JP2520950Y2 - Objective lens for two-beam interference - Google Patents
Objective lens for two-beam interferenceInfo
- Publication number
- JP2520950Y2 JP2520950Y2 JP1988032326U JP3232688U JP2520950Y2 JP 2520950 Y2 JP2520950 Y2 JP 2520950Y2 JP 1988032326 U JP1988032326 U JP 1988032326U JP 3232688 U JP3232688 U JP 3232688U JP 2520950 Y2 JP2520950 Y2 JP 2520950Y2
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- reference mirror
- optical path
- shaft
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Testing Of Optical Devices Or Fibers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、例えば顕微鏡に取り付けて使用する、二光
束干渉用対物レンズ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an objective lens device for two-beam interference, which is used by being attached to a microscope, for example.
従来、対物レンズと、該対物レンズ前方に配設した光
路分割部材と、該光路分割部材の一方の分割光路中に配
設された参照ミラーと、該参照ミラーの反射光と前記光
路分割部材による他方の分割光路中に配設された標本か
らの反射光とから生ずる干渉縞の間隔、方向を調整する
ために前記参照ミラーを傾角する装置とを有する二光束
干渉用対物レンズ装置が知られている。Conventionally, an objective lens, an optical path splitting member arranged in front of the objective lens, a reference mirror arranged in one split optical path of the optical path splitting member, reflected light from the reference mirror and the optical path splitting member An objective lens device for two-beam interference is known which has a device for tilting the reference mirror in order to adjust the interval and direction of interference fringes generated from reflected light from a sample arranged in the other split optical path. There is.
従来のこの種の対物レンズ装置の傾角装置は、干渉縞
の幅、方向を調整するため参照ミラーを傾角させる調整
つまみ２個と、参照ミラーを標本面と共役の位置に移動
させるための調整つまみ１個を有していた。A conventional tilting device for an objective lens device of this type includes two adjusting knobs for tilting a reference mirror to adjust the width and direction of interference fringes, and an adjusting knob for moving the reference mirror to a position conjugate with the sample surface. Had one.
また、観察装置本体への取付用部材としての対物ねじ
部と干渉縞調整のための傾角装置の操作部が対物レンズ
光軸を中心とする回転方向に対して固定であった。In addition, the objective screw portion as a member for attaching to the observation apparatus main body and the operation portion of the tilting device for adjusting the interference fringes are fixed with respect to the rotation direction about the optical axis of the objective lens.
従来の技術は標本に対して像のピントを合わせたあと
参照ミラーを標本と共役の位置にするために調整つまみ
を操作して干渉縞を出現させ、干渉縞の幅、方向を調整
するため別の２個の調整つまみを操作していた。ところ
が、前記の干渉縞の幅、方向を調整している最中に視野
内から視野外へ干渉縞が移動してしまう傾向があり、再
び参照ミラーを標本と共役な位置まで移動して、視野内
に干渉縞を戻し、もう一度干渉縞の幅、方向を調整する
という操作を数回繰り返す必要があり、操作性に問題が
あった。In the conventional technology, after adjusting the image to the sample, the adjustment knob is operated to bring the interference fringes in order to bring the reference mirror into the conjugate position with the sample. I was operating the two adjustment knobs. However, there is a tendency that the interference fringes move from the inside of the field of view to the outside of the field of view while adjusting the width and direction of the interference fringes, and the reference mirror is moved again to a position conjugate with the sample, It was necessary to return the interference fringes to the inside and adjust the width and the direction of the interference fringes once again, which was a problem in operability.
また、干渉縞調整の操作部が回転しないため、観察者
に対して操作部が対物レンズ光軸を中心にしていかなる
方向を向くかが対物ねじのオス、メスの関係により決ま
ってしまうため、操作性が悪かった。In addition, since the operation part for adjusting the interference fringes does not rotate, the direction in which the operation part faces the observer with respect to the optical axis of the objective lens is determined by the relationship between the male and female objective screws. I didn't like it.
