JP4293042B2 - Drawing method using liquid droplet ejection apparatus, liquid droplet ejection apparatus, and electro-optical device manufacturing method - Google Patents

Description

The present invention is drawn to methods and droplet discharge device using a droplet discharge device for discharging the functional liquid droplet on the pixel region on the substrate, as well as about the preparation how the electro-optical device.

Conventionally, an inkjet head (functional liquid droplet ejection head) is disposed in a longitudinal direction of a colored portion (a liquid droplet discharge head) on a substrate such as a color filter in which a large number of colored portions (pixel regions) are arranged in a matrix in the main scanning direction and the sub-scanning direction. A drawing method using a droplet discharge device that discharges ink droplets (functional droplets) from an inkjet head to each colored portion while moving in the main scanning direction is known. Then, at both ends in the longitudinal direction of each colored portion, when the landing position of the ink droplet is shifted in the longitudinal direction of the colored portion, it should be prevented from landing on the colored portion adjacent in that direction. Ink droplets with a large discharge amount are ejected at the center in the longitudinal direction of each colored portion so that no dot dropout occurs at each colored portion. It is considered to discharge (large droplets). In addition, in the case of such a drawing method, when dot missing occurs at both ends in the longitudinal direction of the colored portion, it has been proposed to discharge a plurality of ink droplets with a small discharge amount and further reduce the discharge pitch. (See Patent Document 1).
JP 2001-154008 A

  However, even if a drawing method using a conventional droplet discharge device is used, at the both ends in the longitudinal direction of the portion to be colored, only a central portion in the width direction discharges an ink droplet with a small discharge amount. Therefore, there is a problem that the ink cannot be sufficiently spread at both ends in the width direction (the corners of the colored portion), and the entire colored portion cannot be filled (dot missing). It was.

The present invention relates to a drawing method, a droplet discharge device, and an electro-optical device using a droplet discharge device capable of filling the entire area of a pixel region with a functional liquid while suppressing landing of a functional droplet on a bank unit. an object of the present invention is to provide a manufacturing how.

In the drawing method using the droplet discharge device of the present invention, a large number of nozzles capable of controlling the droplet discharge amount are provided on a substrate in which a plurality of pixel regions partitioned by a bank portion are arranged in the main scanning direction and the sub-scanning direction. While moving the functional liquid droplet ejection head relatively in the main scanning direction and the sub scanning direction, a plurality of shots of functional liquid droplets are ejected and landed in each of the plurality of pixel areas so that the entire area of each pixel area is functional liquid Is a drawing method using a droplet discharge device that performs a drawing operation so as to satisfy the above, and discharges and lands a small droplet with a small droplet discharge amount from each nozzle to the peripheral portion of each pixel region, A discharge step is performed in which a large droplet with a large droplet discharge amount is discharged and landed from each nozzle to the central portion of the pixel region to perform a drawing operation . Of small droplets and And discharging the large droplet to discharge and the central portion of the droplets to both edges site of the main scanning direction in the section, characterized in that takes place in different main scanning from each other.

The liquid droplet ejection apparatus according to the present invention also includes a functional liquid droplet ejection head having a number of nozzles in the main scanning direction and a substrate in which a plurality of pixel regions partitioned by a bank unit are arranged in the main scanning direction and the sub scanning direction. Droplet discharge that performs drawing operation so that the entire area of each pixel area is filled with the functional liquid by discharging and landing multiple shots of functional liquid droplets in each of the plurality of pixel areas while relatively moving in the sub-scanning direction An apparatus comprising a functional liquid droplet ejection head, a functional liquid droplet ejection head, a moving means for moving the functional liquid droplet ejection head relative to the substrate in the main scanning direction and the sub scanning direction, and a moving means Control means for controlling the discharge timing and the droplet discharge amount of a large number of nozzles, and the control means controls the liquid from each nozzle to the peripheral edge of each pixel region during the drawing operation. And discharging the small discharge amount small droplets from the nozzles to the central portion of the discharge and the respective pixel regions of the small droplets of the opposite end edges site of the main scanning direction in the peripheral portion of the large large droplet of the droplet ejection volume The ejection is performed by different main scans .

According to this configuration, the entire area of the pixel region can be filled with the functional liquid by ejecting and landing the functional liquid droplets on the peripheral edge and the center of each pixel area. That is, since the small droplets are ejected and landed on the peripheral portion, even if the ejected functional droplets land on the respective pixel areas in the main scanning direction or the sub-scanning direction, Liquid droplets do not adhere to the bank portion or flow into adjacent pixel areas, and color unevenness or color mixing between a plurality of pixel areas can be prevented. Furthermore, since large droplets are ejected and landed on the central portion, the entire pixel area can be filled with the functional liquid with a small number of shots, and the drawing operation can be performed efficiently.
In addition, according to this configuration, the small liquid droplets are ejected from the peripheral edge portions in the sub-scanning direction at the both end edge portions and the large liquid droplets are ejected from the central portion at intervals. Are close to each other and do not land in the pixel region almost simultaneously. For this reason, the small droplets that have landed on the peripheral edge are not drawn into the large droplets that are vibrating immediately after the landing. Therefore, the functional liquid droplets can be landed with high precision at the edge portions in the sub-scanning direction at the peripheral edge, and it is possible to surely prevent the dot dropout caused by the functional liquid droplet ejection timing.
The vibration immediately after the landing of the functional droplet is a deformation behavior in which the vertical axis of the landed functional droplet changes for a few tens of microseconds from landing, that is, the landed functional droplet is flattened on the workpiece. It refers to a periodic behavior that repeats a behavior (short change) of trying to become and a behavior (long change) of going up.

  In the drawing method and the droplet ejection apparatus using the above-described droplet ejection device, the functional droplet ejection head has a nozzle pitch of a large number of nozzles in the sub-scanning direction that is smaller than the landing diameter of the small droplets landed in the pixel region. It is preferable to be configured to be small.

