JP3959097B2 - Vibration gyro tuning fork type vibrator mounting structure - Google Patents

Description

  The present invention relates to a tuning fork-type vibrating gyroscope in which a tuning fork type vibrator in which a driving leg and a detection leg are coupled by a body part is accommodated in a package, and more particularly to a tuning fork type by supporting the body part with a package as a fulcrum The present invention relates to a vibrator mounting structure for mounting a vibrator on a package.

This type of tuning fork type vibration gyro is described in Patent Document 1 or Patent Document 2. The basic structure and operation of the tuning fork type vibration gyro described in Patent Document 1 or Patent Document 2 will be described with reference to FIG. FIG. 10 is a diagram showing a tuning fork type vibrator for a vibration gyro. FIG. 10 (A) shows a state when there is no rotation input to the tuning fork type vibration gyro, and FIG. 10 (B) shows a tuning fork type vibration gyro. Represents the state when there is a rotation input. In the figure, 111a and 111b are excitation drive legs (excitation drive side arms in Patent Document 1), and 112a and 112b are vibration detection legs (vibration detection side arms in Patent Document 1). The excitation drive legs 111a and 111b are paired with each other and vibrate in opposite phases. The drive legs 111a and 111b for excitation are referred to as drive legs 111 (drive side arms in Patent Document 1). The vibration detection legs 112a and 112b are paired with each other and vibrate in opposite phases. The vibration detection legs 112a and 112b are referred to as detection legs 112 (detection side arms in Patent Document 1). The trunk | drum 10 is a rectangular parallelepiped, The planar shape (shape of the upper surface 10a) is a square (it does not necessarily need to be a square). Each surface of the body 10 has a top surface represented by reference numeral 10a, a bottom surface (not shown in the figure) represented by reference numeral 10b, an end surface on the drive leg 111 side represented by reference numeral 10c, and an end surface on the detection leg 112 side (in the figure). (Not shown) is represented by reference numeral 10d, one side is represented by reference numeral 10e, and the other side (not shown) is represented by reference numeral 10f. The upper surface 10a and the bottom surface 10b are called main surfaces. The tuning fork type vibration gyro in Patent Document 1 and Patent Document 2 is provided with one non-excitation drive leg (non-excitation drive side arm in Patent Document 1) between the excitation drive legs 111a and 111b. Further, one non-vibration detection leg (non-vibration detection side arm in Patent Document 1) is provided between the vibration detection legs 112a and 112b, but the non-excitation drive leg and the non-vibration detection leg are Since it is provided for stabilization of vibration and is not necessary in the explanation of the principle, it is omitted in the tuning fork type vibration gyro of FIG.

  The body 10, the excitation drive legs 111 a and 111 b, and the vibration detection legs 112 a and 112 b are made of one piezoelectric single crystal, and are cut out from a single plate-like piezoelectric single crystal. Examples of the piezoelectric single crystal include quartz crystal, lithium niobate, and langasite. The body 10, the excitation drive legs 111 a and 111 b and the vibration detection legs 112 a and 112 b have the same thickness. In a state where the excitation driving legs 111a and 111b are not excited, that is, in a stationary state, the axes of the excitation driving legs 111a and 111b and the axes of the vibration detection legs 112a and 112b are respectively on the end surfaces 10c and 10d of the trunk portion 10. It is vertical. The axes of the excitation drive leg 111a and the vibration detection leg 112a are on the same axis. Similarly, the axes of the excitation drive leg 111b and the vibration detection leg 112b are on the same axis. Further, the excitation drive legs 111a and 111b are symmetrical and the vibration detection legs 112a and 112b are also symmetrical with respect to a plane that passes through the center of gravity of the body portion 10 and is parallel to the side surface 10e. Excitation drive legs 111a and 111b and vibration detection legs 112a and 112b are provided with drive electrodes and detection electrodes, respectively (the illustration of these electrodes is omitted).

  When an AC voltage for excitation is applied to the drive electrode in the tuning fork type vibration gyro having the structure shown in FIG. 10, the excitation drive legs 111a and 111b are opposite to each other in the plane parallel to the upper surface 10a, that is, reverse. Vibrates in phase. This vibration is drive vibration in the tuning fork type vibration gyro. The drive vibration is vibration in a plane parallel to the main surface (the upper surface 10a and the bottom surface 10b) of the trunk portion 10, and such vibration in a plane parallel to the main surface is referred to as in-plane vibration. In-plane vibration is represented by arrows Ha and Hb in FIG. In this state, when the rotation of the angular velocity ω is input around the input shaft in FIG. 10B, a Coriolis force is generated in proportion to the leg end velocity due to the leg vibration. It becomes the vibration of the same frequency. This vibration is referred to as Coriolis vibration in the sense of vibration based on Coriolis force. When the leg vibrates so that the displacement of the leg end is in the range of ± a, the absolute value of the leg end velocity is zero when the displacement of the leg end is ± a, and the displacement of the leg end is zero. It becomes the maximum at the time of. In the tuning fork type vibration gyro having the structure of FIG. 10, when the rotation of the angular velocity ω is input around the input shaft of FIG. 10B, Coriolis force acts on the driving legs 111a and 111b for excitation, and Coriolis vibrations Ca and Cb. Each occurs. The Coriolis vibrations Ca and Cb are vibrations in a direction perpendicular to the main surface of the body portion 10, and their phases are opposite to each other. The vibration in the direction perpendicular to the main surface of the body portion 10 is referred to as surface vertical vibration.

