JP2021005190A - Touch screen, touch panel, display device, electronic apparatus, and method for manufacturing touch screen - Google Patents

Abstract

To provide a touch screen capable of preventing electrostatic discharge from causing insulation breakdown.SOLUTION: A touch screen has a plurality of lead-out wirings respectively connected to a plurality of row direction wirings -21B, 21C-, and one end of a column direction wiring, and a shield wiring surrounding the plurality of row direction wirings, the column direction wiring and the plurality of lead-out wirings. A first electric resistor 61 extends over the other end of each row direction wiring and the shied wiring 51. A second electric resistor 62 extends over the other ends of two adjacent wirings included in row direction wirings. The first electric resistor 61 and the second electric resistor 62 are composed of an oxide semiconductor.SELECTED DRAWING: Figure 7

Description

The present invention relates to a touch screen, a touch panel, a display device, an electronic device, and a method for manufacturing the touch screen.

The touch panel is a device that detects that a touch has been performed by an indicator such as a finger and specifies the position coordinates indicating the touch position on the touch panel on the touch panel, and is a device that contributes to the provision of an excellent user interface. Attention has been paid. In the touch panel currently provided as a product, it is detected that the touch is performed by the indicator by the resistance film method, the capacitance method, or the like.

Generally speaking, a touch panel includes a touch screen and a detection device. The touch screen has a built-in touch sensor that detects that a touch has been made. The detection device identifies the position coordinates indicating the touch position based on the signal input from the touch screen.

Capacitive type touch panels include projected capacitance type touch panels. The touch panel described in Patent Document 1 is an example. In the projection type capacitance type touch panel represented by the touch panel described in Patent Document 1, the front surface of the touch screen in which the touch sensor is built is covered with a protective plate made of a glass plate or the like having a thickness of several mm. Even if it is broken, it can be detected that the touch is performed by the indicator. Therefore, the projection type capacitance type touch panel can be imparted with excellent robustness by arranging a protective plate on the front surface of the touch screen. Further, the projection type capacitance type touch panel can detect that the touch is performed even when the touch is performed by the fingers of the user's hand wearing gloves. Further, the projection type capacitance type touch panel has a long life because it does not have a moving part.

Capacitive touch panels typically include a first electrode and a second electrode. The first electrode typically comprises a plurality of rows and wires. The second electrode typically comprises a plurality of row wirings. Each of the plurality of line wires extends in the line direction. A plurality of row wires are arranged in the column direction. Each of the plurality of row wires extends in the row direction. The plurality of column wirings are arranged in the row direction.

In the capacitance type touch panel, a change in capacitance is detected by a detection method such as a self-capacitance method or a mutual capacitance method, and a touch position is specified from the detected change in capacitance.

When a change in capacitance is detected by the self-capacitance method, a plurality of row wirings and a plurality of column wirings serve as detection wirings for detecting the capacitance, and the indicator and each of the plurality of row wirings are used. The change in capacitance between is detected by the detection circuit, the change in capacitance between the indicator and each of the plurality of row wires is detected by the detection circuit, and the change in capacitance of the former and the detected change in capacitance and The touch position is specified from the latter change in capacitance. The technique described in Patent Document 2 is an example. In the technique described in Patent Document 2, the first series of conductor elements are adhered to the surface of a thin dielectric film. Further, the second series conductor element is adhered on the surface of the thin dielectric film, and is insulated from the first series conductor element by the insulating film. The second series conductor elements form a plurality of intersections with the first series conductor elements. Each capacitance of the first series conductor element is sampled by the detection circuit, and each capacitance of the second series conductor element is sampled by the detection circuit, and the former capacitance and the latter static electricity are sampled. The position of the interfering object is determined from the change in capacitance.

When the change in capacitance is detected by the mutual capacitance method, the change in electric field between each of the plurality of row wirings and each of the plurality of column wirings, that is, the change in mutual capacitance is detected and detected by the detection circuit. The touch position is specified from the change in mutual capacitance. The technique described in Patent Document 3 is an example.

In both the self-capacity method and the mutual capacity method, the following method of specifying the position coordinates is generally adopted. That is, the touch surface is divided into a plurality of plane regions in a grid pattern so that each row contains one row wiring and each column contains one column wiring. Each of the plurality of planar regions is called a detection cell. Further, when the touch is performed by the indicator, the position coordinates indicating the touch position based on the balance between the detection value in the sensor block which is the detection cell in which the touch is performed and the detection value in the detection cell in the vicinity of the sensor block. Is identified.

Recently, a connection form has been realized in which a lead-out wiring is connected only to one end of each of a plurality of row wirings and a lead-out wiring is connected to only one end of each of a plurality of column wirings. This connection form can be realized by forming the detection wiring with a mesh-shaped electrode made of metal having an electric resistance lower than that of the transparent electrode made of indium tin oxide (ITO). The technique described in Patent Document 4 is an example.

Japanese Patent No. 5647864 Special Table 9-51186 Gazette Japanese Patent No. 4275865 Japanese Patent No. 4869309

However, when the lead wire is connected to only one end of each of the plurality of row wires and the lead wire is connected to only one end of each of the plurality of column wires, the indicator such as a finger approaches the touch screen and the touch screen. When electrostatic discharge occurs in, charge accumulates at the other end of the row wiring and the other end of the column wiring, and between the other ends of the two adjacent row wirings, between the other ends of the two adjacent row wirings, etc. Insulation failure may occur in.

The present invention has been made in view of this problem. An object to be solved by the present invention is to provide a touch screen capable of suppressing the occurrence of dielectric breakdown due to static electricity discharge.

The touch screen includes a plurality of first wirings, a plurality of second wirings, a plurality of first lead wirings, a plurality of second lead wirings, a shield wiring, a first electric resistor, and a second electric resistor. , A third electrical resistor and a fourth electrical resistor.

The plurality of first wires extend in the first direction. The plurality of second wires extend in a second direction different from the first direction. The plurality of second wirings intersect the plurality of first wirings when viewed in a plan view.

The plurality of first lead-out wires are connected to one end of each of the plurality of first wires. The plurality of second lead-out wires are connected to one end of each of the plurality of second wires.

The shielded wiring surrounds a plurality of first wirings, a plurality of second wirings, a plurality of first lead-out wirings, and a plurality of second lead-out wirings when viewed in a plan view.

