JP2524061Y2 - Piezoelectric element displacement mechanical amplification mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric element displacement mechanical amplification mechanism.

[Conventional technology]

FIG. 5 is a perspective view showing a conventional example of this type of mechanical amplification mechanism.

This mechanical amplifying mechanism transmits the displacement of the piezoelectric element 11 via the second hinges 12a and 12b to enlarge the two lever arms 1
3a, 13b, a mounting board 14, first hinges 15a, 15b connecting the lever arms 13a, 13b and the mounting board 14, and beams as displacement amplification means connected to be sandwiched between the lever arms 13a, 13b. It consists of 16 and.

In the mechanical amplification mechanism configured as described above, when a voltage is applied to the piezoelectric element 11, the displacement of the piezoelectric element 11 is transmitted to the lever arms 13a and 13b via the second hinges 12a and 12b, respectively, and the lever arms 13a and 13b are moved. The displacement transmitted to the lever arm 13b is applied to the first hinges 15a and 15b as a fulcrum according to the principle of leverage.
It is enlarged at the tip of a, 13b.

However, the beam 16 held by the lever arms 13a and 13b
The axial displacement is transmitted to both ends of the beam 16, and a maximum displacement 17 is generated at the center of the beam 16 by the well-known buckling theory.

Thereafter, when the applied voltage is set to zero volt, the displacement of the piezoelectric element 11 returns, and the displacement of the beam 16 also returns at the same time.

[Problems to be solved by the invention]

The above-described conventional piezoelectric element displacement mechanical amplification mechanism has only one beam as the displacement amplification means, so that only one output can be obtained from one mechanical amplification mechanism. The mechanical amplifying mechanism is combined by the number of the outputs, so that the mechanical amplifying mechanism not only has a large shape but also has a disadvantage of increasing the cost.

An object of the present invention is to provide a piezoelectric element displacement mechanical amplifying mechanism capable of obtaining a plurality of outputs.

[Means for solving the problem]

The piezoelectric element displacement mechanical amplifying mechanism of the present invention comprises a mounting substrate, and two intermediate portions connected on both sides of the mounting substrate by a first hinge and a piezoelectric element connected to one end by a second hinge. A lever arm, connected to the other ends of the two lever arms, including a beam as displacement amplification means,
A plurality of beams are provided in a piezoelectric element displacement mechanical amplification mechanism that enlarges and transmits a displacement of a piezoelectric element by the lever arm and amplifies and outputs the center of the beam in a direction perpendicular to the axial direction of the beam. In particular, a piezoelectric displacement mechanical amplification mechanism is characterized in that at least two beams are connected to the lever arm so as to be displaced in directions perpendicular to each other in a plane perpendicular to the displacement direction axis of the piezoelectric element. Can be

[Action]

Since multiple beams are provided as displacement amplification means,
A plurality of outputs can be obtained from one piezoelectric element displacement mechanical amplification mechanism.

〔Example〕

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a first embodiment of the present invention.

Both ends of the piezoelectric element 1 are connected to the flat end faces of the narrow, T-shaped second hinges 2a and 2b as means for transmitting the displacement of the piezoelectric element 1 with an adhesive such as epoxy resin. Second
The hinges 2a, 2b are connected to lever arms 5a, 5b, and each lever arm 5a, 5b is connected to a thin and narrow first hinge 4a, 4b corresponding to a fulcrum of a lever as a displacement transmitting means. The first hinges 4a, 4b are connected to both side surfaces of the mounting board 3. A metal fitting provided with an amplification mechanism including the first hinges 4a, 4b, the second hinges 2a, 2b, the mounting board 3, and the lever arms 5a, 5b is integrally formed using a highly rigid material such as SUS304, 42Ni-Fe. It is manufactured with a structure. Lever arm 5
At the tips of a and 5b, two beams 6 manufactured by pressing and bending a metal material having a spring property are connected by a mechanical element for fastening a rivet 7 so as to sandwich the lever arms 5a and 5b. .

In the piezoelectric element displacement mechanical amplification mechanism configured as described above, when a voltage is applied to the piezoelectric element 1, the displacement of the piezoelectric element 1 is changed via the second hinges 2a and 2b to the lever arms 5a and 5b, respectively.
The displacement transmitted to the lever arms 5a and 5b is enlarged at the distal ends of the lever arms 5a and 5b by the lever principle with the first hinges 4a and 4b as fulcrums.

However, axial displacement is transmitted to both ends of the two beams 6 sandwiched by the lever arms 5a and 5b, and a maximum displacement 8 occurs at the center of the beams 6 according to a well-known buckling theory.

In this embodiment, two outputs are obtained from one set of the piezoelectric element displacement mechanical amplification mechanism, and the direction of the output is the same as the thickness direction of the piezoelectric element displacement mechanical amplification mechanism.