  Since the body portion 10 is plate-shaped, it has extremely high rigidity against vibration in a direction parallel to the main surface, that is, in-plane vibration, and vibration in a direction perpendicular to the other main surface, that is, surface vertical vibration. Shows relatively low rigidity. Therefore, among the vibrations generated in the excitation drive legs 111a and 111b, the drive vibrations Ha and Hb that are in-plane vibrations hardly propagate to the vibration detection legs 112a and 112b, and the other surface vertical vibrations are Coriolis vibrations. Ca and Cb propagate to the vibration detection legs 112a and 112b with high efficiency. The Coriolis vibrations propagated to the vibration detection legs 112a and 112b are detected vibrations Da and Db in the tuning fork type vibration gyro. The tuning fork type vibration gyro detects the angular velocity ω by taking out the voltage appearing in the vibration detection legs 112a and 112b as an electric signal by the detection electrodes by the detection vibrations Da and Db.

  In the tuning fork type vibration gyro, the drive vibration component appearing on the vibration detection legs 112a and 112b is noise, and the detected vibration component (Da, Db) is a signal. Therefore, since the ratio of the drive vibration component to the detected vibration component (Da, Db) in the vibration detection legs 112a, 112b becomes a signal-to-noise ratio (S / N ratio), in order to detect the angular velocity ω with high accuracy, It is necessary to reduce the drive vibration component that leaks and appears in the vibration detection legs 112a and 112b. The drive vibration component leaking to the vibration detection legs 112a and 112b becomes a bias for the signal component [detected vibration component (Da, Db)]. If this bias is unstable, the detection accuracy of the angular velocity ω is lowered.

In the tuning fork type vibrating gyroscopes of Patent Document 1 and Patent Document 2, the tuning fork vibrator is supported at the center of gravity by a support member made of quartz glass (the holding body in Patent Document 1). Its center of gravity is in the center of the torso.
JP 2001-255152 A JP 2001-208545 A Japanese Patent No. 2518600 JP-A-11-173857

  FIG. 5 is a schematic diagram showing fluctuations in distortion appearing in the vibrator when the body of the tuning fork vibrator is supported by a support member. FIGS. 5A and 5B show distortions appearing on the body 10 when drive vibration is applied to the body in a state where it is not supported by the support member. 5C and 5D show the case where the center of gravity of the body portion 10 is supported by the support member 2 and when the body portion 10 is mounted on the package substrate 30 and driving vibration is applied to the body portion 10. The distortion that appears in the part appears. 5C and 5D, the support member 2 is fixed to the center of gravity of the body portion 10 and the package substrate 30.

  FIG. 5 (A) shows that when the stress due to the vibration displacements α1 and β1 of the legs in the opposite directions is generated in the trunk portion 10 by the driving vibration excited by the driving legs, the upper portions of the trunk portion 10 are opposite to each other. Strains a1 and b1 are generated, and strains c1 and d1 in opposite directions are generated in the lower portion of the body portion 10, indicating that a1 = b1 = c1 = d1. FIG. 5B shows that when the vibration due to the vibration displacements α2 and β2 of the legs opposite to each other is generated in the trunk part 10 by the driving vibration excited by the driving legs, the upper part of the trunk part 10 is opposite to each other. Strains a2 and b2 are generated, and strains c2 and d2 in opposite directions are generated in the lower portion of the body portion 10, indicating that a2 = b2 = c2 = d2.

  On the other hand, FIG. 5C shows a case where stress due to the vibration displacements α1 and β1 of the legs opposite to each other is generated in the upper portion of the trunk portion 10 by the driving vibration excited by the driving legs. Strains a1 and b1 that are opposite to each other are generated, and strains c1 and d1 that are opposite to each other are generated at the lower portion of the body portion 10. This indicates that a1 = b1> c1 = d1. FIG. 5D shows that when stress is generated in the trunk portion 10 due to the vibration displacements α2 and β2 of the legs in opposite directions due to the drive vibration excited by the drive legs, the upper portion of the trunk portion 10 is opposite to each other. Directional strains a2 and b2 are generated, and strains c2 and d2 in opposite directions are generated in the lower portion of the body portion 10, which indicates that a2 = b2> c2 = d2.

