JP2851810B2 - Assembly method of optical semiconductor element module - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for assembling an optical semiconductor device module in which an optical semiconductor device such as a semiconductor laser, a light emitting diode, a photodiode, an avalanche photodiode and an optical fiber are optically coupled. .

[0002]

2. Description of the Related Art FIG. 2 is a cross-sectional view showing a conventional optical semiconductor device module disclosed in Japanese Patent Publication No. 61-14678, for example. Is a cap, 7 is an optical semiconductor element, 8 is a stem to which the optical semiconductor element 7 is fixed so that the light emitting or receiving surface of the optical semiconductor element 7 is almost at the center, 1
1a and 11b are stem leads, 13 is a stem lead 11
a is a low melting point glass for hermetically sealing a, 14 is an electrode lead wire connected to the optical semiconductor element 17 and the stem lead 11a, and 51 and 52 are solders.

[0003] The stem lead 11b is connected to the stem 8 so as to have electrical continuity. Stem lead 11a
Is insulated from the stem 8 by the low melting point glass 13. The end face of the tip of the optical fiber 1 is mirror-cut or spherical lens-processed. The outer peripheral surface near the tip is metallized, so that the optical fiber sleeve 2 and the solder 5
It is fixed by 1. The inner diameter of the upper cylindrical portion of the cap 3 is 200 to 200 times smaller than the outer diameter of the optical fiber sleeve 2.
300 μm larger, optical fiber sleeve 2 and cap 3
The optical fiber sleeve 2 and the cap 3 are fixed by soldering while the solder 52 is filled in a gap between the optical fiber sleeve 2 and the upper cylindrical portion.

Next, an assembling procedure will be described. The stem 8 and the cap 3 are fixed by projection welding in which a large current is applied to the brim portion of the stem 8 and the cap 3 while applying pressure, and welding is performed by heating due to the contact resistance of the brim. Next, the optical fiber sleeve 2 in which the optical fiber 1 is fixed with the solder 51 is inserted into the cylindrical portion on the upper part of the cap 3 so that the optical fiber 1 and the optical semiconductor element are optically coupled to each other. The outgoing light of 1 enters the light receiving surface of the optical semiconductor element 7. Alternatively, the optical fiber sleeve 2 is adjusted by moving the optical fiber sleeve 2 up and down, left and right, and back and forth so that the light emitted from the optical semiconductor element 7 enters the optical fiber 1. After that, the optical fiber sleeve 2 and the cap 3 are fixed by the solder 52.

[0005]

Since the conventional optical semiconductor device module is constructed as described above, the gap between the optical fiber sleeve 2 and the cap 3 is 200 to 300 .mu.m.
m, and the optical fiber sleeve 2 is provided with a cap 3 for moving and adjusting the optical fiber sleeve 2 so as to optically couple the optical fiber 1 and the optical semiconductor element 7.
And the thickness of the solder layer in the gap between the optical fiber sleeve 2 and the cap 3 is not uniform. Therefore, the solders 51, 52
When is cured, the optical fiber sleeve 2 moves due to shrinkage of the solder, and the optical coupling between the optical fiber 1 and the optical semiconductor element 7 deteriorates. In addition, due to distortion in the solder layer due to the thermal expansion coefficient of the cap 3 or the optical fiber sleeve 2 not matching the thermal expansion coefficient of the solder, the optical fiber and the optical semiconductor element may not be optically connected to each other due to an external temperature change or the like. There were problems such as deterioration of bonding.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and the optical coupling between an optical fiber and an optical semiconductor element is deteriorated by fixing an optical fiber sleeve or by a change in external temperature. It is an object to obtain an optical semiconductor element module that does not have any.

