JP4205144B2 - Active matrix substrate and manufacturing method thereof - Google Patents

Description

  The present invention relates to an active matrix substrate applied to a liquid crystal display device, an organic EL display device and the like.

  As an electro-optical display device such as a liquid crystal display device or an organic EL display device, an active matrix type device in which a plurality of switching elements such as thin film transistors (TFTs) are provided on an insulating substrate and a voltage is independently applied to each pixel. Are known.

  In particular, in a display device using liquid crystal as an electro-optical element, it is important to realize an active matrix substrate having a large display area of each pixel, that is, a high aperture ratio, in order to obtain bright and high display quality.

  As an active matrix substrate that realizes such a high aperture ratio, for example, a substrate having a structure shown in Patent Document 1 has been proposed. This Patent Document 1 discloses a configuration in which an organic interlayer insulating film is formed so as to cover a gate signal line and a source signal line, and a pixel electrode is formed thereon. In such an active matrix substrate, the pixel electrode can overlap each signal line, so that the aperture ratio of the liquid crystal display device can be increased and the electric field caused by each signal line can be shielded. Liquid crystal alignment defects can be suppressed.

  However, in the active matrix substrate as described above, since the organic interlayer insulating film has water absorption and water permeability, the moisture concentration of the interlayer insulating film may increase. In this state, when a voltage is applied to the TFT, charges are induced on the surface of the channel portion of the semiconductor layer due to the influence of the interlayer insulating film polarized by moisture. As a result, there is a problem that the OFF current characteristics of the TFT deteriorate and display defects such as display unevenness occur.

  As one method for solving this problem, for example, a structure shown in Patent Document 2 has been proposed.

  In the active matrix substrate disclosed in Patent Document 2, an inorganic passivation film made of silicon nitride or the like is formed under the organic interlayer insulating film to protect the channel portion of the semiconductor layer. Further, the organic interlayer insulating film is formed of an organic material containing water-absorbing particles or moisture-adsorbing particles. As a result, deterioration of the OFF characteristics of the TFT due to moisture polarization is prevented.

JP-A-9-325330 (FIGS. 1 and 2) JP 2000-212488 A (FIGS. 1, 4 and 5)

  However, in the configuration disclosed in Patent Document 2, when the inorganic passivation film is etched, the insulating film portion below the passivation film is etched, and the pixel electrode and the auxiliary capacitance electrode are short-circuited. There is a fear.

  That is, in the active matrix substrate disclosed in Patent Document 2, in order to connect the drain electrode and the pixel electrode, it is necessary to form a contact hole by dry etching or the like of the inorganic passivation film. At this time, it is assumed that a pin hole exists in a metal film for forming a source electrode and a drain electrode, particularly in a contact hole forming portion of the metal film. Then, during the process of removing the passivation film by dry etching, the gate insulating film under the metal film may be simultaneously etched through the pinhole. As a result, the contact hole reaches the lower storage capacitor electrode through the gate insulating film, and the pixel electrode and the storage capacitor electrode are short-circuited to cause a display defect.

  Therefore, an object of the present invention is to provide an active matrix substrate having a high aperture ratio that can prevent an electrical short circuit between a pixel electrode and an auxiliary capacitance electrode.

An active matrix substrate according to the present invention includes a substrate, a gate wiring formed on the substrate, an auxiliary capacitance electrode having a hole, a first interlayer insulating film covering the gate wiring and the auxiliary capacitance electrode, A source wiring formed on the first interlayer insulating film so as to intersect the gate wiring, a semiconductor layer for constituting a switching element at the intersection of the gate wiring and the source wiring, and each switching A drain electrode provided corresponding to the element; a source wiring; a semiconductor layer; a second interlayer insulating film provided above the drain electrode; a reflective pixel electrode and a transparent pixel electrode in direct contact with each other; wherein, a pixel electrode connected to the drain electrode through the contact hole formed in the second interlayer insulating film, a portion of the drain electrode before A first interlayer insulating film is provided opposite to the auxiliary capacitance electrode, and at least a peripheral portion of the hole portion of the auxiliary capacitance electrode is opposed to the drain electrode with the first interlayer insulating film interposed therebetween. And the contact hole is formed so as to reach the drain electrode at a portion corresponding to the formation region of the hole.

  According to the active matrix substrate of the present invention, at least a peripheral portion of the hole portion of the auxiliary capacitance electrode is provided to face the drain electrode with the first interlayer insulating film interposed therebetween, and the contact hole is formed of the hole portion. Since it is formed so as to reach the drain electrode at the corresponding portion of the formation region, a situation in which the contact hole is formed to penetrate to the auxiliary capacitance electrode is prevented, and between the pixel electrode and the auxiliary capacitance electrode is prevented. Electrical short circuit can be prevented. In addition, since the pixel electrode can be disposed so as to overlap each wiring, a high aperture ratio can be achieved.

Embodiment 1 FIG.
The active matrix substrate according to Embodiment 1 of the present invention will be described below. Note that in this embodiment, an active matrix substrate which is applied to a transmissive liquid crystal display device is described.

  1 is a plan view showing an active matrix substrate, FIG. 2 is a sectional view taken along line AA in FIG. 1, and FIG. 3 is a sectional view taken along line BB in FIG.

  In this active matrix substrate, a plurality of gate wirings 2 (scanning wirings) and a plurality of auxiliary capacitance electrodes 3 are formed on a transparent insulating substrate 1 as a substrate (see FIGS. 4 and 9A). Each gate wiring 2 is formed in a straight line shape, and a plurality of gate wirings 2 are formed on the transparent insulating substrate 1 so as to extend in a substantially parallel shape at appropriate intervals. A portion of each gate wiring 2 where a semiconductor film 6 to be described later is formed functions as a gate electrode of the thin film transistor.

