JP2632921B2 - Method of manufacturing polymer thin film piezoelectric transducer - Google Patents
Method of manufacturing polymer thin film piezoelectric transducerInfo
- Publication number
- JP2632921B2 JP2632921B2 JP11897088A JP11897088A JP2632921B2 JP 2632921 B2 JP2632921 B2 JP 2632921B2 JP 11897088 A JP11897088 A JP 11897088A JP 11897088 A JP11897088 A JP 11897088A JP 2632921 B2 JP2632921 B2 JP 2632921B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric
- backing
- piezoelectric transducer
- piezoelectric film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は高分子圧電材料の薄膜を用いた音響−電気変
換器の送受波面が曲面を成す高分子薄膜圧電トランスデ
ューサの製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a polymer thin film piezoelectric transducer in which a wave transmitting / receiving surface of an acoustic-electric converter using a thin film of a polymer piezoelectric material has a curved surface.
（従来の技術） 超音波探触子に用いる圧電材料には水晶，水溶性結
晶，圧電セラミック，高分子圧電材料等があるが成型性
が良く、フィルム状にすることができ、又、可撓性があ
る等の利点からポリ弗化ビニリデン（PVDF）や弗化ビニ
リデン−３弗化エチレン共重合体（Ｐ（VDF−TrFE）に
代表される高分子圧電材料が医用超音波探触子に応用さ
れ始めている。(Prior Art) Piezoelectric materials used for ultrasonic probes include quartz, water-soluble crystals, piezoelectric ceramics, and polymer piezoelectric materials. Due to its advantages such as flexibility, polymer piezoelectric materials represented by polyvinylidene fluoride (PVDF) and vinylidene fluoride-3 ethylene copolymer (P (VDF-TrFE)) are applied to medical ultrasonic probes Is starting to be.
従来、送受波面が曲面を成す超音波探触子、特に凹面
のそれを作ろうとすると、バッキング材の方を前以て目
的とする凹面に仕上げておいて、それに電極付し分極ず
みの前記PVDFやＰ（VDF−TrFE）などの平面状に作った
高分子圧電膜を、押し延ばして接着していた。Conventionally, when trying to make an ultrasonic probe whose transmitting and receiving surface forms a curved surface, in particular, a concave surface, the backing material is finished in advance to the intended concave surface, and the PVDF with electrodes attached thereto is polarized. The polymer piezoelectric film made in a flat shape such as P or V (VDF-TrFE) was stretched and adhered.
（発明が解決しようとする課題） 然るに、この方法によると、膜に張力を加えつつ押し
延ばしなが接着することになり、膜に被着されている電
極にひびが入ったり、膜が均一に延びないという問題が
あった。即ち、電極付きの圧電膜が加熱され軟化されは
するものの、空中に置かれたまま引き延ばされる点が問
題である。(Problems to be Solved by the Invention) However, according to this method, the film is adhered while being stretched while applying tension to the film, and the electrode applied to the film is cracked or the film is uniformly formed. There was a problem that it did not extend. That is, there is a problem in that the piezoelectric film with electrodes is heated and softened, but is stretched while being placed in the air.
本発明は上記の問題点に鑑みてなされたもので、その
目的は、圧電膜を空中で引張る必要のない超音波探触子
の製造方法を実現することにある。The present invention has been made in view of the above problems, and an object of the present invention is to realize a method of manufacturing an ultrasonic probe that does not need to pull a piezoelectric film in the air.
（課題を解決するための手段） 前記の課題を解決する本発明は、高分子圧電材料の薄
膜を用いた音響−電気変換器の送受波面が曲面を成す高
分子薄膜圧電トランスデューサの製造方法において、略
平面の端面を有する熱可塑性のプラスチック材を用いた
バッキングに柔軟な高分子圧電材料による圧電性薄膜を
被着し、加熱して可塑化した後、所望の形状の曲面を有
する押し型により押圧成形して固化させて目的の形状を
有する圧電トランスデューサを得ることを特徴とするも
のである。(Means for Solving the Problems) The present invention for solving the above-mentioned problems is directed to a method of manufacturing a polymer thin film piezoelectric transducer in which a wave transmitting / receiving surface of an acoustic-electric converter using a thin film of a polymer piezoelectric material has a curved surface. A piezoelectric thin film made of a flexible polymer piezoelectric material is applied to a backing made of a thermoplastic plastic material having a substantially flat end face, heated and plasticized, and then pressed by a pressing die having a curved surface of a desired shape. It is characterized by being molded and solidified to obtain a piezoelectric transducer having a desired shape.