  As shown in FIGS. 5C and 5D, when the body 10 of the tuning fork vibrator is supported by the support member 2, the strain at the upper part of the body 10 and the distortion at the lower part thereof are different in magnitude. As a result, the upper and lower asymmetry of the trunk distortion occurs. When a vertical asymmetry is generated in the distortion of the body portion 10, vibration in a direction orthogonal to the drive vibration, that is, a plane vertical vibration component is generated in the body portion. This surface vertical vibration component appears on the vibration detection leg as leakage drive vibration and is in the same vibration direction as the detection vibration. Therefore, the surface vertical vibration component becomes a noise component with respect to the detection vibration and reduces the detection accuracy of the angular velocity.

  6 to 9 are simulation diagrams of trunk distortion when the center of gravity of the trunk 10 of the tuning-fork vibrator is not supported and when it is supported by the support member 2. 6 to 9, reference numeral 10 denotes a trunk, 11a and 11b are excitation drive legs, 11c is a non-excitation drive leg, 12a and 12b are vibration detection legs, and 12c is a non-vibration detection leg. These simulation diagrams are distribution diagrams of displacements in the trunk portion 10 and the drive legs and detection legs in the vicinity of the trunk portion 10. 6 to 9 are drawn by computer simulation, the displacement distribution charts measured by the laser Doppler displacement meter have the same pattern. FIG. 6 is a distribution diagram of displacement in the driving vibration direction (in-plane vibration direction) when the trunk portion 10 is not supported, and FIG. 7 is a direction perpendicular to the driving vibration (plane vertical vibration direction) when the trunk portion 10 is not supported. It is a distribution map of displacement. FIG. 8 is a distribution diagram of displacement in the driving vibration direction (in-plane vibration direction) when the center of gravity of the body 10 is supported by the support member 2, and FIG. 9 is a drive when the center of gravity of the body 10 is supported by the support member 2. It is a distribution map of the displacement of the direction (plane perpendicular vibration direction) orthogonal to vibration. When FIG. 9 is compared with FIG. 7, when the center of gravity of the trunk portion 10 is supported by the support member 2, large surface vertical vibration appears in the trunk portion 10 and the detection leg 12 on the detection legs 12 a, 12 b, 12 c side. I understand.

  In a tuning fork type vibration gyro, it is inevitable to employ a vibrator mounting structure in which a vibrator is mounted on a package. Patent Documents 1 and 2 show a structure in which a cylindrical support member is fixed to the center of gravity of a tuning fork vibrator with an adhesive or the like to support the vibrator. In the vibrator mounting structure adopted in the tuning fork type vibration gyro of Patent Documents 1 and 2, the tuning fork type vibrator is supported on the same principle as the vibrator mounting structure shown in the schematic diagram of FIG. Asymmetry occurs in the vertical direction and appears on the vibration detection leg as leakage drive vibration, which becomes a noise component with respect to the detected vibration, and decreases the accuracy of angular velocity detection. As a structure for suppressing drive vibration from leaking to the vibration detection leg, those described in Patent Document 3 and Patent Document 4 have been proposed.

FIG. 11 (FIG. 1 in Patent Document 3) shows a rotational speed sensor 10 (tuning fork type vibration gyro) described in Patent Document 3. The rotational speed sensor 10 includes a housing 11, double ended (ie, H-type) tuning fork 13, and a rotational speed detection circuit 21. The housing 11 includes a lid 12, a base portion 14, and a mounting structure 15. The tuning fork 13 is etched from a single crystal of piezoelectric material. This material is made of quartz, lithium niobate (Lithium
Niobate) or other piezoelectric material.

  FIG. 12 (FIG. 3 in Patent Document 3) shows the tuning fork 13 described in Patent Document 3. The main body 16 of the tuning fork 13 has a surrounding frame 30 and an internal cavity 33. The tuning fork 13 includes excitation tines 31 and 32 and pickup tines 44 and 45. The tuning fork 13 also has a single dedicated mounting base 57 in the cavity 33. The mounting base 57 is spaced from the inner peripheral surface 18 of the frame 30, is surrounded by the mounting base 57, and is disposed at the center thereof. The mounting base 57 is coupled to the inner peripheral surface 18 by a suspension device 59 formed by cross bridges 61 and 62 and suspension bridges 64 to 67. The peripheral surface 71 of the mounting base 57 is spaced from the inner peripheral surface 18 of the main body 16 by an opening 73 in the + Y direction and by an opening 74 in the −Y direction.

