JP3393764B2 - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
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- JP3393764B2 JP3393764B2 JP25298096A JP25298096A JP3393764B2 JP 3393764 B2 JP3393764 B2 JP 3393764B2 JP 25298096 A JP25298096 A JP 25298096A JP 25298096 A JP25298096 A JP 25298096A JP 3393764 B2 JP3393764 B2 JP 3393764B2
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Description
【0001】[0001]
【発明の属する技術分野】本発明は、マイクロ波,ミリ
波等の高周波領域において、高いQ値を有する誘電体磁
器組成物に関するものであり、例えば、マイクロ波やミ
リ波などの高周波領域において使用される種々の共振器
用材料やMIC用誘電体基板材料、誘電体導波路用材料
や積層型セラミックコンデンサ等に用いることができる
誘電体磁器組成物に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition having a high Q value in a high frequency region such as microwave and millimeter wave, and is used in a high frequency region such as microwave and millimeter wave. The present invention relates to a dielectric ceramic composition which can be used for various resonator materials, MIC dielectric substrate materials, dielectric waveguide materials, laminated ceramic capacitors and the like.
【0002】[0002]
【従来技術】従来、誘電体磁器は、マイクロ波やミリ波
等の高周波領域において、誘電体共振器、MIC用誘電
体基板や導波路等に広く利用されている。2. Description of the Related Art Conventionally, dielectric porcelain has been widely used in dielectric resonators, MIC dielectric substrates, waveguides, etc. in a high frequency range such as microwaves and millimeter waves.
【0003】従来より、この種の誘電体磁器としては、
例えば特開昭57−69607号公報に開示されるよう
なものが知られている。この公報に開示される誘電体磁
器は、モル比による組成式BaO・xTiO2 において
3.9≦x≦4.1の組成物100重量部に対して、1
〜26重量部のZnOを添加してなるものである。Conventionally, as a dielectric ceramic of this type,
For example, the one disclosed in JP-A-57-69607 is known. The dielectric porcelain disclosed in this publication has a composition ratio of BaO.xTiO 2 based on a molar ratio of 1 to 100 parts by weight of a composition of 3.9 ≦ x ≦ 4.1.
~ 26 parts by weight of ZnO is added.
【0004】このような誘電体磁器では、比誘電率が3
0〜40で、測定周波数f=3.5〔GHz〕における
Q値が4500程度(Qf=15750〔GHz〕)で
あり、さらに共振周波数の温度係数τfを−25〜+2
5〔ppm/℃〕の範囲で制御することができる。In such a dielectric ceramic, the relative permittivity is 3
0 to 40, the Q value at the measurement frequency f = 3.5 [GHz] is about 4500 (Qf = 15750 [GHz]), and the temperature coefficient τf of the resonance frequency is −25 to +2.
It can be controlled within the range of 5 [ppm / ° C.].
【0005】しかしながら、この上記特開昭57−69
607号公報に開示される誘電体磁器ではQf値が15
750〔GHz〕程度であり、未だ低く、また、共振周
波数の温度係数τfの曲がり、即ち、温度ドリフトの直
線性が低いという問題があった。However, the above-mentioned Japanese Patent Laid-Open No. 57-69.
The dielectric ceramic disclosed in Japanese Patent No. 607 has a Qf value of 15
It is about 750 [GHz], which is still low, and there is a problem that the temperature coefficient τf of the resonance frequency is bent, that is, the linearity of the temperature drift is low.
【0006】このような問題を解決したものとして、特
開昭61−10806号公報に開示されるものが知られ
ている。この公報に開示される誘電体磁器組成物は、一
般式BaTi4 O9 で表される組成物100重量部に対
して、約1〜25重量部のZnOと、約1.5〜6重量
部のTa2 O5 とを添加、混合してなるもので、特性と
しては、温度ドリフト特性を表すΔfrを零付近に制御
することができるとともに、測定周波数13GHzにお
いてΔfrが零付近の誘電損失tanδを3.65〜
3.86×10-4(Qf値33700〜36000)と
することができる。As a solution to such a problem, the one disclosed in Japanese Patent Laid-Open No. 61-10806 is known. The dielectric ceramic composition disclosed in this publication is about 1 to 25 parts by weight of ZnO and about 1.5 to 6 parts by weight with respect to 100 parts by weight of the composition represented by the general formula BaTi 4 O 9. Ta 2 O 5 is added and mixed, and as a characteristic, Δfr representing the temperature drift characteristic can be controlled to near zero, and at the measurement frequency of 13 GHz, Δfr is a dielectric loss tan δ near zero. 3.65-
It can be set to 3.86 × 10 −4 (Qf value 33700 to 36000).
