JP3409864B2 - Motor device having linear motor structure - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor device having a linear motor structure, and more particularly to a motor device having a linear motor structure suitable for high-speed and highly accurate positioning.

[0002]

2. Description of the Related Art In the field of ultra-precision machinery such as semiconductor manufacturing equipment, there is a demand for improving the positioning accuracy of an apparatus that drives an object in a relatively wide plane to perform positioning.

Conventionally, as a device for two-dimensionally driving an object, first, an x stage equipped with a servo motor and a ball screw for driving in the x-axis direction, which is one direction in a plane, is formed and then There is known an xy stage or the like in which a y-stage including a servo motor for driving in the y-axis direction and a ball screw is stacked.

According to the xy stage having such a structure,
A power transmission mechanism and a guide mechanism are required, and 100% of the power of the drive source is not transmitted to the target object, causing unnecessary distortion and elastic deformation of the mechanical members forming the stage. In addition, the combination of two stages increases the overall size, and as a result, when performing high-speed motion, the effects of vibration are likely to occur and the accuracy is likely to deteriorate.

Therefore, it is difficult to realize a high positioning accuracy of about 0.01 μm or less. In general, in order to reduce the amount of elastic deformation and the influence of vibration, it is often the case that the rigidity is increased by increasing the size of the mechanical structure. Further, in such a stage device, the device configuration
Generally, the center of gravity of the movable part of the stage cannot be directly driven.
Therefore, undesired rotary motion such as yawing and pitching
Cause a decrease in the straightness of exercise.
It

In such a structure, the stage device for realizing highly accurate positioning becomes large in size and weight.

[0007]

As described above,
In the conventional xy stage and the like, it was difficult to realize an ultra-precision stage device having a positioning accuracy of 0.01 μm, for example.

The present applicant previously proposed an ultra-precision plane motor device having a plurality of sets of linear motor structures directly on the stage (Japanese Patent Application No. 3-172326). In this planar motor apparatus, a plurality of sets of linear motor structure is attached directly to the stage, direct movement of xyθ direction
Since the drive method can be used, extremely high positioning accuracy can be realized.

In such a planar motor device, in order to position the stage with high accuracy, the thrust generators and
Generation of thrust command considering the deviation from the center of gravity of the stage,
Based on that, it is desired to apply a desired current to each coil .

However, the coil has impedance, and there is a temporal delay due to the impedance. Further, since a single stage can move in a plurality of directions, driving in one direction affects the other direction, and a counter electromotive force is generated in a coil that is not intended to be driven. Due to such a back electromotive force, the intended current does not flow.

As described above, a single current value affects the degrees of freedom in a plurality of directions, and even if an attempt is made to achieve a desired current value, there are factors that hinder the realization thereof. Therefore, the stage position is monitored, Even with feedback, it takes a relatively long time to position the stage with high accuracy.

An object of the present invention is to provide a motor device having a drive control mechanism suitable for realizing a stage device which is small in size, has ultraprecision accuracy, and can operate at high speed.

[0013]

A motor device having a linear motor structure according to the present invention is a motor device having a linear motor structure including a magnet portion for generating lines of magnetic force and a coil portion interlinking with the lines of magnetic force. Then, the motor device includes a plurality of coils, and from the position control error signal (r-x),
In order to correct the deviation, a thrust target value ( _fr ) corrected so as to reduce the interference generated in the plurality of coils is obtained, and based on this, at least the impedance of the plurality of coils and the impedance of the plurality of coils are generated. In consideration of the effective component of the thrust force, the target value (i _r ) of the current value flowing in the coils is corrected so as to correct at least the electrical temporary delay due to the coil impedance of the plurality of coils.
And a means for supplying a current (i) to the coil portion based on the target value (i _r ) of the current value, and a current supplying means for monitoring the current flowing in the coil. And a motor device having a linear motor structure including means for feeding back to the motor.

[0014]

[Function] Based on the target value of thrust, at least the impedance of the coil and the effective component of the thrust generated in the coil are taken into account to calculate the target value of the current flowing in the coil, so that the electrical temporary delay and the thrust Components such as loss and interference of multiple thrusts can be captured in advance.

