thereby, in a state where the visible light imaging unit 44A is set on the sample stage 33, the in-focus distance is always maintained, and the focusing operation becomes unnecessary, which makes it extremely easy to use. In particular, the height direction of the camera unit 60 is set in advance as the in-focus distance in combination with the fact that the positioning operation of the sample stage 33 can be made unnecessary by fixing the visible light imaging unit 44A on the sample stage 33. This eliminates the need for focusing, and makes it possible to capture a visible light image more smoothly.

  Note that the camera unit is not limited to a fixed magnification, and a configuration in which the camera unit is a variable magnification system such as a zoom lens and is focused by means such as autofocus can be employed. With this method, it is possible to acquire a visible light image in which the magnification is changed by one visible light imaging unit.

  Further, in the state where the visible light imaging unit 44A is mounted on the sample stage 33 via the holding mechanism and the mounting mechanism, the mounting position of the camera unit 60 and The angle and the like are designed in advance. This eliminates the need for visual field search, and the optimal position of the sample can be imaged as a visible light image simply by mounting the visible light imaging unit 44A.

  In this way, when the camera unit 60 is attached to the sample stage 33 by the holding mechanism, the camera optical axis is always adjusted to a position where the camera optical axis is at the center of the sample regardless of the position of each axis of the sample stage 33. Since the distance between the unit 60 and the sample can be maintained to be the in-focus distance of the camera unit 60, it is very easy to capture a visible light image.

  FIG. 5 is an enlarged cross-sectional view of the camera unit 60 of FIG. As shown in this figure, the camera unit 60 is fixed to the upper end side surface of the rod 62 by screws. The camera unit 60 shown in this figure has a rotating portion 69 that rotates about a rotation axis connected to a side surface, and a rod 62 is inserted into the rotating portion 69 so that the sample unit 33 is located above the sample stage 33 via the rod 62. Held vertically. In the example of FIG. 5A, when the rod 62 is inserted into the rotation unit 69, the camera unit 60 rotates around the rotation axis by its own weight, the imaging surface faces downward, and the sample stage 33 can be imaged from the front. Will be adjusted automatically.

  Further, the camera unit 60 is set on the side surface of the electron microscope main body 50 when the front panel 52 is pushed into the electron microscope main body 50 from the state shown in FIG. And used for the purpose of observing the state inside the sample chamber 31. FIG. 5B is a cross-sectional view of the state in which the camera unit 60 is mounted on the main body of the electron microscope as viewed from above the electron microscope. As shown in this figure, a mounting hole 59 for mounting a camera unit is opened in the cover of the electron microscope main body 50 and communicates with the sample chamber 31. A screw ring is provided on the outer periphery of the camera unit 60, whereby the camera unit 60 is fixed around the mounting hole 59. The camera unit 60 mounted in the mounting hole 59 is for monitoring whether the sample stage 33 or the sample does not collide with the inner wall of the sample chamber 31, the objective lens, or the like by moving the sample stage 33 or putting in and out various detectors. It can be used as a peephole for observation camera and monitor in the sample room. Therefore, the camera unit 60 is adjusted to an angle at which the sample stage 33 inside the sample chamber 31 can be observed through the mounting hole 59.

  According to the above configuration, the camera unit 60 can be easily placed at a predetermined position by the rod 62, and a visible light image can be smoothly captured. Further, since it can be realized by a simple configuration in which the holding mechanism is configured by one rod 62, there is an advantage that the cost is low and the handling is easy. In the above example, the holding mechanism is composed of one rod, but it goes without saying that it can be composed of two or more rods. By supporting the camera unit 60 with two or more rods, the mechanical strength can be improved more stably. Further, the present invention is not limited to the rod, and various forms such as a polygonal columnar shape, a movable arm shape, and a telescopic cylinder shape can be appropriately employed.

