JP2724787B2 - Positioning device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY
The present invention relates to a positioning device applied to stage positioning and the like.

[0002]

2. Description of the Related Art FIG. 2 is a block diagram showing a conventional positioning device, and FIG. 3 is a perspective view showing the appearance of an XY stage to which such a positioning device is applied. 2. Description of the Related Art Conventionally, a positioning apparatus for an XY stage as shown in FIG.
A moving body 10 as a Y stage, a motor 6 for moving the moving body 10, a ball screw 8 for transmitting the power of the motor 6, a coupling 7 for transmitting the power of the motor 6 to the ball screw 8, a ball screw fixed to the moving body 10 ; 8, a nut 9 for converting the rotational motion of the motor 8 into a linear motion, a tacho generator 5 for outputting a rotational speed signal V that is a voltage proportional to the rotational speed of the motor 6, a mirror 11 fixed to the upper part of the moving body 10, and a mirror 11. The laser length measuring device 12 which measures the current position of the moving body 10 and outputs the current position signal P of the moving body 10 by using the position command signal D1 indicating the positioning position of the moving body 10 and the current position signal P of the moving body 10 A position amplifier 2 for inputting and outputting a speed command signal D2, a speed command signal D2
And a rotational speed signal V output from the tacho generator 5 and a current amplifier D3 for outputting a current command D3, a motor current detecting resistor 13, and a voltage between both ends of the current command D3 and the motor current detecting resistor 13. A current amplifier 4 receives a current signal I and outputs a motor current M to a motor 6. The control gains of the position amplifier 2 and the speed amplifier 3 are set so as to satisfy the positioning time and positioning accuracy required at the time of starting the apparatus.

In a conventional positioning apparatus for a moving body such as an XY stage used in a reduction exposure apparatus, if positioning to a target position is not completed within a predetermined time, an error is issued on the spot, and The whole operation is stopped. After that, in order to enable the reduction exposure apparatus, after removing the cause of the positioning apparatus not completing the positioning to the target position, the positioning apparatus is driven to the initial position by pressing the reset switch,
The operation of the reduction exposure apparatus is enabled again.

FIG. 7 is a perspective view showing the outer shape of an XY stage of another conventional semiconductor exposure apparatus. In the figure, 71 is an X stage, 72 is a Y stage, 73 is a yaw guide, 74 is an air pad, 75 is an X stage driving linear motor, 76 is a Y stage driving linear motor, 7
7 is a measurement mirror, 78 is a mirror surface for Y stage position measurement, 79 is a mirror surface for X stage position measurement, 80 is a laser beam for X stage position measurement, and 81 is a laser beam for Y stage position measurement. The XY stages 71 and 72 are direct drive stages using a linear motor using a static pressure air pad. Mirror surface 78 for Y stage position measurement
The laser beam 81 for measuring the Y-stage position of the laser interferometer is applied to the
Is positioned at the target position. The X stage position measuring laser beam 80 of the laser interferometer is applied to the X stage position measuring mirror surface 79, the position of the X stage 71 is measured, and the X stage 71 is positioned at the target position. X stage driving linear motor 75 and Y stage driving linear motor 76
Is generated by installing an air conditioner around the XY stage and exhausting the heat out of the semiconductor manufacturing apparatus.

[0005]

However, in the conventional positioning device as shown in FIG. 2, when the positioning device is driven for a long period of time, the oil film of the friction contact portion changes over time,
The mechanical characteristics of the positioning mechanism change. as a result,
The required positioning time and positioning accuracy cannot be satisfied. In order to avoid this, there is a drawback that periodic maintenance such as cleaning the friction contact portion and adding new oil is necessary to make the oil film state of the friction contact portion the same as the initial state of the device. .

On the other hand, in a positioning apparatus for a moving body such as an XY stage of a reduction exposure apparatus which requires high-precision positioning, it is difficult to specify the cause of the incomplete positioning at the target position, and it takes time to investigate the cause. It takes a long time, and often reduces the operation rate of the apparatus severely. In addition, when the frequency of occurrence of an error such that positioning to the target position is not completed within a predetermined time is low, even if an attempt is made to reproduce the error to determine the cause of the error, it is difficult to reproduce the error. This takes a long time and often severely reduces the availability of the device.

