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JP2587722Y2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JP2587722Y2
JP2587722Y2 JP4781393U JP4781393U JP2587722Y2 JP 2587722 Y2 JP2587722 Y2 JP 2587722Y2 JP 4781393 U JP4781393 U JP 4781393U JP 4781393 U JP4781393 U JP 4781393U JP 2587722 Y2 JP2587722 Y2 JP 2587722Y2
Authority
JP
Japan
Prior art keywords
support plate
main surface
semiconductor chip
semiconductor
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4781393U
Other languages
Japanese (ja)
Other versions
JPH0714657U (en
Inventor
和美 高畠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanken Electric Co Ltd
Original Assignee
Sanken Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanken Electric Co Ltd filed Critical Sanken Electric Co Ltd
Priority to JP4781393U priority Critical patent/JP2587722Y2/en
Publication of JPH0714657U publication Critical patent/JPH0714657U/en
Application granted granted Critical
Publication of JP2587722Y2 publication Critical patent/JP2587722Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/4826Connecting between the body and an opposite side of the item with respect to the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73215Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、複数の半導体素子を含
む半導体装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device including a plurality of semiconductor elements.

【0002】[0002]

【従来の技術】リードフレームの支持板の一方の主面に
複数の半導体素子(以下、チップという)を固着し、こ
のチップの電極とリードフレームの外部リードとを金属
細線によって電気的に接続した半導体装置は公知であ
る。
2. Description of the Related Art A plurality of semiconductor elements (hereinafter referred to as chips) are fixed to one main surface of a support plate of a lead frame, and electrodes of the chip are electrically connected to external leads of the lead frame by thin metal wires. Semiconductor devices are known.

【0003】[0003]

【考案が解決しようとする課題】ところで、半導体装置
の高機能化を図るためにはチップ数を増加しなければな
らない。上述のような支持板を使用する半導体装置にお
いて、チップ数を増加する場合には、1枚の支持板に複
数のチップを搭載することができるように支持板の面積
を大きくするか、複数のチップを支持するために複数の
支持板を用意することが必要になり、装置の大型化を招
いた。
The number of chips must be increased in order to increase the functionality of a semiconductor device. In a semiconductor device using a support plate as described above, when the number of chips is increased, the area of the support plate may be increased so that a plurality of chips can be mounted on one support plate, or a plurality of chips may be provided. In order to support the chip, it is necessary to prepare a plurality of support plates, resulting in an increase in the size of the device.

【0004】そこで、本考案の目的は小型化が達成でき
るのみでなく、製作しやすい構造を有している半導体装
置を提供することにある。
[0004] Therefore, an object of the present invention is to provide a semiconductor device having a structure which can not only achieve miniaturization but also is easy to manufacture.

【0005】上記目的を達成するための本考案は、実施
例を示す図面の符号を参照して説明すると、一方及び他
方の主面を有する金属支持板3と、前記金属支持板3の
前記一方の主面に固着された第1の半導体チップ1と、
前記金属支持板3の前記他方の主面に固着された第2の
半導体チップ2と、複数の外部リード6、7と、前記複
数の外部リード6、7と前記第1及び第2の半導体チッ
プ1、2のボンディングパッド11、12、14、15
とを接続している内部接続用金属細線8a、8b、9
a、9bと、前記第1及び第2の半導体チップ1、2と
前記支持板3と前記複数の内部接続用金属細線8a、8
b、9a、9bと前記複数の外部リード6、7の先端部
とを被覆するように形成された絶縁性被覆樹脂体10と
を有する半導体装置において、前記第1の半導体チップ
1は前記支持板3の前記一方の主面側から見て前記支持
板3から張り出さないように形成され、前記第2の半導
体チップ2は前記支持板3の前記一方の主面側から見て
前記支持板3から張り出した部分2a、2bを有するよ
うに形成され、前記第1の半導体チップ1の前記ボンデ
イングパッド11、12は前記第1の半導体チップ1の
前記支持板3に対して固着されている側の主面とは反対
の主面上に設けられ、前記第2の半導体チップ1の前記
ボンディングパッド14、15は前記第2の半導体チッ
プ2の前記支持板3に対して固着されている側の主面に
設けられ、前記第2の半導体チップ2は前記支持板3に
対して固着されている側の主面に配線導体層を有し且つ
前記配線導体層を被覆するように設けられた絶縁性接着
層5によって前記支持板3に固着されていることを特徴
とする半導体装置に係わるものである。
[0005] To achieve the above object, the present invention has been implemented.
Description will be made with reference to reference numerals in the drawings showing examples.
A metal support plate 3 having one main surface;
A first semiconductor chip 1 fixed to the one main surface;
A second fixed to the other main surface of the metal support plate 3;
A semiconductor chip 2, a plurality of external leads 6, 7;
External leads 6, 7 and the first and second semiconductor chips.
Bonding pads 11, 12, 14, 15
Metal wires 8a, 8b, 9 for internal connection
a, 9b, the first and second semiconductor chips 1, 2,
The support plate 3 and the plurality of metal wires for internal connection 8a, 8
b, 9a, 9b and tips of the plurality of external leads 6, 7
An insulating coating resin body 10 formed so as to cover
The first semiconductor chip
1 is the support plate viewed from the one main surface side of the support plate 3
The second semiconductor is formed so as not to protrude from the plate 3.
The body chip 2 is viewed from the one main surface side of the support plate 3.
It has portions 2a and 2b projecting from the support plate 3.
The bond of the first semiconductor chip 1
Ining pads 11 and 12 are provided on the first semiconductor chip 1.
Opposite to the main surface on the side fixed to the support plate 3
And provided on the main surface of the second semiconductor chip 1.
The bonding pads 14 and 15 are connected to the second semiconductor chip.
The main surface of the side of the pump 2 which is fixed to the support plate 3
And the second semiconductor chip 2 is provided on the support plate 3.
Having a wiring conductor layer on the main surface on the side fixed to
Insulating adhesive provided to cover the wiring conductor layer
The present invention relates to a semiconductor device which is fixed to the support plate 3 by a layer 5 .