Furthermore, the position of the mounting mechanism for fixing the visible light imaging unit 44A does not have to be on all the movement axes of the sample stage 33, and may be fixed at a position off some of the axes. For example, the mounting mechanism is on the axis of the XY plane but is not provided on the R axis that is the rotation axis. As a general arrangement structure, the Z axis, the T axis, the XY axis, the R axis, and the sample holder are arranged in this order on the horizontal base 56 of the electron microscope. In this case, since the R axis is closest to the sample, a mounting mechanism for fixing the visible light imaging unit 44A is not provided on the R axis but on the XY axis. Even in this case, if the relative positional relationship between the sample and the camera unit 60 is set so that the center of the sample is positioned on the optical axis of the camera, even if the rotation direction of the R axis of the sample is not fixed, R This can be done by means of knowing the position of the shaft. For example, the rotation angle of the sample stage 33 is detected using an encoder or the like, or the rotation position of the R axis is stored in a user or an electronic microscope, and the R axis of the sample stage 33 is adjusted to the posture corresponding to the rotation position. To do. As a result, a visible light image can be easily obtained only by adjusting the R axis, and operability, space efficiency, and the like can be obtained regardless of the positional restrictions for fixing the visible light imaging unit 44A on all axes. The visible light imaging unit 44A can be installed at a suitable position.
(Color selection function)

  As described above, the microscopic image captured by the microscopic image capturing unit 42 is colored based on the visible light image obtained by easily facing the visible light image capturing unit to the sample surface. FIG. 6 shows a sample display having an image acquisition function for acquiring a microscope image and a visible light image, a color selection function for selecting a desired color from the visible light image, and a coloring function for coloring the microscope image into the selected color. A block diagram of the device is shown. In the sample display device 200 shown in this figure, a microscope image capturing unit 42 and a visible light image acquiring unit 44 are connected to a calculation unit 70. The visible light image acquisition unit 44 is a member that acquires a visible light image, and corresponds to the above-described visible light imaging unit and the like. However, the visible light image is not limited to the image captured at the same time as the microscopic image by the sample display device, and an image file of the visible light image acquired in advance can be read by the visible light image acquisition unit and used for the coloring process. In this case, the sample display device does not necessarily require a visible light imaging unit.

  The calculation unit 70 acquires a charged particle beam observation image (microscope image) from the microscope image capturing unit 42 and a visible light image from the visible light image acquisition unit 44 (image acquisition function). The computing unit 70 includes an observation condition setting unit 650 and a color selection unit 638. The observation condition setting unit 650 sets image observation conditions when the microscope image capturing unit 42 captures a microscope image. In the case of an electron microscope, the image observation conditions include acceleration voltage, spot size (incident electron beam bundle diameter), detector type, vacuum degree, etc. The conditions according to the sample display device used are the observation condition setting unit. Set at 650. The color selection unit 638 is a member for realizing a color selection function for selecting a color desired to be colored in the microscope image from the visible light image. Then, the coloring unit 72 of the calculation unit 70 colors the microscope image into the color selected by the color selection unit 638 (coloring function). The colored microscope image is displayed on the display unit 28.

  This state will be described based on the user interface screen of the sample display device operation program shown in FIGS. In these drawings, FIG. 7 shows a state in which the microscope image A before coloring is displayed, FIG. 8 shows a state in which a desired color is selected from the visible light image G by the color selection unit 638, and FIG. 9 shows that the selected color is colored. Microscopic images B are shown respectively. In FIG. 7, the microscope image A captured by the microscope image capturing unit 42 is displayed in the microscope image display area 790. In this example, an electron beam observation image captured by an SEM is tilted so as to generate parallax, and a three-dimensional image generated based on a plurality of electron beam images is displayed. When the “3D” tab 621 provided at the bottom of the screen of FIG. 2 is selected, the screen is switched to a 3D image creation screen, and a procedure for acquiring a 3D image is guided as shown in FIGS. In accordance with this, the user tilts the sample to perform alignment, and takes a parallax image.