そこで本考案は干渉縞の幅、間隔を調整した場合に、
干渉縞が視野からはずれずに、視野の中央部を中心とし
て変化する、操作性の良い二光束干渉用対物レンズ装置
を得ることを目的とする。Therefore, when the width and interval of the interference fringes are adjusted, the present invention
It is an object of the present invention to obtain an objective lens device for two-beam interference which has good operability, in which the interference fringe does not deviate from the visual field and changes around the central portion of the visual field.
第１図は本考案の干渉対物レンズ装置の原理を説明す
るための光学系の要部であり、対物レンズ１の上側ある
いは光路分割プリズム２の左側からの照明光が光路分割
プリズム２により標本３と参照ミラー４に分割されて照
射され、それぞれにおいて反射した光がプリズム２によ
り重ね合せられて干渉し、対物レンズ１を通り、観察装
置本体に導かれる。このとき、対物レンズ１の光軸上
で、プリズム２と標本３との距離d1、プリズム２と参照
ミラー４との距離d2がd1＝d2であるときに０次の干渉縞
が発生し、d1とd2の差がλ/2、λ、3/2λ…とλ/2ずつ
増すに従がって、１次、２次、３次…の干渉縞が発生す
る。なお、λは照明光の波長を示す。FIG. 1 is a main part of an optical system for explaining the principle of the interference objective lens device of the present invention. Illumination light from the upper side of the objective lens 1 or the left side of the optical path splitting prism 2 is sampled by the optical path splitting prism 2. The light reflected by the reference mirror 4 and the reference mirror 4 are irradiated, and the lights reflected by the reference mirror 4 are superposed by the prism 2 and interfere with each other, and are guided to the observation apparatus main body through the objective lens 1. At this time, on the optical axis of the objective lens 1, the zero-order interference fringe when the distance d 1 between the prism 2 and the specimen 3, the distance d 2 between the prism 2 and the reference mirror 4 is d 1 = d 2 As the difference between d 1 and d 2 increases by λ / 2, λ, 3/2 λ ... and λ / 2, first-order, second-order, third-order interference fringes occur. Note that λ indicates the wavelength of the illumination light.
本考案では前記問題点を解決するため、対物レンズ
（１）と、該対物レンズと標本との間に配設した光路分
割部材（２）と、該光路分割部材の一方の分割光路中に
配設された参照ミラー（４）と、該参照ミラーの反射光
と光路分割部材による他方の分割光路中に配設された標
本からの反射光とから生ずる干渉縞の間隔、方向を調整
するために参照ミラー（４）を傾角する装置とを有する
二光束干渉用対物レンズ装置において、傾角装置は、参
照ミラー（４）を保持する保持部材（14）と、保持部材
（14）に一端が固設され一方の分割光路の光軸に平行な
方向に延びた軸（15）と、軸（15）が貫通する貫通孔を
有し参照ミラー表面の対物レンズの光軸との交点（Ａ）
を対物レンズの合焦位置に一致するように保持部材を支
持する支持部材（16）と、軸の他端（15′）を軸の長手
方向に垂直な任意の方向に移動させる調整部材（19a、1
9b、20）とを有し、調整部材によって軸の他端を移動さ
せたときに交点（Ａ）を中心として参照ミラー（４）が
回転するために、保持部材（14）と支持部材（16）との
間に、交点（Ａ）を中心とした回転案内面を形成した。In order to solve the above problems, the present invention provides an objective lens (1), an optical path splitting member (2) disposed between the objective lens and a specimen, and an optical path splitting member disposed in one split optical path of the optical path splitting member. In order to adjust the interval and direction of interference fringes generated by the reference mirror (4) provided and the reflected light of the reference mirror and the reflected light from the sample arranged in the other split optical path by the optical path splitting member. In a two-beam interference objective lens device having a device for tilting a reference mirror (4), the tilting device includes a holding member (14) for holding the reference mirror (4) and one end fixed to the holding member (14). An intersection (A) between the axis (15) extending in a direction parallel to the optical axis of one of the divided optical paths and the optical axis of the objective lens on the reference mirror surface having a through hole through which the axis (15) passes.