The first electric resistor, the second electric resistor, the third electric resistor, and the fourth electric resistor are made of an oxide semiconductor. The first electric resistor straddles the other end of each first wiring included in the plurality of first wirings and the shield wiring. The second electrical resistor straddles the other ends of two adjacent first wires included in the plurality of first wires. The third electric resistor straddles the other end of each second wiring included in the plurality of second wirings and the shield wiring. The fourth electrical resistor straddles the other ends of two adjacent second wires included in the plurality of second wires.

According to the present invention, the electric charge generated at the other end of the first wiring on the side opposite to one end of the first wiring to which the first lead wiring is connected is the first electric resistor and the second electricity. It dissipates through the resistor. Further, the electric charge generated at the other end of the second wiring on the side opposite to one end of the second wiring to which the second lead-out wiring is connected passes through the third electric resistor and the fourth electric resistor. And dissipate. Therefore, it is possible to suppress the accumulation of electric charges at the other end of the first wiring and the other end of the second wiring. As a result, it is possible to prevent dielectric breakdown from occurring due to electrostatic discharge in the touch screen.

Objectives, features, aspects, and advantages of the present invention will become more apparent with the following detailed description and accompanying drawings.

It is a perspective view which shows a part of the touch screen of Embodiment 1 schematically. It is a top view which schematically illustrates the touch screen of Embodiment 1. It is sectional drawing which shows a part of the touch screen of Embodiment 1 schematically. It is sectional drawing which shows a part of the touch screen of Embodiment 1 schematically. It is sectional drawing which shows a part of the touch screen of Embodiment 1 schematically. It is sectional drawing which shows a part of the touch screen of Embodiment 1 schematically. It is a top view which shows a part of the touch screen of Embodiment 1 schematically. It is a top view which shows a part of the touch screen of Embodiment 1 schematically. It is a top view which shows a part of the touch screen of Embodiment 1 schematically. It is a top view which shows typically the terminal provided in the touch screen of Embodiment 1. FIG. FIG. 5 is a cross-sectional view schematically illustrating a terminal provided in the touch screen of the first embodiment. FIG. 5 is a plan view schematically illustrating row direction wiring and column direction wiring provided in the touch screen of the first embodiment. FIG. 5 is a front view schematically showing a part of a liquid crystal display device including the touch screen of the first embodiment. FIG. 5 is a front view schematically showing a part of a liquid crystal display device including the touch screen of the first embodiment. FIG. 5 is a cross-sectional view schematically showing a part of a liquid crystal display device including the touch screen of the first embodiment. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. It is sectional drawing which shows typically the intermediate product manufactured in the process of manufacturing the touch screen of Embodiment 1. FIG. FIG. 5 is a block diagram schematically illustrating an electronic device including the touch screen of the first embodiment.

1 Embodiment 1
1.1 Laminated structure of touch screen FIG. 1 is a perspective view schematically showing a part of the touch screen of the first embodiment.

The touch screen 1 illustrated in FIG. 1 is a projection type capacitance type touch screen. The touch screen 1 may be a touch screen of a method other than the projection type capacitance method.

The touch screen 1 is attached to the liquid crystal display panel. The touch screen 1 may be attached to a display panel other than the liquid crystal display panel. For example, the touch screen 1 may be mounted on an organic electroluminescence (EL) display panel.

The touch screen 1 includes a transparent substrate 11, a lower electrode 12, an interlayer insulating film 13, an upper electrode 14, a protective film 15, a polarizing plate 16, and a transparent substrate 17. When the touch screen 1 is mounted on an organic EL display panel or the like, the polarizing plate 16 may be omitted.

The transparent substrate 11 is arranged in the lowest layer. The lower electrode 12, the interlayer insulating film 13, the upper electrode 14, the protective film 15, the polarizing plate 16, and the transparent substrate 17 are arranged on the transparent substrate 11.

The lower electrode 12 is arranged on the transparent substrate 11. The interlayer insulating film 13 is placed on the transparent substrate 11 so as to be superimposed on the lower electrode 12, and covers the lower electrode 12. The upper electrode 14 is arranged on the interlayer insulating film 13. The protective film 15 is placed on the interlayer insulating film 13 so as to be superimposed on the upper electrode 14, and covers the upper electrode 14. The polarizing plate 16 is arranged on the interlayer insulating film 13. The polarizing plate 16 is attached to the interlayer insulating film 13. The transparent substrate 17 is arranged on the polarizing plate 16. The transparent substrate 17 is adhesively bonded to the polarizing plate 16.

The transparent substrates 11 and 17 are made of a transparent glass material, a resin material, or the like. The transparent substrates 11 and 17 have an insulating property. The interlayer insulating film 13 and the protective film 15 are transparent insulating films. The interlayer insulating film 13 and the protective film 15 are a silicon nitride film, a silicon oxide film, and the like.

The polarizing plate 16 constitutes a liquid crystal display element together with a liquid crystal display panel on which the touch screen 1 is mounted. The protective film 15 protects the touch screen 1.

The lower electrode 12 includes a plurality of first wirings 21. The plurality of first wirings 21 extend in the first direction X. The upper electrode 14 includes a plurality of second wirings 22. The plurality of second wirings 22 extend in the second direction Y. The second direction Y is a direction different from the first direction X. The plurality of second wirings 22 intersect the plurality of first wirings 21 in a three-dimensional manner, and intersect the plurality of first wirings 21 when viewed in a plan view from the thickness direction of the touch screen 1. In the first embodiment, the first direction X is the row direction, and the plurality of first wirings 21 are the plurality of row direction wirings. Further, the second direction Y is the row direction, and the plurality of second wirings 22 are the plurality of row direction wirings. The column direction is perpendicular to the row direction.

The plurality of row direction wirings 21 and the plurality of column direction wirings 22 are separated from each other in the thickness direction of the touch screen 1 by the interlayer insulating film 13. As a result, the plurality of row direction wirings 21 and the plurality of column direction wirings 22 are electrically insulated from each other.

The plurality of row direction wirings 21 are laminated wirings including a laminated oxide semiconductor film and a metal film. The plurality of row direction wirings 22 are laminated wirings including a laminated oxide semiconductor film and a metal film. The oxide semiconductor film is made of an oxide semiconductor. The oxide semiconductor is a composite oxide (In-Ga-Zn-O) of indium (In), gallium (Ga) and zinc (Zn). The metal film is made of metal. The metal may be either a pure metal or an alloy. The metal is aluminum, copper, chromium, silver or the like.