  Hereinafter, a procedure for generating a three-dimensional image will be described with reference to FIGS. FIG. 10 shows a state where a first observation image serving as a reference is acquired. In the screen of FIG. 10, among the interfaces displayed on the display unit 28, the right side of the screen is a first display area 47 showing an image currently being treated. A second display area 48 is provided on the upper left side of the screen, and a wide area map, a position display, an e-preview, a comparative image, and the like are switched and displayed by switching tabs provided at the lower part of the second display area 48. . Further, in this example, a wide area map is displayed in the second display area 48, and which part the area being displayed in the first display area 47 corresponds to is displayed in a frame shape 681. Further, below the second display area 48, an explanation display field 630 for explaining selection or input of items to be set by the guidance operation of the guidance means is provided. The explanation display column 630 further displays a flow chart 640 showing the flow of the procedure on the left side, and shows which item in the flow chart 640 the currently displayed procedure corresponds to by highlighting. In the example of FIG. 10, the “first image capturing” field 641 is displayed brightly. Corresponding to this, what should be done at this stage and points and setting items to be confirmed are displayed as character information in the explanation display field 630. In accordance with this information, the user understands items to be confirmed and items to be set from the screen, and performs necessary settings from the observation condition setting unit 650 for performing various operations. In the example of FIG. 10, the observation condition setting unit 650 is provided below the first display area 47, and changes in magnification, center movement, contrast, brightness, focus, astigmatism, photographing, Various operation buttons and menus such as static elimination and printing are arranged. In the “first photographing” step, the photographing condition of the first observation image is determined and the image is adjusted. The user designates an observation condition, an observation position, and the like of an observation target to be displayed as a three-dimensional image, and displays the first observation image in the first display area 47 by pressing the “shoot” button 654. When the first observation image is acquired in this manner, a “next” button 656 provided below the explanation display field 630 can be pressed, and the screen is switched to the screen of FIG. 11 by pressing this button.

  Next, in order to acquire the second observation image based on the first observation image, the sample to be observed is tilted and aligned. The inclination of the sample is such that parallax is generated with respect to the first observation image. Although the optimum value of the inclination angle varies depending on the magnification, it is, for example, 3 to 7 °, preferably about 5 °. In the example of FIGS. 10 and 11, when the “Next” button 656 of FIG. 10 is pressed, the sample displayed in the first display area 47 is automatically tilted at an appropriate rotation axis and tilt angle. As shown in the first display area 47, the first observation image before the inclination and the second observation image after the inclination are arranged in the left first divided display area 47A and the right second divided display area 47B. Is displayed. After such automatic setting, in step S2 of FIG. 3, the alignment and fine adjustment of the image are further performed so that the tilted displayed sample is displayed from the same viewpoint as the first observation image. In the explanation display field 630 in FIG. 11, procedures of “align position” and “image the second image” are described. In accordance with this, the user enlarges the observation image tilted by the “magnification” button 611a and uses the “center movement” button 612a or the like to move the observation image so as to be approximately the same position as the first observation image. When the “move center” button 612a is pressed, the point where the display area is clicked with the mouse or the like is moved so as to be the center of the screen. Note that a magnification interlocking function for maintaining the same display magnification in the first divided display area 47A and the second divided display area 47B is provided. That is, when either one of the first divided display area 47A or the second divided display area 47B is enlarged / reduced, the other is also enlarged / reduced following the same. Thus, the trouble of performing the other enlargement / reduction operation in accordance with one enlargement / reduction operation can be saved, and the display magnifications of the first divided display region 47A and the second divided display region 47B are always made equal to each other. It is easy to compare images. Further, a cross-shaped guide line 682 is displayed in each divided display area to support confirmation of the corresponding position. When the image observation conditions for the second observation image are set as described above, the “photograph” button 654 is pressed to capture the second observation image. The captured second observation image is stored as an image data file in a hard disk of a computer, a recording medium, or the like.