[0007]

SUMMARY OF THE INVENTION The present invention is directed to an optical fiber sleeve having at least an outer periphery to which an optical fiber is fixed, a metal sleeve holder into which the optical fiber sleeve is inserted , an optical semiconductor element, and the sleeve holder. And a metal lens holder provided between the optical fiber and the optical semiconductor element and holding a lens. (A) The optical fiber sleeve is inserted into the optical fiber with the optical fiber sleeve inserted into the sleeve holder. A first step of moving and adjusting the optical semiconductor element so as to be optically coupled via the lens; and (b) a second step of welding the sleeve holder and the optical fiber sleeve by laser after the first step . as the Engineering <br/>, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

According to the present invention, there is provided an optical fiber sleeve to which an optical fiber is fixed, the outer circumference of which is at least metal, a metal sleeve holder into which the optical fiber sleeve is inserted , an optical semiconductor element, the optical fiber and the optical semiconductor element. A metal cap having a window therebetween, a fixing portion for fixing the optical semiconductor element and the metal cap, and a metal lens holder provided between the sleeve holder and the metal cap for holding a lens with the door, first moves adjustment (a) so that the said optical semiconductor element and the optical fiber through the optical fiber sleeve while inserting the optical fiber sleeve to the sleeve holder is optically coupled through the lens 1 step, the welding by laser and (b) the rear first step, the optical fiber sleeve and the sleeve holder As the Engineering <br/>, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

According to the present invention, there is provided an optical fiber sleeve to which an optical fiber is fixed, the outer circumference of which is at least metal, a metal sleeve holder having an inner diameter larger than the outer diameter of the optical fiber sleeve by about 2 to 20 μm, an optical semiconductor element, Provided between the sleeve holder and the optical semiconductor element,
A metal lens holder for holding a lens; and (a) the optical fiber sleeve and the optical semiconductor element are optically connected to each other through the lens while the optical fiber sleeve is inserted into the sleeve holder. first step of moving and adjusting to bind, (b) the rear first step, the second step of welding by laser up to the optical fiber sleeve and the surface of the sleeve holder, (c) the second The optical fiber integrated by the step of
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

According to the present invention, the optical fiber is fixed to the optical fiber sleeve at least on the outer periphery, and has an inner diameter larger than the outer diameter of the optical fiber sleeve. A metal sleeve holder of about 3 to 0.7 mm, an optical semiconductor element, and a metal lens holder provided between the sleeve holder and the optical semiconductor element and holding a lens; first step of moving and adjusting to the optical semiconductor element through the optical fiber sleeve and the optical fiber in a state of inserting the optical fiber sleeve to the sleeve holder is optically coupled through the lens, (b) the after the first step, the second step of welding to said optical fiber sleeve by laser from the surface of the sleeve holder, in (c) the second step Ri integrated the optical file
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

According to the present invention, there is provided an optical fiber sleeve to which an optical fiber is fixed, the outer circumference of which is at least metal, a metal sleeve holder having an inner diameter larger than the outer diameter of the optical fiber sleeve by about 2 to 20 μm, an optical semiconductor element, A metal cap having a window between the optical fiber and the optical semiconductor element; a fixing portion for fixing the optical semiconductor element and the metal cap; and a fixing part provided between the sleeve holder and the metal cap. A metal lens holder for holding a lens, and (a) the optical fiber sleeve is optically coupled with the optical fiber and the optical semiconductor element via the lens in a state where the optical fiber sleeve is inserted into the sleeve holder. to the first step of moving adjusts to bind, the from (b) wherein after the first step, the surface of the sleeve holder A second step of welding up to an optical fiber sleeve with a laser; (c) the optical fiber integrated by the second step;
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

According to the present invention, there is provided an optical fiber sleeve in which at least the outer periphery to which the optical fiber is fixed has a metal optical fiber sleeve, and an inner diameter larger than the outer diameter of the optical fiber sleeve. A metal sleeve holder of about 3 to 0.7 mm, an optical semiconductor element, a metal cap having a window between the optical fiber and the optical semiconductor element, and fixing the optical semiconductor element and the metal cap. And a metal lens holder provided between the sleeve holder and the metal cap and holding a lens, and (a) the optical fiber with the optical fiber sleeve inserted in the sleeve holder. first step of moving and adjusting the fiber sleeve so that the optical semiconductor element and the optical fiber is optically coupled through the lens, (b) the After one step, the second step of welding to said optical fiber sleeve by laser from the surface of the sleeve holder, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
The fourth step of welding the holder and the laser is performed .