As described above, the lower electrode 12 includes a plurality of row direction wirings 21. Further, the upper electrode 14 arranged in a layer above the layer in which the lower electrode 12 is arranged includes a plurality of row direction wirings 22. However, the lower electrode 12 may include a plurality of row direction wirings 22. Further, the upper electrode 14 may include a plurality of row direction wirings 21. A plurality of row direction wirings 21 and a plurality of column direction wirings 22 may be arranged in the same layer. In this case, the interlayer insulating film 13 is arranged only at the intersection where the plurality of row direction wirings 21 and the plurality of column direction wirings 22 intersect when viewed in a plan view from the thickness direction of the touch screen 1 and around the intersection. Further, the plurality of row direction wirings 21 and the plurality of column direction wirings 22 are electrically insulated from each other by the arranged interlayer insulating film 13.

1.2 Outline of Touch Position Detection The touch screen 1 has a detectable area in which it is possible to detect that a touch has been performed by an indicator such as a finger. The user operates the touch screen 1 by touching the transparent substrate 17 arranged on the uppermost layer and having the surface of the touch screen 1 with an indicator body. When the transparent substrate 17 is touched by the indicator body, a capacitive coupling is formed between the indicator body and the plurality of row direction wirings 21 and between the indicator body and the plurality of column direction wirings 22. The touch capacitance is generated by the capacitive coupling. When the touch position is detected by the mutual capacitance method, the change in mutual capacitance between the plurality of row direction wirings 21 and the plurality of column direction wirings 22 caused by the generation of the touch capacitance is detected. .. Further, based on the detected change in mutual capacitance, the touch position where the touch is performed in the detectable area is detected.

1.3 Planar structure of the touch screen FIG. 2 is a top view schematically showing the touch screen of the first embodiment.

As shown in FIG. 2, the touch screen 1 includes a plurality of row direction wirings 21 and a plurality of column direction wirings 22. The plurality of row direction wirings 21 include row direction wirings 21A, 21B, 21C, 21D, 21E and 21F. The plurality of row direction wirings 22 include row direction wirings 22A, 22B, 22C, 22D, 22E, 22F, 22G, and 22H.

The column direction wirings 22A to 22H intersect with the row direction wirings 21A to 21F when viewed in a plan view from the thickness direction of the touch screen 1. As a result, the row direction wirings 21A to 21F and the column direction wirings 22A to 22H form a plurality of intersections. A plurality of intersections are arranged in a matrix. The detectable area D of the touch screen 1 is a matrix area in which the row direction wirings 21A to 21F and the column direction wirings 22A to 22H are arranged, and a plurality of intersections arranged in a matrix are arranged.

Further, the touch screen 1 includes a plurality of first lead-out wirings 31 and a plurality of second lead-out wirings 32. The plurality of first lead-out wires 31 include first lead-out wires 31A, 31B, 31C, 31D, 31E and 31F. The plurality of second lead-out wires 32 include second lead-out wires 32A, 32B, 32C, 32D, 32E, 32F, 32G and 32H.

The first lead-out wirings 31A to 31F are connected to one end of the row direction wirings 21A to 21F, respectively. The second lead-out wirings 32A to 32H are connected to one end of the row direction wirings 22A to 22H, respectively.

Further, the touch screen 1 includes a terminal portion 41. The terminal portion 41 is electrically connected to the external wiring of the touch screen 1.

The first lead-out wirings 31A to 31F are pulled out to the terminal portion 41. As a result, the row direction wirings 21A to 21F are electrically connected to the terminal portion 41 via the first lead-out wirings 31A to 31F, respectively. The second lead-out wirings 32A to 32H are pulled out to the terminal portion 41. As a result, the row direction wirings 22A to 22H are electrically connected to the terminal portion 41 via the second lead-out wirings 32A to 32H, respectively.

Further, the touch screen 1 includes a dummy lead-out wiring 42. The dummy lead-out wiring 42 is arranged between the first lead-out wiring 31A to 31F and the second lead-out wiring 32A to 32H.

The first lead-out wirings 31A to 31F are arranged along the outer circumference of the detectable area D, and are arranged at close intervals. The second lead-out wires 32A to 32H are arranged along the outer circumference of the detectable area D and are arranged at close intervals.

In the first lead-out wirings 31A to 31F, the first lead-out wiring 31F having the shortest length is arranged on the innermost side. Further, the first lead-out wirings 31A to 31E other than the first lead-out wiring 31F are arranged along the first lead-out wiring 31F. In the second lead-out wirings 32A to 32H, the second lead-out wiring 32D having the shortest length is arranged substantially linearly. Further, the second lead-out wirings 32A to 32C and 32E to 32H other than the second lead-out wiring 32D are arranged along the second lead-out wiring 32D.

According to this arrangement of the first lead-out wiring 31A to 31F and the second lead-out wiring 32A to 32H, the liquid crystal display panel on which the touch screen 1 is mounted and the first lead-out wiring 31A and the first lead-out wiring 31A arranged on the outermost side are arranged. It is possible to suppress the fringe capacitance formed between the first lead-out wirings 31B to 31F and the second lead-out wirings 32B to 32H other than the lead-out wiring 32A of 2.

Further, the touch screen 1 includes a first shield wiring 51. A ground potential is given to the first shielded wiring 51. The first shield wiring 51 is arranged outside the first lead-out wiring 31A and the second lead-out wiring 32A, and is arranged along the first lead-out wiring 31A and the second lead-out wiring 32A. When the first shield wiring 51 is viewed in a plan view from the thickness direction of the touch screen 1, the row direction wirings 21A to 21F, the column direction wirings 22A to 22H, the first lead-out wirings 31A to 31F, and the second Surrounds the lead wiring 32A to 32H. According to this arrangement of the first shield wiring 51, the fringe capacity formed between the liquid crystal display panel on which the touch screen 1 is mounted and the first lead-out wiring 31A and the second lead-out wiring 32A is suppressed. can do.

Further, the touch screen 1 includes a second shield wiring 52. The second shield wiring 52 branches from the first shield wiring 51. Therefore, the second shielded wiring 52 is given a ground potential in the same manner as the first shielded wiring 51. The second shield wiring 52 is arranged along one end of the row direction wirings 21A to 21F.

1.4 Vertical Structure of Shielded Wiring FIGS. 3 and 4 are cross-sectional views schematically showing a part of the touch screen of the first embodiment. FIG. 3 illustrates a cross section of a portion P illustrated in FIG. FIG. 3 illustrates a cross section at the position of the cutting line AA drawn in FIG. 7 described below. FIG. 4 illustrates a cross section of the portion Q illustrated in FIG. FIG. 4 illustrates a cross section at the position of the cutting line BB drawn in FIG. 8 described below.

