JP3019616B2 - Stack-through capacitor array - Google Patents
Stack-through capacitor arrayInfo
- Publication number
- JP3019616B2 JP3019616B2 JP4196596A JP19659692A JP3019616B2 JP 3019616 B2 JP3019616 B2 JP 3019616B2 JP 4196596 A JP4196596 A JP 4196596A JP 19659692 A JP19659692 A JP 19659692A JP 3019616 B2 JP3019616 B2 JP 3019616B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- conductor
- ceramic dielectric
- holes
- dielectric sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、ノイズフィルタとして
用いられる積層貫通型コンデンサアレイに関する。更に
詳しくは貫通孔を通る信号線路間のクロストークを防止
するに適した積層貫通型コンデンサアレイに関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multilayer capacitor array used as a noise filter. More specifically, the present invention relates to a multilayer feedthrough capacitor array suitable for preventing crosstalk between signal lines passing through through holes.
【0002】[0002]
【従来の技術】コンピュータ等のデジタル機器では、信
号線路に高周波のノイズが混入すると誤動作を生じ易
く、しかも他の電子機器等に障害をもたらす恐れのある
不要な電磁波を配線から放射する問題点がある。このた
め、信号線路にはコンデンサ素子を用いた高周波ノイズ
を除去するノイズフィルタが多用されている。この種の
ノイズフィルタとしては、単板コンデンサ、積層型コン
デンサ、貫通型コンデンサ、貫通型コンデンサアレイ等
がある。単板コンデンサ、積層チップコンデンサ及び貫
通型コンデンサはそれぞれ1つの信号線路に対して1個
用いられ、複数のコンデンサを内蔵した貫通型コンデン
サアレイは単品で複数の信号線路に対して用いられる。2. Description of the Related Art In digital equipment such as computers, there is a problem that when high-frequency noise is mixed in a signal line, malfunctions are liable to occur, and unnecessary electromagnetic waves which may cause a failure in other electronic equipments are radiated from wiring. is there. For this reason, a noise filter that removes high-frequency noise using a capacitor element is frequently used in a signal line. Examples of this type of noise filter include a single-plate capacitor, a multilayer capacitor, a feedthrough capacitor, a feedthrough capacitor array, and the like. A single-plate capacitor, a multilayer chip capacitor, and a feedthrough capacitor are each used for one signal line, and a feedthrough capacitor array having a plurality of built-in capacitors is used as a single product for a plurality of signal lines.
【0003】しかし、上記単板コンデンサ、積層チップ
コンデンサ、貫通型コンデンサ、及び貫通型コンデンサ
アレイには、次に述べる欠点がある。 単板コンデン
サは、1枚のディスク状のコンデンサ素子の両面に外部
電極をそれぞれ設け、そこに一対のリード線を接続して
いる。単板コンデンサはこの構造に起因して回路基板へ
の高密度の実装が妨げられ、電子機器を小型化しにく
い。また回路基板に実装する時にリード線を含むことか
ら、図9に示すようにこの単板コンデンサを接続した回
路はLC直列共振回路に近似して、ある周波数以上では
ノイズフィルタとして機能しなくなる。 積層チップ
コンデンサは、1つのシート外周辺まで延びこのシート
外周辺と反対側のシート外周辺とは間隔をあけてシート
表面に内部電極が形成された角形のセラミックシート2
枚を一組とし、これら2枚のセラミックシートを内部電
極の延びたシート外周辺がそれぞれ反対側になるように
重ね合せ、この重ね合せた一組のセラミックシートを複
数組積層し一体化してなる積層体と、積層体の両側面に
それぞれ露出した内部電極に接続して形成された一対の
外部電極とを備える。積層チップコンデンサは、単板コ
ンデンサと比べて回路基板により高密度に実装できるも
のの、コンデンサの内部電極や接地点までの配線の引き
回しが避けられない。このため、このコンデンサを含む
回路は単板コンデンサと同様に図9に示すLC直列共振
回路に近似して、ある周波数以上ではノイズフィルタと
して機能しなくなる。However, the single plate capacitor, the multilayer chip capacitor, the feedthrough capacitor, and the feedthrough capacitor array have the following disadvantages. In a single-plate capacitor, external electrodes are provided on both surfaces of one disk-shaped capacitor element, and a pair of lead wires is connected to the external electrodes. Due to this structure, the single-plate capacitor prevents high-density mounting on a circuit board and makes it difficult to reduce the size of the electronic device. Further, since a lead wire is included when mounted on a circuit board, a circuit connected to this single-plate capacitor as shown in FIG. 9 approximates an LC series resonance circuit, and does not function as a noise filter at a certain frequency or higher. The multilayer chip capacitor is a rectangular ceramic sheet 2 having an internal electrode formed on the sheet surface at an interval from one sheet outer periphery to the sheet outer periphery and the sheet outer periphery on the opposite side.