Further, a desired current value can be quickly achieved by monitoring the current actually flowing in the coil and feeding it back to the current supply means for supplying the current based on the current target value.

For example, when a plurality of sets of linear motor structures are provided on one stage and the stage is positioned by supplying a predetermined current to the coils of the linear motor structure, interference between the coils is captured in advance to set the target current value. It is possible to realize a stage device that operates at high speed and with high accuracy by quickly achieving the electrode target value by setting the predetermined value and feeding back the current value.

[0017]

1 shows the basic structure of a motor device according to an embodiment of the present invention. Permanent magnets 6a, 6b and coils 9a, 9
b constitutes a set of linear motor structures. The permanent magnets 6a and 6b are mechanically and magnetically coupled by the yoke 5. The coils 9a and 9b are also coupled to each other. One of the permanent magnets 6a, 6b coupled by the yoke 5 or the coupled coils 9a, 9b moves relative to the other.

In order to drive this linear motor structure, it is assumed that a target thrust force f _r is set. Arithmetic circuit 20
Is an effective thrust calculation circuit 20a and a temporary delay compensation calculation circuit 2
Including 0b. The effective thrust calculation circuit 20a takes in a loss with respect to the thrust generated in the coil, a coupling state between the coil and the magnet, etc., and in order to generate a desired thrust, what voltage or current should be actually applied to the coil. Calculate if it must be.

Further, since a temporary delay occurs in the coil due to the coil impedance, the target current value required to actually realize the current value thus obtained is calculated by the temporary delay compensation calculation circuit 20b.

That is, the target current value i _r necessary for promptly generating a desired thrust is set by performing a calculation that incorporates a change in the effective thrust based on the linear motor structure and a temporary delay due to the coil impedance. It

The current supply circuit 25 controls the variable current source 25a based on the target current value i _r set in this way, and supplies the current i. This current i is applied to the coil 9
a, 9b, and the current value is monitored by the current monitor 30a.

The monitored current value is fed back to the current supply circuit 25 via the feedback loop 30b. The current supply circuit 25 uses the variable current source 25a based on the deviation between the set current value and the actually flowing current value.
To quickly achieve the desired current value.

With such a structure, a desired thrust can be quickly generated even when the effective driving force is affected by various factors. In addition, the target current value can be quickly achieved by flowing the current that compensates for the delay in the rising of the current due to the cause such as the coil impedance.

The present invention will be described below with reference to more specific examples. Taking the case of a planar motor device as an example, the mechanical structure of the planar motor device will be described first, and then the electrical control system will be described.

FIG. 2 shows a schematic view of a planar motor device according to an embodiment of the present invention. FIG. 2A is a plan view showing the positional relationship between the coil and the permanent magnet. FIG. 2B is a schematic side view showing the positional relationship between the permanent magnets and the coils.

As shown in FIG. 2A, the x-axis direction, the y-axis direction, and the rotation direction θ around an axis perpendicular to the x-axis and the y-axis are set in the movable plane of the plane motor. The planar motor device has a linear motor structure 1 in the x direction as a basic unit.
It has linear motor structures 14 and 15 in the 3 and y directions.
In the x-direction linear motor structure 13, four equivalent x coils 9a1, 9a2, 9a3, 9a4 are arranged side by side in the y-axis direction, separated by a predetermined distance in the x-axis direction, and another four equivalent coils are provided. X coils 9b1, 9b2, 9b3, 9b
4 are arranged side by side in the y-axis direction.

Further, two corresponding coils for x 9a.
A common high-permeability core 12 is disposed so as to pass through the first and the ninth b1. Similarly, the corresponding x coils 9a2 and 9b
The core 12 is arranged so as to penetrate through 2, 9a3 and 9b3, 9a4 and 9b4, respectively.

In the illustrated arrangement, one x magnet 6a long in the y direction is arranged so as to face the three x coils 9a1, 9a2, 9a3 arranged on the lower side in the drawing,
An x coil 6b that is long in the other y direction is arranged to face the other three x coils 9b1, 9b2, and 9b3.