  Each auxiliary capacitance electrode 3 is formed in a region surrounded by each gate line 2 and each source line 9 (signal line) described later (see FIGS. 4 and 9A). Here, each auxiliary capacitance electrode 3 is provided in a substantially central portion of each adjacent gate wiring 2 and is formed in a substantially rectangular shape in plan view extending along the extending direction of the gate wiring 2. The auxiliary capacitance electrodes 3 are connected and connected to each other adjacent to each other in the extending direction of the gate wiring 2. Each auxiliary capacitance electrode 3 has a hole 3h.

  Each auxiliary capacitance electrode 3 faces a part of each drain electrode 10 to be described later via the first interlayer insulating film 5. Each storage capacitor electrode 3 and a part of the drain electrode 10 form an electrical storage capacitor. As a result, a display signal potential applied to the pixel electrode 15 described later is held, and a stable display is achieved.

  Further, a first interlayer insulating film 5 is formed on the transparent insulating substrate 1 so as to cover each gate wiring 2 and each auxiliary capacitance electrode 3 (see FIGS. 5 and 9B). A semiconductor film 6 and an ohmic contact film 7 are formed on the first interlayer insulating film 5 (see FIGS. 5 and 9B). The semiconductor film 6 is formed in a substantially linear shape, and a plurality of semiconductor films 6 are formed so as to extend in a substantially parallel shape along a direction substantially orthogonal to the gate wiring 2. The semiconductor film 6 has a semiconductor forming portion 6 a that extends along the extending direction of the gate wiring 2 at a portion where the semiconductor film 6 and the gate wiring 2 intersect. An ohmic contact film 7 is formed on the semiconductor film 6.

  One side of the semiconductor forming portion 6a is connected to a source electrode 8 described later, and the other side is connected to a drain electrode 10 described later. Further, a channel portion 11 is formed in a substantially middle portion of the semiconductor formation portion 6a. Thereby, a thin film transistor (TFT) as a switching element is configured.

  In the present embodiment, the semiconductor pattern having the semiconductor film 6 and the ohmic contact film 7 extends along the source wiring 9 below the source wiring 9. That is, the semiconductor pattern extends to the lower layer portion of each source wiring 9 in addition to the portion constituting the thin film transistor at the intersection of each gate wiring 2 and each source wiring 9. Thereby, even when the source wiring 9 is disconnected in the middle, a portion of the semiconductor pattern that extends to the lower layer portion of the source wiring 9 functions as a redundant wiring of the source wiring 9 and can prevent an electric signal from being interrupted. .

  A source wiring 9 and a drain electrode 10 are formed on the first interlayer insulating film 5 (see FIGS. 6 and 9C). The source wiring 9 is formed in a substantially linear shape, and a plurality of source wirings 9 are formed so as to extend in a substantially parallel shape along a direction intersecting with each gate wiring 2. Here, each source line 9 is formed on the semiconductor film 6 and the gate line 2. A source electrode 8 extends so as to extend along the extending direction of the gate wiring 2 at the intersection of the source wiring 9 and the gate wiring 2. The source electrode 8 is connected on one side of the semiconductor forming portion 6a.

  The drain electrode 10 has a shape extending to the upper region of the auxiliary capacitance electrode 3 and extending to the other side of the semiconductor forming portion 6a. Here, the drain electrode 10 is formed in a substantially T shape in plan view, and a portion extending in the width direction extends to an upper region of the auxiliary capacitance electrode 3, and the auxiliary capacitance is sandwiched between the first interlayer insulating film 5. Opposite the electrode 3. The drain electrode 10 and the auxiliary capacitor electrode 3 form a storage capacitor for a pixel electrode 15 described later.

  Further, a second interlayer insulating film 12 is formed so as to cover the first interlayer insulating film 5, the semiconductor pattern, the source electrode 8, the source wiring 9, and the drain electrode 10 (see FIGS. 7 and 9D). . The surface of the second interlayer insulating film 12 is formed flat.

  A contact hole 14 is formed in the second interlayer insulating film 12. The contact hole 14 is formed so as to penetrate the second interlayer insulating film 12 and reach the drain electrode 10 (see FIGS. 7 and 9D).

  Further, the contact hole 14 avoids the region where the auxiliary capacitance electrode 3 is disposed and reaches the drain electrode 10 at a portion surrounded by the region where the auxiliary capacitance electrode 3 is disposed. Here, the contact hole 14 is formed so as to reach the drain electrode 10 in a portion corresponding to the hole 3 h formation region formed in the auxiliary capacitance electrode 3. Here, the contact hole 14 is surrounded by the region where the auxiliary capacitance electrode 3 is disposed, as in this embodiment, the entire contact portion of the drain electrode 10 in the contact hole 14 from four directions. In addition to the aspect surrounded by the arrangement region of the contact hole 14, the entire contact portion of the contact hole 14 with the drain electrode 10 is surrounded by the arrangement region of the auxiliary capacitance electrode 3 from three or two directions. Of these, a part of the contact portion of the drain electrode 10 is surrounded by the region where the auxiliary capacitance electrode 3 is disposed from three directions or two directions.

  In other words, the contact hole 14 is formed so as to reach the drain electrode 10 at a portion overlapping the region where the auxiliary capacitance electrode 3 is to be formed in order to ensure a sufficient auxiliary capacitance for the pixel electrode 15. The actual formation region of the auxiliary capacitance electrode 3 is formed so as to avoid the portion where the contact hole 14 reaches the drain electrode 10, that is, the hole 3h is formed.

  Furthermore, a pixel electrode 15 is formed on the surface of the second interlayer insulating film 12 (see FIGS. 8 and 9E). Here, the pixel electrode 15 is formed so as to extend over substantially the entire rectangular region surrounded by the gate wiring 2 and the source wiring 9. The pixel electrode 15 is connected to the drain electrode 10 through the contact hole 14.