The two ceramic sheets are superimposed such that the outer periphery of the extended sheet of the internal electrode is on the opposite side, and a plurality of the superposed ceramic sheets are laminated and integrated. The laminate includes a laminate and a pair of external electrodes formed to be connected to the internal electrodes respectively exposed on both side surfaces of the laminate. Although a multilayer chip capacitor can be mounted at a higher density on a circuit board than a single-plate capacitor, it is unavoidable to route wiring to the internal electrodes of the capacitor and the ground point. For this reason, the circuit including this capacitor is similar to the LC series resonance circuit shown in FIG. 9 similarly to the single-plate capacitor, and does not function as a noise filter at a certain frequency or higher.
【0004】 貫通型コンデンサは、例えばディスク
状のコンデンサ素子の中央に信号線路が通る貫通孔をあ
け、コンデンサ素子の片面の貫通孔周縁に信号線路に接
続する第1導体を形成し、コンデンサ素子の他面及びそ
の外周面に第1導体と間隔をあけて接地用の第2導体層
を形成し、コンデンサ素子を介して第1導体層と第2導
体層との間でキャパシタンスを形成するように構成され
る。貫通型コンデンサは、単板コンデンサや積層チップ
コンデンサのように回路基板に実装する時にリード線や
配線を引き回す必要がなく、図8に示す理想の回路に近
づけることができる。しかし、貫通型コンデンサはその
構造に起因して回路基板への高密度の実装が妨げられ、
電子機器を小型化しにくい。また実装に手間がかかるた
め実装コストの上昇を招いている。 貫通型コンデン
サアレイは、例えば方形状のコンデンサ素子にそれぞれ
信号線路が通る複数の貫通孔をあけ、コンデンサ素子の
片面の各貫通孔の周縁に信号線路に接続する第1導体を
それぞれ形成し、コンデンサ素子の他面及びその外周面
に第1導体と間隔をあけて接地用の第2導体層を形成
し、コンデンサ素子を介して第1導体層と第2導体層と
の間でキャパシタンスを形成するように構成される。貫
通型コンデンサアレイは、貫通型コンデンサと同様の理
由で図8に示す理想の回路に近づけることができ、貫通
型コンデンサが有する欠点、即ち高密度化の困難性と実
装コストの上昇の問題点を解消する。しかし、この貫通
型コンデンサアレイでは隣接して配設された複数の貫通
孔のそれぞれにリード線等の導体が通るため、貫通孔の
間隔をあまりに狭めてそれぞれの第1導体の間隔を狭め
るとリード線等の信号線路に高周波信号が流れたとき
に、配線間に存在する浮遊キャパシタンスのために、所
定の周波数以上のノイズが伝搬され、クロストークを生
じ易い。このため、高密度化にはクロストーク防止の観
点から一定の制限があった。In a feedthrough capacitor, for example, a through hole through which a signal line passes is formed in the center of a disk-shaped capacitor element, and a first conductor connected to the signal line is formed around the through hole on one side of the capacitor element. A second conductor layer for grounding is formed on the other surface and an outer peripheral surface thereof with an interval from the first conductor, and a capacitance is formed between the first conductor layer and the second conductor layer via a capacitor element. Be composed. The feed-through capacitor does not need to route lead wires and wiring when mounted on a circuit board like a single plate capacitor or a multilayer chip capacitor, and can be close to an ideal circuit shown in FIG. However, through-type capacitors prevent high-density mounting on circuit boards due to their structure.
It is difficult to reduce the size of electronic devices. In addition, since the mounting is troublesome, the mounting cost is increased. The through-type capacitor array has, for example, a plurality of through-holes through which a signal line passes through a rectangular capacitor element, and a first conductor connected to the signal line is formed on the periphery of each through-hole on one surface of the capacitor element, respectively. A second conductor layer for grounding is formed on the other surface of the element and its outer peripheral surface at a distance from the first conductor, and a capacitance is formed between the first conductor layer and the second conductor layer via a capacitor element. It is configured as follows. The feedthrough capacitor array can approach the ideal circuit shown in FIG. 8 for the same reason as the feedthrough capacitor, and solves the drawbacks of the feedthrough capacitor, namely, the difficulty of increasing the density and increasing the mounting cost. To eliminate. However, in this through-type capacitor array, a conductor such as a lead wire passes through each of a plurality of through-holes arranged adjacent to each other. When a high-frequency signal flows through a signal line such as a line, noise having a frequency equal to or higher than a predetermined frequency is propagated due to a stray capacitance existing between the lines, and crosstalk is likely to occur. For this reason, there has been a certain limitation in increasing the density from the viewpoint of preventing crosstalk.
【0005】この貫通型コンデンサアレイの欠点を解消
するために、隣接する各コンデンサ間、即ち隣接する導
体間の誘電体基板にスリットを形成し、各コンデンサ間
の浮遊キャパシタンスをなくすことにより、クロストー
クをなくした貫通型コンデンサアレイが開示されている
(実開昭61−4420)。In order to eliminate the drawbacks of the feedthrough capacitor array, slits are formed in the dielectric substrate between adjacent capacitors, that is, between adjacent conductors, thereby eliminating the floating capacitance between the capacitors, thereby reducing crosstalk. (Japanese Utility Model Application Laid-Open No. 61-4420).