  FIG. 13 (FIG. 4 in Patent Document 3) shows the base portion 14 and the mounting structure 15 of the housing 11 described in Patent Document 3. The attachment structure 15 is a pedestal 94. The pedestal 94 has substantially the same dimensions as the mounting surface 59 of the tuning fork 13. Returning to FIGS. 11 and 12, the tuning fork 13 is attached to the pedestal 94. The back surface 70 of the mounting base 57 is a single dedicated mounting surface of the tuning fork 13. This surface is fixed to the mounting surface 76 of the pedestal 94. This fixing is preferably performed by a conventional thermoplastic adhesive or epoxy resin. Thus, the tuning fork 13 is mounted in the housing 11 only at the single dedicated mounting surface 70. A suspension device 59 couples the mounting base 57 to the frame 30. The pedestal 94 may be made of stainless steel, aluminum, nickel alloy monel 400 or ceramics. It may be “garded” separately from the polished silicon or quartz wafer and then fixed to the base 14 using an epoxy resin. In the tuning fork type vibration gyro of Patent Document 3, the vibrator mounting structure is composed of a pedestal 94, a suspension device 59, and a mounting base 57.

  In the vibrator mounting structure described in Patent Document 3, since the internal cavity 33 is provided in the main body 16 of the tuning fork 13, it is necessary to perform a deep etching process on the main body 16 of the tuning fork 13. When the tuning fork 13 is made of a material for which an efficient etching method has not been established, for example, langasite, the vibrator mounting structure of the cited document 3 cannot be applied. Further, the vibrator mounting structure of the cited document 3 is provided with a suspension device 59 in the internal cavity 33. Therefore, the structure is complicated, expensive, and difficult to downsize.

  FIG. 14 is a view showing a support means for supporting the vibrator 50 in the vibration gyroscope of Patent Document 4. As shown in FIG. This support means is also an example of a vibrator mounting structure in which the vibrator 50 is mounted on a package. Reference numerals 51a, 51b, 52 and 53 in FIG. 14 denote support means. In FIG. 14A, the protrusions 51A and 51B are arranged vertically so as to sandwich the support hole 47 of the vibrator 50, and the vibrator 50 is pressure-bonded from above and below by the protrusions 51A and 51B. 14B and 14C, a pin 52a is provided toward the protrusion 52, and a hole 53a is provided toward the other protrusion 53. The protrusions 52 and 53 are arranged vertically so as to sandwich the support hole 47 of the vibrator 50, and the pin 52 a is inserted into the support hole 47, penetrated, and further inserted into the hole 53 a. The vibrator 50 is pressure-bonded from the direction.

  Similarly to the vibrator mounting structure of Patent Document 3, the vibrator mounting structure of Patent Document 4 in FIG. 14 needs to form the support hole 47 in the vibrator 50. Therefore, when the vibrator 50 is made of a material for which an efficient etching method has not been established, for example, langasite, the vibrator mounting structure of the cited document 4 cannot be applied. Further, in the vibrator mounting structure of the cited document 4, the support hole 47 is provided in a region where the detection vibration is minimized, but the vibrator as shown in FIG. 10 that couples the drive leg and the detection leg via the trunk. 6 to 9, the drive vibration (in-plane vibration) is not small even in the region where the detected vibration (surface vertical vibration) is small, so that the detection vibration is minimized. Even if the support hole 47 is provided, the drive vibration is not small in that region. Therefore, when the vibrator is pressure-bonded from above and below by the projections 51A and 51B, the energy loss of the drive vibration is large and practical application as a tuning fork type vibration gyro is difficult.

  In the vibrator mounting structure disclosed in Patent Documents 1 and 2 described above, as shown in FIG. 5, by supporting the body 10 of the tuning fork vibrator by the support member 2, the upper and lower asymmetry of the strain on the body 10 is achieved. As a result, the drive vibration leaks to the detection legs, which hinders the improvement of the angular velocity detection accuracy of the tuning fork type vibration gyro, and the stability of the detection accuracy is also impaired. Further, the vibrator mounting structure described in Patent Document 3 cannot be applied to a tuning fork vibrator made of a material for which an efficient etching method has not been established, such as Langasite, and the structure is complicated and expensive. Also, miniaturization is difficult. Further, the vibrator mounting structure described in Patent Document 4 cannot be applied to a tuning fork made of a material for which an efficient etching method has not been established, for example, langasite. The tuning fork type vibrator as shown in FIG.

  Therefore, an object of the present invention is to reduce the drive vibration leaking to the detection leg by suppressing the occurrence of vertical asymmetry of the distortion generated in the vibrator due to the tuning fork vibrator supported by the support member, and thus the tuning fork vibrator. The purpose is to improve and stabilize the angular velocity detection accuracy of the vibrating gyroscope. Another object of the present invention is applicable to a tuning fork vibrator made of a material for which an efficient etching method has not been established, such as langasite, and has a simple structure with little loss of vibration energy, It is to provide a vibrator mounting structure that can be miniaturized.

  In order to solve the above-mentioned problems, the present invention provides the following means.