As shown in FIGS. 3 and 4, the first shielded wiring 51 includes a shielded wiring 51L of the first layer and a shielded wiring 51U of the second layer. The shield wiring 51L of the first layer is arranged in the same layer as the layer in which the row direction wirings 21A to 21F are arranged. As a result, the row direction wirings 21A to 21F can be electrically connected to the first shield wiring 51 in one layer, and the row direction wirings 21A to 21F can be easily electrically connected to the first shield wiring 51. can do. The shield wiring 51U of the second layer is arranged in the same layer as the layer in which the row direction wirings 22A to 22H are arranged. As a result, the row direction wirings 22A to 22H can be electrically connected to the first shield wiring 51 in one layer, and the row direction wirings 22A to 22H can be easily electrically connected to the first shield wiring 51. can do.

5 and 6 are cross-sectional views schematically showing a part of the touch screen of the first embodiment. 5 and 6 show a cross section of a portion R illustrated in FIG. FIG. 5 illustrates a cross section at the position of the cutting line CC drawn in FIG. 9 described below. FIG. 6 illustrates a cross section at the position of the cutting line DD drawn in FIG. 9 described below.

The second shielded wiring 52 is composed of the shielded wiring 52U of the second layer as shown in FIGS. 5 and 6. The shield wiring 52U of the second layer is arranged in a layer different from the layer in which the row direction wirings 21A to 21F and the first lead-out wirings 31A to 31F are arranged, and is the same as the layer in which the column direction wirings 22A to 22H are arranged. Arranged in layers. Thereby, the row direction wiring 22H can be electrically connected to the second shield wiring 52 in one layer, and the row direction wiring 22H can be easily electrically connected to the second shield wiring 52. .. Further, it is possible to prevent the second shield wiring 52 from interfering with the first lead-out wirings 31A to 31F.

According to the above arrangement of the first lead-out wiring 31A to 31F and the second lead-out wiring 32A to 32H, the electromagnetic noise generated by the liquid crystal display panel on which the touch screen 1 is mounted causes the first lead-out wiring 31A to 31F and The influence on the signal transmitted by the second lead-out wiring 32A to 32H can be suppressed.

1.5 Connection of Wiring by Electric Resistor and Shield Wiring FIG. 7 is a top view schematically showing a part of the touch screen of the first embodiment. FIG. 7 is an enlarged view of the portion P shown in FIG.

As shown in FIG. 7, the touch screen 1 includes a first electric resistor 61 and a second electric resistor 62. The first electric resistor 61 and the second electric resistor 62 are made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The first electric resistor 61 and the second electric resistor 62 are high resistance elements having high electric resistance.

As shown in FIG. 3, the first electric resistor 61 and the second electric resistor 62 are in the same layer as the layer in which the row direction wirings 21A to 21F and the shield wiring 51L of the first layer are arranged. Be placed.

The first electric resistor 61 straddles the other end of each row direction wiring 21X included in the row direction wirings 21A to 21F and the shield wiring 51L of the first layer provided in the first shield wiring 51. As a result, the other end of each row direction wiring 21X is electrically connected to the first shield wiring 51 via the first electric resistor 61.

The second electric resistor 62 straddles the other ends of the two adjacent row direction wirings 21P included in the row direction wirings 21A to 21F. As a result, the other ends of the two adjacent row direction wirings 21P are electrically connected to each other via the second electric resistor 62.

In the first electric resistor 61 and the second electric resistor 62, the other end of each row direction wiring 21X is electrically connected to the first shield wiring 51, and the other ends of the two adjacent row direction wirings 21P are connected to each other. It constitutes a short ring that electrically connects to each other.

According to this short ring, the electric charge generated at the other end of the row direction wiring 21A to 21F on the side opposite to one end of the row direction wiring 21A to 21F to which the first lead-out wiring 31A to 31F is connected is the first. Dissipates via the electric resistor 61 and the second electric resistor 62. Therefore, it is possible to suppress the accumulation of electric charges at the other ends of the row direction wirings 21A to 21F. Therefore, when an indicator made of a conductor such as a finger approaches the touch screen 1 and an electrostatic discharge occurs on the touch screen 1, the electrostatic discharge can be easily converged, and the wirings 21A to 21F in the row direction can be easily converged. The increase in the potential can be suppressed, and the increase in the potential difference between the potentials of the row-direction wirings 21A to 21F and the potentials of the column-direction wirings 22A to 22H can be suppressed. As a result, it is possible to prevent the touch screen 1 from causing dielectric breakdown due to static electricity discharge.

FIG. 8 is a top view schematically showing a part of the touch screen of the first embodiment. FIG. 8 is an enlarged view of the portion Q shown in FIG.

As shown in FIG. 8, the touch screen 1 includes a third electric resistor 63 and a fourth electric resistor 64. The third electric resistor 63 and the fourth electric resistor 64 are made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The third electric resistor 63 and the fourth electric resistor 64 are high resistance elements having high electric resistance.

As shown in FIG. 4, the third electric resistor 63 and the fourth electric resistor 64 are placed in the same layer as the layer in which the row direction wirings 22A to 22H and the shield wiring 51U of the second layer are arranged. Be placed.

The third electric resistor 63 straddles the other end of each row direction wiring 22X included in the row direction wirings 22A to 22H and the shield wiring 51U of the second layer provided in the first shield wiring 51. As a result, the other end of each row direction wiring X is electrically connected to the first shield wiring 51 via the third electric resistor 63.

The fourth electric resistor 64 straddles the other ends of the two adjacent row-direction wirings 22P included in the row-direction wirings 22A to 22H. As a result, the other ends of the two adjacent row-direction wirings 22P are electrically connected to each other via the fourth electric resistor 64.

In the third electric resistor 63 and the fourth electric resistor 64, the other end of each row direction wiring 22X is electrically connected to the first shield wiring 51, and the other end of the two adjacent row direction wirings 22P. Construct a short ring that electrically connects the two to each other.

According to this short ring, the electric charge generated at the other end of the row direction wiring 22A to 22H on the side opposite to one end of the row direction wiring 22A to 22H to which the second lead-out wiring 32A to 32H is connected is the third. Dissipates via the electrical resistor 63 and the fourth electrical resistor 64. Therefore, it is possible to suppress the accumulation of electric charges at the other ends of the row direction wirings 22A to 22H. Therefore, when an indicator made of a conductor such as a finger approaches the touch screen 1 and an electrostatic discharge occurs on the touch screen 1, the electrostatic discharge can be easily converged, and the row direction wirings 22A to 22H can be easily converged. The increase in the potential can be suppressed, and the increase in the potential difference between the potentials of the row-direction wirings 21A to 21F and the potentials of the column-direction wirings 22A to 22H can be suppressed. As a result, it is possible to prevent the touch screen 1 from causing dielectric breakdown due to static electricity discharge.

