JP2672994B2 - Laser processing head - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a laser processing head, and more particularly to a device for driving two rotating axes of a tip of a multi-joint type laser processing head.

[Prior Art] Conventionally, in this type of multi-joint type laser processing head, in addition to three-axis control of X, Y and Z, the irradiation optical axis of laser light is always held on the work surface in the normal direction, for example. As a result, an appropriate processing state can be obtained. Therefore, in laser processing of a three-dimensional work, the processing is performed while changing the posture of the laser processing nozzle according to the work surface shape. As a mechanism for changing the posture of the nozzle, a first rotating bracket which is rotationally controlled around a first rotating shaft with respect to the head main body, is rotatably supported by the first rotating bracket, and is connected to the rotating first shaft. The second rotation bracket is configured to rotate around a rotation second axis in a different direction, and each drive motor controls rotation of the two axes based on each control signal.

Generally, the drive motor for the first shaft is provided in the head main body and transmits the rotational drive to the first shaft via a gear or the like.
The drive motor for the second shaft was usually mounted on the first rotating bracket.

However, if a drive motor is provided in such a rotating part, the head itself becomes heavy and the tip part becomes large, and the wiring structure is complicatedly entangled with the head tip part near the processing position to rotate. A long cord is required to allow the rotary motion of the first axis and the rotary second axis around 360 °. During the movement, the cord may be twisted, wrapped around other mechanisms, and interfere with the work. I couldn't avoid it, and I couldn't clean it.

[Problems to be Solved by the Invention] For this reason, the drive motor for the second shaft is provided on the head body side similarly to the drive motor for the first shaft, and the second shaft is provided from the inside or the outside of the first shaft via the transmission means. If is driven to rotate, the problems on the wiring and the appearance can be solved. However, if the first shaft rotates by simply connecting the respective motors to the respective shafts, relative rotation occurs between the first main shaft and the transmission means, and the second shaft also rotates relative to the first shaft. As a result, the rotational movements of both shafts are related to each other. Therefore, in order to drive and control each axis independently by each control signal, rotation in the opposite rotation direction is applied to the direction in which the second axis is rotated by the rotational movement of the first axis. The rotation of the other shaft may be canceled by the rotation of the other shaft.

Therefore, even in the conventional robot, various differential gear mechanisms or a solution method using a compensation method by software has been considered. For example, if a cancellation method using software is attempted, this control is extremely difficult because even the acceleration and deceleration characteristics of both drive systems affect the stopped state of the second axis. The control system and the like became complicated, and it was not an appropriate means for controlling the movement of the machining head for high-precision machining, which allows light to pass through the rotary shaft like a laser machining robot.

Therefore, in the present invention, both drive motors are provided on the base side, and the motion control of two rotation axes is performed under a more simplified transmission mechanism.

[Means for Solving the Problems] In the present invention, each of the driving means for the first hollow shaft and the second hollow shaft is attached to the head main body on the base side, and the second driving means is concentric with the first hollow shaft. Rotation is transmitted to the second hollow shaft via the rotation transmission cylinder provided in the first hollow shaft, and at this time, rotation to the first hollow shaft is prevented in order to prevent rotational movement of the second hollow shaft due to rotation of the first hollow shaft. By transmitting the driving force to the rotation transmission cylinder in the same phase as that of the first hollow shaft, it is possible to simultaneously control the respective hollow shafts by their own driving means.

 A specific example for this will be described below.

[Embodiment 1] In FIG. 1, a head body 1 of a laser processing head.
Is based on a predetermined machining program, X (not shown),
The feed is controlled in the directions of the three axes Y and Z.
Further, the head body 1 holds a processing head 7 including a first hollow shaft 2, a first rotating bracket 3, a second hollow shaft 4, a second rotating bracket 5 and a lens holder 6.

The first hollow shaft 2 has upper and lower bearings 8 with respect to the head body 1,
8 is rotatably supported about the rotation first axis A through 8,
The inside is formed in a hollow shape so that the laser light incident from above the head body 1 can pass through.