(1) A pair of excitation drive legs, a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection leg, and is interposed between the body part and the package, the body part In a vibrator mounting structure of a tuning fork vibrator having a support member fixed region on the bottom surface of the substrate and a support member fixed to a support member mounting region of the package,
When a point at which the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface center of gravity position, the center of gravity position of the support member fixing region is on a longitudinal line of the tuning fork vibrator passing through the bottom surface center of gravity position. The vibrator mounting structure, wherein the vibrator mounting structure is located at a position close to the detection leg side from the bottom surface gravity center position.

(2) The distance between the gravity center position of the support member fixing region and the bottom surface gravity center position is 30% or more of the length of the support member fixing region in the longitudinal direction. The vibrator mounting structure described in 1.

(3) a pair of excitation drive legs and a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection leg, and is interposed between the body part and the package; In a vibrator mounting structure of a tuning fork vibrator having a support member fixed region on the bottom surface of the substrate and a support member fixed to a support member mounting region of the package,
When a point where the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface center of gravity position, the center of gravity position of the support member fixing region is on the longitudinal line of the tuning fork vibrator passing through the bottom surface center of gravity position. , At the position close to the detection leg side from the bottom center of gravity position,
The vibrator mounting structure, wherein a shape of the support member fixing region is symmetrical with respect to the longitudinal direction line and is sharpened toward the drive leg side.

  (4) The vibrator mounting structure according to (3), wherein the shape of the support member fixing region is a hexagon, or a trapezoid or a triangle with the detection leg side as a base.

(5) a pair of excitation drive legs and a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection leg, and is interposed between the body part and the package; In a vibrator mounting structure of a tuning fork vibrator having a support member fixed region on the bottom surface of the substrate and a support member fixed to a support member mounting region of the package,
When a point at which the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface gravity center position, the gravity center position of the support member fixing region is at the bottom surface gravity center position,
The shape of the support member fixing region is symmetric with respect to the longitudinal direction line of the tuning fork vibrator passing through the bottom center of gravity, and is sharpened toward the drive leg side,
The area of the support member fixing region on the detection leg side from the short direction line passing through the bottom surface center of gravity and orthogonal to the longitudinal direction line is the area of the support member fixing region on the drive leg side from the short direction line. A vibrator mounting structure characterized by a wider area.

  According to the present invention, due to the tuning fork vibrator supported by the support member, by suppressing the occurrence of vertical asymmetry of distortion generated in the vibrator, driving vibration leaking to the detection leg is reduced, As a result, it is possible to provide a vibrator mounting structure that can improve and stabilize the angular velocity detection accuracy of a tuning fork type vibration gyro. Furthermore, according to the present invention, the present invention can be applied to a tuning fork vibrator made of a material for which an efficient etching method has not been established, for example, langasite, and has a simple structure and a small size with less vibration energy loss. It is possible to provide a vibrator mounting structure that can be manufactured at low cost.

  Next, embodiments of the present invention will be described, and the present invention will be described more specifically with reference to the drawings. FIG. 1 is an exploded perspective view showing a tuning fork type vibrating gyroscope having a vibrator support structure according to a first embodiment of the present invention. FIG. 2 shows that the center point of the support member fixing region in the tuning fork vibrator of FIG. 1 is a position that is more than 30% closer to the detection leg side from the center of gravity of the tuning fork vibrator (the first embodiment of the present invention). It is a top view of the bottom face of the tuning fork type vibrator showing an embodiment. FIG. 3 is a diagram for explaining that the shape of the support member fixing region on the surface of the tuning fork type vibrator is sharp toward the drive leg side (second embodiment of the present invention). (A) is a plan view of the bottom surface of the tuning fork vibrator, (B) is a plan view of a hexagonal support member fixing region, and (C) is a pentagonal support member fixing region. FIG. FIG. 4 is a diagram for explaining that the shape of the support member fixing region on the surface of the tuning fork vibrator is a trapezoid or a triangle with the detection leg side as a base (third embodiment of the present invention). 1A is a plan view of the bottom surface of the tuning fork type vibrator, FIG. 1B is a plan view of a trapezoidal support member fixing region, and FIG. 1C is a triangular support member fixing region. FIG.

  1 to 4, 1 is a tuning fork type vibrator, 1 a is a support member fixing region in the tuning fork type vibrator 1, 2 is a support member, 3 is a package, 10 is a body part, 10 c is a center of gravity of the body part 10, 11 Is a drive leg, 11a and 11b are excitation drive legs, 11c is a non-excitation drive leg, 12 is a detection leg, 12a and 12b are vibration detection legs, 12c is a non-vibration detection leg, and 20c is a support member fixing region 1a. , 30 is a package substrate, 30a is a support member mounting area, 31a, 31b, 32a, 32b, 33a, 33b, 34a, 34b, 35a, 35b, 36a, 36b, 37a, 37b are terminals.

