JP4053140B2 - Cleaning disk cleaning method and apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a rotating disk cleaning technique for cleaning a rotating disk such as a magnetic disk used as a storage medium of a computer.
[0002]
[Prior art]
For example, a magnetic disk used as a computer storage medium is manufactured from a rotating disk made of aluminum alloy or glass, and the manufacturing process includes a process of polishing the surface of the rotating disk by lapping or polishing. There is a cleaning process to clean the surface.
[0003]
As a cleaning device used in the cleaning process, for example, there is a device described in Japanese Patent Publication No. 7-14509, and the rotating disk is driven by rotating the supporting roller supporting the rotating disk by a motor. Further, a member that slides on the surface of the rotating disk such as a cleaning brush is rotated by a motor different from the motor that rotationally drives the support roller.
[0004]
[Problems to be solved by the invention]
As described above, in the conventional cleaning device, the driving of the rotary disk and the driving of the cleaning brush are driven by different driving sources, so that there is a problem that the device becomes complicated.
[0005]
In particular, in recent years, in order to increase the cleaning degree of the disk, the cleaning process includes a cleaning process for supplying a cleaning liquid containing a cleaning chemical to the rotating disk, and a rotating disk using pure water as a cleaning liquid to remove the cleaning chemical. In order to perform the cleaning operation efficiently, it is desirable to transport the rotating disk by the transport device and perform the cleaning. However, it has been difficult for the conventional cleaning apparatus to efficiently clean the rotating disk in a limited space.
[0006]
An object of the present invention is to enable efficient cleaning of both surfaces of a rotating disk.
[0007]
[Means for Solving the Problems]
The cleaning method for a rotating disk according to the present invention includes a support member that rotatably supports the rotating disk, a first cleaning roller that is in contact with one surface of the rotating disk, and a relative approaching and moving away from the first cleaning roller. A step of positioning the rotating disk with the support member between the cleaning rollers in a state in which the cleaning rollers are separated from each other in a cleaning device having a second cleaning roller that freely extends in parallel; The cleaning rollers are moved close to each other, the process of sandwiching the rotating disk between both the cleaning rollers, the process of supplying the cleaning liquid to the surfaces of the cleaning rollers, and the cleaning rollers Rotatingly driven in the opposite direction, the drive provided to each cleaning roller so as to contact one side in the radial direction from the central portion of the rotating disk. A step of rotationally driving the rotating disk by each of the portions, and a rotating disk being rotated by each of the driving portions, and the cleaning roller being provided in contact with the other side in the radial direction from the central portion of the rotating disk And a step of cleaning the rotating disk by sliding between the cleaning unit and the rotating disk. Each of the cleaning rollers may be driven to rotate and reciprocate in the axial direction.
[0008]
The cleaning device for a rotating disk according to the present invention includes a support member that rotatably supports the rotating disk, a first cleaning roller that contacts one surface of the rotating disk, and a relative approach and separation movement with respect to the first cleaning roller. A second cleaning roller freely extending in parallel and contacting the other surface of the rotating disk and sandwiching the rotating disk with the first cleaning roller; and a cleaning liquid on a surface of each of the cleaning rollers Cleaning liquid supply means for supplying, and driving means for rotating the first cleaning roller and the second cleaning roller in opposite directions to each other, the radial direction from the central portion of the rotating disk to each of the cleaning rollers The drive unit that contacts one side of the rotating disk and rotates the rotating disk, and contacts the other side in the radial direction from the central portion of the rotating disk and slides on the rotating disk to rotate the rotating disk And characterized by forming a cleaning unit for cleaning the disk. You may make it provide the linear reciprocating means which reciprocates the said each washing roller to an axial direction.
[0009]
In the present invention, a rotating disk in a state of being rotatably supported is sandwiched between two cleaning rollers on both surfaces thereof, a drive unit that rotationally drives the rotating disk to each cleaning roller, and the surface of the rotating disk Since the cleaning section for cleaning the cleaning disk is provided, the rotating disk can be cleaned by the cleaning section of the cleaning roller while rotating the rotating disk by the rotation of the pair of cleaning rollers.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0011]
FIG. 1 is a perspective view showing a basic structure of a rotating disk cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a front view of FIG. 1, and FIG. 3 is taken along line III-III in FIG. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3.
