JP2974088B2 - Carbon dioxide detection sensor - Google Patents
Carbon dioxide detection sensorInfo
- Publication number
- JP2974088B2 JP2974088B2 JP3115873A JP11587391A JP2974088B2 JP 2974088 B2 JP2974088 B2 JP 2974088B2 JP 3115873 A JP3115873 A JP 3115873A JP 11587391 A JP11587391 A JP 11587391A JP 2974088 B2 JP2974088 B2 JP 2974088B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- dioxide gas
- detection sensor
- detection
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【0001】[0001]
【産業上の利用分野】本発明は、固体電解質型の炭酸ガ
スセンサに関し、特に耐久性の改善に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolyte type carbon dioxide sensor, and more particularly to improvement of durability.
【0002】[0002]
【従来の技術】現在開発されている固体電解質センサ
は、イオン伝導体である固体電解質の両側に検知電極と
基準電極とを設けて構成されているのが普通である。こ
のようなセンサを用いて雰囲気中に存在するガス成分を
検出するには、固体電解質として特定のイオンが移動す
るイオン伝導体を用い、その特定のイオンと目的のガス
成分とを含む化合物をたとえば白金等の電極に対する検
知材料として用いるようにしている。2. Description of the Related Art A solid electrolyte sensor currently being developed is usually provided with a detection electrode and a reference electrode on both sides of a solid electrolyte which is an ion conductor. In order to detect gas components present in the atmosphere using such a sensor, an ion conductor in which specific ions move as a solid electrolyte, and a compound containing the specific ions and a target gas component is used, for example. It is used as a sensing material for electrodes such as platinum.
【0003】このような原理に基づく炭酸ガスセンサと
しては、たとえばβアルミナ(一般式Na2 O ・nAl2 O
3 ,n=5〜11)やNASICON(一般式Na1-x Zr2 P 3-x
Six O 12) 等のナトリウムイオン伝導体を用いた例があ
る。この場合、検知電極には白金の網などに炭酸ナトリ
ウムを被覆したものが用いられており、また基準電極と
しては白金のみあるいはこれに炭酸ナトリウム等を被覆
したうえ、これを空気または炭酸ガスの中に密封したも
のが標準的である。従って、被測定ガスとしての炭酸ガ
スは上記の検知電極には接触できるが、反対側の基準電
極には接触できない状態に置かれることになる。As a carbon dioxide gas sensor based on such a principle, for example, β-alumina (general formula: Na 2 O.nAl 2 O)
3 , n = 5-11) and NASICON (general formula Na 1-x Zr 2 P 3-x
There is an example using a sodium ion conductor such as Si x O 12 ). In this case, a platinum mesh or the like coated with sodium carbonate is used as the detection electrode, and platinum alone or sodium carbonate or the like is coated as the reference electrode, which is then placed in air or carbon dioxide gas. Sealed to standard. Accordingly, the carbon dioxide gas as the gas to be measured can be brought into contact with the above-mentioned detection electrode but cannot come into contact with the reference electrode on the opposite side.
【0004】このセンサは、作動時には通常400 〜600
℃程度の一定温度に加熱されていて、検知電極と接触す
る被検ガス中の炭酸ガスの分圧に対応して検知電極にナ
トリウムイオンの起電力が生じ、両電極間の起電力の差
に比例したナトリウムイオンがイオン伝導体中を伝導す
るから、この起電力を測定することによって炭酸ガス濃
度が検出できるものである。[0004] This sensor is usually 400-600 during operation.
Heated to a constant temperature of about ℃, the electromotive force of sodium ions is generated at the detection electrode in accordance with the partial pressure of carbon dioxide in the test gas that comes into contact with the detection electrode. Since the proportional sodium ions are conducted in the ion conductor, the concentration of carbon dioxide can be detected by measuring the electromotive force.
【0005】ところが、上記のように検知電極に炭酸ナ
トリウムを被覆し、イオン伝導体としてNASICON を使用
した従来例の炭酸ガスセンサの場合には、その起電力特
性が素子温度によって大きく影響を受けるものであり、
550℃以上に加熱したときにはじめて安定した特性を
示すようになるから、耐久性が低下するにもかかわらず
素子を高温に加熱して使用するようにしていた。However, in the case of a conventional carbon dioxide gas sensor in which the sensing electrode is coated with sodium carbonate as described above and NASICON is used as the ion conductor, the electromotive force characteristics are greatly affected by the element temperature. Yes,
Since stable characteristics are exhibited only when heated to 550 ° C. or higher, the element is heated to a high temperature and used even though the durability is reduced.