  According to this configuration, the entire functional area of the pixel area can be functioned by simply ejecting the functional liquid droplets (main scanning is performed) while moving the functional liquid droplet ejection head relative to the pixel area in the main scanning direction. The liquid can be filled with liquid, and there is no need to move the functional liquid droplet ejection head relatively in the sub-scanning direction.

  In this case, it is preferable that the large number of nozzles constitute one drawing line and n nozzle rows parallel to the sub-scanning direction.

  According to this configuration, since the n nozzle rows are not inclined with respect to the sub-scanning direction, there is no need to change the discharge timing among a plurality of nozzles in the same nozzle row. Therefore, it is not necessary to perform complicated ejection drive control on the functional droplet ejection head.

  In this case, the pitch in the nozzle row of the plurality of nozzles in each nozzle row is n times the nozzle pitch, and the n nozzle rows are arranged such that a large number of nozzles are arranged at the nozzle pitch in the sub-scanning direction. It is preferable that they are displaced in the sub-scanning direction and arranged in the main scanning direction.

According to this configuration, even when a functional liquid droplet ejection head is used in which a plurality of nozzles form a nozzle row with a relatively large pitch within the nozzle row, the nozzle pitch of a large number of nozzles in the sub-scanning direction It can be configured to a desired pitch, and the nozzle pitch can be made smaller than the nozzle diameter.
In this case, the functional liquid droplet ejection head is preferably composed of a plurality of unit heads having one or a plurality of nozzle rows out of the n nozzle rows. According to this, since the functional liquid droplet ejection head is composed of a plurality of unit heads, the same type of unit head can be mass-produced, and thus the functional liquid droplet ejection head can be manufactured at low cost.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

According to this configuration, since it is manufactured using a droplet discharge device that can fill the entire area of the pixel area with the functional liquid without causing color unevenness or color mixing between the plurality of pixel areas, highly reliable electric An optical device can be manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device.

  Hereinafter, embodiments of a droplet discharge device according to the present invention will be described with reference to the accompanying drawings. This liquid droplet ejection device introduces a functional liquid such as special ink or light-emitting resin liquid into a functional liquid droplet ejection head, and forms a film forming portion with functional liquid droplets on a substrate such as a color filter. is there. Therefore, first, a substrate that is a functional liquid droplet ejection target (drawing target) by the liquid droplet ejection apparatus will be briefly described.

  As shown in FIG. 1, on the substrate W of the color filter 500, a plurality of panel formation regions Wa are arranged in a matrix. The panel formation region Wa is an electro-optical device such as a color filter by being cut out individually after a manufacturing process such as a drawing process by a droplet discharge device 1 (see FIG. 3) described later. Further, substrate alignment marks Wm and Wm are formed on the left and right short sides of the substrate W, respectively, and the position of the substrate W introduced into the droplet discharge device 1 is recognized by the substrate alignment marks Wm and Wm. .

  As shown in FIG. 2A, each panel forming area Wa has a vertical bank portion 507bv extending in the vertical direction (vertical direction in the figure) and a horizontal bank extending in the horizontal direction (horizontal direction in the figure). A plurality of pixel regions 507a partitioned by partition wall portions 507b (bank portions) made up of bank portions 507bh are arranged in a matrix. Each pixel region 507a is a concave portion surrounded by a partition wall portion 507b, and R (red), G (green), and B (blue) three-color film forming portions ( When the colored layers 508R, 508G, and 508B) are formed, they become the landing areas of the functional liquid droplets (see FIG. 14). The arrangement pattern of the plurality of pixel regions 507a is a stripe arrangement in which all the columns in the matrix have the same color. However, any three pixels arranged in the columns and rows of the matrix are R, G, and B. It may be a mosaic arrangement of colors. Further, a delta arrangement in which the plurality of pixel regions 507a staggers may be used.

  Although details will be described later, when the substrate W is introduced into the droplet discharge device 1, the vertical and horizontal directions of the matrix of the plurality of pixel regions 507a (each pixel region 507a) are formed by the substrate alignment marks Wm and Wm. The position is corrected so that the main scanning direction and the sub-scanning direction of the droplet discharge device 1 are parallel to each other.

  As shown in FIG. 2B, the plurality of pixel regions 507a are configured to have a resolution of 80 ppi in a color filter used in, for example, a 40-inch high-definition television, and are in the horizontal direction (sub-scanning direction) of the matrix. The pixel pitch PDh is arranged at about 320 μm, and the pixel pitch PDv in the vertical direction (main scanning direction) of the matrix is arranged at about 180 μm. In this case, each pixel region 507a has a pixel dimension LL in the longitudinal direction (sub-scanning direction) of approximately 300 μm and a pixel dimension LW in the width direction (main scanning direction) of approximately 100 μm. That is, the width Wv of the vertical bank portion 507bv is approximately 20 μm, and the width Wh of the horizontal bank portion 507bh is approximately 80 μm. The amount of droplet landing on each pixel region 507a is about 700 picoliters, for example, and approximately 2.8 picoliters or approximately 10 picoliters of functional liquid from each nozzle 75 (see FIG. 4) of the functional liquid droplet ejection head 16. A plurality of droplets are shot (details will be described later).

  2B, reference numerals 507ar and 507ac in FIG. 2B are a peripheral part and a central part of the pixel area 507a, respectively, and reference numerals 507am and 507as are both end edge parts (lateral ends in the main scanning direction) in the peripheral part 507ar, respectively. Edge portion) and both end edge portions (vertical both end edge portions) in the sub-scanning direction.

Further, as will be described later, the partition wall portion 507b (bank 503, see FIG. 14) is made of a lyophobic (hydrophobic) resin material, so that even if functional droplets land on the partition wall portion 507b, The functional liquid droplet flows into the adjacent pixel region 507a. On the other hand, the surface of the substrate W composed of a glass plate (quartz glass) is lyophilic (hydrophilic) by the surface treatment, and the landed functional droplets are 5 ° to 15 ° with respect to the substrate W. It has a spherical crown shape (dome shape) with a contact angle φ (see FIG. 7). However, the ejected functional liquid droplets vibrate immediately after landing (several tens of microseconds after landing) on the substrate W (deformation behavior in which the vertical axis of the functional liquid droplet changes long and short). It becomes a spherical crown and is in a stable state.
The structure of an electro-optical device such as a color filter and the manufacturing method thereof will be described in detail later.