The y-direction linear motor structures 14 and 15 have the same structure. That is, in the y-direction linear motor structure portion 14, the y coil 10b is provided.
1, 10b2, 10b3, 10b4 are arranged side by side in the x-axis direction, and the other y coils 10a1, 10a2, 10a3, 10 corresponding to the positions in the x direction are arranged below in the figure.
Similarly, a4 is arranged side by side in the x-axis direction.

Further, the coils for y 10b1 and 10a1, 10b2 and 10a2, 10b3 arranged corresponding to the upper and lower sides, respectively.
And 10a3, 10b4 and 10a4 respectively have core 12
Is placed through.

Further, the permanent magnet 7b for y which is long in the x-axis direction.
Is a coil for y 10b that is long in the x direction in the arrangement in the figure.
The other y magnets 7a arranged on the 1, 10b2, 10b3 and long in the x direction are y magnets 10a1, 10a2, 1
0a3 is arranged so as to face it.

The other y-direction linear motor structure portion 15 is
It has the same structure as the directional linear motor structure portion 14. That is, 11a1 to 11a4 and 11b1 to 11b4 are y
8a and 8b are y magnets, and 12 is a core.

FIG. 2B shows the x coils 9a1 and 9b1.
FIG. 3 is a schematic side view showing a relative relationship between x magnets 6a and 6b arranged thereon. The x coils 9a1 and 9b1 are fixed on the base 1, and the core 12 is penetrated on the axis thereof. The x magnets 6a and 6b are arranged via a gap 17 so as to face the x coils 9a1 and 9b1. These x magnets 6a and 6b are fixed to the yoke 5, and this yoke 5 is fixed to the lower surface of the stage member 3. At least the yoke 5 is made of a material having a high magnetic permeability.

The pair of x magnets 6a, 6b are arranged with their polarities reversed with respect to the yoke 5. In the illustrated configuration, one x magnet 6a has an N pole below and an S pole above, and the other x magnet 6b has an N pole above and an S pole below.

Therefore, the magnetic path 16 is formed as indicated by the broken line arrow in the figure, and the magnetic flux is distributed. In the presence of such a magnetic flux, when a current in the direction shown in the figure is given to the coil 9a1 and a current in the opposite direction as shown in the figure is given to the coil 9a1, the current flowing mainly in the upper portion of the coil is the magnetic flux. Interact with.

In these two coils, the directions of the magnetic flux are opposite to each other, so that a force in the x direction, which is the same direction, is generated in both coils for passing current in opposite directions. This force drives the stage member 3 in the x direction.

According to the same principle, a y-direction force is generated in the y-direction linear motor structure portions 14 and 15. For example, the force generated in the y-direction linear motor structures 14 and 15 causes the stage member 3 to be displaced in the y-direction.

At this time, although the coils facing the x magnets 6a and 6b are changed, some of the coils are different from the x magnets 6a and 6b.
It faces 6b. Therefore, a force in the x direction can be generated.

FIG. 3 shows the drive modes of the planar motor device having the structure shown in FIG. 3A shows the x translation mode, FIG. 3B shows the y translation mode, and FIG. 3C shows the θ rotation mode.

In FIG. 3A, a current is passed through the coil of the x-direction linear motor structure portion 13. Therefore, a force in the x direction is generated in the coil of the x direction linear motor structure portion 13 to drive the stage member in the x direction.

FIG. 3B shows the y translation mode. An electric current is applied to the coils of the y-direction linear motor structures 14 and 15 so that forces in the same direction are generated. Then, the same driving force in the y direction is generated in the coils of the y direction linear motor structure portions 14 and 15. Therefore, the stage member translates in the y direction.

FIG. 3C shows the θ rotation mode in the xy plane. Electric current is supplied to the y-direction linear motor structures 14 and 15 so that a force in the opposite y-direction is generated. For example, as shown in the drawing, current is supplied to each coil so that a force is generated in the -y direction in the y-direction linear motor structure portion 14 and in the + y direction in the y-direction linear motor structure portion 15. When parallel forces are generated in the opposite directions, the stage member that supports the permanent magnets of the linear motor structure portions 14 and 15 rotates in the + θ direction in the xy plane.