【0006】[0006]
【発明が解決しようとする課題】しかし、上記貫通型コ
ンデンサアレイはスリットの形成のために製造コストが
上昇するとともに、アレイ自体の強度が低下し易く、し
かも導体間にスリットを形成しただけでは未だ十分にク
ロストークを防止できない不具合があった。However, the through-type capacitor array described above increases the manufacturing cost due to the formation of the slits, and tends to reduce the strength of the array itself. Further, it is still difficult to form the slits only between the conductors. There was a problem that crosstalk could not be sufficiently prevented.
【0007】本発明の目的は、リード線を有しないた
め、高密度に回路基板に実装しても電子機器を小型化で
き、かつリードインダクタンスを生じにくい積層貫通型
コンデンサアレイを提供することにある。本発明の別の
目的は、高周波ノイズを除去し、より高密度に実装して
も各線路を流れる信号の他の線路へのクロストークを確
実に防止できる積層貫通型コンデンサアレイを提供する
ことにある。本発明の更に別の目的は、強度低下の恐れ
がなく、安価に製造及び実装し得る積層貫通型コンデン
サアレイを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a through-hole type capacitor array which does not have lead wires so that electronic equipment can be reduced in size even when mounted on a circuit board at high density and lead inductance is hardly generated. . Another object of the present invention is to provide a multilayer capacitor array that removes high-frequency noise and can reliably prevent crosstalk of signals flowing through each line to other lines even when mounted at higher density. is there. It is still another object of the present invention to provide a multilayer feedthrough capacitor array which can be manufactured and mounted at a low cost without a risk of lowering the strength.
【0008】[0008]
【課題を解決するための手段】上記目的を達成するため
の本発明の構成を図1、図5及び図6に基づいて説明す
る。なお、図1は説明を容易にするためにセラミックシ
ート部分を厚さ方向に拡大して示している。本発明の積
層貫通型コンデンサアレイは、第2セラミック誘電体シ
ート20を中間シートとして第1セラミック誘電体シー
ト10と第3セラミック誘電体シート30とを積層して
一体化され、一体化された第1、第2及び第3セラミッ
ク誘電体シート10,20及び30に線路L1,L2,L
3がそれぞれ通る3個以上の第1貫通孔11a,11
b,11c、第2貫通孔21a,21b,21c及び第
3貫通孔31a,31b,31cがそれぞれ設けられた
積層体50を含む。第1セラミック誘電体シート10
は、隣合う第1貫通孔のいずれか一方のシート表面の第
1貫通孔11a,11c周囲に形成されかつ線路L1,
L3に接続される第1内部導体12a,12cを備え
る。また第2セラミック誘電体シート20は、第2貫通
孔とそれぞれ電気的に絶縁される間隔22a,22b,
22cを有しシート表面にその外周部にかけて形成され
た接地導体23を備える。また第3セラミック誘電体シ
ート30は、第1貫通孔のうち孔周囲に第1内部導体の
形成されない第1貫通孔11bに連通する第3貫通孔3
1bの周囲に形成されかつ線路L2に接続される第2内
部導体32を備える。更に第2セラミック誘電体シート
20を介して第1内部導体12a,12cと接地導体2
3との間でかつ第3セラミック誘電体シート30を介し
て第2内部導体32と接地導体23との間でそれぞれキ
ャパシタンスを形成するように構成され、積層体50の
側面には露出した接地導体23に接続する外部電極60
がこの側面に形成される。なお、積層体50の最上層に
シート表面に導体の形成されない第4セラミック誘電体
シート40を積層して一体化し、一体化した第1、第
2、第3及び第4セラミック誘電体シート10〜40に
線路L1,L2,L3がそれぞれ通る複数の第1、第2及
び第3貫通孔11a,11b,11c,21a,21
b,21c,31a,31b,31cをそれぞれ設ける
ことがコンデンサアレイの信頼性を向上する上で好まし
い。A configuration of the present invention for achieving the above object will be described with reference to FIGS. 1, 5 and 6. FIG. FIG. 1 shows a ceramic sheet portion enlarged in the thickness direction for easy explanation. In the multilayer feedthrough capacitor array of the present invention, the first ceramic dielectric sheet 10 and the third ceramic dielectric sheet 30 are laminated and integrated with the second ceramic dielectric sheet 20 as an intermediate sheet, and the integrated The lines L 1 , L 2 , L are provided on the first, second and third ceramic dielectric sheets 10, 20 and 30.
3 or more first through holes 11a, 11 through which each 3 passes
b, 11c, the stacked body 50 provided with the second through holes 21a, 21b, 21c and the third through holes 31a, 31b, 31c, respectively. First ceramic dielectric sheet 10
Are formed around the first through holes 11a, 11c on the sheet surface of one of the adjacent first through holes, and the lines L 1 ,
The first inner conductor 12a is connected to L 3, comprises 12c. In addition, the second ceramic dielectric sheet 20 has gaps 22a, 22b, which are electrically insulated from the second through holes, respectively.
A ground conductor 23 is provided on the surface of the sheet and has an outer periphery. Further, the third ceramic dielectric sheet 30 has a third through hole 3 communicating with the first through hole 11b in which the first internal conductor is not formed around the hole among the first through holes.