Further, in the conventional example shown in FIG. 7, if the positioning device is driven continuously for a long period of time, it becomes impossible for an air conditioner installed around the XY stage to remove all the heat generated from the linear motor. The heat convection occurs in the section, and as a result, the laser wavelength changes due to an increase in the temperature around the laser beam of the laser interferometer, and an error occurs in the position measurement value of the XY stage. Therefore,
The operation rate of the device decreases.

An object of the present invention is to improve the operation rate of a positioning device in view of the problems of the prior art. More specifically, first, it is to reduce the number of maintenances of the friction contact portion. Second
Another object of the present invention is to make it possible to quickly determine the cause of an error. Third, it is to prevent occurrence of a position measurement error of the XY stage due to heat generated from the linear motor.

According to a first aspect of the present invention, there is provided a moving body, a motor for moving the moving body, a position measuring device for measuring a current position of the moving body, and an operation of the motor. A speed detector for detecting a speed; a position amplifier for outputting a speed command signal based on a position command signal for commanding a positioning target position of the moving body and a current position signal of the moving body measured by the position measuring device. And a current for controlling a motor current supplied to the motor based on a speed command signal output from the position amplifier and an operation speed signal of the motor detected by the speed detector. A speed control system having a speed amplifier for outputting a command, a position command signal for a control characteristic measurement test of the position control system, and a control characteristic measurement test of the speed control system Signal generating means for generating a speed command signal for the first amplifier, first switch means for switching the position command signal input to the position amplifier between an external signal and a signal from the test signal generating means, and the speed amplifier A second switch means for switching a speed command signal input to the position amplifier from that from the position amplifier and a signal from the test signal generation means, and the position command signal input to the position amplifier for the first switch means is The control characteristics of the position control system are measured by changing over the second switch means so that the speed command signal inputted to the speed amplifier comes from the position amplifier. When performing a test, a position command signal from the test signal generating means and a current position of the moving object measured by the position measuring device The control characteristic of the position control system is measured based on the signal, and the second switch means is switched so that the speed command signal input to the speed amplifier comes from the test signal generation means. Control for measuring the control characteristics of the speed control system based on a speed command signal from the test signal generating means and a current position signal of the moving object measured by the position measuring device when performing the control characteristic measurement test of It has a characteristic measuring means. The control characteristic measuring means adjusts the control gain of the position amplifier based on the measurement result of the control characteristic of the position control system, and adjusts the control gain of the speed amplifier based on the measurement result of the control characteristic of the speed control system. It is preferable to have a gain adjusting means for adjusting.

According to a second aspect of the present invention, there is provided a moving body, a motor for moving the moving body, a position measuring device for measuring a current position of the moving body, and a command for a positioning target position of the moving body. A drive control unit that controls driving of the motor based on a position command signal and a current position signal of the moving body measured by the position measuring device to position the moving body at a target position; and the drive control unit includes: When controlling the driving of the motor based on a position command signal for commanding a positioning target position of the moving body and a current position signal of the moving body measured by the position measuring device, the position is determined at predetermined time intervals. A first storage unit that stores a current position signal of the moving body measured by a measuring device, and a position command signal that the drive control unit commands a positioning target position of the moving body. When it is determined that the moving body is not positioned at the target position after ending the driving of the motor based on the current position signal of the moving body measured by the position measuring device, the first storage means A second storage unit for storing the stored current position signal of the moving object. Preferably, the second storage means has a nonvolatile memory.

Further, in the third invention, the moving body, a linear motor for moving the moving body, a mirror provided on the moving body, and the mirror reflected by the mirror to move the moving body. A laser interferometer for measuring the current position of the body, drive control means for controlling the drive of the linear motor so as to position the moving body at a target position, and convection including heat generated by the linear motor. The linear motor is used to prevent an error in a measurement value of the laser interferometer due to an influence on an optical path of the laser light passing between the mirror and the laser interferometer. And a heat discharging means for forcibly discharging the heat generated by the linear motor from the inside to the outside of the cover. Preferably, the heat discharging means has an exhaust fan.