In the above description, it is assumed that each coil is fixed to the base, each permanent magnet is fixed to the stage member, and the stage can move freely in the xy plane. The force acting on the coil and the force acting on the permanent magnet are equal in magnitude and opposite in direction.

Such a structure can be realized, for example, by supporting the stage in the xy plane with a roller or the like, but as described below, it is more preferable to use a bearing mechanism such as an air bearing having less friction. preferable.

According to the structure in which the air bearings are combined such that the mechanical weight of the movable portion of the stage or the levitation force of the air bearings acts in the opposite direction to the attraction force of the magnets or the like, the stage has a predetermined height above the base. Hold on
It can be movably supported in the xy plane.

FIG. 4 is a perspective view showing an xy stage device equipped with a planar motor device. The base 1 has a flat guide surface 2 on which the x coil 9, the first
The y coil 10 and the second y coil 11 are fixed.

As the x coil 9, five coils are arranged coaxially in the x-axis direction, and a set of the same five coils is five.
The sets are arranged in parallel in the y direction. Also, the coil 1 for y
For 0 and 11, 5 coils are arranged coaxially in the y-axis direction,
Four sets of these five coils are arranged in the x direction. A core of high magnetic permeability such as iron is inserted in the center of the coaxially arranged coil.

An air pad 4 is provided on the guide surface 2 of the base 1.
The main stage 3 supported by is arranged. The air pad 4 has, for example, an air outlet on its lower surface, and floats on the guide surface 2 of the base 1 by the air blowing. When using a vertical stage for use in an SOR aligner or the like, by using a permanent magnet in combination with the air pad, planar movement is possible on a vertical surface.

A yoke 5 made of a high magnetic permeability material such as iron is fixed to the lower surface of the main stage 3. Further, x magnets 6 and y magnets 7 and 8 are fixed to the lower surface of the yoke 5. Each magnet has a length spanning a plurality of corresponding coils.

FIG. 5 shows the relationship between the magnet and the coil in FIG. 4 in more detail. FIG. 5A is a diagram in which only one phase of the combination of the magnet and the coil is taken out. Permanent magnets M1 and M2 in an antiparallel relationship are fixed to the lower surface of the yoke 5. The distance between the permanent magnets M1 and M2 is set equal to the distance between the corresponding coils C1 and C2.

As shown in the figure, when the permanent magnets M1 and M2 are arranged on the coils C1 and C2, they reach the core 12 in the coil C1 from the permanent magnet M1 and go through the core 12 to the permanent magnet M2. A magnetic path returning to the permanent magnet M1 via the yoke 5 is formed. The upper windings of the coils C1 and C2 intersect this magnetic path.

Therefore, when a current is passed through the coils C1 and C2, a force corresponding to the strength of the current is generated in the axial direction of the coil. However, in the coils C1 and C2, the magnetic fluxes travel in opposite directions. Therefore, when forces in the same direction are generated in the coils C1 and C2, these forces act in opposite directions and cancel each other out. If currents in opposite directions are applied to the coils C1 and C2, forces in the same direction are generated.

By passing a current through the coil, the yoke 5
Moves in the direction of the arrow. However, the magnets M1 and M2
Is moved to the boundary between the coils, a force in the opposite direction is generated from the adjacent coil, so that the force acting on the yoke 5 is reduced. Generation of such a force is shown in FIG.

That is, when one magnetic path is formed between the magnet and the coil and one-phase driving is performed, the generated force is as shown in FIG.
As shown in (A), it has a ripple shape. In the stage device of FIG. 4, each linear motor structure has four permanent magnets. As shown in FIG. 5B, two permanent magnets are set as a set, and the two sets are arranged with their phases shifted.

That is, as shown in the figure, when the magnets M1 and M2 are on the boundary between coils and a force cannot be generated,
The other magnets M3 and M4 are arranged on the coils C4 and C5 and can generate sufficient force.

