JP4324653B2 - Ultrasonic cleaning equipment - Google Patents

Description

  The present invention relates to an ultrasonic cleaning apparatus capable of cleaning a flat surface and a curved surface.

  Conventionally, as shown in FIG. 3, the parallel surface 1a of the wedge-shaped member 1 is supported in parallel to the surface of the substrate 2 to be cleaned, and the upper surface 1b is slightly inclined with respect to the parallel surface 1a of the wedge-shaped member 1. Further, the back surface 1c formed and connecting the end portion of the parallel surface 1a and the end portion of the upper surface 1b has an inclination of 50 degrees to 80 degrees with respect to the upper surface 1b, and the plate-like ultrasonic transducer 3 is formed on the back surface 1c. And an oscillation output is applied to the ultrasonic vibrator 3 from the oscillator 4, and a nozzle 5 a for supplying the cleaning liquid 6 is connected between the parallel surface 1 a of the wedge-shaped member 1 and the surface of the substrate 2 to be cleaned. The present applicant has proposed an ultrasonic substrate cleaning apparatus provided with the cleaning liquid supply apparatus 5.

  In the conventional ultrasonic substrate cleaning apparatus configured as described above, either the wedge-shaped member 1 or the substrate 2 to be cleaned is moved, and the cleaning liquid is supplied between the parallel surface 1a of the wedge-shaped member 1 and the surface of the substrate 2 to be cleaned. When the cleaning liquid 6 is supplied from the apparatus 5 through the nozzle 5 a and the oscillation output is applied from the oscillator 4 to the ultrasonic vibrator 3 bonded to the back surface 1 c of the wedge-shaped member 1, the ultrasonic vibrator 3 The generated ultrasonic waves are transmitted from the back surface 1c of the wedge-shaped member 1 through the parallel surface 1a of the wedge-shaped member 1 to the cleaning liquid 6 on the surface of the substrate 2 to be cleaned. The surface is cleaned.

In the conventional ultrasonic substrate cleaning apparatus configured as described above, ultrasonic waves generated by the ultrasonic transducer 3 pass through the parallel surface 1a of the wedge-shaped member 1 from the back surface 1c of the wedge-shaped member 1, and the substrate 2 to be cleaned. It is transmitted to the cleaning liquid 6 on the surface, and is configured to clean the surface of the substrate 2 to be cleaned by the transmitted ultrasonic vibration, and the convergence position (focal point) of the ultrasonic wave normally oscillated from the ultrasonic transducer 3. Is adjusted to the position of the parallel surface 1a of the wedge-shaped member 1 determined by the shape of the ultrasonic transducer 3 and the frequency of the ultrasonic wave. On the contrary, there is a risk of damaging and destroying fine patterns on the semiconductor substrate. In addition, the applicant has applied for a through-hole provided on the side surface of the wedge-shaped member 1a in order to radiate uniform ultrasonic vibration from the parallel surface 1a, but the structure of the wedge-shaped member 1a is complicated, There is a problem that cleaning liquid and dirt accumulate in the through holes, causing generation of particles.
Japanese Patent Application No. 2003-155585 Japanese Patent Application No. 2003-155688

  The problem to be solved is that in the conventional ultrasonic substrate cleaning apparatus, the substrate to be cleaned is damaged by the ultrasonic waves.

In the present invention, an inclined surface as an ultrasonic radiation surface is formed at one end, and a piezoelectric vibrator is attached to the other end, which is output from the piezoelectric vibrator and slightly longer than the natural convergence position of the propagating ultrasonic wave. A rod-shaped horn of an ultrasonic wave propagation body formed so as to be an intersection of a central axis and the center point of the inclined surface at a position; a vibrator case mounted so as to cover the piezoelectric vibrator; and the vibrator case The cable is connected to the piezoelectric vibrator, and the inclined surface of the rod-shaped horn is attached to the object to be cleaned with a minute distance from the side of the inclined surface. The cleaning liquid is introduced to clean the object to be cleaned, and the angle between the central axis of the rod-shaped horn and the inclined surface as the ultrasonic radiation surface is 100 to 170 degrees.

  In the ultrasonic cleaning apparatus of the present invention, since the inclined surface is formed at a position slightly far from the focal position, the ultrasonic wave is applied to the object to be cleaned by cleaning the object to be cleaned with a uniform and soft intensity on the inclined surface. There is an advantage of not damaging it.

  In the present invention, in order to clean the surface of the object to be cleaned with uniform and soft ultrasonic intensity, one end of the rod-shaped horn is cut obliquely to form an inclined surface, and the piezoelectric vibrator is formed at the other end of the rod-shaped horn. It was configured with a.

  1 is a side view of an ultrasonic cleaning apparatus according to an embodiment of the present invention, and FIG. 2 is a plan view of the ultrasonic cleaning apparatus of FIG. 1. One end of a rod-shaped horn 7 is cut obliquely to form an inclined surface 7a. The enormous portion 7 b is formed at the other end of the rod-shaped horn 7, the piezoelectric vibrator 8 is attached to the enormous portion 7 b, and the vibrator case 9 covers the enlarging portion of the rod-shaped horn 7. It is fixed to the part 7 b with a screw 11 through a packing 10, the cable 12 passes through the end of the vibrator case 9, and the cord 12 a of the cable 12 is connected to the piezoelectric vibrator 8.

  In the ultrasonic cleaning apparatus of this embodiment configured as described above, the inclined surface 7a of the rod-shaped horn 7 is attached to the object to be cleaned such as a substrate with a minute gap therebetween, and the inclined surface 7a of the rod-shaped horn 7 When the cleaning liquid flows into the gap between the objects to be cleaned and an oscillation output from an oscillator (not shown) is applied to the piezoelectric vibrator 8, the ultrasonic wave irradiated from the piezoelectric vibrator 8 is inclined surface 7a of the rod-shaped horn 7. The dirt and dirt adhering to the surface of the object to be cleaned can be cleaned via the cleaning liquid that is transmitted to the object to be cleaned from the inclined surface 7a.

  Since the inclined surface 7a formed at one end of the rod-shaped horn 7 has a different ultrasonic irradiation surface size depending on the cutting angle, the object to be cleaned having a small area and the object to be cleaned having a large area are inclined surfaces of the rod-shaped horn 7. Depending on the cutting angle of 7a, an appropriate size can be accommodated, and if the nozzle for supplying the cleaning liquid is integrated in the vicinity of the inclined surface 7a of the rod-shaped horn 7, the object to be cleaned in the narrow gap can be cleaned. There is an advantage that you can.

  In the above embodiment, the rod-shaped horn 7 may be formed with the inclined surface 7a at a position slightly longer than the focal position of the ultrasonic wave irradiated from the piezoelectric vibrator 8 and naturally converged. The angle α between the center line 7b of the rod-shaped horn 7 and the inclined surface 7a, which is the ultrasonic wave irradiation surface, may be 100 ° to 170 °, and the rod-shaped horn 7 may be made of quartz. You may form with the horn of another material.

It is a side view of the ultrasonic cleaning apparatus of the Example of this invention. It is a top view of the ultrasonic cleaning apparatus of FIG. It is a perspective view of the conventional ultrasonic substrate cleaning apparatus. It is a side view of the ultrasonic substrate cleaning apparatus of FIG.

7 Rod-shaped horn 8 Piezoelectric vibrator 9 Vibrator case 10 Packing 11 Screw 12 Cable

Claims (2)

  An inclined surface as an ultrasonic radiation surface is formed at one end, a piezoelectric vibrator is attached to the other end, and the central axis is positioned slightly longer than the natural convergence position of the ultrasonic wave output from the piezoelectric vibrator and propagating. And a rod-shaped horn of an ultrasonic wave propagation body formed so as to be an intersection of the inclined surface and the center point of the inclined surface, a vibrator case mounted so as to cover the piezoelectric vibrator, and an end of the vibrator case The cable is connected to the piezoelectric vibrator, and the inclined surface of the rod-shaped horn is attached to the object to be cleaned while keeping a small interval, and the cleaning liquid flows from the side of the inclined surface. An ultrasonic cleaning apparatus for cleaning the object to be cleaned. The ultrasonic cleaning apparatus according to claim 1, wherein an angle between a central axis of the rod-shaped horn and an inclined surface as the ultrasonic radiation surface is 100 degrees to 170 degrees.

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