（作用） 平面状の未成形のバッキングに圧電材料薄膜を取り付
け、オーブン内で加熱軟化させた後、押し型で押圧成形
する。その後冷却固化させて凹面トランスデューサを得
る。(Function) A piezoelectric material thin film is attached to a flat unformed backing, heated and softened in an oven, and then pressed by a pressing die. Then, it is cooled and solidified to obtain a concave transducer.
又押圧成形前に圧電膜上に保護板を置いて押圧成形
し、ストレスを最小にする。In addition, a stress is minimized by placing a protective plate on the piezoelectric film and performing pressure molding before the pressure molding.
（実施例） 以下図面を参照して本発明の方法の実施例を詳細に説
明する。(Example) Hereinafter, an example of a method of the present invention will be described in detail with reference to the drawings.
第１図は本発明の方法の一実施例の説明図である。図
において、（イ）図，（ロ）図，（ハ）図，（ニ）図は
工程の順序を示す図である。図中１は熱可塑性プラスチ
ック，アクリル又はABS等で作られたバッキング（熱硬
化性の半硬化エポキシでも良い）、２は電極付け分極ず
みの高分子圧電材で作られた圧電膜である。３はバッキ
ング１と圧電膜２の形を凹形にするための凸面を持った
押し型で、４はバッキング１及び圧電膜２を軟かくする
ために熱を与えるオーブンである。FIG. 1 is an explanatory view of one embodiment of the method of the present invention. In the figures, (a), (b), (c), and (d) show the order of the steps. In the figure, reference numeral 1 denotes a backing made of thermoplastic plastic, acrylic, ABS, or the like (thermosetting semi-cured epoxy may be used). Reference numeral 2 denotes a piezoelectric film made of a polymer piezoelectric material with electrodes and polarization. Reference numeral 3 denotes a pressing die having a convex surface for making the shape of the backing 1 and the piezoelectric film 2 concave, and 4 denotes an oven for applying heat to soften the backing 1 and the piezoelectric film 2.
以上の実施例の製造方法を説明する。（イ）図は熱可
塑性材料のバッキング１と電極付き分極ずみの圧電膜２
を示す図である。（ロ）図はバッキング１の上に圧電膜
２を取り付けた図、（ハ）図は（ロ）図の圧電膜２を取
り付けたバッキング１をオーブン４に入れ、押し型３を
バッキング１に押し付けようとしている図である。オー
ブン４中の温度は分極された圧電膜２の分極状態が変化
しない程度の温度に保ち、バッキング１と圧電膜２の変
形が容易な程度に加熱し軟化させる。軟化したならば、
押し型３を圧電膜２とバッキング１とに押し付け、押し
型３の形状に強制的に変形させる。（ニ）図は冷却後押
し型３を離脱させ、残された圧電膜２とバッキング１が
所望の凹形に変形された状態を示す図である。この後電
極のリード線の取り付け等通常の処理を行う。The manufacturing method of the above embodiment will be described. (A) The figure shows a thermoplastic material backing 1 and a polarized piezoelectric film 2 with electrodes.
FIG. (B) is a view in which the piezoelectric film 2 is mounted on the backing 1; (c) is a view in which the backing 1 with the piezoelectric film 2 shown in (b) is placed in the oven 4; FIG. The temperature in the oven 4 is maintained at a temperature at which the polarization state of the polarized piezoelectric film 2 does not change, and the backing 1 and the piezoelectric film 2 are heated and softened to such an extent that the piezoelectric film 2 is easily deformed. If softened,
The pressing die 3 is pressed against the piezoelectric film 2 and the backing 1 and is forcibly deformed into the shape of the pressing die 3. (D) is a view showing a state in which the pressing mold 3 is released after cooling, and the remaining piezoelectric film 2 and the backing 1 are deformed into a desired concave shape. Thereafter, normal processing such as attachment of electrode lead wires is performed.