  A method for manufacturing the active matrix substrate configured as described above will be described. FIGS. 4 to 8 are plan process diagrams showing the manufacturing method, and FIGS. 9A to 9E are cross-sectional process diagrams showing the manufacturing method along the line AA in FIG.

  First, as shown in FIGS. 4 and 9A, a gate wiring 2 and an auxiliary capacitance electrode 3 are formed on a transparent insulating substrate 1 as a substrate.

  That is, a first metal thin film is formed on a transparent insulating substrate 1 such as a glass substrate, and each gate wiring 2 and each auxiliary capacitance electrode 3 are formed in the first photolithography process. At this time, each auxiliary capacitance electrode 3 is formed with a hole 3h.

More specifically, a chromium (Cr) film as the metal thin film is formed to a thickness of, for example, 200 nm on the transparent insulating substrate 1 by a known sputtering method using Ar gas. The sputtering conditions are, for example, a DC magnetron sputtering method, a film formation power density of 3 W / cm ² , and an argon (Ar) gas flow rate of 40 sccm.

  In the subsequent photoengraving step, a resist pattern is formed, the chromium film is etched using a known solution containing cerium ammonium nitrate, and then the resist pattern is removed, and each of the gate wirings 2 and the auxiliary wirings are removed. The capacitor electrode 3 is formed.

  Next, as shown in FIGS. 5 and 9B, a first interlayer insulating film 5, a semiconductor film 6, and an ohmic contact film 7 are formed.

  That is, the first interlayer insulating film 5 is formed on the transparent insulating substrate 1 so as to cover each gate wiring 2 and each auxiliary capacitance electrode 3. Next, a semiconductor film and an ohmic contact film are sequentially formed. In the second photoengraving step, the semiconductor film and the ohmic contact film are partially removed to form a semiconductor film 6 and an ohmic contact film 7 for constituting a thin film transistor (TFT) as a switching element. Form a pattern.

  More specifically, for example, using a chemical vapor deposition (CVD) method, a silicon nitride (SiNx: x is a positive number) film having a thickness of 400 nm as the first interlayer insulating film 5 is formed as a semiconductor film. An amorphous silicon (a-Si) film having a thickness of 150 nm and an n + type a-Si doped with phosphorus (P) as an impurity are sequentially formed as an ohmic contact film with a thickness of 30 nm. Next, after forming a resist pattern in the photolithography process, the a-Si film and the n + type a-Si film are etched by a known dry etching method using a fluorine-based gas. Thereafter, the resist pattern is removed to form a semiconductor pattern having the semiconductor film 6 and the ohmic contact film 7 having a predetermined shape. The channel portion 11 for the semiconductor formation portion 6a is formed in a later process.

  Next, as shown in FIGS. 6 and 9C, the source wiring 9, the source electrode 8, and the drain electrode 10 are formed on the first interlayer insulating film 5.

  That is, a second metal thin film is formed so as to cover the first interlayer insulating film 5 and the semiconductor pattern. Then, the source wiring 9, the source electrode 8, and the drain electrode 10 are formed in the third photolithography process.

  More specifically, for example, a chromium film is formed to a thickness of 200 nm using a sputtering method, and a resist pattern is formed by a photolithography process. Thereafter, the chromium film is etched using a solution containing ceric ammonium nitrate to form the source electrode 8, the source wiring 9, and the drain electrode 10. Further, the n + -type a-Si (ohmic contact film 7) between the source electrode 8 and the drain electrode 10 is etched using a known dry etching method using a fluorine-based gas to form a channel portion 11 of the thin film transistor. Thereafter, the resist pattern is removed.

  Next, as shown in FIGS. 7 and 9D, a second interlayer insulating film 12 is formed, and a contact hole 14 is formed in the second interlayer insulating film 12. The second interlayer insulating film 12 is formed so as to cover the semiconductor pattern, the source electrode 8, the source wiring 9 and the drain electrode 10. Here, the first insulating film 12a, which is an inorganic insulating film, is formed, and the second insulating film 12b, which is an organic insulating film, is formed thereon, whereby the second interlayer insulating film 12 is formed. It has a two-layer structure. However, the second interlayer insulating film 12 may have a multilayer structure including other layers, or may have a single layer structure formed of an inorganic insulating film such as silicon nitride or silicon oxide. . The contact hole 14 is formed in a bottomed hole shape penetrating from the surface of the second interlayer insulating film 12 to the surface of the drain electrode 10. The contact hole 14 is formed so as to reach the drain electrode 10 in an upper region corresponding to the hole 3 h formed in the auxiliary capacitance electrode 3.

  More specifically, for example, an inorganic insulating film such as SiNx (x is a positive number) is formed to a thickness of 100 nm as the first insulating film 12a. Thereafter, using a spin coating method or the like, a photosensitive organic resin (for example, a resin material of product number PC335 manufactured by JSR Corporation) is applied so as to have a film thickness of 3.2 to 3.9 μm. A second insulating film 12b made of an organic resin film is formed. Then, a contact hole 14a is formed in the second insulating film 12b made of a photosensitive organic resin film in the fourth photolithography process (see FIG. 10D for the contact hole 14a at this stage). The contact hole 14a is formed above the formation region of the hole 3h of the auxiliary capacitance electrode 3. Next, the first insulating film 12a (SiNx) below the contact hole 14a is etched away by a known dry etching method using fluorine gas. As a result, the contact hole 14 penetrates the first and second insulating films 12a and 12b and is formed in the drain electrode 10 in a region corresponding to the hole 3h, that is, a portion avoiding the region where the auxiliary capacitance electrode 3 is disposed. Formed to reach.