When the yoke 5 moves and the magnets M3 and M4 are arranged on the boundaries between the coils, the magnets M1 and M2 are now arranged on the central portion of the coils, and a sufficient force is generated. The pattern of force generated by such two-phase driving is shown in FIG. 6 (B).

That is, by synthesizing the two-phase driving forces shown in the upper two stages of FIG.
(B) It is possible to obtain a substantially constant thrust as shown in the bottom row.

Each magnet has a shape elongated in the lateral direction of the corresponding coil. FIG. 5C shows the relationship between such a lateral direction of the magnet and the coil. Coils C1, C6, C7, C
8 are arranged side by side in the lateral direction.

On the other hand, the magnet M1 has the width of three coils. Therefore, even when the yoke 5 moves in the lateral direction of the coil, the magnet and the coil face each other for a sufficient length, and a necessary force can be generated.

That is, in order to drive the stage in a wide range to a certain extent in the plane, it is not preferable to make one magnet facing one coil, and as shown in the drawing, a plurality of coils are coupled in the axial direction. It is preferable that a plurality of sets of coils are arranged in the direction orthogonal to the axis.

As described above, by arranging a large number of coils and arranging a large number, for example, four magnets thereon so as to perform two-phase drive, the magnetic flux generated by the magnets is sufficiently linked to the coils, It is possible to generate a force necessary for driving the stage in a sufficiently wide range.

It will be apparent to those skilled in the art that various driving modes as shown in FIG. 3 can be realized by controlling the current flowing through the coil facing the magnet. By flying the stage with an air pad and driving it with a combination of a coil and a magnet, a force can be directly applied to the stage with almost no friction. Therefore, it is possible to prevent the structural member from being distorted or elastically deformed. In addition, the entire device can be downsized. In this way, a stage device capable of highly accurate positioning is provided.

A control system for operating such a highly accurate positionable stage device at a high speed will be described below. FIG. 7 shows a dynamic model of the stage device described above. A case is shown in which the structure is almost equivalent to that of the stage device shown in FIG.

The main stage 3 has three air pads 4
And an x-direction length measurement mirror Mx and a y-direction length measurement mirror My for measuring the position thereof. Further, the main stage 3 includes a set of x-direction permanent magnets and two sets of y-direction permanent magnets on its lower surface. The center of gravity of this main stage is indicated by G.

Outside the main stage 3, a laser length meter for measuring the length in the x direction at a position distant from the center of gravity G in the y direction and a length measuring device in the y direction at a position distant from the center of gravity G in the x direction by Dy1 and Dy2. Two laser length-measuring devices are provided for length measurement. With these laser length measuring machines, the coordinate X,
Y1 and Y2 are measured.

On the base supporting the main stage 3, a set of x-direction coils (inductance) Lx and two sets of y-direction coils (inductance) Ly1 and Ly2 are provided. Although resistance components accompany each of these coils, their resistance values are represented as Rx, Ry1, and Ry2.
Further, the forces acting on the main stage 3 by these coils are represented by Fx, Fy1, Fy2, and the distances from the center of gravity G of the points of action of these forces are represented by lx, ly, ly.

The voltage ux is applied to both ends of the x-direction drive coil Lx, and the drive voltages uy1 and uy2 are applied to both ends of the Y-direction drive coils Ly1 and Ly2 to drive the main stage 3.

When a current i having a length of 1 is passed in the magnetic flux density B,
A force F is generated with respect to an electric current as follows: F = B · l · i (1) In the case of this simple model, the current-thrust force gain Kf can be expressed by the following equation.

Kf = F / i (2) In this case, Kf = B · l. The magnetic flux density B can be obtained by the permeance method or the like.

By the way, in the actual stage plane motor, the difference between the center of gravity and the point of action of thrust causes
The next moment occurs. Further, the effective length of the coil interlinking with the magnetic flux changes as the stage moves. Therefore, Kf is actually a function of the stage position.