[0013]

According to the present invention, the optical fiber sleeve and the sleeve holder are moved and adjusted so that the optical fiber and the optical semiconductor element are optically coupled with the optical fiber sleeve inserted into the sleeve holder. the welded by Les chromatography the of Y AG laser. Then, the optical coupling loss of the optical fiber and the optical semiconductor element with a fixed displacement of some sleeve holder and the optical fiber sleeve produced during welding fixing the sleeve holder and the optical fiber sleeve, after fine adjustment moves the sleeve holder, the optical semiconductor element
Lens holder and sleeve holder between the
This is corrected by laser welding the rudder .

Further, according to the present invention , the optical fiber sleeve and the sleeve holder are moved and adjusted, and the sleeve holder and the optical fiber sleeve are laser-welded. Then , after finely moving the sleeve holder, move between the metal cap and the sleeve holder.
The lens holder and the sleeve holder is welded at Les chromatography THE having to.

According to the present invention, a lens holder and a metal cap are provided.
After welding and fixing the optical fiber sleeve and the sleeve
Move the holder and adjust the optical fiber from the surface of the sleeve holder.
Laser welding up to the eva sleeve. And sleeve
After fine adjustment of the solder, slide the sleeve holder and lens holder
And fix it by welding.

Further, according to the present invention, an inner diameter of the sleeve holder is provided.
Is about 2 to 20 μm larger than the outer diameter of the optical fiber sleeve
Sleeve holder
During laser welding from the surface of the fiber to the optical fiber sleeve.
Distortion caused by the deformation of the sleeve holder
Of the sleeve holder and the optical fiber sleeve
Variation in welding strength can be reduced .

The present invention uses a sleeve holder having an inner diameter that is about 2 to 20 μm larger than the outer diameter of the optical fiber sleeve to reduce distortion due to deformation of the sleeve holder during welding, and to reduce the distortion of the sleeve holder and the optical fiber sleeve. To reduce the variation in welding strength.

Further, according to the present invention, the thickness of the weld is 0.3
By using a sleeve holder of about 0.7 mm, the mechanical strength of the welded portion of the sleeve holder can be maintained,
The or-les-over laser welding can be carried out easily.

[0019]

【Example】

Embodiment 1 FIG. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1A is a cross-sectional view of an optical semiconductor element module according to the present invention, in which 12 is an optical fiber sleeve, 13 is a ceramic chip, and 14 is a stainless steel pipe. The optical fiber sleeve 12 is a chip 13
The optical fiber 1 is fixed to the center hole by an adhesive. The end face of the optical fiber 1 is mirror-finished so that the optical fiber sleeve 1
2 and polished. 15 is a stainless steel sleeve holder, 31 is a rod lens, 32 is a lens holder, 33 is a screw, 41 is a cap, 42 is a window glass of the cap, and 43 is a low melting point for hermetically sealing the window glass 42 to the cap 41. Reference numeral 61 denotes a welded portion by a YAG laser. In the drawings, the same reference numerals as those described above denote the same or corresponding parts.

The cap 41 and the stem 8 are fixed by projection welding, and the optical semiconductor element 7 is hermetically sealed by the stem 8, the cap 41, and the window glass 42 of the cap. The rod lens 31 is fixed to a lens holder 32 using a screw 33.

The sleeve holder 15 comprises a lower cylindrical portion having substantially the same diameter as the lens holder 32 and an upper cylindrical portion which is welded to the optical fiber sleeve 12 by an infrared laser such as a YAG laser. The inner diameter of the sleeve holder 15 is such that the optical fiber sleeve 12 can be easily moved up and down in the sleeve holder 15, and if the gap is large, the sleeve holder 15 is easily deformed during welding and distortion is likely to remain, and the welding strength varies. , Optical fiber sleeve 12
2 to 20 μm larger than the outer diameter of Sleeve holder 15
The thickness of the upper cylindrical portion is 0.3 to 0.7 mm from the mechanical strength of the upper cylindrical portion and the ease of welding.

