JP4044906B2 - Vacuum press sticking device - Google Patents

Description

  The present invention relates to a vacuum press adhering apparatus for adhering a second thin layered member across a stepped portion to a first member having a stepped portion. The present invention particularly relates to a vacuum press adhering device for adhering a coverlay film to a flex portion of a rigid flex substrate comprising a combination of two or more rigid substrates and a flexible wiring board connecting between them. About.

  Conventionally, when manufacturing a rigid / flex board composed of a combination of two or more rigid boards and a flexible wiring board connecting between them, a coverlay film (processed product P) is provided between the rigid boards having steps. When sticking, the vacuum press sticking apparatus shown in FIG. 1 was used. In this apparatus, an elastic rubber layer 103 provided on the lower surface of the upper press member 102 is placed on the upper part of the receiving plate 101, and the workpiece P is composed of the rigid-flex substrate composite and the coverlay film placed thereon. The cover lay film was press-bonded using the elastic characteristics of the rubber layer. In this case, the rubber pressure is not evenly distributed, and it is difficult to make the rubber pressure uniform and adhere to each other particularly in the peripheral portion of the stepped portion. In the figure, 104 is a heater, and 105 and 106 are a lower vacuum chamber member and an upper vacuum chamber member, respectively.

  In order to prevent such an uneven sticking phenomenon, a cantilever opening / closing type vacuum chamber sticking apparatus has been proposed. See FIG. In such a sticking apparatus, the upper vacuum chamber member is cantilevered with respect to the lower vacuum chamber member, and the lower vacuum chamber member 105 and the upper vacuum chamber member 106 form a vacuum chamber. A cradle 101 with a built-in heater is placed in the lower vacuum chamber member, and a workpiece P is placed thereon. An upper plate 107 with a built-in heater is attached to the lower surface of the ceiling of the upper vacuum chamber member 106, and an air balloon 108 made of inflatable elastic rubber or the like is provided on the lower surface of the upper plate. In the sticking device, the upper vacuum chamber member 106 is moved and sealed against the lower vacuum member 105 and clamped and held by a clamp (not shown), and then the air balloon is filled with compressed air to expand the air balloon. The air balloon is inflated into a shape along the step, and thereby the sticking surface including the step portion is press stuck with uniform pressing. However, in this apparatus, although the air balloon provides a uniform sticking method, the air balloon expands in a radially outward direction perpendicular to the pressing direction, and there is a disadvantage that the pressing in the vertical direction becomes insufficient. is there. In addition, since semi-finished products are in a cold state, they are preheated by a cradle and are often heated by supplying heat from above. For this purpose, a heater is built in the cradle and the upper plate, and the workpiece is processed. Heating, but after the contact with the air balloon, the contact surface instantly takes heat away from the work piece, and the subsequent heat source has the problem that the air layer acts as a heat insulation layer, so it cannot supplement the heat in a short time. there were.

  The present invention is capable of applying a uniform press sticking to a first member having a stepped portion, for example, a first thin layered member overlying the stepped portion and sticking a second thin layered member. It aims at providing a vacuum press sticking device.

According to the present invention, a vacuum press sticking apparatus for sticking a second thin layered member on a first member having a stepped portion overlying the stepped portion,
(1) a vacuum chamber that can be opened and closed;
(2) A cradle that is placed in a vacuum chamber that can be opened and closed and is placed in a state where workpieces made of a first member and a second thin layered member are stacked,
(3) an upper press member that is installed in a vacuum chamber that can be opened and closed and that presses the workpiece along the press axis while facing the cradle;
(4) Expansion in which the periphery is fixed and stretched on the lower surface of the upper press member in a manner in which expansion in the radially outward direction perpendicular to the press direction is restricted during the press sticking process, and expansion is possible below the lower surface An extensible membrane member that forms a space;
(5) an upper press member lifting mechanism for lifting and lowering the upper press member;
(6) An extensibility operable to press the fluid into the inflatable space of the extensible curtain member to expand the extensible membrane member and then suck the fluid to contract the extensible membrane member to its original state . It consists of a cylinder mechanism for membrane member expansion,
The vacuum chamber is closed in conjunction with the lowering of the upper press member by the upper press member elevating mechanism, the vacuum chamber is evacuated, and when the upper press member is lowered by a predetermined distance, the expandable membrane member expansion cylinder mechanism is The membrane member is expanded by press-fitting a fluid into the inflatable space, and then the fluid flow path is shut off, and the upper press member is further lowered to be pressed and pasted.