  Next, the droplet discharge device according to the present invention will be described. As shown in FIG. 3, the droplet discharge device 1 includes a machine base 2, a drawing device 3 that is widely placed on the entire area of the machine base 2, and a head function recovery that is installed at the end of the machine base 2. And a maintenance system moving table 5 on which various units of the head function recovery device 4 are collectively mounted and moved on the machine base 2, and the function recovery of the functional liquid droplet ejection head 16 is performed by the head function recovery device 4. In addition to performing the processing, a drawing operation for discharging functional droplets onto the substrate W is performed by the drawing apparatus 3. Furthermore, although not shown in the figure, the liquid droplet ejection apparatus 1 includes a functional liquid supply mechanism 6 (see FIG. 8) including a liquid supply tank that supplies functional liquid to each functional liquid droplet ejection head 16, and the like. A control device 7 (see FIG. 8) and the like for controlling each component device such as the drawing device 3 and the head function recovery device 4 are incorporated.

  First, the drawing device 3 of the droplet discharge device 1 and the drawing operation by this will be described. The drawing apparatus 3 includes an XY movement mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, a main carriage 14 that is movably attached to the Y-axis table 13, and a main carriage 14 that is suspended from the main carriage 14. The head unit 15 is provided. A plurality (24) of functional liquid droplet ejection heads 16 (indicated by a single rectangle in FIG. 3) are mounted on the head unit 15 via a sub-carriage 51 (see FIG. 4). The substrate W is mounted in a state of being positioned on the X-axis table 12 by a pair of substrate recognition cameras 17 and 17 facing the end of the X-axis table 12.

The X-axis table 12 includes a set table 22 including a suction table 23 on which a substrate W is sucked and mounted, a substrate θ-axis table 24, and the like, and an X-axis slider that slidably supports the set table 22 in the X-axis direction (main scanning direction). 21, a pair of X-axis linear motors (not shown) that extend in the main scanning direction and move the substrate W in the main scanning direction via the set table 22, and a pair of X-axis linear motors. And a pair of X-axis guide rails (not shown) for guiding the movement of the X-axis slider 21. When the pair of X-axis linear motors are driven, the X-axis slider 21 moves in the main scanning direction while using the pair of X-axis guide rails as guides, and the substrate W set on the set table 22 moves in the main scanning direction. An X-axis linear scale (not shown) is provided between the pair of X-axis guide rails. Although details will be described later, the timing signal supply means 122 (see FIG. 9) The position of the set table 22 that moves the table 12 is accurately grasped, and the ejection timing reference pulse to be supplied to the drive waveform generating means 123 (see FIG. 9) is obtained.
Although not shown in FIG. 3, a head recognition camera 25 (see FIG. 8) is fixed to the substrate θ-axis table 24, and the position of the head unit 15 can be corrected with respect to the set table 22. Yes.

  Similarly, the Y-axis table 13 extends in the Y-axis direction (sub-scanning direction), a bridge plate (not shown) that suspends the main carriage 14, a Y-axis slider 31 that supports the bridge plate, and a Y-axis. A pair of Y-axis linear motors (not shown) that move the bridge plate in the sub-scanning direction via the slider 31 and a pair of Y-axis guide rails that are arranged in parallel to the pair of Y-axis linear motors and guide the movement of the bridge plate (Not shown) and a Y-axis linear scale (not shown) for detecting the moving position of the bridge plate. When the Y-axis linear motor is driven, the Y-axis slider 31 translates in the sub-scanning direction using the Y-axis guide rail as a guide, and moves the bridge plate in the sub-scanning direction.

  The X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right columns 33, 33 erected on the machine base 2. The X-axis table 12 and the maintenance system moving table 5 are arranged in parallel to each other in the main scanning direction, and the Y-axis table 13 extends so as to straddle the X-axis table 12 and the maintenance system moving table 5. is doing.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 41 positioned immediately above the X-axis table 12 and the function recovery area 42 positioned directly above the maintenance system moving table 5. Move appropriately between. In other words, the Y-axis table 13, when drawing on the substrate W introduced into the X-axis table 12, faces the head unit 15 to the drawing area 41 and performs the function recovery process of the functional liquid droplet ejection head 16. Causes the head unit 15 to face the function recovery area 42.

On the other hand, one end of the X-axis table 12 serves as a substrate introduction area 43 for setting the substrate W on the X-axis table 12. The substrate introduction area 43 includes the pair of substrate recognition cameras 17, 17 is disposed. The pair of substrate recognition cameras 17 and 17 simultaneously recognize the two substrate alignment marks Wm and Wm of the substrate W supplied on the suction table 23, and the alignment of the substrate W is performed based on the recognition result. Done.
As described above, when the substrate W is θ-corrected, the vertical and horizontal rows of the matrix of the plurality of pixel regions 507a are parallel to the main scanning direction and the sub-scanning direction, respectively. Therefore, the substrate W is set in a state where a plurality of pixel regions 507a are arranged in a matrix in the X-axis direction (main scanning direction) and the Y-axis direction (sub-scanning direction) with respect to the functional liquid droplet ejection head 16. Will be set to 22.

  As shown in FIG. 4, the head unit 15 is provided for attaching the sub-carriage 51, 24 functional liquid droplet ejection heads 16 mounted on the sub-carriage 51, and each functional liquid droplet ejection head 16 to the sub-carriage 51 individually. 24 head holding members (not shown). Each functional liquid droplet ejection head 16 has two nozzle rows 74 composed of a plurality (180) of nozzles 75. In the head unit 15 mounted on the liquid droplet ejection device 1, each nozzle row is arranged. 74 is parallel to the sub-scanning direction. According to this, since the two nozzle rows 74 are not inclined with respect to the sub-scanning direction, there is no need to change the discharge timing between the plurality of nozzles 75 in the same nozzle row 74.