The first rotation bracket 3 has a predetermined shape, for example, a V shape, is formed in a hollow shape, and is integrally fixed at its upper end portion to the lower end portion of the first hollow shaft 2 by a screw (not shown).

The second hollow shaft 4 is rotatably supported at the tip of the first rotating bracket 3 via bearings 9 and 9 about a rotating second shaft B, and the inside thereof is formed in a hollow shape so that laser light can pass therethrough. ing.

The second rotation bracket 5 is formed in a hollow shape having a predetermined V shape, for example, and is integrally fixed at one end thereof to the lower end portion of the second hollow shaft 4 by a screw (not shown). Further, the lens holder 6 is held by the other end portion of the second rotation bracket 5.

The lens holder 6 holds a condenser lens 10 inside and a nozzle 11 at the tip, and irradiates laser light toward the intersection F between the rotation first axis A and the rotation second axis B by these condenser means. It is supposed to do. That is, it has a one-point pointing type head structure.

A reflecting mirror 12 located below the first hollow shaft 2 is fixed to the first rotating bracket 3. The reflecting mirror 12 is mounted at an inclination angle of, for example, 45 ° with respect to the rotation first axis A. Further, a reflecting mirror 13 is fixed so as to face the reflecting mirror 12 at a position of the first rotating bracket 3 located on the laser beam incident side of the second hollow shaft 4.

Further, a reflecting mirror 14 is fixed to the second rotating bracket 5 at a position located on the irradiation side of the laser beam from the second hollow shaft 4 at an inclination angle of, for example, 45 ° with respect to the optical axis of the laser beam, and At the position on the incident side to the condenser lens 10,
A reflecting mirror 15 is fixed so as to face the reflecting mirror 14.

Note that FIG. 1 shows a case where the first rotating bracket 3 and the second rotating bracket 5 are on the same plane, and the center line C of the condenser lens 10 and the nozzle 11 is the first rotating axis A.
Matches.

In the case of this processing head 7, laser light is incident from above the first hollow shaft 2 along the rotating first axis A, is reflected by the reflecting mirror 12, and advances toward the reflecting mirror 13 side of the first rotating bracket 3. ,
The light is reflected by the reflecting mirror 13 and travels along the second axis of rotation B. Then, on the rotating second axis B, it is guided to the reflecting mirror 14 attached to the second rotating bracket 5, is reflected by the reflecting mirror 14, travels toward the reflecting mirror 15, and is further collected by the reflecting mirror 15. It is guided to the optical lens 10 and irradiated from the nozzle 11 toward the processing point F.

That is, according to the processing head 7, even if the direction of the irradiation surface of the workpiece is changed, the first rotation bracket 3 and the second rotation bracket 3
The rotary bracket 5 is rotated around the rotary first axis A and the rotary second axis B, respectively, to change the posture of the nozzle 11, and the irradiation point F does not move.

Next, the rotational drive structure of the first hollow shaft 2 and the second hollow shaft 4 will be described.

The head body 1 is provided with a first drive motor 16 as a first drive means and a second drive motor 17 as a second drive means with their motor shafts facing upward. The drive motors 16 and 17 transmit the driving force to the first hollow shaft 2 and the second hollow shaft 4 of the processing head 7 through harmonic drive (registered trademark, the same applies hereinafter) speed reducers 18 and 19, respectively. It is supposed to do.

On the other hand, on the inner circumference of the first hollow shaft 2, a hollow rotation transmission cylinder 20 concentric with the first hollow shaft 2 is rotatably supported via bearings 21, 21, and the lower end of the rotation transmission cylinder 20 is rotatably supported. Has a bevel gear 23 integrally inside the first rotation bracket 3. Further, in the first rotation bracket 2, a hollow connecting cylinder 24 is rotatably supported between the rotation transmitting cylinder 20 and the second hollow shaft 4 via bearings 25, 25, and both ends of the connecting cylinder 24 are supported. Has a bevel gear 26, 27 integrally, one end of the bevel gear 26 meshes with the bevel gear 23 of the rotation transmission cylinder 20, and the other end of the bevel gear 27 meshes with a bevel gear 28 formed integrally with the second hollow shaft 4. doing.

