JP3138645B2 - Non-sliding vacuum gate valve and valve plate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-sliding vacuum gate valve and a valve plate, and more particularly to a large-sized valve plate for smoothly opening and closing an opening for guiding a large panel or wafer. Regarding new improvements.

[0002]

2. Description of the Related Art A conventional non-sliding vacuum gate valve for a large opening of this type is disclosed in Japanese Unexamined Patent Publication No. Hei 3-204483 for a gate valve having a rectangular opening and a gate valve having a circular opening. Are described in JP-A-2-18672, JP-A-4-347084 and JP-A-55-5.
No. 4,770,477. In the former case, the valve plate is opened and closed without sliding by the drive mechanism outside the valve box.In the latter case, the pendulum type operation is combined with pneumatic pressure, rack and pinion, spring and negative pressure, etc. Sliding open / close valve operation is performed.

[0003]

The conventional non-sliding vacuum gate valve has the following problems because it is constructed as described above. That is, in these methods, an excessive spring is required to secure the peeling force due to the adhesion of the O-ring at the time of sealing, and an accessory device for generating a negative pressure is required. Also, in the case of a spring, when the O-ring separates from the sealing surface, the spring is displaced until a force overcoming the adhesive force is obtained, so when the O-ring comes off the sealing surface, the valve plate moves to the valve opening position at a rapid speed. Then, impact noise and vibration occur. The impact peels off dust and the like adhering to the inside of the valve, and impairs the dust-freeness characteristic of the non-sliding gate valve. Further, in the method of applying a negative pressure to the inside of the valve plate portion, the number of steps in the opening / closing operation is increased, and when used in a semiconductor manufacturing apparatus or the like, the opening / closing operation time is reduced, and convenience is impaired. Was supposed to. In particular, in the case of a rectangular opening, a place for generating a force required at the time of closing the valve is separated from the valve plate seal portion, and a combination of a straight-moving operation and an inclining operation is performed. Selecting the strength and deflection of the valve stem, selecting bearings to support the reaction force, or closing the valve by tilting operation, requires a moderate tilt angle on the valve plate to evenly collapse the O-ring. However, there have been problems such as making the selection considerably difficult.

The present invention has been made to solve the above problems, and in particular, generates a force at a seal valve plate portion and generates a sufficient valve opening force to smoothly open and close an on-off valve. It is another object of the present invention to provide a non-sliding vacuum gate valve which can be operated quickly.

[0005]

SUMMARY OF THE INVENTION A non-sliding vacuum gate valve according to the present invention is provided with a valve stem which moves through an opening of a valve box through a seal bellows and a cylinder provided with one end of the valve box. The valve plate is connected to the valve stem, a valve plate piece operably provided on both sides of the valve base via a valve plate seal bellows, A link portion for operating each of the valve plate pieces, and an operating rod coaxially arranged in the valve rod and connected to a link driving body, wherein the cylinder directly moves the valve rod and the operating rod by the cylinder. In the dynamic vacuum gate valve, the valve rod and the operating rod are composed of a plurality, and each of the valve rods is connected to the cylinder via a valve rod connecting body, a connecting spring and a cylinder connecting body, and the cylinder connecting body is operated by the cylinder. Contact rod It is, in the valve body is configured to the valve stem coupling member that abuts a stopper is provided.

[0006] The non-sliding vacuum gate valve according to the present invention comprises:
A non-sliding vacuum gate valve in which an opening of a valve box is opened and closed by a valve plate provided on a plurality of valve rods moving through a seal bellows and a cylinder having one end thereof provided in the valve box, A valve plate, a valve base connected to the valve stem, a valve plate piece operably provided on both sides of the valve base via a valve plate seal bellows, and a valve for operating each of the valve plate pieces. A link portion, and an operating rod coaxially arranged in the valve stem and connected to the link driving body, and a link driving cylinder provided in a valve stem connecting body that connects the valve stems is provided with a link driving cylinder for each of the cylinders. The link driving cylinder is connected to a cylinder connecting body connected to the cylinder rod, and a link rod of the link driving cylinder is connected to the operating rod via an operating rod connecting body.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a non-sliding vacuum gate valve according to the present invention will be described below with reference to the drawings. First, the configuration shown in FIGS. 1 and 2 shows a valve body according to the present invention. FIG. 1 shows a valve-opened state in a valve-closed position, and FIG. 2 shows a valve-closed state. 1 and 2 is a valve box having a box shape as a whole, and an opening 2 is formed in the valve box 1 so as to penetrate the valve box 1. In this valve box 1, a valve plate 4 connected to a valve rod 3 is disposed so as to be able to reciprocate in the direction of arrow A. In this valve rod 3, an operating rod 5 is coaxial with the valve rod. 3 and is provided so as to be freely operable. The valve stem 3 is connected to a valve base 6 of the valve plate 4, and a link driving body having a plurality of link pieces 7 pivotally supported in a gap 6 a of the valve base 6 and connected to the operating rod 5. 8 is provided movably. Therefore, the link portion 9 is constituted by the link piece 7 and the link driver 8.