[0012]

In the first invention, at a predetermined timing, the input to the speed control system is switched to the speed command signal from the test signal generating means, and based on the speed command signal and the current position signal of the moving body corresponding thereto, By measuring the gain and phase of the speed control system with respect to the speed command signal, it is possible to obtain frequency characteristics such as the resonance value of the primary resonance and the resonance frequency. Further, the input to the speed control system is switched to the speed command signal from the position control system, and the input to the position control system is switched to the position command signal from the test signal generation means, and the position command signal and the moving body corresponding thereto are switched. Based on the current position signal, the gain and phase of the position control system with respect to the position command signal are measured, and frequency characteristics such as gain margin and phase margin can be obtained. By adjusting the gain of each control system so that these obtained frequency characteristics become the initial ones of the apparatus, the initial frequency characteristics of the apparatus are restored, and the required positioning time and positioning accuracy are reduced. Will be maintained. Therefore, the number of times of maintenance of the friction contact portion can be reduced.

According to the second aspect of the present invention, since the position of the moving body at predetermined time intervals from the start of positioning to the end of positioning operation is stored, an error that positioning is not completed at the target position within the predetermined time occurs. In this case, the cause of the error can be easily determined based on the stored position of the moving object at each point in time. Therefore, it is not necessary to reproduce the error at the time of investigating the cause of the error, so even if the frequency of occurrence of the error is small and it is difficult to reproduce the state of the error, the cause of the error is immediately investigated and necessary measures are taken. Thus, the operation rate of the device is improved.

According to the third aspect of the present invention, since the cover is provided to prevent convection including heat generated by the motor from reaching the optical path of the laser interferometer, the temperature around the optical path of the laser light is reduced. The rise is prevented, thereby preventing the fluctuation of the wavelength of the laser beam. Therefore, the measurement accuracy of the laser interferometer is maintained with high accuracy over a long period of time, so that high-precision positioning is always performed, and a reduction in the operation rate of the apparatus is prevented. Furthermore, by exhausting the air inside the cover to the outside of the device by the fan, the heat generated by the motor is exhausted by the fan, and the heat is prevented from being transmitted to the peripheral portion of the positioning device. The motor is drawn inside and the motor is efficiently cooled.

Other functions and effects of the present invention will be described in more detail with reference to the following examples.

[0016]

EXAMPLE 1 FIG. 1 is a block diagram showing a positioning apparatus according to a first embodiment of the present invention. In this figure, the components denoted by the same reference numerals as those in FIG. 2 indicate the same components as those in FIG.

In FIG. 1, reference numeral 20 denotes an automatic adjustment unit for measuring the characteristics of the device and adjusting the control gain so as to obtain the desired characteristics, and a test for generating a test signal T for measuring the characteristics of the device. A signal generation unit 21, a gain / phase measurement unit 22, which receives the current position signal P and the test signal T and measures the characteristics of the device, a position amplifier 2 and a speed amplifier 3
Control gain adjusting section 23 for outputting position control gain setting signal PG and speed control gain setting signal VG for automatically adjusting the control gain of the control gain, and gain / phase measuring section 2
2 has a memory 28 for storing the measured values.

Reference numeral 26 denotes a position switch for selecting whether the signal input to the position amplifier 2 is used as the position command D1 or the output T of the test signal generation unit 21, and 27 is a position switch for inputting the signal input to the speed amplifier 3 to the speed amplifier 3. This is a speed switch for selecting whether to use the command D2 or the output T of the test signal generation unit 21.

In this configuration, when the positioning device is operated, the position switch 26 is set to the a side and the speed switch 27 is set to the c side, and the position command D1 and the speed command D2 are input.