Then, on the screen of FIG. 12, based on the second observation image and the first observation image, the calculation unit 70 synthesizes a three-dimensional image. In the example of FIG. 12, two modes, “first mode” and “fine mode”, are selected as the three-dimensional image generation mode selection unit 670 in which the generation conditions are adjusted according to the definition and processing speed of the generated three-dimensional image. I have prepared it. When the user selects a speed-oriented or image-oriented mode according to the purpose of observation and presses the “Next” button 672, a three-dimensional image is generated in the selected mode, and the screen in FIG. 7 is displayed. . Here, since the obtained three-dimensional image is an image having only light and shade without color information, it is difficult to grasp the image of the material of the sample as it is. Therefore, in this embodiment, a coloring function is provided, which makes it easy to see the sample.
(Pointer 792)

A color to be colored by the coloring function is indicated by a pointer 792 in a desired color portion on the visible light image G being displayed. In the example of FIG. 7, this is performed by the “dropper” button 738 a in the “color designation” column 738 in the middle left. When the “dropper” button 738a is pressed, the “dropper” screen 793 of FIG. 8 is displayed, the visible light image G is displayed in the visible light image display area 791 on the left side, and the color of the visible light image G is designated. A dropper-shaped icon S is displayed as a pointer 792 for selection. The dropper icon S can be moved by dragging with a mouse or the like. Alternatively, the mouse icon itself may be changed to a dropper icon.
(Color display area 795)

  An explanation column 794 is provided on the right side of the screen to explain the operation. An explanation such as “Please click on the part of the color you want to obtain on the left figure” is displayed, and a dropper is displayed at the bottom. A color display area 795 in which the selected color is displayed is provided. The color display area 795 displays the color of the pixel on the visible light image G indicated by the tip of the dropper-shaped icon S that displays the mouth of the dropper in a simulated manner. As a result, the user can select a desired color while confirming the color designated by the dropper icon S. At this time, the visible light image G displayed in the visible light image display region 791 displays the same sample as the microscopic image A displayed in the microscopic image display region 790, and the visible light image is generally a microscopic image. Therefore, the visible light image is displayed as a wide-area image of the microscope image. For this reason, it is possible to easily color the same color by selecting a part corresponding to the part that is magnified and imaged as a microscope image from the wide area image. In the example of FIGS. 7 to 9, the entire image of the IC chip is shown as the visible light image G, and the enlarged view of the lead portion of the IC chip is shown as the microscope image A. Since the user understands that the enlarged portion of the microscope image A is the lead of the IC chip, the dropper icon S is moved to the lead portion to extract the lead color. With this method, the user can easily select a color without hesitation in operation because the user can color the microscope image in the same color simply by designating the portion corresponding to the enlarged portion as the microscope image on the visible light image. In particular, the user does not need the troublesome and complicated work of selecting colors to be used for microscopic images from a set of default colors such as palettes or chromaticity diagrams, or combining them with similar colors. The advantage is that the specification can be made very easily. Further, the visible light image may be displayed in an enlarged or reduced manner so that the color can be easily specified with the dropper icon.

In addition, in order to obtain color information with the dropper icon, the color of one pixel of the visible light image indicated by the dropper icon may be extracted, or the average color of several pixels around the specified pixel is extracted. It is good as a color. Furthermore, as a selection of colors, a history of colors used in the past is stored, and a method that can be called up and made possible, and colors that are likely to be used frequently, such as colors of typical materials, are prepared in advance. In addition, a method of selecting from these, a method of selecting from a palette or a chromaticity diagram, a method of saving a color created by the user, and the like can be used in combination as appropriate. The user's operability is enhanced by the simple color selection means.
(Coloring function)