It formed around the 1b and a second inner conductor 32 which is connected to the line L 2. Further, the first inner conductors 12a and 12c and the ground conductor 2 are interposed via the second ceramic dielectric sheet 20.
3 and between the second inner conductor 32 and the ground conductor 23 via the third ceramic dielectric sheet 30, and the ground conductor exposed on the side surface of the laminate 50 is formed. External electrode 60 connected to 23
Are formed on this side. The fourth ceramic dielectric sheet 40 having no conductor formed on the sheet surface is laminated and integrated on the uppermost layer of the laminate 50, and the integrated first, second, third, and fourth ceramic dielectric sheets 10 to 10 are integrated. line L 1 to 40, L 2, L 3 a plurality of first through respectively, the second and third through-holes 11a, 11b, 11c, 21a, 21
It is preferable to provide b, 21c, 31a, 31b, and 31c, respectively, in order to improve the reliability of the capacitor array.
【0009】[0009]
【作用】第1セラミック誘電体シート10上の第1内部
導体12a及び12cと第3セラミック誘電体シート3
0の第2内部導体32との間に、外部電極60を介して
接地される接地導体23を配置することにより、隣接す
る線路L1〜L3の間の浮遊キャパシタンスが低減され、
信号やノイズの線路間のクロストークを解消できる。ま
た、第2セラミック誘電体シート20を介して第1内部
導体12a,12cと接地導体23との間でかつ第3セ
ラミック誘電体シート30を介して第2内部導体32と
接地導体23との間でそれぞれキャパシタンスが形成さ
れるため、線路L1,L3と通電状態にある内部導体12
a,12cと接地導体23との間にかつ線路L2と通電
状態にある第2内部導体32との間にそれぞれ電位差が
生じ、コンデンサとして機能して高周波ノイズが吸収さ
れる。The first internal conductors 12a and 12c on the first ceramic dielectric sheet 10 and the third ceramic dielectric sheet 3
By arranging the ground conductor 23 grounded via the external electrode 60 between the second internal conductor 32 and the second internal conductor 32, the stray capacitance between the adjacent lines L 1 to L 3 is reduced,
Crosstalk between signal and noise lines can be eliminated. Also, between the first inner conductors 12a and 12c and the ground conductor 23 via the second ceramic dielectric sheet 20, and between the second inner conductor 32 and the ground conductor 23 via the third ceramic dielectric sheet 30. , Respectively, the capacitance is formed, so that the lines L 1 and L 3 and the internal conductor 12
a, respectively a potential difference occurs between the second inner conductor 32 which is in electrical communication with line L 2 to and between 12c and the ground conductor 23, the high frequency noise is absorbed and functions as a capacitor.
【0010】[0010]
【実施例】次に本発明の実施例を説明する。本発明はこ
の実施例に限られるものではない。先ず、厚さ約30μ
mの誘電体グリーンシートを多数枚用意した。この誘電
体グリーンシートはポリエステルベースシートの上面に
例えばチタン酸バリウム系のJIS−R特性を有する誘
電体スラリーをドクターブレード法によりコーティング
した後、乾燥して形成される。これらのグリーンシート
のうち、ある1群を第1セラミックグリーンシートと
し、別の群を第2セラミックグリーンシートとし、更に
別の群を第3セラミックグリーンシートとした。次いで
第1セラミックグリーンシートと、第2セラミックグリ
ーンシートと、第3セラミックグリーンシートの各表面
にそれぞれ別々のパターンでPdを主成分とする導電性
ペーストをスクリーン印刷し、80℃で4分間乾燥し
た。即ち、図5に示すように第1セラミックグリーンシ
ート10には、円中心で約5.0mmの間隔をあけて2
つの小円の第1内部導体12a,12cが印刷形成され
る。また第2セラミックグリーンシート20には、3つ
の小円部分22a,22b,22cを除いて接地導体2
3がシート外周部にかけて印刷形成される。小円部分2
2a,22b,22cは円中心で約2.5mmの等間隔
に設けられる。更に第3セラミックグリーンシート30
には、シート中心に小円の第2内部導体32が形成され
る。Next, embodiments of the present invention will be described. The present invention is not limited to this embodiment. First, the thickness is about 30μ
A large number of m dielectric green sheets were prepared. The dielectric green sheet is formed by coating the upper surface of a polyester base sheet with, for example, a barium titanate-based dielectric slurry having JIS-R characteristics by a doctor blade method and then drying. Of these green sheets, one group was a first ceramic green sheet, another group was a second ceramic green sheet, and another group was a third ceramic green sheet. Next, a conductive paste containing Pd as a main component was screen-printed on each surface of the first ceramic green sheet, the second ceramic green sheet, and the third ceramic green sheet in a separate pattern, and dried at 80 ° C. for 4 minutes. . That is, as shown in FIG. 5, the first ceramic green sheet 10 is spaced apart from the center of the circle by about 5.0 mm.