The column direction wirings 22A to 22H include the column direction wiring 22H closest to one end of the row direction wirings 21A to 21F, as shown in FIG.

The row direction wiring 22H includes a linear portion 101 and a plurality of protruding portions 102. The plurality of protrusions 102 include protrusions 102A, 102B, 102C, 102D and 102E.

The linear portion 101 extends in the row direction Y. The plurality of protrusions 102 extend in the row direction X. The plurality of projecting portions 102 project from the linear portion 101 toward the second shield wiring 52.

The row direction wirings 21A to 21F and the protrusions 102A to 102E are arranged so that one row direction wiring and one protrusion are alternately arranged when viewed in a plan view from the thickness direction of the touch screen 1. ..

FIG. 9 is a top view schematically showing a part of the touch screen of the first embodiment. FIG. 9 is an enlarged view of the portion R shown in FIG.

The touch screen 1 includes a fifth electrical resistor 65 and a sixth electrical resistor 66, as shown in FIG. The fifth electric resistor 65 and the sixth electric resistor 66 are made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The fifth electric resistor 65 and the sixth electric resistor 66 are high resistance elements having high electric resistance.

As shown in FIG. 5, the fifth electric resistor 65 and the sixth electric resistor 66 are placed in the same layer as the layer in which the row direction wirings 22A to 22H and the shield wiring 52U of the second layer are arranged. Be placed.

The fifth electric resistor 65 straddles each of the protrusions 102X included in the protrusions 102A to 102E and the shield wiring 52U of the second layer provided in the second shield wiring 52. As a result, each protrusion 102X is electrically connected to the second shield wiring 52 via the fifth electric resistor 65.

The sixth electric resistor 66 straddles two adjacent protrusions 102P included in the protrusions 102A to 102E. As a result, the two adjacent protrusions 102P are electrically connected to each other via the sixth electric resistor 66.

The fifth electric resistor 65 and the sixth electric resistor 66 are short-circuited by electrically connecting each protrusion 102X to the second shield wiring 52 and electrically connecting two adjacent protrusions 102P to each other. Make up the ring.

According to this short ring, the electric charge generated in the row direction wiring 22H is dissipated via the fifth electric resistor 65 and the sixth electric resistor 66. Therefore, it is possible to suppress the accumulation of electric charges in the row direction wiring 22H. Therefore, when an indicator made of a conductor such as a finger approaches the touch screen 1 and an electrostatic discharge occurs on the touch screen 1, the electrostatic discharge can be easily converged, and the potential of the row direction wiring 22H can be converged. The increase can be suppressed, and the increase in the potential difference between the potentials of the row direction wirings 21A to 21F and the potentials of the column direction wirings 22H can be reduced. As a result, it is possible to prevent the touch screen 1 from causing dielectric breakdown due to static electricity discharge.

1.6 Connection between the Shielded Wiring of the First Layer and the Shielded Wiring of the Second Layer FIG. 10 is a top view schematically showing the terminals provided in the touch screen of the first embodiment. FIG. 11 is a cross-sectional view schematically showing a terminal provided in the touch X-lean of the first embodiment. FIG. 11 illustrates a cross section at the position of the cutting line EE drawn in FIG.

The terminal portion 41 includes terminals 111 as shown in FIGS. 10 and 11. The terminal portion 41 also includes a plurality of terminals other than the terminals 111 shown in FIGS. 10 and 11.

The shielded wiring 51L of the first layer and the shielded wiring 51U of the second layer are drawn into the terminal 111. Further, the shielded wiring 51L of the first layer and the shielded wiring 51U of the second layer are electrically connected to each other at the terminal 111. The shielded wiring 51L of the first layer and the shielded wiring 51U of the second layer are electrically connected to each other via a mounting member such as a flexible printed circuit board (FPC). The terminal portion 41 has a contact hole CH.

By electrically connecting the shielded wiring 51L of the first layer and the shielded wiring 51U of the second layer to each other, an indicator made of a conductor such as a finger approaches the touch screen 1 and is charged with static electricity on the touch screen 1. When a discharge occurs, it is possible to suppress an increase in the potential difference between the potential of the shielded wiring 51L of the first layer and the potential of the shielded wiring 51U of the second layer. As a result, it is possible to prevent the touch screen 1 from causing dielectric breakdown due to static electricity discharge.

1.7 Plane shape of row direction wiring and column direction wiring FIG. 12 is a plan view schematically illustrating row direction wiring and column direction wiring provided in the touch screen of the first embodiment.

Each row direction wiring 21X has a mesh-like planar shape as shown in FIG. Each row direction wiring 21X includes a first metal wiring 121 and a second metal wiring 122. The first metal wiring 121 and the second metal wiring 122 are line symmetric with respect to the axis of symmetry extending in the row direction X. Each of the first metal wiring 121 and the second metal wiring 122 has a zigzag pattern having a unit structure repeatedly arranged in the row direction X. Each of the first metal wiring 121 and the second metal wiring 122 includes a first inclined portion 151 and a first parallel portion 161. The first inclined portion 151 extends in the inclined direction from the row direction X. The inclination angle formed by the first inclined portion 151 and the row direction X is 45 °. The first parallel portion 161 extends in a direction parallel to the row direction X. The first parallel portion 161 is connected to the first inclined portion 151.

Further, each row direction wiring 22X has a mesh-like planar shape as shown in FIG. Each row direction wiring 22X includes a third metal wiring 123 and a fourth metal wiring 124. The third metal wiring 123 and the fourth metal wiring 124 are line symmetric with respect to the axis of symmetry extending in the column direction Y. Each of the third metal wiring 123 and the fourth metal wiring 124 has a zigzag pattern having a unit structure repeatedly arranged in the column direction Y. Each of the third metal wiring 123 and the fourth metal wiring 124 includes a second inclined portion 152 and a second parallel portion 162. The second inclined portion 152 extends in the inclined direction from the row direction Y. The inclination angle formed by the second inclined portion 152 and the row direction Y is 45 °. The second parallel portion 162 extends in a direction parallel to the column direction Y. The second parallel portion 162 is connected to the second inclined portion 152.