[0012]
The rotating disk 10 whose surface is subjected to a cleaning process is an aluminum disk serving as a magnetic disk substrate, and a through hole 10a is formed at the center. The rotary disk 10 is rotatably supported by a support member 11, and the support member 11 has two support arms 12 and 13 that can be opened and closed. A support roller 14 that is in contact with the outer peripheral surface of the rotary disk 10 is rotatably attached.
[0013]
In order to clean the rotating disk 10 supported by the support member 11, the cleaning device has two cleaning rods 15, 16 which are parallel to each other, and each cleaning rod 15, 16 has a cleaning roller 17, 18 is attached. Each of the cleaning rollers 17 and 18 is made of sponge and has a length L larger than the dimension of the outer diameter D of the rotating disk 10. Therefore, under the state where the rotating disk 10 is sandwiched between the cleaning rollers 17 and 18, the outer peripheral surfaces of both the cleaning rollers 17 and 18 along the radial line R passing through the rotation center O of the rotating disk 10. Will come into contact.
[0014]
Under the state where the rotating disk 10 is sandwiched, the cleaning rollers 17 and 18 are driven to rotate in opposite directions as shown in FIG. The drive unit 21 in contact with one side in the radial direction of the rotary disk 10 and the cleaning unit 22 in contact with the other side in the radial direction with a portion corresponding to the rotation center O of the rotary disk 10 sandwiched between them as a boundary. And have.
[0015]
The drive portion 21 has a cylindrical outer peripheral surface, and the drive portions 21 of both the cleaning rollers 17 and 18 are almost line contact with the surface of the rotating disk 10 or are slightly crushed by being slightly crushed. Surface contact. On the other hand, the cleaning unit 22 is provided with a large number of projections 24 on the surface of the cylindrical main body 23 having a smaller diameter than the outer diameter of the drive unit 21, and the outer diameter up to the surface of the projection 24. Is substantially the same outer diameter as the outer peripheral surface of the drive unit 21. Therefore, only the protrusion 24 contacts the surface of the rotating disk 10 in the cleaning unit 22.
[0016]
Thus, since the area of the region in contact with the surface of the rotating disk 10 is larger than that of the cleaning unit 22, the driving unit 21 is driven even if the driving unit 21 and the cleaning unit 22 rotate in the same direction. The frictional force Fa applied to the rotating disk 10 by the portion 21 is larger than the frictional force Fb applied to the rotating disk 10 by the cleaning unit 22. Therefore, a rotational force in the direction indicated by the arrow is applied to the rotary disk 10 by the drive unit 21, and a rotational force in the opposite direction is applied to the rotary disk 10 by the cleaning unit 22. Since the force is greater, as a result, the rotating disk 10 rotates in the direction indicated by the arrow, and the protrusion 24 of the cleaning unit 22 comes into sliding contact with the surface of the rotating disk 10. In this way, both the cleaning rollers 17 and 18 are rotationally driven in opposite directions, whereby the rotation disk 10 and the cleaning by the sliding contact of the cleaning unit 22 with the surface of the rotation disk can be performed simultaneously. it can.
[0017]
In the illustrated case, the outer diameter of the drive unit 21 and the outer diameter of the protrusion 24 of the cleaning unit 22 are substantially the same, but the rotational force applied to the rotary disk 10 by the drive unit 21 is more cleaning. If the rotational force applied by the part 22 can be made larger, the outer diameter of the drive part 21 can be set slightly larger than that of the cleaning part 22, or a sponge with a different elastic deformation rate can be used for the drive part 21 and the cleaning part 22. It may be used. In addition, you may make it provide an unevenness | corrugation also in the outer surface of the drive part 21. FIG.