【0006】[0006]
【発明が解決しようとする課題】そこで本発明は、動作
温度をより低くしても安定した起電力特性を示し、従っ
て、より低い動作温度で精度の高い炭酸ガス濃度の検知
ができて耐久性も改善された高信頼性の炭酸ガス検知セ
ンサを提供することを目的とした。SUMMARY OF THE INVENTION Accordingly, the present invention exhibits stable electromotive force characteristics even when the operating temperature is lowered, so that the carbon dioxide gas concentration can be detected with high accuracy at a lower operating temperature and the durability is improved. Another object of the present invention is to provide an improved and highly reliable carbon dioxide gas detection sensor.
【0007】[0007]
【課題を解決するための手段】上記の目的を達成するた
めに本発明は、イオン伝導体を挟んで検知電極と基準電
極とを対設してなる炭酸ガスセンサにおいて、検知電極
用検知材料として、炭酸ナトリウムと、カルシウム、バ
リウム及びストロンチウムから選ばれた少なくとも一つ
のアルカリ土類金属の炭酸塩と、炭酸マグネシウム及び
過酸化バリウムから選ばれた少なくとも一つの化合物と
の混合物からなるものを用いた構成を採用した。In order to achieve the above object, the present invention provides a carbon dioxide gas sensor comprising a detection electrode and a reference electrode sandwiching an ion conductor, wherein the detection material for the detection electrode is: A composition using a mixture of sodium carbonate, calcium, barium and at least one alkaline earth metal carbonate selected from strontium, and at least one compound selected from magnesium carbonate and barium peroxide. Adopted.
【0008】本発明の炭酸ガス検知センサにおけるイオ
ン伝導体としては、たとえばβアルミナあるいはNASICO
N の焼結体等のナトリウムイオン伝導体を用いることが
できるが、これに限られるものではない。また基準電極
には、たとえば白金黒を付着した白金網や白金蒸着膜等
で形成したものが用いられ、場合によっては検知電極と
同様な材料で被覆されていてもよい。このような基準電
極は、ガス非透過性のカバーで覆って被検ガス中の炭酸
ガスの濃度の影響を受けないようにする。The ion conductor in the carbon dioxide gas detection sensor of the present invention is, for example, β alumina or NASICO.
A sodium ion conductor such as a sintered body of N 2 can be used, but is not limited thereto. As the reference electrode, for example, one formed of a platinum net or a platinum vapor-deposited film to which platinum black is adhered is used, and in some cases, may be coated with the same material as the detection electrode. Such a reference electrode is covered with a gas-impermeable cover so as not to be affected by the concentration of carbon dioxide in the test gas.
【0009】本発明の炭酸ガス検知センサにおける検知
材料は、第1成分としての炭酸ナトリウムと、第2成分
として炭酸カルシウム、炭酸バリウム及び炭酸ストロン
チウムから選ばれた少なくとも一つの炭酸塩との混合物
と、更に第3成分として炭酸マグネシウム及び過酸化バ
リウムから選ばれた少なくとも一つの化合物を配合した
混合物を検知電極上に融着する。この際の配合割合は材
料の組合せによっても多少異なるが、耐湿性を良好なも
のとするには第1成分に対する第2成分の配合割合を多
くすることが好ましい。The detection material in the carbon dioxide gas detection sensor according to the present invention comprises: a mixture of sodium carbonate as a first component and at least one carbonate selected from calcium carbonate, barium carbonate and strontium carbonate as a second component; Further, a mixture containing at least one compound selected from magnesium carbonate and barium peroxide as the third component is fused onto the detection electrode. The mixing ratio at this time varies slightly depending on the combination of materials, but it is preferable to increase the mixing ratio of the second component to the first component in order to improve the moisture resistance.
