JP3267942B2 - Phase-synchronized ultrasonic flowmeter - Google Patents
Phase-synchronized ultrasonic flowmeterInfo
- Publication number
- JP3267942B2 JP3267942B2 JP35489498A JP35489498A JP3267942B2 JP 3267942 B2 JP3267942 B2 JP 3267942B2 JP 35489498 A JP35489498 A JP 35489498A JP 35489498 A JP35489498 A JP 35489498A JP 3267942 B2 JP3267942 B2 JP 3267942B2
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- Japan
- Prior art keywords
- output
- frequency
- frequency divider
- amplifier
- delay circuit
- Prior art date
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Description
【0001】[0001]
【発明の属する技術分野】本発明は位相同期(フェーズ
ロックループ、以下PLLと略記する)式超音波流量計
の改良に係るものであり、特に小口径タイプの流量計に
適した超音波流量計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a phase-locked (phase-locked loop, hereinafter abbreviated as PLL) type ultrasonic flowmeter, and more particularly to an ultrasonic flowmeter suitable for a small-diameter type flowmeter. About.
【0002】[0002]
【従来の技術】図7は、従来のPLL式超音波流量計を
示し、以下その概要を説明する。同図において符号1は
流体入口1aと同出口1bを有する流路用管体、2a、
2bは管体の両端に設けた1対の超音波振動子を示す。2. Description of the Related Art FIG. 7 shows a conventional PLL type ultrasonic flow meter, and its outline will be described below. In the figure, reference numeral 1 denotes a flow tube having a fluid inlet 1a and an outlet 1b, 2a,
2b shows a pair of ultrasonic transducers provided at both ends of the tube.
【0003】3は切換器であり、励振電圧源4と受信信
号の増幅器5を上記振動子2aまたは2bへ交互に切換
えて接続する機能を有するが、その切換信号については
ここで触れない。A switch 3 has a function of alternately switching and connecting the excitation voltage source 4 and the amplifier 5 of the received signal to the vibrator 2a or 2b, but the switching signal will not be described here.
【0004】6は位相比較器であり、増幅器5から与え
られる入力信号61と分周器9から与えられる帰還信号
62との間の位相差に応じたパルス出力をローパスフィ
ルタ7に与える。[0006] Reference numeral 6 denotes a phase comparator which supplies a low-pass filter 7 with a pulse output corresponding to a phase difference between an input signal 61 supplied from the amplifier 5 and a feedback signal 62 supplied from the frequency divider 9.
【0005】ローパスフィルタ7の出力を受ける電圧制
御発振器(VCOと略記される)8は高い周波数の可変
周波数信号を分周比が通常1000以上の分周器9に与
えるとともに出力端子10に出力周波数信号を発生す
る。この信号の処理装置についての説明は省略する。[0005] A voltage controlled oscillator (abbreviated as VCO) 8 receiving the output of the low-pass filter 7 supplies a high frequency variable frequency signal to a frequency divider 9 having a frequency division ratio of usually 1000 or more. Generate a signal. A description of the signal processing device will be omitted.
【0006】このように構成することにより振動子2
a、2b間にいわゆるシングアラウンド発振が起り、出
力端子10にはシングアラウンド周波数に分周器9の分
周比に応じた高い周波数増倍率を乗じた出力周波数信号
が得られる。By virtue of such a configuration, the vibrator 2
A so-called sing-around oscillation occurs between a and 2b, and an output terminal 10 obtains an output frequency signal obtained by multiplying the sing-around frequency by a high frequency multiplication factor corresponding to the frequency division ratio of the frequency divider 9.
【0007】したがって、切換器3を操作して超音波の
向きを反転し、各振動子2a、2bから得られる2つの
出力周波数の差から高い分解能で流速すなわち流量が計
測できる。Therefore, the direction of the ultrasonic wave is reversed by operating the switch 3, and the flow velocity, that is, the flow rate, can be measured with high resolution from the difference between the two output frequencies obtained from the vibrators 2a, 2b.
【0008】[0008]
【発明が解決しようとする課題】しかしながら前記PL
L方式は小口径流量計に適用すると次ぎのような技術的
問題が生ずる。However, the above PL
When the L method is applied to a small-diameter flowmeter, the following technical problems occur.