A pair of valve plate pieces 11 and 12 having O-rings 10 on both sides of the valve plate 4 in a state corresponding to the openings 2.
The valve plate pieces 11 and 12 are connected to the valve base 6 via a pair of annular valve plate seal bellows 13 and 14. Further, the connecting portion 1 of the valve element pieces 11 and 12
The ring piece 7 is operably connected to 1a and 12a via a shaft support 7a. Next, the operation will be described. First, FIG. 1 shows that the valve plate 4 is located at the valve closing position of the valve box 1 and is in an open state. In this state, the operating rod 5 is pushed downward in FIG. The link piece 7 expands in a C-shape, and at the same time, the seal bellows 13, 14 for each valve plate extend and each of the valve body pieces 11, 12
Move outward as shown in FIG.
Each O-ring 10 is joined to the valve seat 2a of the opening 2, and each opening 2
Is closed, and the chambers (not shown) connected to the openings 2 are cut off from the outside air, so that the chambers can be connected in the same vacuum state. In order to change from the valve-closed state in FIG. 2 to the valve-opened state in FIG. 1, by moving the operating rod 5 upward, the respective valve plate pieces 11,
As shown in FIGS. 2 to 1, the interval of the valve 12 can be reduced and the valve 12 can be opened.

Next, the valve element shown in FIG. 1 and FIG.
The present invention is applied to the non-sliding vacuum gate valve shown in FIGS. 3 and 4, and a preferred embodiment of the non-sliding vacuum gate valve according to the present invention will be described below with reference to FIGS. 1 and 2 are denoted by the same reference numerals, and description thereof will be omitted. A pair of air-type cylinders 20 and 21 are provided on the lid 1A of the valve box 1, and cylinder rods 20b and 21b connected to pistons 20a and 21a of the cylinders 20 and 21 are connected to a cylinder connecting body 22.
The operating rods 5 of the pair of link portions 9 connected in the valve box 1 and connected to the valve plate 4 are directly connected to the cylinder connecting body 22 and are coaxially arranged on the operating rods 5. The valve stem 3 is connected to a valve stem connecting body 23. The cylinder connecting body 22 and the valve stem connecting body 23 are connected to each other by a connecting spring 24 having a function of supporting the weight of the valve plate 4 when used upside down in FIG. Is provided. That is, since the inside of the valve element constituting portion is used at the atmospheric pressure and the inside of the valve box 1 is evacuated, the connection spring 24 prevents the valve plate 4 from expanding due to the differential pressure. . Further, in FIG. 5, since the link driving cylinders 50 and 51 are provided, this action is performed by the force of the cylinders 50 and 51. In addition, when the valve is opened by the operation of the link, the operation of the operating rod 5 directly acts on the link, so that the valve can be opened against the force such as the adhesion of the O-ring. Further, although the link is widened in a C shape when the valve is closed in the operation of the link, the valve can be mechanically locked by setting this angle to a substantially horizontal state.

A seal bellows 2 is provided between the valve box 1 and the valve stem connecting body 23 so as to cover the outer periphery of each of the valve stems 3.
5 and 26 are provided, and both ends of each of the seal bellows 25 and 26 are connected to the valve stem connecting body 23 and the lid 1A via an O-ring 27 in an intimate manner. The lid 1A is provided with a stopper 28 protruding toward the valve stem connector 23 side, and the stopper 28 is provided on the valve stem connector 2
3 are configured to abut. Since the configurations of the valve plate 4 and the link portion 9 are the same as the configurations of FIGS. 1 and 2 described above, the same reference numerals are given and the description will be omitted to avoid duplication.

Next, the operation will be described. First, in the state of FIG. 3A and FIG. 4A, the valve plate 4 rises from the opening 2 (or descends when used upside down in FIG. 3). When activated, the cylinder rod 2 is moved together with the pistons 20a and 21a.
Since 0b and 21b are lowered together with the cylinder connecting body 22, the valve stem connecting body 23 connected via the spring 24 and the operating rod 5 is lowered to the position shown in FIG. 4B, and the respective seal bellows 25 and 26 are moved. At the same time, the valve stem connector 23 comes into contact with the stopper 28. That is, in this state, the valve plate 4 has moved to a position corresponding to the opening 2 (B in FIG. 4). When the cylinders 20 and 21 are continuously operated in the above-described state, the valve rod connector 23 is in contact with the stopper 28, so that no further lowering occurs. (B, C in FIG. 4)
In order to make the movement D) shown in FIG.
Because only the link member 9 descends, the link driving body 8 of the link portion 9 is lowered, and each link piece 7 expands as shown in FIGS. 1 to 2, that is, as shown in FIGS. Piece 1
As shown in FIG. 4 (C), the valves 1 and 12 expand in the lateral direction, and the opening 2 is closed. To open the opening 2, the valve is opened by an operation reverse to that described above.