【0010】[0010]
【作用】本発明の炭酸ガス検知センサは、ヒータに通電
して加熱した状態で被測定ガスを接触させると、ガス中
の炭酸ガスの濃度に対応した起電力が両電極間に出力さ
れる。本発明の炭酸ガス検知センサは、特定の成分を配
合してなるイオン伝導体を使用しているために、低温度
でも良好な検知出力特性を有している。In the carbon dioxide gas detection sensor of the present invention, when the gas to be measured is brought into contact with the heater while the heater is energized and heated, an electromotive force corresponding to the concentration of carbon dioxide in the gas is output between the two electrodes. The carbon dioxide gas detection sensor of the present invention has good detection output characteristics even at a low temperature because it uses an ion conductor containing a specific component.
【0011】[0011]
【実施例】図1に本発明の炭酸ガス検知センサの構造を
示す。同図において、1は炭酸ガス検知センサ、2は検
知電極である。この検知電極2は、例えば白金黒を付着
した白金網2a上に検知材料層3を被覆して融着したも
のである。また、4はイオン伝導体である。5は基準電
極であって例えば白金黒を付着した白金網で形成され、
被検ガスから遮蔽するためにガラス等からなるカバー6
で覆って封止してある。なお、7はセラミック基板であ
り、8は基板の裏面に設けられた白金膜からなるヒータ
である。FIG. 1 shows the structure of a carbon dioxide sensor according to the present invention. In the figure, 1 is a carbon dioxide gas detection sensor, and 2 is a detection electrode. The detection electrode 2 is obtained by, for example, coating a detection material layer 3 on a platinum net 2a to which platinum black is adhered and fusing it. Reference numeral 4 denotes an ion conductor. Reference numeral 5 denotes a reference electrode, which is formed of, for example, a platinum net having platinum black adhered thereto.
A cover 6 made of glass or the like for shielding from a test gas
And sealed. Reference numeral 7 denotes a ceramic substrate, and reference numeral 8 denotes a heater made of a platinum film provided on the back surface of the substrate.
【0012】以上のように構成された炭酸ガス検知セン
サ1は、図2の測定装置のチャンバ10の中に設置し、
ヒータ8によって加熱する。空気、酸素及び炭酸ガスを
流量計11、12及び13を通して所定の濃度となるよ
う混合してチャンバ10に供給し、検知電極2と基準電
極5との間の起電力を電圧計9で測定する。なお、14
は被検ガスに水分を付加するための水槽で、16は逆流
防止用のトラップ、15は排気口である。The carbon dioxide gas detection sensor 1 configured as described above is installed in the chamber 10 of the measuring apparatus shown in FIG.
Heating is performed by the heater 8. Air, oxygen and carbon dioxide gas are mixed to a predetermined concentration through flow meters 11, 12 and 13 and supplied to a chamber 10, and an electromotive force between the detection electrode 2 and the reference electrode 5 is measured by a voltmeter 9. . Note that 14
Reference numeral denotes a water tank for adding moisture to the test gas, reference numeral 16 denotes a trap for preventing backflow, and reference numeral 15 denotes an exhaust port.
【0013】〔第1実施例〕炭酸ナトリウムと炭酸バリ
ウムと過酸化バリウムとをモル比で1:2:1となるよ
う混合し、加熱溶融させたのち破砕し、イオン伝導体ペ
レット( NASICON )4の面に設けた白金黒付白金網2a
上に融着して検知材料層3とした。一方、裏面に白金を
スパッタすることにより発熱抵抗線を形成してヒータ8
としたアルミナ系セラミック基板7の上面に、更に白金
をスパッタして基準電極5を設けたものを用意し、この
上面にイオン伝導体ペレット4を載せたのちヒータ8に
通電してペレット4を融着固定し、更に基準電極5を設
けたペレット部分の周りにアルミナ系無機耐熱塗料を塗
布して雰囲気ガスに対するシールを行って、図1のよう
に構成された本発明の炭酸ガス検知センサAを得た。[First Embodiment] Sodium carbonate, barium carbonate and barium peroxide are mixed at a molar ratio of 1: 2: 1, heated and melted, and then crushed to obtain an ion conductor pellet (NASICON) 4. Platinum net 2a with platinum black provided on the surface of
This was fused to form a detection material layer 3. On the other hand, a heating resistance wire is formed by sputtering platinum on the
A reference electrode 5 was prepared by further sputtering platinum on the upper surface of the alumina-based ceramic substrate 7 prepared as described above. Attached and fixed, and further, an alumina-based inorganic heat-resistant paint is applied around the pellet portion provided with the reference electrode 5 to seal against an atmospheric gas, and the carbon dioxide gas detection sensor A of the present invention configured as shown in FIG. Obtained.
【0014】〔第1比較例〕炭酸ナトリウムと炭酸バリ
ウムとを、モル比で1:2となるよう混合して検知材料
とした他は第1実施例と同様にして、比較例の炭酸ガス
検知センサaを得た。[First Comparative Example] A carbon dioxide gas detection of a comparative example was performed in the same manner as in the first example except that sodium carbonate and barium carbonate were mixed at a molar ratio of 1: 2 to provide a detection material. Sensor a was obtained.
【0015】第1実施例の炭酸ガス検知センサAについ
て、素子温度を450℃として炭酸ガス濃度を変化させ
て検知出力特性を測定し、その結果を図3に示した。ま
た第1比較例の炭酸ガス検知センサaについても、素子
温度を550℃及び450℃とした他は全く同様にして
検知出力特性を測定し、その結果を図3に併せて示し
た。この結果から、比較例の炭酸ガス検知センサは素子
温度が低下すると検知出力が低下するのに対し、本発明
の炭酸ガス検知センサは素子温度が低くても検知出力が
高いことがわかる。With respect to the carbon dioxide detection sensor A of the first embodiment, the detection output characteristic was measured by changing the carbon dioxide concentration while setting the element temperature to 450 ° C., and the results are shown in FIG. The detection output characteristics of the carbon dioxide gas detection sensor a of the first comparative example were measured in exactly the same manner except that the element temperatures were set to 550 ° C. and 450 ° C., and the results are also shown in FIG. From these results, it is understood that the detection output of the carbon dioxide gas detection sensor of the comparative example decreases when the element temperature decreases, whereas the detection output of the carbon dioxide gas detection sensor of the present invention is high even when the element temperature is low.
【0016】〔第2実施例〕炭酸ナトリウムと炭酸バリ
ウムと炭酸マグネシウムとを、モル比で1:2:1とな
るよう混合して検知材料とした他は第1実施例と同様に
して、本発明の炭酸ガス検知センサBを得た。[Second Embodiment] The procedure of the first embodiment is the same as that of the first embodiment except that sodium carbonate, barium carbonate and magnesium carbonate are mixed at a molar ratio of 1: 2: 1 to form a detection material. The carbon dioxide detection sensor B of the invention was obtained.
【0017】第2実施例の炭酸ガス検知センサBについ
て、素子温度を500℃とした他は上記と全く同様にし
て検知出力特性を測定し、その結果を図4に示した。ま
た第1比較例の炭酸ガス検知センサaについても、素子
温度を550℃及び500℃とした他は全く同様にして
検知出力特性を測定し、その結果を図4に併せて示し
た。この結果を見ると、本発明の炭酸ガス検知センサは
素子温度が低くても検知出力が高いことがわかる。With respect to the carbon dioxide gas detection sensor B of the second embodiment, the detection output characteristics were measured in exactly the same manner as described above except that the element temperature was set to 500 ° C., and the results are shown in FIG. Further, the detection output characteristics of the carbon dioxide gas detection sensor a of the first comparative example were measured in exactly the same manner except that the element temperatures were 550 ° C. and 500 ° C., and the results are also shown in FIG. From these results, it can be seen that the carbon dioxide gas detection sensor of the present invention has a high detection output even when the element temperature is low.
【0018】〔第3実施例〕炭酸ナトリウムと炭酸スト
ロンチウムと炭酸マグネシウムとを、モル比で1:2:
1となるよう混合して検知材料とした他は第1実施例と
同様にして、本発明の炭酸ガス検知センサCを得た。Third Embodiment A molar ratio of sodium carbonate, strontium carbonate and magnesium carbonate of 1: 2:
A carbon dioxide gas detection sensor C of the present invention was obtained in the same manner as in the first example, except that the mixture was changed to 1 to obtain a detection material.
【0019】〔第2比較例〕炭酸ナトリウムと炭酸スト
ロンチウムとを、モル比で1:2となるよう混合して検
知材料とした他は第1実施例と同様にして、比較例の炭
酸ガス検知センサbを得た。SECOND COMPARATIVE EXAMPLE The same procedure as in the first example was carried out except that sodium carbonate and strontium carbonate were mixed at a molar ratio of 1: 2 to provide a detection material. Sensor b was obtained.
【0020】第3実施例の炭酸ガス検知センサCについ
て、素子温度を500℃とした他は上記と全く同様にし
て検知出力特性を測定し、その結果を図5に示した。ま
た第2比較例の炭酸ガス検知センサbについても、素子
温度を550℃及び500℃とした他は全く同様にして
検知出力特性を測定し、その結果を図5に併せて示し
た。この結果を見ると、本発明の炭酸ガス検知センサは
素子温度が低くても検知出力が高いことがわかる。With respect to the carbon dioxide gas detection sensor C of the third embodiment, the detection output characteristics were measured in exactly the same manner as described above except that the element temperature was set at 500 ° C., and the results are shown in FIG. The detection output characteristics of the carbon dioxide gas detection sensor b of the second comparative example were measured in exactly the same manner except that the element temperatures were 550 ° C. and 500 ° C., and the results are also shown in FIG. From these results, it can be seen that the carbon dioxide gas detection sensor of the present invention has a high detection output even when the element temperature is low.
【0021】〔第4実施例〕炭酸ナトリウムと炭酸カル
シウムと過酸化バリウムとをモル比で1:2:1となる
よう混合して検知材料とした他は第1実施例と同様にし
て、本発明の炭酸ガス検知センサDを得た。Fourth Embodiment A detection material is prepared by mixing sodium carbonate, calcium carbonate, and barium peroxide at a molar ratio of 1: 2: 1 to obtain a detection material. The carbon dioxide detection sensor D of the invention was obtained.
【0022】〔第3比較例〕炭酸ナトリウムと炭酸カル
シウムとを、モル比で1:2となるよう混合して検知材
料とした他は第1実施例と同様にして、比較例の炭酸ガ
ス検知センサcを得た。[Third Comparative Example] A carbon dioxide gas detection of a comparative example was performed in the same manner as in the first example except that sodium carbonate and calcium carbonate were mixed at a molar ratio of 1: 2 to obtain a detection material. Sensor c was obtained.
【0023】第4実施例の炭酸ガス検知センサDについ
て、素子温度を500℃とした他は上記と全く同様にし
て検知出力特性を測定し、その結果を図6に示した。ま
た第2比較例の炭酸ガス検知センサcについても、素子
温度を550℃及び500℃とした他は全く同様にして
検知出力特性を測定し、その結果を図6に併せて示し
た。この結果を見ると、本発明の炭酸ガス検知センサは
素子温度が低くても検知出力が高いことがわかる。With respect to the carbon dioxide gas detection sensor D of the fourth embodiment, the detection output characteristics were measured in exactly the same manner as described above except that the element temperature was set at 500 ° C., and the results are shown in FIG. The detection output characteristics of the carbon dioxide detection sensor c of the second comparative example were measured in exactly the same manner except that the element temperatures were set to 550 ° C. and 500 ° C., and the results are also shown in FIG. From these results, it can be seen that the carbon dioxide gas detection sensor of the present invention has a high detection output even when the element temperature is low.
【0024】[0024]
【発明の効果】以上のように、本発明の炭酸ガス検知セ
ンサは比較的に低温度で精度の良い検知ができ、更には
効率よく素子を加熱することができるために消費電力が
少なくて済み、従って長寿命であり、また構造が簡単で
製造が容易であるという利点がある。As described above, the carbon dioxide gas detection sensor of the present invention can perform accurate detection at a relatively low temperature, and can efficiently heat the element, thus requiring less power consumption. Therefore, it has the advantages of a long service life, a simple structure, and easy manufacture.
【図1】本発明の炭酸ガス検知センサの構成図である。FIG. 1 is a configuration diagram of a carbon dioxide gas detection sensor of the present invention.
【図2】炭酸ガス検知センサの検知出力特性測定装置の
構成図である。FIG. 2 is a configuration diagram of a detection output characteristic measuring device of a carbon dioxide gas detection sensor.