Twenty-four functional liquid droplet ejection heads 16 are divided into left and right halves. Furthermore, each of the twelve functional liquid droplet ejection heads 16 is divided into three groups of four, and the three functional liquid droplet ejection heads 16 are arranged in a stepped manner so that they are displaced from each other in the main scanning direction. Has been. That is, one drawing line LP is constituted by a large number of nozzles 75 of 24 functional liquid droplet ejection heads 16, and a partial drawing line LPp is constituted by four functional liquid droplet ejection heads 16 in each group. It has become.
Although not shown in FIG. 4, the four functional liquid droplet ejection heads 16 in each set are slightly displaced from each other in the sub-scanning direction (details will be described later). However, the number and arrangement of the functional liquid droplet ejection heads 16 are arbitrary. For example, a plurality of functional liquid droplet ejection heads 16 may be arranged in a line in the sub-scanning direction. The head unit 15 may be configured as described above.

  The sub-carriage 51 has a substantially square head plate 52 and a pair of left and right reference pins 53 and 53 provided at an intermediate position in the short side direction of the head plate 52 and projecting from the back surface. The head plate 52 is made of a thick plate such as stainless steel, and has mounting openings (not shown) for mounting the 24 functional liquid droplet ejection heads 16. The pair of reference pins 53 and 53 serves as a reference for positioning the head unit 15 in the X-axis, Y-axis, and θ-axis directions by image recognition of the head recognition camera 25.

  Further, although not shown, the sub-carriage 51 includes 24 head-side piping members respectively connected to the 24 functional liquid droplet ejection heads 16 and 24 apparatus sides connected to the liquid supply tank of the functional liquid supply mechanism. Piping joints are provided for detachably connecting the piping members. Further, a wiring connection assembly connected to the functional droplet discharge heads 16 is provided above the 24 functional droplet discharge heads 16. The wiring connection assembly is connected to a head driver 111 (see FIG. 8) described later via a flexible flat cable.

  As shown in FIG. 5, the functional liquid droplet ejection head 16 has a so-called double structure, and includes a functional liquid introduction part 61 having two connection needles 62 and 62, and two series of functional liquid introduction parts 61 connected to the functional liquid introduction part 61. A head substrate 63 and a head main body 64 which is connected to the lower side (upper side in the figure) of the functional liquid introducing portion 61 and has an in-head flow path filled with the functional liquid therein. Although not shown, each connection needle 62 is connected to the head side piping member via a pipe adapter, and the functional liquid introduction unit 61 is supplied with the functional liquid from each connection needle 62. The head body 64 includes a dual pump unit 71 composed of a piezoelectric vibrator or the like, and a nozzle plate 72 having a nozzle surface 73 in which two nozzle rows 74 and 74 are formed in parallel to each other. is doing. Each nozzle row 74 is configured by 180 nozzles 75 arranged at an equal pitch.

  As shown in FIG. 6, the nozzle diameter Rn of each nozzle 75 is, for example, 25 μm. The length Ln of each nozzle row 74 is, for example, 1 inch (approximately 25.4 mm), and the nozzle row pitch PNi of the 180 nozzles 75 is approximately 140 μm. The two nozzle rows 74 are formed so as to be displaced from each other in the nozzle row direction (sub-scanning direction) by a length (approximately 70 μm) of ½ times the nozzle row pitch PNi. Further, the above-mentioned four functional liquid droplet ejection heads 16 are displaced from each other in the nozzle row direction (sub-scanning direction) by a length (approximately 17.5 μm) that is 1/8 times the nozzle row pitch PNi. Thus, the head plate 52 is disposed.

  Therefore, each set of four functional liquid droplet ejection heads 16 has a nozzle pitch PN of a large number of nozzles 75 in the sub-scanning direction such that the nozzle row pitch PNi is 1/8 times the pitch (approximately 17.5 μm). It is configured. That is, in each group of four functional liquid droplet ejection heads 16, the nozzle row pitch PNi of the plurality of nozzles 75 in each nozzle row 74 is eight times the nozzle pitch PN, and the eight nozzle rows 74 are A large number (180 × 8) of the nozzles 75 are displaced in the sub-scanning direction and arranged in the main scanning direction so as to be arranged at the nozzle pitch PN in the sub-scanning direction. According to this, even when the functional liquid droplet ejection head 16 in which the nozzle array 74 is configured with 180 nozzles 75 having a relatively large nozzle array pitch PNi (approximately 140 μm), the nozzle pitch PN is used. Can be configured to have a desired pitch (approximately 17.5 μm).

In this embodiment, in each group of four functional liquid droplet ejection heads 16, the arrangement order in the sub-scanning direction is different from the arrangement order in the main scanning direction, but the arrangement order in the sub-scanning direction is different from the main scanning direction. The nozzle pitch PN of a large number of nozzles 75 may be configured to be 1/8 times the nozzle row pitch PNi.
In addition, each functional liquid droplet ejection head 16 has a larger ejection amount from the nozzles 75 located at both ends of the flow path in the head than the ejection amount from the nozzle 75 located at the center. For example, functional droplets are ejected from only the 160 nozzles 75 from the 11th to the 170th, and no functional droplets are ejected from the 20 nozzles from the 1st to the 10th and from the 171st to the 180th. It is preferable to do.

  On the other hand, as shown in FIG. 5, the head substrate 63 is provided with two connectors 76, 76, and each connector 76 is connected to the head driver 111 through the above-described wiring connection assembly. Then, in accordance with the ejection timing reference pulse output from the timing signal supply means 122, a drive waveform is applied from the control device 7 to each pump section 71 via the head driver 111 (details will be described later). In addition, the discharge frequency of each nozzle 75 is about 10 kHz, for example.

  In this case, since the pressure fluctuation range generated in the pressure generating chamber changes according to the magnitude of the drive waveform for each pump section 71 (the magnitude of the applied voltage value), a plurality of types with different applied voltage values are applied to each pump section 71. By applying this driving waveform, a plurality of types of functional liquid droplets having different liquid droplet ejection amounts can be ejected from each nozzle 75. In this way, the control device 7 controls the discharge timing and the droplet discharge amount of the functional droplet discharge head 16 via the head driver 111.