Next, another gate valve using the valve plate 4 shown in FIGS. 1 and 2 is shown in FIGS. 5 and 6. FIG. In addition,
1 to 4 are denoted by the same reference numerals, and description thereof will be omitted. In the embodiment shown in FIGS. 5 and 6, since the direction of each link piece 7 of the link portion 9 is reversed, each valve plate piece 11, 12 is raised by raising the operating rod 5 upward. Although it is configured to be expanded, since the configuration is exactly the same as in FIGS. 1 and 2, the same reference numerals are given and the description thereof is omitted, and only the portions different from FIGS. 1 to 4 will be described.

A plurality of link driving cylinders 50, 51 are provided on the valve stem connecting body 23, and the link driving cylinders 50, 51 are integrally connected to the cylinder connecting body 22 via connecting shafts 52, 53. The link rods 54, 55 of the link drive cylinders 50, 51 operate independently of the connecting shafts 52, 53 and are connected to an operating rod connector 60 to which the operating rod 5 is connected.

The support 70 erected on the lid 1A of the valve box 1 and the valve stem connector 23 are connected via a well-known linear motion bearing 71. The valve stem connecting body 23 is configured to smoothly move up and down.

Next, the operation will be described. The state shown in FIG. 5 and FIG. 6 is a state in which the cylinders 20 and 21 are operated to lower the cylinder connecting body 33 together with the link driving cylinders 50 and 51, and the valve plate 4 corresponds to the opening 2. In this state, each link driving cylinder 50,
When the operating member 51 is operated, the operating rods 5 are pulled up together with the operating rod connector 60, so that the link pieces 7 of the link portion are pushed up in a C-shape, and the valve plate pieces 11, 1
2 are moved outward and expanded, and the opening 2 is closed.

[0016]

Since the present invention is configured as described above, the following effects can be obtained. That is,
The valve plate itself can be expanded and contracted by the operation of the link part, and after the valve plate itself is made to correspond to the opening without sliding with the valve box, the valve can be closed only by the expansion operation. An on-off valve with a larger opening can be freely, promptly and reliably performed.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a valve plate according to the present invention.

FIG. 2 is an operation sectional view of FIG. 1;

FIG. 3 is a sectional view showing a gate valve to which the valve plate of FIG. 1 is applied.

FIG. 4 is an operation sectional view of FIG. 3;

FIG. 5 is a sectional view showing another example of FIG. 3;

6 is a sectional view taken along line AA of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Valve box 2 Opening 3 Valve stem 4 Valve plate 5 Operating rod 6 Valve base 9 Link part 11,12 Valve plate piece 13,14 Seal bellows for valve plate 20,21 Cylinder 22 Cylinder connected body 23 Valve rod connected body 24 Connection spring 28 Stopper 50,51 Link drive cylinder 54,55 Link rod 60 Working rod connector

Continuing from the front page (72) Inventor Hiromi Morita 4-7-1 Tsukiji, Chuo-ku, Tokyo Tsukiji Mitsui Building 9F Irie Koken Co., Ltd. In-house (56) References JP-A-3-288069 (JP, A) Kaihei 4-347084 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) F16K 3/10 F16K 3/02 F16K 3/06 F16K 51/02

Claims (2)

(57) [Claims] 1. A valve which moves an opening (2) of a valve box (1) through a seal bellows (25, 26) and a cylinder (20, 21) provided at one end of the valve box (1). Valve plate provided on rod (3)
(4) to open and close, the valve plate (4), the valve stem (3)
A valve base (6) connected to the valve base (6), a valve plate piece (11, 12) operably provided on both sides of the valve base (6) via a valve plate seal bellows (13, 14); A link portion (9) for operating each of the valve plate pieces (11, 12), and an operating rod (5) coaxially arranged in the valve stem (3) and connected to a link driving body (8). ,
The valve rod (3) and the operating rod are operated by the cylinder (20, 21).
In the non-sliding vacuum gate valve configured to directly move (5), the valve rod (3) and the operating rod (5) are composed of a plurality, and each of the valve rods (5) is a valve rod connected body (23). ), Connecting spring (24)
And the cylinder (20, 21) via a cylinder connector (22).
And the cylinder connecting body (22) is connected to the operating rod.
A non-sliding vacuum gate valve connected to (5), wherein the valve box (1) is provided with a stopper (28) that comes into contact with the valve stem connector (23). 2. A plurality of cylinders (20, 21) which move through an opening (2) of a valve box (1) through seal bellows (25, 26) provided at one end of the valve box (1) and cylinders (20, 21). In a non-sliding vacuum gate valve that opens and closes with a valve plate (4) provided on a valve stem (3), the valve plate (4) includes a valve base ( 6), and valve plate pieces (11, 12) operably provided on both sides of the valve base (6) via valve plate seal bellows (13, 14).
And a link portion for operating each of the valve plate pieces (11, 12).
(9) and a link driving body (8) coaxially arranged in the valve stem (3).
And an operating rod (5) connected to the valve stem (3).
The link driving cylinders (50, 51) provided on the valve stem coupling body (23) for connecting the cylinder rods are connected to a cylinder coupling body (22) connected to the cylinder rod of each of the cylinders (20, 21). The link rod (54, 55) of the link drive cylinder (50, 51) is configured to be connected to the operating rod (5) via an operating rod connecting body (60). Dynamic vacuum gate valve.