A supporting member (16) for supporting the holding member so as to match the focusing position of the objective lens, and an adjusting member (19a) for moving the other end (15 ') of the shaft in an arbitrary direction perpendicular to the longitudinal direction of the shaft. , 1
9b, 20), the reference member (4) rotates about the intersection (A) when the other end of the shaft is moved by the adjusting member, so that the holding member (14) and the supporting member (16) ) And a rotation guide surface centered on the intersection (A).
上記の如き構成によって、参照ミラー４を傾角させて
も参照ミラー面上の所定位置（点Ａ）は常に光路分割プ
リズム２から所定距離d2の位置にあるので、所定位置が
対物レンズの光軸上にあれば、視野の中央を通る干渉縞
は、参照ミラー４を傾角させても、視野の中央を通った
状態で方向と他の縞との間隔を変化させるようになる。
よってd1＝d2の関係になるように参照ミラーの位置を設
定し、参照ミラー４を所定位置を中心に傾角するように
しておくと、従来の参照ミラー４を光軸方向に調整する
操作は不要になり、常に０次の干渉縞が視野中央を通る
ようにすることができる。With the above configuration, even if the reference mirror 4 is tilted, the predetermined position (point A) on the reference mirror surface is always at the predetermined distance d 2 from the optical path splitting prism 2, so that the predetermined position is the optical axis of the objective lens. If it is above, the interference fringes passing through the center of the visual field will change the spacing between the direction and other fringes while passing through the center of the visual field even if the reference mirror 4 is tilted.
Therefore, if the position of the reference mirror is set so that d 1 = d 2 and the reference mirror 4 is tilted about a predetermined position, an operation for adjusting the conventional reference mirror 4 in the optical axis direction is performed. Is unnecessary, and the 0th-order interference fringes can always pass through the center of the visual field.
第２図および第２図のＡ−Ａ矢視断面図である第３図
は、本考案の実施例である。不図示の顕微鏡レボルバー
にねじ込まれる対物ねじを有し、内部に対物レンズ１を
保持する外筒11はプリズム保持部材12と嵌合し回転可能
であり、さらに軸方向への制限を互いに有する。また弾
性を有するリング13はプリズム保持部材12の回転トル
ク出し、および光路分割プリズム２の対物レンズ光軸方
向のガタを除去するために、外筒11と保持部材12の間に
挿入される。2 and FIG. 3, which is a sectional view taken along the line AA of FIG. 2, show an embodiment of the present invention. An outer cylinder 11 which has an objective screw to be screwed into a microscope revolver (not shown) and which holds the objective lens 1 therein is fitted with a prism holding member 12 and is rotatable, and further has mutual restrictions in the axial direction. Further, the ring 13 having elasticity is inserted between the outer cylinder 11 and the holding member 12 in order to output the rotational torque of the prism holding member 12 and remove the play of the optical path splitting prism 2 in the optical axis direction of the objective lens.
以上の構成により、プリズム保持部材12は外筒11に対
して対物レンズ１の光軸を中心として回転可能となる。With the above configuration, the prism holding member 12 can rotate with respect to the outer cylinder 11 about the optical axis of the objective lens 1.
一方、参照ミラー４はその表面の所定位置を中心とす
る半球面を回転案内面として形成されたミラー保持部材
14に固定され、その半球面がプリズム保持部材12の内空
部に固定された円筒16の一方の側に設けられた内径テー
パー部に接触した状態で参照ミラー４が傾角する。ミラ
ー保持部材14には円筒16の軸方向の貫通孔に隙間を有し
て貫入する軸15の一端が連結し、軸15の他端には第３図
に示すようなかまぼこ型の部材15′が固設されている。
円筒16の他方の側には前記所定位置を中心とする凸面が
形成され、この凸面と同曲率の凹面を形成された摺動部
材17が軸15に嵌入している。軸15のかまぼこ型の部材1
5′と摺動部材17の間には圧縮コイルバネ18が配設さ
れ、その結果バネ18はミラー保持部材14の半球面を円筒
16の内径テーパー部に押し付ける役目をしている。円筒
16と摺動部材17の接触面を参照ミラー４の回転中心（所
定位置）を中心とする球面としているので、上記押し付
ける力は円筒16の凸面を摺動部材17が摺動しても変化す
ることなく一定である。On the other hand, the reference mirror 4 is a mirror holding member formed by using a hemisphere centered at a predetermined position on the surface as a rotation guide surface.