  As shown in FIG. 7, in this embodiment, for each nozzle 75, a small drive waveform with a small voltage value (see FIG. 7A) and a large drive waveform with a large voltage value (see FIG. 7E). When the small drive waveform is applied, each nozzle 75 discharges a small droplet DRs with a small droplet discharge amount (approximately 2.8 picoliters) (FIG. 5B). )), When a large driving waveform is applied, a large droplet DRb having a large droplet discharge amount (approximately 10 picoliters) is discharged (see FIG. 8F).

  The small droplet DRs and the large droplet DRb that have landed in each pixel region 507a vibrate immediately after the landing (see (c) and (g) in the figure). Thereafter, the contact angle φ with the substrate W is made, the landing diameter RDs of the small droplet DRs is about 20 μm (see FIG. 4D), and the landing diameter RDb of the large droplet DRb is about 30 μm ( (See (h) in the figure). Therefore, the functional liquid droplet ejection head 16 is configured such that the nozzle pitch PN (approximately 17.5 μm) of the large number of nozzles 75 in the sub-scanning direction is smaller than the landing diameter RDs (approximately 20 μm) of the small liquid droplet DRs. Yes. According to this, the entire area of the pixel area 507a can be obtained by simply ejecting the functional liquid droplets (main scanning is performed) with respect to each pixel area 507a while moving the functional liquid droplet ejection head 16 relatively in the main scanning direction. It is possible to spread the functional liquid (see FIG. 12). Accordingly, it is not necessary to relatively move the functional liquid droplet ejection head 16 in the sub-scanning direction, so that the drawing operation can be performed efficiently (details will be described later).

Here, with reference to FIG. 1, a series of ejection operations (drawing operations) of the drawing apparatus 3 on the substrate W will be briefly described. First, as a preparation before ejecting functional droplets, alignment of the substrate W and the functional droplet ejection head 16 in a plane parallel to the substrate W is performed.
That is, when the head unit 15 for the substrate W to be used for work is brought into the droplet discharge device 1 and set on the main carriage 14, the Y-axis table 13 moves the head unit 15 to the position of the head recognition camera 25 (drawing). By moving to the area 41) and detecting the reference pin 53 by the head recognition camera 25, the position of the head unit 15 is recognized. Based on the recognition result, the head unit 15 is θ-corrected by the head θ-axis table 32 of the main carriage 14, and the position correction of the head unit 15 in the main scanning direction and the sub-scanning direction is performed on the data. After the position correction, the head unit 15 returns to the home position. On the other hand, when the substrate W is introduced on the set table 22 of the X-axis table 12 in the substrate introduction area 43, two substrate alignment marks Wm and Wm are detected by the pair of substrate recognition cameras 17 and 17 at this position. As a result, the position of the substrate W is recognized. Then, based on the recognition result, the substrate W is θ-corrected by the substrate θ-axis table 24, and the position correction of the substrate W in the main scanning direction and the sub-scanning direction is performed on the data. After the position correction, the substrate W returns to the home position. In this way, the alignment between the substrate W and the functional liquid droplet ejection head 16 is completed.

As will be described in detail later, the drawing device 3 is controlled by the control device 7 with the movement of the substrate W in the X-axis direction as main scanning and the movement of the head unit 15 in the Y-axis direction as sub-scanning. The small droplets DRs are discharged and landed from the nozzles 75 to the peripheral portion 507ar of each pixel region 507a, and the large droplets DRb are discharged and landed from the nozzles 75 to the central portion 507ac of each pixel region, Drawing is performed on the substrate W. That is, with the head unit 15 facing the drawing area 41, a plurality of shots of functional liquid droplets are ejected and landed in each of the plurality of pixel regions 507a in synchronization with the reciprocation of the substrate W by the X-axis table 12. Main scanning is performed. Further, the head unit 15 is appropriately reciprocated by the Y-axis table 13 to perform sub-scanning. By this series of operations, desired functional droplets are selectively ejected onto the substrate W, that is, a drawing operation is performed. A plurality of panels can be obtained by individually cutting out all the panel forming regions Wa of the substrate W color-drawn with the functional liquids of three colors of R, G, and B.
In the present embodiment, the substrate W is moved in the main scanning direction with respect to the head unit 15, but the head unit 15 may be moved in the main scanning direction. Alternatively, the head unit 15 may be fixed and the substrate W may be moved in the main scanning direction and the sub-scanning direction. In the present embodiment, the functional liquid droplets are ejected (reciprocating drawing operation) during both the forward movement and the backward movement, but the functional liquid droplets may not be ejected during the backward movement.

  Next, with reference to FIG. 3, the head function recovery device 4 in the droplet discharge device 1 and the function recovery processing of the function droplet discharge head 16 by this will be briefly described. The function recovery process of the functional droplet discharge head 16 is performed by moving the various units of the head function recovery device 4 placed on the maintenance system moving table 5 to the function recovery area 42 and using the Y-axis table 13 as described above. This is done by moving the head unit 15 to the function recovery area 42.

  The maintenance system moving table 5 extends in the longitudinal direction (main scanning direction) of the main body 2 and has a common base 91 on which various units of the head function recovery device 4 that performs function recovery processing are distributed and placed. And a pair of guide rails 92 that slidably support the common base 91 in the main scanning direction, and a motor-driven X-axis moving mechanism (not shown), which are dispersedly placed on the common base 91. Various units of the head function recovery device 4 are moved in the main scanning direction to be positioned in the function recovery area 42.