According to the vacuum press apparatus according to the present invention, the expandable membrane member is fixed to the lower surface of the upper press member in a manner in which expansion in the radially outward direction perpendicular to the press direction is restricted during the press bonding process. Since the expansion space that is stretched and expands below the lower surface is formed, the fluid is pressed into the expandable space by the extensible film member expansion cylinder mechanism, and then the film member is expanded. When the upper press member is further lowered and pressed and pasted by blocking the flow path, the upper press member can be pressed along the press axis by the upper press member, In the process, expansion of the extensible membrane member in the radially outward direction can be effectively prevented. Therefore, it is possible to uniformly and effectively apply the pressing force when the first member having a stepped portion is applied to the second thin layered member by being pressed on the stepped portion, and uniformly applied. A processed product can be obtained by pressing. When the upper press member is lowered by the predetermined distance, the extensible membrane member expansion cylinder mechanism presses the fluid into the inflatable space, so that the film member below the lower press member is moved to the workpiece. After contacting the part, the fluid flow path is blocked, and the upper press member is further lowered to be pressed and pasted. By doing in this way, the expansion | swelling process of a film | membrane member and the press sticking process by the fall of an upper press member can be performed more effectively and efficiently. Further, the expansion cylinder mechanism is configured to press-fit a fluid into the inflatable space of the extensible membrane member to inflate the extensible membrane member, and then suck the press-in fluid from the inflatable space to restore the extensible membrane member to the original position. It is operable to contract to the state of By doing so, the press-fitting fluid can be quickly discharged and the vacuum press sticking device can be quickly returned to the press sticking standby state, so that the entire process time for press sticking can be shortened. As a result, the production rate of the press-bonded product can be improved.

The present invention is described in detail below.
(1) First member having stepped portion, second thin layered member As a combination of the first member having stepped portion and the second thin layered member, the second member straddling the step of the first member The vacuum press sticking apparatus of the present invention can be used as long as the thin layered member is brought into close contact with the sticking press. The first member can be a thin layered member having a stepped portion.

  In FIG. 3, the example of the to-be-processed goods which can carry out press sticking processing with this vacuum press sticking apparatus is shown. FIG. 3 (1) shows a workpiece P, and FIG. 3 (2) shows a workpiece that has been subjected to vacuum press bonding. The processed product is a rigid-flex board. In FIG. 3A, the processed product P is a rigid part having two steps of a rigid board 11 and a flexible printed wiring board 12 connecting the rigid boards. It consists of a coverlay (made of polyimide) 13 with a thermosetting adhesive that is placed on the upper surface of a composite body of a substrate and a flexible printed wiring board and press bonded. FIG. 3 (2) shows a rigid flex substrate in which a cover lay 13 is press-bonded to a composite body of a rigid substrate and a flexible printed wiring board. A rigid substrate is a substrate on which a thin flat plate made of phenol resin, epoxy, ceramic, or the like is bonded to a thin copper plate, a circuit pattern is formed thereon by exposure or etching, and a semiconductor element is incorporated thereon. The flexible wiring board is a thin wiring board characterized in that a copper foil is bonded to a polyimide film and the same exposure and etching treatment can be performed to connect and bend the rigid board. A cover lay is one in which a patterned single side of a flexible wiring board is bonded with the same polyimide material and serves as both insulation and reinforcement. Particularly, the adhesive strength of the stepped surface of the connecting portion for bending use is required. In a rigid flex board, a flexible wiring board may be laminated and joined inside the rigid board, or may be joined to the outside, and in both cases, a coverlay film needs to be stretched on the stepped portion. These or the like can be used as an object of processing in the vacuum press sticking apparatus of the present invention.

(2) Extensible membrane member The extensible membrane member is made of a material that is made of rubber or the like and is airtight or liquid-tight. “A mode in which expansion in the radially outward direction perpendicular to the press direction during the press sticking process is restricted” means that expansion in the radially outward direction perpendicular to the pressing direction for sticking is effectively prevented. Refers to the embodiment, whereby an effective press pressure can be obtained. In this case, the configuration of only the upper press member may be “restricting expansion in the radially outward direction perpendicular to the press direction during the press sticking process”, or the upper press member and other members, for example, the cradle In relation to the upper surface structure, “expansion in the radially outward direction perpendicular to the press direction during the press sticking process may be regulated”.