The wiring widths of the first metal wiring 121, the second metal wiring 122, the third metal wiring 123, and the fourth metal wiring 124 are determined according to the application of the touch screen 1. The mesh spacing of each row direction wiring 21X and each column direction wiring 22X is also determined according to the application of the touch screen 1.

The first metal wiring 121, the second metal wiring 122, the third metal wiring 123, and the fourth metal wiring 124 are made of metal. The metal may be either a pure metal or an alloy. The metal is aluminum, copper, chromium, silver or the like.

Since each row direction wiring 21X and each column direction wiring 22X has a mesh-like planar shape, the detectable area D has a wider area than the row direction wiring 21A to 21F and the column direction wiring 22A to 22H, which occupy only a small area. Can be covered.

Each row direction wiring 21X and each column direction wiring 22X may have a plane shape other than the mesh-like plane shape shown in FIG.

1.8 Laminated structure of row direction wiring, column direction wiring and shield wiring Each row direction wiring 21X includes a first oxide semiconductor film 171 and a first metal film 181 as shown in FIG. The first oxide semiconductor film 171 is made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The first metal film 181 is made of metal. The metal may be either a pure metal or an alloy. A part of the first oxide semiconductor film 171 is made into a conductor by irradiating with ultraviolet rays. The first metal film 181 comes into direct contact with the first oxide semiconductor film 171. As a result, even when the first metal film 181 is composed of a plurality of parts separated from each other as described below, the first oxide semiconductor film in which the conduction between the plurality of parts is made into a conductor is formed. It can be secured by a part of 171.

As shown in FIG. 4, each column direction wiring 22X includes a second oxide semiconductor film 172 and a second metal film 182. The second oxide semiconductor film 172 is made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The second metal film 182 is made of metal. The metal may be either a pure metal or an alloy. A part of the second oxide semiconductor film 172 is made into a conductor by irradiating with ultraviolet rays. The second metal film 182 comes into direct contact with the second oxide semiconductor film 172. As a result, even when the second metal film 182 is composed of a plurality of parts separated from each other as described below, the second oxide semiconductor film in which the conduction between the plurality of parts is made into a conductor is formed. It can be secured by a part of 172.

The first shielded wiring 51 includes a third oxide semiconductor film 173 and a third metal film 183, as shown in FIGS. 3 and 4. The third oxide semiconductor film 173 is made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The third metal film 183 is made of metal. The metal may be either a pure metal or an alloy. The third metal film 183 comes into direct contact with the third oxide semiconductor film 173.

The second shielded wiring 52 includes a fourth oxide semiconductor film 174 and a fourth metal film 184, as shown in FIGS. 5 and 6. The fourth oxide semiconductor film 174 is made of an oxide semiconductor. The oxide semiconductor is In-Ga-Zn-O or the like. The fourth metal film 184 is made of metal. The metal may be either a pure metal or an alloy. The fourth metal film 184 comes into direct contact with the fourth oxide semiconductor film 174.

13 and 14 are front views schematically showing a part of the liquid crystal display device including the touch screen of the first embodiment. FIG. 14 is an enlarged view of the portion S shown in FIG. FIG. 15 is a cross-sectional view schematically showing a part of a liquid crystal display device including the touch screen of the first embodiment. FIG. 15 illustrates a cross section at the position of the cutting line FF drawn in FIG.

As shown in FIG. 15, the liquid crystal display device 201 includes a liquid crystal display panel 211, an adhesive material 212, and a touch screen 1. The liquid crystal display panel 211 is superposed on the touch screen 1 and is joined to the touch screen 1 by the adhesive material 212.

The liquid crystal display panel 211 includes a black matrix 231 provided on the color filter substrate 221 as shown in FIGS. 13, 14 and 15.

The first oxide semiconductor film 171 provided in each row direction wiring 21X has a first region 241 and a touch, which are shown in FIG. 14 and overlap with the black matrix 231 when viewed in a plan view from the thickness direction of the touch screen 1. It is arranged so as to straddle a second region 242 that does not overlap with the black matrix 231 when viewed in a plan view from the thickness direction of the screen 1. The portion arranged in the second region 242 provided in the first oxide semiconductor film 171 is made into a conductor by irradiating with ultraviolet rays.

The first metal film 181 provided in each row direction wiring 21X is arranged in the first region 241 and is laminated with the first oxide semiconductor film 171. However, the first metal film 181 is not arranged in the second region 242. Therefore, the first metal film 181 has a plurality of portions separated from each other. The plurality of portions separated from each other are electrically connected to each other via the conductive portions arranged in the second region 242 provided in the first oxide semiconductor film 171.

Therefore, each row direction wiring 21X is a two-layer wiring including the laminated first oxide semiconductor film 171 and the first metal film 181 in the first region 241, and in the second region 242, each row direction wiring 21X is a two-layer wiring. This is a single-layer wiring composed of a portion in which the first oxide semiconductor film 171 is made into a conductor.

The second oxide semiconductor film 172 provided in each row direction wiring 22X has a third region 243 and a third region 243 which overlaps with the black matrix 231 when viewed in a plan view from the thickness direction of the touch screen 1, which is shown in FIG. It is arranged so as to straddle a fourth region 244 that does not overlap with the black matrix 231 when viewed in a plan view from the thickness direction of the touch screen 1. The portion of the second oxide semiconductor film 172 provided in the fourth region 244 is made into a conductor by irradiating with ultraviolet rays.

The second metal film 182 provided in each row direction wiring 22X is arranged in the third region 243 and is laminated with the second oxide semiconductor film 172. However, the second metal film 182 is not arranged in the fourth region 244. Therefore, the second metal film 182 has a plurality of portions separated from each other. The plurality of portions separated from each other are electrically connected to each other via the conductive portions arranged in the fourth region 244 provided in the second oxide semiconductor film 172.

Therefore, each row direction wiring 22X is a two-layer wiring including the laminated second oxide semiconductor film 172 and the second metal film 182 in the third region 243, and is a two-layer wiring in the fourth region 244. , A single-layer wiring composed of a portion in which the second oxide semiconductor film 172 is made into a conductor.

As a result, the first metal film 181 and the second metal film 182 that block light are not arranged in the region where the pixel openings of the liquid crystal display panel 211 are arranged. Therefore, the ratio indicating the area covered by the elements provided in the touch screen 1 to the area occupied by the pixels of the liquid crystal display panel 211 is substantially uniform for the plurality of pixels of the liquid crystal display panel 211. Therefore, it is possible to suppress the occurrence of the moire phenomenon due to the ratio not being uniform for the plurality of pixels of the liquid crystal display panel 211.