Specifically, the modulus of longitudinal elasticity is 14.8 × 10 ³ kg / mm ²
A 2Ni-Fe material having a thickness of 4 mm was fabricated by wire cut electric discharge machining with a metal fitting having an amplifying mechanism with an outer diameter of 35 mm x 30 mm. In addition, conventionally known lead zirconate titanate (PZT)
When a voltage of 150 V DC is applied to the piezoelectric element 1 in the piezoelectric element displacement mechanical amplification mechanism in which the piezoelectric element 1 in which the ceramics are laminated and the two beams 6 made of SUS304 are attached, the piezoelectric element 1 is generated at both ends of the piezoelectric element 1. 9 μm displacement
Enlarged through this mechanical amplification mechanism, a maximum displacement 8 of 0.20 mm was obtained at the center of each beam 6. And 150V, 300
When a rectangular wave voltage of Hz was applied to the piezoelectric element 1, a dynamic life of 10 ⁸ times or more was obtained.

Also, if the same effect is to be obtained with a conventional mechanical amplification mechanism having only one output, two sets of piezoelectric element displacement mechanical amplification mechanisms will be combined in parallel, and the shape will be 8 mm thick and 35 mm outside In contrast to the case of × 30 mm, this example fits in the shape of 4 mm in thickness and 35 mm × 30 mm in outer shape, and the space required for the piezoelectric element displacement mechanical amplification mechanism is halved. And the cost is almost one set of the conventional piezoelectric element displacement mechanical amplification mechanism.

FIG. 2 (a) is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a second embodiment of the present invention, and FIG. 2 (b) is FIG. 2 (a).
It is an expanded sectional view of the crimping part of the AA cross section of FIG.

In this embodiment, a metal fitting provided with an amplification mechanism including the first hinges 4a and 4b, the second hinges 2a and 2b, the mounting board 3 and the lever arms 5a and 5b is previously thin metal plate 9 made of a highly rigid metal material. When press stamping (0.15 to 0.5 mm thick), a part of an arbitrary shape is partially cut out or the whole circumference is half cut out at a necessary portion of the mounting substrate 3 and the lever arms 5a and 5b, and a square caulking is performed. It has a layered structure in which the portions 10 are formed, one by one, sandwiched one by one, and tightly laminated by the frictional force of the cut surface 9a of the projection 10a of the caulking portion 10.

At the tips of the lever arms 5a and 5b, two beams 6 made by press-punching and bending a metal material having a spring property as in the first embodiment are riveted so as to sandwich the lever arms 5a and 5b. 7 are connected by a fastening mechanical element. The operation is the same as in the first embodiment.

In the piezoelectric element displacement mechanical amplifying mechanism of the second embodiment, when a 42Ni-Fe material having a longitudinal elastic modulus of 14.8 × 10 ⁸ kg / mm ^{2 and} a thickness of 0.4 mm is press-punched, the mounting substrate 3 and the lever arm are used. The caulking portions 10 were formed in three places and two places by half-cutting the entire circumference of the square on 5a and 5b, respectively, and ten pieces were laminated to produce a metal fitting with an amplification mechanism of 4 mm thick and 35 mm x 30 mm in outer size. When a voltage of 150 V DC is applied to the piezoelectric element 1 in a mechanical amplifying mechanism in which two sets of the piezoelectric element 1 having a laminated structure and the beam 6 made of SUS304 material are attached similarly to the first embodiment, A maximum displacement 8 of 0.20 mm was obtained at the center. Then, 150 V, 300 Hz, 10 ⁸ times or more dynamic life of applying a voltage of the rectangular wave was obtained.

In addition, the manufacturing cost was reduced to 1/10 or less of the metal fitting provided with the amplifying mechanism having the same effect manufactured by the wire cut electric discharge machining means of the first embodiment.

FIG. 3 is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a third embodiment of the present invention.

In this embodiment, the two beams 6 are connected to the lever arms 5a, 5b by a mechanical element for fastening the rivets 7 while changing the direction by 90 degrees (degrees).

In this embodiment, two outputs are obtained from one set of mechanical amplifying mechanisms, and the output direction is the same as the axial direction of the lever arms 5a and 5b. 1, the same as the second embodiment.

In the piezoelectric element displacement mechanical amplifying mechanism of the third embodiment, a layer thickness of 4 m using 42Ni-Fe material was used similarly to the second embodiment.
m, metal fittings with an amplifying mechanism of 35 mm x 30 mm
To this, two piezoelectric elements 1 having a laminated structure and two beams 6 made of SUS304 material were attached.