The head function recovery device 4 is placed adjacent to each other on the maintenance system moving table 5 and is used to prevent drying of the nozzles 75 of the functional droplet discharge head 16 when the operation of the droplet discharge device 1 is stopped. The storage unit 81 to be sealed, the suction unit 82 that performs suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 16, and the nozzle surface 73 of the functional liquid droplet ejection head 16 are wiped off. And a wiping unit 83.
The suction by the suction unit 82 introduces the functional liquid into the functional liquid flow path from the liquid supply tank to the functional liquid droplet ejection head 16 by replacing the functional liquid droplet ejection head 16 in addition to the above function recovery processing. It is also done when you do.

  Next, with reference to FIG. 8, a control system of the entire droplet discharge device 1 constituted by the control device 7 will be described. First, the control device 7 is composed of a personal computer or the like, and the control device main body is connected with input devices such as a keyboard 101a and a mouse, various drives such as an FD drive and a CD-ROM drive, and peripheral devices such as a monitor. ing.

  The control system of the droplet discharge device 1 basically includes an operation unit 101 that has a keyboard 101a and allows an operator to input various data, a head recognition camera 25, a substrate recognition camera 17, and various cameras. An image recognition unit 102 that performs recognition, a drive unit 103 that includes various drivers that drive the functional liquid droplet ejection head 16 and the like, and a control unit 104 that collectively controls the liquid droplet ejection apparatus 1 including these units. .

  The drive unit 103 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 16, a drawing system movement driver 112 that drives and controls the motors of the X-axis table 12 and the Y-axis table 13, and a maintenance system movement table. And a maintenance driver 114 for driving and controlling the suction unit 82 and the wiping unit 83 of the head function recovery device 4.

  The control unit 104 includes a CPU 120, a ROM 130, a RAM 140, and a P-CON 150, which are connected to each other via a bus 160. The ROM 130 has a control program area for storing a control program to be processed by the CPU 120, and a control data area for storing control data for performing a drawing operation. The RAM 140 includes various register groups and a storage unit that stores various data input by the operator through the operation unit 101, and is used as various work areas for control processing. The P-CON 150 is connected to the operation unit 101, various cameras of the image recognition unit 102, various drivers of the drive unit 103, the above-described functional liquid supply mechanism 6 and the like, and supplements the functions of the CPU 120 and peripheral circuits. A logic circuit for handling the interface signal is constructed and incorporated.

  Then, the CPU 120 inputs various detection signals, various commands, various data, etc. via the P-CON 150 according to the control program in the ROM 130, processes various data, etc. in the RAM 140, and then drives via the P-CON 150. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 103.

  Here, the control with respect to the drawing operation of the drawing device 3 by the control device 7 will be described in detail. In the drawing operation by the drawing device 3, the control device 7 discharges and lands small droplets DRs from the nozzles 75 on the peripheral portion 507ar of each pixel region 507a, and each nozzle on the central portion 507ac of each pixel region. From 75, large droplets DRb are discharged and landed.

  As shown in FIG. 9, in the control unit 104 (control device 7), the ROM 130 includes a head position data storage unit 131 that stores head position data related to the home position of the Y-axis table 13 on which the head unit 15 is mounted, and a substrate W. And a substrate position data storage unit 132 for storing substrate position data relating to the home position of the X-axis table 12 on which is mounted. The RAM 140 stores a head position correction data storage unit 141 that stores head position data corrected by position recognition of the head recognition camera 25 and a substrate position that stores substrate position data corrected by position recognition of the substrate recognition camera 17. And a correction data storage unit 142. Further, the RAM 140 includes a nozzle information storage unit 143 that stores nozzle information related to the number of nozzles 75 and the nozzle pitch PN input via the operation unit 101, the number of pixel regions 507a, and each pixel. A pixel information storage unit 144 that stores pixel information related to the pixel dimensions LL and LW of the region, the pixel pitches PDh and PDv, and the like.

  On the other hand, the CPU 120 includes a nozzle specifying unit 121, a timing signal supply unit 122, a drive waveform generation unit 123, a movement control unit 124, and an overall control unit 125 that controls these units in association with each other.

  The nozzle specifying means 121 is based on the data-corrected head position data stored in the head position correction data storage unit 141 and the data-corrected substrate position data stored in the substrate position correction data storage unit 142, that is, Based on the alignment between the substrate W and the functional liquid droplet ejection head 16 in a plane parallel to the substrate W, among the many nozzles 75, the one facing the vertical bank portion 507bv is the inter-pixel nozzle 75b, and the other The nozzle 75 is specified as the in-pixel nozzle 75i.

Specifically, the nozzle specifying unit 121 specifies the inter-pixel nozzle 75b and the intra-pixel nozzle 75i as shown in FIG. That is, as described above, each pixel region 507a has a nozzle pitch PN of approximately 17.5 μm and a pixel pitch PNh in the sub-scanning direction of approximately 320 μm, so that the nozzle pitch PN is an integral multiple of the pixel pitch PNh. Since there is no (approximately 18.3 times), the nozzle specifying means 121 causes one or two (one in the figure) nozzles 75 facing each vertical bank portion 507bv to be inter-pixel nozzles 75b (in the figure, whitened). 16 or 17 (17 in the figure) nozzles 75 that face each pixel region 507a are specified as in-pixel nozzles 75i (shown as filled in the figure).
In the figure, the plurality of nozzles 75 of the eight nozzle rows 74 constituting the partial drawing line LPp are shown in a single row. Therefore, each nozzle 75 is drawn smaller than the actual nozzle diameter Rn (see FIG. 6).

  Further, the nozzle specifying unit 121 sets the nozzles 75i located at both ends in the sub-scanning direction among the specified intra-pixel nozzles 75i in each pixel area 507a as outer end nozzles 75e (filled with dots in the same figure), and others Is identified as an intermediate nozzle 75m (filled with diagonal lines in the figure). Then, the nozzle specifying information related to the specified inter-pixel nozzle 75b, the outer end nozzle 75e, and the intermediate nozzle 75m is output to the overall control means 125.

  As described above, the timing signal supply unit 122 supplies the overall timing control unit 125 with the ejection timing reference pulse obtained as the set table 22 moves. Since the drive waveform is generated based on the ejection timing reference pulse, the functional liquid droplets can be ejected to the substrate W moving in the main scanning direction at an appropriate timing.