  In addition, “the periphery is fixed to the lower surface of the upper press member and stretched to form an inflatable expansion space below the lower surface” is exactly (1) the outer peripheral portion of the stretchable membrane member is the lower surface of the upper press member. When the expansion space is formed between the membrane member and the lower surface of the upper press member, or (2) the outer peripheral portion of the extensible member is disposed along the outer peripheral portion of the upper press member. When the press lower surface is fixed in a stretchable state including the outer peripheral portion, or (3) the expandable membrane member is formed in a bag shape to form an inflatable expansion space inside, This includes the case where a bag-like stretchable membrane member is fixed to the outer peripheral portion of the upper press member.

(3) Fluid The fluid that press-fits into the expandable space and expands the extensible membrane member includes air, a gas such as nitrogen, or a liquid such as oil.

In the following, preferred embodiments of the present invention are described. Any combination of the following features is also a preferred embodiment of the present invention unless there is a particular contradiction.
(1) In order to restrict expansion of the extensible film member in the radially outward direction perpendicular to the pressing direction, a peripheral wall portion is provided on the outer peripheral portion of the lower surface of the press member, and the inner peripheral surface of the recess inside the peripheral wall portion Thus, the expansion of the membrane member in the radial direction by the fluid is suppressed. By doing in this way, the expansion | swelling of the horizontal direction of the membrane member by a fluid is suppressed more effectively by the inner surface of the recessed part inside a surrounding wall part.

(2) The upper press member includes the peripheral wall portion and a separate upper press inward member that is moved downward within the peripheral wall portion, and the extensible membrane member is disposed on the lower surface of the upper press inner member. The periphery is fixed and stretched, and the peripheral wall portion and the upper press inner member are operatively connected. When the peripheral wall portion moves downward, the upper press inner member also follows and descends, and the upper press member moves a predetermined distance. At the time of the lowering, the lower end surface of the peripheral wall portion contacts the upper surface of the cradle, and after the end surface of the peripheral wall portion contacts the upper surface of the cradle, only the upper press inner member is moved by the press member lifting mechanism. It is possible to descend, and the upward movement of the inner part of the press is restricted within a predetermined range. By doing in this way, in addition to said effect, a press process can be performed more strongly.
(3) At least one of the cradle and the upper press member includes a heater for heating the workpiece. In this case, when heating is required for press sticking, press sticking can be performed more reliably and quickly.

(4) The upper press member lifting mechanism is a press cylinder mechanism. As another upper press member commercial mechanism, a ball screw mechanism by a servo motor unit can also be used. The servo motor unit is generally composed of three components, that is, a motor, an encoder, and a driver, and converts the rotational motion of the servo motor unit into vertical motion by screwing (ball screw mechanism) between the spindle and the cylinder unit.
(5) The vacuum chamber is formed of a movable upper vacuum chamber member and a fixed lower vacuum chamber member, and a vacuum chamber is formed by airtightly contacting both ends of the movable upper vacuum chamber member and the fixed lower vacuum chamber member. . By doing in this way, an upper vacuum chamber member and an upper press member can be operatively connected, and the process of carrying out press sticking after forming a vacuum chamber can be performed continuously and reliably.

(6) The fluid is oil. Since oil has a very small volume shrinkage, the pressing force to the workpiece in press working is more effectively applied.
(7) The extensible membrane member expansion cylinder mechanism includes a heater for heating oil. By doing so, the heated oil is supplied to the inflatable space, so that the press sticking step can be performed more uniformly and rapidly.

(8) The work piece is one in which a cover lay film is adhered to a flex portion of a rigid flex board composed of a combination of two or more rigid boards and a flexible wiring board connecting between them. However, it is used for re-sticking the electromagnetic wave shielding film to the flex part. In recent years, such workpieces have been used to increase the weight, size, and density of cellular phones, liquid crystal displays, digital cameras, printers, etc., but this vacuum press sticking apparatus is particularly suitable for such applications. It can be used significantly.

  In the following, the present invention will be described based on specific embodiments illustrated. These embodiments are merely examples of the vacuum press sticking apparatus of the present invention, and the present invention is not limited to these.