The reference mirror 4 is tilted in a state in which the hemispherical surface is fixed to the inner diameter tapered portion provided on one side of the cylinder 16 fixed to the inner space of the prism holding member 12. The mirror holding member 14 is connected to one end of a shaft 15 penetrating through a through hole in the axial direction of the cylinder 16 with a gap, and the other end of the shaft 15 is a semi-cylindrical member 15 'as shown in FIG. Is fixed.
A convex surface centered on the predetermined position is formed on the other side of the cylinder 16, and a sliding member 17 having a concave surface having the same curvature as the convex surface is fitted on the shaft 15. Kamaboko type member of shaft 15 1
A compression coil spring 18 is arranged between the 5'and the sliding member 17, and as a result, the spring 18 forms a cylinder on the hemispherical surface of the mirror holding member 14.
It serves to press against the inner diameter taper part of 16. Cylinder
Since the contact surface between 16 and the sliding member 17 is a spherical surface centered on the rotation center (predetermined position) of the reference mirror 4, the pressing force changes even when the sliding member 17 slides on the convex surface of the cylinder 16. It is constant without.
軸15のかまぼこ型の部材15′はその底面（直線部分）
が圧縮コイルバネ20により上方に付勢されて、プリズム
保持部材12の外部から操作可能な操作部を有する２つの
調整ねじ19a、19bのねじ先端部に当接している。The bottom part (straight part) of the semi-cylindrical member 15 'of the shaft 15
Is urged upward by the compression coil spring 20 and abuts on the screw tips of the two adjusting screws 19a and 19b having an operating portion that can be operated from the outside of the prism holding member 12.
なお、円筒16の軸方向位置は、参照ミラー４の所定位
置が対物レンズ１の合焦位置にあるように調整され、接
着等により固定されている。The axial position of the cylinder 16 is adjusted so that the predetermined position of the reference mirror 4 is at the in-focus position of the objective lens 1 and is fixed by adhesion or the like.
このような構成であるから、調整ねじ19a、19bの操作
部を回転させるとかまぼこ型の部材15′が調整ねじ19
a、19bの出入りに応じて移動して、その結果軸15を介し
て参照ミラー４が所定位置（光路分割プリズム２で折り
曲げられた対物レンズ１の光軸との交点位置）を中心に
傾角（回動）し、参照ミラー４の所定位置が円筒16の軸
方向へ移動することはない。従って、標本３と対物レン
ズ装置（11、12等）との間隔を相対的に変化させて、標
本３に合焦すると、常に干渉縞の０次の縞を視野の中央
に固定した状態で、干渉縞の間隔、方向の調整を行なう
ことができる。With such a configuration, when the operating portions of the adjusting screws 19a and 19b are rotated, the kamaboko-shaped member 15 'is adjusted.
As a result, the reference mirror 4 moves via the axis 15 as a result of moving in and out of a and 19b, and the tilt angle (the intersection point with the optical axis of the objective lens 1 bent by the optical path splitting prism 2) is the center. Therefore, the predetermined position of the reference mirror 4 does not move in the axial direction of the cylinder 16. Therefore, when the distance between the sample 3 and the objective lens device (11, 12, etc.) is relatively changed and the sample 3 is focused, the 0th order fringe of the interference fringe is always fixed in the center of the visual field. The interval and direction of the interference fringes can be adjusted.