However, when the stage moves in a minute range, the variation of the gain Kf can be extremely small. When a voltage u is applied to a coil having an inductance L and a resistance R, the current flowing in the coil at this time is (L
S + R) ⁻¹ , a temporary delay appears. This delay causes a decrease in the current-thrust force gain or a phase delay when the input signal has a high frequency (for example, when the signal rises). Therefore, the followability in the high frequency region of the stage is reduced. Therefore, the settling time to the target value and the response speed are adversely affected.

When the current i flows, the current-thrust force gain Kf
A force F is generated accordingly. When the force F acts, an acceleration that is inversely proportional to the mass M of the stage is generated. When other forces such as gravitational acceleration also act, these other forces are also taken in.
The speed v of the stage is determined by integrating this acceleration. Further, the stage position x is determined by integrating the velocity v.

For such a moving stage system, an ordinary PID is used.
A control system for controlling is shown in FIG. Stage system 5
For 0, a voltage u is received by an adder (subtractor) 36, and a current is passed through a coil system 38 having an inductance L and a resistance R, so that a temporary delay occurs.

Due to the current flowing through the coil system, thrust is generated from the drive system 40 having the current-thrust force gain Kf.
This thrust becomes the velocity v by the inertial system 42 and becomes the position x by the integrating system 44.

The position x of the stage system 50 is monitored by a laser length meter and fed back to the adder 32 via the feedback system 48. Adder (subtractor) 3
In 2, the deviation is calculated from the set position r and the actual position x of the stage, and the voltage u is generated via the PID adjustment system 34.

By such control, the position of the stage system 50 can be accurately and automatically controlled. However, the initially set current does not flow through the coil system 38 having impedance, and it takes time for the current value to reach the set value.

Further, as is clear from the model of FIG.
For example, when a current is applied to the x-direction coil Lx to generate a force Fx in the x-direction, the position on which this force acts is the center of gravity G.
Therefore, the main stage 3 is not only moved in the x direction, but also moved in the y direction and rotated in the θ direction. A similar situation occurs when a current is applied to the y-direction coil Ly.

That is, in the stage system as shown in FIG. 7, the driving forces in the respective directions interfere with each other. In this way, when driving is performed in one direction, driving force is generated in the other direction, so that a counter electromotive force is generated in the corresponding coil. This feedback loop is shown by the feedback system 46 in FIG.

The proportional constant of this back electromotive force is represented by Ke. The counter electromotive force has a polarity opposite to that of the command voltage, and acts in the direction of reducing the current flowing through the coil. This affects the motion of the stage in other degrees of freedom according to the thrust.

FIG. 9 shows a stage control system according to an embodiment of the present invention. The difference from the control system according to the reference technique shown in FIG. 8 is that a portion between the PID adjusting system 34 and the adder 36, a feedback system of the output current of the coil system 38, and an arithmetic circuit 28 for coordinate conversion in the position feedback system. Is.

When the position target value r is set, the adder 3
It is applied to the PID adjustment system 34 via 2 and the target voltage is set. This target voltage is in the case of a simple ideal model, and in consideration of an actual stage system, an inverse operation (K
f) ^-1 and inverse calculation of coil temporary delay (Kamp) ^-1
It is corrected to a numerical value conforming to the stage system via the arithmetic circuit 20 for performing the above.

This set value is applied to the coil system 38 via the adder 21 and the adders 24 and 36 via PI control including the proportional circuit 22 and the integrating circuit 23 via the adder 21. The output current i of the coil system 38 is fed back to the adder 21 via the feedback system 30b and the coefficient circuit 26.

In this way, by performing the control in which the interference of the force acting on the position away from the center of gravity of the stage is compensated and the rising delay of the current due to the coil system is corrected, the stage system operates at high speed and at high speed. Controlled by precision.

When the current-thrust force gain matrix Kf can be treated as a constant value, the interference prevention calculation in the calculation circuit 20 may be carried out as shown in the following equation.

[0085]

[Equation 1]

By such calculation, the center of gravity G in the x direction,
The motions in the y direction and the θ direction can be expressed by the terms of the coils Lx, Ly1, and Ly2. In this way, the motion of each axis can be decoupled.