Then, when the device does not satisfy the required positioning time and accuracy, the control gain is corrected by using the automatic adjusting unit 20. First, the speed switch 27 is switched to the d side, and the output T of the test signal generator 21 is input to the speed amplifier 3. Thereafter, the test signal generation unit 21 provides the characteristics of the frequency characteristics of the speed control system (primary resonance of the mechanism).
For the frequency range f _min ~f _max which reveals, first, low sine wave of a frequency f _min to m periods occur, then, a sine wave of frequency f ₁ = f _min + △ f is m cycles generated, as follows A sine wave having a frequency f _i = f _i-1 + Δf (i = 2, 3,...) Is generated at Δf intervals until the frequency reaches f _max . While this test signal is being output from the test signal generation unit 21, the gain / phase measurement unit 22
Is sampled as sampling data DATA [j] (j = 1, 2, 3,...) At a certain time Δt, and (DATA [j + 1] −DATA
[J]) / Δt is calculated to estimate the speed V [i + 1] of the moving object. Further, for each cycle of the test signal input from the test signal generation unit 21, the gain and the phase of the speed control system are obtained, and the gain for m cycles at the frequency f _i (i = 1, 2, 3,...) And the average of the phases. In this way,
The frequency characteristics of the speed control system are obtained from the gain and phase values from the frequencies f _min to f _max . The control gain adjusting unit 23 adjusts the speed control gain so that the result is close to the frequency characteristic in the initial state, that is, the resonance value or resonance frequency of the primary resonance of the mechanism at the time of starting the apparatus, which is stored in the memory 28 in advance. Try various changes.

Similarly, the speed switch 27 is returned to the c side and the position switch 26 is set to the b side, and the output of the test signal generator 21 is input to the position amplifier 2. In this case, the test signal generator 21 measures the characteristics of the frequency characteristics of the position control system (gain margin, phase margin). That is, as described above, in the frequency range f _{min to} f _max , a sine wave having a low frequency f _min is first generated for m periods, and then a frequency f ₁ =
f _min + △ sine wave f is m cycles generated, and so the frequency _{f i = f i-1 +} △ f intervals until the sine wave (i = 2,3, ...) to a frequency f _max △ f Generated by While such a test signal is being output from the test signal generation section 21, the current position signal P of the moving object 10 is input to the gain / phase measurement section 22, and the gain / phase measurement section 22 outputs the test signal generation section 21. obtain the position control system of the gain and phase for each test signal one period inputted from the frequency f _i (i =
The average of the gain and the phase for m periods in (2, 3,...) Is obtained. In this way, the frequency characteristics of the position control system are obtained from the gain and phase values from the frequencies f _min to f _max . The control gain adjusting unit 23 variously changes the position control gain so that the result is close to the frequency characteristic in the initial state, that is, the gain margin and the position margin previously stored in the memory 28 at the time of starting the apparatus.

To adjust the control gain, for example, when there is one control gain, the currently set control gain l
_{For 0} , two control gains l ₁ = l ₀ + △ l, l ₂ =
l ₀ - △ examine the characteristics of the control system in l, setting the l ₀ the closer the frequency characteristic when the most device start time up to l ₀ as the optimum control gain. If the case of l ₁ is closest to the frequency characteristic at the time of starting the apparatus, l ₀ = l ₁ and the characteristic of the control system is examined again with the above two control gains. As a result, if l ₂ is closest to the frequency characteristic at the time of starting scanning, l ₀ = l _2, and the characteristic of the control system is examined again with the above two control gains. Such an operation is repeated to set the optimum control gain.

As described above, according to the present embodiment, not only the control gain is optimally adjusted, but also the failure of the mechanism, for example, the loosening of the screw is estimated by focusing on the mechanical resonance frequency of the frequency characteristic of the speed control system. It is possible to do.

In this embodiment, the deviation between the position command D1 and the current signal P of the moving body 10 is always input to the automatic adjustment unit 20 when the positioning device is operated, and a reference value having the deviation is set. If it exceeds, it can be considered that the state of the oil film in the frictional contact portion has changed greatly, and the operation can be temporarily stopped to adjust the control gain. According to this, it is possible to adjust the control gain by predicting the required positioning time or positioning accuracy before the positioning device becomes insufficient.