[0018]
In the illustrated case, the drive unit 21 and the cleaning unit 22 are connected, but the drive unit 21 and the cleaning unit 22 are separated from the drive unit 21 by a distance that is the same as or slightly smaller than the inner diameter d of the through hole 10a provided in the center of the rotary disk 10. The cleaning unit 22 may be separated from each other and attached to the cleaning rods 15 and 16, respectively. Further, in the illustrated case, the protrusions 24 of the cleaning unit 22 are provided in a staggered manner on the surface of the main body 23, but may be provided in a lattice shape or in a spiral shape. Alternatively, it may be provided at random. Furthermore, the size of the protrusion 24 may be different from that shown in the figure, and the shape may be not only a circle but also a polygon.
[0019]
As shown in FIG. 4, a liquid passage 25 is formed at the center of both cleaning rods 15 and 16, and a discharge hole 26 is formed in communication with the liquid passage 25. Accordingly, when the cleaning liquid is supplied from the outside to the liquid passage 25, the cleaning liquid is guided to the surface through the inside of the respective cleaning rollers 17 and 18, and the respective cleaning rollers 17 and 18 are cleaned with respect to the rotating disk 10. It will contact in the state which intervened. However, instead of such a cleaning liquid supply method, or in addition to this, the cleaning liquid may be directly supplied from the discharge nozzle 27 as shown in FIG. Further, as shown in FIG. 4, the scraper 28 may be brought into contact with the outer peripheral surfaces of the cleaning rollers 17 and 18 so as to remove foreign matters attached to the outer peripheral surfaces of the cleaning rollers 17 and 18.
[0020]
In order to clean both surfaces of the rotating disk 10 using the two cleaning rollers 17 and 18, the cleaning roller 18 is moved away from the cleaning roller 17 while being kept parallel to the cleaning roller 17 as indicated by an arrow A in FIG. Then, the rotating disk 10 is transported between the cleaning rollers 17 and 18 by the support member 11 under the condition that a gap is provided between the cleaning rollers 17 and 18. Under this state, the cleaning roller 18 is brought close to the rotating disk 10 and is sandwiched between both cleaning rollers 17 and 18. By supplying the cleaning liquid between the surfaces of the cleaning rollers 17 and 18 and the rotary disk 10 via the liquid passage 25, the cleaning operation can be started.
[0021]
In this state, both cleaning rollers 17 and 18 are rotationally driven in opposite directions to each other, so that the rotational motion of the cleaning rollers 17 and 18 is transmitted to the rotational motion of the rotary disk 10 by the drive unit 21 and rotated. The disk 10 is driven in the direction of arrow B. Since the protrusion 24 of the cleaning unit 22 is in sliding contact with the surface of the rotating disk 10, the cleaning disk 22 cleans the rotating disk 10 while being driven to rotate.
[0022]
At this time, the cleaning rollers 17 and 18 are linearly reciprocated in directions opposite to each other as indicated by an arrow C. That is, when one cleaning roller moves forward, the other roller is reciprocated in the axial direction so as to move backward, and the oscillating motion of both cleaning rollers 17 and 18 is performed. As a result, the cleaning unit 22 enters the outer peripheral surface of the rotating disk 10 and the inner peripheral surface of the through hole 10a, and these portions are also reliably cleaned.
[0023]
FIG. 5 is a front view showing a cleaning / drying apparatus 30 having the above-described cleaning apparatus. A cleaning station 32 and a drying station 33 are incorporated in the housing 31. The cleaning station 32 is provided with a workpiece attaching / detaching stage 34 and first and second cleaning stages 35, 36, and the rotating disks 10 are rotated by the indexing table 37 and the above-described stages 34 to 36 are two by two. It is conveyed to. In the first cleaning stage 35, a cleaning liquid having a cleaning chemical is used to clean the rotating disk 10, and in the second cleaning stage 36, pure water is used as the cleaning liquid. The configuration of each stage is the same, although the type of cleaning liquid used is different.
[0024]
6 is an enlarged front view showing the indexing table 37 shown in FIG. 5, and FIG. 7 is a sectional view taken along the line VII-VII in FIG.