The first internal conductors 12a and 12c of two small circles are formed by printing. The second ceramic green sheet 20 has the ground conductor 2 except for the three small circle portions 22a, 22b, and 22c.
3 is formed by printing over the outer peripheral portion of the sheet. Small circle part 2
2a, 22b and 22c are provided at equal intervals of about 2.5 mm at the center of the circle. Furthermore, the third ceramic green sheet 30
, A small inner conductor 32 is formed at the center of the sheet.
【0011】スクリーン印刷した第2セラミックグリー
ンシート20を中間シートとして第1セラミックグリー
ンシート10と第3セラミックグリーンシート30を交
互に複数枚積層し、最上層には導電性ペーストを全く印
刷していない第4セラミックグリーンシート40を重ね
合わせた。この積層体を熱圧着して一体化した後、2つ
の第1内部導体12a,12c、第2内部導体32及び
小円部分22a,22b,22cの各中心位置に直径が
約1mmの第1貫通孔11a〜11c、第2貫通孔21
a〜21c及び第3貫通孔31a〜31cを穿設した。
これにより、第1内部導体12a,12cは第1貫通孔
11a,11cに臨み、第2内部導体32は第3貫通孔
31bに臨み、接地導体23は第2貫通孔21a〜21
cと間隔22a〜22cをあけて設けられる。A plurality of first ceramic green sheets 10 and third ceramic green sheets 30 are alternately laminated with the screen-printed second ceramic green sheet 20 as an intermediate sheet, and no conductive paste is printed on the uppermost layer. The fourth ceramic green sheet 40 was overlaid. After the laminate is integrated by thermocompression bonding, a first through hole having a diameter of about 1 mm is provided at each central position of the two first inner conductors 12a, 12c, the second inner conductor 32, and the small circular portions 22a, 22b, 22c. Holes 11a to 11c, second through hole 21
a to 21c and third through holes 31a to 31c.
As a result, the first internal conductors 12a and 12c face the first through holes 11a and 11c, the second internal conductor 32 faces the third through hole 31b, and the ground conductor 23 has the second through holes 21a to 21c.
c and an interval 22a to 22c.
【0012】図6に示される貫通孔が設けられた積層体
50を1300℃で約1時間焼成して厚さ約1mmの焼
結体を得た。図6に示すようにこの焼結体をバレル研磨
して焼結体の周囲側面に接地導体23を露出させた。次
いで接地導体23が露出した焼結体の周囲側面にAgを
主成分とする導電性ペーストを塗布し、更に第1貫通孔
11a〜11c、第2貫通孔21a〜21c、第3貫通
孔31a〜31c及び第4貫通孔41a〜41cの各孔
壁に同一の導電性ペーストを塗布した後、これらを一括
して焼付け、焼結体の周囲側面に外部電極60を、各孔
壁に導体層51a,51b,51cをそれぞれ形成した
(図7)。これにより導体層51a,51b,51cが
それぞれ第1内部導体12a,12c及び第2内部導体
32に、また接地導体23が外部電極60にそれぞれ電
気的に接続された積層貫通型コンデンサアレイが得られ
た。The laminate 50 provided with the through holes shown in FIG. 6 was fired at 1300 ° C. for about 1 hour to obtain a sintered body having a thickness of about 1 mm. As shown in FIG. 6, this sintered body was barrel-polished to expose the ground conductor 23 on the peripheral side surface of the sintered body. Next, a conductive paste containing Ag as a main component is applied to the peripheral side surface of the sintered body where the ground conductor 23 is exposed, and the first through holes 11a to 11c, the second through holes 21a to 21c, and the third through holes 31a to 31c are further applied. After applying the same conductive paste to each hole wall of the first through-holes 31c and the fourth through holes 41a to 41c, they are baked at once, and the external electrode 60 is provided on the peripheral side surface of the sintered body, and the conductor layer 51a is provided on each of the hole walls. , 51b, and 51c were formed (FIG. 7). As a result, a laminated through-type capacitor array is obtained in which the conductor layers 51a, 51b, 51c are electrically connected to the first internal conductors 12a, 12c and the second internal conductor 32, respectively, and the ground conductor 23 is electrically connected to the external electrodes 60, respectively. Was.
【0013】この積層貫通型コンデンサアレイの特性を
調べるために、その外部電極60を接地された金属板に
はんだ付けにより接続した。また第1貫通孔11a〜1
1c、第2貫通孔21a〜21c、第3貫通孔31a〜
31c及び第4貫通孔41a〜41cにそれぞれ信号線
路である金属導体L1,L2,L3を挿通し、孔壁に形成
された導体層51a,51b,51cにはんだ付けによ
り接続した。金属導体L1,L2,L3の一端から高周波
信号を入力し、その他端で出力信号を測定し、挿入損失
を求めた。その結果、周波数が高くなるに従って、急峻
に挿入損失が大きくなり、実施例の積層貫通型コンデン
サアレイは良好なフィルタ特性を有することが判った。
また隣接する金属導体L1とL2の各他端で、また金属導
体L2とL3の各他端で出力信号を測定して、クロストー
クの有無を調べたところ、このクロストークは検出でき
ない程小さく、従来の貫通型コンデンサアレイの測定例
と比較して非常に改善されていることが確認された。In order to investigate the characteristics of the multilayer feedthrough capacitor array, its external electrodes 60 were connected to a grounded metal plate by soldering. Also, the first through holes 11a to 11a
1c, second through holes 21a to 21c, third through holes 31a to 31c
Metal conductors L 1 , L 2 , and L 3 as signal lines were inserted into the 31c and the fourth through holes 41a to 41c, respectively, and were connected to the conductor layers 51a, 51b, and 51c formed on the hole walls by soldering. A high-frequency signal was input from one end of the metal conductors L 1 , L 2 , and L 3 , and an output signal was measured at the other end to determine the insertion loss. As a result, the insertion loss increased sharply as the frequency became higher, and it was found that the multilayer feedthrough capacitor array of the example had good filter characteristics.