また、不図示の顕微鏡レボルバーに外筒11の対物ねじ
をねじ込んだ状態において、２つの調整ねじ19a、19bの
操作部の位置が操作しずらい位置にある場合には、外筒
11に対してプリズム保持部材12を回転し、２つの調整ね
じ19a、19bの操作部を操作し易い位置に持ってくること
ができる。Further, in a state where the objective screw of the outer cylinder 11 is screwed into the microscope revolver (not shown), if the positions of the operation portions of the two adjusting screws 19a and 19b are in positions that are difficult to operate, the outer cylinder
The prism holding member 12 can be rotated with respect to 11, and the operation portions of the two adjusting screws 19a and 19b can be brought to a position where they can be easily operated.
以上のように本考案によれば、標本にピントを合わせ
た状態で常に干渉縞の０次の縞が視野の中央にあるよう
にできるので、干渉縞の間隔、方向の調整に専念でき、
なおかつコントラストの強い干渉縞が常時観察可能であ
るので従来の方法に比べて操作性が向上する。As described above, according to the present invention, the 0th order fringe of the interference fringe can be always located in the center of the visual field while the sample is focused, so that the interval and the direction of the interference fringe can be concentrated.
In addition, since the interference fringes having a strong contrast can always be observed, the operability is improved as compared with the conventional method.
さらに、干渉縞調整操作部が任意の方向に回転可能な
ので上述した効果と合わせてより操作性が向上する利点
がある。Furthermore, since the interference fringe adjustment operating unit can be rotated in any direction, there is an advantage that the operability is further improved in combination with the above-mentioned effects.
第１図は本考案の原理を説明するための光学系の要部を
示す図、第２図は本考案の実視例の断面図、第３図は第
２図のＡ−Ａ矢視断面図である。 〔主要部分の符号の説明〕 １……対物レンズ ２……光路分割プリズム ３……標本 ４……参照ミラー 11……外筒 12……プリズム保持部材 14……ミラー保持部材 16……円筒FIG. 1 is a diagram showing a main part of an optical system for explaining the principle of the present invention, FIG. 2 is a sectional view of an actual example of the present invention, and FIG. 3 is a sectional view taken along the line AA of FIG. It is a figure. [Description of symbols of main parts] 1 ... Objective lens 2 ... Optical path splitting prism 3 ... Specimen 4 ... Reference mirror 11 ... Outer cylinder 12 ... Prism holding member 14 ... Mirror holding member 16 ... Cylinder
Claims (3)
に配設した光路分割部材と、該光路分割部材の一方の分
割光路中に配設された参照ミラーと、該参照ミラーの反
射光と前記光路分割部材による他方の分割光路中に配設
された標本からの反射光とから生ずる干渉縞の間隔、方
向を調整するために前記参照ミラーを傾角する装置とを
有する二光束干渉用対物レンズ装置において、 前記傾角装置は、前記参照ミラーを保持する保持部材
と、前記保持部材に一端が固設され前記一方の分割光路
の光軸に平行な方向に延びた軸と、前記軸が貫通する貫
通孔を有し前記参照ミラー表面の前記対物レンズの光軸
との交点を前記対物レンズの合焦位置に一致するように
前記保持部材を支持する支持部材と、前記軸の他端を前
記軸の長手方向に垂直な任意の方向に移動させる調整部
材とを有し、 前記調整部材によって前記軸の他端を移動させたときに
前記交点を中心として前記参照ミラーが回転するため
に、前記保持部材と前記支持部材との間に、前記交点を
中心とした回転案内面を形成したことを特徴とする二光
束干渉用対物レンズ装置。1. An objective lens, an optical path splitting member provided between the objective lens and a sample, a reference mirror provided in one split optical path of the optical path splitting member, and reflection of the reference mirror. For two-beam interference having a device for tilting the reference mirror to adjust the interval and direction of the interference fringes generated from the light and the reflected light from the sample arranged in the other split optical path by the optical path splitting member. In the objective lens device, the tilting device includes a holding member for holding the reference mirror, an axis fixed at one end to the holding member and extending in a direction parallel to an optical axis of the one split optical path, and the axis. A support member having a through hole penetrating therethrough and supporting the holding member so that the intersection of the surface of the reference mirror with the optical axis of the objective lens coincides with the focus position of the objective lens; and the other end of the shaft. Any perpendicular to the longitudinal direction of the axis Of the holding member and the supporting member, since the reference mirror rotates about the intersection when the other end of the shaft is moved by the adjusting member. An objective lens device for two-beam interference, characterized in that a rotation guide surface having the intersection as a center is formed therebetween.