Driving force is applied to the stage system 50 from one coil in the x direction and two coils in the y direction. The movement of the entire stage is determined by the combination of these three forces.

FIG. 10 shows the drive mechanism of the stage system.
x coil voltage ux and two y coil voltages uy1, u
A driving force is applied to the stage by y2, and the stage moves in the x direction, the y direction, and the θ direction.

More specifically, the set voltage u causes a current to flow in the coil 51, and the interaction 52 in the magnetic field generates a driving force. This driving force causes the inertial system 53 to move at the velocity v, and the integration system 54 changes the position x,
It appears as y and θ. The counter electromotive force 55 is generated due to the interference between the respective axial directions.

Although the case of the planar motor has been described, it will be apparent to those skilled in the art that the same control system can be applied to other motor devices such as one-axis and three-axis motors. Although the present invention has been described above with reference to the embodiments, the present invention is not limited thereto. For example, it will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

[0091]

As described above, according to the present invention,
In a motor device having a linear motor structure, high speed and highly accurate control can be performed. In a planar motor device or the like, even when driving forces in a plurality of directions interfere with each other, it is possible to perform control in which interference is prevented in advance.

[Brief description of drawings]

FIG. 1 is a block diagram showing a basic configuration of the present invention.

FIG. 2 shows a planar motor device according to an embodiment of the present invention.
2A is a plan view and FIG. 2B is a side view.

FIG. 3 is a diagram for explaining a drive mode. Figure 3
3A shows the x translation mode, FIG. 3B shows the y translation mode, and FIG. 3C shows the θ rotation mode.

FIG. 4 is a perspective view showing a stage device according to an embodiment of the present invention.

5 is a schematic side view for explaining the principle of thrust generation of the stage device shown in FIG. FIG. 5 (A) shows one-phase driving, FIG. 5 (B) shows two-phase driving, and FIG. 5 (C) shows the arrangement of magnets in the lateral direction of the coil.

FIG. 6 is a graph for explaining a force generated corresponding to FIG.

FIG. 7 is a conceptual diagram showing a dynamic model of a stage.

FIG. 8 is a block diagram showing a control system according to a reference technique.

FIG. 9 is a block diagram showing a control system according to an embodiment of the present invention.

FIG. 10 is a block diagram showing a dynamic model of a stage system having interference between driving forces.

[Explanation of symbols]

1 base 2 guideway 3 Stage members (main stage) 4 air pads 5 York 6x magnet Magnet for 7 and 8 y 9 x coil Coil for 10, 11 y 12 cores 20 arithmetic circuit 25 Current supply circuit 30 Current value feedback circuit

─────────────────────────────────────────────────── --- Continuation of the front page (56) Reference JP-A-61-157285 (JP, A) JP-A-3-178747 (JP, A) JP-A-63-209405 (JP, A) JP-A-63- 140603 (JP, A) JP-A-5-22924 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H02P 7/00 H02K 41/02

Claims (2)

(57) [Claims] 1. A magnet part (6) for generating magnetic lines of force.
A motor device having a linear motor structure including: and a coil portion (9) interlinking with the magnetic force line, wherein the motor device includes a plurality of coils, and a deviation is corrected from a position control error signal (r-x). Therefore, the thrust target value ( _fr ) corrected to reduce the interference generated in the plurality of coils is obtained, and based on this, the impedance of at least the plurality of coils and the effective thrust of the plurality of coils are calculated. Delay compensation calculation means (20) for calculating the target value (i _r ) of the current value flowing through the coil so as to correct the electrical temporary delay due to the coil impedance of at least the plurality of coils in consideration of the components.
A means (25) for supplying a current (i) to the coil portion (9) based on the target value (i _r ) of the current value; and a current supply means (25) for monitoring the current flowing in the coil. A motor device having a linear motor structure including means (30) for feeding back to (25). 2. The linear motor structure includes one set in one direction in the plane and two sets in the other direction, the target value of the thrust is a vector amount in the plane, and the target value of the current value is The motor device according to claim 1, wherein the motor device is provided for each coil current value.