Further, toothed pulleys 29 and 30 are integrally provided at the upper ends of the first hollow shaft 2 and the rotation transmission cylinder 20, respectively.

The first drive motor 16 is fixed to the head body 1, its motor shaft is connected to the web generator 31 of the harmonic drive speed reducer 18, and the circular spline 32 is fixed to the casing of the motor 16 via the bracket 33. A shaft 34, which is integrally connected to the flexspline 34a therein, is rotatably supported via bearings 35, 35. That is, the shaft 34 is used as the output shaft. And this axis
A toothed pulley 36 facing the toothed pulley 29 of the first hollow shaft 2 is integrally provided at the upper end of the toothed pulley 34.

On the other hand, the second drive motor 17 has its casing connected to the interlocking cylinder 37.
Is integrally supported by the head main body 1 and is rotatably supported by the head body 1 via bearings 38, 38. The motor shaft of the second drive motor 17 is connected to the web generator 39 of the harmonic drive speed reducer 19, and the circular spline
Reference numeral 40 is fixed to the interlocking cylinder 37, and a shaft 41 integrally coupled with the flexspline 41a in the interlocking cylinder 37 is rotatably supported via bearings 42, 42. That is, the shaft 41 is used as an output shaft, and the toothed pulley 43 facing the toothed pulley 30 of the rotation transmission cylinder 20 is integrally provided at the upper end of the shaft 41, as shown in FIG. In this pulley with both teeth
A timing belt 44 is wound between 30 and 43 so that rotation can be transmitted.

Further, the bracket 37 is also integrally provided with a toothed pulley 45 opposed to the toothed pulleys 29, 36, and as shown in FIG. 2, a timing belt 46 is provided between these three pulleys 29, 36, 45. It is wound so that rotation can be transmitted.

The rotational speed ratio between the pulleys 29 and 45, that is, the gear ratio is set equal to the rotational speed ratio between the pulleys 30 and 43, that is, the gear ratio.

Further, detection means 47, 48 for detecting the rotation limit of a limit switch or the like are provided at the upper ends of the shafts 34, 41, respectively, to rotate the first hollow shaft 2 and the second hollow shaft 4 by a predetermined angle ( For example, it is regulated within 360 °.

[Operation of Embodiment] Next, the operation will be described.

The machining head 7 rotates the first hollow shaft 2 about the rotating first axis A and the second hollow shaft 4 about the rotating second axis B to rotate the first hollow shaft 4 around the first drive motor 16 and The second drive motor 17 independently gives rotary motion.

That is, when the first drive motor 16 is driven by a signal from the control device or the like, the harmonic drive speed reducer 18
Shaft 36 integrated with flexspline 36a under deceleration by
Is output to As a result, the rotation is transmitted to the first hollow shaft 2 via the pulley 36, the belt 46, and the pulley 29, and the first rotation bracket 3 integral with the first rotation shaft 3 is rotated about the rotation first shaft A by a predetermined amount.

At this time, if the rotation transmission cylinder 20 is stopped, the rotation movement of the first rotation bracket 3 causes the connection cylinder 24 to revolve with respect to the rotation transmission cylinder 20 through the gears 23 and 26.
24 rotates, and thereby the second hollow shaft 4 rotates via the gears 27 and 28, and the second rotation bracket 5 integrated with this also rotates about the second rotation shaft B.