  Finally, as shown in FIGS. 8 and 9E, a plurality of pixel electrodes 15 are formed on the second interlayer insulating film 12, and each pixel electrode 15 is connected to each corresponding drain electrode through each contact hole 14. 10 to connect.

  More specifically, first, a transparent conductive film is formed on the second interlayer insulating film 12 and on the surface reaching the drain electrode 10 from the inner periphery of the contact hole 14. The transparent conductive film is formed, for example, by depositing ITO (Indium Tin Oxide) containing indium oxide (In 2 O 3) and tin oxide (SnO 2) to a thickness of 100 nm using a sputtering method or the like. Next, after forming a resist pattern in the fifth photolithography process, the transparent conductive film is etched with a known solution containing hydrochloric acid and nitric acid, and then the resist pattern is removed, thereby forming a transparent pixel electrode. 15 can be formed. Each pixel electrode 15 is connected to each drain electrode 10 through a contact hole 14.

  A TFT active matrix substrate is manufactured through the above steps. A liquid crystal display device is manufactured by disposing a substrate having a light-shielding plate, a color filter, a counter electrode, an alignment film, and the like on the active matrix substrate and providing a liquid crystal layer between these substrates.

  According to the active matrix substrate and the manufacturing method thereof configured as described above, a high aperture ratio can be realized while preventing an electrical short circuit between the pixel electrode 15 and the auxiliary capacitance electrode 3.

  The effect of preventing an electrical short circuit between the pixel electrode 15 and the auxiliary capacitance electrode 3 will be described with reference to FIGS. 10A to 10F are cross-sectional process diagrams taken along line AA in FIG. 1, and FIGS. 11A to 11F are cross-sectional process diagrams taken along line BB in FIG. Show.

  That is, when the active matrix substrate is manufactured, as shown in FIG. 10C or FIG. 11C, a film defect or a pinhole 18a may be defective in a part of the drain electrode 10. Such a defect is caused, for example, by a foreign matter generated at the time of forming the second metal thin film. When a film defect or pinhole 18a occurs in a part of the drain electrode 10, as shown in FIG. 10D or FIG. 11D, the first insulating film (SiNx) formed thereon is formed. ) A defective coverage portion 18b occurs at 12a. Then, after forming a contact hole 14a in the second insulating film 12b made of a photosensitive organic resin film or the like, as shown in FIG. 10E or FIG. 11E, a dry etching method using a fluorine-based gas or the like Thus, the first insulating film 12a under the contact hole 14a is removed by etching. At this time, the fluorine-based gas reaches the lower first interlayer insulating film 5 through the pinhole 18a and the like, and the first interlayer insulating film 5 is partially removed below the contact hole 14. become. That is, the contact hole 14 is formed so as to penetrate the pin hole 18 a of the drain electrode 10 from the second interlayer insulating film 12 and reach the first interlayer insulating film 5.

  In this case, if the auxiliary capacitance electrode 3 is provided below the contact hole 14 as in the conventional case (in other words, if there is no hole 3h of the auxiliary capacitance electrode 3), the pixel electrode 15 is contacted. The holes 14 are connected to both the drain electrode 10 and the auxiliary capacitance electrode 3. For this reason, the potential cannot be held between the drain electrode 10 and the auxiliary capacitance electrode 3 facing each other, and a display defect occurs in the corresponding pixel electrode 15.

  On the other hand, in the present active matrix substrate, the contact hole 14 is formed so as to reach the drain electrode 10 at a portion avoiding the region where the auxiliary capacitance electrode 3 is disposed. That is, the auxiliary capacitance electrode 3 is not disposed below the contact hole 14. For this reason, even when a pinhole 18a or the like is generated in the drain electrode 10 and the lower first interlayer insulating film 5 is partially etched, the lower transparent layer is formed below the contact hole 14. Only the insulating substrate 1 is exposed. Therefore, as shown in FIG. 10F, the pixel electrode 15 is only connected to the drain electrode 10 through the contact hole 14, and a situation in which the pixel electrode 15 is short-circuited with the auxiliary capacitance electrode 3 is prevented.

  In addition, as shown in FIG. 11 (f), in the region where the contact hole 14 is not formed, the drain electrode 10 and the auxiliary capacitance electrode 3 are opposed to each other with the first interlayer insulating film 5 interposed therebetween. A holding capacity is formed. For this reason, the signal potential applied to the pixel electrode 15 is normally maintained, and display failure is prevented.

  In particular, the auxiliary capacitance electrode 3 has a hole 3 h, and the peripheral portion of the hole 3 h of the auxiliary capacitance electrode 3 is provided so as to face the drain electrode 10 around the contact portion between the pixel electrode 15 and the drain electrode 10. Therefore, an electrical short circuit between the pixel electrode 15 and the auxiliary capacitance electrode 3 can be effectively prevented while forming a sufficient storage capacity for the pixel electrode 15.

  Further, as shown in FIG. 11C, even if a film defect or pinhole 18a occurs in the drain electrode 10 in a region where the contact hole 14 is not formed, the contact hole 14 itself is not formed. The interlayer insulating film 5 is not etched, and a short circuit between the drain electrode 10 and the auxiliary capacitance electrode 3 is prevented.

  Further, since the poor coverage portion 18b generated in the first insulating film (SiNx) 12a is completely covered with the second insulating film 12b made of a photosensitive organic resin film or the like provided thereon, the pixel electrode 15 and the auxiliary capacitance electrode 3 are also covered. Alternatively, it is possible to prevent an electrical short circuit from occurring between the drain electrode 10 and the auxiliary capacitance electrode 3.

  Of course, since the pixel electrode 15 can be arranged so as to overlap with various signal lines such as the gate wiring 2 and the source wiring 9, a high aperture ratio can be realized.