【0006】[0006]

【考案の効果】本考案は次の効果を有する。 (イ) 第1及び第2の半導体チップ1、2は金属製支
持板3によって支持されているので、これ等を安定的に
支持することができる。 (ロ) 第2の半導体チップ2のボンディングパッド1
4、15は張り出し部分2a、2bに設けられ、平面的
に見て第1の半導体チップ1のボンディングパッド1
1、12と同一側に配置されているので、外部リード
6、7に対する金属細線9a、9bによる接続を容易に
達成することができる。 (ハ) 第2の半導体チップ2の表面には配線導体層が
設けられているが、絶縁性接着層5によって第2の半導
体チップ2が支持板3の固着されているので、配線導体
層の絶縁を確保することができる。
[Effects of the Invention] The present invention has the following effects. (A) The first and second semiconductor chips 1 and 2 are made of metal.
These are stably supported because they are supported by the holding plate 3.
Can be supported. (B) Bonding pad 1 of second semiconductor chip 2
4 and 15 are provided on the overhang portions 2a and 2b,
The bonding pad 1 of the first semiconductor chip 1
Since they are arranged on the same side as 1 and 12, external leads
Easy connection to metal wires 6 and 7 by thin metal wires 9a and 9b
Can be achieved. (C) On the surface of the second semiconductor chip 2, a wiring conductor layer is provided.
Provided, but the second semiconductor layer is formed by the insulating adhesive layer 5.
Since the body chip 2 is fixed to the support plate 3, the wiring conductor
Layer insulation can be ensured.

【0007】[0007]

【実施例】次に、図1を参照して本考案の実施例に係わ
る半導体装置を説明する。この半導体装置は、第1及び
第2の半導体素子としての第1及び第2のモノリシック
ICチップ1、2と、これ等を支持する金属平板から成
る支持板3と、接着層4、5と、複数の外部リード6、
7と、内部接続用金属細線8a、8b、9a、9bと、
絶縁性被覆樹脂体10とから成る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a semiconductor device according to an embodiment of the present invention will be described with reference to FIG. This semiconductor device includes first and second monolithic IC chips 1 and 2 as first and second semiconductor elements, a support plate 3 made of a flat metal plate for supporting them, adhesive layers 4 and 5, A plurality of external leads 6,
7, metal wires 8a, 8b, 9a, 9b for internal connection;
And an insulating coating resin body 10.

【0008】第1のチップ1は支持板3の一方の主面
(表面)に絶縁性接着層4で固着され、第2のチップ2
は支持板3の他方の主面(裏面)に絶縁性接着剤5で固
着されている。第1及び第2のチップ1、2は種々の半
導体領域や電極層が周知の方法で設けられているが、図
1では省略されている。第1のチップ1は支持板3より
も幾らか小さく形成され、この表面にリード細線接続用
電極即ちボンディングパッド11、12を有し、これ等
に金属細線8a、8bの一端が周知のワイヤボンディン
グ方法で固着されている。金属細線8a、8bの他端は
一方及び他方の側の複数の外部リード6、7から選択さ
れたものに固着されている。
The first chip 1 is fixed to one main surface (front surface) of the support plate 3 with an insulating adhesive layer 4 and the second chip 2
Is fixed to the other main surface (back surface) of the support plate 3 with an insulating adhesive 5. The first and second chips 1 and 2 are provided with various semiconductor regions and electrode layers by a known method, but are omitted in FIG. The first chip 1 is formed somewhat smaller than the support plate 3 and has on its surface electrodes for connecting fine lead wires, ie, bonding pads 11 and 12, to which one ends of fine metal wires 8a and 8b are connected by a known wire bonding. Secured in a way. The other ends of the thin metal wires 8a, 8b are fixed to one selected from the plurality of external leads 6, 7 on one and the other sides.