【0007】[0007]
【発明が解決しようとする課題】しかしながら、上記特
開昭61−10806号公報に開示される誘電体磁器で
は、温度ドリフト特性が零付近でのQf値は33700
〜36000であり、ますます使用周波数が高周波とな
り、しかも温度変化に対しても高精度の制御が必要にな
っている近年においては、温度ドリフト特性が零付近で
のQf値が未だ低いという問題があった。However, in the dielectric ceramic disclosed in Japanese Patent Laid-Open No. 61-10806, the Qf value when the temperature drift characteristic is near zero is 33700.
In recent years, the operating frequency has become higher and the high-precision control is required even with respect to temperature change. Therefore, there is a problem that the Qf value near the zero temperature drift characteristic is still low. there were.
【0008】[0008]
【課題を解決するための手段】本発明者等は、上記問題
点を解決すべく、鋭意検討した結果、Ba−Ti系誘電
体磁器組成物において、Baの一部をSrで置換すると
ともに、CuまたはCuとZnを所定量含有することに
より、比誘電率が30〜40で、Qfが41000〔G
Hz〕以上であり、共振周波数の温度係数τfを−20
〜+20〔ppm/℃〕の範囲で、かつ、共振周波数の
温度係数τfの曲がり(温度ドリフト)を−2〜+2
〔ppm/℃〕の範囲(−40〜85℃)で制御するこ
とができ、しかも温度ドリフト特性を表すΔτfが零付
近のQf値を42000以上、特には52000程度の
高Qf値とすることができることを見い出し、本発明に
至ったのである。Means for Solving the Problems As a result of intensive studies to solve the above problems, the present inventors have found that in the Ba—Ti based dielectric ceramic composition, part of Ba is replaced with Sr, and By containing a predetermined amount of Cu or Cu and Zn, the relative dielectric constant is 30 to 40 and the Qf is 41000 [G
Hz] or more and the temperature coefficient τf of the resonance frequency is -20
To +20 [ppm / ° C.] and the bending (temperature drift) of the temperature coefficient τf of the resonance frequency is −2 to +2.
It is possible to control in the range of [ppm / ° C.] (−40 to 85 ° C.), and it is possible to set the Qf value in the vicinity of zero of Δτf representing the temperature drift characteristic to a high Qf value of 42000 or more, particularly about 52000. The inventors have found what they can do and have reached the present invention.
【0009】即ち、本発明の誘電体磁器組成物は、金属
元素としてBaと、Tiと、Srと、Cuと、不可避不
純物とからなる誘電体磁器組成物であって、金属元素酸
化物のモル比による組成式を、(Ba1-aSra)O・x
TiO2と表した時、前記a、xが、0.01≦a≦
0.08、3.9≦x≦4.1を満足する主成分と、該
主成分100重量部に対して、CuをCuO換算で0.
01〜7重量部含有するものである。また、本発明の誘
電体磁器組成物は、金属元素としてBaと、Tiと、S
rと、Cuと、Znと、不可避不純物とからなる誘電体
磁器組成物であって、金属元素酸化物のモル比による組
成式を、(Ba 1-a Sr a )O・xTiO 2 と表した時、
前記a、xが、0.01≦a≦0.08、3.9≦x≦
4.1を満足する主成分と、該主成分100重量部に対
して、CuをCuO換算で0.01〜7重量部、Znを
ZnO換算で18重量部以下含有するものである。 That is, the dielectric ceramic composition of the present invention is a metal
As elements Ba, Ti, Sr, Cu, inevitable
A dielectric porcelain composition consisting of a pure substance and having a composition formula based on the molar ratio of metal element oxides is (Ba 1-a Sr a ) O.x
When expressed as TiO 2 , a and x are 0.01 ≦ a ≦
0.08, 3.9 ≤ x ≤ 4.1, and with respect to 100 parts by weight of the main component, Cu was converted to CuO in terms of CuO.
The content is 01 to 7 parts by weight. In addition, the present invention
The electric porcelain composition has Ba, Ti, and S as metal elements.