In order to prevent such a phenomenon of co-rotation, the pulley 45 is rotated together with the pulley 29 from the pulley 36 via the belt 46, and the rotation is transmitted to the interlocking cylinder 37. As a result, the casing of the motor 17 integrated with the interlocking cylinder 37 is rotated. Due to the rotation of the motor 17 itself, the flex spline 41a sandwiched between the fixed web generator 39 and the circular spline 40 is also integrally rotated, and the pulley 30 is rotated from the pulley 43 of the shaft 41 via the belt 44 to transmit the rotation. The rotation is transmitted to the cylinder 20. In this case, the gear ratio is the pulley 29, 45, 43,
From the relationship of the tooth number ratio of 30, the first hollow shaft 2 and the rotation transmitting cylinder 20 are configured to rotate at a constant speed in the same direction and the same angle, that is, the same phase.

That is, the motor 17 itself is decelerated and rotated at a predetermined ratio based on the tooth number ratio of the pulleys 29 and 45 with respect to the first hollow shaft 2, and the rotation transmission cylinder is further decelerated by the tooth number ratio of the pulleys 43 and 30. 20 is increased. Therefore, the constant speed rotations of the same phase are transmitted to the pulleys 29 and 30.

In this way, even if the first rotating bracket 3 rotates, the connecting cylinder 24 and the second hollow shaft 4 do not rotate accordingly, and therefore the second rotating bracket 5 does not rotate.

On the other hand, when the second drive motor 17 is driven by a signal from the control device or the like, it is output to the shaft 41 integrated with the flexspline 41a under the deceleration by the harmonic drive speed reducer 19. Then, the pulley 30 is rotated from the pulley 43 via the belt 44, and the rotation is transmitted to the rotation transmission cylinder 20.
As a result, the connecting cylinder 24 is rotated via the gears 23 and 26,
Further, the second main shaft 4 is rotated via the gears 27, 28, and the second rotary bracket 5 is rotated by a predetermined amount about the rotary second shaft B integrated with the second hollow shaft 4.

In this manner, the first drive motor 16 rotationally drives the first hollow shaft 2 and the second drive motor 17 rotationally drives the second hollow shaft 4 independently.

Here, if the rotation limit of the first hollow shaft 2 is set to about 360 °, the casing of the motor 17 rotated via the pulley 45 is decelerated by this, for example, within about 1/2 rotation. Since it can be stopped at the end, there is no need to worry about wrapping the cord.

In the present embodiment, the harmonic reducer is used for each drive means, but the present invention is not limited to this, and other reducer means may be used, and the rotation transmitting means may be respectively provided for the motor shaft or the shaft interlocked therewith. May be provided.

The rotation transmitting means is not limited to the toothed pulley and the timing belt, but may be a gear coupling.

Second Embodiment Next, another embodiment will be described with reference to FIG.

Since each structure of the head body 1, the first hollow shaft 2, the first rotating bracket 3, the second hollow shaft 4, the second rotating bracket 5, the lens holder 6 and their connecting structure are all the same as those in the first embodiment. The same reference numerals are given to the drawings and the description thereof will be omitted.

 The drive structure will be described below.

A first drive motor 56 as a first drive means and a second drive motor 57 as a second drive means are attached to the head body 1 with their motor shafts horizontal.

The driving force of the first drive motor 56 is transmitted to the first hollow shaft 2 by the engagement of a worm gear 58 provided on the motor shaft and a worm wheel 59 integrally provided on the first hollow shaft 2. There is.

The first hollow shaft 2 is integrally provided with a downward first bevel gear 60 which is concentric with the worm wheel 59.

Further, below the bevel gear 60, the first rotary cylinder 61 and the second rotary cylinder 61 are concentrically provided outside the first hollow shaft 2.
A rotary cylinder 62 and a third rotary cylinder 63 as a rotation transmission cylinder are rotatably supported by the head body 1 via bearings 64, 65, 66.

The driving force of the second drive motor 57 is transmitted to the first rotary cylinder 61 by the engagement of a worm gear 67 provided on the motor shaft and a worm wheel 68 integrally provided on the first rotary cylinder 61. .