【0009】第2のチップ2は矢印13で示すように支
持板3の一方の主面側から見て支持板3から張り出した
部分2a、2bを有し、この表面(支持板3に近い側の
面)にボンディングパッド14、15が設けられ、これ
等に金属細線9a、9bの一端が周知のワイヤワボンデ
ィング法で固着されている。金属細線9a、9bの他端
は一方及び他方の側の複数の外部リード6、7から選択
されたものに固着されている。なお、この実施例では、
支持板3及び第2のチップ2が共に平面形状四角形であ
り、第2のチップ2の外部リード6、7側の2辺に沿っ
た帯状領域が張り出し部分2a、2bとなっている。
The second chip 2 has portions 2a and 2b projecting from the support plate 3 as viewed from one main surface side of the support plate 3 as shown by an arrow 13, and the surface thereof (the side close to the support plate 3). Are provided with bonding pads 14 and 15, and one ends of the thin metal wires 9a and 9b are fixed to these by a well-known wire bonding method. The other ends of the thin metal wires 9a and 9b are fixed to one selected from a plurality of external leads 6 and 7 on one and the other sides. In this embodiment,
The support plate 3 and the second chip 2 are both rectangular in plan view, and the strip-shaped regions along the two sides of the second chip 2 on the side of the external leads 6, 7 are overhanging portions 2a, 2b.

【0010】第2のチップ2の上面中央領域に配線導体
層(図示せず)が存在するが、絶縁性接着層5で被覆さ
れているために支持板3から電気的に分離されている。
なお、第2のチップ2の上面の配線導体層の上に特別に
絶縁層を設け、第2のチップ2と支持板3との電気的絶
縁をより確実に達成することもできる。また、第1のチ
ップ1の下面の一部又は全部及び第2のチップ2の上面
の一部を必要に応じて支持板3に半田等で電気的に結合
することもできる。
Although a wiring conductor layer (not shown) exists in the central region of the upper surface of the second chip 2, it is electrically separated from the support plate 3 because it is covered with the insulating adhesive layer 5.
Note that an insulating layer may be provided on the wiring conductor layer on the upper surface of the second chip 2 so as to more reliably achieve the electrical insulation between the second chip 2 and the support plate 3. It can also be electrically coupled with solder or the like to the support plate 3 as necessary part of the first part or the whole and a second top surface of the chip 2 of the lower surface of the chip 1.

【0011】支持板3と外部リード6、7はリードフレ
ームから得たものであり、製作段階においてはそれぞれ
が相互に連結されている。複数の外部リード6、7の中
の1本又は2本が支持板に連結されている。絶縁被覆樹
脂体10は周知のモールド法によって第1及び第2のチ
ップ1、2と支持板3と金属細線8a、8b、9a、9
bと外部リード6、7の一部とを被覆するように形成さ
れている。
The support plate 3 and the external leads 6 and 7 are obtained from a lead frame, and are connected to each other in a manufacturing stage. One or two of the plurality of external leads 6 and 7 are connected to the support plate. The insulating coating resin body 10 is formed by a well-known molding method using the first and second chips 1 and 2, the support plate 3, and the fine metal wires 8 a, 8 b, 9 a, 9
b and a part of the external leads 6 and 7 are formed.

【0012】半導体装置を図1の構造にすれば、支持板
3の両主面を第1及び第2のチップ1、2の固着に使用
できるので、半導体装置の小型化が達成される。また、
第2のチップ2は張り出した部分2a、2bを有するの
で、ここを使用して金属細線9a、9bによる接続を第
1のチップ1と同一主面側から容易に達成することがで
きる。
When the semiconductor device has the structure shown in FIG. 1, both main surfaces of the support plate 3 can be used for fixing the first and second chips 1 and 2, so that the size of the semiconductor device can be reduced. Also,
Since the second chip 2 has the protruding portions 2a and 2b, the connection using the thin metal wires 9a and 9b can be easily achieved from the same main surface side as the first chip 1 by using this.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例の半導体装置を示す中央縦断面図であ
る。
FIG. 1 is a central longitudinal sectional view showing a semiconductor device of an embodiment.

