JP4377417B2 - 傾きセンサ付き位置検出器 - Google Patents
傾きセンサ付き位置検出器 Download PDFInfo
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- JP4377417B2 JP4377417B2 JP2007073248A JP2007073248A JP4377417B2 JP 4377417 B2 JP4377417 B2 JP 4377417B2 JP 2007073248 A JP2007073248 A JP 2007073248A JP 2007073248 A JP2007073248 A JP 2007073248A JP 4377417 B2 JP4377417 B2 JP 4377417B2
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- sensor
- scale
- distance
- tilt
- position detector
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- 230000002093 peripheral effect Effects 0.000 claims description 22
- 238000004804 winding Methods 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24442—Error prevention by mechanical means by mounting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24457—Failure detection
- G01D5/24466—Comparison of the error value to a threshold
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
Claims (6)
- 磁性体から成るスケール部と、このスケール部とは独立して設けられたセンサ部と、を含み、スケール部の表面にはセンサ部との相対移動方向に沿って所定のピッチで繰り返しパターンが記録され、スケール部の表面に近接するセンサ部の面には、前記パターンを読み取る磁気式の位置センサが配置された位置検出器において、
前記センサ部には、スケール部の表面までの距離を検出する複数の磁気式の距離センサ素子を含み、前記複数の距離センサ素子は前記位置センサが配置された面上の前記スケール部との相対移動方向において離れた場所に配置され、前記複数の距離センサ素子の距離情報に基づき、前記スケール部の表面と、前記位置センサが配置されたセンサ部の面との傾きを検出する磁気式の傾きセンサが設けられていることを特徴とする傾きセンサ付き位置検出器。 - 前記センサ部は、スケール部の表面へ交流磁束を発する交流励磁手段を有し、前記複数の距離センサ素子は、巻線からなることを特徴とする請求項1記載の傾きセンサ付き位置検出器。
- 前記複数の距離センサ素子の巻線は直列接続されていることを特徴とする請求項2記載の傾きセンサ付位置検出器。
- 前記位置センサおよび前記傾きセンサは、同一のプリント基板上の導体パターンによって形成されていることを特徴とする請求項2または3記載の傾きセンサ付位置検出器。
- 前記スケール部は、円板状であって、外周面に繰り返しパターンが記録されていることを特徴とする請求項1〜4のいずれか1つに記載の傾きセンサ付位置検出器。
- 前記傾きセンサが検出した傾き情報をシリアル通信により、外部装置へ出力することを特徴とする請求項1〜5のいずれか1つに記載の傾きセンサ付き位置検出器。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007073248A JP4377417B2 (ja) | 2007-03-20 | 2007-03-20 | 傾きセンサ付き位置検出器 |
TW097108545A TWI432705B (zh) | 2007-03-20 | 2008-03-11 | 具有傾斜感測器之位置檢測器 |
EP08004720.2A EP1972899B1 (en) | 2007-03-20 | 2008-03-13 | Position detector with tilt sensor |
ES08004720.2T ES2545954T3 (es) | 2007-03-20 | 2008-03-13 | Detector de posición con sensor de inclinación |
KR1020080025949A KR20080085784A (ko) | 2007-03-20 | 2008-03-20 | 기울기 센서 부착 위치 검출기 |
US12/051,963 US7474091B2 (en) | 2007-03-20 | 2008-03-20 | Position detector with tilt sensor |
CN2008100851959A CN101281043B (zh) | 2007-03-20 | 2008-03-20 | 具有倾斜传感器的位置检测器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007073248A JP4377417B2 (ja) | 2007-03-20 | 2007-03-20 | 傾きセンサ付き位置検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008232847A JP2008232847A (ja) | 2008-10-02 |
JP4377417B2 true JP4377417B2 (ja) | 2009-12-02 |
Family
ID=39529665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007073248A Active JP4377417B2 (ja) | 2007-03-20 | 2007-03-20 | 傾きセンサ付き位置検出器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7474091B2 (ja) |
EP (1) | EP1972899B1 (ja) |
JP (1) | JP4377417B2 (ja) |
KR (1) | KR20080085784A (ja) |
CN (1) | CN101281043B (ja) |
ES (1) | ES2545954T3 (ja) |
TW (1) | TWI432705B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8508242B2 (en) * | 2010-01-25 | 2013-08-13 | Ksr Technologies Co. | Inductive position sensor |
JP5391157B2 (ja) * | 2010-06-23 | 2014-01-15 | オークマ株式会社 | 回転角度検出装置 |
US8866470B2 (en) * | 2011-12-19 | 2014-10-21 | Harnischfeger Technologies, Inc. | Permanent magnet inclinometer for an industrial machine |
JP6438233B2 (ja) * | 2014-08-18 | 2018-12-12 | Dmg森精機株式会社 | 変位検出装置 |
DE102016204313A1 (de) | 2016-03-16 | 2017-09-21 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optischer Abstandssensor und Positionsmesseinrichtung mit einem derartigen Abstandssensor |
CN106441226B (zh) * | 2016-09-08 | 2018-08-17 | 哈尔滨工程大学 | 一种基于复合干涉仪结构的测斜装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6056216A (ja) * | 1983-09-08 | 1985-04-01 | Matsushita Electric Ind Co Ltd | 磁気エンコ−ダ |
JP2550049B2 (ja) | 1987-02-23 | 1996-10-30 | 株式会社日立製作所 | 磁気的に位置や速度を検出する装置 |
JP2594455B2 (ja) | 1988-03-19 | 1997-03-26 | ファナック株式会社 | 磁気センサヘッドの取付け方法 |
GB9110598D0 (en) | 1991-05-16 | 1991-07-03 | Renishaw Transducer Syst | Setting up of quadrature signals |
JP2911664B2 (ja) * | 1991-09-25 | 1999-06-23 | オークマ株式会社 | 多変位検出装置 |
US5637995A (en) * | 1992-12-09 | 1997-06-10 | Nippondenso Co., Ltd. | Magnetic detection device having a magnet including a stepped portion for eliminating turbulence at the MR sensor |
SE525078C2 (sv) * | 2001-06-29 | 2004-11-23 | Abb Ab | Metod samt induktiv mätanordning för detektering av mittpunkten hos ett elektriskt ledande material |
JP4477416B2 (ja) * | 2004-05-25 | 2010-06-09 | オークマ株式会社 | 回転位置検出装置 |
GB0413827D0 (en) | 2004-06-21 | 2004-07-21 | Renishaw Plc | Scale reading apparatus |
JP4085074B2 (ja) * | 2004-06-24 | 2008-04-30 | ファナック株式会社 | 磁気式角度検出器における回転体の製造方法 |
DE102007031515A1 (de) * | 2007-07-06 | 2009-01-22 | Hiwin Mikrosystem Corp. | Gerät zur Erfassung der Einbaulage eines Lesekopfes |
-
2007
- 2007-03-20 JP JP2007073248A patent/JP4377417B2/ja active Active
-
2008
- 2008-03-11 TW TW097108545A patent/TWI432705B/zh not_active IP Right Cessation
- 2008-03-13 ES ES08004720.2T patent/ES2545954T3/es active Active
- 2008-03-13 EP EP08004720.2A patent/EP1972899B1/en active Active
- 2008-03-20 US US12/051,963 patent/US7474091B2/en active Active
- 2008-03-20 CN CN2008100851959A patent/CN101281043B/zh active Active
- 2008-03-20 KR KR1020080025949A patent/KR20080085784A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1972899A3 (en) | 2010-03-17 |
JP2008232847A (ja) | 2008-10-02 |
TW200839195A (en) | 2008-10-01 |
EP1972899A2 (en) | 2008-09-24 |
US7474091B2 (en) | 2009-01-06 |
KR20080085784A (ko) | 2008-09-24 |
ES2545954T3 (es) | 2015-09-17 |
US20080231265A1 (en) | 2008-09-25 |
EP1972899B1 (en) | 2015-07-08 |
CN101281043A (zh) | 2008-10-08 |
TWI432705B (zh) | 2014-04-01 |
CN101281043B (zh) | 2012-02-22 |
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