  When the “OK” button 796 in FIG. 8 is pressed with the color selected in this way, the color information is extracted, and the color information is sent from the color selection unit 638 in FIG. Colors the microscopic image to this color. The calculation unit 70 shown in FIG. 6 includes a coloring unit 72 that performs a coloring function, and colors the microscope image A according to the color information selected by the color selection unit 638 and displays it on the display unit 28. FIG. 9 shows a state B in which the microscope image A shown in FIG. 7 is colored in the color selected by the dropper icon S of FIG. In the example shown in this figure, the entire microscope image is colored in a selected color. However, you may comprise so that only the designated area | region of a microscope image may be colored. For example, an area to be colored on a microscope image is designated in advance with a mouse or the like, and only this area is colored in a color designated by a color selection unit such as a dropper icon. The area may be specified by a rectangular shape, a circular shape, an arc shape, a freehand specification, or the boundary portion of the sample surface may be automatically detected by a method such as edge detection. With this method, a desired portion of the microscope image can be colored in a desired color. For example, when the microscope image expresses a member having a different material, the difference in material and the boundary line can be easily grasped visually by coloring each material.

  Furthermore, such a coloring operation can be automated. For example, by using an image recognition technique such as pattern matching, a region corresponding to the microscope image is searched from the visible light image, and the microscope image is automatically colored based on the color information included in the extracted region. As the color information, for example, an average value or an intermediate value of the color information included in the extracted area is used. Alternatively, it is possible to check the correspondence of the positional relationship between the microscope image and the visible light image, and color the color information of the visible light image into the microscope image according to this correspondence relationship. In this case, the fineness of the coloring process depends on the size of the visible light image and the accuracy of image recognition. In general, since the magnification of the visible light image is lower than that of the microscope image, the larger the number of pixels of the microscope image corresponding to one pixel of the visible light image, the coarser the color reproduction.

  It is also possible to change the background color. When the “background color” button 738b is pressed from the screen of FIG. 7, the screen is switched to a background color selection screen, and the user designates a desired color. For example, it is selected from a palette of default colors such as white and black. The “dropper” screen described above can also be used for designating the background color.

  The sample display device operation program shown in FIG. 7 and the like not only displays the generated three-dimensional image, but also has a function of reproducing a light reflection state from a virtually arranged light source and contour lines according to the height. And the like, and the like, which can be set and executed by the illumination simulation setting unit 730. 7 can be switched from the “3D display” tab 797 to the “profile measurement” tab 798 to perform measurement such as variation measurement in the height direction.

  In this example, the screen of FIG. 7 is displayed so as to overlap the screen of FIG. 8, but the screen of FIG. 8 may be integrated with FIG. This makes it easy to compare the microscope image and the visible light image side by side. Moreover, although the example which colors a three-dimensional image was demonstrated in said example, it cannot be overemphasized that a two-dimensional image can be colored similarly. In particular, in an electron microscope, an electron beam observation image is a target, but in another sample observation device, for example, an atomic force microscope, an atomic force observation image is a target.

  The sample display device of the present invention, the operation method of the sample display device, the sample display device operation program, and the computer-readable recording medium or the recorded device are applied to an electron microscope such as a scanning type or a transmission type, an atomic force microscope, etc. Thus, the present invention can be suitably used for scenes in which coloring processing is performed on a microscopic image without color information captured by these.

It is a block diagram which shows the structure of the electron beam imaging part of the electron microscope which concerns on one embodiment of this invention. It is an image figure which shows the operation screen in the manual observation mode of an electron microscope operation program. It is a block diagram which shows the electron microscope which can switch an electron beam imaging part and a visible light imaging part. It is a side view which shows the state which mounts a visible light imaging part to an electron microscope. 5A and 5B are cross-sectional views showing the camera unit of FIG. 4, FIG. 5A is an enlarged cross-sectional view, and FIG. 5B is an enlarged horizontal cross-sectional view showing a state in which the camera unit is mounted on the main body of the electron microscope. It is a block diagram which shows the sample display apparatus which concerns on one embodiment of this invention. It is an image figure which shows the state which displays the microscope image before coloring with a sample display apparatus operation program. It is an image figure which shows the state which selects a desired color from a visible light image with a sample display apparatus operation program. It is an image figure which shows the state which colored the microscope image in the color selected by the sample display apparatus operation program. It is an image figure which shows the state which produces | generates a three-dimensional image with a sample display apparatus operation program. It is an image figure which shows the state which produces | generates a three-dimensional image with a sample display apparatus operation program. It is an image figure which shows the state which produces | generates a three-dimensional image with a sample display apparatus operation program.

