JP3213661U - Processing equipment - Google Patents

Abstract

A processing apparatus capable of saving space and reducing cost of the apparatus is provided. A bottom side mold part 20 disposed at the bottom of a frame body and a movable side mold part 40 disposed on a ceiling part of the frame body to advance and retreat, the movable side mold part 40 being a ceiling. A base part 55 fixed to the part, a movable side cylinder part 41 disposed between the base part 55 and the bottom side mold part 20, a movable side chamber part 45 formed in the movable side cylinder part 41, and a movable part An operating piston portion 50 that is inserted into the side chamber portion 45 and connected to the base portion 55, a movable piston portion 60 that is inserted below the operating piston portion 50, and a working fluid below the movable piston portion 60. A first movable-side inflow / outflow portion 46 that causes the working fluid to flow in and out, a second movable-side outflow / inflow portion 47 that causes the working fluid to flow in and out above the working piston portion 50, The third movable side that flows in and out between And a and out section 48. [Selection] Figure 2

Description

  The present invention includes a bottom side mold part on which a workpiece is placed, and a movable side mold part that is disposed to face the bottom side mold part and moves forward and backward with respect to the bottom side mold part. It relates to a processing apparatus.

  In the field of plastic working, for example, in press working, a movable mold part is disposed opposite to a bottom mold part on which a plate-shaped workpiece is arranged, and the movable mold part is moved by an operating mechanism such as a crank device. The workpiece is pressed and advanced with respect to the bottom mold part (see, for example, Patent Document 1). Further, when multi-step machining is performed on a workpiece, a multiple cylinder mechanism is formed in the movable mold part, and the cylinder mechanism is operated when the movable mold part moves forward.

  In this type of processing apparatus, the workpiece is pressurized when the movable mold portion is advanced by the operating mechanism. For this reason, it is necessary to generate a sufficient pressing force by the operating mechanism in order to perform good machining. However, the operating mechanism has been required to be improved because of the enormous cost of manufacturing and running costs as the apparatus becomes larger.

JP 2010-36226 A

  The present invention has been made in view of the above points, and provides a machining apparatus that can save space and reduce the cost of the apparatus.

  That is, the first device is arranged at the bottom part of the frame body and placed on the bottom side mold part on which the workpiece is placed, and arranged on the ceiling part of the frame body so as to face the bottom part side mold part. And a movable mold part that moves forward and backward with respect to the bottom mold part, wherein the movable mold part is fixed to the ceiling part of the frame body, A movable cylinder portion disposed between a base portion and the bottom mold portion; a movable chamber portion formed in the movable cylinder portion; and an operating rod portion fitted into the movable chamber portion and inserted into the movable chamber portion. An operating piston connected to the base via the movable piston, and a movable piston connected to the movable working part via the movable rod while being fitted below the operating piston of the movable chamber. And a working fluid communicated with the lower side of the movable cylinder portion A first movable side inflow / outflow portion for flowing in and out of the movable side piston portion of the movable side chamber portion and an upper side of the movable side cylinder portion to communicate working fluid to the working piston of the movable side chamber portion. A second movable-side inflow / outflow portion that flows into and out of the upper portion of the movable portion, and the working piston portion of the movable-side chamber portion that communicates from the upper side of the movable-side cylinder portion through the working piston portion. A processing apparatus comprising a third movable-side inflow / outflow portion that flows into and out of the movable-side piston portion.

  According to a second aspect of the present invention, the bottom side mold part includes a bottom side cylinder part fixed to the bottom part of the frame, a bottom side chamber part formed in the bottom side cylinder part, and the bottom side chamber part. And a bottom side piston portion connected to the bottom side processing portion via a bottom side rod portion and a bottom side of the bottom side chamber portion connected to a lower side of the bottom side cylinder portion. A working fluid flows into and out of the bottom side piston part of the bottom side chamber part, and communicates with a first bottom side inflow and outflow part that flows in and out of the piston part and an upper side of the bottom part side cylinder part. The processing apparatus according to the first aspect, comprising a second bottom side inflow / outflow portion.