Embodiment 2 FIG. 4 is a block diagram of an XY stage positioning control device according to a second embodiment of the present invention. In the figure, 41
Is an XY stage, 42 is a drive motor thereof, and XY is
The stage 41 and the motor 42 are coupled by, for example, a ball screw. 43 is a driver for driving the motor 42, 44 is a position measuring device for measuring the position of the XY stage, 45 is a servo processor for controlling the XY stage, 46 is a timer for giving a timing signal to the servo processor at regular intervals, and 47 is each time. XY during positioning
A memory for storing a change in the position of the stage 41;
Reference numeral 8 denotes a memory for storing a change in the position of the XY stage 41 when the XY stage 41 cannot be stopped at the target stop position even if a predetermined time has elapsed after the start of positioning, and 49 denotes a system for providing a target position signal to the servo processor 45. Processor.

FIG. 5 shows an XY stage 41 in this apparatus.
9 is a flowchart showing a procedure for positioning the position.
The positioning procedure will be described according to this flowchart. When the positioning is started, first, a target position command signal is given from the system processor 49 to the servo processor 45 (step 100). In response, the servo processor 45 clears the pointer n to 0 and permits a timer interrupt (step 100). Step 101). Next, the servo processor 45 outputs a signal for driving the XY stage 41 to the position indicated by the target position command signal given from the system processor 49 to the driver 43 based on the current position read by the position measuring device 44 (step 102). ). Then, the servo processor 45 determines completion of the positioning of the XY stage 41 from the current position and the target position command signal (step 103).

Between steps 102 and 103,
The timer interrupt permitted at step 101 occurs at regular intervals, and each time, the timer interrupt routine of steps 200 to 204 is executed. When the process proceeds to the timer interrupt routine, first, the servo processor 45 reads the current position via the position measuring device 44 (step 201), and writes this to MEM _a (n) in the memory 47 (step 2).
02). Next, the pointer n is counted up (step 203), and the process returns to the main routine (step 204).
In other words, in this timer interrupt routine, changes in the position of the XY stage 41 at regular intervals are written in the memory 47 one after another.

When the positioning completion determination in step 103 is exited, the servo processor 45 inhibits the timer interrupt (step 104). Then, when the positioning completion determination is not an error, that is, when the XY stage 41 can be correctly stopped at the target position, a signal indicating that the positioning is OK is returned to the system processor 49 (step 106), and the positioning operation ends. However, when the positioning completion judgment is an error,
That is, when the XY stage 41 even after the lapse of a predetermined time after the start positioning can not be stopped at the target stop position, data MEM _a memory 47, all memory 48 MEM
Copy as _b (step 107). Then, a reply of positioning NG (error) is returned to the system processor 49 (step 108), and the positioning operation is completed.

As described above, according to the present embodiment, when the positioning completion determination is an error, the change in the position of the XY stage 41 at that time is left in the memory 48. By reading the contents of the memory 48 later, The cause of the error that the positioning at the target position is not completed within the predetermined time can be easily investigated.

The memory 48 is stored in an NVRAM or an EEPROM.
By using a non-volatile memory such as an OM, the contents of the memory 48 do not disappear even if the power of the apparatus is turned off after an error that the positioning at the target position is not completed within a predetermined time occurs. Can be more easily determined.

Also, by storing information such as the target position, the previous position, and the positioning time as well as the change of the position of the moving object in the memory, an error that the positioning at the target position is not completed within a predetermined time can be prevented. The cause of occurrence can be more easily determined.

Embodiment 3 FIG. 6 is a perspective view showing a driving portion of a positioning device according to a third embodiment of the present invention. In the figure, 71 to 81
Elements shown up to are common to those in FIG. In FIG. 6, reference numeral 62 denotes a cover for covering the motor so that heat generated from the linear motor 76 for driving the Y stage is not transmitted to the periphery of the positioning device, 63 is a tube for sucking air inside the cover 62, and 64 is for heat exhaust. I'm a fan.

The cover 62 is attached to the positioning device so as to cover the Y-stage driving linear motor 76 so that the Y-stage driving linear motor 76 does not come into contact even when the Y-stage driving linear motor 76 moves. By rotating the heat exhaust fan 64, the heat generated from the Y stage driving linear motor 76 is sucked through the tube 63, and the heat is exhausted outside the semiconductor exposure apparatus. At the same time, the cool air coming out of the air conditioning equipment inside the semiconductor exposure apparatus is taken into the inside of the cover 62 from the gap between the coils of the linear motor 76 for driving the Y stage and cools the coil of the linear motor 76 for driving the Y stage.