Further, a planetary gear 69 is rotatably supported on a radial shaft 61a provided on the first rotary cylinder 61, and the planetary gear 69 is meshed with the first bevel gear 60. There is. The second rotating cylinder 62 includes a second upward bevel gear 70.
On the opposite side, a downward third bevel gear 71 is integrally provided. The second bevel gear 70 is the planetary gear.
It is meshed with 69.

Further, the third rotating cylinder 63 is integrally provided with a fifth bevel gear 73 connected to the third bevel gear 71 via a fourth bevel gear 72 as a planet gear, and the number of teeth of the fifth bevel gear 73 is the above. The number of teeth of the first bevel gear 60 is made equal.

The fourth bevel gear 72 is rotatably supported by a support shaft 74 fixed to the head main body 1 in the radial direction of the first main shaft 2. The differential gear mechanism 84 is configured as described above.

Further, a sixth bevel gear is provided on the outer periphery of the lower end of the third rotary cylinder 63.
75 are provided integrally.

On the other hand, a connecting shaft 78 is rotatably supported by a bracket 76 integrally provided outside the first rotating bracket 2 via bearings 79 and 80. At the upper end of the connecting shaft 78, the sixth
A seventh bevel gear 81 that meshes with the bevel gear 75 is integrally provided, and a worm gear 82 is integrally provided at the lower end. The worm gear 82 faces the inside of the first rotary bracket 2 through an opening (not shown) formed on one side surface of the first rotary bracket 2 and meshes with a worm wheel 83 integrally formed with the second hollow shaft 4. .

With the above configuration, when the first drive motor 56 is driven, the first drive motor 56 is driven through the worm gear 58 and the worm wheel 59.
The rotation is transmitted to the hollow shaft 2, and the first rotating bracket 3 integrated with the hollow shaft 2 is rotationally driven about the rotating first shaft A.
At the same time, the first bevel gear 60 integrated with the first hollow shaft 2
The planetary gear 69 provided on the first rotary cylinder 61 is rotated about the shaft 61a, and the second rotary cylinder 62 is rotated from the planetary gear 69 via the second bevel gear 70 about the first main shaft A. The second bevel gear 72 is rotated in the opposite direction to the second bevel gear 72, and the fourth bevel gear 72 is rotated about the shaft 74 via the third bevel gear 71. The rotary cylinder 63 is rotated about the first axis of rotation A in the same direction as the first spindle 2 at the same angle, that is, in the same phase.

Therefore, even if the first hollow shaft 2 rotates, at the same time, the third rotary cylinder 63 also rotates in the same phase, so there is no relative rotation between the two, and thus even if the first rotary bracket 3 rotates. As a result, the connecting shaft 78 and the second hollow shaft 4 do not rotate, and the second rotating bracket 5 does not rotate.

On the other hand, when the second drive motor 57 is driven, the worm gear
The first rotary cylinder 61 is rotated via the worm wheel 68 and the worm wheel 68. As a result, the planet gear 69 revolves around the first hollow shaft 2 and rotates around the first bevel gear 60.

The second bevel gear is generated by the rotation and revolution of the planet gear 69.
The second rotary cylinder 62 is rotated in the same direction as the first rotary cylinder 61 via 70, and the fourth bevel gear 72 is rotated about the shaft 74 via the third bevel gear 71, whereby the fifth bevel gear 73 is rotated. The third rotary cylinder 63 is rotated in the opposite direction to the second rotary cylinder 62 via the rotary shaft. As a result, the connecting shaft 78 is rotated via the sixth bevel gear 75 and the seventh bevel gear 81, and the second hollow shaft 4 is rotated via the worm gear 82 at its tip and the worm wheel 83 of the second hollow shaft 4. The second rotation bracket 5 is rotated around the rotation second axis B that is integral with the second hollow shaft 4.

In this manner, the first drive motor 56 rotates the first hollow shaft 2 and the second drive motor 57 rotates the second hollow shaft 4 independently.