  As described above, according to the present embodiment, it is possible to prevent a display defect due to an electrical short between the pixel electrode 15 and the auxiliary capacitance electrode 3 and to obtain an active matrix substrate having a high yield. Furthermore, by using this active matrix substrate, a display device having a high aperture ratio and excellent display characteristics can be obtained.

  In particular, when the first interlayer insulating film 5 is composed of an inorganic insulating film containing silicon nitride or silicon oxide, there is a tendency that a problem of penetrating to the auxiliary capacitance electrode 3 occurs when the contact hole 14 is formed. More specifically, for example, the first interlayer insulating film 5 is composed of an inorganic insulating film containing silicon nitride or silicon oxide, and the second interlayer insulating film 12 is an inorganic system containing silicon nitride or silicon oxide. The above-mentioned problem is likely to occur when the insulating film or an inorganic insulating film containing silicon nitride or silicon oxide is used as a lower layer and an insulating layer is further formed thereon. In such a case, when the inorganic insulating film portion of the second interlayer insulating film 12 is etched, the first interlayer insulating film 5 may be etched through a pinhole or the like. Therefore, the present invention is particularly effective when the layer structure is as described above.

Embodiment 2. FIG.
Hereinafter, an active matrix substrate according to Embodiment 2 of the present invention will be described. Note that in this embodiment, an active matrix substrate which is applied to a transflective liquid crystal display device is described.

  12 is a plan view showing the active matrix substrate, FIG. 13 is a cross-sectional view taken along the line CC in FIG. 12, and FIG. 14 is a cross-sectional view taken along the line DD in FIG.

  The main points of the active matrix substrate according to the second embodiment different from the active matrix substrate according to the first embodiment will be described as follows. In addition, the same code | symbol is attached | subjected about the component similar to the component which concerns on the said Embodiment 1, and description is abbreviate | omitted.

  That is, in the first embodiment, the pixel electrode 15 is composed of only a transparent conductive film, whereas in the second embodiment, the pixel electrode portion for displaying pixels is a reflective film. The reflection pixel electrode 115a and the transparent pixel electrode 115b which is a transparent film are included. Here, in a region where the transparent pixel electrode 115b occupies substantially half of the pixel electrode portion (more specifically, a little more than the upper half of the pixel electrode portion), the reflective pixel electrode 115a is substantially half of the pixel electrode portion (more specifically, It is formed in a region indicating the lower half of the pixel electrode portion) and a region surrounding the transparent pixel electrode 115b (see FIGS. 20 and 21G). Further, the reflective pixel electrode 115a and the transparent pixel electrode 115b include the contact hole 14 and are formed in a region that partially overlaps the boundary portion and the periphery of the transparent pixel electrode 115b.

  In the first embodiment, the auxiliary capacitance electrode 3 is formed in a linear shape at the substantially central portion of the pixel electrode 15 so as not to prevent light transmission as much as possible. In the second embodiment, The auxiliary capacitance electrode 103 is formed over almost the entire formation region of the reflective pixel electrode 115a. Of the auxiliary capacitance electrode 103, a hole 103h is formed in a substantially central portion of a pixel electrode portion for displaying a pixel (see FIGS. 15 and 21A).

  Further, the drain electrode 110 is formed so as to extend over almost the entire formation region of the auxiliary capacitance electrode 103 (see FIGS. 17 and 21C).

  Further, in the transparent pixel electrode 115b portion, the first interlayer insulating film 5 and the second interlayer insulating film 12 are removed, and the transparent pixel electrode 115b is formed so as to be in direct contact with the transparent insulating substrate 1 (FIG. 21F). ) And FIG. 21 (g)).

  In such an active matrix substrate, the auxiliary capacitance electrode 103 can be formed over the entire formation region of the reflective pixel electrode 115a that reflects light. That is, since the transparent pixel electrode 115b displays an image using transmitted light, it is necessary to avoid providing a light-shielding electrode as a lower layer as much as possible. On the other hand, since the reflective pixel electrode 115a reflects light and displays an image, there is no problem even if the light-shielding auxiliary capacitance electrode 103 is formed in the lower layer, and the entire region where the reflective pixel electrode 115a is formed. In addition, the auxiliary capacitance electrode 103 can be formed. As a result, the area of the auxiliary capacitance electrode 103 can be increased, the holding capacity of the pixel display signal potential can be increased, and display quality can be improved.

  A method for manufacturing the active matrix substrate will be described. 15 to 20 are plan process diagrams showing the manufacturing method, and FIGS. 21A to 21G are cross-sectional process diagrams showing the manufacturing method along line CC in FIG.

  First, as shown in FIG. 15 and FIG. 21A, the gate wiring 2 and the auxiliary capacitance electrode 103 are formed on the transparent insulating substrate 1 as a substrate (refer to the region with vertical and horizontal lines in FIG. 15).

  That is, a first metal thin film is formed on a transparent insulating substrate 1 such as a glass substrate, and each gate wiring 2 and each auxiliary capacitance electrode 103 are formed in the first photolithography process. At this time, a hole 103 h is formed in each auxiliary capacitance electrode 103.

More specifically, a chromium (Cr) film as the metal thin film is formed to a thickness of, for example, 200 nm on the transparent insulating substrate 1 by a known sputtering method using Ar gas. The sputtering conditions are, for example, a DC magnetron sputtering method, a film formation power density of 3 W / cm ² , and an argon (Ar) gas flow rate of 40 sccm.

  In the subsequent photoengraving step, a resist pattern is formed, the chromium film is etched using a known solution containing cerium ammonium nitrate, and then the resist pattern is removed, and each of the gate wirings 2 and the auxiliary wirings are removed. A capacitor electrode 103 is formed.