  FIG. 4 is one embodiment of the vacuum press sticking apparatus according to the present invention, and shows a state where the vacuum press sticking apparatus is in the return or return position (press sticking processing standby position). In the figure, an openable / closable vacuum chamber 2 is placed on a base 1, and a workpiece P composed of a first thin layered member and a second thin layered member is stacked in the vacuum chamber. A cradle 3 to be placed is mounted via a plurality of support columns. The vacuum chamber 2 includes a fixed lower vacuum chamber member 2-1 disposed on the base 1 and a moving upper vacuum chamber member 2-2 disposed above the lower vacuum chamber member member 2-1. . In FIG. 4, the upper vacuum chamber member is moved upward and the vacuum chamber is open. The upper vacuum chamber member moves downward, and its lower end surface comes into airtight contact with the upper end surface of the lower vacuum chamber member, thereby forming a vacuum chamber therein.

  An upper press member 4 is disposed above the cradle in the openable / closable vacuum chamber so as to face the cradle and press the workpiece. The periphery of the upper press member is fixed to the lower surface of the upper press member. An extensible membrane member 5 that forms an inflatable expansion space is provided below the lower surface. On the base 1, a stretchable membrane member expansion cylinder mechanism 6 is provided via a stand base to press-fit a fluid into the expandable space of the stretchable membrane member to expand the stretchable membrane member. Further, a plurality of support columns are erected on the base 1 and a support plate 7 is fixed to the upper end portion of the support columns. An upper press member elevating mechanism 8 for elevating and lowering the upper press member is supported on the support plate. In FIG. 4, the upper press member 4 is held at the upper press sticking standby position by the upper press member lifting mechanism.

  The cradle 3 includes a cradle upper plate 3-1, a cradle lower plate 3-2, and a heater 3-3 that is disposed between the cradle upper plate and the lower plate and preheats the workpiece. The upper surface of the cradle upper plate has a shape that matches the shape of the lower surface of the workpiece. In other words, in this embodiment, the convex portion that fits into the central concave portion on the lower surface of the composite body of the flexible printed wiring board composed of two spaced rigid boards 11 and the flexible printed wiring board 12 that connects the rigid boards is the cradle. It is provided on the upper surface. The cradle upper plate 3-1 can be replaced according to the type of the workpiece.

  The upper press member 4 includes an upper press inner member 4-1, an outer peripheral wall portion (guide frame) 4-2, a heater member 4-3 disposed above the upper press inner member 4-1, It consists of an upper plate 4-4 and a pulling plate (heat radiating plate) 4-5 fixed above the upper plate 4-4 via a connecting rod. The outer peripheral portion 5-1 of the stretchable membrane member 5 is housed in a recess formed on the inner peripheral surface of the inner peripheral portion of the peripheral wall portion between the upper press inner member 4-1 and the peripheral wall portion 4-2, and is the outermost side. The end portion 5-2 is fixed to the upper portion of the concave portion of the peripheral wall portion. In this state, the upper press inner member 4-1 can slide on the inner side of the peripheral wall portion. A pressing spring 4-6 is provided as an urging means for urging the inner press member downward and restricting upward movement.

  The expandable membrane member expansion cylinder mechanism 6 includes a piston-cylinder unit 6-1 supported above the base 1 via a stand base, a lower chamber of the piston-cylinder unit 6-1 and an extensible membrane member. It comprises an oil passage 6-3 for oil 6-2 communicating with the expansion space, and an opening / closing means 6-4 provided in the oil passage. 6-5 is a heater for heating the oil in the cylinder 6-1.

  The upper press member elevating mechanism 8 includes a first cylinder mechanism 8-1 and a second cylinder mechanism 8-2. The first cylinder mechanism includes a cylinder 8-3, a piston rod 8-4, and a lower end of the piston rod. A shank (hook member) 8-5 attached to the part, and the shank 8-5 slides in a vacuum chamber in an airtight manner. A hook 8-6 is provided at the lower end of the shank 8-5. The pulling plate 4-5 is locked and held upward by 8-6. When the shank moves upward, the pulling plate comes into contact with the lower surface of the ceiling plate of the upper vacuum chamber member by the hook. On the other hand, when the shank is lowered, the lifting plate is separated from the lower surface of the upper vacuum chamber member.

The second cylinder mechanism 8-2 includes an air hydraulic cylinder 8-7, an oil passage 8-8 that communicates the first and second cylinder mechanisms, and an oil opening / closing means 8-9 provided in the oil passage. . A piston 8-10 is liquid-tight and slidably disposed in the cylinder.
In the figure, 10 is an O-ring for maintaining airtightness, and 14 is a heat radiating plate for preventing heat transfer from the cradle to the base.