[Effects of the Invention] According to the present invention, the first hollow shaft and the second hollow shaft that are the respective rotation shafts of the first rotation bracket and the second rotation bracket rotatably supported by the first rotation bracket are respectively provided. By providing the first driving means and the second driving means for driving on the main body of the head on the base side, for example, the wiring of the drive motor may be hung between the fixed side and the rotating section at the tip. In addition, there is no fear that the cord will be twisted or wound around the work due to the rotation of the rotating body, and the work can be smoothly operated, and the head can be operated smoothly and the appearance can be neat.

Further, a rotation transmission cylinder is rotatably provided concentrically with the first hollow shaft, and the second hollow shaft is rotated via the rotation transmission cylinder. Further, the rotation driving force of the first driving means is transmitted to the rotation. Since it is also transmitted to the cylinder and the rotation transmission cylinder is rotated at the same phase as the first hollow shaft at the same time as the rotation of the first hollow shaft,
Relative rotation between the first rotating bracket and the second hollow shaft due to the rotation of the first hollow shaft is prevented, and thus the second hollow shaft can also be independently rotated by the second drive means, so that the control of the two rotating shafts is possible. Can be easily performed without using complicated correction means.

Moreover, the rotational speed ratio between the first hollow shaft and the casing of the second drive motor and the rotational speed ratio between the output shaft of the second drive motor and the rotation transmission cylinder are set to be equal to each other.
Since the rotation of the second hollow shaft due to the rotation of the first hollow shaft by the drive motor is transmitted in a direction that cancels out the co-rotation of the second hollow shaft, a complicated compensating circuit that matches the acceleration and deceleration characteristics of both drives with the transmission system or the control system. It is easy to manufacture without requiring.

Therefore, even if, for example, a harmonic drive reducer is used as the decelerating means from the motor, the first drive motor to the first drive motor can be used regardless of the difference in the output form of the two reducers, the rotation speed of the motor, the reduction ratio, and the like. The hollow shaft and the rotation transmission cylinder can be imparted with rotational movements in the same phase. Further, since the structure of rotation transmission is extremely simple and the number of gears can be minimized, the transmission error due to backlash between the gears can be reduced.

On the other hand, by using a differential gear mechanism on the outer circumference of the first hollow shaft, for example, a plurality of rotating cylinders are arranged in series, and a bevel gear is integrally formed on the first hollow shaft rotated by the first drive means. Then, the bevel gear transmits the rotation to the planet gear, the second rotation barrel, the planet gear, and the rotation transmission barrel provided on the first rotation barrel, and the second hollow shaft is rotated from the rotation transmission barrel via the rotation transmission means. By doing so, since the relative rotation between the first hollow shaft and the rotation transmission cylinder due to the rotation of the first hollow shaft is eliminated,
The second hollow shaft does not rotate the second hollow shaft without rotating the second hollow shaft.
By the drive means, it is possible to independently drive the rotation through the second rotary cylinder, the planetary gear, the rotation transmission cylinder, and the rotation transmission means.

Thus, the rotation of the two rotating shafts can be reliably and smoothly performed without complicated control by the simple differential gear mechanism.

Further, due to the structure of the first hollow shaft and the second hollow shaft that requires a space for passing the laser light inside, a plurality of gears can be compactly housed on the outer circumference of each shaft, so the head part is also clean. In addition, the head body becomes compact without increasing in size. Especially, in the one-point-oriented processing head, since the respective control signals for the respective rotary axes become the rotation angle signals as they are, the complicated calculation processing time in the control system is not required, and therefore, the high-speed driving is applied. It is possible to always control the proper nozzle posture while maintaining the irradiation position according to the program, thus enabling highly accurate laser processing.