記軸の長手方向に垂直な所定の方向に付勢力を与える付
勢部材と、前記軸に当接し、前記付勢力に抗する異なる
方向から前記軸の他端の位置を変位させる少なくとも２
つの調整ネジとを有することを特徴とする請求項（１）
に記載の二光束干渉用対物レンズ装置。2. The adjusting member abuts against the biasing member that applies a biasing force to the other end of the shaft in a predetermined direction perpendicular to the longitudinal direction of the shaft, and resists the biasing force. At least 2 to displace the other end of the shaft from different directions
Two adjustment screws are provided, The said (1) characterized by the above-mentioned.
2. An objective lens device for two-beam interference according to.
体への取付用部材を有すると共に、少なくとも前記光路
分割部材と前記参照ミラーと前記傾角装置とを保持する
保持鏡体が前記対物レンズの光軸を中心として回転自在
に前記取付用部材に係合していることを特徴とする請求
項（１）又は（２）に記載の二光束干渉用対物レンズ装
置。3. The objective lens device further has a member for attachment to an observation device main body, and a holding mirror body for holding at least the optical path splitting member, the reference mirror and the tilting device is a light of the objective lens. The objective lens device for two-beam interference according to claim (1) or (2), which is engaged with the mounting member so as to be rotatable around an axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032326U JP2520950Y2 (en) | 1988-03-11 | 1988-03-11 | Objective lens for two-beam interference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032326U JP2520950Y2 (en) | 1988-03-11 | 1988-03-11 | Objective lens for two-beam interference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01136913U JPH01136913U (en) | 1989-09-19 |
| JP2520950Y2 true JP2520950Y2 (en) | 1996-12-18 |
Family
ID=31258750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988032326U Expired - Lifetime JP2520950Y2 (en) | 1988-03-11 | 1988-03-11 | Objective lens for two-beam interference |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2520950Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011197534A (en) * | 2010-03-23 | 2011-10-06 | Nikon Corp | Interference objective lens and microscope device having the same |
| DE19962631B4 (en) * | 1998-12-25 | 2012-06-14 | Mitutoyo Corporation | Two-beam interference objective device |
| DE102016200014B4 (en) | 2015-01-05 | 2023-02-02 | Mitutoyo Corporation | Interference objective lens and light interference measuring device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4201693B2 (en) * | 2003-11-27 | 2008-12-24 | 株式会社ミツトヨ | Optical interference unit, optical interference objective lens device and measuring device |
| JP7041467B2 (en) * | 2017-03-16 | 2022-03-24 | 株式会社ミツトヨ | Optical equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (en) * | 1976-06-29 | 1978-01-13 | ||
| JPS61149803A (en) * | 1984-12-24 | 1986-07-08 | Matsushita Electric Ind Co Ltd | Interference measuring instrument |
-
1988
- 1988-03-11 JP JP1988032326U patent/JP2520950Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19962631B4 (en) * | 1998-12-25 | 2012-06-14 | Mitutoyo Corporation | Two-beam interference objective device |
| JP2011197534A (en) * | 2010-03-23 | 2011-10-06 | Nikon Corp | Interference objective lens and microscope device having the same |
| DE102016200014B4 (en) | 2015-01-05 | 2023-02-02 | Mitutoyo Corporation | Interference objective lens and light interference measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01136913U (en) | 1989-09-19 |
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