Dielectric composed of r, Cu, Zn, and unavoidable impurities
A porcelain composition, which is based on a molar ratio of metal element oxides
When the formula is expressed as (Ba 1-a Sr a ) O · xTiO 2 ,
Where a and x are 0.01 ≦ a ≦ 0.08 and 3.9 ≦ x ≦
4.1 against a main component satisfying 4.1 and 100 parts by weight of the main component
Then, 0.01 to 7 parts by weight of Cu in terms of CuO and 18 parts by weight or less of Zn in terms of ZnO are contained .
【0010】[0010]
【作用】本発明の誘電体磁器組成物では、組成式(Ba
1-a Sra )O・xTiO2 で表されるBa−Ti系誘
電体磁器組成物において、Baの一部を所定量のSrで
置換するとともに、CuまたはCuとZnを所定量含有
することにより、比誘電率が30〜40で、Qfが41
000〔GHz〕以上であり、−40〜85℃の温度範
囲で共振周波数の温度係数τfを−20〜+20〔pp
m/℃〕の範囲で、かつ、共振周波数の温度係数τfの
曲がり(温度ドリフト)を−2〜+2〔ppm/℃〕の
範囲に制御することが可能となり、しかも温度ドリフト
特性を表すΔτfが零付近のQf値を42000以上、
特には52000程度とすることが可能となる。In the dielectric ceramic composition of the present invention, the composition formula (Ba
1-a Sr a ) In the Ba-Ti-based dielectric ceramic composition represented by O · xTiO 2 , a part of Ba is replaced with a predetermined amount of Sr, and Cu or Cu and Zn are contained in a predetermined amount. Therefore, the relative permittivity is 30 to 40 and the Qf is 41.
000 [GHz] or more, and the temperature coefficient τf of the resonance frequency is -20 to +20 [pp in the temperature range of -40 to 85 ° C.
m / ° C] and the bending (temperature drift) of the temperature coefficient τf of the resonance frequency can be controlled within the range of -2 to +2 [ppm / ° C], and Δτf representing the temperature drift characteristic is Qf value near zero is 42000 or more,
Particularly, it can be set to about 52000.
【0011】即ち、本発明においては、Cuを含有する
ことによって、比誘電率の増加やQf値の向上、τfの
減少を促し、さらには焼成温度を大幅(約100℃)に
低下させることができる。さらに、Cuを含有すること
により、共振周波数の温度係数τfの曲がり(温度ドリ
フト)を−2〜+2〔ppm/℃〕の範囲で制御するこ
とができ、温度ドリフトの直線性を向上することができ
る。That is, in the present invention, by containing Cu, it is possible to promote an increase in the relative dielectric constant, an improvement in the Qf value, a decrease in τf, and further, a significant reduction in the firing temperature (about 100 ° C.). it can. Further, by containing Cu, the bending (temperature drift) of the temperature coefficient τf of the resonance frequency can be controlled in the range of −2 to +2 [ppm / ° C.], and the linearity of the temperature drift can be improved. it can.
【0012】また、Baの一部をSrで置換することに
より、Qf値を42000以上と大幅に向上することが
できるとともに、結晶粒の粗大化を抑制して耐還元性を
向上させ、磁器の大型化に伴うQf値の低下を抑えるこ
とができる。さらに、SrとBaのイオン半径が異なる
ため、Baの一部をSrで置換することにより格子歪み
が発生し、その結果、磁器の強度を向上させることがで
きる。Further, by substituting a part of Ba with Sr, the Qf value can be greatly improved to 42000 or more, and at the same time, the coarsening of the crystal grains is suppressed to improve the reduction resistance and It is possible to suppress a decrease in Qf value due to an increase in size. Furthermore, since the ionic radii of Sr and Ba are different, lattice distortion occurs by substituting a part of Ba with Sr, and as a result, the strength of the porcelain can be improved.
【0013】また、さらにZnを含有することによって
もQf値を向上することができ、しかも共振周波数の温
度係数τfをプラスからマイナス側に移行させることが
できる。Further, by further containing Zn, the Qf value can be improved and the temperature coefficient τf of the resonance frequency can be shifted from the plus side to the minus side.