【0009】一般に数リットル/分以下の流量を測定す
る流量計の管体内径は数ミリ程度にする必要があり、し
たがって超音波の伝播路断面積が小さく、超音波の減衰
が著しい。In general, the inner diameter of the pipe of a flow meter for measuring a flow rate of several liters / minute or less needs to be about several millimeters. Therefore, the cross-sectional area of the ultrasonic wave propagation path is small, and the ultrasonic wave is remarkably attenuated.
【0010】このため励振電圧源4の出力電圧を高める
か、増幅器5の増幅度を上げるのが普通である。しか
し、切換器3として使用されるいわゆるアナログスイッ
チにおいては、オフ状態にあるスイッチの静電容量によ
り励振電圧が増幅器側にスパイク状態のノイズとして漏
れ、場合によっては受信波より大きくなる。For this reason, it is common to increase the output voltage of the excitation voltage source 4 or increase the amplification of the amplifier 5. However, in a so-called analog switch used as the switch 3, the excitation voltage leaks to the amplifier side as spike noise due to the capacitance of the switch in the off state, and in some cases, becomes larger than the received wave.
【0011】ところでシングアラウンド発振において
は、増幅器5が超音波信号を受信すると、同時に励振電
圧源4より次の超音波を送るよう振動子2aまたは2b
を励振するので、受信側で見ると受信波検出時に上述の
励振ノイズが重なり、場合によっては正常な動作が困難
になる。In the sing-around oscillation, when the amplifier 5 receives an ultrasonic signal, the oscillator 2a or 2b transmits the next ultrasonic wave from the excitation voltage source 4 at the same time.
Is excited, when viewed on the receiving side, the above-described excitation noise overlaps when a received wave is detected, and in some cases, normal operation becomes difficult.
【0012】[0012]
【課題を解決するための手段】本発明は上述の課題を解
決するためになされたもので、本発明に係る第1発明の
位相同期式超音波流量計は、流路用管体に対向して取り
付けた1対の超音波振動子と、これら1対の振動子の送
・受信を切換える切換器と、流体内を伝播する超音波に
より受信側の振動子に生じる受信信号を増幅する増幅器
と、同増幅器の出力を入力信号とする位相比較器と、同
位相比較器の出力を平滑化するローパスフィルタと、同
フィルタの出力に応じて発振周波数を変える電圧制御発
振器と、同発振器の出力周波数を分周する分周器と、同
分周器出力を遅延せしめる遅延回路とを備え、前記分周
器の出力を位相比較器の帰還信号とし、かつ前記遅延回
路の出力により送信側の振動子に励振電圧を加えるとと
もに、前記遅延回路の遅延時間を電圧制御発振器の発振
周期に比例させるよう構成したものとしてある。SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and a phase-locked ultrasonic flowmeter according to the first invention of the present invention faces a flow tube. A pair of ultrasonic vibrators attached to each other, a switching device for switching between transmission and reception of the pair of vibrators, and an amplifier for amplifying a reception signal generated in a receiving-side vibrator by ultrasonic waves propagating in a fluid. A phase comparator that uses the output of the amplifier as an input signal, a low-pass filter that smoothes the output of the same phase comparator, a voltage-controlled oscillator that changes the oscillation frequency according to the output of the filter, and an output frequency of the oscillator. A frequency divider, and a delay circuit for delaying the output of the frequency divider.The output of the frequency divider is used as a feedback signal of a phase comparator. The excitation voltage is applied to the Certain delay time as those configured to be proportional to the oscillating period of the voltage controlled oscillator.
【0013】また、本発明に係る第2発明の位相同期式
流量計は、流路用管体に対向して取り付けた1対の超音
波振動子と、これら1対の振動子の送・受信を切換える
切換器と、流体内を伝播する超音波により受信側の振動
子に生じる受信信号を増幅する増幅器と、同増幅器の出
力を遅延せしめる遅延回路と、この遅延回路出力を入力
信号とする位相比較器と、同位相比較器の出力を平滑化
するローパスフィルタと、同フィルタの出力に応じて発
振周波数を変える電圧制御発振器と、同発振器の出力周
波数を分周する分周器とを備え、前記分周器の出力を位
相比較器の帰還信号とし、かつ分周器の出力により送信
側の振動子に励振電圧を加えるとともに、前記遅延回路
の遅延時間を電圧制御発信器の発振周期に比例させるよ
う構成したものとしてある。A phase-locked flow meter according to a second aspect of the present invention comprises a pair of ultrasonic vibrators mounted opposite to a flow path tube, and transmission / reception of the pair of vibrators. , An amplifier for amplifying a reception signal generated in the oscillator on the reception side by ultrasonic waves propagating in the fluid , a delay circuit for delaying the output of the amplifier, and a phase using the output of the delay circuit as an input signal. A comparator, a low-pass filter that smoothes the output of the in-phase comparator, a voltage-controlled oscillator that changes the oscillation frequency according to the output of the filter, and a frequency divider that divides the output frequency of the oscillator. The output of the frequency divider is used as the feedback signal of the phase comparator, and the output of the frequency divider applies an excitation voltage to the oscillator on the transmission side, and the delay time of the delay circuit is proportional to the oscillation cycle of the voltage controlled oscillator. One that is configured to And Aru.