Further, since a part of the first oxide semiconductor film 171 and the second oxide semiconductor film 172 is made into a conductor, the first metal film 181 and the first metal film 181 are formed in the second region 242 and the fourth region 244. It is possible to suppress an increase in wiring resistance due to the fact that the second metal film 182 is not arranged.

1.9 Manufacturing method of touch screen In the following, a manufacturing method of the touch screen 1 will be described by taking the case where the oxide semiconductor is In—Ga—Zn—O as an example.

16 to 23 are cross-sectional views schematically illustrating an intermediate product produced in the process of manufacturing the touch screen of the first embodiment.

When the touch screen 1 is manufactured, first, as shown in FIG. 16, an inorganic film 251 made of an insulator portion 261 is formed on the entire surface of one main surface 11U of the transparent substrate 11. The inorganic film 251 is formed by sputtering In-Ga-Zn-O using a sputtering device. The inorganic film 251 is formed under the condition that the inorganic film 251 serves as an insulator. For example, when the inorganic film 251 is formed by sputtering In-Ga-Zn-O, the partial pressure of the oxygen gas with respect to the partial pressure of the argon gas containing argon (Ar) gas and oxygen (O ₂ ) gas In-Ga-Zn-O is sputtering using a sputtering gas having a ratio of about 0.2. The inorganic film 251 formed has, for example, a film thickness of about 80 nm.

The inorganic film 251 made of the insulator part 261 is not directly formed, the inorganic film made of the semiconductor part is formed, and the semiconductor part is converted into the insulator part 261, so that the inorganic film 251 made of the insulator part 261 is formed. May be formed. In this case, as shown in FIG. 17, an inorganic film 251A made of a semiconductor portion 262 is formed on the entire surface of one main surface 11U of the transparent substrate 11. The semiconductor portion 262 has a specific resistance larger than 1 × 10 ^-2 Ω · cm and smaller than 1 × 10 ⁶ Ω · cm, preferably a ratio of 1 × 10 ² Ω · cm or more and 1 × 10 ⁵ Ω · cm or less. Have resistance. The inorganic film 251A is formed under the condition that the inorganic film 251A becomes a semiconductor. Subsequently, the semiconductor portion 262 is converted into the insulator portion 261 to form the inorganic film 251 provided with the insulator portion 261. When the semiconductor section 262 is converted to the insulator section 261, as shown in FIG. 18, an N ₂ O plasma-treated PT using nitrous oxide (N ₂ O) gas is applied to the semiconductor section 262. The semiconductor portion 262 is made into an insulator.

After the inorganic film 251 made of the insulator portion 261 is formed, the metal film 252 is formed on the inorganic film 251 as shown in FIG. The metal film 252 is formed by sputtering a metal using a sputtering device.

Subsequently, the formed inorganic film 251 and metal film 252 are patterned. As a result, the first oxide semiconductor film 171 is obtained from the inorganic film 251 and the first metal film 181 is obtained from the metal film 252, which is composed of the first oxide semiconductor film 171 and the first metal film 181. Each row direction wiring 21X is formed. The patterning of the inorganic film 251 and the metal film 252 is performed through a photoengraving process. When the patterning of the inorganic film 251 and the metal film 252 is performed through the photoengraving process, the resist pattern 253 is formed on the metal film 252 as shown in FIG. Further, an etching process step of removing the portion of the inorganic film 251 and the metal film 252 that is not covered by the resist pattern 253 is executed. In addition, the resist pattern 253 is peeled off. As a result, a wiring pattern of each row direction wiring 21X is formed.

Subsequently, as shown in FIG. 21, an interlayer insulating film 13 is formed on the entire surface of one main surface 11U of the transparent substrate 11 so as to be superimposed on the formed row direction wirings 21X.

Subsequently, as shown in FIG. 22, each row direction wiring 22X composed of the second oxide semiconductor film 172 and the second metal film 182 is formed on the interlayer insulating film 13. Each column direction wiring 22X is formed in the same manner as each row direction wiring 21X.

Subsequently, as shown in FIG. 22, a protective film 15 is formed on the interlayer insulating film 13 so as to be superimposed on the formed row-direction wirings 22X.

Subsequently, the mounting member described above is mounted on the terminal portion 41, and the contact hole CH for electrical connection shown in FIGS. 10 and 11 is formed.

As a result, the touch screen 1 shown in FIGS. 1 and 2 is obtained. However, in the obtained touch screen 1, the first oxide semiconductor film 171 and the second oxide semiconductor film 172 are insulators.

Subsequently, as shown in FIG. 23, the obtained touch screen 1 is irradiated with ultraviolet rays and UV rays. Ultraviolet UV is irradiated by an ultraviolet lamp, an ultraviolet LED or an ultraviolet laser. Ultraviolet UV is applied to the detectable area D. The detectable area D becomes a display area when the touch screen 1 is mounted on the liquid crystal display panel 211 and the liquid crystal display device 201 is configured.

The irradiated ultraviolet UV UV travels from the back surface of the liquid crystal display panel 211 through the liquid crystal display panel 211 and the touch screen 1 toward the surface of the touch screen 1, and on the way, the first oxide semiconductor film 171 and the first oxide semiconductor film 171 and the first. The oxide semiconductor film 172 of No. 2 is irradiated. At this time, in the first region 241 and the third region 243 that overlap with the black matrix 231 when viewed in a plan view from the thickness direction of the touch screen 1, the first oxide semiconductor film 171 and the second oxide The semiconductor film 172 is not irradiated with ultraviolet UV. On the other hand, in the second region 242 and the fourth region 244 that do not overlap with the black matrix 231 when viewed in a plan view from the thickness direction of the touch screen 1, the first oxide semiconductor film 171 and the second oxide The semiconductor film 172 is irradiated with ultraviolet UV.

Therefore, a part of the first oxide semiconductor film 171 and a part of the second oxide semiconductor film 172 are irradiated with ultraviolet rays and UV rays. As a result, electron carriers are excited in a part of the first oxide semiconductor film 171 and a part of the second oxide semiconductor film 172 to excite a part of the first oxide semiconductor film 171 and the second oxidation. The specific resistance value of a part of the product semiconductor film 172 decreases, the conductivity of a part of the first oxide semiconductor film 171 and a part of the second oxide semiconductor film 172 improves, and the first oxide A part of the semiconductor film 171 and a part of the second oxide semiconductor film 172 are made into conductors. As a result, the wiring resistance of each row direction wiring 21X and each column direction wiring 22X can be reduced. Further, in the first region 241 and the third region 243, each row direction wiring 21X is a single-layer wiring made of the first oxide semiconductor film 171 and each column direction wiring 22X is a second oxide semiconductor film. Although it is a single-layer wiring composed of 172, it can be detected that the touch is also performed in the first region 241 and the third region 243. The residual portion of the first oxide semiconductor film 171 and the residual portion of the second oxide semiconductor film 172 are not irradiated with ultraviolet UV rays. As a result, the residual portion of the first oxide semiconductor film 171 and the residual portion of the second oxide semiconductor film 172 remain an insulator.

