JP2508709Y2 - Substrate supply / discharge device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a substrate supply / discharge device used in, for example, a laser beam machine.

[Prior Art] Conventionally, this type of substrate loading / unloading device has been such that a supply arm sucks an unprocessed substrate from a supply magazine on the side of a stage of a laser trimmer, and at the same time, a storage arm moves the stage to the stage. The upper processed substrate was adsorbed and transferred to the storage magazine on the side opposite to the supply table with respect to the mounting table, and then the supply arm transferred the unprocessed substrate to the mounting table. .

[Problems to be Solved] In the above-described conventional substrate loading / unloading apparatus, the supply magazine and the storage magazine are located on both sides of the stage, and the substrates are oriented in the same direction on the stage. Each magazine must be rotated and fixed by the angle of rotation of the arm, and the supply magazine and the storage magazine must be parallel to each other in a straight line. When ejecting, there are drawbacks that the magazines cannot be shared for supply and ejection, a double magazine is required, and floor space is wasted.

[Means for Solving Problems] A substrate loading / unloading device according to the present invention which solves the above conventional problems includes a supply magazine for storing unprocessed substrates, a stage for mounting processed substrates, A storage magazine in which the processed substrates are stored, a wiper-type supply arm on which the unprocessed substrates in the supply magazine are moved and placed on the object table, and the supply arm is moved up and down. And a first driving means for driving in a horizontal direction, a wiper type storage arm for storing the processed substrate on the object table by moving it into the storage magazine, and the storage arm vertically and horizontally. And a second drive means for moving the supply magazine and the storage magazine in three directions in which the supply magazine and the storage magazine are arranged side by side, and a moving mechanism for moving the supply magazine and the storage magazine. And the storage magazine are arranged so that the supply magazine and the mounting table are arranged in a direction orthogonal to each other, and the second drive means is provided only for the mutual distance between the supply magazine and the storage magazine. The operation of moving the storage arm in the direction in which the supply magazine and the storage magazine are arranged and placing the unprocessed substrate on the mounting table by the supply arm, and the operation after the processing by the storage arm It is configured to simultaneously perform the operation of storing the substrate in the storage magazine.

[Example] Next, the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a substrate loading / unloading device of a laser beam machine according to an embodiment of the present invention. FIG. 2 is a diagram for explaining the operation of this device.

In FIGS. 1 and 2, reference numeral 1 denotes an unprocessed substrate, which is stored in the supply magazine 2. A wiper-type supply arm 4 having a suction lip 3 extends above the supply magazine 2 to hold the substrate 1. The supply arm 4 is driven by a jig cylinder 5 for vertical movement and a rotary cylinder 6 for horizontal rotational movement which are first driving means. Further, the laser-processed substrate 8 is placed on the stage 7 arranged in parallel in the supply magazine 2. The processed substrate 8 is a wiper type storage arm having a suction lip 9.
It is designed to be held by 10. The storage arm 10 is driven by a cylinder 11 for linear movement, a jig cylinder 12 for vertical movement, and a rotary cylinder 13 for horizontal rotational movement, which are second driving means, and stores a processed substrate 8 in a storage magazine 14 It is designed to be moved to and stored.

That is, as is clear from FIG. 2, in the object table 7, the direction in which the supply magazine 2 and the mounting table 7 are arranged is orthogonal to the direction in which the supply magazine 2 and the storage magazine 14 are arranged. It is arranged as follows.

The cylinder 11 in the second drive means moves the storage arm 10 in the direction in which the supply magazine 2 and the storage magazine 14 are arranged by the mutual distance between the supply magazine 2 and the storage magazine 14. is there.