Similarly, a cover is attached to the positioning device so as to cover the X-stage driving linear motor 75 so that the X-stage driving linear motor 75 does not come into contact with the X-stage driving linear motor 75 even when the X-stage driving linear motor 75 moves. The generated heat is exhausted outside the semiconductor exposure apparatus. At the same time, the coil of the X stage driving linear motor 75 is cooled.

As described above, according to this embodiment, the heat generated from the linear motor 75 for driving the X stage and the linear motor 76 for driving the Y stage is exhausted outside the semiconductor exposure apparatus, and the air-conditioned semiconductor exposure apparatus is used. By forcibly sucking the cool air inside into the cover 62, not only can the coils of the X stage drive linear motor 75 and the Y stage drive linear motor 76 be cooled, but also the cover covers the movable part. In addition, it is possible to eliminate the danger that the serviceman will be pinched his hand or the like by the linear motor 76 for driving the Y stage.

A thermometer is installed inside the cover 62, and the temperature inside the cover 62 is constantly measured. When the temperature rises, the number of revolutions of the heat exhaust fan 64 is increased to increase the exhaust amount. By always keeping the temperature inside the cover 62 constant, the characteristics of the X stage driving linear motor 75 and the Y stage driving linear motor 76 can be always kept constant. As a result, stable positioning characteristics can always be obtained.

[0037]

As described above, according to the first aspect of the present invention, the change with time of the characteristics of each control system is measured, so that the control gain can be corrected based on the result. Therefore, even if the oil film state of the friction contact portion changes so that the required positioning time and positioning accuracy are not satisfied, the characteristics of the control system can be brought closer to the initial state by performing the automatic adjustment of the control gain. The required positioning time and positioning accuracy can be recovered and maintained. In addition, it is possible to reduce the number of regular maintenances to maintain and recover the oil film state of the friction contact part such as grease up to the initial state performed by service personnel, reduce maintenance costs, and maintain a high equipment operation rate. it can.

Further, according to the second aspect, it is possible to easily determine the cause of the error that the positioning at the target position is not completed within the predetermined time based on the stored position of the moving body. Then, the time required to determine the cause of the error can be reduced, and the operation rate of the device can be improved. Also, when an error occurs, the stored moving body position is stored in the second memory, so that even if the apparatus is operated again after the error occurs, the contents of the second memory can be retained until the error occurs again. it can. For this reason, when the frequency of occurrence of an error is small, the apparatus can be operated even before the contents of the second memory are read, so that the operation rate of the apparatus can be further improved.

Further, according to the third aspect, the laser light of the laser interferometer for measuring the position of the stage is not affected by the heat generated from the linear motor. Can do it. Thereby, the positioning accuracy of the positioning device is increased and the positioning device is stabilized. Therefore, a high device operability can be maintained. Further, heat conduction to the mechanical parts around the linear motor can be prevented, and a decrease in positioning performance due to deformation of the mechanical parts and deformation of the measurement mirror can be prevented.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a positioning device according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing a positioning device according to a conventional example.

FIG. 3 is a perspective view showing the appearance of an XY stage of a semiconductor exposure apparatus to which the positioning device shown in FIGS. 1 and 2 is applied.

FIG. 4 is a block diagram of an XY stage positioning control device according to a second embodiment of the present invention.

FIG. 5 is a flowchart showing a procedure for positioning an XY stage in the apparatus shown in FIG. 4;

FIG. 6 is a perspective view showing a driving portion of a positioning device according to a third embodiment of the present invention.

FIG. 7 is a perspective view showing an outer shape of an XY stage of another semiconductor exposure apparatus according to a conventional example.