【0014】[0014]
【発明の実施の形態】本発明の誘電体磁器組成物は、B
a−Ti系誘電体磁器組成物において、Baの一部をS
rで置換するとともに、CuまたはCuとZnを所定量
含有するものである。BEST MODE FOR CARRYING OUT THE INVENTION The dielectric ceramic composition of the present invention comprises B
In the a-Ti-based dielectric ceramic composition, part of Ba is S
It is substituted with r and contains a predetermined amount of Cu or Cu and Zn.
【0015】モル比による組成式を、(Ba1-a S
ra )O・xTiO2 と表した時、aが0.01≦a≦
0.08の範囲内としたのは、Baの一部をSrで置換
することにより、Qf値を大幅に向上することができる
とともに磁器強度を向上することができるからであり、
BaのSrによる置換量aが0.01より小さい場合に
は、Qf値向上の効果が小さく、また、磁器の機械的強
度向上の効果が小さいからである。一方、aが0.08
よりも大きくなるとSrの固溶限界量を超え、Srを含
む結晶相が析出し、Qf値が低下するからである。Ba
のSrによる置換量aは、高いQf値と機械強度の向上
という観点から0.01〜0.05であることが望まし
い。The compositional formula based on the molar ratio is (Ba 1-a S
When expressed as r a ) O · xTiO 2 , a is 0.01 ≦ a ≦
The reason for setting it in the range of 0.08 is that by substituting a part of Ba with Sr, the Qf value can be significantly improved and the porcelain strength can be improved.
This is because when the substitution amount a of Ba by Sr is smaller than 0.01, the effect of improving the Qf value is small and the effect of improving the mechanical strength of the porcelain is small. On the other hand, a is 0.08
This is because if it becomes larger than the above, the solid solution limit amount of Sr will be exceeded, a crystal phase containing Sr will be precipitated, and the Qf value will decrease. Ba
The substitution amount a of Sr with Sr is preferably 0.01 to 0.05 from the viewpoint of high Qf value and improvement of mechanical strength.
【0016】上記組成式において、xを3.9≦x≦
4.1の範囲内としたのは、この範囲内では高いQf値
を保持することができるからである。xの値が3.9よ
り小さい場合や、4.1より大きい場合はQf値は低下
する。高Qf値という観点からxの値は3.95以上
4.05以下が望ましい。In the above composition formula, x is 3.9≤x≤
The reason why it is within the range of 4.1 is that a high Qf value can be maintained within this range. When the value of x is smaller than 3.9 or larger than 4.1, the Qf value decreases. From the viewpoint of high Qf value, the value of x is preferably 3.95 or more and 4.05 or less.
【0017】また、主成分100重量部に対してCuを
CuO換算で0.01〜7重量部含有させたのは、Cu
がCuO換算で0.01重量部よりも少ない場合や7重
量部よりも多い場合には、共振周波数の温度係数τfの
曲がりが2〔ppm/℃〕よりも大きくなり、実用的で
ないからである。温度係数τfの曲がりを0付近にする
という観点から、CuはCuO換算で主成分100重量
部に対して0.1〜5.0重量部含有することが望まし
い。Further, the Cu content is 0.01 to 7 parts by weight in terms of CuO with respect to 100 parts by weight of the main component.
Is less than 0.01 parts by weight or more than 7 parts by weight in terms of CuO, the bending of the temperature coefficient τf of the resonance frequency becomes larger than 2 [ppm / ° C], which is not practical. . From the viewpoint of making the bending of the temperature coefficient τf close to 0, it is desirable that Cu is contained in an amount of 0.1 to 5.0 parts by weight based on 100 parts by weight of the main component in terms of CuO.
【0018】さらに、本発明においては、主成分100
重量部に対して亜鉛をZnO換算で18重量部以下含有
させることが望ましいが、主成分100重量部に対して
亜鉛をZnO換算で18重量部以下含有させたのは、亜
鉛が18重量部よりも多い場合には共振周波数の温度係
数τfが−20〔ppm/℃〕よりも小さくなり、実用
的でないからである。亜鉛の含有量は、共振周波数の温
度係数τfをより0に近くするという観点から主成分1
00重量部に対してZnO換算で4〜18重量部、特に
は8.7〜13.9重量部含有することが望ましい。Further, in the present invention, the main component 100
It is desirable that zinc is contained in an amount of 18 parts by weight or less in terms of ZnO with respect to parts by weight, but 18 parts by weight or less of zinc in terms of ZnO is included in 100 parts by weight of the main component. This is because the temperature coefficient τf of the resonance frequency becomes smaller than −20 [ppm / ° C.] when it is too large, which is not practical. From the viewpoint of making the temperature coefficient τf of the resonance frequency closer to 0, the content of zinc is 1
It is desirable to contain 4 to 18 parts by weight, especially 8.7 to 13.9 parts by weight in terms of ZnO with respect to 00 parts by weight.