  In FIG. 1, the tuning fork vibrator 1, the support member 2, and the package 3 are shown in an exploded manner. In a state where the tuning fork vibrator 1, the support member 2, and the package 3 are combined, the lower surface of the support member 2 is fixed to the support member mounting region 30a on the upper surface of the package substrate 30 with an adhesive, and the upper surface of the support member 2 is the tuning fork. The type vibrator 1 is fixed to the support member fixing region 1a on the bottom surface of the body 10 with an adhesive. The state in which the members denoted by reference numerals 1, 2 and 3 are coupled is a state in which the support member 2 supports the fixing region 1a of the tuning fork type vibrator 1 with the support member mounting region 30a as a fulcrum. The child 1 is mounted on the package 3 via the support member 2.

  The drive leg 11 in the tuning fork vibrator 1 includes a non-excitation drive leg 11c in addition to the excitation drive legs 11a and 11b corresponding to the excitation drive legs 111a and 111b in the drive leg 111 of FIG. Similarly, the detection leg 12 in the tuning fork vibrator 1 includes a non-vibration detection leg 12c in addition to the vibration detection legs 12a and 12b corresponding to the vibration detection legs 112a and 112b in the detection leg 112 of FIG. The non-excitation drive leg 11c and the non-vibration detection leg 12c are also provided as the non-excitation drive side arm and the non-vibration detection side arm in the tuning fork type vibration gyro in Patent Documents 1 and 2. 11 and the detection leg 12 are provided for stabilizing the vibration, but it is not important for the operation of the present invention, and the present embodiment can be implemented even if these legs 11c and 12c are omitted as shown in FIG. Hereinafter, further description of the non-excitation drive leg 11c and the non-vibration detection leg 12c will be omitted. The operation of the tuning fork vibrator 1 in the tuning fork vibrator gyro shown in FIG. 1 is the same as that of the tuning fork vibrator shown in FIG.

  The tuning fork vibrator 1 of FIG. 1 is a single crystal piezoelectric body made of langasite. In the tuning fork vibrator 1, at least one of the drive legs 11a and 11b for excitation is provided with a drive electrode, and at least one of the vibration detection legs 12a and 12b is provided with a detection electrode. is there. The drive electrode and the detection electrode are connected to any of the terminals 31a, 31b, 32a, 32b, 33a, 33b, 34a, 34b, 35a, 35b, 36a, 36b, 37a, or 37b by bonding wires. However, these bonding wires are also not shown.

  FIG. 2 shows that the center point 20c of the support member fixing region 1a in the tuning fork vibrator 1 of FIG. 1 is a position shifted from the center of gravity position 10c of the tuning fork vibrator 1 by D toward the detection leg 12 (the present invention). 1 is a plan view showing a first embodiment of FIG. The center-of-gravity position 10c is a position where the center of gravity of the tuning fork vibrator 1 is projected onto the bottom surface of the trunk portion 10, and corresponds to the above-described bottom-surface center of gravity position. Here, referring to FIG. 8, when looking at the distribution of displacement in the in-plane vibration direction due to in-plane vibration in the body 10 (displacement due to drive vibration), the in-plane distortion is large on the drive leg 11 side and the detection leg 12 side. It is small. Further, referring to FIG. 9, when looking at the distribution of displacement due to surface vertical vibration (surface vertical displacement due to detection vibration) in the trunk portion 10, the displacement in the in-plane vibration direction is still large on the drive leg 11 side, and the detection leg 12. Small on the side. Therefore, the point where the distortion of the body 10 due to the combined vibration of the drive vibration and the detection vibration is minimized is located closer to the detection leg 12 side than the center of gravity position 10c of the tuning fork vibrator 1. In FIG. 2, the center of the support member fixing region 1a (coincidence with the center of gravity of the region 1a) 20c is 30% or more of the length L of 1a and is separated from the center of gravity 10c by a distance D (D ≧ 0.3L). Therefore, as compared with the conventional case where the center 20c of the support member fixing region 1a is located at the same position as the vibrator center of gravity 10c, the restraint of the support member 2 with respect to the drive vibration in the body portion 10 is significantly reduced. Accordingly, the upper and lower asymmetry of the strain is remarkably reduced between the upper side (the side not in contact with the support member 2) and the lower side (the side in contact with the support member 2 and the support member fixing region 1a side) of the trunk portion 10. The driving vibration that leaks into the vibration is reduced, and the angular velocity detection accuracy of the tuning fork type vibration gyro is improved and stabilized.

  As described above, in the embodiment of FIG. 1 and FIG. 2 (first embodiment), the center of the support member fixing region 1a of the trunk portion 10 is less strained in the distribution of vibration strain. It is in the point. Therefore, in the first embodiment, the influence of the restraint of the support member 2 on the drive vibration of the trunk portion 10 is small, and the upper side (side not in contact with the support member 2) and the lower side (in contact with the support member 2) of the trunk portion 10. The so-called vertical asymmetry of the strain, in which the magnitude of the distortion differs between the side and the support member fixing region 1a side), is significantly reduced, driving vibration leaking to the detection leg is reduced, and the angular velocity detection accuracy of the tuning fork type vibration gyro is improved. And stabilize.

