JP4348597B2 - Batch furnace for continuous firing verification - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a batch furnace for firing electronic components that can perform heating control and atmosphere control similar to a continuous firing furnace.
[0002]
[Prior art]
Usually, in a batch furnace for firing electronic parts, a temperature controller is used to input a desired temperature curve, and the temperature in the furnace is adjusted according to the temperature curve. Since the processed product charged in the furnace does not move, even if there are multiple heating zones for heating the processed product in the length direction of the furnace, each heating zone operates at the same temperature setting. is doing. As for the control of the furnace atmosphere, the charging control is performed from a gas charging nozzle attached to a fixed position at a constant or random (see Patent Document 1).
[0003]
Therefore, even if the temperature / atmosphere control conditions for obtaining an excellent fired product are established in the processing in a batch furnace, if firing is to be performed in a continuous firing furnace for the purpose of mass production of electronic parts, The conditions cannot be applied, and the processing conditions for the continuous firing furnace must be redesigned.
[0004]
[Patent Document 1]
JP 2002-62052 A (Claims 1 to 3)
[0005]
[Problems to be solved by the invention]
In the batch furnace for firing electronic parts, the present invention enables heating control and atmosphere control similar to those of a continuous firing furnace. It is an object of the present invention to provide a batch furnace for continuous firing verification that does not need to be set again from the beginning and can significantly reduce the man-hours spent on setting conditions.
[0006]
[Means for Solving the Problems]
A batch furnace for continuous firing verification according to claim 1 of the present invention for achieving the above object is a batch furnace for firing electronic components, which can perform heating control and atmosphere control similar to a continuous firing furnace, The heating starts from at least three or more heating zones for heating the processed product arranged in the length direction and the heating zone located on one side in the length direction, and arranged from one side to the other side. each heating zone sequentially heating was, with attached a temperature difference at each heating zone, equipped with a heating control mechanism that the temperature of each heating zone starts lowering when it reaches a predetermined temperature, the ambient gas in the heating zone A plurality of atmosphere gas introduction nozzles to be introduced are arranged in parallel in the length direction of each heating zone, and the gas introduction positions from the atmosphere gas introduction nozzle to the heating zone are arranged at intervals L in the length direction of each heating zone , and continuously Firing furnace From the gas injection nozzle to the gas input spaced only time difference time required to move the distance L between the Oite set is treated product corresponding to processing products gas input position and gas input position to the moving speed of the It is characterized by having an atmospheric gas input control mechanism for sequentially supplying gases.
[0007]
The batch furnace for continuous firing verification according to claim 2 is characterized in that, in claim 1, three atmosphere gas injection nozzles are arranged in each of the heating zones , and the atmosphere gas injection nozzles correspond to the three atmosphere gas injection nozzles. The three gas injection positions to the heating zone are arranged at intervals L in the length direction of each heating zone .
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 3 shows a partial cross section of the continuous firing furnace. The processed product 1 moves in the direction of the arrow in the continuous firing furnace CF at a set moving speed, and is heated by the heating element 2 disposed in the heating zones 2a, 2b, and 2c. For example, the heating zone 2a in the furnace is set to 1000 ° C., 2b is 900 ° C., 2c is set to 800 ° C., and the processed product 1 is 800 ° C., 900 ° C., 1000 ° C. in the process of moving to 2c, 2b, 2a. The temperature is gradually raised. There is a temperature difference in the moving processed product 1. Thereafter, the processed product 1 is gradually cooled and cooled after passing through a zone set at a low temperature.
[0009]
Atmosphere gas injection nozzles 3a, 3b, and 3c are disposed in each heating zone 2a, 2b, and 2c. However, since the injection nozzle is disposed at a fixed position, the input atmosphere gas first moves. The spraying position is sequentially transferred from the front part to the rear part of the processed product 1.
[0010]
In the batch furnace for firing electronic parts of the present invention, as shown in FIG. 1, at least three heating zones 2A, 2B, 2C for heating the processed product 1 are arranged in the length direction of the furnace BF. The The heating element 2 starts the heating from the heating zone 2A located on one side in the length direction, for example, the back side of the furnace, and the heating temperature rises in the order of the heating zone 2B located in the center and the heating zone 2C on the near side. With such control, with the passage of time, the heating zone 2A has a temperature of 1000 ° C., 2B has a temperature of 900 ° C., and 2C has a temperature of 800 ° C., and a temperature difference is formed in the heating zone from the back side to the front side of the furnace. Further, when the temperature of each heating zone reaches 1000 ° C., heating control is performed so as to start the temperature lowering.
[0011]
The treated product 1 charged in each heating zone 2A, 2B, 2C is heated to 1000 ° C., 900 ° C., and 800 ° C., respectively, and after the treated product in the heating zone 2A reaches 1000 ° C., the temperature is lowered and cooled. When the processed product in the heating zone 2B reaches 900 ° C., it is further heated to 1000 ° C., and then cooled and cooled. When the processed product in the heating zone 2C reaches 800 ° C., it is further 900 ° C. It is heated to 1000 ° C., and then the temperature is lowered and cooled.
[0012]
In the length direction of each heating zone 2A, 2B, 2C, a plurality of, for example, three atmosphere gas injection nozzles are arranged in parallel at equal intervals. For example, gas injection nozzles 3A, 3B, and 3C are arranged in parallel in the heating zone 2A, and the gas injection nozzles 3A, 3B, and 3C supply gas to the processed product 1 as shown in FIG. When the charging position by 3A is 3 (A), the charging position by the gas charging nozzle 3B is 3 (B), and the charging position by the gas charging nozzle 3C is 3 (C), the processed product 1 is processed in the continuous firing furnace CF. In response to the moving speed of the processed product set in this case, the processed product is moved to each gas input position of the processed product with a time difference by the time required for moving the distance L between the gas input position and the gas input position. Control is performed so that gas is sequentially supplied from the gas injection nozzle.
[0013]
That is, in the heating zone 2A, gas is first supplied from the gas input nozzle 3A to the input position 3 (A), and the gas input from the gas input nozzle 3A is stopped after a predetermined time required to move the distance L. Then, gas is supplied from the gas supply nozzle 3B to the input position 3 (B), and after a predetermined time, the gas input from the gas input nozzle 3B is stopped and gas is supplied from the gas input nozzle 3C to the input position 3 (C). . The same gas injection control is performed for the gas injection nozzles 3D, 3E, and 3F in the heating zone 2B and the gas injection nozzles 3G, 3H, and 3I in the heating zone 2C. By performing such atmospheric gas input control, it is possible to achieve the same processing form as the processing in the continuous firing furnace in which the gas blowing position is sequentially shifted from the front to the rear of the processed product.
[0014]
In the batch furnace, the above heating control and atmospheric gas control are repeatedly performed according to the program for a time corresponding to the length of the furnace to be heated and cooled by moving the processed product in the continuous firing furnace at the set moving speed. Heating control and atmosphere control similar to a continuous firing furnace can be performed.
[0015]
【The invention's effect】
According to the present invention, when shifting from processing in a batch furnace to processing in a continuous furnace, it is not necessary to reset the processing conditions from the beginning as in the prior art, and the man-hours spent for setting the conditions can be greatly reduced. A batch furnace for continuous firing verification is provided.
[Brief description of the drawings]
FIG. 1 is a longitudinal section showing an outline of a batch furnace of the present invention.
FIG. 2 is a side view showing the atmosphere gas input position of the processed product in the heating zone 2A of FIG.
FIG. 3 is a partial longitudinal sectional view showing an outline of a continuous firing furnace.
[Explanation of symbols]
1 Processed Product 2 Heating Element 2A Heating Zone 2B Heating Zone 2C Heating Zone 2a Heating Zone 2b Heating Zone 2c Heating Zone 3A Gas Input Nozzle 3B Gas Input Nozzle 3C Gas Input Nozzle 3D Gas Input Nozzle 3E Gas Input Nozzle 3F Gas Input Nozzle 3G Gas Input nozzle 3H Gas input nozzle 3I Gas input nozzle 3a Gas input nozzle 3b Gas input nozzle 3c Gas input nozzle BF Batch furnace CF Continuous furnace