[Brief description of the drawings]

FIG. 1 is a sectional view of a head portion showing an embodiment of a laser processing head of the present invention, FIG. 2 is a plan view of the same rotation transmitting portion, and FIG. 3 is a sectional view of a head portion showing another embodiment. is there. 1 ... Head body, 2 ... First hollow shaft, 3 ... First rotating bracket, 4 ... Second hollow shaft, 5 ... Second rotating bracket, 7 ... Processing head, 16 ... First drive A first drive motor as a means, 17 ... A second drive motor as a second drive means, 20 ... A rotation transmission cylinder, 34, 41 ... A shaft as an output shaft, 56 ... A first drive means 1 drive motor, 57 ...
... second drive motor as second drive means, 60 ... first bevel gear, 61 ... first rotary cylinder, 61a ... shaft, 62 ... second
Rotating cylinder, 63 ... 3rd rotating cylinder as rotation transmission cylinder, 69 ...
Planetary gear, 70 ... Second bevel gear, 71 ... Third bevel gear, 72 ... Fourth bevel gear as planetary gear, 73 ... Fifth bevel gear, 74 ... Fifth bevel gear, 84 ... Differential gear mechanism.

Claims (3)

(57) [Claims] 1. A head main body with a first hollow shaft interposed therebetween.
A first rotating bracket integral with the hollow shaft is rotatably supported, and a second rotating bracket integral with the second hollow shaft is rotatably supported by the first rotating bracket via a second hollow shaft. In a laser processing head in which a lens holder is supported at the tip of a second rotation bracket, a first drive means for rotationally driving the first hollow shaft is attached to the head main body, and a second hollow shaft is rotationally driven. The casing of the drive means is rotatably attached to the head body, and the output shaft of the first drive means, the first hollow shaft, and the casing of the second drive means are rotatably connected to each other, and are connected to the second hollow shaft. A rotation transmission cylinder connected so as to be capable of transmitting rotation is rotatably supported on the head main body concentrically with the first hollow shaft, and the rotation transmission cylinder and the output shaft of the second drive means are slidable with each other. And a rotational speed ratio between the first hollow shaft and the casing of the second drive means and a rotational speed ratio between the transmission cylinder and the output shaft of the second drive means. A laser processing head characterized by equalization. 2. The head body is provided with a first hollow shaft through the first hollow shaft.
A first rotating bracket integral with the hollow shaft is rotatably supported, and a second rotating bracket integral with the second hollow shaft is rotatably supported by the first rotating bracket via a second hollow shaft. In a laser processing head in which a lens holder is supported at the tip of a second rotation bracket, a first driving means for rotationally driving the first hollow shaft and a second driving means for rotationally driving the second hollow shaft are respectively provided in the head. Attached to the main body, a rotation transmission cylinder is rotatably supported on the head body concentrically with the first hollow shaft, and rotation is transmitted from the second drive means to the second hollow shaft via the rotation transmission cylinder. In addition, the laser driving force of the first driving means is also transmitted to the rotation transmission cylinder via the differential gear mechanism in the same phase as the first hollow shaft. Head. 3. A differential gear mechanism is provided outside the first hollow shaft in parallel with the rotation transmission cylinder to rotate the first rotary cylinder and the second rotary cylinder concentrically with the first hollow shaft to the head body. The first rotary cylinder is rotatably supported and is rotatably coupled to the second drive means. The first bevel gear is integrally provided on the outer circumference of the first hollow shaft, and the radial shaft provided on the first rotary cylinder. Rotatably supporting a planetary gear meshing with the first bevel gear, and further integrally providing a second bevel gear meshing with the planetary gear on one surface side of the second rotating cylinder and on the other surface side of the first rotating cylinder. , A third bevel gear is integrally provided, and a fifth bevel gear that is meshed with the third bevel gear via a fourth bevel gear is integrally provided on one surface side of the rotation transmission cylinder,
Further, the fifth bevel gear has the same number of teeth as the first bevel gear, and further the fourth bevel gear is rotatably supported on the radial support shaft of the first hollow shaft fixed to the head body. The laser processing head according to claim 2, which is characterized in that.