  In the embodiment shown in FIGS. 1 and 2, langasite is used as the piezoelectric crystal material constituting the tuning fork vibrator 1. Langasite is a material for which an efficient etching method has not been established. However, the vibrator 1 and the support member 2 in the production of the present embodiment can be formed by machining with a wire saw or a grindstone. Therefore, the present embodiment can be easily realized because there is no process requiring molding.

  FIG. 3 is a plan view showing the vibrator mounting structure according to the second embodiment of the present invention. 3A and 3B, the shape of the support member fixing region 1a in the tuning fork vibrator 1 is a hexagon and has a sharp apex toward the drive leg 11 side. In FIG. 3C, the shape of the support member fixing region 1a in the tuning fork vibrator 1 is a pentagon, and the pentagon has a sharp apex toward the drive leg 11 side. In the embodiment shown in FIG. 3, the length of the support member fixing region 1a is L, and the distance between the center of gravity position 10c of the tuning fork vibrator 1 (corresponding to the above-mentioned bottom center of gravity position) and the center of gravity 20c of the support member fixing region 1a. When D, D ≧ 0.

  As shown in FIG. 8, the region from the vicinity of the boundary between the driving leg 11 and the trunk portion 10 to the center of gravity of the trunk portion 10 is a region showing a distribution in which the displacement of the driving vibration is large on the bottom surface of the trunk portion 10. In the embodiment shown in FIG. 3, the area of the support member fixing region 1a is small in the region showing the distribution in which the displacement of the driving vibration is large, and on the other hand, from the center of gravity of the body 10 where the displacement of the driving vibration is small. The area of is large. Therefore, as compared with the conventional case where the support member fixing region 1a is rectangular, the restraint of the support member 2 with respect to the driving vibration in the trunk portion 10 is remarkably small. Therefore, the distortion in the trunk portion 10 described with reference to FIG. As a result, the driving vibration leaking to the detection leg 12 is reduced, and as a result, the angular velocity detection accuracy of the tuning fork type vibration gyro can be improved and stabilized. The vibrator 1 and the support member 2 in the manufacturing of the present embodiment can be formed by machining with a wire saw or a grindstone, and since there is no process that requires forming by etching, the present embodiment can be easily realized.

  FIG. 4 is a diagram showing a vibrator mounting structure according to the third embodiment of the present invention, and has a configuration similar to FIG. In the embodiment shown in FIG. 4, the length of the support member fixing region 1a is L, and the distance between the center of gravity position 10c of the tuning fork vibrator 1 (corresponding to the above-mentioned bottom center of gravity position) and the center of gravity 20c of the support member fixing region 1a. When D, D ≧ 0.

  In the vibrator mounting structure of FIG. 4, the shape of the support member fixing region 1a is a trapezoid or a triangle with the detection leg 12 side as a base. Of the area of the support member fixing region 1a, the area from the vicinity of the boundary between the driving leg 11 and the body portion 10 to the center of gravity 10c, which is a region showing a distribution in which the driving vibration distortion of the body portion 10 is large, is small. The area on the detection leg 12 side from the center of gravity 10c showing a distribution with small distortion is large. Accordingly, since the restraint of the support member is reduced as a whole, the vertical asymmetry of the distortion in the trunk portion 10 described with reference to FIG. 5 is reduced, the drive vibration leaking to the detection leg 12 is reduced, and consequently the tuning fork type vibration gyroscope. It is possible to improve and stabilize the angular velocity detection accuracy. The vibrator 1 and the support member 2 in the manufacturing of the present embodiment can be formed by machining with a wire saw or a grindstone, and since there is no process that requires forming by etching, the present embodiment can be easily realized.

  Although the embodiments of the present invention have been specifically described above with reference to the drawings, it goes without saying that the present invention is not limited to these embodiments.