  Next, as shown in FIGS. 16 and 21B, a first interlayer insulating film 5, a semiconductor film 6, and an ohmic contact film 7 are formed.

  That is, the first interlayer insulating film 5 is formed on the transparent insulating substrate 1 so as to cover each gate wiring 2 and each auxiliary capacitance electrode 103. Next, a semiconductor film and an ohmic contact film are sequentially formed. In the second photoengraving step, the semiconductor film and the ohmic contact film are partially removed to form a semiconductor film 6 and an ohmic contact film 7 for constituting a thin film transistor (TFT) as a switching element. Form a pattern.

  More specifically, for example, using a chemical vapor deposition (CVD) method, a silicon nitride (SiNx: x is a positive number) film having a thickness of 400 nm as the first interlayer insulating film 5 is formed as a semiconductor film. An amorphous silicon (a-Si) film having a thickness of 150 nm and an n + type a-Si doped with phosphorus (P) as an impurity are sequentially formed as an ohmic contact film with a thickness of 30 nm. Next, after forming a resist pattern in the photolithography process, the a-Si film and the n + type a-Si film are etched by a known dry etching method using a fluorine-based gas. Thereafter, the resist pattern is removed to form a semiconductor pattern having the semiconductor film 6 and the ohmic contact film 7 having a predetermined shape. The channel portion 11 for the semiconductor formation portion 6a is formed in a later process.

  The semiconductor pattern having the semiconductor film 6 and the ohmic contact film 7 extends along the source wiring 9 below the source wiring 9 as described in the first embodiment. It functions as a redundant wiring of the source wiring 9 as in the first mode.

  Next, as shown in FIGS. 17 and 21C, the source wiring 9, the source electrode 8, and the drain electrode 110 are formed on the first interlayer insulating film 5.

  That is, a second metal thin film is formed so as to cover the first interlayer insulating film 5 and the semiconductor pattern. Then, the source wiring 9, the source electrode 8, and the drain electrode 110 are formed in the third photolithography process.

  More specifically, for example, a chromium film is formed to a thickness of 200 nm using a sputtering method, and a resist pattern is formed by a photolithography process. Thereafter, the chromium film is etched using a solution containing ceric ammonium nitrate to form the source electrode 8, the source wiring 9, and the drain electrode 110. Further, the n + -type a-Si (ohmic contact film 7) between the source electrode 8 and the drain electrode 110 is etched using a known dry etching method using a fluorine-based gas to form the channel portion 11 of the thin film transistor. Thereafter, the resist pattern is removed.

  Next, as shown in FIGS. 18, 21 (d), and 21 (e), a second interlayer insulating film 12 is formed, and in the second interlayer insulating film 12, a concave punched pattern hole 116 and The contact hole 14 is formed.

  That is, the second interlayer insulating film 12 is formed so as to cover the semiconductor pattern, the source electrode 8, the source wiring 9, and the drain electrode 110. Here, the first insulating film 12a, which is an inorganic insulating film, is formed, and the second insulating film 12b, which is an organic insulating film, is formed thereon, thereby forming the second interlayer insulating film 12 in two layers. It has a structure.

  Further, the punched pattern hole 116 is formed in a hole shape that exposes the transparent insulating substrate 1 by removing the first interlayer insulating film 5 and the second interlayer insulating film 12 in the region.

  The contact hole 14 is formed in a bottomed hole shape penetrating from the surface of the second interlayer insulating film 12 to the surface of the drain electrode 110. The contact hole 14 is formed so as to reach the drain electrode 110 in an upper region corresponding to the hole 103 h formed in the auxiliary capacitance electrode 103.

  More specifically, for example, an inorganic insulating film such as SiNx (x is a positive number) is formed to a thickness of 100 nm as the first insulating film 12a. Thereafter, using a spin coating method or the like, a photosensitive organic resin (for example, a resin material of product number PC335 manufactured by JSR Corporation) is applied so as to have a film thickness of 3.2 to 3.9 μm. A second insulating film 12b made of an organic resin film is formed. Then, in the fourth photolithography process, contact holes 14a and punched pattern holes 116a are formed in the second insulating film 12b made of a photosensitive organic resin film (for the contact holes 14a and the punched pattern holes 116a at this stage). (Refer FIG.21 (d)). The contact hole 14 a is formed at a position above the formation region of the hole 103 h of the auxiliary capacitance electrode 103. The blank pattern hole 116a is formed so as to spread over a region where the transparent pixel electrode 115b is formed.

  Next, the first insulating film (SiNx) below the contact hole 14a is etched away by a known dry etching method using fluorine gas, and the first insulating film (SiNx) and the first insulating film below the punched pattern hole 116a are removed. The first interlayer insulating film 5 (SiNx) is removed (see FIG. 21E). As a result, a contact hole 14 that penetrates the second interlayer insulating film 12 and reaches the drain electrode 110 is formed in the corresponding region of the hole 103h, and the second interlayer insulating film 12 and the second insulating film in the corresponding region of the transparent pixel electrode 115b. A punched pattern hole 116 that penetrates through the one interlayer insulating film 5 and reaches the transparent insulating substrate 1 is formed.

  Thereafter, a plurality of pixel electrode portions including the transparent pixel electrode 115b and the reflective pixel electrode 115a are formed.

  That is, as shown in FIGS. 19 and 21 (f), a transparent conductive film is formed on the transparent insulating substrate 1 and the second interlayer insulating film 12, and a transmissive pixel portion is formed in the fifth photolithography process. A transparent pixel electrode 115b is formed as a first pixel electrode. The transparent pixel electrode 115b is formed in a pixel display region by transmission in a region (here, a square region) serving as each pixel, and extends to an inner region of the contact hole 14. It is connected to the drain electrode 110.