The substrate supply / discharge device having the above configuration operates as follows. That is, first, the supply arm 4 is lowered by the jig cylinder 5, and the unprocessed substrate 1 housed in the supply magazine 2 is adsorbed to the adsorption lip 3 by the vacuum source.
Subsequently, the supply arm 4 is raised by the jig cylinder 5 and is rotated by the rotary cylinder 6 onto the stage 7. At this time, since the supply arm 4 is a wiper type,
The untreated substrate 1 rotates while being oriented in a certain direction as indicated by an arrow a in FIG. On the other hand, in the processed substrate 8, at the same time as the unprocessed substrate 1 is adsorbed by the adsorption lip 3,
The suction lip 9 of the storage arm 10 lowered by the jig cylinder 12 is sucked by the vacuum source, and is moved to the front of the storage magazine 14 by the cylinder 11 before the supply arm 4 starts rotating. At the same time when the supply arm 4 starts to rotate, the rotary cylinder 13 causes the storage arm 10 to start to rotate to the position above the storage magazine 14. Since the storage arm 10 is also a wiper type, the processed substrate 8 also rotates while facing in a fixed direction as shown by b in FIG. 2, and the unprocessed substrate 1 is moved by the jig cylinder 5 to the stage 7 At the same time as it is installed by the supply arm 4 that has descended, it is stored in the storage magazine 14 by the storage arm 10 that has descended by the jig cylinder 12. After that, the supply arm 4 is moved to a fixed position by the jig cylinder 5 and the rotary cylinder 6, that is, on the supply magazine 2, and then the storage arm 10 is moved to the fixed position by the cylinder 11, the jig cylinder 12, and the rotary cylinder 13. That is, it moves to the substrate supply / discharge position of the stage 7 and stands by.

[Effects of the Invention] The present invention is a first embodiment of a supply magazine, a stage, a storage magazine, a supply arm for moving a substrate in the supply magazine to the stage, and a vertical and horizontal drive of the supply arm.
The drive means of ・ The storage arm and the storage arm for moving the substrate on the stage to the storage magazine for storage
It is provided with a second drive means for moving horizontally and in three directions in which the supply magazine and the storage magazine are arranged side by side, and the stage is arranged such that the supply magazine and the stage are arranged side by side with respect to the supply magazine and the storage magazine. Arranged to be orthogonal,
Since the second drive means moves the storage arm in the direction in which the supply magazine and the storage magazine are arranged by the mutual distance between the supply magazine and the storage magazine, the supply magazine and the storage magazine can be arranged at a short pitch. There is an effect that the entire space can be saved and workability can be improved.

In addition, the supply magazine and the storage magazine are installed side by side without sandwiching other devices. Especially, since the supply arm and the storage arm are wiper type, the supply magazine and the storage magazine are oriented with the substrate facing in one direction.
Since they can be stored, when a moving mechanism is attached to these magazines and a plurality of magazines are used for automatic supply / discharge, there is an effect that the supply magazine and the storage magazine can be shared, and the number of magazines can be minimized.

Further, according to the present invention, by driving the storage arm by the linear motion cylinder, the storage arm can be moved away from the supply arm during rotation so as not to interfere with the supply arm, and the storage arm and the supply arm can be arranged close to each other. There is an effect.

[Brief description of drawings]

FIG. 1 is a perspective view of a substrate loading / unloading device of a laser beam machine according to an embodiment of the present invention, and FIG. 2 is a diagram for explaining the operation of the device. 1: Unprocessed substrate 2: Supply magazine 3: Suction lip 4: Wiper-type supply arm 5: Jig cylinder 6: Rotary cylinder 7: Table 8: Processed substrate 9: Suction lip 10: Wiper type storage Arm 11: Cylinder 12: Jig cylinder 13: Rotary cylinder 14: Storage magazine

Claims (1)

(57) [Scope of utility model registration request] 1. A supply magazine in which an unprocessed substrate is stored, a stage on which a processed substrate is placed, a storage magazine in which the processed substrate is stored, and the storage magazine in the supply magazine. A wiper-type supply arm for moving and mounting an unprocessed substrate on the platform, first driving means for vertically and horizontally driving the supply arm; A wiper type storage arm for moving and storing the processed substrate in the storage magazine, and a second drive for moving the storage arm vertically and horizontally and in three directions in which the supply magazine and the storage magazine are aligned. And a moving mechanism for moving the supply magazine and the storage magazine, wherein the mounting table is provided with the supply magazine and the storage magazine in the direction in which the supply magazine and the storage magazine are arranged. The mounting tables are arranged so that the arranging directions thereof are orthogonal to each other, and the second driving means arranges the storage arms in the arranging direction of the supply magazine and the storage magazine by a mutual distance between the supply magazine and the storage magazine. And the operation of placing the unprocessed substrate by the supply arm on the mounting table and the operation of storing the processed substrate in the storage magazine by the storage arm at the same time. Characteristic board supply and discharge device.