JP3018248U - Inspection probe - Google Patents

Abstract

(57) [Summary] [Purpose] To obtain an inspection probe in which a plurality of probes can be arranged at a finer pitch. [Structure] The conductive probe 3 is held by a holding member 10 in a state of having elasticity, and a first member of the first member 1 and the second member 5 which constitutes the holding member 10 A plurality of probe insertion grooves 2 are formed substantially in parallel with each other on one end face 1 a of the first member 1 so as to penetrate the first member 1. Further, the second member 5 is brought into contact with the one end surface 1a of the first member 1,
A band-shaped member 1 is provided around the first member 1 and the second member 5.
The contact surface is closely held by winding and fastening 1. Then, the tip of the probe 3 is brought into contact with the terminal of the component to be inspected to take out an electric signal from the terminal.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a probe used when electrically inspecting electronic parts such as chip parts, LSIs, LCDs, and the like. Specifically, a plurality of probes are provided with elasticity in parallel to each other and in respective length directions. The present invention relates to a structure of an inspection probe that is held in a state of being held, and that makes the tip of each probe contact a terminal of a component to be inspected to extract an electric signal from the terminal.

[0002]

[Prior art]

 14 (a), (b) and (c) show the structure of a conventional inspection probe of this type, the inspection probe includes a plurality of conductive probes 51 and an insulating block 52. It is configured to be held in parallel with each other by being inserted into a plurality of holding holes 53 provided in each via intervening conductive sleeves 55. Each probe 51 has its rear end portion slidably fitted in a conductive socket 56 while being biased outward by a coil spring 57 and prevented from slipping off. 56 is fixed in the sleeve 55. In other words, the probe needles 51 are held in parallel with each other in a state where they are electrically insulated from each other in the holding holes 53 of the block 52, and also in a state where they are elastic in the length direction by the coil spring 57. There is. Further, the number and pitch of the probes 51 are set corresponding to the terminals of the inspected component.

In the probe having the above-described structure, the tip of each probe 51 is brought into contact with each terminal of the component to be inspected, so that an electric signal is transmitted from each terminal through the probe 51, the socket 56, and the sleeve 55. You can take it out. At this time, each probe 51 can be pressed against each terminal by the elastic force of the coil spring 57 without giving a shock.

[0004]

[Problems to be solved by the device]

 However, in the structure of the conventional inspection probe described above, it is difficult to open the holding hole 53 in the block 52 with a minute diameter and a small pitch, and the holding hole 53 is made elastic by the coil spring 57. Since the probes 51 are housed in the socket 56 and the sleeve 55 and then attached, a large number of probes 51 are made to correspond to the increasingly high density of chip parts, terminals with fine pitch such as LSI and LCD in recent years. Arranging has become almost impossible.

The present invention has been made to solve such a problem, and an object thereof is to provide a compact probe for inspection in which a plurality of probes can be arranged at a finer pitch. To do.

[0006]

[Means for Solving the Problems]

 In order to achieve this object, the present invention arranges a plurality of conductive probes (3) in an electrically insulated state from each other, and elastically extends the probes (3) in their respective longitudinal directions. An inspection probe of a type in which the probe is held by a holding member (10) in a held state, and the tip of the probe (3) is brought into contact with a terminal of a component to be inspected to extract an electric signal from the terminal. The holding member (10) has a first member (1) and a second member (5), and at least one of the first member (1) and the second member (5) is A plurality of probe insertion grooves (2) are formed in one end face (1a or 5a) so as to penetrate the one member (1 or 5) at substantially equal intervals, and the one end face (1a or 5a) is formed. 5a) abuts the other of the first member (1) and the second member (5) Further, by winding and fastening a strip member (11) around the first member (1) and the second member (5), the first member (1) and the second member (5) are fastened. It is characterized in that and are closely held together.

Then, the pressing member (20) having both ends of the strip-shaped member (11) fixed and having the adjusting bolt (17) is attached to one of the first member (1) and the second member (5). Of the first member (1) and the second member (5) are wound around the strip-shaped member (11), and the adjusting bolt (20) of the pressing member (20) is arranged. The first member (1) and the second member (5) are held in close contact with each other based on pressing 17) against the one side surface by the rotating operation.

The strip-shaped member (11) is made of a metal plate having a plate thickness of 0.1 mm or less, or a thin plate such as a synthetic resin film.

Further, one of the first member (1) and the second member (5) has a polygonal shape, and the first (1) and The other of the second members (5) is supposed to abut.

[0010]

[Action]

 With the above structure, according to the present invention, at least one end face (1a or 5a) of at least one of the first member (1) and the second member (5) constituting the holding member (10) is By forming a plurality of probe insertion grooves (2) so as to penetrate through one member (1 or 5), probe insertion grooves with a finer width and a finer pitch than when a hole is formed. (2) can be formed, and the probes (3) can be inserted into the high-density probe insertion grooves (2) thus formed.

Further, the other end of the first member (1) and the second member (5) is brought into contact with the one end surface (1a or 5a) in which the probe insertion groove (2) is formed, and thus the contact is made. By winding and fastening the strip-shaped member (11) around the first member (1) and the second member (5) that are in contact with each other, a small space can be obtained as compared with the case of using a screw or the like. The first member (1) and the second member (5) can be efficiently held in close contact with each other. From the above, a compact design is possible, and there is an advantage that there is no possibility that the portion other than the probe (3) will be an obstacle during the inspection and hinder the work.

The reference numerals in parentheses described above are shown for reference to the drawings and do not limit the configuration of the present invention at all.

[0013]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

1 to 3 show the external structure of an inspection probe according to the present invention. In the figure, a plurality of conductive probes 3 are arranged in a row at substantially equal intervals in a state of being electrically insulated from each other, and the probes 3 are held in a state of having elasticity in a longitudinal direction thereof. It is held by the member 10. To inspect electronic parts such as chip parts, LSIs, LCDs, etc. using this inspection probe, one end of each probe 3 is brought into contact with each terminal of the part to be inspected, and the other end is connected to the inspection machine or the measuring instrument. Touch the input terminal. Thereby, an electric signal can be taken out from each terminal of the inspected component through each probe 3.

According to the present invention, the holding member 10 has a first member and a second member, and at least one end surface of at least one of the first member and the second member is A plurality of probe insertion grooves are formed substantially in parallel so as to penetrate the member, the other end of the first and second members is brought into contact with the one end face, and further, the first member and the second member. It is characterized in that the first member and the second member are integrally and closely held by winding and fastening a strip-shaped member around the circumference of.

That is, in this embodiment, as shown in FIGS. 1 to 5, the holding member 10 includes a first member 1 made of an insulating material such as synthetic resin, and an insulating material also made of synthetic resin. And a plurality of probe insertion grooves 2 are formed on the end surface 1a of the first member 1 so as to vertically penetrate the first member 1. Many are formed in parallel. Then, the probe 3 is inserted into the probe insertion groove 2 with both ends thereof protruding from the upper and lower open ends.

Unlike forming a hole, the probe insertion groove 2 is formed accurately and easily with a minute pitch, for example, a width of about 0.06 mm and a pitch of about 0.12 mm, using a precision groove carving machine or the like. be able to.

A plate-shaped second member 5 is brought into contact with the end surface 1a of the first member 1, and a strip-shaped member is formed around the first member 1 and the second member 5. The fixing band 11 of is wound. As shown in FIG. 6, the fixing band 11 is made of a thin strip metal plate such as a stainless steel plate or a beryllium copper plate formed in a rectangular shape, or a synthetic resin film such as a polyimide resin film. It is bent at about 90 degrees, and holes 12, 12 are formed near both ends thereof.

The fixing band 11 is fixed by bolts 16 and 16 through the holes 12 and 12 with both front and back sides near both ends thereof being sandwiched by fixing plates 14 and 15. A space 13 is formed inside the plates 14 and 15. An adjusting bolt 17 is attached to the fixed plate 15, and the first member 1 and the second member 5 are integrally fastened by rotating the adjusting bolt 17. That is, when the adjusting bolt 17 is rotated, the adjusting bolt 17 presses the one side surface 1b of the first member 1, so that the gap (13) between the first member 1 and the fixing plate 15 is reduced. As a result, the tension of the fixing band 11 increases and the first member 1 and the second member 5 are held in close contact with each other. Thus, as a result of the first member 1 and the second member 5 being integrally and closely held, the probe 3 inserted in the probe insertion groove 2 will not come off. In the embodiment, the pressing member 20 is composed of the fixing plates 14 and 15 and the adjusting bolt 17.

Further, the fixing band 11 is wound around the corners of the first member 1 and the second member 5 so as to be in close contact with each other, so that the first member 1 and the second member 5 are wound. In order to give a large contact pressure to No. 5, a plate having a thickness of 0.1 mm or less is used.

The probe 3 is electrically conductive and has elasticity in the lengthwise direction. For example, as shown in FIG. 7, a thin metal plate 3a has a large number of holes 3b and notches. 3c and the metal plate 3a is covered with an insulating rubber 3d to reinforce the metal plate 3a. Moreover, the probe 3 inserted into each probe insertion groove 2 is electrically insulated from each other because the surrounding rubber 3d and the first member 1 and the second member 5 are insulative. Is in a state.

If the metal plate 3a is covered with an insulating rubber 3d like the probe 3, the first member 1 and the second member 5 are made of a conductive material such as metal. It is also possible to use the material of. Moreover, since the probe 3 inserted into each probe insertion groove 2 is also provided with elasticity, it is not necessary to store it in the socket and the sleeve together with the coil spring as in the conventional case, and it is very thin, For example, it can be formed to a thickness of about 0.05 mm.

According to the inspection probe of the present embodiment, a large number of holes are formed at a finer pitch as compared with the conventional example in which holes are formed in the block and the probe is inserted into the holes via the socket and the sleeve. It is possible to arrange the tips of the. Therefore, it is possible to sufficiently deal with terminals having a fine pitch such as chip parts, LSIs, LCDs, and the like. However, the structure is simple, and the first member 1 and the second member 5 are not fastened by screws or the like but are fastened by a thin strip-shaped fixed band 11, which enables a compact design. The fastening member does not interfere with the inspection.

FIG. 8 is a side sectional view showing another embodiment of the probe 3 and the probe insertion groove 2.

The probe 3 in this embodiment is formed by bending the central portion of the metal pin into a U shape, and the probe insertion groove of the first member 1 into which the probe 3 is inserted. A concave portion 2a that engages the curved portion 3e of the probe 3 is formed in 2. The concave portion 2a can be easily formed by engraving, on the end surface 1a of the first member 1, one lateral groove that intersects the probe insertion groove 2 at a substantially right angle, deeper than the probe insertion groove 2.

In this configuration, the probe 3 has elasticity in the lengthwise direction by the curved portion 3e, and the curved portion 3e engages with the concave portion 2a of the probe insertion groove 2 so that the probe 3 moves up and down. It will be retained. According to this structure, since the structure of the probe 3 is very simple, it can be manufactured more easily and at low cost. However, it is necessary to form the first member 1 and the second member 5 with an insulating material in order to insulate the probe 3 from the other member.

FIG. 9 shows that, of the first member 1 and the second member 5 that form the holding member 10, the end surface 5 a of the second member 5 is arranged so that the second member 5 penetrates vertically. An embodiment of an inspection probe having a plurality of probe insertion grooves 2 will be described. Therefore, in this embodiment, the first member 1 is brought into contact with the end surface 5a of the second member 5, and other configurations are the same as those in the above-mentioned embodiments.

FIG. 10 to FIG. 13 are views showing the structure of the inspection probe in still another embodiment.

In the embodiment shown in FIG. 10, a plurality of pairs of probe insertion grooves 2 are provided on the two end faces 1a 1 and 1a on the front side and the back side of the first member 1 with their positions alternately shifted ( Two pairs are formed in the figure, and the second member 5 is in contact with the respective end faces 1a, 1a. The spacer 18, the space 13 and the fixing plates 14 and 15 that form the pressing member 20 are arranged on one side surface of the second member 5 arranged inside, respectively. Around the first member 5 and the second member 5, a fixing band 11 is wound. The spacer 18 is provided as necessary in order to separate the pressing member 20 from the probe 3 so that the pressing member 20 does not interfere with the inspection.

According to this embodiment, since the positions of the probe insertion grooves 2 are alternately shifted, the pitch of the probe 3 can be further reduced.

In the embodiment shown in FIG. 11, the end surface 1 a of the first member 1 on which the probe insertion groove 2 is formed is replaced with the end surface 5 a of the second member 5 on which the probe insertion groove 2 is formed. The needle insertion grooves 2 are in contact with each other substantially parallel to each other and with their positions displaced from each other. In this case, the other member 1 or 5 serves to hold the other probe 3 to each other. The other structure is similar to that shown in the above-mentioned embodiment. Also in this embodiment, the pitch of the probe 3 can be further reduced.

In the embodiment shown in FIG. 12, the probe insertion groove 2 is formed on the end surface 1a of the first member 1, and the four holding members 10 in contact with the second member 5 are attached to the end surface 1a. Combined with the shape. Then, on one side surface of the first member 1 arranged inside, the spacers 18, the space 13, and the fixing plates 14 and 15 constituting the pressing member 20 are arranged respectively, and further, the first member 1 and the first member 1 are arranged. Around the second member 5, a fixed band 11 is wound.

As in this embodiment, by combining a plurality of holding members 10 composed of the first member 1 and the second member 5, a large number of probes 3 can be arranged in various arrangements of the terminals of the component to be inspected. Can be arranged corresponding to.

In the embodiment shown in FIG. 13, the probe insertion grooves 2 are formed on the four end surfaces 1a of the first member 1, and the second member 5 is brought into contact with each end surface 1a. In addition, the circumference of the first member 1 and the second member 5 is wound with a fixing band 11. As in this embodiment, the second members 5 are respectively brought into contact with the four end faces of the first member 1 to reduce the number of parts and to arrange the terminals of the parts to be inspected corresponding to various arrangements. can do.

[0035]

[Effect of device]

 As described above, according to the present invention, a large number of probes can be arranged at a finer pitch than the conventional ones. Therefore, it is possible to sufficiently deal with high-density chip parts, terminals with fine pitch such as LSI, LCD, and the like. Moreover, since the first member and the second member are not fastened with screws or the like, but fastened with a strip-shaped member, a compact design is possible, and the strip-shaped member does not interfere with the inspection. Since it is simple, it can be manufactured at low cost.

[Brief description of drawings]

FIG. 1 is a perspective view showing an appearance of an inspection probe according to the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a side view of FIG.

FIG. 4 is a plan view of an essential part of FIG.

5 is a cross-sectional view taken along the line VV of FIG.

FIG. 6 is a diagram showing an appearance of a belt-shaped member.

7 is a cross-sectional view taken along the line VII-VII of FIG.

FIG. 8 is a diagram showing another embodiment of the probe and the probe insertion groove.

FIG. 9 is a main part plan view showing another embodiment of the inspection probe.

FIG. 10 is a plan view showing another embodiment of the inspection probe.

FIG. 11 is an enlarged plan view of a main part showing another embodiment of the inspection probe.

FIG. 12 is a plan view showing another embodiment of the inspection probe.

FIG. 13 is a plan view showing another embodiment of the inspection probe.

FIG. 14 is a diagram showing a configuration of a conventional inspection probe,
(A) is a plan view, (b) is a front view, and (c) is a side sectional view.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st member 1a End surface 2 Probe insertion groove 3 Probe 5 2nd member 10 Holding member 11 Fixing band 12 Hole 13 Space 14 and 15 Fixing plate 16 Bolt 17 Adjustment bolt 18 Spacer 20 Pressing member

Claims (4)

[Scope of utility model registration request] 1. A plurality of conductive probes are arranged in a state of being electrically insulated from each other, and the probes are held by a holding member while being elastic in their respective longitudinal directions,
By bringing the tip of the probe into contact with the terminal of the component to be inspected, in the inspection probe of the type that extracts an electrical signal from the terminal, the holding member has a first member and a second member, At least one end surface of at least one of the first member and the second member is provided with a plurality of plural probe insertion grooves substantially in parallel so as to penetrate the one member, and the first end surface is provided with the first And the other of the second members are brought into contact with each other, and by further winding and fastening a band-shaped member around the first member and the second member, the first member and the second member are integrally formed. An inspection probe that is closely held. 2. A pressing member for fixing both ends of the strip-shaped member and having an adjusting bolt is arranged on a predetermined side surface of one of the first member and the second member, and The first member and the second member are held in close contact with each other by winding the band-shaped member around the second member and pressing the adjusting bolt of the pressing member against the one side surface by the rotation operation thereof. The probe for inspection according to claim 1, wherein 3. The probe for inspection according to claim 1, wherein the strip-shaped member is made of a metal plate having a plate thickness of 0.1 mm or less or a thin plate such as a synthetic resin film. 4. One of the first member and the second member is formed in a polygonal shape, and the other side of the first and second members is brought into contact with side surfaces of a plurality of side surfaces of the polygonal shape. The inspection probe according to any one of claims 1 to 3,