There are two left and right welded portions 61 by the YAG laser at two locations in the middle of the length direction of the sleeve holder 15 (vertical direction in the figure). 12 and the sleeve holder 15 are fixed. Welded part 61 by YAG laser
Are formed so as to reach the optical fiber sleeve 12 from the outer peripheral surface of the sleeve holder 15 as shown in the figure.

Next, an assembling procedure will be described. The cap 41 with the window glass 42 is fixed to the stem 8 to which the optical semiconductor element 7 is fixed by projection welding. The joint between the lens holder 32 to which the rod lens 31 is fixed with the screw 33 and the cap 41 is fixed by welding with a YAG laser. next,
The optical fiber sleeve 12 is inserted into the sleeve holder 15, and the sleeve holder 15 and the optical fiber sleeve 12 are inserted.
Is adjusted so that the optical fiber 1 and the optical semiconductor element 7 are optically coupled via the rod lens 31.

After the adjustment, the sleeve holder 15 and the optical fiber sleeve 12 are simultaneously fixed to the left and right at the same time by welding with a YAG laser at two locations in the middle of the sleeve holder 15 in the longitudinal direction. Thereafter, the sleeve holder 15 is again moved by a few μm and finely adjusted, and then the joint between the sleeve holder 15 and the lens holder 32 is fixed by welding with a YAG laser.

Since the gap between the sleeve holder 15 and the optical fiber sleeve 12 is as small as 2 to 20 μm, the movement of the optical fiber sleeve 12 during welding is extremely small, so that the deterioration of the optical coupling is small. Further, since the fine adjustment can be performed again after the sleeve holder 15 and the optical fiber sleeve 12 are fixed, the position of the optical fiber 1 at the time of adjustment before fixing by the YAG laser is displaced by several μm when fixed by the YAG laser. The deviation from the optimal optical coupling can be corrected, and the optimal optical coupling before fixing can be obtained again. For example, FIG. 1B is an example showing the relationship between the position of the optical fiber 1 in the direction orthogonal to the optical axis of the lens and the optical output of the optical fiber 1. As shown in FIG. If position 1 was 3μm displaced in a direction perpendicular to the lens optical axis, the light output of the optical fiber 1 is degraded 1.3 dB. For this reason, it is important that after the sleeve holder 15 and the optical fiber sleeve 12 are fixed, fine adjustment is performed again to obtain optimum optical coupling before fixing. Note that the relationship between the position of the optical fiber 1 in the direction of the optical axis of the lens and the optical output of the optical fiber 1 is at least 10 times less than that in the direction orthogonal to the optical axis of the lens. . The welded portion between the sleeve holder 15 and the optical fiber sleeve 12 is provided at two positions in the middle of the length direction of the sleeve holder 15, and
The sleeve holder 15 and the optical fiber sleeve 12 are firmly welded.

Further, since the gap between the sleeve holder 15 and the optical fiber sleeve 12 is small, the sleeve holder 1
Distortion hardly remains in No. 5 and the welded portion 61. For these reasons, the optical fiber sleeve 12 can be stably fixed against external temperature changes and the like, and the optical coupling between the optical fiber 1 and the optical semiconductor element 7 does not deteriorate.

The tolerance of the vertical position of the welded portion 61 by the YAG laser between the sleeve holder 15 and the optical fiber sleeve 12 is large, and the workability is good. Further, in the above-described embodiment, the number of the welded portions between the sleeve holder and the optical fiber sleeve is two at each of two places in the middle of the length direction of the sleeve holder. Also, it may be provided at three places on the way.

Further, in the above-described embodiment, an example having a lens and its lens holder has been described. However, the present invention can be applied to an apparatus having no lens and its lens holder.