DESCRIPTION OF SYMBOLS 100, 300 ... Electron microscope 200 ... Sample display apparatus 1 ... Computer; 2 ... Central processing part 3 ... Electron gun high voltage power supply; 4 ... Filament; 5 ... Wehnelt; 6 ... Anode 7 ... Electron gun; Gun alignment coil; 10 ... Gun alignment coil controller 11 ... Convergent lens controller; 12 ... Convergent lens 13 ... Objective lens stop; 14 ... Astigmatism correction coil controller 15 ... Electron beam deflection scanning coil controller; Lens control unit 17 ... Astigmatism correction coil; 18 ... Electron beam deflection scanning coil 19 ... Objective lens; 20 ... Sample 21 ... Secondary electron detector; 22 ... Reflected electron detector 23 ... Secondary electron detection amplification unit; ... Backscattered electron detection amplification unit 25 ... A / D converter; 26 ... A / D converter 27 ... Image data generation unit; 28 ... Display unit 29 ... Printer; 30 ... Exhaust system 32 ... Exhaust control unit; 33 ... Sample stage 42 ... Microscope image imaging unit; 42A ... Electron beam imaging unit 44 ... Visible light image acquisition unit; 44A ... Visible light imaging unit 46 ... Imaging switching control unit 47 ... first display area; 47A ... first divided display area; 47B ... second divided display area 48 ... second display area 50 ... electron microscope main body 52 ... front panel; 54 ... guide rod; 56 ... horizontal stand 58 ... holder holding 59 ... Mounting hole 60 ... Camera unit; 62 ... Rod; 64 ... Insertion hole; 66 ... Pipe 68 ... Boss; 69 ... Rotating part 70 ... Calculation part; 72 ... Coloring part 601 ... Image correction setting means; 601a ... Sharpness Setting means 601b ... highlight setting means; 601c ... gamma correction setting means 601d ... luminance distribution chart; 601e ... overrange extraction setting means 603 ... individual condition setting means; 03a ... "detector" box 603b ... "acceleration voltage"box; 603c ... "vacuum degree" box 603d ... "spot size" box 604 ... file correspondence condition setting means; 605 ... "e preview setting" button 611 ... magnification setting section 611a ... "magnification" button 612 ... observation field movement setting unit; 612a ... "center movement" button 613 ... contrast / brightness setting means; 614 ... astigmatism adjustment setting means 615 ... optical axis adjustment setting means 621 ... "3D" Tab 630 ... description display field;
638 ... Color selection unit 640 ... Flow diagram 641 ... "First image" field 650 ... Observation condition setting unit 654 ... "Photograph"button; 656 ... "Next" button 670 ... 3D image generation mode selection unit; 672 ... "Next" button 681 ... Frame shape 682 ... Guide line 730 ... Lighting simulation setting section 738 ... "Color designation"column; 738a ... "Sydropper"button; 738b ... "Background color" button 790 ... Microscope image display area; 791 ... Visible light image display area 792 ... Pointer; 793 ... "Dropper"screen; 794 ... Description column 795 ... Color display area 796 ... "OK" button 797 ... "3D display"tab; 798 ... "Profile measurement" tab A ... Coloring Previous microscope image; G ... Visible light image; B ... Colored microscope image S ... Dropper icon

Claims (8)