  In FIG. 4, the piston rod of the first cylinder mechanism 8-1 is moved upward with the opening / closing means 8-9 open, whereby the upper pressing member and the upper vacuum chamber member are moved by the lifting plate by the hook 8-6. Pulled upward. On the other hand, the opening / closing means 6-4 is opened and the oil in the expansion space of the extensible membrane member is returned to the cylinder 6-1, and then the opening / closing means 6-4 is closed.

  In the upper piston member elevating mechanism 8, the opening / closing means 8-9 is opened and the second cylinder mechanism 8-2 is operated to push down the piston 8-10, whereby the piston rod 8-4 and the shank 8 of the first cylinder mechanism are pushed down. -5 is raised, whereby the upper piston member 4 and the upper vacuum chamber member 2-2 are pulled upward, and the vacuum press sticking device is returned to or returned to the return position (press sticking processing standby position).

  FIG. 5 shows a state where the vacuum press sticking apparatus of FIG. In FIG. 5, the lower end surface of the upper vacuum chamber member 2-2 is in contact with the upper surface of the lower vacuum chamber member 2-1, the upper press member is further lowered, and the lower end surface of the peripheral wall portion 4-2 is the base 3. The first cylinder is brought to an intermediate stop by bringing it into contact with the upper surface of the upper plate 3-1, closing the opening / closing means 8-9. In this process, the opening / closing means of the extensible membrane member expansion cylinder mechanism 6 is closed, and no oil is supplied to the extensible membrane member. In FIG. 5, two sets of workpieces each including a first thin layered member and a second thin layered member placed thereon are placed on the cradle 3, and are placed on the upper surface of the second member. Although the lower surface of the extensible membrane member is in contact with the upper surface, a gap may be provided between the upper surface of the second member and the lower surface of the extensible membrane member.

  After the vacuum chamber is formed, the vacuum chamber is sucked by a vacuum device (not shown) through the suction port 2-3 to be in a vacuum state. A contact portion between the cradle and the peripheral wall portion is provided with a vacuum suckable groove or through hole (not shown).

  FIG. 6 shows an oil injection process. In the state where the vacuum press sticking apparatus of FIG. 5 is in the intermediate stop state, while sucking the vacuum chamber, the cylinder mechanism 6 is operated to press-fit oil into the extensible film member, and the cylinder mechanism 8 is stopped. That is, the opening / closing means 6-4 is opened, air is injected above the piston in the cylinder 6-1, and the oil 6-2 below the piston is pressed into the expansion space of the extensible membrane member 5 through the oil passage 6-3. To do. By pressing the oil into the expansion space of the extensible membrane member 5, the extensible membrane member expands and raises the upper press member while the lower surface is in close contact with the uppermost end surface of the workpiece. At this time, the opening / closing means 8-9 is closed to allow the first cylinder mechanism 8-1 to be raised, and the upper press member 4 is raised against the spring 4-6.

  FIG. 7 shows a press sticking process for press sticking from a state where the oil injection process of FIG. 6 is stopped in the middle. In FIG. 7, the opening / closing means 6-4 is closed to bring the cylinder mechanism 6 into a stopped state, and the press-fitted oil is held fluid-tight in the expansion space. On the other hand, the first cylinder mechanism 8-1 is operated by opening the opening / closing means 8-9. That is, compressed air is introduced above the piston in the first cylinder mechanism, and the oil in the first cylinder mechanism 8-1 is guided below the piston in the second cylinder mechanism 8-2 and the piston in the second cylinder mechanism 8-2. The compressed air above is discharged. Thereby, the upper press inner member 4-1 slides down on the inner side of the outer peripheral peripheral wall portion 4-2 through the piston rod 8-4, and thereby the oil in the extensible membrane member is pressurized. The As a result, the stretchable membrane member deforms and adheres along the shape of the upper and outer surfaces of the work piece, and presses the work piece uniformly.

  FIG. 8 shows an oil draining process. After the press sticking step shown in FIG. 7 is finished, the upper press member is lowered, and the oil filled in the extensible film member on the lower surface of the upper press member is discharged. That is, the opening / closing means 8-9 and the opening / closing means 6-4 are opened to operate the first and second cylinder mechanisms 8-1 to lower the upper press member, and the oil filled in the extensible membrane member is used as oil. It discharges to the cylinder 6-1 of the cylinder mechanism 6 through the passage. Although it takes time to return the oil in the stretchable membrane member to the cylinder 6-1 only by the contraction force of the membrane member, the oil discharge is shortened by opening the opening / closing means 6-4 and lowering the press member. The process is shortened. At this time, the vacuum state is released. Thereafter, the opening / closing means 6-4 is closed, the vacuum press sticking apparatus is set to the return position shown in FIG. 4, that is, the vacuum press sticking standby position, and the work piece subjected to the vacuum press sticking is taken out, and then the vacuum press sticking is performed. The workpiece to be processed is placed on the receiving table 3.