[0029]

According to the present invention, there is provided an optical fiber sleeve to which an optical fiber is fixed, at least the outer periphery of which is a metal, a metal sleeve holder into which the optical fiber sleeve is inserted , an optical semiconductor element, the sleeve holder and the optical semiconductor. A metal lens holder provided between the optical fiber sleeve and the optical semiconductor element for holding the lens; and (a) the optical fiber sleeve and the optical semiconductor element are connected to each other with the optical fiber sleeve inserted into the sleeve holder. first step of moving adjusted to optically coupled via said lens, (b) after said first step, a second factory for welding and the optical fiber sleeve and the sleeve holder by laser <br (C) the optical fiber integrated by the second step;
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
By assembling the holder and the optical fiber sleeve in the order of the fourth step of welding with a laser, the optical fiber and the optical semiconductor element are slightly misaligned between the sleeve holder and the optical fiber sleeve due to misalignment between the sleeve holder and the optical fiber sleeve. Optical coupling loss is reduced by the integrated optical fiber
Correction can be made by finely moving the sleeve and the sleeve holder to obtain the required optical coupling again.

According to the present invention, there is further provided an optical fiber sleeve having at least an outer periphery to which an optical fiber is fixed, and a metal sleeve holder into which the optical fiber sleeve is inserted .
An optical semiconductor element, a metal cap having a window between the optical fiber and the optical semiconductor element, a fixing portion for fixing the optical semiconductor element and the metal cap, the sleeve holder and the metal cap, A metal lens holder provided between the optical fiber sleeve and the optical fiber sleeve when the optical fiber sleeve is inserted into the sleeve holder. first step of moving adjusted to optically coupled via, (b) the rear first step, a second factory for welding and the optical fiber sleeve and the sleeve holder by laser <br/> (C) the optical fiber integrated by the second step;
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
By assembling the holder and the optical fiber sleeve in the order of the fourth step of welding with a laser, the optical fiber and the optical semiconductor element are slightly misaligned between the sleeve holder and the optical fiber sleeve due to misalignment between the sleeve holder and the optical fiber sleeve. Optical coupling loss is reduced by the integrated optical fiber
Correction can be made by finely moving the sleeve and the sleeve holder to obtain the required optical coupling again.

According to the present invention , the sleeve holder and the optical fiber
Remove the fiber from the surface of the sleeve holder to the optical fiber.
Since the sleeve was fixed by laser welding, the optical fiber
When fixing the fiber sleeve or due to external temperature changes, etc.
Optical coupling between optical fiber and optical semiconductor device deteriorates
There is an effect that a pile can be obtained.

Further, according to the present invention, the inner diameter of the sleeve holder
Is about 2 to 20 μm larger than the outer diameter of the optical fiber sleeve
Since a large sleeve holder is used, the sleeve holder
During laser welding from the surface to the optical fiber sleeve
If the distortion caused by the deformation of the sleeve holder can be reduced
In both cases, welding of the sleeve holder and the optical fiber sleeve
Variations in strength can be reduced.

According to the present invention, the thickness of the welded portion of the sleeve holder is
Sleeve holder with thickness set to about 0.3-0.7mm
The mechanical strength of the welded part of the sleeve holder is
Optical fiber from the surface of the sleeve holder.
Laser welding up to the leave can be easily performed.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an optical semiconductor device module according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a conventional optical semiconductor element module.

[Explanation of symbols]

1 optical fiber, 7 optical semiconductor element, 12 optical fiber sleeve, 15 sleeve holder, 61 welded part.

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G02B 6/42

Claims (7)