[Explanation of symbols]

2: position amplifier 3: speed amplifier 4: current amplifier
5: Tacho generator, 6: Motor, 7: Coupling, 8: Ball screw, 9: Nut, 10: Moving body, 1
1: mirror, 12: laser measuring instrument, 13: motor current detection resistor, D2: speed command, D3: current command, M: motor current, I: current signal, V: rotation speed signal, P: current position signal, 20: automatic adjustment unit, 21: test signal generation unit,
22: gain / phase measurement unit, 23: control gain adjustment unit,
PG: position control gain setting signal, VG: speed control gain setting signal, 26: position switch, 27: speed switch,
28, 47, 48: memory, 41: XY stage, 4
2: motor, 43: driver, 44: position measuring device, 4
5: servo processor, 46: timer, 49: system processor, 62: cover, 63: tube, 64: heat exhaust fan, 71: X stage, 72: Y stage,
73: Yaw guide, 74: Air pad, 75: X stage driving linear motor, 76: Y stage driving linear motor, 77: Measurement mirror, 78: Y stage position measurement mirror surface, 79: X stage position measurement mirror surface , 8
0: Laser light for X stage position measurement, 81: Laser light for Y stage position measurement.

Claims (6)

(57) [Claims] 1. A moving body, a motor for moving the moving body, a position measuring device for measuring a current position of the moving body, a speed detector for detecting an operation speed of the motor,
A position control system having a position amplifier that outputs a speed command signal based on a position command signal that commands a positioning target position of the moving body and a current position signal of the moving body that is measured by the position measuring device; A speed having a speed amplifier for outputting a current command for controlling a motor current supplied to the motor based on a speed command signal output from an amplifier and an operation speed signal of the motor detected by the speed detector A control system, a position command signal for a control characteristic measurement test of the position control system, and a test signal generating unit for generating a speed command signal for a control characteristic measurement test of the speed control system; First switch means for switching the position command signal to be supplied from the outside and from the test signal generation means; Second switch means for switching the speed command signal to be supplied between the one from the position amplifier and the one from the test signal generation means, and the position command signal input to the position amplifier for the first switch means is the test signal. Switching from the generating means,
When performing a control characteristic measurement test of the position control system by switching a switch means so that a speed command signal input to the speed amplifier is from the position amplifier, a position command signal from the test signal generation means and A control characteristic of the position control system is measured based on a current position signal of the moving object measured by the position measuring device, and a speed command signal input to the speed amplifier by the second switch means is a test signal. When performing a control characteristic measurement test of the speed control system by switching to be from the generation means,
A control characteristic measuring means for measuring a control characteristic of the speed control system based on a speed command signal from the test signal generating means and a current position signal of the moving object measured by the position measuring device, Positioning device. 2. The control characteristic measuring means adjusts the control gain of the position amplifier based on the measurement result of the control characteristic of the position control system, and adjusts the speed based on the measurement result of the control characteristic of the speed control system. 2. A gain adjusting means for adjusting a control gain of the amplifier.
Positioning device. 3. A moving body, a motor for moving the moving body, a position measuring device for measuring a current position of the moving body, a position command signal for commanding a positioning target position of the moving body, and the position. Drive control means for controlling the driving of the motor based on a current position signal of the moving body measured by a measuring device to position the moving body at a target position; and When controlling the driving of the motor based on a position command signal for commanding a position and a current position signal of the moving body being measured by the position measuring device, the position measuring device is measured by the position measuring device every predetermined time. First storage means for storing a current position signal of the moving body, and a position command signal for commanding a positioning target position of the moving body by the drive control means, and the position measuring device. When it is determined that the moving body is not positioned at the target position after the driving of the motor based on the current position signal of the moving body that has been measured is measured, the moving object stored in the first storage unit is determined. A positioning device comprising a second storage means for storing a current position signal of a moving object. 4. The positioning device according to claim 3, wherein said second storage means has a nonvolatile memory. 5. A moving body, a linear motor for moving the moving body, a mirror provided on the moving body, and measuring a current position of the moving body by reflecting a laser beam on the mirror. A laser interference type length measuring device, drive control means for controlling the driving of the linear motor so as to position the moving body at a target position, and convection including heat generated by the linear motor causes the mirror to interfere with the laser interference. A cover that covers the linear motor to prevent an error in a measurement value of the laser interference type length measuring device due to affecting an optical path of the laser light passing between the length measuring devices; A positioning device, comprising: a heat discharging means for forcibly discharging heat generated by a linear motor from the inside of the cover to the outside. 6. The positioning device according to claim 5, wherein said heat discharging means has an exhaust fan.