  9 will be described with reference to FIGS. 9 (1) to 9 (5) with reference to FIGS. 9 (1) to 9 (5). FIGS. 9 (1) to 9 (5) show only the part where the work piece is press-bonded for simplification, and omit the illustration of other mechanisms, and the operation will be briefly described in text. FIGS. 4 to 8 show a case where two workpieces are pressed and pasted simultaneously, but FIG. 9 describes a case where one workpiece is pasted for pressing for simplicity.

(1) FIG. 9 (1): Workpiece Product Setting Step FIG. 9 (1) shows a workpiece product setting step. The upper vacuum chamber member and the upper press member are moved upward to release the vacuum chamber, and the workpiece P is placed on the cradle 3 through the gap between the cradle 3 and the outer peripheral wall 4-2 of the upper press member. .
(2) FIG. 9 (2): Intermediate stop of vacuum press sticking apparatus FIG. 9 (2) shows a position where the vacuum press sticking apparatus is stopped in the middle. At this position, the lower surface of the outer peripheral wall 4-2 of the upper press member is in contact with the upper surface of the cradle 3, and the lower surface of the film member is in contact with the upper surface of the cover lay 23 of the workpiece P.

(3) FIG. 9 (3): Oil press-fitting step The expansion formed between the lower surface of the upper press member 4-1 and the stretchable membrane member 5 by opening the opening / closing means 6-4 and operating the cylinder mechanism 6. Press the oil into the space. At that time, the opening / closing means 8-9 is closed to stop the cylinder mechanism 8, and the upper press member 4-1 is raised against the spring 4-6 together with oil press-fitting. The peripheral edge portion of the membrane member is liquid-tightly inserted between the upper press member 4-1 and the outer peripheral wall portion 4-2, the outermost peripheral end portion is fixed to the outer peripheral wall portion, and the other membrane member portions are It is considered free. Further, since the expansion of the outer side in the radial direction of the membrane member is restricted by the inner peripheral surface of the outer peripheral wall portion, the membrane member expands substantially uniformly downward as the oil is injected.

(4) Oil pressure adhering step The opening / closing means 6-4 is closed to stop the cylinder mechanism 6, and the press-fitted oil is held in the expansion space formed between the upper press member 4-1 and the membrane member 5. Then, the opening / closing means 8-9 is opened, the cylinder mechanism 8 is operated, the upper press member 4-1 is lowered, the oil is pressurized, and the lower surface of the membrane member 5 is deformed along the leading surface shape of the workpiece. Then, the workpiece is pressed and pasted through the membrane member. At this time, the upper press is heated to heat the workpiece.

(5) Oil draining process The opening / closing means 6-4 is opened to make the cylinder mechanism 6 operable, the opening / closing means 8-9 is kept open, the cylinder mechanism 8 is operated, and the upper press member 4-1 is further lowered. Then, the oil retained in the expansion space formed between the upper press member 4-1 and the membrane member 5 is discharged to the cylinder 6-1. Thereby, the membrane member 5 contracts and contacts the lower surface of the upper press member, and is separated from the upper surface of the processed product except for the uppermost surface of the processed product. Thereafter, the press device is returned to the press sticking standby state by the cylinder mechanism 8.
The above process is controlled by a CPU (not shown).

  Oil injection time can be shortened by providing a plurality of sets of the extensible membrane member expansion cylinder mechanism 6 and the opening / closing means 6-4 in FIGS. These can also be stored and installed in a vacuum chamber.

  FIG. 10 shows a cylinder mechanism 6 ′ as another aspect of the cylinder mechanism 6 of the first embodiment. The cylinder mechanism 6 'includes a first cylinder 6-1a and a second cylinder 6-1b that are connected to each other in the vertical direction, and pistons 6-6a and 6-6b are connected to the cylinders 6-1a and 6-1b. Are housed and are connected by a piston rod 6-7. By moving the piston of the second cylinder upward and moving the piston of the first cylinder upward, the oil press-fitted into the expansion space of the extensible membrane member is sucked back into the first cylinder 6-1a. In that case, it can be performed together with the step of returning the oil press-fitted into the expansion space by pushing down the upper press member into the original cylinder, or the oil returning step by the upper press can be omitted.