【0019】本発明の誘電体磁器組成物は、上記組成式
において、0.01≦a≦0.05、3.95≦x≦
4.05であり、主成分100重量部に対して、亜鉛を
ZnO換算で8.7〜13.9重量部、CuをCuO換
算で0.1〜5.0重量部添加含有させることが望まし
い。この場合には、Qf値が49000〔GHz〕以
上、共振周波数の温度係数τfが−12〜+5〔ppm
/℃〕の範囲、共振周波数の温度係数τfの曲がり(温
度ドリフト)を−1.0〜+2.0〔ppm/℃〕の範
囲内に制御することができ、共振周波数の温度係数τf
の曲がり、即ち温度ドリフト特性を表すΔτfが零付近
のQf値を49000以上、特には55000程度とす
ることができる。The dielectric ceramic composition of the present invention has the following compositional formula: 0.01 ≦ a ≦ 0.05, 3.95 ≦ x ≦
It is 4.05, and it is desirable that zinc is added in an amount of 8.7 to 13.9 parts by weight in terms of ZnO and 0.1 to 5.0 parts by weight in terms of CuO based on 100 parts by weight of the main component. . In this case, the Qf value is 49000 [GHz] or more, and the temperature coefficient τf of the resonance frequency is −12 to +5 [ppm]
/ ° C], the bending (temperature drift) of the temperature coefficient τf of the resonance frequency can be controlled within the range of -1.0 to +2.0 [ppm / ° C], and the temperature coefficient τf of the resonance frequency can be controlled.
The Qf value in the vicinity of zero, that is, Δτf representing the temperature drift characteristic, can be set to 49000 or more, particularly about 55000.
【0020】また、本発明の誘電体磁器組成物には、B
aTi4 O9 結晶相が主結晶相として存在し、Znを含
有する場合には、磁器中にBa3 Ti12Zn7 O34結晶
相が均一に分散するものである。その他の結晶が少々析
出していても良い。そして、BaTi4 O9 結晶相およ
びBa3 Ti12Zn7 O34結晶相にSrが固溶している
ことが望ましい。このSrは、BaTi4 O9 およびB
a3 Ti12Zn7 O34結晶相のBaの一部と置換してい
る。本発明ではBa3 Ti12Zn7 O34結晶相を析出さ
せることにより、Qf値を向上するとともに、温度係数
τfをプラス側からマイナス側に制御することができ
る。Further, the dielectric ceramic composition of the present invention contains B
When the aTi 4 O 9 crystal phase exists as the main crystal phase and Zn is contained, the Ba 3 Ti 12 Zn 7 O 34 crystal phase is uniformly dispersed in the porcelain. Other crystals may be slightly precipitated. Then, it is desirable that Sr is solid-dissolved in the BaTi 4 O 9 crystal phase and the Ba 3 Ti 12 Zn 7 O 34 crystal phase. This Sr is BaTi 4 O 9 and B
It replaces a part of Ba in the a 3 Ti 12 Zn 7 O 34 crystal phase. In the present invention, the Qf value can be improved and the temperature coefficient τf can be controlled from the positive side to the negative side by precipitating the Ba 3 Ti 12 Zn 7 O 34 crystal phase.
【0021】本発明の誘電体磁器組成物は、例えば、原
料粉末として、BaCO3 ,TiO2 ,SrCO3 ,Z
nO,CuO粉末を準備し、これらを焼結体が上記した
組成比となるように秤量し、例えば、ZrO2 ボールに
より粉砕混合し、この混合粉末を仮焼した後、再度Zr
O2 ボールにより粉砕混合し、この仮焼粉末をプレス成
形やドクタ−ブレ−ド法等の公知の方法により所定形状
に成形し、大気中または酸素雰囲気中において1050
〜1300℃で1〜10時間焼成することにより得られ
る。The dielectric porcelain composition of the present invention contains, for example, BaCO 3 , TiO 2 , SrCO 3 and Z as raw material powders.
nO and CuO powders were prepared, weighed so that the sintered body had the above-mentioned composition ratio, pulverized and mixed with, for example, ZrO 2 balls, and the mixed powder was calcined, and then Zr was again used.
