JP3076146B2 - Unloader device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an unloader device,
Particularly, the present invention relates to an unloader device having an antistatic mechanism.

[0002]

2. Description of the Related Art In a manufacturing process of a TFT substrate for a liquid crystal, a glass substrate (hereinafter, referred to as a substrate) is subjected to processes such as cleaning, film formation, etching, and peeling. In general, an air knife, which is a means for blowing high-pressure air onto a substrate to blow off moisture and dry the substrate, is used. The dried substrate is carried into the unloader device and stored in a cassette of the unloader device by a fork.

[0003]

In the unloader having the above-mentioned structure, when water drops are blown off by an air knife in the washing and drying apparatus, static electricity is generated on the surface of the substrate due to repeated contact and friction between nitrogen and the substrate. I do. Although the unloader device is grounded from the lower part of the table for the purpose of removing static electricity, it was difficult to remove static electricity because the substrate itself was an insulator. For this reason, there has been a problem that an element formed on the substrate causes dielectric breakdown and deterioration of element characteristics.

Further, there is another problem that a defect in a circuit pattern is caused by adsorption of particles in an atmosphere, which causes a reduction in a manufacturing yield.

SUMMARY OF THE INVENTION An object of the present invention is to provide an unloader device having a high production yield without causing dielectric breakdown of elements on a substrate and deterioration of element characteristics.

[0006]

According to the present invention, there is provided an unloader apparatus having a fork for carrying a glass substrate and a cassette for carrying the glass substrate carried by the fork. a filter for outputting the adjusted purity, before the outlet of the filter
Before the corona discharge provided in parallel to the serial glass substrate surface
An ion bar into which a needle-shaped metal electrode for ionizing the nitrogen to generate nitrogen ions is provided, and the nitrogen ions are sprayed from the ion bar to remove electricity from the glass substrate and to prevent adhesion of dust. It is characterized by.

[0007]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a schematic configuration of an embodiment of the present invention.

As shown in FIG. 1, nitrogen 3 is adjusted to a predetermined purity by a filter 4 provided in the flow path, and is guided to an ion bar 5. A needle-shaped metal electrode is inserted into the ion bar 5. By applying an AC voltage of about ± 20 kV to the ion bar 5 and generating nitrogen ions by corona discharge, the conductivity of the nitrogen 3 can be increased by three digits or more. The ion bar 5 is set at the entrance of the substrate 1 of the cassette 6 and sprays ionized nitrogen 3 onto the surface of the substrate 1 and the cassette 6 to lower the potential to about 0.5 kV in 10 seconds, thereby quickly eliminating static electricity.

[0010]

As described above, in the unloader device of the present invention, static electricity is quickly removed by spraying nitrogen ionized by an ion bar onto a substrate entering a cassette. This has the effect of preventing the adhesion of particles and improving the production yield.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a schematic configuration of an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Fork 3 Nitrogen 4 Filter 5 Ion bar 6 Cassette 7 Device power supply 8 Unloader device 9 Cleaning and drying device

Continued on the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21 / 304,21 / 68 G02F 1/13-1/1368

Claims (1)

(57) [Claims] 1. An unloader device having a fork for carrying a glass substrate and a cassette for carrying the glass substrate carried by the fork, wherein a filter for adjusting nitrogen to a predetermined purity at an insertion portion of the cassette and outputting the same. And the outlet of the filter in parallel with the glass substrate surface
And an ion bar into which a needle-shaped metal electrode for ionizing the nitrogen by corona discharge to generate nitrogen ions is provided, and the nitrogen ions are sprayed from the ion bar to remove electricity from the glass substrate and simultaneously remove dust. An unloader device characterized by preventing adhesion.