An electron beam imaging unit for imaging an electron beam observation rod to be observed ;
An observation condition setting unit for setting an image observation condition when imaging the electron beam observation rod with the electron beam imaging unit ;
A display unit for displaying the electron beam observation rod imaged by the electron beam imaging unit ;
A visible light imaging unit for capturing a visible light image having color information for the same observation target;
A color selection unit for selecting a desired color to be colored on the electron beam observation basket from the visible light image;
A coloring portion for coloring the electron beam observation basket to the color selected by the color selection portion;
Equipped with a,
The color selection unit includes a pointer that can be designated on the display unit, and a color display region for displaying the color of the part designated by the pointer,
By designating a portion of the color desired to be colored in the visible light image with the pointer, the color included in the designated portion is configured to be displayed in the color display area,
Sample display device comprising Rukoto an area for coloring the color selected is displayed on the color display area in the color selection section, it is specifiable configured on the electron beam observation image. The sample display device according to claim 1 ,
The sample display device, wherein the display unit is configured to display the electron beam observation rod and the visible light image on the same screen.   The sample display device according to claim 1 or 2, further comprising:
  It has a stage that can be pulled out to place the observation object.
  The sample display device, wherein the visible light imaging unit is configured to be detachable with the stage pulled out.   The sample display device according to any one of claims 1 to 3, further comprising:
  A sample display device comprising: a mechanism that holds the fixed magnification and focusing distance lower than those of the electron microscope imaging unit and holds them apart. A stage for placing the observation object, an electron gun for irradiating the observation object on the stage with an electron beam, and one or more for detecting secondary electrons or reflected electrons emitted from the observation object Detector, an electron beam imaging unit for forming an electron beam observation image based on information detected by the detector, and an electron beam observation image captured by the electron beam imaging unit A display unit;
With
Based on predetermined image observation conditions, an accelerating voltage is applied to the electron gun to irradiate the observation target with an electron beam, and secondary electrons or reflected electrons emitted from the observation target are detected by the detector. A sample display device capable of forming an electron beam observation image and displaying it on the display unit by scanning a desired area on the surface,
A visible light imaging unit for capturing a visible light image having color information for the same observation target;
A color selection unit for selecting a desired color for coloring the electron beam observation image from the visible light image;
A coloring part for coloring the electron beam observation image to the color selected by the color selection part;
Equipped with a,
The color selection unit includes a pointer that can be designated on the display unit, and a color display region for displaying the color of the part designated by the pointer,
By designating a portion of the color desired to be colored in the visible light image with the pointer, the color included in the designated portion is configured to be displayed in the color display area,
Sample display device comprising Rukoto an area for coloring the color selected is displayed on the color display area in the color selection section, it is specifiable configured on the electron beam observation image. A method of operating the sample display device,
Capturing an image of an electron beam observation rod having light and shade information of an observation object, and obtaining a visible light image having color information for the same observation object;
In order to select a desired color to be colored on the electron beam observation rod from the visible light image, a pointer that can be designated on the display unit that displays the captured visible light image is desired to be colored in the visible light image. Designating a color part to display a color included in the designated part in a color display area for displaying the color of the part designated by the pointer ;
Coloring a designated region on the electron beam observation rod to a color selected on a visible light image;
A sample display method characterized by comprising: An operation program for the sample display device,
With imaging the electron beam observation setter having shading information of the observation target, an image acquisition function for capturing a visible light image having color information for the same observation target,
A color selection function for selecting a desired color to be colored on the electron beam observation basket from the visible light image;
A coloring function for coloring the electron beam observation rod to a color selected on a visible light image;
Is realized on a computer ,
The color selection function is a pointer that can be designated on a display unit for displaying an electron beam observation image picked up by the electron beam image pickup unit, and a color display for displaying the color of a part designated by the pointer The area and
By designating a portion of a color to be colored in the visible light image with the pointer, the color included in the designated portion is configured to be displayed in the color display area,
Sample display operation program characterized Rukoto the area to color the color selected by the color selecting function is displayed on the color display region, it is specifiable configured on the electron beam observation image. A computer-readable recording medium or a recorded device in which the program according to claim 7 is stored.