The mixture is crushed and mixed with O 2 balls, and the calcined powder is molded into a predetermined shape by a known method such as press molding or doctor blade method, and then 1050 in air or oxygen atmosphere.
It is obtained by firing at ˜1300 ° C. for 1 to 10 hours.
【0022】原料粉末は、焼成により酸化物を生成する
水酸化物、炭酸塩、硝酸塩等の金属塩を用いても良い。
本発明の誘電体磁器中には、不可避不純物として、A
l,Si,Ca,Mg,Fe,Hf,Sn等が含まれる
こともある。なお、CuOは仮焼後に添加しても良い。As the raw material powder, a metal salt such as a hydroxide, a carbonate or a nitrate which produces an oxide by firing may be used.
In the dielectric porcelain of the present invention, as an unavoidable impurity, A
1, Si, Ca, Mg, Fe, Hf, Sn, etc. may be included. CuO may be added after calcination.
【0023】本発明の誘電体磁器組成物では、BaTi
4 O9 結晶相中にBa3 Ti12Zn7 O34結晶相を均一
に分散させ、BaTi4 O9 結晶相,Ba3 Ti12Zn
7 O34結晶相にSrを固溶させるためには、特に105
0〜1150℃の温度で6時間以上仮焼することが必要
である。その理由は、1050℃よりも低温で6時間未
満の仮焼では、Ba3 Ti12Zn7 O34結晶相が形成さ
れ難いからである。In the dielectric ceramic composition of the present invention, BaTi
4 O 9 uniformly dispersing Ba 3 Ti 12 Zn 7 O 34 crystalline phase in the crystal phase, BaTi 4 O 9 crystal phase, Ba 3 Ti 12 Zn
In order to form a solid solution of Sr in the 7 O 34 crystalline phase,
It is necessary to calcine at a temperature of 0 to 1150 ° C. for 6 hours or more. The reason is that the calcination at a temperature lower than 1050 ° C. for less than 6 hours makes it difficult to form the Ba 3 Ti 12 Zn 7 O 34 crystal phase.
【0024】[0024]
【実施例】原料として純度99%以上のBaCO3 ,T
iO2 ,SrCO3 ,ZnO,CuOの粉末を用いて、
上記した組成式のa,x,Zn量およびCu量が表1に
示す割合となるように秤量し、純水を媒体とし、ZrO
2 ボールを用いたボ−ルミルにて20時間湿式混合し
た。次にこの混合物を乾燥(脱水)し、1100℃で6
時間仮焼した。この仮焼物を粉砕し、誘電特性評価用の
試料として直径10mm高さ8mmの円柱状に1ton
/cm2 の圧力でプレス成形し、これを大気中において
表1に示す温度で2時間焼成し、直径8mm、高さ6m
mの円柱状の試料を得た。[Example] BaCO 3 , T having a purity of 99% or more as a raw material
Using powders of iO 2 , SrCO 3 , ZnO and CuO,
ZrO was weighed so that the a, x, Zn and Cu contents of the above compositional formula would be the ratios shown in Table 1, and pure water was used as the medium.
Wet mixing was carried out for 20 hours on a ball mill using two balls. The mixture is then dried (dehydrated) and dried at 1100 ° C for 6
I calcined for an hour. This calcined product was crushed and used as a sample for dielectric property evaluation in a cylindrical shape having a diameter of 10 mm and a height of 8 mm and 1 ton.
Press-molded at a pressure of / cm 2 and fired in the air at the temperature shown in Table 1 for 2 hours to give a diameter of 8 mm and a height of 6 m.
A columnar sample of m was obtained.
【0025】誘電特性の評価は、前記試料を用いて誘電
体円柱共振器法にて周波数6GHzにおける比誘電率と
Q値を測定した。Q値と測定周波数fとの積で表される
値を表1に記載した。また、−40〜85℃の温度範囲
における共振周波数を測定し、25℃での共振周波数を
基準にして共振周波数の温度係数τfを算出した。The dielectric properties were evaluated by measuring the relative permittivity and Q value at a frequency of 6 GHz by the dielectric cylinder resonator method using the above sample. The value represented by the product of the Q value and the measurement frequency f is shown in Table 1. Further, the resonance frequency in the temperature range of -40 to 85 ° C was measured, and the temperature coefficient τf of the resonance frequency was calculated based on the resonance frequency at 25 ° C.