(57) [Claims] An optical fiber sleeve to which an optical fiber is fixed, the outer circumference of which is at least metal;
A metal sleeve holder, into which is inserted , an optical semiconductor element, and a metal lens holder provided between the sleeve holder and the optical semiconductor element and holding a lens. (A) The sleeve holder A first step of moving and adjusting the optical fiber sleeve with the optical fiber sleeve inserted so that the optical fiber and the optical semiconductor element are optically coupled via the lens; (b) the first step after the sleeve holder and said optical fiber sleeve about a second factory <br/> be welded by laser, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser. 2. An optical fiber sleeve to which an optical fiber is fixed and at least the outer periphery of which is a metal, and the optical fiber sleeve
A metal sleeve holder into which is inserted , an optical semiconductor element, a metal cap having a window between the optical fiber and the optical semiconductor element, and a fixing portion for fixing the optical semiconductor element and the metal cap. A metal lens holder provided between the sleeve holder and the metal cap and holding a lens; and (a) the optical fiber sleeve is inserted with the optical fiber sleeve inserted into the sleeve holder. A first step of moving and adjusting the optical fiber and the optical semiconductor element so as to be optically coupled via the lens; and (b) after the first step, the sleeve holder and the optical fiber sleeve are connected to each other by a laser. as a second factory <br/> welding, the optical file which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser. Wherein the second of said optical fiber sleeve and the sleeve holder in step, according to claim 1 or 2, characterized in that the surface of the sleeve holder and so that welding by the laser up to the optical fiber sleeve A method for assembling the optical semiconductor element module according to the above. 4. An optical fiber sleeve to which an optical fiber is fixed, the outer circumference of which is at least metal, a metal sleeve holder having an inner diameter larger than the outer diameter of the optical fiber sleeve by about 2 to 20 μm, an optical semiconductor element, and the sleeve. A metal lens holder provided between the holder and the optical semiconductor element and holding a lens; and (a) the optical fiber sleeve is connected to the optical fiber with the optical fiber sleeve inserted into the sleeve holder. A first step of adjusting the movement of the optical semiconductor element so as to be optically coupled via the lens; (b) after the first step , a laser is used from the surface of the sleeve holder to the optical fiber sleeve to the optical fiber sleeve; A second step of welding; (c) the optical fiber integrated by the second step;
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser. 5. An optical fiber-fixed at least outer periphery has a metal optical fiber sleeve and an inner diameter larger than an outer diameter of the optical fiber sleeve, and a thickness of a welded portion with the optical fiber sleeve is 0.3. A metal sleeve holder of about 0.7 mm, an optical semiconductor element, and a metal lens holder provided between the sleeve holder and the optical semiconductor element and holding a lens; (a) the sleeve holder A first step of moving and adjusting the optical fiber sleeve in a state where the optical fiber sleeve is inserted into the optical fiber sleeve so that the optical fiber and the optical semiconductor element are optically coupled via the lens; (b) the first step; After the step, a second step of laser welding from the surface of the sleeve holder to the optical fiber sleeve, and (c) integrating by the second step The optical fiber
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser. 6. An optical fiber sleeve on which an optical fiber is fixed, the outer circumference of which is at least metal, a metal sleeve holder having an inner diameter larger than the outer diameter of the optical fiber sleeve by about 2 to 20 μm, an optical semiconductor element, and the optical semiconductor element. A metal cap having a window between a fiber and the optical semiconductor element, a fixing portion for fixing the optical semiconductor element and the metal cap, and a lens provided between the sleeve holder and the metal cap; (A) the optical fiber sleeve is inserted into the sleeve holder in a state where the optical fiber sleeve is inserted, and the optical fiber and the optical semiconductor element are optically interposed through the lens. first step of moving and adjusting to bind, (b) the rear first step, the optical fiber from the surface of the sleeve holder Second step of welding by laser up to leave, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser. 7. An optical fiber sleeve in which at least the outer periphery to which the optical fiber is fixed has a metal optical fiber sleeve and an inner diameter larger than an outer diameter of the optical fiber sleeve, and a thickness of a welded portion with the optical fiber sleeve is 0.3. A metal sleeve holder of about 0.7 mm, an optical semiconductor element, a metal cap having a window between the optical fiber and the optical semiconductor element, and fixing the optical semiconductor element and the metal cap. And a metal lens holder provided between the sleeve holder and the metal cap and holding a lens. (A) The optical fiber sleeve with the optical fiber sleeve inserted in the sleeve holder first step of moving and adjusting to the optical semiconductor element and the optical fiber is optically coupled through the lens, (b) after said first step Second step of welding by laser up to the optical fiber sleeve and the surface of the sleeve holder, the light phi which is integrated by (c) said second step
A third for finely moving the bushing and the sleeve holder;
Step, (d) the rear third step, the sleeve holder and the lens
Fourth step, the assembly method of the optical semiconductor element module characterized by having a city for welding the holder by a laser.