Claims (2)

A batch furnace for firing electronic parts that can perform heating control and atmosphere control similar to a continuous firing furnace, and at least three heating zones for heating a processed product arranged in the length direction of the furnace And start heating from the heating zone located on one side of the length direction, sequentially heating each heating zone arranged from one side to the other, creating a temperature difference in each heating zone, equipped with a heating control mechanism of heating zones starts lowering when it reaches a predetermined temperature, and arranged a plurality of atmospheric gas injection nozzle in the longitudinal direction of each heating zone to introduce an atmospheric gas into each heating zone, the atmosphere The gas supply position from the gas supply nozzle to the heating zone is arranged at intervals L in the length direction of each heating zone, and the processed product corresponds to the moving speed of the processed product set in the continuous firing furnace. Gas throw For continuous firing verification, characterized in that it comprises an atmospheric gas input control mechanism for sequentially introducing gas from the gas injection nozzle to the gas input spaced only time difference time required to move the distance L between the position Batch furnace. Three atmospheric gas injection nozzles are provided in each heating zone, and the gas injection position from the atmospheric gas injection nozzle to the heating zone is set in the length direction of each heating zone corresponding to the three atmospheric gas injection nozzles. The batch furnace for continuous firing verification according to claim 1 , wherein three are arranged at intervals L.

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