[0025]
Two sets of support members 11 are attached to the indexing table 37 in order to simultaneously wash the two rotating disks 10 in correspondence with the workpiece attaching / detaching stage 34 and the two cleaning stages 35 and 36. The two rotary disks 10 are transported by a transport device (not shown) and then mounted on the respective support members 11 of the workpiece attaching / detaching stage 34, and the indexing table 37 is indexed and rotated by 120 degrees to thereby form the first cleaning stage. 35 and the second cleaning stage 36 to be cleaned and returned to the workpiece attaching / detaching stage 34. Each cleaned rotary disk 10 is transported from the stage 34 to the drying station 33 by a transport device (not shown), where it is rotated at a high speed and spin-dried.
[0026]
As shown in FIG. 9, the index table 37 is rotationally driven by a motor 39 attached to a vertical support wall 38 provided in the housing 31. Each support arm 12, 13 is rotatable about a support shaft 11 a attached to the indexing table 37, and both of the support arms 12, 13 are supported by a tension coil spring 19 mounted between the support arms 12, 13. A spring force in the closing direction is applied to the support arms 12 and 13.
[0027]
An actuator 41 made of a pneumatic cylinder or the like is attached to the support wall 38 so as to correspond to the workpiece attaching / detaching stage 34, and an operating piece 42 attached to the tip of the actuator 41 is attached to each of the support arms 12 and 13. The support arms 12 and 13 are opened by rotating the dog 43 attached to the rear end portion of the support shaft 11a. In the opened state, loading and unloading, that is, attachment / detachment of the rotating disk 10 is performed with respect to each support member 11.
[0028]
Drive units 35a and 36a for driving the above-described cleaning rollers are attached to the two cleaning stages 35 and 36, respectively, as shown in FIG. Each drive unit is provided with two pairs of two cleaning rollers 17 and 18 for cleaning the two rotating disks 10 at the respective cleaning stages 35 and 36 at the same time.
[0029]
8 is a front sectional view showing one drive unit 35a, FIG. 9 is a sectional view taken along line IX-IX in FIG. 8, and FIG. 10 is a sectional view taken along line XX in FIG. is there. The other drive unit 36a has the same structure as the drive unit 35a.
[0030]
The drive unit 35a has a unit case 46 attached to the support wall 38, and a gear box 47 extending in a direction perpendicular to the support wall 38 is fixed in the unit case 46, as shown in FIG. Guide rails 48 a and 48 b extending in a direction perpendicular to the support wall 38 are provided on both upper and lower sides of the gear box 47. Two bearing boxes 51a and 52a are provided on the upper guide rail 48a, and similarly two bearing boxes 51b and 52b are provided on the lower guide rail 48b.
[0031]
Each bearing box extends in parallel to the support wall 38, and the two bearing boxes 51a and 51b can be adjusted and moved in the direction perpendicular to the support wall 38 along the guide rails 48a and 48b. The two bearing boxes 52a and 52b are reciprocally movable in the same direction along the guide rails 48a and 48b.
[0032]
A cleaning rod 15 to which the cleaning roller 17 is attached is detachably attached to the tip of a drive shaft 53a that is rotatably provided in the bearing box 51a. The cleaning rod 15 is rotatably provided in the bearing box 52a. A cleaning rod 16 to which the cleaning roller 18 is attached is detachably attached to the tip of the drive shaft 54a, and a pair of rotating disks 10 are sandwiched between the cleaning rollers 17 and 18. It is designed to rotate. Similarly, the cleaning rods 15 and 16 for the other pair of cleaning rollers 17 and 18 are detachably attached to the tips of the drive shafts 53b and 54b that are rotatably provided in the lower bearing boxes 51b and 52b. It has come to be. Each drive shaft is formed with a liquid passage 55 communicating with the liquid passage 25 formed in the cleaning rod, and the cleaning liquid is supplied from the rear end portion of each drive shaft.