  More specifically, the transparent conductive film is formed, for example, from ITO (Indium Tin Oxide) containing indium oxide (In 2 O 3) and tin oxide (SnO 2) to a thickness of 100 nm using a sputtering method or the like. It is formed by. Next, in the fifth photolithography process, after forming a resist pattern, the transparent conductive film is etched with a known solution containing hydrochloric acid and nitric acid, and then the resist pattern is removed, whereby the transparent pixel electrode 115b. Can be formed.

  Then, as shown in FIGS. 20 and 21G, a metal thin film having high reflection characteristics is formed, and a reflective pixel electrode 115a is formed as a second pixel electrode in the sixth photolithography process.

  More specifically, the metal thin film having high reflection characteristics is formed by depositing molybdenum (Mo) or Mo alloy with a small amount of other elements added to Mo to a thickness of 100 nm using a sputtering method or the like. As a reflection film having high reflection characteristics, an aluminum (Al) or Al alloy obtained by adding a small amount of other elements to Al is formed to a thickness of 300 nm. Examples of the Mo alloy include a MoNb alloy to which niobium (Nb) is added and a MoW alloy to which tungsten (W) is added. Examples of the Al alloy include an AlNd alloy to which 0.5 to 3 wt percent of neodymium (Nd) is added. As described above, for example, a two-layer film of AlNd / MoNb or AlNd / MoW is formed as a metal thin film having high reflection characteristics.

  Thereafter, after patterning the resist using the sixth photolithography process, the two-layer film is etched using a solution containing phosphoric acid, nitric acid and acetic acid, and then the resist is removed, A reflective pixel electrode 115a was formed.

  Here, the MoNb alloy film or the MoW alloy film on the lower layer side of the reflective pixel electrode 115a prevents the disconnection failure of the film on the bottom surface of the contact hole 14, and the AlNd film on the ITO film that is the lower transparent pixel electrode 115b. It serves as a barrier layer that prevents direct contact.

  That is, if an AlNd film is formed directly on the ITO film surface which is the transparent pixel electrode 115b without forming a MoNb alloy film or MoW alloy film as a lower layer, an AlOx (aluminum oxide) reaction layer is formed at the interface between ITO and AlNd. Is generated and the electric resistance is increased, which causes a problem that an electric signal is not transmitted from the transparent pixel electrode 115b to the reflective pixel electrode 115a, resulting in display failure. Further, in the resist development process in the sixth photolithography, a battery reaction may occur between ITO and AlNd in the developer, and the transparent pixel electrode 115b may be reduced and corroded. Therefore, by interposing the MoNb alloy film or the MoW alloy film between the ITO film which is the transparent pixel electrode 115b and the AlNd film to prevent direct contact between the two, the transparent pixel electrode 115b and the reflective pixel electrode 115a It is possible to ensure electrical connection performance and prevent the occurrence of reductive corrosion of the transparent pixel electrode 115b in the developer.

  Through the above steps, an active matrix substrate for a transflective liquid crystal display device is manufactured. A substrate having a light-shielding plate, a color filter, a counter electrode, an alignment film, etc. is disposed opposite to this active matrix substrate, and a liquid crystal layer is provided between these substrates, so that both a transmission type and a reflection type are displayed. A possible transflective liquid crystal display device is manufactured.

  According to the active matrix substrate configured as described above and the manufacturing method thereof, the auxiliary capacitor electrode 103 is provided with the hole 103h, and the contact hole 14 reaches the drain electrode 110 at the corresponding part of the formation region of the hole 103h. Therefore, even if a film defect or pinhole occurs in the drain electrode 110, the reflective pixel electrode 115a, the transparent pixel electrode 115b, and the auxiliary capacitance electrode are formed for the same reason as described in the first embodiment. An electrical short circuit with 103 can be prevented, and a display defect due to the short circuit can be prevented. Thereby, a TFT active matrix substrate with a high yield can be manufactured.

  Furthermore, by using this TFT active matrix substrate, a display device having a high aperture ratio and excellent display characteristics can be obtained.

  In particular, in the second embodiment, since the pixel electrode portion for displaying the pixel includes the reflective pixel electrode 115a and the transparent pixel electrode 115b, the auxiliary capacitance electrode 103 is provided over the entire formation region of the reflective pixel electrode 115a. By forming the auxiliary capacitance electrode 103, the area of the auxiliary capacitance electrode 103 can be increased, whereby the auxiliary capacitance can be further increased and the display characteristics can be further improved.

{Modifications}
In addition, although the example which used the metal thin film of Cr was demonstrated as an electroconductive film, it is not restricted to this, It is possible to use various electroconductive films. For example, Mo, Mo alloy, Al, or Al alloy can be used. In these cases, the electrical resistance of the wiring or electrode can be reduced to about ½ to ¼ compared to the Cr thin film. it can.

  However, when Mo alloy or Al alloy is used, when the transparent pixel electrode 115b formed of the ITO film is etched with a solution containing hydrochloric acid and nitric acid, if there is a defect or the like in the interlayer insulating film, The solution may penetrate into the lower layer and cause severe corrosion of the Mo alloy or Al alloy, possibly increasing the defect rate. In such a case, it is preferable to form a transparent conductive film for forming the transparent pixel electrode 115b in an amorphous state. Because the transparent conductive film in an amorphous state is chemically unstable, for example, it can be etched with a weak acid such as oxalic acid (which does not corrode Mo alloy and Al alloy). This is because it is possible to prevent corrosion disconnection of the lower Mo alloy or Al alloy due to penetration.

  On the other hand, if the transparent conductive film in the amorphous state remains as it is, for example, when there is a step of forming the reflective pixel electrode 115a as in the second embodiment of the present invention, the reflective pixel electrode 115a When the metal thin film AlNd / MoNb or AlNd / MoW laminated film is etched, the transparent pixel electrode 115b is corroded from the amorphous transparent conductive film. Therefore, in such a case, after forming the transparent pixel electrode 115b in an amorphous state, it is preferable to leave it in a chemically stable crystallization state.