The drive waveform generation unit 123 receives the nozzle identification information output from the nozzle identification unit 121 and the ejection timing reference pulse supplied from the timing signal supply unit 122 from the overall control unit 125, and based on these, the head driver 111. A drive waveform to be applied to each nozzle 75 is generated.
Specifically, the drive waveform generation means 123 generates seven small drive waveforms so that each outer end nozzle 75e discharges seven small droplets DRs to the longitudinal both ends 507as at a uniform discharge pitch. Generate. Further, for each intermediate nozzle 75m, one shot of small droplets DRs is discharged to each of the lateral edge portions 507am and 507am, and four droplets of large droplets DRb are discharged to the central portion 507ac at a uniform discharge pitch. Two small drive waveforms and four large drive waveforms are generated. For this reason, 44 shots of small droplets DRs and 60 shots of large droplets DRb are discharged to each pixel region 507a, and the droplet landing amount is approximately 712 picoliters.
Note that, according to the nozzle pitch PN, the landing diameters RDs, RDb, and the like of the functional liquid droplets, a small droplet DRs is ejected from each of the plurality of intra-pixel nozzles 75i to each of the lateral edge portions 507am, 507am. It is possible to prevent the large droplet DRb from being discharged to the central portion 507ac.

  Based on the nozzle information stored in the nozzle information storage unit 143 and the pixel information stored in the pixel information storage unit 144, the movement control unit 124 draws the entire area of the substrate W (the entire panel formation area Wa). The number of main scans and sub-scans is controlled. In this embodiment, the main scanning is performed twice for each pixel region 507a for one drawing line LP, and then the sub-scanning for the next one drawing line LP is performed (details). Will be described later). The movement control means 124 outputs a drive signal to the drawing system moving driver 112 so that the X-axis table 12 on which the substrate W is placed and the Y-axis table 13 on which the head unit 15 is mounted move at a constant speed. ing.

  Here, with reference to FIG. 10 to FIG. 12, a series of ejection operations for each pixel region 507a of the drawing apparatus 3 will be described. First, as described above, as preparation before discharging functional droplets, position correction of the substrate W and position correction of the head unit 15 are performed, and alignment of the substrate W and the functional droplet discharge head 16 is performed. The Subsequently, the inter-pixel nozzle 75b facing the vertical bank portion 507bv, the other outer end nozzle 75e, and the intermediate nozzle 75m are specified by the nozzle specifying means 121 of the control device 7 (see FIG. 10).

  Then, the first main scanning is performed, and the small droplets DRs are discharged from only the outer end nozzle 75e to the longitudinal both ends 507as and 507as (see FIG. 11). According to this, since the small droplets DRs are ejected and landed on the peripheral portion 507ar, the ejected small droplets DRs land on the pixel regions 507a by shifting in the main scanning direction or the sub-scanning direction. Even if it does, the landed small droplet DRs does not adhere to the partition wall portion 507b and does not flow into the adjacent pixel region 507a, thereby preventing color unevenness and color mixing between the plurality of pixel regions 507a. be able to.

  Thereafter, the second main scanning (forward or backward movement is possible) is performed, and the small liquid droplets DRs land from only the intermediate nozzle 75m to the lateral edge portions 507am and 507am, and the large liquid reaches the central portion 507ac. The droplet DRb is landed (see FIG. 12). According to this, since the large droplet DRb is ejected and landed on the central portion 507ac, the entire pixel region 507a can be filled with the functional liquid with a small number of shots, and the drawing operation can be performed efficiently. it can. Further, the small droplet DRs is ejected from the longitudinal end portions 507as and 507as at the peripheral edge portion 507ar and the large droplet DRb is ejected from the central portion 507ac at a time interval. Are close to each other and do not land in the pixel region almost simultaneously. That is, when the small droplet DRs lands on the longitudinal both ends 507as and 507as by the first main scanning, the landed small droplet DRs vibrates immediately after that, but the second droplet DRs oscillates. By the time the main scanning is performed, the vibration of the small droplet DRs stops, and the small droplet DRs becomes a spherical crown shape on the substrate W and is in a stable state. Therefore, even if the large droplet DRb has landed in the vicinity of the position where the small droplet DRs has landed by the second main scanning, it is not drawn into the vibrating large droplet DRb immediately after landing. . Therefore, the small droplets DRs can be landed with high precision at the longitudinal end portions 507as and 507as, and it is possible to reliably prevent the occurrence of missing dots due to the ejection timing of the functional droplets.

  In this manner, by ejecting and landing functional droplets on the peripheral portion 507ar and the central portion 507ac of each pixel region 507a, the entire pixel region 507a can be filled with the functional liquid. When two main scans are completed, sub-scan for one drawing line LP is performed, and two main scans are similarly performed for each pixel region 507a corresponding to the next one drawing line LP. Is called. Then, by repeating the main scanning and sub-scanning for one drawing line LP twice, the ejection operation is performed on the plurality of pixel regions 507a in the entire area of the substrate W.

In the present embodiment, in the first main scan, small droplets DRs are ejected to the longitudinal end portions 507as and 507as in the peripheral portion 507ar, and in the second main scan, the horizontal droplet in the peripheral portion 507ar is discharged. While the small droplets DRs are ejected to both end edge portions 507am and 507am, and the large droplet DRb is ejected to the central portion 507ac, this order may be reversed.
Further, when the plurality of pixel regions 507a are in a delta arrangement, for example, with respect to the plurality of pixel region columns arranged in the main scanning direction, the even-numbered pixel region column is the pixel in the sub-scanning direction with respect to the odd-numbered pixel region column. When the position is shifted in the sub-scanning direction by 1/2 of the pitch PDh, first, the above-described ejection operation is performed on each pixel region 507a of the odd-numbered pixel region column, and then the even-numbered pixel region column The above discharge operation is performed on each of the pixel regions 507a.