1 is an exploded perspective view showing a tuning fork type vibration gyro having a vibrator support structure according to a first embodiment of the present invention. FIG. 2 is a diagram showing the first embodiment of the present invention shown in FIG. 1, and a tuning fork vibrator 1 showing a relationship between a center position 20c of a support member fixing region 1a of a tuning fork type vibration gyro and a center of gravity 10c of a trunk portion 10; It is a top view of the bottom face. It is a figure which shows the 2nd Embodiment (vibrator support structure) of this invention, and the hexagonal vertex (A, B) or the shape where the shape of the support member fixation area | region 1a is sharp toward the drive leg 11 side or FIG. 3 is a plan view of the bottom surface of the tuning fork vibrator 1 showing a pentagonal vertex (C). It is a figure which shows the 3rd Embodiment (vibrator support structure) of this invention, and the shape of the support member fixation area | region 1a is a trapezoid (B) or a triangle (A, C) which makes the said detection leg 12 side a base. 4 is a plan view of the bottom surface of the tuning fork vibrator 1 showing that FIG. 6 is a schematic diagram showing a variation in distortion appearing in a vibrator when the body of the tuning fork vibrator is supported by a support member. It is a distribution map of the displacement of the drive vibration direction (in-plane vibration direction) when the trunk | drum 10 is not supported. FIG. 6 is a distribution diagram of displacement in a direction (plane vertical vibration direction) orthogonal to drive vibration when the body portion 10 is not supported. FIG. 6 is a distribution diagram of displacement in the driving vibration direction (in-plane vibration direction) when the center of gravity of the body portion 10 is supported by the support member 2. FIG. 6 is a distribution diagram of displacement in a direction orthogonal to driving vibration (plane vertical vibration direction) when the center of gravity of the trunk portion is supported by the support member. It is a figure explaining the operation principle of the tuning fork type vibrator of the structure which combined the drive leg and the detection leg with the trunk. It is a figure which shows the rotational speed sensor 10 (tuning fork type vibration gyro) of patent document 3. FIG. It is a figure which shows the tuning fork 13 of patent document 3. FIG. It is a figure which shows the base 14 and the attachment structure 15 of the housing 11 described in patent document 3. FIG. 6 is a view showing a support means for supporting a vibrator 50 in the vibration gyroscope of Patent Document 4. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Tuning fork type vibrator 1a Support member fixed area | region in the tuning fork type vibrator 1 2 Support member 3 Package 10 trunk | drum 10c vibrator center of gravity 11 Drive leg 11a, 11b, 111a, 111b Excitation drive leg 11c Non-excitation drive leg 12 Detection Leg 12a, 12b, 112a, 112b Vibration detection leg 12c Non-vibration detection leg 20c Support member fixing area center of gravity 30 Package substrate 30a Support member mounting area 31a, 31b, 32a, 32b, 33a, 33b, 34a, 34b, 35a, 35b, 36a, 36b, 37a, 37b Terminals α1, β1, α2, β2 Vibration displacement of drive legs a1, b1, a2, b2 Distortion on the upper side of the trunk (the side where the support member is not fixed) c1, d1, c2 , D2 Strain on the lower side of the trunk (the side to which the support member is fixed)

Claims (5)

A pair of excitation drive legs and a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection legs, and is interposed between the body part and the package; In the vibrator mounting structure of a tuning fork vibrator having a support member fixed region and a support member fixed to the support member mounting region of the package,
When a point at which the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface center of gravity position, the center of gravity position of the support member fixing region is on a longitudinal line of the tuning fork vibrator passing through the bottom surface center of gravity position. The vibrator mounting structure, wherein the vibrator mounting structure is located at a position close to the detection leg side from the bottom surface gravity center position.   2. The vibration according to claim 1, wherein a distance between the gravity center position of the support member fixing region and the bottom surface gravity center position is 30% or more of the length of the support member fixing region in the longitudinal direction. Child mounting structure. A pair of excitation drive legs and a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection legs, and is interposed between the body part and the package; In the vibrator mounting structure of a tuning fork vibrator having a support member fixed region and a support member fixed to the support member mounting region of the package,
When a point where the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface center of gravity position, the center of gravity position of the support member fixing region is on the longitudinal line of the tuning fork vibrator passing through the bottom surface center of gravity position. , At the position close to the detection leg side from the bottom center of gravity position,
The shape of the support member fixing region is symmetrical with respect to the longitudinal direction line, and is sharpened toward the drive leg side.   4. The vibrator mounting structure according to claim 3, wherein a shape of the support member fixing region is a hexagon, or a trapezoid or a triangle with the detection leg side as a base. 5. A pair of excitation drive legs and a pair of vibration detection legs, and a body part that couples the excitation drive legs and the vibration detection legs, and is interposed between the body part and the package; In the vibrator mounting structure of a tuning fork vibrator having a support member fixed region and a support member fixed to the support member mounting region of the package,
When a point at which the center of gravity of the tuning fork vibrator is projected onto the bottom surface is referred to as a bottom surface gravity center position, the gravity center position of the support member fixing region is at the bottom surface gravity center position,
The shape of the support member fixing region is symmetric with respect to the longitudinal direction line of the tuning fork vibrator passing through the bottom center of gravity, and is sharpened toward the drive leg side,
The area of the support member fixing region on the detection leg side from the short direction line passing through the bottom surface center of gravity and orthogonal to the longitudinal direction line is the area of the support member fixing region on the drive leg side from the short direction line. A vibrator mounting structure characterized by a wider area.

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