【0026】尚、表1中におけるτf1 は−40℃にお
ける共振周波数の温度係数であり、τf2 は85℃にお
ける共振周波数の温度係数である。ここで、τf1 =
[(f-40 −f25)/f25]/65×106 [ppm/
℃]、τf2 =[(f85−f25)/f25]/60×10
6 [ppm/℃]に基づいて計算した。f-40 は−40
℃における共振周波数であり、f85は85℃における共
振周波数であり、f25は25℃における共振周波数であ
る。さらに、共振周波数の温度係数の曲がりΔτf(温
度ドラフト)をΔτf=τf1 −τf2 の式から求め、
結果を表1に記載した。In Table 1, τf 1 is the temperature coefficient of the resonance frequency at -40 ° C, and τf 2 is the temperature coefficient of the resonance frequency at 85 ° C. Where τf 1 =
[(F -40 -f 25) / f 25] / 65 × 10 6 [ppm /
℃], τf 2 = [( f 85 -f 25) / f 25] / 60 × 10
6 Calculated based on [ppm / ° C]. f- 40 is -40
Is a resonance frequency at 85 ° C., f 85 is a resonance frequency at 85 ° C., and f 25 is a resonance frequency at 25 ° C. Further, the curve Δτf (temperature draft) of the temperature coefficient of the resonance frequency is obtained from the equation Δτf = τf 1 −τf 2 ,
The results are shown in Table 1.
【0027】[0027]
【表1】 [Table 1]
【0028】この表1から、本発明の試料では、比誘電
率が35以上、Qf値が41000〔GHz〕以上、共
振周波数の温度係数τfが±20〔ppm/℃〕の範囲
内で、かつ、共振周波数の温度係数τfの曲がりΔτf
が−2〜+2〔ppm/℃〕の優れた特性を有すること
が判る。また、共振周波数の温度係数の曲がりΔτfが
零付近のQf値を43000以上、特には55000程
度という高Qf値にできることが判る。From Table 1, in the sample of the present invention, the relative permittivity is 35 or more, the Qf value is 41000 [GHz] or more, the temperature coefficient τf of the resonance frequency is ± 20 [ppm / ° C], and , Bending of temperature coefficient τf of resonance frequency Δτf
Has excellent characteristics of -2 to +2 [ppm / ° C]. Further, it can be seen that the Qf value in the vicinity of the bending Δτf of the temperature coefficient of the resonance frequency is zero can be set to a high Qf value of 43,000 or more, particularly about 55,000.
【0029】そして、試料No.4を除く本発明の試料で
は、BaTi4 O9 結晶相およびBa3 Ti12Zn7 O
34結晶相を含有しており、これらの結晶相をX線マイク
ロアナライザ(EPMA)で分析した結果、Srが固溶
していることを確認した。Then, in the samples of the present invention except the sample No. 4, the BaTi 4 O 9 crystal phase and the Ba 3 Ti 12 Zn 7 O were used.
34 crystal phases were contained, and as a result of analyzing these crystal phases with an X-ray microanalyzer (EPMA), it was confirmed that Sr was in solid solution.
【0030】また、試料No.4〜9により、Znの含有
量を増加していくとQfが高くなり、共振周波数の温度
係数τfをマイナス側に移行でき、しかもΔτfが0に
近づくことが判る。Further, according to Samples Nos. 4 to 9, it is understood that as the Zn content increases, Qf increases, the temperature coefficient τf of the resonance frequency can shift to the negative side, and Δτf approaches 0. .
【0031】さらに、試料No.22〜29により、Cu
量が本発明の場合には範囲外の場合よりもQf値が増加
し、共振周波数の温度係数τfをマイナス側に移行で
き、Δτfが0に近づくことが判る。Further, according to Sample Nos. 22 to 29, Cu
It can be seen that in the case of the amount of the present invention, the Qf value increases more than in the case where the amount is out of the range, the temperature coefficient τf of the resonance frequency can shift to the negative side, and Δτf approaches 0.