尚、本発明の製造方法において、第２図に示すように
行うことも有効である。図において、第１図と同等の部
分には同一の符号を付してある。図中、５は圧電膜２と
押し型３との間に入れつ圧電膜２の緩衝材とするバッキ
ング１と同じ材料で作った保護板である。この製造方法
を説明する。圧電膜２をバッキング１の上に置くまでは
第１図の方法と同じである。次に保護板５を圧電膜２の
上に置く（（ロ）図）。オーブン４中に入れ加熱軟化す
る。軟化したら押し型３でバッキング１と圧電膜２と保
護板５と共に成形する。保護板５はバッキング１と同じ
材質なので、間に挟んで成形される圧電膜２のストレス
は最小となり、分極処理された圧電膜２に対する影響は
最小である（（ロ）図）。（ハ）図は押し型３を外し、
保護板５も外す状態を示している。保護板５は唯置いた
だけなので容易に離れるが、離型剤を用いれば一層離れ
易くなる。In the production method of the present invention, it is also effective to carry out the method as shown in FIG. In the figure, the same parts as those in FIG. 1 are denoted by the same reference numerals. In the drawing, reference numeral 5 denotes a protective plate made of the same material as the backing 1 serving as a cushioning material for the piezoelectric film 2 inserted between the piezoelectric film 2 and the pressing die 3. This manufacturing method will be described. Until the piezoelectric film 2 is placed on the backing 1, it is the same as the method of FIG. Next, the protection plate 5 is placed on the piezoelectric film 2 ((b) diagram). Place in oven 4 and soften by heating. After softening, the backing 1, the piezoelectric film 2 and the protective plate 5 are formed together with the pressing die 3. Since the protective plate 5 is made of the same material as that of the backing 1, the stress of the piezoelectric film 2 formed therebetween is minimized and the influence on the polarized piezoelectric film 2 is minimized ((b)). (C) The figure removes the press mold 3,
The state where the protection plate 5 is also removed is shown. The protective plate 5 can be easily separated since it is only placed, but is more easily separated if a release agent is used.
（発明の効果） 以上詳細に説明したように本発明によれば、圧電膜に
取り付けられた電極に対する破壊の確率を最小にして曲
面の超音波トランスデューサを作ることができるように
なり、実用上の効果は大きい。(Effects of the Invention) As described in detail above, according to the present invention, it is possible to manufacture a curved ultrasonic transducer by minimizing the probability of destruction of an electrode attached to a piezoelectric film. The effect is great.