【0014】[0014]
【実施例】図1に基づいて本発明に係るPLL式超音波
流量計の第1実施例の構成を説明する。同図において符
号1〜10は図7の符号に対応するので、説明は省略す
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction of a first embodiment of a PLL type ultrasonic flowmeter according to the present invention will be described with reference to FIG. 7, reference numerals 1 to 10 correspond to the reference numerals in FIG.
【0015】本発明の流量計は分周器9と励振電圧源4
間に遅延回路11を介在させ、かつ、同遅延回路11に
は電圧制御発振器8からの出力信号、またはこれを適当
に分周したものをクロック信号として与え、遅延時間を
電圧制御発振器8の発振周期に比例させる点を特徴とし
ている。The flow meter according to the present invention comprises a frequency divider 9 and an excitation voltage source 4.
An output signal from the voltage-controlled oscillator 8 or a signal obtained by appropriately dividing the output signal is supplied to the delay circuit 11 as a clock signal, and the delay time is determined by the oscillation of the voltage-controlled oscillator 8. It is characterized by being proportional to the period.
【0016】より具体的な一例は、図2に示すように分
周器9を前段分周器91とプログラマブル分周器92に
より構成し、前段分周器91としては例えば1/61〜1/10
0 の分周比を持つもの、またプログラマブル分周器92
としては最小1/128 〜1/100の分周比を持つものを使用
し、同プログラマブル分周器92は流体中の音速に応じ
て適当な分周比となるようにプログラムする。In a more specific example, as shown in FIG. 2, the frequency divider 9 is composed of a pre-frequency divider 91 and a programmable frequency divider 92. Ten
One having a division ratio of 0 and a programmable divider 92
The programmable frequency divider 92 is programmed so as to have an appropriate frequency dividing ratio according to the speed of sound in the fluid.
【0017】電圧制御発振器の周波数を前段分周器91
により分周してその出力周期を数μ秒程度に増倍する。
遅延回路11としては計数形タイマを用い、同タイマは
プログラマブル分周器92の出力111が特定極性(H
又はL)をとると、クロック信号として与えられる前段
分周器91の出力信号112を計数し始め、予め定めた
波数を計数すると出力信号113を発するので、これを
励振信号とする。一方プログラマブル分周器92の出力
は位相比較器6へ帰還する。The frequency of the voltage controlled oscillator is set to
To multiply the output cycle to about several microseconds.
As the delay circuit 11, a counting timer is used.
Or L), the output signal 112 of the previous-stage frequency divider 91 provided as a clock signal starts to be counted, and when a predetermined wave number is counted, an output signal 113 is generated. This is used as an excitation signal. On the other hand, the output of the programmable frequency divider 92 is fed back to the phase comparator 6.
【0018】図3は分周器のBCDプログラマブル・カ
ウンタ92の特性を利用して遅延回路11の機能を兼ね
備える分周器9’としたものであり、独立した遅延回路
としては顕在しないが、機能は具体例1と同等である。FIG. 3 shows a frequency divider 9 'having the function of the delay circuit 11 by utilizing the characteristics of the BCD programmable counter 92 of the frequency divider. The frequency divider 9' does not appear as an independent delay circuit. Is equivalent to Example 1.
【0019】図4は本発明の第2実施例を示し、遅延回
路11を増幅器5と位相比較器6の入力側との間に介在
させた点が図1に示す第1実施例のものと異なるが、そ
の動作要領は第1実施例のものとほぼ同様である。FIG. 4 shows a second embodiment of the present invention. The point that a delay circuit 11 is interposed between the amplifier 5 and the input side of the phase comparator 6 differs from that of the first embodiment shown in FIG. Although different, the operation is substantially the same as that of the first embodiment.
【0020】この場合、増幅器を遅延させた信号とPL
L帰還信号がロックイン状態で同相になり、励振電圧も
これと同様であるから、この励振電圧は受信信号に対し
遅延回路11による遅延時間の分だけ遅れる。In this case, the signal delayed by the amplifier and the PL
Since the L feedback signal is in phase in the lock-in state and the excitation voltage is the same, the excitation voltage is delayed from the reception signal by the delay time of the delay circuit 11.
【0021】[0021]
【作用】本発明に係るPLL式超音波流量計につき、そ
の作用を説明する。PLLがいわゆるロックインの状態
ではその入力信号と帰還信号の位相(正確には例えばH
からLへの遷移時点)が合致するので、超音波受信信号
とPLL帰還信号の位相も合致する。一方励振位相は遅
延回路11による所定時間分遅れることになる。The operation of the PLL type ultrasonic flowmeter according to the present invention will be described. When the PLL is in a so-called lock-in state, the phases of the input signal and the feedback signal (to be precise, for example, H
(Transition point from L to L) coincides, so that the phases of the ultrasonic reception signal and the PLL feedback signal also coincide. On the other hand, the excitation phase is delayed by a predetermined time by the delay circuit 11.
【0022】次ぎに本発明における増幅器5の構成の詳
細と同増幅器における信号の波形を図5、6により説明
すれば、受信波は図示のようにAC増幅器51により増
幅されて、例えば1MHz 程度の周波数の交流ピーク群
となる。Next, the details of the configuration of the amplifier 5 of the present invention and the waveforms of the signals in the amplifier will be described with reference to FIGS. 5 and 6. The received wave is amplified by an AC amplifier 51 as shown in FIG. A group of frequency AC peaks.
【0023】増幅された波形はコンパレータ52により
一定の基準電圧Eと比較し、波形がこの基準電圧Eを超
える時点を検出して一定時間コンパレータの再動作を禁
止するワンショット回路53を駆動する。The amplified waveform is compared with a fixed reference voltage E by a comparator 52, and a point in time when the waveform exceeds the reference voltage E is detected to drive a one-shot circuit 53 for prohibiting a re-operation of the comparator for a fixed time.
【0024】タイマよりなる遅延回路11は、ロックイ
ン状態ではこのワンショット回路の動作より所定の遅延
時間後励振を行うので、図6のように励振ノイズは受信
信号より遅れ、その動作に悪影響を及ぼすことがない。In the lock-in state, the delay circuit 11 composed of a timer performs excitation after a predetermined delay time from the operation of the one-shot circuit. Therefore, as shown in FIG. 6, the excitation noise is delayed from the received signal, and adversely affects the operation. Has no effect.
【0025】次ぎにこの遅延時間の測定に及ぼす影響に
ついて説明する。図1において振動子2a、2b間の測
線長をL、流体中の音速をC、管路内の流体の平均流速
をV、超音波が下流へ向う際のシングアラウンド周波数
をFd、上流へ向かう際のシングルアラウンド周波数をF
u、遅延回路11による遅延時間をt0とすると、 1/Fd=L/(C+V)+t0,1/Fu=L/(C−V)+t0 となる。Next, the effect on the measurement of the delay time will be described. In FIG. 1, L is the measurement line length between the transducers 2a and 2b, C is the sound velocity in the fluid, V is the average flow velocity of the fluid in the pipeline, Fd is the sing-around frequency when the ultrasonic wave goes downstream, and goes upstream. The single-around frequency when
u, if the delay time by the delay circuit 11, t 0, a 1 / Fd = L / (C + V) + t 0, 1 / Fu = L / (C-V) + t 0.
【0026】ここで、従来のようにt0=0ならばFd−Fu=2V/L ・・・・(1) となる。したがって、電圧制御発振器8の出力周波数を
Fd、Fuに対応してfd、fuとし、分周器9の分周による周
波数増倍率をNとすればfd−fu=N・2V/L となり、fd−fuからV を演算できる。Here, if t 0 = 0 as in the conventional case, Fd−Fu = 2V / L (1) Therefore, the output frequency of the voltage controlled oscillator 8 is
Assuming that fd and fu correspond to Fd and Fu and that the frequency multiplication factor by dividing the frequency of the frequency divider 9 is N, fd−fu = N · 2V / L , and V can be calculated from fd−fu.
【0027】ところが、t0=0でない場合には Fd=(C+V)/{L+(C+V)t0} Fu=(C−V)/{L+(C−V)t0} ∴ fd−fu={N(C+V)/L+(C+V)t0} −{N(C−V)/L+(C
−V)t0} となり、平均流速Vの正確な測定は一般には困難にな
る。However, if t 0 = 0, Fd = (C + V) / {L + (C + V) t 0 } Fu = (C−V) / {L + (C−V) t 0 } ∴fd−fu = {N (C + V) / L + (C + V) t 0 } − {N (C−V) / L + (C
−V) t 0 }, and it is generally difficult to accurately measure the average flow velocity V.
【0028】しかし本発明においてはt0は一定ではな
く、電圧制御発振器8の周期に従ってFd、Fuの逆数に正
確に比例するようにしてある。However, in the present invention, t 0 is not constant, but is exactly proportional to the reciprocal of Fd and Fu in accordance with the cycle of the voltage controlled oscillator 8.
【0029】したがってこの遅延時間t0を改めてFd、Fu
にそれぞれ対応する遅延時間td、tuとすれば、M を比例
定数として、 td=M/Fd, tu=M/FuFd−Fu={(1-M)/L}2V ∴ fd−fu=N{(1-M)/L}2V・・・(2) となり、td、tuはシングアラウンド周期1/Fd、1/Fuの数
%程度でよいので(2) 式に示すようにわずかに係数が小
さくなる点を除けば(1) 式と同様にfd−fuから流体の平
均流速Vを演算できる。Therefore, the delay time t 0 is changed again to Fd and Fu.
Let td and tu be respectively the delay times td and tu, where M is a proportionality constant and td = M / Fd, tu = M / Fu Fd−Fu = {(1-M) / L} 2V∴fd −fu = N {(1-M) / L} 2V (2) where td and tu may be a few percent of the single-around period 1 / Fd and 1 / Fu, so that the coefficient is slightly increased as shown in equation (2). The average flow velocity V of the fluid can be calculated from fd-fu in the same manner as in the equation (1) except that the value becomes smaller.
【0030】[0030]
【発明の効果】以上実施例とともに説明したように、本
発明によれば励振電圧を高く、または増幅器における増
幅度を高めても励振ノイズの影響を受けることがなく、
流路管体が小口径である小流量用の流量測定に好適なP
LL式超音波流量計を実現できる。As described above, according to the present invention, even if the excitation voltage is increased or the amplification degree in the amplifier is increased, the excitation noise is not affected.
P suitable for flow rate measurement for small flow rate where the flow path pipe has a small diameter
An LL type ultrasonic flow meter can be realized.
【図1】本発明に係る位相同期式超音波流量計の第1実
施例を示す構成図。FIG. 1 is a configuration diagram showing a first embodiment of a phase-locked ultrasonic flowmeter according to the present invention.
【図2】分周器と遅延回路の一例を示す構成図。FIG. 2 is a configuration diagram illustrating an example of a frequency divider and a delay circuit.
【図3】分周器と遅延回路の他の例を示す構成図。FIG. 3 is a configuration diagram showing another example of a frequency divider and a delay circuit.
【図4】本発明に係る位相同期式超音波流量計の第2実
施例を示す構成図。FIG. 4 is a configuration diagram showing a second embodiment of the phase-locked ultrasonic flowmeter according to the present invention.
【図5】増幅器の詳細を示す構成図。FIG. 5 is a configuration diagram showing details of an amplifier.
【図6】増幅器における受信信号の波形を示す図。FIG. 6 is a diagram showing a waveform of a reception signal in the amplifier.
【図7】従来の位相同期式超音波流量計の第2実施例を
示す構成図。FIG. 7 is a configuration diagram showing a second embodiment of a conventional phase-locked ultrasonic flowmeter.