[0033]
The brackets 56a and 56b fixed to the bearing boxes 51a and 51b are fixed to the unit case 46 by fixing pins 57a and 57b, and nuts 58a that are screwed to screw portions provided at the tips of the fixing pins 57a and 57b. , 58b can be adjusted to adjust the positions of the bearing boxes 51a, 51b along the guide rails 48a, 48b.
[0034]
Pneumatic cylinders 61a and 61b are fixed to the respective brackets 56a and 56b, and piston rods 62a and 62b reciprocated by the respective pneumatic cylinders 61a and 61b are attached to brackets 63a and 63b fixed to the bearing boxes 52a and 52b. It is fixed. Accordingly, the cleaning roller 18 can be moved closer to and away from the cleaning roller 17 by operating the pneumatic cylinders 61a and 61b.
[0035]
In order to drive the four drive shafts in synchronization, as shown in FIG. 9, two interlocking shafts 71a and 71b are rotatably attached to the gear box 47 in parallel with the respective drive shafts. A motor 73 is attached to a pedestal 72 fixed to the gear box 47. As shown in FIG. 9, between a pulley 74 attached to one interlocking shaft 71a and a pulley 75 fixed to the shaft of the motor 73. A belt 76 is stretched over the belt.
[0036]
As shown in FIG. 8, two pulleys 77a and 77b are fixed to one interlocking shaft 71a, and a belt 79a is stretched between the pulley 78a fixed to the drive shaft 53a and the one pulley 77a. A belt 79b is stretched between the pulley 78b fixed to the drive shaft 53b and the other pulley 77b.
[0037]
In order to transmit the rotation of one interlocking shaft 71a to the other interlocking shaft 71b, a gear (not shown) that meshes with a gear 80 fixed to the interlocking shaft 71a is fixed to the other interlocking shaft 71b. Further, two pulleys (not shown) are fixed by shifting the position in the axial direction, and belts 81a and 81b are respectively connected between the pulleys and the pulleys fixed to the drive shafts 54a and 54b as shown in FIG. It is being handed over.
[0038]
In order to reciprocate the respective drive shafts in the axial direction, as shown in FIG. 10, a swing shaft 83 is swingably attached to a support frame 82 fixed to the gear box 47, and the swing shaft 83. The drive shafts 53a and 54a are coupled to the swing lever 84 fixed to the shaft. In order to drive the swing lever 84, the swing lever 84 is pin-coupled to the tip of a piston rod 86 that is operated by a pneumatic cylinder 85 fixed in the unit case 46. Thus, by operating the pneumatic cylinder 85, the two drive shafts 53a and 54a reciprocate in the axial direction, and the two cleaning rollers 17 and 18 forming a pair are indicated by an arrow C in FIG. Is reciprocated in the axial direction.
[0039]
In order to clean the surface of the rotating disk 10 using the cleaning / drying apparatus shown in FIGS. 5 to 10, the two rotating disks 10 are transported to the two pairs of support members 11 of the workpiece attaching / detaching stage 34 shown in FIG. Then, the rotating disk 10 is loaded on each support member 11. In this state, when the indexing rotary table 37 shown in FIG. 6 is indexed and rotated 120 degrees clockwise, the two rotary disks 10 of the workpiece attaching / detaching stage 34 are transported to the first cleaning stage 35, and in the first transporting stage 35. The rotating disk 10 that has been cleaned is transported to the second transport stage 36. Further, the rotary disk 10 that has been cleaned in the second transfer stage 36 is transferred to the workpiece attaching / detaching stage 34.
[0040]
In each of the cleaning stages 35 and 36, cleaning processing is performed by two sets of cleaning rollers provided in the drive units 35a and 36a, respectively. In the first cleaning stage 35, a cleaning liquid having a cleaning chemical is used, and in the second cleaning stage 36, pure water is used as the cleaning liquid.
[0041]
It goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention.
[0042]
For example, in the cleaning apparatus shown in FIGS. 5 to 10, two rotating disks are cleaned at the same time, but may be cleaned one by one and supported without using an index table. The rotating disk 10 may be positioned and conveyed between the cleaning rollers 17 and 18 by conveying the member 11 in the linear direction.