In each of the other ends of the adjacent metal conductors L 1 and L 2, also by measuring the output signal at the other ends of the metal conductor L 2 and L 3, was examined for cross-talk, the crosstalk detection It was confirmed that it was so small that it was extremely improved as compared with the measurement example of the conventional feedthrough capacitor array.
【0014】なお、第1セラミックグリーンシートと第
2セラミックグリーンシートと第3セラミックグリーン
シートの積層数は、内部導体と接地導体との間で形成さ
れる所望のキャパシタンスに応じて適宜変更することが
できる。従って第1シートと第2シートと第3シートは
各1枚ずつでもよい。ここでより確実にクロストークを
防止するためには第1内部導体を有する第1セラミック
グリーンシートと第2内部導体を有する第3セラミック
グリーンシートの間には接地導体を有する第2セラミッ
クグリーンシートを挟む必要がある。また、各シートに
あけられる貫通孔の数は3つに限らず、2つ或いは4つ
以上設けてもよい。また一列に限らず、複数列に配置し
てもよい。また、上記例では各貫通孔に通る線路とし
て、信号線路を挙げたが、電源線路、接地線路等の他の
線路に対しても本発明を適用することができる。更に、
最上層の第4セラミック誘電体シートは第3セラミック
誘電体シート上に別の保護手段を設ける場合には、特に
積層しなくてもよい。The number of the first ceramic green sheets, the second ceramic green sheets, and the third ceramic green sheets may be appropriately changed according to a desired capacitance formed between the internal conductor and the ground conductor. it can. Therefore, the first sheet, the second sheet, and the third sheet may be one each. Here, in order to more reliably prevent crosstalk, a second ceramic green sheet having a ground conductor is provided between the first ceramic green sheet having the first inner conductor and the third ceramic green sheet having the second inner conductor. It is necessary to pinch. The number of through holes formed in each sheet is not limited to three, but may be two or four or more. In addition, the arrangement is not limited to one row, and may be arranged in a plurality of rows. Further, in the above example, a signal line is described as a line passing through each through-hole, but the present invention can be applied to other lines such as a power supply line and a ground line. Furthermore,
The uppermost fourth ceramic dielectric sheet may not be particularly laminated when another protective means is provided on the third ceramic dielectric sheet.
【0015】[0015]
【発明の効果】以上述べたように、本発明によれば、信
号伝達のために用いられる信号線路の金属導体を貫通孔
に挿通して、外部電極を接地すると、第1セラミック誘
電体シートの第1内部導体と第2セラミック誘電体シー
トの接地導体との間かつ第3セラミック誘電体シートの
第2内部導体と第2セラミック誘電体シートとの接地導
体との間でキャパシタンスが形成されるため、信号線路
に侵入する高周波ノイズを除去することができ、また従
来の内部導体間のスリットを形成した貫通コンデンサア
レイと比べてより確実に浮遊キャパシタンスを除去し、
隣接する信号線路間相互のクロストークを防止すること
ができる。更に、従来のスリットを形成した貫通コンデ
ンサアレイと比較して、貫通孔の間隔を狭めて、より一
層小型で高密度化でき、強度を低下することなく安価に
製造及び実装することができる。As described above, according to the present invention, when the metal conductor of the signal line used for signal transmission is inserted into the through-hole and the external electrode is grounded, the first ceramic dielectric sheet is formed. Capacitance is formed between the first inner conductor and the ground conductor of the second ceramic dielectric sheet and between the second inner conductor of the third ceramic dielectric sheet and the ground conductor of the second ceramic dielectric sheet. , Can remove high-frequency noise that intrudes into the signal line, and more reliably removes stray capacitance compared to conventional through-capacitor arrays that have slits between internal conductors.
Crosstalk between adjacent signal lines can be prevented. Further, as compared with a conventional feedthrough capacitor array having a slit, the distance between the throughholes can be reduced, the size can be further reduced and the density can be increased, and the manufacturing and mounting can be performed at a low cost without lowering the strength.
【図1】本発明実施例の積層貫通型コンデンサアレイの
図7のA−A線断面図。FIG. 1 is a sectional view taken along line AA of FIG. 7 of a multilayer feedthrough capacitor array according to an embodiment of the present invention.