第１図は本発明の方法の一実施例の図、第２図は本発明
の他の実施例の図である。 １……バッキング、２……圧電膜 ３……押し型、４……オーブン ５……保護板FIG. 1 is a diagram of one embodiment of the method of the present invention, and FIG. 2 is a diagram of another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1 ... Backing 2 ... Piezoelectric film 3 ... Press type 4 ... Oven 5 ... Protective plate
Claims (1)
変換器の送受波面が曲面を成す高分子薄膜圧電トランス
デューサの製造方法において、略平面の端面を有する熱
可塑性のプラスチック材を用いたバッキングに柔軟な高
分子圧電材料による圧電性薄膜を被着し、加熱して可塑
化した後、所望の形状の曲面を有する押し型により押圧
成形して固化させて目的の形状を有する圧電トランスデ
ューサを得ることを特徴とする高分子薄膜圧電トランス
デューサの製造方法。1. A method for manufacturing a polymer thin film piezoelectric transducer in which a wave transmitting / receiving surface of an acoustic-electric converter using a thin film of a polymer piezoelectric material has a curved surface, a thermoplastic plastic material having a substantially flat end face is used. A piezoelectric thin film made of a flexible polymer piezoelectric material is applied to the backing, heated and plasticized, and then pressed and solidified by a pressing die having a curved surface of a desired shape to form a piezoelectric transducer having a desired shape. A method for manufacturing a polymer thin film piezoelectric transducer, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11897088A JP2632921B2 (en) | 1988-05-16 | 1988-05-16 | Method of manufacturing polymer thin film piezoelectric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11897088A JP2632921B2 (en) | 1988-05-16 | 1988-05-16 | Method of manufacturing polymer thin film piezoelectric transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01288200A JPH01288200A (en) | 1989-11-20 |
| JP2632921B2 true JP2632921B2 (en) | 1997-07-23 |
Family
ID=14749789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11897088A Expired - Fee Related JP2632921B2 (en) | 1988-05-16 | 1988-05-16 | Method of manufacturing polymer thin film piezoelectric transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2632921B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006208090A (en) * | 2005-01-26 | 2006-08-10 | Jtekt Corp | Ultrasonic probe |
| DE102009043251A1 (en) * | 2009-07-27 | 2011-02-03 | Siemens Aktiengesellschaft | Bending device for bending a piezoelectric bending element, piezoelectric energy converter for converting mechanical energy into electrical energy by means of the bending device and method for converting the mechanical energy into electrical energy |
| WO2011046602A1 (en) * | 2009-10-13 | 2011-04-21 | National Institute Of Aerospace Associates | Energy conversion materials fabricated with boron nitride nanotubes (bnnts) and bnnt polymer composites |
| JP5609540B2 (en) * | 2010-10-27 | 2014-10-22 | Ｊｆｅスチール株式会社 | Defect detection method and defect detection apparatus using leaky surface acoustic wave |
| JP2012093246A (en) * | 2010-10-27 | 2012-05-17 | Jfe Steel Corp | Ultrasonic probe and method for detecting defect |
| WO2013074134A1 (en) | 2011-11-17 | 2013-05-23 | National Institute Of Aerospace Associates | Radiation shielding materials containing hydrogen, boron and nitrogen |
-
1988
- 1988-05-16 JP JP11897088A patent/JP2632921B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01288200A (en) | 1989-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH08506227A (en) | Ultrasonic transducer array and manufacturing method thereof | |
| JP2632921B2 (en) | Method of manufacturing polymer thin film piezoelectric transducer | |
| US5016333A (en) | Method for manufacturing piezoelectric polymer transducers | |
| JPS58153352A (en) | Manufacture of semiconductor device | |
| JP2002147610A (en) | Packing with support base and method of manufacturing the same | |
| JPH08503592A (en) | High frequency focused transducer and method of making the same | |
| JPS5981997A (en) | Manufacture of diaphragm of dynamic electroacoustic transducer | |
| JPH07324B2 (en) | Method for producing synthetic resin product having skin | |
| JPH0564583B2 (en) | ||
| JP2626241B2 (en) | Method for manufacturing composite piezoelectric body | |
| JP3833816B2 (en) | Diaphragm for electroacoustic transducer and manufacturing method thereof | |
| JP2008265070A (en) | Method for manufacturing plastic lens and method for releasing plastic lens from mold | |
| JPH01293799A (en) | Ultrasonic probe and its manufacture | |
| JP3398214B2 (en) | Method for manufacturing convex type ultrasonic probe | |
| JPH0486100A (en) | Ultrasonic probe and its manufacture | |
| JPS62104399A (en) | Manufacture of ultrasonic probe | |
| JPS6260010B2 (en) | ||
| JPS644506Y2 (en) | ||
| JPH0443295Y2 (en) | ||
| JPS59298A (en) | Manufacture of loudspeaker diaphragm | |
| JP3435388B2 (en) | Probe cover for eardrum thermometer and method of manufacturing the same | |
| JPS5855688Y2 (en) | ceramic filter | |
| JPS606455A (en) | Paperboard hot-pressed shape with skin and manufacture thereof | |
| JPS61264899A (en) | Manufacture of honeycomb diaphragm for speaker | |
| JPH02179B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |