JP3084926B2 - Chip observation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for observing a chip, and more particularly, to observing a chip which can be selected to observe a chip darkly on a light background or to observe a chip brightly on a dark background. Related to the device.

[0002]

2. Description of the Related Art A chip mounter that automatically mounts chip-type electronic components (hereinafter, referred to as "chips") such as ICs, LSIs, resistor chips, and capacitor chips on a substrate.
The chip is vacuum-sucked to the nozzle of the transfer head, and the chip is transferred to the substrate.

In this case, the chip must be correctly mounted at a predetermined coordinate position on the substrate. Therefore, while the transfer head is transferring the chip to the substrate, the chip adsorbed by the nozzle is observed by a camera, and the position of the chip is measured. After optically detecting the displacement and correcting the detected displacement,
It is designed to be mounted on a substrate.

As such a chip observing apparatus, for example, a light diffusing plate such as a white acrylic resin plate is provided below a transfer head, as disclosed in Japanese Patent Application Laid-Open No. 2-99000. Means for irradiating light from below toward the light diffusing plate and receiving the reflected light with a lower camera are known. According to this means, the chip P is darkened in a bright background as shown in FIG. Can be observed.

On the contrary, a dark light absorbing plate is provided at the lower part of the transfer head, and light is emitted from below toward the chip vacuum-adsorbed to the nozzle, and observed by a camera below. Means for observing a chip P brightly in a dark background as shown in FIG. 4 are known. In any case, the chip observation device observes the chip and its background with a clear contrast of light and dark.

[0006]

A transfer head transfers and mounts various types of chips on a substrate, and transfers the chips in two light and dark modes shown in FIGS. 3 and 4 according to the type of chips. It is desirable to observe. However, conventionally, there has been no means for observing the two light and dark modes with the same observation apparatus. Therefore, the chip is observed dark in a light background as shown in FIG. 3 or is displayed in a dark background as shown in FIG. Means for observing brightly with the camera were alternatively adopted.

Therefore, the present invention provides an
It is an object of the present invention to provide a chip observing apparatus that allows a user to select between observing a chip darkly on a bright background and observing the chip brightly on a dark background.

[0008]

For this purpose, the present invention comprises a first light source and a second light source for irradiating light to a transfer head for attracting a chip to a nozzle, and the light source is stacked below the transfer head. A light diffusion plate and a filter are provided, and the first light source and the second light source have different spectral characteristics with respect to the filter.

[0009]

According to the above arrangement, by switching between the two light sources, it is possible to select between observing the chip darkly on a bright background and observing the chip brightly on a dark background.

[0010]

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a side view of a chip observation device.
A light diffusing plate such as a white acrylic resin plate and a blue transparent filter 3 are laminated and provided below the transfer head 1, and a nozzle 4 protruding downward from the transfer head 1 is provided. The tip P is vacuum-adsorbed to the lower end 4. The transfer head 1 picks up a chip P provided in a parts feeder (not shown) by vacuum suction and transfers the chip P to a substrate (not shown). The displacement of the chip P sucked by the nozzle 4 is detected.

Reference numeral 5 denotes a case provided below the moving path of the transfer head 1, in which a mirror 6 is built at an inclination of 45 °, and is reflected by the mirror 6 on its side. A camera 7 for receiving the reflected light is provided. A first light source 8 and a second light source 9 are provided on the upper surface of the case 5. In this embodiment, the first light source 8 is an LED, and the irradiation angle θ of the LED light LL to be irradiated from now on.
1 is a very wide angle and can irradiate light from a small chip to a large chip having leads such as a QFP. Further, the second light source 9 is a halogen lamp, and the irradiation angle θ2 of the halogen light HL to be irradiated is a narrow angle,
Light is irradiated to the light diffusion plate 2 so that the chip P is not irradiated with light.

FIG. 2 shows the spectral characteristics of the LED light LL and the halogen light HL and the characteristics of the light transmittance BF of the filter 3. As shown, the peak wavelength of the LED light LL is 6
The peak wavelength of the halogen light HL is around 620 nm while the peak wavelength of the halogen light HL is around 620 nm. Decay. The light transmittance of the filter 3 is high at 520 nm or less and 670 nm or more, and is extremely low near 520 nm to 670 nm. Therefore, this filter 3 hardly transmits the LED light LL, but considerably transmits the halogen light HL of 520 nm or less.

FIG. 3 shows an image obtained by observing the chip P by turning off the first light source 8 composed of an LED and turning on the second light source 9 composed of a halogen lamp. As described with reference to FIG. 2, since the filter 3 transmits the halogen light HL of 520 nm or less considerably, the transmitted halogen light HL is scattered by the light diffusion plate 2,
Is observed brightly. As described above, the halogen light H
Since L is not irradiated on the chip P, the chip P is observed dark.

FIG. 4 shows a case where the first light source 8 is turned on and the second light source 9 is turned off. In this case, the LED light L
Since L is irradiated on the lower surface of the chip P, the chip is observed brightly, but the LED light LL irradiated on the filter 3
Does not pass through the filter 3 as described with reference to FIG. 2 and most of the light is absorbed by the filter 3, so that the background of the chip P is observed dark. As described above, according to the present means, by switching between the first light source 8 and the second light source 9, the chip P can be observed with the two contrasts shown in FIGS.

The present invention is not limited to the above embodiment. For example, a light source other than a halogen lamp or an LED may be used. In short, two types of light sources having different filter spectral characteristics are used. , The chip can be observed with the two contrasts shown in FIGS. 3 and 4.

[0017]

As described above, according to the present invention, by switching between the first light source and the second light source in accordance with the type of chip adsorbed by the nozzle, the chip is darkened on a light background. You can choose to observe and brightly observe the chip in a dark background.

[Brief description of the drawings]

FIG. 1 is a side view of a chip observation device according to the present invention.

FIG. 2 is a diagram showing light transmittance and spectral characteristics of a filter according to the present invention.

FIG. 3 is an image diagram of a chip according to the present invention.

FIG. 4 is an image diagram of a chip according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 transfer head 2 light diffusion plate 3 filter 4 nozzle 7 camera 8 first light source 9 second light source

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) G01B 11/00-11/30 G01N 21/84 G03B 15/00 H01L 21/66

Claims (1)

(57) [Claims] A first light source and a second light source for irradiating light to a transfer head for attracting a chip to a nozzle; a light diffusing plate and a filter provided below the transfer head; And a camera on which the light reflected by the light diffusing plate and the chip is incident, wherein the first light source and the second light source have different spectral characteristics with respect to the filter. apparatus.