1 流路用管体 2a、2b 超音波振動子 3 切換器 4 励振電圧源 5 増幅器 6 位相比較器 7 ローパスフィルタ 8 電圧制御発振器 9 分周器 10 出力端子 11 遅延回路 DESCRIPTION OF SYMBOLS 1 Flow path tube 2a, 2b Ultrasonic transducer 3 Switch 4 Excitation voltage source 5 Amplifier 6 Phase comparator 7 Low pass filter 8 Voltage controlled oscillator 9 Divider 10 Output terminal 11 Delay circuit
Claims (2)
の超音波振動子と、これら1対の振動子の送・受信を切
換える切換器と、流体内を伝播する超音波により受信側
の振動子に生じる受信信号を増幅する増幅器と、同増幅
器の出力を入力信号とする位相比較器と、同位相比較器
の出力を平滑化するローパスフィルタと、同フィルタの
出力に応じて発振周波数を変える電圧制御発振器と、同
発振器の出力周波数を分周する分周器と、同分周器出力
を遅延せしめる遅延回路とを備え、(b) 前記分周器の出
力を位相比較器の帰還信号とし、かつ前記遅延回路の出
力により送信側の振動子に励振電圧を加えるとともに、
(c) 前記遅延回路の遅延時間を電圧制御発振器の発振周
期に比例させるよう構成してなる位相同期式超音波流量
計。(A) A pair of ultrasonic vibrators mounted opposite to a flow path tube, a switch for switching transmission / reception of the pair of vibrators, and a supersonic wave propagating in a fluid. An amplifier that amplifies a received signal generated in a transducer on the receiving side due to sound waves, a phase comparator that uses the output of the amplifier as an input signal, a low-pass filter that smoothes the output of the in-phase comparator, and an output of the filter. A voltage-controlled oscillator that changes the oscillation frequency in accordance with the frequency divider, a frequency divider that divides the output frequency of the oscillator, and a delay circuit that delays the output of the frequency divider. As a feedback signal of the comparator, and while applying an excitation voltage to the oscillator on the transmission side by the output of the delay circuit,
(c) A phase-locked ultrasonic flowmeter configured to make the delay time of the delay circuit proportional to the oscillation cycle of the voltage controlled oscillator.
の超音波振動子と、これら1対の振動子の送・受信を切
換える切換器と、流体内を伝播する超音波により受信側
の振動子に生じる受信信号を増幅する増幅器と、同増幅
器の出力を遅延せしめる遅 延回路と、この遅延回路出力
を入力信号とする位相比較器と、同位相比較器の出力を
平滑化するローパスフィルタと、同フィルタの出力に応
じて発振周波数を変える電圧制御発振器と、同発振器の
出力周波数を分周する分周器とを備え、 (b) 前記分周器の出力を位相比較器の帰還信号とし、か
つ分周器の出力により送信側の振動子に励振電圧を加え
るとともに、 (c) 前記遅延回路の遅延時間を電圧制御発信器の発振周
期に比例させるよう構成してなる位相同期式超音波流量
計。(A) a pair of ultrasonic vibrators mounted opposite to the flow path tube, a switch for switching between transmission and reception of the pair of vibrators, and a supersonic wave propagating in the fluid; an amplifier for amplifying a reception signal generated on the reception side of the transducer by waves, and delay circuit allowed to delay the output of the amplifier, the delay circuit output
A phase comparator for the input signal, and a low pass filter for smoothing the output of the phase comparator, a voltage controlled oscillator for changing an oscillation frequency according to the output of the filter to divide the output frequency of the oscillator min (B) using the output of the frequency divider as a feedback signal of the phase comparator, and applying an excitation voltage to the oscillator on the transmission side by the output of the frequency divider; A phase-locked ultrasonic flowmeter configured to make a delay time proportional to an oscillation cycle of a voltage-controlled transmitter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35489498A JP3267942B2 (en) | 1998-12-14 | 1998-12-14 | Phase-synchronized ultrasonic flowmeter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35489498A JP3267942B2 (en) | 1998-12-14 | 1998-12-14 | Phase-synchronized ultrasonic flowmeter |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000180229A JP2000180229A (en) | 2000-06-30 |
JP3267942B2 true JP3267942B2 (en) | 2002-03-25 |
Family
ID=18440635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP35489498A Expired - Fee Related JP3267942B2 (en) | 1998-12-14 | 1998-12-14 | Phase-synchronized ultrasonic flowmeter |
Country Status (1)
Country | Link |
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JP (1) | JP3267942B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4552285B2 (en) * | 2000-07-27 | 2010-09-29 | パナソニック株式会社 | Flowmeter |
JP2007171217A (en) * | 2000-12-27 | 2007-07-05 | Surpass Kogyo Kk | Ultrasonic flowmeter, method of measuring temperature or pressure and ultrasonic temperature/pressure gauge |
JP4639830B2 (en) * | 2005-02-03 | 2011-02-23 | パナソニック株式会社 | Booster and flow velocity or flow rate measuring device |
CN110112952B (en) * | 2019-05-20 | 2020-03-17 | 中北大学 | High-power double-frequency ultrasonic vibration pulse power supply with fixed phase difference |
-
1998
- 1998-12-14 JP JP35489498A patent/JP3267942B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000180229A (en) | 2000-06-30 |
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