[0043]
【The invention's effect】
As described above, according to the present invention, when the cleaning roller is rotationally driven in the opposite direction with the rotating disk sandwiched between the two cleaning rollers, the rotating disk is rotated by the driving unit of each cleaning roller. While being driven, the cleaning unit slides on the surface of the rotating disk to perform the cleaning process. Thus, for cleaning the rotating disk, the rotating disk can be rotated for cleaning without providing a device for driving the rotating disk.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a basic structure of a rotating disk cleaning apparatus according to an embodiment of the present invention.
FIG. 2 is a front view of FIG. 1;
FIG. 3 is a view taken along the line III-III in FIG. 2;
4 is a cross-sectional view taken along line IV-IV in FIG.
FIG. 5 is a front view showing a cleaning / drying apparatus having the cleaning apparatus shown in FIGS.
6 is an enlarged front view showing the indexing table shown in FIG.
7 is a cross-sectional view taken along line VII-VII in FIG.
FIG. 8 is a front sectional view showing one drive unit.
9 is a sectional view taken along line IX-IX in FIG.
FIG. 10 is a cross-sectional view taken along line XX in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Rotating disk 10a Through-hole 11 Support member 12, 13 Support arm 14 Support roller 15, 16 Cleaning rod 17, 18 Cleaning roller 21 Drive part 22 Cleaning part 24 Protrusion part 25 Liquid passage 26 Ejection hole 30 Cleaning drying apparatus 31 Housing 32 Cleaning Station 33 Drying station 34 Work attachment / detachment stage 35, 36 Cleaning stage 37 Indexing table 38 Support wall 46 Unit cases 53a, 53b Drive shafts 54a, 54b Drive shafts 61a, 61b Piston rods 71a, 71b Interlocking shaft 73 Motor

Claims (4)

A supporting member that rotatably supports the rotating disk, a first cleaning roller that contacts one surface of the rotating disk, and a second cleaning that extends in parallel so as to be movable toward and away from the first cleaning roller. A step of positioning the rotating disk by the support member between the cleaning rollers in a state where the cleaning rollers are separated from each other in a cleaning device having a roller;
Moving each of the cleaning rollers closer to each other, and sandwiching the rotating disk on both sides by both cleaning rollers;
Supplying a cleaning liquid to the surface of each of the cleaning rollers;
The respective cleaning rollers are rotationally driven in opposite directions to each other, and the rotational discs are rotationally driven by a drive unit provided on each of the cleaning rollers so as to come into contact with one side in the radial direction from the central portion of the rotary disc. And the process of
While the rotating disk is rotated by each of the driving units, the cleaning disk provided on the respective cleaning rollers is brought into contact with the other side in the radial direction from the central portion of the rotating disk by sliding between the rotating disk and the rotating disk. And a step of cleaning the rotating disk. 2. The rotating disk cleaning method according to claim 1, wherein each of the cleaning rollers is driven to rotate and reciprocates in the axial direction. A support member for rotatably supporting the rotating disk;
A first cleaning roller in contact with one surface of the rotating disk;
A second cleaning roller that extends relative to the first cleaning roller so as to be movable toward and away from the first cleaning roller, and that contacts the other surface of the rotating disk and sandwiches the rotating disk with the first cleaning roller; When,
Cleaning liquid supply means for supplying a cleaning liquid to the surface of each cleaning roller;
Drive means for rotationally driving the first cleaning roller and the second cleaning roller in opposite directions;
A drive unit that rotates the rotating disk by contacting each of the cleaning rollers from a central part of the rotating disk in a radial direction, and a rotating part that contacts the other side of the rotating disk in the radial direction from the central part of the rotating disk A rotating disk cleaning apparatus, comprising: a cleaning unit configured to clean the rotating disk by sliding with the disk. 4. The rotating disk cleaning apparatus according to claim 3, further comprising linear reciprocating means for reciprocally moving the respective cleaning rollers in the axial direction.

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