【図2】そのB−B線断面図。FIG. 2 is a sectional view taken along line BB of FIG.
【図3】そのC−C線断面図。FIG. 3 is a sectional view taken along line CC of FIG.
【図4】そのD−D線断面図FIG. 4 is a sectional view taken along line DD of FIG.
【図5】その積層体の分解斜視図。FIG. 5 is an exploded perspective view of the laminate.
【図6】その積層体を焼成した焼結体の斜視図。FIG. 6 is a perspective view of a sintered body obtained by firing the laminate.
【図7】その焼結体の周囲に外部電極を設けて作製され
た積層貫通型コンデンサアレイの要部破断斜視図。FIG. 7 is a cutaway perspective view of a main part of a multilayer feedthrough capacitor array manufactured by providing external electrodes around the sintered body.
【図8】インダクタンス成分を有しない理想的なコンデ
ンサの回路図。FIG. 8 is a circuit diagram of an ideal capacitor having no inductance component.
【図9】LC直列共振回路に近似したコンデンサの回路
図。FIG. 9 is a circuit diagram of a capacitor similar to an LC series resonance circuit.
10 第1セラミック誘電体シート(第1セラミックグ
リーンシート) 11a,11b,11c 第1貫通孔 12a,12c 第1内部導体 20 第2セラミック誘電体シート(第2セラミックグ
リーンシート) 21a,21b,21c 第2貫通孔 22a,22b,22c 電気的に絶縁される間隔 23 接地導体 30 第3セラミック誘電体シート(第3セラミックグ
リーンシート) 31a,31b,31c 第3貫通孔 32 第2内部導体 40 第4セラミック誘電体シート(第4セラミックグ
リーンシート) 41a,41b,41c 第4貫通孔 50 積層体 51a,51b,51c 導体層 60 外部電極10 First ceramic dielectric sheet (first ceramic green sheet) 11a, 11b, 11c First through hole 12a, 12c First internal conductor 20 Second ceramic dielectric sheet (second ceramic green sheet) 21a, 21b, 21c 2 through-holes 22a, 22b, 22c electrically insulated spacing 23 ground conductor 30 third ceramic dielectric sheet (third ceramic green sheet) 31a, 31b, 31c third through-hole 32 second internal conductor 40 fourth ceramic Dielectric sheet (fourth ceramic green sheet) 41a, 41b, 41c Fourth through hole 50 Stacked body 51a, 51b, 51c Conductive layer 60 External electrode
───────────────────────────────────────────────────── フロントページの続き (72)発明者 増田 政美 埼玉県秩父郡横瀬町大字横瀬2270番地 三菱マテリアル株式会社 セラミックス 研究所内 (56)参考文献 特開 平1−244604(JP,A) 実開 平2−52323(JP,U) 実開 昭56−46245(JP,U) (58)調査した分野(Int.Cl.7,DB名) H01G 4/14 - 4/42 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masami Masuda 2270 Yokose, Yokoze-cho, Chichibu-gun, Saitama Mitsubishi Materials Corporation Ceramics Research Laboratory (56) References JP-A-1-244604 (JP, A) 2-52323 (JP, U) Japanese Utility Model Showa 56-46245 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) H01G 4/14-4/42
Claims (2)
シートとして第1セラミック誘電体シート(10)と第3セ
ラミック誘電体シート(30)とを積層して一体化され、一
体化された前記第1、第2及び第3セラミック誘電体シ
ートに線路(L1,L2,L3)がそれぞれ通る3個以上の第1、
第2及び第3貫通孔(11a,11b,11c,21a,21b,21c,31a,31
b,31c)がそれぞれ設けられた積層体(50)を含み、 前記第1セラミック誘電体シート(10)は、隣合う前記第
1貫通孔のいずれか一方のシート表面の前記第1貫通孔
(11a,11c)周囲に形成されかつ前記線路(L1,L3)に接続さ
れる第1内部導体(12a,12c)を備え、 前記第2セラミック誘電体シート(20)は、前記第2貫通
孔とそれぞれ電気的に絶縁される間隔(22a,22b,22c)を
有しシート表面にその外周部にかけて形成された接地導
体(23)を備え、 前記第3セラミック誘電体シート(30)は、前記第1貫通
孔のうち孔周囲に第1内部導体の形成されない第1貫通
孔(11b)に連通する前記第3貫通孔(31b)の周囲に形成さ
れかつ前記線路(L2)に接続される第2内部導体(32)を備
え、 前記第2セラミック誘電体シート(20)を介して前記第1
内部導体(12a,12c)と前記接地導体(23)との間でかつ前
記第3セラミック誘電体シート(30)を介して前記第2内
部導体(32)と前記接地導体(23)との間でそれぞれキャパ
シタンスを形成するように構成され、 前記積層体(50)の側面に露出した前記接地導体(23)に接
続する外部電極(60)がこの側面に形成されたことを特徴
とする積層貫通型コンデンサアレイ。1. A first ceramic dielectric sheet (10) and a third ceramic dielectric sheet (30) are laminated and integrated with the second ceramic dielectric sheet (20) as an intermediate sheet, and are integrated. Lines (L 1 , L 2 , L 3 ) pass through the first, second and third ceramic dielectric sheets, respectively.
The second and third through holes (11a, 11b, 11c, 21a, 21b, 21c, 31a, 31
b, 31c), wherein the first ceramic dielectric sheet (10) is provided with the first through-holes on the surface of any one of the adjacent first through-holes.
(11a, 11c) includes a first inner conductor connected to the formed around and the line (L 1, L 3) (12a, 12c), said second ceramic dielectric sheet (20), the second The third ceramic dielectric sheet (30) is provided with a ground conductor (23) which has a gap (22a, 22b, 22c) electrically insulated from the through hole and is formed on the outer surface of the sheet surface. The first through hole is formed around the third through hole (31b) communicating with the first through hole (11b) where the first internal conductor is not formed around the hole, and is connected to the line (L 2 ). A second internal conductor (32) to be formed, and the first internal conductor (32) through the second ceramic dielectric sheet (20).
Between the internal conductors (12a, 12c) and the ground conductor (23) and between the second internal conductor (32) and the ground conductor (23) via the third ceramic dielectric sheet (30) And an external electrode (60) connected to the ground conductor (23) exposed on the side surface of the multilayer body (50) is formed on the side surface of the multilayer body (50). Type capacitor array.
導体の形成されない第4セラミック誘電体シート(40)が
積層して一体化され、一体化された第1、第2、第3及
び第4セラミック誘電体シート(10,20,30,40)に線路
(L1,L2,L3)がそれぞれ通る複数の第1、第2及び第3貫
通孔(11a,11b,11c,21a,21b,21c,31a,31b,31c)がそれぞ
れ設けられた請求項1記載の積層貫通型コンデンサアレ
イ。2. A laminated body (50) is formed by laminating a fourth ceramic dielectric sheet (40) having no conductor on the sheet surface on the uppermost layer thereof, and is integrated. Lines on the third and fourth ceramic dielectric sheets (10, 20, 30, 40)
(L 1, L 2, L 3) a plurality of first through respective claims second and third through holes (11a, 11b, 11c, 21a , 21b, 21c, 31a, 31b, 31c) are provided, respectively Item 2. The multilayer feedthrough capacitor array according to Item 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4196596A JP3019616B2 (en) | 1992-06-30 | 1992-06-30 | Stack-through capacitor array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4196596A JP3019616B2 (en) | 1992-06-30 | 1992-06-30 | Stack-through capacitor array |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06267790A JPH06267790A (en) | 1994-09-22 |
JP3019616B2 true JP3019616B2 (en) | 2000-03-13 |
Family
ID=16360375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4196596A Expired - Lifetime JP3019616B2 (en) | 1992-06-30 | 1992-06-30 | Stack-through capacitor array |
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JP (1) | JP3019616B2 (en) |
Cited By (1)
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KR100649579B1 (en) * | 2004-12-07 | 2006-11-28 | 삼성전기주식회사 | Multilayered chip capacitor and capacitor array |
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US9054094B2 (en) | 1997-04-08 | 2015-06-09 | X2Y Attenuators, Llc | Energy conditioning circuit arrangement for integrated circuit |
US7321485B2 (en) | 1997-04-08 | 2008-01-22 | X2Y Attenuators, Llc | Arrangement for energy conditioning |
US7336468B2 (en) | 1997-04-08 | 2008-02-26 | X2Y Attenuators, Llc | Arrangement for energy conditioning |
JP2001189234A (en) * | 1999-12-28 | 2001-07-10 | Tdk Corp | Layered capacitor |
US6456481B1 (en) * | 2001-05-31 | 2002-09-24 | Greatbatch-Sierra, Inc. | Integrated EMI filter-DC blocking capacitor |
KR100476027B1 (en) * | 2002-05-29 | 2005-03-10 | 전자부품연구원 | Method for manufacturing ceramic stacking device with built-in capacitor |
JP2008535207A (en) | 2005-03-01 | 2008-08-28 | エックストゥーワイ アテニュエイターズ,エルエルシー | Regulator with coplanar conductor |
KR100887140B1 (en) * | 2007-06-20 | 2009-03-04 | 삼성전기주식회사 | Capacitor embeded multi-layer ceramic substrate |
KR100967059B1 (en) * | 2008-08-25 | 2010-06-30 | 삼성전기주식회사 | Ltcc board with embedded capacitors |
CN111465170B (en) * | 2020-03-31 | 2022-08-30 | 新华三技术有限公司 | Circuit board, plug-in module and preparation process of circuit board |
CN115064524B (en) * | 2022-07-28 | 2022-11-15 | 北京象帝先计算技术有限公司 | Conductive hole array capacitor, preparation method, chip, preparation method and electronic equipment |
-
1992
- 1992-06-30 JP JP4196596A patent/JP3019616B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100649579B1 (en) * | 2004-12-07 | 2006-11-28 | 삼성전기주식회사 | Multilayered chip capacitor and capacitor array |
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Publication number | Publication date |
---|---|
JPH06267790A (en) | 1994-09-22 |
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