【符号の説明】[Explanation of symbols]

1、2 第1及び第2のチップ 3 支持板 2a、2b 張り出し部分 1, 2 First and 2nd chips 3 Support plate 2a, 2b Overhang portion

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】 一方及び他方の主面を有する金属支持板
(3)と、前記金属支持板(3)の前記一方の主面に固
着された第1の半導体チップ(1)と、前記金属支持板
(3)の前記他方の主面に固着された第2の半導体チッ
プ(2)と、複数の外部リード(6、7)と、前記複数
の外部リード(6、7)と前記第1及び第2の半導体チ
ップ(1、2)のボンディングパッド(11、12、1
4、15)とを接続している内部接続用金属細線(8
a、8b、9a、9b)と、前記第1及び第2の半導体
チップ(1、2)と前記支持板(3)と前記複数の内部
接続用金属細線(8a、8b、9a、9b)と前記複数
の外部リード(6、7)の先端部とを被覆するように形
成された絶縁性被覆樹脂体(10)とを有する半導体装
置において、 前記第1の半導体チップ(1)は前記支持板(3)の前
記一方の主面側から見て前記支持板(3)から張り出さ
ないように形成され、 前記第2の半導体チップ(2)は前記支持板(3)の前
記一方の主面側から見て前記支持板(3)から張り出し
た部分(2a、2b)を有するように形成され、 前記第1の半導体チップ(1)の前記ボンデイングパッ
ド(11、12)は前記第1の半導体チップ(1)の前
記支持板(3)に対して固着されている側の主面とは反
対の主面上に設けられ、 前記第2の半導体チップ(2)の前記ボンディングパッ
ド(14、15)は前記第2の半導体チップ(1)の前
記支持板(3)に対して固着されている側の主面に設け
られ、 前記第2の半導体チップ(2)は前記支持板(3)に対
して固着されている側の主面に配線導体層を有し且つ前
記配線導体層を被覆するように設けられた絶縁性接着層
(5)によって前記支持板(3)に固着されて いること
を特徴とする半導体装置。
1. A metal support plate having one and another main surface.
(3) and fixing the metal support plate (3) to the one main surface.
A mounted first semiconductor chip (1) and the metal support plate
(3) a second semiconductor chip fixed to the other main surface;
(2), a plurality of external leads (6, 7),
External leads (6, 7) and the first and second semiconductor chips.
Bonding pads (11, 12, 1)
4, 15), and a metal wire for internal connection (8
a, 8b, 9a, 9b) and the first and second semiconductors
Chips (1, 2), the support plate (3), and the plurality of insides
Connection metal wires (8a, 8b, 9a, 9b) and the plurality
So as to cover the tips of the external leads (6, 7).
Semiconductor device having insulating coating resin body (10) formed
In location, the first semiconductor chip (1) in front of the support plate (3)
The support plate (3) projects from the one main surface side.
And the second semiconductor chip (2) is located in front of the support plate (3).
Projecting from the support plate (3) when viewed from one main surface side
And the bonding package of the first semiconductor chip (1).
(11, 12) are in front of the first semiconductor chip (1).
The main surface on the side fixed to the support plate (3) is opposite to the main surface.
The bonding package of the second semiconductor chip (2) is provided on a pair of main surfaces.
(14, 15) are in front of the second semiconductor chip (1).
Provided on the main surface on the side fixed to the support plate (3)
Is, the second semiconductor chip (2) is paired to the support plate (3)
A wiring conductor layer on the main surface on the side fixed
An insulating adhesive layer provided so as to cover the wiring conductor layer
(5) The semiconductor device is fixed to the support plate (3) by (5) .
JP4781393U 1993-08-09 1993-08-09 Semiconductor device Expired - Lifetime JP2587722Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4781393U JP2587722Y2 (en) 1993-08-09 1993-08-09 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4781393U JP2587722Y2 (en) 1993-08-09 1993-08-09 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH0714657U JPH0714657U (en) 1995-03-10
JP2587722Y2 true JP2587722Y2 (en) 1998-12-24

Family

ID=12785810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4781393U Expired - Lifetime JP2587722Y2 (en) 1993-08-09 1993-08-09 Semiconductor device

Country Status (1)

Country Link
JP (1) JP2587722Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102979854A (en) * 2012-08-29 2013-03-20 鹤壁汽车工程职业学院 Flexible speed reducer with large transmission ratio

Also Published As

Publication number Publication date
JPH0714657U (en) 1995-03-10

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