【0032】[0032]
【発明の効果】以上詳述した通り、本発明によれば、B
a−Ti系誘電体磁器組成物において、Baの一部をS
rで置換するとともに、CuまたはCuとZnを所定量
含有することにより、比誘電率が30〜40で、Qfが
41000〔GHz〕以上であり、共振周波数の温度係
数τfを−20〜+20〔ppm/℃〕の範囲内で、か
つ、共振周波数の温度係数τfの曲がりを−2〜+2
〔ppm/℃〕の範囲内とすることができ、しかも共振
周波数の温度係数の曲がりΔτfが零付近のQf値を4
1000以上とすることができ、さらに磁器強度を向上
することができ、マイクロ波やミリ波などの周波数領域
において使用される種々の共振器用材料やMIC用誘電
体基板材料、誘電体導波路用材料等に最適とすることが
できる。As described above in detail, according to the present invention, B
In the a-Ti-based dielectric ceramic composition, part of Ba is S
By substituting with r and containing a predetermined amount of Cu or Cu and Zn, the relative dielectric constant is 30 to 40, Qf is 41000 [GHz] or more, and the temperature coefficient τf of the resonance frequency is -20 to +20 [. ppm / ° C] and the bending of the temperature coefficient τf of the resonance frequency is -2 to +2.
The value can be set within the range of [ppm / ° C.], and the Qf value when the bending Δτf of the temperature coefficient of the resonance frequency is near zero is 4
1000 or more, further improving the strength of the porcelain, various resonator materials used in frequency regions such as microwaves and millimeter waves, dielectric substrate materials for MIC, and dielectric waveguide materials And so on.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) C04B 35/42 - 35/50 CA(STN) REGISTRY(STN)─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) C04B 35/42-35/50 CA (STN) REGISTRY (STN)
Claims (2)
Cuと、不可避不純物とからなる誘電体磁器組成物であ
って、 金属元素酸化物のモル比による組成式を、 (Ba1-aSra)O・xTiO2 と表した時、前記a、xが、 0.01≦a≦0.08 3.9≦x≦4.1 を満足する主成分と、該主成分100重量部に対して、
CuをCuO換算で0.01〜7重量部含有することを
特徴とする誘電体磁器組成物。1. A metal element containing Ba, Ti, Sr,
A dielectric ceramic composition comprising Cu and inevitable impurities.
When the composition formula based on the molar ratio of the metal element oxide is expressed as (Ba 1-a Sr a ) O.xTiO 2 , the a and x are 0.01 ≦ a ≦ 0.08 3.9. For a main component satisfying ≦ x ≦ 4.1 and 100 parts by weight of the main component,
A dielectric ceramic composition containing 0.01 to 7 parts by weight of Cu in terms of CuO.
Cuと、Znと、不可避不純物とからなる誘電体磁器組
成物であって、 金属元素酸化物のモル比による組成式を、 (Ba 1-a Sr a )O・xTiO 2 と表した時、前記a、xが、 0.01≦a≦0.08 3.9≦x≦4.1 を満足する主成分と、該主成分100重量部に対して、
CuをCuO換算で0.01〜7重量部、 ZnをZnO
換算で18重量部以下含有することを特徴とする誘電体
磁器組成物。2. Ba, Ti, Sr as metal elements,
Dielectric porcelain set consisting of Cu, Zn, and unavoidable impurities
When the composition formula of the composition is expressed as (Ba 1-a Sr a ) O · xTiO 2 by the molar ratio of the metal element oxide , a and x are 0.01 ≦ a ≦ 0.08 For a main component satisfying 3.9 ≦ x ≦ 4.1 and 100 parts by weight of the main component,
0.01 to 7 parts by weight of Cu in terms of CuO, Zn as ZnO
A dielectric ceramic composition containing 18 parts by weight or less in terms of conversion.
Priority Applications (2)
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JP25298096A JP3393764B2 (en) | 1996-09-25 | 1996-09-25 | Dielectric porcelain composition |
US08/874,390 US5801112A (en) | 1996-06-14 | 1997-06-13 | Dielectric ceramic composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25298096A JP3393764B2 (en) | 1996-09-25 | 1996-09-25 | Dielectric porcelain composition |
Publications (2)
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JPH10101412A JPH10101412A (en) | 1998-04-21 |
JP3393764B2 true JP3393764B2 (en) | 2003-04-07 |
Family
ID=17244835
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JP (1) | JP3393764B2 (en) |
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1996
- 1996-09-25 JP JP25298096A patent/JP3393764B2/en not_active Expired - Fee Related
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