FIG. 11 (1) and FIG. 11 (2) show another embodiment showing "a mode for restricting expansion of the extensible membrane member in a radially outward direction perpendicular to the press direction during the press sticking step". For simplicity, only the upper press member, the stretchable membrane member, the workpiece, and the cradle are shown.
In the embodiment shown in FIG. 11 (1), a recess 4′a is provided on the lower surface of the upper press member 4 ′, and the membrane member 5 is stretched with its outer peripheral portion fixed to the bottom surface of the recess. The inner peripheral surface of the recess restricts expansion of the extensible film member in the radially outward direction perpendicular to the pressing direction during the press sticking process. In this case, in order to assist the press movement of the upper press member, a recess 3′a for accommodating the outer peripheral end of the press member may be formed on the upper surface of the cradle 3 ′.

  In the embodiment shown in FIG. 11 (2), the stretchable membrane member 5 is stretched over the lower surface and the outer peripheral lower end surface of the upper press member 4 ″, and the membrane member is fixed to the upper press outer peripheral surface at the outer peripheral upper end portion. Yes. A cylindrical projection 3'b that slides on the outer peripheral surface of the upper press member with the membrane member stretched is provided on the cradle 3 '', and the cylindrical projection 3'b when the upper press is lowered to a predetermined lower position. The film member is slidably fitted to the inner peripheral surface of the material, and oil is injected to expand the membrane member, and the upper press member is further lowered to perform the press adhering step, thereby preventing expansion of the membrane member in the radially outward direction.

  The present invention provides a first member having a stepped portion, for example, a first thin layered member that can be uniformly pressed and adhered, and a second thin layered member is stuck on the stepped portion. A vacuum press sticking device is provided, and in particular, a cover lay film is stuck to a flex portion of a rigid flex board composed of a combination of two or more rigid boards and a flexible wiring board connecting between them. Is beneficial for.

The conventional press sticking apparatus which provided the elastic rubber layer in the lower surface of an upper press member is shown. The conventional vacuum press sticking apparatus using a cantilever opening-and-closing type vacuum chamber is shown. Examples of workpieces that can be subjected to press bonding with this vacuum press bonding apparatus are shown, Fig. 3 (1) is a workpiece and Fig. 3 (2) is a processed product subjected to vacuum press bonding. Indicates. The vacuum press sticking apparatus in the return or return position (press sticking processing standby position) of one embodiment of the vacuum press sticking apparatus according to the present invention is shown. The state which stopped the vacuum press sticking apparatus of FIG. 4 in the middle is shown. The vacuum press sticking apparatus in an oil injection process is shown. The vacuum press sticking apparatus in a press sticking process is shown. The vacuum press sticking apparatus which meets an oil removal process is shown. 9 (1) to FIG. 9 (5) show the main part of the press work sticking process of the workpiece by the vacuum press sticking apparatus of this embodiment. FIG. 9 (1) shows the work set process. 9 (2) shows the intermediate stop process of the vacuum press sticking device, FIG. 9 (3) shows the oil press-fitting process, FIG. 9 (4) shows the oil pressure sticking process, and FIG. A process is shown. As another aspect of the cylinder mechanism of the first embodiment, a cylinder mechanism is shown from a first cylinder and a second cylinder that are connected vertically. FIG. 11 (1) shows another embodiment for restricting expansion of the extensible membrane member in the radially outward direction perpendicular to the press direction during the press sticking process, and FIG. 11 (1) is provided with a recess on the lower surface of the upper press member; FIG. 11 (2) shows an example in which the membrane member is stretched with its outer peripheral portion fixed to the bottom surface of the recess. FIG. 11 (2) shows a stretchable membrane member stretched across the lower surface and the outer peripheral lower end surface of the upper press member. The example fixed to the upper press outer peripheral surface by the outer peripheral upper end part is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base 2 ... Vacuum chamber 2-1 ... Lower vacuum chamber 2-2 ... Upper vacuum chamber 3 ... Base 3-1 ... Base upper plate 3-2 ··· Lower plate 3-3 ··· Heater 4 · · · Upper press plate 4-1 · · · Press inner member 4-2 · · · peripheral wall 4-3 · · · heater member 4-4 · · · ..Upper plate 4-5 ... Lifting plate (heat sink)
5... Stretchable membrane member 5-1 .. Peripheral portion 5-2... Outermost end portion 6... Cylinder mechanism for expansion of stretchable membrane member 6-1. 2 ... Oil 6-3 ... Oil passage 6-4 ... Opening / closing means 6-5 ... Heater 8 ... Upper press member lifting mechanism 8-1 ... First cylinder mechanism 8-2 ... Second cylinder mechanism 8-3 ... Cylinder 8-4 ... Piston rod 8-5 ... Shank 8-6 ... Hook 8-7 ... Pneumatic hydraulic cylinder 8-8 ... Oil passage 8-9 ... Opening / closing means 8-10 ... Piston 10 ... O-ring 14 ... Heat sink 6-1a ... First cylinder mechanism 6-1b ... Second Cylinder mechanism 3'a, 4'a ... recess 3'b ... projection