  As described above, according to the droplet discharge device 1 of the present embodiment, the entire region of the pixel region 507a can be filled with the functional liquid while suppressing landing of the functional droplet on the partition wall portion 507b.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device, or the like will be described. FIG. 13 is a flowchart showing the manufacturing process of the color filter, and FIG. 14 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 14B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 14C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the bank 503 serve as partition wall portions 507b that partition the pixel regions 507a. When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 14 (d), functional droplets are ejected by the functional droplet ejection head 16, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 16 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 15 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 14, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 15 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 16. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 16.

FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 17 shows a third example in which a liquid crystal device is configured using the color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 18 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 19, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 20, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a treatment gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 16, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 22, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 16 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 23, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 24, the pixel composition (second liquid composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 24)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 25, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 16, as shown in FIG. 26, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 27, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 28 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 16. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 16 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 29 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 that is formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 30A, and when these are formed, as shown in FIG. 30B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a top view showing typically the substrate concerning an embodiment. It is a top view showing typically the panel formation field concerning an embodiment. 1 is a plan view schematically illustrating a droplet discharge device according to an embodiment. It is a bottom view showing typically the head unit concerning an embodiment. 1 is an external perspective view of a functional liquid droplet ejection head according to an embodiment. It is a figure which shows the arrangement | sequence of the some nozzle of the functional droplet discharge head which concerns on embodiment. (A) to (d) are diagrams showing a state in which small droplets are ejected from a functional droplet ejection head to which a small driving waveform is applied and land on a substrate, and (e) to (h) are large driving states. It is a figure which shows the state which the large droplet was discharged from the functional droplet discharge head to which the waveform was applied, and landed on the board | substrate. It is a block diagram which shows the control structure of the droplet discharge apparatus which concerns on embodiment. It is a functional block diagram in the drawing operation of the drawing apparatus according to the embodiment. It is a figure explaining the state which specified the nozzle between pixels and the nozzle in a pixel in the discharge operation | movement with respect to each pixel area by the drawing apparatus which concerns on embodiment. It is a figure explaining the state in which the 1st main scan was performed in the discharge operation | movement with respect to each pixel area by the drawing apparatus which concerns on embodiment. It is a figure explaining the state by which the 2nd main scanning was performed in the discharge operation | movement with respect to each pixel area by the drawing apparatus which concerns on embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 7 ... Control apparatus 11 ... XY moving mechanism 16 ... Functional droplet discharge head 75 ... Nozzle 507a ... Pixel area 507ac ... Center part 507ar ... Peripheral part 507as ... Vertical both-ends edge part 507b ... Partition wall part DRb ... Large droplet DRs ... Small droplet LP ... Drawing line PN ... Nozzle pitch PNi ... Nozzle row pitch RDb ... Landing diameter (large droplet) RDs ... Landing diameter (small droplet) W ... Substrate

Claims (7)

A functional liquid droplet ejection head having a large number of nozzles capable of controlling the liquid droplet ejection amount is arranged on the substrate in which a plurality of pixel areas partitioned by the bank section are arranged in the main scanning direction and the sub scanning direction. Liquid droplets that perform a drawing operation so that a plurality of shots of functional liquid droplets are ejected and landed in each of the plurality of pixel areas while being moved relatively in the scanning direction, and the entire area of each pixel area is filled with the functional liquid. A drawing method using a discharge device,
A small droplet having a small droplet discharge amount is discharged and landed from each nozzle to the peripheral portion of each pixel region, and the droplet discharge amount from each nozzle to the central portion of each pixel region A discharge step of performing the drawing operation by discharging and landing large droplets of
The discharging step includes discharging the small droplets to both edge portions in the sub-scanning direction at the peripheral edge, discharging the small droplets to both edge portions in the main scanning direction at the peripheral edge, and the center. A drawing method using a droplet discharge device , wherein the large droplets are discharged to the portion by different main scans .   The functional droplet discharge head is configured such that a nozzle pitch of the plurality of nozzles in the sub-scanning direction is smaller than a landing diameter of the small droplet landed in the pixel region. A drawing method using the droplet discharge device according to claim 1. A functional liquid droplet ejection head having a large number of nozzles is relatively moved in the main scanning direction and the sub-scanning direction with respect to a substrate in which a plurality of pixel regions partitioned by the bank portion are arranged in the main scanning direction and the sub-scanning direction. However, a liquid droplet ejection apparatus that performs a drawing operation so that a plurality of shots of functional liquid droplets are ejected and landed in each of the plurality of pixel areas to fill the entire area of each pixel area with the functional liquid,
The functional liquid droplet ejection head;
A moving means for mounting the functional liquid droplet ejection head and moving the functional liquid droplet ejection head relative to the substrate in the main scanning direction and the sub-scanning direction;
Control means for controlling the moving means, and controlling the discharge timing and the droplet discharge amount of the multiple nozzles,
The control means, the time of drawing operation, the relative peripheral portion of each pixel region, the ejection and small droplets of the droplet discharge quantity from each nozzle, both edges portions of the main scanning direction in the peripheral portion liquid above the central portion of the discharge of large large droplet of the droplet discharge quantity from each nozzle, characterized in that to perform a different main scanning from each other in the discharge and the respective pixel areas of the small droplets to Drop ejection device. The functional droplet discharge head is configured such that a nozzle pitch of the plurality of nozzles in the sub-scanning direction is smaller than a landing diameter of the small droplet landed in the pixel region. The droplet discharge device according to claim 3 . The plurality of nozzles, as well as constituting one of the drawing line, The apparatus according to claim 3 or 4, characterized in that it is constituted by the sub-scanning direction parallel to n number of nozzle rows. The pitch in the nozzle row of the plurality of nozzles in each nozzle row is a pitch n times the nozzle pitch,
The n nozzle rows are arranged in the main scanning direction so as to be displaced from each other in the sub scanning direction so that the large number of nozzles are arranged at the nozzle pitch in the sub scanning direction. The droplet discharge device according to claim 5 . Method of manufacturing an electro-optical device characterized by claims 3 to using the liquid droplet ejecting apparatus according to any one of 6, to form a film-forming portion by the functional liquid droplet on the substrate.

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