【図3】本発明の第1実施例の炭酸ガス検知センサA及
び第1比較例の炭酸ガス検知センサaの、炭酸ガス濃度
に対する検知出力特性図である。FIG. 3 is a diagram showing detection output characteristics with respect to a carbon dioxide gas concentration of a carbon dioxide gas detection sensor A of a first embodiment of the present invention and a carbon dioxide gas detection sensor a of a first comparative example.
【図4】本発明の第2実施例の炭酸ガス検知センサB及
び第1比較例の炭酸ガス検知センサaの、炭酸ガス濃度
に対する検知出力特性図である。FIG. 4 is a diagram showing detection output characteristics with respect to carbon dioxide concentration of a carbon dioxide gas detection sensor B of a second embodiment of the present invention and a carbon dioxide gas detection sensor a of a first comparative example.
【図5】本発明の第3実施例の炭酸ガス検知センサC及
び第2比較例の炭酸ガス検知センサbの、炭酸ガス濃度
に対する検知出力特性図である。FIG. 5 is a graph showing detection output characteristics with respect to carbon dioxide concentration of a carbon dioxide gas detection sensor C according to a third embodiment of the present invention and a carbon dioxide gas detection sensor b according to a second comparative example.
【図6】本発明の第4実施例の炭酸ガス検知センサD及
び第3比較例の炭酸ガス検知センサcの、炭酸ガス濃度
に対する検知出力特性図である。FIG. 6 is a graph showing detection output characteristics with respect to a carbon dioxide gas concentration of a carbon dioxide gas detection sensor D of a fourth embodiment of the present invention and a carbon dioxide gas detection sensor c of a third comparative example.
1 検知素子 2 検知電極 2a 白金網 3 検知材料層 4 イオン伝導体ペレット 5 基準電極 6 カバー 7 セラミック基板 8 ヒータ 9 電圧計 10 チャンバ 11,12,13 流量計 14 水槽 15 排気口 16 トラップ DESCRIPTION OF SYMBOLS 1 Detecting element 2 Detecting electrode 2a Platinum net 3 Detecting material layer 4 Ion conductor pellet 5 Reference electrode 6 Cover 7 Ceramic substrate 8 Heater 9 Voltmeter 10 Chamber 11,12,13 Flowmeter 14 Water tank 15 Exhaust port 16 Trap
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G01N 27/416 G01N 27/406 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G01N 27/416 G01N 27/406
Claims (1)
極とを対設してなる炭酸ガスセンサにおいて、検知電極
用検知材料として、炭酸ナトリウムと、カルシウム、バ
リウム及びストロンチウムから選ばれた少なくとも一つ
のアルカリ土類金属の炭酸塩と、炭酸マグネシウム及び
過酸化バリウムから選ばれた少なくとも一つの化合物と
の混合物からなるものを用いたことを特徴とする炭酸ガ
ス検知センサ。In a carbon dioxide gas sensor having a detection electrode and a reference electrode opposed to each other with an ion conductor interposed therebetween, at least one selected from sodium carbonate, calcium, barium and strontium as a detection material for the detection electrode. A carbon dioxide gas sensor comprising a mixture of a carbonate of an alkaline earth metal and at least one compound selected from magnesium carbonate and barium peroxide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3115873A JP2974088B2 (en) | 1991-05-21 | 1991-05-21 | Carbon dioxide detection sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3115873A JP2974088B2 (en) | 1991-05-21 | 1991-05-21 | Carbon dioxide detection sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04344456A JPH04344456A (en) | 1992-12-01 |
JP2974088B2 true JP2974088B2 (en) | 1999-11-08 |
Family
ID=14673277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3115873A Expired - Fee Related JP2974088B2 (en) | 1991-05-21 | 1991-05-21 | Carbon dioxide detection sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2974088B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7006926B2 (en) | 2003-02-07 | 2006-02-28 | Tdk Corporation | Carbon dioxide sensor |
-
1991
- 1991-05-21 JP JP3115873A patent/JP2974088B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7006926B2 (en) | 2003-02-07 | 2006-02-28 | Tdk Corporation | Carbon dioxide sensor |
Also Published As
Publication number | Publication date |
---|---|
JPH04344456A (en) | 1992-12-01 |
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