  As a suitable example of such a transparent conductive film, a ternary transparent conductive film obtained by adding zinc oxide (ZnO) to ITO (In 2 O 3 + SnO 2) to make it amorphous, or a conventionally known ITO film, As a sputtering gas, an ITO film made amorphous by forming a film in a mixed gas obtained by adding hydrogen (H2) gas or water (H2O) gas to Ar gas and oxygen (O2) gas, which is conventionally known, is used. Can do. The amorphous transparent conductive film according to these embodiments can be made into a chemically stable crystallized state by a heat treatment of usually about 170 to 250 degrees Celsius. Therefore, in the first embodiment, the heat treatment is performed after the completion of the step of FIG. 9E, and in the second embodiment, the heat treatment of about 200 degrees Celsius is performed after the step of FIG. Alternatively, by using a substrate preheating process or the like when the reflective pixel electrode 115a of FIG. 21G is formed by the third metal thin film sputtering, a transmissive pixel electrode made of a transparent conductive film, respectively. In a chemically stable crystalline state.

  Further, in the first and second embodiments, the active matrix substrate that can be used for the total transmission type liquid crystal display device or the semi-transmission type liquid crystal display device has been described. However, the present invention is a reflection in which all pixel portions reflect light. The present invention can also be applied to an active matrix substrate used in a total reflection type liquid crystal display device composed of pixel electrodes. In this case, a greater effect can be obtained.

  Further, the present invention is not limited to these active matrix substrates for liquid crystal display devices, but can be applied to other electro-optical display devices such as organic EL display devices. In other words, the present invention can be applied to various display devices including an electro-optic element that converts an electrical action such as current supply or voltage application into an optical action such as transmittance or luminance.

1 is a plan view showing an active matrix substrate according to Embodiment 1. FIG. It is the sectional view on the AA line of FIG. It is the BB sectional view taken on the line of FIG. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. FIG. 9A to FIG. 9E are cross-sectional process diagrams showing the manufacturing method along the line AA in FIG. FIGS. 10A to 10F are cross-sectional process diagrams taken along line AA in FIG. FIG. 11A to FIG. 11F are cross-sectional process diagrams taken along line BB in FIG. 5 is a plan view showing an active matrix substrate according to Embodiment 2. FIG. It is CC sectional view taken on the line of FIG. It is the DD sectional view taken on the line of FIG. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. It is a plane process drawing which shows the manufacturing method of an active matrix substrate. 21 (a) to 21 (g) are cross-sectional process diagrams showing the manufacturing method along the line AA in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Transparent insulating substrate, 2 Gate wiring, 3 Auxiliary capacity electrode, 3h Hole, 5 1st interlayer insulation film, 6 Semiconductor film, 8 Source electrode, 9 Source wiring, 10 Drain electrode, 12 2nd interlayer insulation film, 14 Contact hole, 15 pixel electrode.

Claims (6)

A substrate,
A gate wiring formed on the substrate, and an auxiliary capacitance electrode having a hole;
A first interlayer insulating film covering the gate wiring and the auxiliary capacitance electrode;
A source wiring formed on the first interlayer insulating film so as to intersect the gate wiring;
A semiconductor layer for forming a switching element at an intersection of the gate wiring and the source wiring;
A drain electrode provided corresponding to each of the switching elements;
A second interlayer insulating film provided above the source wiring, the semiconductor layer and the drain electrode;
A pixel electrode connected to the drain electrode through a contact hole formed in the second interlayer insulating film, including a reflective pixel electrode and a transparent pixel electrode that are in direct contact;
A portion of the drain electrode is provided opposite the storage capacitor electrode with the first interlayer insulating film interposed therebetween;
Of the auxiliary capacitance electrode, at least a peripheral portion of the hole is provided to face the drain electrode with the first interlayer insulating film interposed therebetween, and the contact hole is a portion corresponding to the formation region of the hole. An active matrix substrate formed to reach The active matrix substrate according to claim 1,
The auxiliary capacitor electrode is an active matrix substrate formed below the reflective pixel electrode . The active matrix substrate according to claim 1,
The auxiliary capacitor electrode is an active matrix substrate formed in the entire formation region of the reflective pixel electrode . An active matrix substrate according to any one of claims 1 to 3 ,
The reflective pixel electrode is an active matrix substrate in which an aluminum or aluminum alloy film is formed on a molybdenum or molybdenum alloy film . An active matrix substrate according to any one of claims 1 to 4 ,
The first interlayer insulating film is an active matrix substrate made of an intangible insulating film containing silicon nitride or silicon oxide .   (a) forming an auxiliary capacitance electrode having a gate wiring and a hole on the substrate;
  (b) forming a first interlayer insulating film so as to cover the gate wiring and the auxiliary capacitance electrode;
  (c) forming a semiconductor layer constituting the switching element;
  (d) forming a source wiring on the first interlayer insulating film so as to intersect the gate wiring;
  (e) forming a drain electrode so that at least a part faces the auxiliary capacitance electrode with the first interlayer insulating film interposed therebetween;
  (f) forming a second interlayer insulating film so as to cover the semiconductor layer, the source wiring, and the drain electrode;
  (g) forming a contact hole in the second interlayer insulating film so as to reach the drain electrode at a portion corresponding to the formation region of the hole of the auxiliary capacitance electrode;
  (h) forming a pixel electrode including a reflective pixel electrode and a transparent pixel electrode that are in direct contact with each other on the second interlayer insulating film and connected to the drain electrode through the contact hole;
  For manufacturing an active matrix substrate.

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