In this piezoelectric element displacement mechanical amplification mechanism, when a voltage of DC 150 V is applied to the piezoelectric element 1, the center of each beam 6 becomes 0.4 m
A maximum displacement of 8 m was obtained, and a dynamic life of 10 ⁸ times or more was obtained when a voltage of 150 V, 300 Hz, and rectangular wave was applied.

FIG. 4 (a) is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a fourth embodiment of the present invention, and FIG. 4 (b) is FIG. 4 (a).
It is a top view showing arrangement of beam 6 of an example.

In the piezoelectric element displacement mechanical amplification mechanism of the present embodiment, another beam 6a is provided in the piezoelectric element displacement mechanical amplification mechanism of the second embodiment, and the direction of the maximum displacement 8a generated at the center of the beam 6a is the lever arm. It is aligned with the axial direction of 5a and 5b.

The piezoelectric element displacement mechanical amplifying mechanism of this embodiment has the same laminated structure as the second and third embodiments, and operates in the same manner as the first to third embodiments.

In the piezoelectric element displacement mechanical amplifying mechanism of the fourth embodiment, similarly to the second and third embodiments, a metal fitting provided with an amplifying mechanism having a laminated thickness of 4 mm and an outer diameter of 35 mm × 30 mm using 42Ni—Fe material is used. A piezoelectric element 1 having a laminated structure and two beams 6 made of SUS304 material and one beam 6a were attached thereto.

In this piezoelectric element displacement mechanical amplifying mechanism, when a voltage of DC 150 V is applied to the piezoelectric element 1, the center of each beam 6 is set at 0.
A maximum displacement 8 of 16 mm and a maximum displacement 8a of 0.19 mm were obtained at the center of the other beam 6a, and a dynamic life of 10 ⁸ or more was obtained when a rectangular wave voltage of 150 V, 200 Hz was applied.

In order to obtain the same effect with the conventional piezoelectric element displacement mechanical amplification mechanism that has only one output, three sets of piezoelectric element displacement mechanical amplification mechanisms are combined in parallel, the shape is 12 mm thick and the outer shape In contrast to 35 mm x 30 mm, this embodiment fits in the shape of 4 mm in thickness and 35 mm x 30 mm in outer shape, the space required for the piezoelectric element displacement mechanical amplification mechanism is reduced to 1/3, and the cost is It is almost one set of element displacement mechanical amplification mechanism.

[Effect of the invention]

As described above, in the present invention, by providing a plurality of beams as displacement amplifying means, a plurality of outputs can be obtained from a set of piezoelectric element displacement mechanical amplifying mechanisms.
In order to obtain multiple outputs, the conventional piezoelectric element displacement mechanical amplifying mechanism combines the number of piezoelectric element displacement mechanical amplifying mechanisms to increase the size and eliminate the drawback of increasing the cost. There is an effect that the size of the mechanism can be reduced to one set, and the cost can be reduced to almost one set.

[Brief description of the drawings]

FIG. 1 is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a first embodiment of the present invention, and FIG. 2 (a) is a piezoelectric element displacement mechanical amplifying mechanism showing a second embodiment of the present invention. Perspective view, second
FIG. 2 (b) is an enlarged sectional view of a swaged portion taken along the line AA in FIG. 2 (a), FIG. 3 is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a third embodiment of the present invention, FIG. FIG. 4 (a) is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a fourth embodiment of the present invention, and FIG. 4 (b) shows the arrangement of beams 6 in the embodiment of FIG. 4 (a). FIG. 5 is a plan view and FIG. 5 is a perspective view showing an example of a conventional piezoelectric element displacement mechanical amplification mechanism. 1,11 ... piezoelectric element, 2a, 2b, 12a, 12b ... second hinge, 3,1
4 mounting board, 4a, 4b, 15a, 15bd first hinge, 5a, 5
b, 13a, 13b ... lever arm, 6, 6a, 16 ... beam, 7 ... rivet, 8, 8a, 17 ... maximum displacement, 9 ... thin metal plate, 9a
... cut surface, 10 ... caulked portion, 10a ... projection.

Claims (1)

(57) [Scope of request for utility model registration] An intermediate portion is connected to both sides of the mounting substrate by a first hinge, and a piezoelectric element is provided at one end of the mounting substrate.
And two beams connected to the other ends of the two lever arms and serving as displacement amplifying means, and the displacement of the piezoelectric element is enlarged and transmitted by the lever arms. In a piezoelectric element displacement mechanical amplification mechanism that amplifies and outputs a beam in a direction perpendicular to the axial direction of the beam, a plurality of the beams are provided, and at least two beams are in a plane orthogonal to a displacement direction axis of the piezoelectric element. A piezoelectric displacement mechanical amplifying mechanism connected to the lever arm so as to be displaced in directions perpendicular to each other.