  According to a third aspect of the present invention, the movable mold part further includes an auxiliary cylinder part provided on a lower side of the movable cylinder part, an auxiliary chamber part formed in the auxiliary cylinder part, and the auxiliary chamber part. And an auxiliary piston portion that is connected to the auxiliary processing portion via an auxiliary rod portion, and communicates with a lower side of the auxiliary cylinder portion to move the working fluid to the lower side of the auxiliary piston portion of the auxiliary chamber portion. A first auxiliary inflow / outflow portion for inflow / outflow; and a second auxiliary inflow / outflow portion that communicates with the upper side of the auxiliary cylinder portion and allows the working fluid to flow in / out to the upper side of the auxiliary piston portion of the auxiliary chamber portion. The processing apparatus according to the invention.

  According to the processing apparatus according to the first device, the bottom side mold part disposed on the bottom part of the frame body on which the workpiece is placed and the bottom side mold part facing the ceiling part of the frame body. And a movable side mold part that moves forward and backward with respect to the bottom side mold part, wherein the movable side mold part is fixed to the ceiling part of the frame body And a movable side cylinder part disposed between the base part and the bottom side mold part, a movable side chamber part formed in the movable side cylinder part, and being inserted into and operated in the movable side chamber part An operating piston portion connected to the base portion via a rod portion, and a movable portion that is fitted to the lower side of the operating piston portion of the movable side chamber portion and connected to a movable side processing portion via the movable rod portion. The side piston part is communicated with the lower side of the movable side cylinder part. A first movable-side inflow / outflow portion for allowing the working fluid to flow in / out of the movable-side chamber portion below the movable-side piston portion, and an upper side of the movable-side cylinder portion are communicated with the working fluid in the movable-side chamber portion. A second movable-side inflow / outflow portion that flows in and out of the upper side of the working piston portion and an operation fluid of the movable-side chamber portion communicated from the upper side of the movable-side cylinder portion through the working piston portion. Since the third movable-side inflow / outflow portion that flows in and out between the piston portion and the movable-side piston portion is provided, the apparatus can be reduced in size and space can be saved, and manufacturing costs and running costs can be reduced. Etc. can be reduced.

  According to the processing apparatus according to the second device, in the first device, the bottom side mold part is formed in the bottom side cylinder part fixed to the bottom part of the frame body and in the bottom side cylinder part. Operates in communication with the bottom side chamber part, the bottom side piston part that is inserted into the bottom side chamber part and connected to the bottom side processing part via the bottom side rod part, and the bottom side of the bottom side cylinder part A first bottom-side inflow / outflow portion that allows fluid to flow into and out of the bottom-side piston portion of the bottom-side chamber portion, and an upper side of the bottom-side cylinder portion to communicate working fluid to the bottom-side chamber portion. Since the second bottom portion side inflow / outflow portion for flowing in / out above the bottom portion side piston portion is provided, the processing portion can be supported in response to deformation during processing of the workpiece, and the processed material after processing Take out It becomes easy.

  According to the processing device according to the third aspect, in the first aspect, the movable side mold part is further formed in the auxiliary cylinder part provided in the lower side of the movable side cylinder part and in the auxiliary cylinder part. The auxiliary chamber portion, the auxiliary piston portion that is inserted into the auxiliary chamber portion and connected to the auxiliary processing portion via the auxiliary rod portion, and communicates with the lower side of the auxiliary cylinder portion to supply the working fluid to the auxiliary fluid portion. A first auxiliary inflow / outflow portion for flowing in and out of the auxiliary piston portion of the chamber portion and an upper side of the auxiliary cylinder portion for communicating working fluid into and out of the auxiliary piston portion of the auxiliary chamber portion. Since the second auxiliary inflow / outflow portion is provided, it is possible to smoothly perform a plurality of stages of processing steps.

It is a schematic sectional drawing of the processing apparatus which concerns on one Embodiment of this invention. It is principal part sectional drawing of the processing apparatus of FIG. It is principal part sectional drawing of the processing apparatus which advanced the movable side cylinder part. It is principal part sectional drawing of the processing apparatus which performs a 1st process process. It is principal part sectional drawing of the processing apparatus which performs a 2nd processing process.

  A processing apparatus 10 according to an embodiment of the present invention shown in FIGS. 1 and 2 is an apparatus that presses a plate-shaped workpiece M into a predetermined shape, and includes a frame 11, a bottom side mold part 20, and the like. The movable mold part 40 is provided. The frame body 11 is a member constituting the outer shape of the processing apparatus 10, and includes a bottom portion 12 and a ceiling portion 14 disposed to face the top of the bottom portion 12 via a horizontal frame 13 erected on the bottom portion 12. Have.

  As shown in FIG. 2, the bottom part mold part 20 is a part that is disposed on the bottom part 12 of the frame 11 and on which the workpiece M is placed. The bottom side mold part 20 supports the processed part in response to deformation during processing of the workpiece M and enables removal of the processed workpiece (processed product) after processing. Therefore, the bottom-side mold part 20 includes a bottom-side cylinder part 21 fixed to the bottom part 12 of the frame body 11, a bottom-side chamber part 25 formed in the bottom-side cylinder part 21, and a bottom-side piston part 30. The first bottom portion side inflow / outflow portion 26 and the second bottom portion side outflow / inflow portion 27 are provided. In FIG. 2, reference numeral 22 denotes a bottom side molding member provided on the bottom side cylinder portion 21 and also serves as a placement portion for the workpiece M, and 23 denotes a bottom side through hole formed in the bottom side molding member 22. .

  As shown in FIG. 2, the bottom-side piston portion 30 is a member that is fitted into the bottom-side chamber portion 25 and connected to the bottom-side processing portion 35 via the bottom-side rod portion 31. The bottom side processing portion 35 is a portion that is disposed on the side of the bottom side molding member 22 via a predetermined gap, serves as a placement portion for the workpiece M, and supports a processing portion of the workpiece M.

  As shown in FIG. 2, the first bottom-side inflow / outflow portion 26 communicates with the lower side of the bottom-side cylinder portion 21 and allows the working fluid to flow into and out of the bottom-side piston portion 30 of the bottom-side chamber portion 25. It is a part. The second bottom portion side inflow / outflow portion 27 is a portion that communicates with the upper side of the bottom portion side cylinder portion 21 and allows the working fluid to flow in and out above the bottom portion side piston portion 30 of the bottom portion side chamber portion 25. A hydraulic circuit (not shown) or the like capable of supplying or discharging a working fluid is appropriately connected to the first bottom-side inflow / outflow portion 26 and the second bottom-side outflow / inflow portion 27. The working fluid may be an appropriate medium such as air or water in addition to a known working oil. The same applies to the following description.

  As shown in FIGS. 2 to 5, the movable mold part 40 is disposed on the ceiling part 14 of the frame 11 so as to face the bottom mold part 20, and moves forward and backward with respect to the bottom mold part 20. Thus, the workpiece M placed on the bottom mold 20 is pressed and deformed. In this movable side mold part 40, a base part 55 fixed to the ceiling part 14 of the frame 11, a movable side cylinder part 41 disposed between the base part 55 and the bottom side mold part 20, and a movable side cylinder The movable side chamber part 45, the working piston part 50, the movable side piston part 60, the first movable side inflow / outflow part 46, the second movable side outflow / inflow part 47, and the third movable side outflow formed in the part 41. And an entrance 48. In the figure, reference numeral 42 denotes a movable side molding member provided on the lower side (bottom side mold part 20 side) of the movable side mold part 40.

  As shown in FIGS. 2 to 5, the operating piston portion 50 is a member that is fitted into the movable side chamber portion 45 and connected to the base portion 55 via the operating rod portion 51. That is, since the operating piston portion 50 is connected to the base portion 55 fixed to the ceiling portion 14 of the frame body 11, the operation piston portion 50 is fixed to the ceiling portion 14 side of the frame body 11. Therefore, when the operating piston portion 50 is fitted into the movable chamber portion 45, the movable cylinder portion 41 is held so as to be able to advance and retreat on the ceiling portion 14 side of the frame body 11.

  2 to 5, the movable side piston part 60 is fitted on the lower side of the working piston part 50 of the movable side chamber part 45 and is connected to the movable side processing part 65 via the movable side rod part 61. It is a member. That is, in the movable mold part 40, two piston parts (the working piston part 50 on the upper side and the movable piston part 60 on the lower side) are fitted in a single movable side chamber part 45.

  As shown in FIGS. 2 to 5, the first movable-side inflow / outflow portion 46 communicates with the lower side of the movable-side cylinder portion 41, and moves the working fluid to the lower side of the movable-side piston portion 60 of the movable-side chamber portion 45. This is the part that flows in and out. The second movable-side inflow / outflow portion 47 is a portion that communicates with the upper side of the movable-side cylinder portion 41 and allows the working fluid to flow into and out of the working piston portion 50 of the movable-side chamber portion 45.

  As shown in FIGS. 2 to 5, the third movable-side inflow / outflow portion 48 communicates from the upper side of the movable-side cylinder portion 41 through the working piston portion 50, and operates the working fluid on the movable-side chamber portion 45. This is a part that flows in and out between the piston part 50 and the movable piston part 60. The third movable side inflow / outflow part 48 of the embodiment has a piping member 49 that penetrates the working piston part 50 from the ceiling part 14 of the frame body 11 through the inside of the movable side chamber part 45 above the working piston part 50.

  In the movable-side mold part 40, as shown in FIGS. 2 to 5, in order to enable processing through a plurality of steps (two steps in the illustrated example) on the plate-like workpiece M, Further, an auxiliary cylinder portion 71 provided on the lower side of the movable cylinder portion 41, an auxiliary chamber portion 75 formed in the auxiliary cylinder portion 71, an auxiliary piston portion 80, a first auxiliary inflow / outflow portion 76, a first 2 auxiliary inflow / outflow portions 77.

  As shown in FIGS. 2 to 5, the auxiliary piston portion 80 is a member that is fitted into the auxiliary chamber portion 75 and connected to the auxiliary processing portion 85 via the auxiliary rod portion 81. In the embodiment, the auxiliary processing portion 85 is disposed inside the movable side molding member 42 and has a movable side through-hole 86 through which the movable side processing portion 65 can be inserted in the center portion.

  As shown in FIGS. 2 to 5, the first auxiliary inflow / outflow portion 76 communicates with the lower side of the auxiliary cylinder portion 71 and allows the working fluid to flow into and out of the auxiliary piston portion 80 of the auxiliary chamber portion 75. It is. The second auxiliary inflow / outflow portion 77 is a portion that communicates with the upper side of the auxiliary cylinder portion 71 and allows the working fluid to flow in and out of the auxiliary piston portion 80 of the auxiliary chamber portion 75.

  The first movable-side inflow / outflow portion 46, the second movable-side inflow / outflow portion 47, the third movable-side outflow / inflow portion 48, the first auxiliary inflow / outflow portion 76, and the second auxiliary inflow / outflow portion 77 include the first bottom-side outflow / inflow portion 26 and Similar to the second bottom portion side inflow / outflow portion 27, hydraulic piping, a pump, a tank, etc. (none of which are shown) capable of supplying or discharging the working fluid are appropriately connected.

  Here, an operation example of the processing apparatus 10 of the present invention will be described. First, the processing apparatus 10 shown in FIG. 2 is in a state before the workpiece M is processed. In the processing apparatus 10 before processing, in the bottom side mold part 20, the bottom side piston part 30 is located on the upper side of the bottom side chamber part 25, and the top surface of the bottom side processing part 35 and the top surface of the bottom side molding member 22 are Are arranged on the same surface, and the workpiece M is placed on the bottom side processed part 35 and the bottom side molded member 22. In the movable side mold part 40, the operating piston part 50 and the movable side piston part 60 are in contact with each other and are located on the lower side of the movable side chamber part 45, and the auxiliary piston part 80 is located on the lower side of the auxiliary chamber part 75. The movable cylinder portion 41 is brought into contact with the base 55, and the lower surface (tip surface) of the movable processing portion 65 and the lower surface of the auxiliary processing portion 85 are arranged on the same plane as the lower surface of the movable molding member 42. .

  Next, when the processing step is started, as shown in FIG. 3, the lower side of the movable side piston part 60 in the movable side chamber part 45 from the first movable side inflow / outflow part 46 on the lower side of the movable side cylinder part 41. The working fluid flows into the. At this time, the movable side piston part 60 is in contact with the lower side of the working piston part 50. The operating piston portion 50 is connected and fixed to the base portion 55 fixed to the ceiling portion 14 of the frame body 11 so that it does not move relative to the frame body 11. Therefore, the movable side cylinder part 41 is pushed down by the working fluid flowing between the lower side of the movable side chamber part 45 and the lower side of the movable side piston part 60, and the movable side cylinder part 41 is framed. It moves away from the base 55 fixed to the ceiling part 14 of the body 11 and advances toward the bottom side mold part 20.

  Along with the movement of the movable side cylinder part 41, the working fluid on the upper side of the working piston part 50 in the movable side chamber part 45 flows out from the second movable side inflow / outflow part 47 on the upper side of the movable side cylinder part 41. The In the example of FIG. 3, the movable-side cylinder portion 41 includes a movable-side molding member 42, a movable-side processing portion 65, and an auxiliary processing portion 85 that are disposed on the same surface, and the workpiece on the bottom-side mold portion 20. It has advanced to a position where it abuts against the material M.

  As shown in FIG. 4, when the working fluid further flows from the first movable side inflow / outflow portion 46 of the movable side cylinder portion 41 to the lower side of the movable side piston portion 60 in the movable side chamber portion 45, the movable side cylinder The part 41 is further advanced, and the first processing step of the workpiece M is started. At this time, as the movable cylinder portion 41 advances, the movable molding member 42 presses the workpiece M on the bottom portion machining portion 35 (the outer portion of the workpiece M). The working fluid flows into the upper side of the bottom side piston portion 30 in the bottom side chamber portion 25 from the second bottom side inflow / outflow portion 27 on the upper side of the bottom side piston portion 30, and the bottom side piston portion 30 moves downward in the bottom side chamber portion 25. The bottom side processing unit 35 is moved downward corresponding to the press deformation while supporting the workpiece M.

  Further, since the movable side cylinder portion 41 is further advanced while the auxiliary processing portion 85 is in contact with the workpiece M (the center portion of the workpiece M) on the bottom side molding member 22, The working fluid flows into the lower side of the auxiliary piston part 80 in the auxiliary chamber part 75 from the first auxiliary inflow / outflow part 76 on the lower side, and the auxiliary piston part 80 is moved in the upper direction of the auxiliary chamber part 75. That is, the auxiliary cylinder portion 71 is advanced together with the movable cylinder portion 41, while the auxiliary processing portion 85 is kept in contact with the workpiece M. When the bottom side piston part 30 and the auxiliary piston part 80 are moved, the first bottom side inflow / outflow part 26 on the lower side of the bottom side cylinder part 21 and the second auxiliary inflow / outlet part on the upper side of the auxiliary cylinder part 71 are used. From 77, the working fluid flows out.

  Subsequently, as shown in FIG. 5, the working piston portion 50 and the movable piston portion 60 in the movable chamber portion 45 are connected via a piping member 49 penetrating the working piston portion 50 from the upper side of the movable cylinder portion 41. During this time, the working fluid is introduced to perform the second processing step. At this time, since the working piston portion 50 is fixed (they do not move with respect to the frame body 11), the movable side piston portion 60 has a working fluid between the working piston portion 50 and the movable side piston portion 60. Is pushed down by being introduced. Thereby, the movable side processing part 65 protrudes downward from the lower surface of the auxiliary processing part 85, penetrates the workpiece M, and the processed product M1 is obtained. Along with the movement of the movable side piston part 60, the working fluid on the lower side of the movable side piston part 60 in the movable side chamber part 45 flows out from the first movable side inflow / outflow part 46 on the lower side of the movable side cylinder part 41. The

  After the workpiece M1 is obtained, the movable side piston portion 60 is moved in the upper direction of the movable side chamber portion 45 to move the movable side machining portion 65 away from the workpiece M1, and as shown in FIG. It is retracted to a position where it comes into contact with the base 55. And the bottom part side piston part 30 is moved to the upper direction of the bottom part side chamber part 25, and the bottom part side process part 35 is raised, The workpiece M1 can be lifted and taken out.

  As described above, in the processing apparatus 10, the fixed operating piston part 50 and the movable piston part 60 that is movable back and forth are fitted into the single movable side chamber part 45, and the movable side chamber part 45 operates. The working fluid can flow into and out of the piston portion 50, between the movable chamber portion 45 and the movable piston portion 60, and between the working piston portion 50 and the movable piston portion 60, respectively. Both the movable side cylinder part 41 and the movable side piston part 60 can be advanced and retracted without using a conventional operation mechanism such as a device. Therefore, it is not necessary to install a conventional operating mechanism, the apparatus can be miniaturized, space saving can be achieved, and manufacturing costs, running costs, and the like can be reduced.

  In the bottom side mold part 20, the bottom side piston part 30 connected to the bottom side processing part 35 is fitted in the bottom side chamber part 25 of the bottom side cylinder part 21. Therefore, the processed portion is supported in response to deformation during processing of the workpiece M, and the occurrence of damage to the workpiece during processing can be suppressed. Furthermore, after processing, it is easy to take out the processed material (processed product) after processing.

  In addition, the movable mold part 40 is further provided with an auxiliary cylinder part 71 having an auxiliary chamber part 75 into which an auxiliary piston part 80 connected to the auxiliary processing part 85 is inserted. For this reason, it is possible to smoothly perform a plurality of stages of processing steps.

  As described above, the processing device according to the present invention does not require a conventional operation mechanism, is miniaturized, and the economic burden is greatly reduced. Therefore, it is promising as an alternative to the conventional processing apparatus.

DESCRIPTION OF SYMBOLS 10 Processing apparatus 11 Frame body 12 Bottom part 13 Horizontal frame 14 Ceiling part 20 Bottom part side mold part 21 Bottom part side cylinder part 22 Bottom part side molding member 23 Bottom part side through-hole 25 Bottom part side chamber part 26 1st bottom part side inflow / outflow part 27 2nd Bottom portion side inflow / outflow portion 30 Bottom portion side piston portion 31 Bottom portion side rod portion 35 Bottom portion side processing portion 40 Movable side mold portion 41 Movable side cylinder portion 42 Movable side molding member 45 Movable side chamber portion 46 First movable side inflow / outflow portion 47 Second Movable side outflow / inflow section 48 Third movable side outflow / inflow section 49 Piping member 50 Working piston section 51 Working rod section 55 Base section 60 Movable side piston section 61 Movable side rod section 65 Movable side processing section 71 Auxiliary cylinder section 75 Auxiliary chamber section 76 1st Auxiliary inflow / outflow portion 77 Second auxiliary inflow / outflow portion 80 Auxiliary piston portion 81 Auxiliary rod portion 85 Auxiliary processing portion 86 Movable side penetration Through-hole M Work material M1 Processed product

Claims (3)

A bottom side mold part disposed on the bottom of the frame body on which a workpiece is placed, and a bottom side mold part disposed on the ceiling part of the frame facing the bottom side mold part. A processing apparatus having a movable mold part that moves forward and backward,
The movable mold part is
A base fixed to the ceiling of the frame;
A movable cylinder portion disposed between the base portion and the bottom mold portion;
A movable chamber portion formed in the movable cylinder portion;
An operating piston portion that is inserted into the movable side chamber portion and connected to the base portion via an operating rod portion;
A movable-side piston portion that is inserted into a lower side of the working piston portion of the movable-side chamber portion and is connected to a movable-side processing portion via a movable-side rod portion;
A first movable-side inflow / outflow portion that communicates with a lower side of the movable-side cylinder portion and causes the working fluid to flow into and out of the movable-side chamber portion below the movable-side piston portion;
A second movable side inflow / outflow part communicating with the upper side of the movable side cylinder part and allowing the working fluid to flow in / out above the working piston part of the movable side chamber part;
A third movable side that communicates from the upper side of the movable side cylinder portion through the working piston portion and allows the working fluid to flow in and out between the working piston portion and the movable side piston portion of the movable side chamber portion. An inflow / outflow part. The bottom mold part is
A bottom side cylinder portion fixed to the bottom portion of the frame,
A bottom side chamber portion formed in the bottom side cylinder portion;
A bottom-side piston portion that is inserted into the bottom-side chamber portion and connected to the bottom-side processing portion via a bottom-side rod portion;
A first bottom-side inflow / outflow portion that communicates with a lower side of the bottom-side cylinder portion and causes the working fluid to flow into and out of the bottom-side piston portion of the bottom-side chamber portion;
The processing apparatus according to claim 1, further comprising: a second bottom-side inflow / outflow portion that communicates with an upper side of the bottom-side cylinder portion and allows a working fluid to flow into and out of the bottom-side piston portion of the bottom-side chamber portion. . The movable mold part further includes:
An auxiliary cylinder provided on the lower side of the movable cylinder,
An auxiliary chamber portion formed in the auxiliary cylinder portion;
An auxiliary piston portion that is inserted into the auxiliary chamber portion and connected to the auxiliary processing portion via the auxiliary rod portion;
A first auxiliary inflow / outflow portion that communicates with the lower side of the auxiliary cylinder portion and causes the working fluid to flow into and out of the auxiliary piston portion of the auxiliary chamber portion;
The processing apparatus according to claim 1, further comprising: a second auxiliary inflow / outflow portion that communicates with an upper side of the auxiliary cylinder portion and allows the working fluid to flow in / out of the auxiliary chamber portion above the auxiliary piston portion.

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