Claims (9)

A vacuum press adhering device for adhering the second thin layered member across the step portion to the first member having a stepped portion, the vacuum press adhering device,
(1) a vacuum chamber that can be opened and closed;
(2) A cradle that is placed in a vacuum chamber that can be opened and closed and is placed in a state where workpieces made of a first member and a second thin layered member are stacked,
(3) an upper press member that is installed in a vacuum chamber that can be opened and closed, and that presses the workpiece against the workpiece along the press axis, facing the cradle;
(4) Expansion in which the periphery is fixed and stretched on the lower surface of the upper press member in a manner in which expansion in the radially outward direction perpendicular to the press direction is restricted during the press sticking process, and expansion is possible below the lower surface An extensible membrane member forming a space;
(5) an upper press member lifting mechanism for lifting and lowering the upper press member;
(6) the after inflating the stretch film inflatable space extensible film member by press-fitting the fluid in the member, the fluid was aspirated and possible extensibility operative to shrink the stretched film member to its original state It consists of a cylinder mechanism for membrane member expansion,
The vacuum chamber is closed in conjunction with the lowering of the upper press member by the upper press member elevating mechanism, the vacuum chamber is evacuated, and when the upper press member is lowered by a predetermined distance, the expandable membrane member expansion cylinder mechanism is A vacuum press adhering apparatus that inflates the membrane member by press-fitting a fluid into the expandable space, then shuts off the fluid flow path, further lowers the upper press member, and presses and adheres.
In order to restrict expansion of the extensible membrane member in the radially outward direction perpendicular to the pressing direction, a peripheral wall portion is provided on the outer peripheral portion of the lower surface of the upper press member, and the fluid is formed by the inner side surface of the recess inside the peripheral wall portion. The vacuum press sticking apparatus according to claim 1, wherein expansion of the membrane member in the lateral direction is suppressed.   The press member is composed of the peripheral wall portion and a separate upper press inner member that is moved downward within the peripheral wall portion, and the extensible membrane member is fixed to the lower surface of the upper press inner member. The peripheral wall portion and the upper press inner member are operatively connected, and when the peripheral wall portion moves downward, the upper press inner member also follows and descends, and the upper press member descends a predetermined distance. At this point, after the lower end surface of the peripheral wall portion contacts the upper surface of the cradle and the end surface of the peripheral wall portion contacts the upper surface of the cradle, only the upper press inner member can be lowered by the press member lifting mechanism. The vacuum press sticking apparatus according to claim 2, wherein the upward movement of the inner portion of the press is restricted within a predetermined range. The vacuum press sticking apparatus according to any one of claims 1 to 3, wherein at least one of the cradle and the upper press member includes a heater for heating a workpiece.   The vacuum press sticking apparatus according to any one of claims 1 to 4, wherein the upper press member lifting mechanism is a press cylinder mechanism.   The vacuum chamber is formed of a movable upper chamber portion and a fixed lower chamber portion, and the vacuum chamber is formed by hermetically contacting the lower end surface of the movable upper chamber portion and the upper end surface of the fixed lower chamber portion. The vacuum press sticking apparatus in any one of 1 thru | or 5.   The vacuum press sticking apparatus according to any one of claims 1 to 6, wherein the fluid is oil.   The vacuum press sticking apparatus according to claim 7, wherein the extensible film member expansion cylinder mechanism includes a heater for heating oil.   The said workpiece is a thing which sticks a coverlay film on the flex part of a rigid flex board which consists of a combination of two or more rigid boards and a flexible wiring board which connects between them. The vacuum press sticking apparatus in any one of 1 thru | or 8.

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