As a result, the row direction wirings 21A to 21F and the column direction wirings 22A to 22H having a small wiring resistance can be obtained in the detectable area D of the touch screen 1. Further, the other ends of the row direction wirings 21A to 21F and the column direction wirings 22A to 22H and the first shield wiring 51 are electrically connected to each other by a high resistance element to form a short ring, thereby suppressing dielectric breakdown due to static electricity. can do.

1.10 Touch detection device FIG. 24 is a block diagram schematically illustrating an electronic device including the touch screen of the first embodiment.

The electronic device 301 illustrated in FIG. 24 includes a liquid crystal display device 201 and an electronic processing unit 312. The liquid crystal display device 201 includes a touch panel 321 and a liquid crystal display panel 322. The touch panel 321 includes a touch screen 1 and a touch position detection circuit 332. The liquid crystal display panel 322 is superposed on the touch screen 1. The touch position detection circuit 332 detects the touch position on the touch screen 1 touched by the indicator based on the capacitance between the row direction wirings 21A to 21F and the column direction wirings 22A to 22H. The electronic processing unit 312 electronically processes the detected touch position.

In the present invention, the embodiments can be appropriately modified or omitted within the scope of the invention.

Although the present invention has been described in detail, the above description is exemplary in all aspects and the invention is not limited thereto. It is understood that a myriad of variations not illustrated can be envisioned without departing from the scope of the invention.

1 Touch screen, 21A, 21B, 21C, 21D, 21E, 21F Row direction wiring, 22A, 22B, 22C, 22D, 22E, 22F, 22G, 22H Column direction wiring, 31A, 31B, 31C, 31D, 31E, 31F No. 1 lead-out wiring, 32A, 32B, 32C, 32D, 32E, 32F, 32G, 32H 2nd lead-out wiring, 51 1st shield wiring, 52 2nd shield wiring, 51L 1st layer shield wiring, 51U , 52U 2nd layer shielded wiring, 61 1st electric resistor, 62 2nd electrical resistor, 63 3rd electrical resistor, 64 4th electrical resistor, 65 5th electrical resistor, 66 6th electric resistor, 101 linear part, 102A, 102B, 102C, 102D, 102E projecting part, 111 terminal, 171 first oxide semiconductor film, 172 second oxide semiconductor film, 181 first Metal film, 182 second metal film, 201 liquid crystal display device, 231 black matrix, 301 electronic device, 312 electronic processing unit, 321 touch panel, 322 liquid crystal display panel, 332 touch position detection circuit.

Claims (11)

A plurality of first wires extending in the first direction,
A plurality of second wirings extending in a second direction different from the first direction and intersecting the plurality of first wirings when viewed in a plan view.
A plurality of first lead-out wirings connected to one end of each of the plurality of first wirings,
A plurality of second lead-out wirings connected to one end of each of the plurality of second wirings,
When viewed in a plan view, the plurality of first wirings, the plurality of second wirings, the plurality of first lead-out wirings, and shield wirings surrounding the plurality of second lead-out wirings.
A first electric resistor made of an oxide semiconductor and straddling the other end of each first wiring included in the plurality of first wirings and the shield wiring.
A second electric resistor made of an oxide semiconductor and straddling the other ends of two adjacent first wires included in the plurality of first wires.
A third electric resistor made of an oxide semiconductor and straddling the other end of each second wiring included in the plurality of second wirings and the shield wiring.
A fourth electrical resistor made of an oxide semiconductor and straddling the other ends of two adjacent second wirings included in the plurality of second wirings.
Touch screen with. The shielded wiring is the first shielded wiring.
A second shielded wire that branches off from the first shielded wire and is arranged along one end of the plurality of first wires is further provided.
The plurality of second wires include a second wire closest to one end of the plurality of first wires.
The second wiring closest to one end of the plurality of first wirings includes a linear portion extending in the second direction and a plurality of protrusions protruding from the linear portion toward the second shield wiring. And with
The plurality of first wirings and the plurality of protrusions are arranged so that one first wiring and one protrusion are alternately arranged when viewed in a plan view.
A fifth electrical resistor made of an oxide semiconductor and straddling each of the protruding portions included in the plurality of protruding portions and the second shield wiring, and two adjacent portions made of an oxide semiconductor and included in the plurality of protruding portions. The touch screen according to claim 1, further comprising a sixth electrical resistor straddling the protruding portion of the above. Further equipped with a terminal part
The plurality of first lead-out wirings and the plurality of second lead-out wirings are drawn out to the terminal portion.
The shielded wiring is arranged in the same layer as the shielded wiring of the first layer arranged in the same layer as the layer in which the plurality of first wirings are arranged and the layer in which the plurality of second wirings are arranged. The touch screen according to claim 1 or 2, further comprising a second layer of shielded wiring that is electrically connected to the first layer of shielded wiring at the terminal. Each of the first wirings included in the plurality of first wirings is a first oxide semiconductor film made of an oxide semiconductor and a first one made of a metal and in direct contact with the first oxide semiconductor film. With a metal film,
Each of the second wirings included in the plurality of second wirings includes a second oxide semiconductor film made of an oxide semiconductor and a second metal film that directly contacts the second oxide semiconductor film. A touch screen according to any one of claims 1 to 3. With any of the touch screens of claims 1 to 4,
A touch position detection circuit that detects a touch position on the touch screen touched by an indicator based on the capacitance between the plurality of first wires and the plurality of second wires.
Touch panel with. The touch panel of claim 5 and
A display panel to which the touch screen is mounted and
A display device comprising. The touch screen of claim 4 and
A display panel to which the touch screen is attached and having a black matrix,
With
The first oxide semiconductor film is arranged so as to straddle a first region that overlaps the black matrix when viewed in a plan view and a second region that does not overlap the black matrix when viewed in a plan view.
The first metal film is arranged in the first region and laminated with the first oxide semiconductor film, and is not arranged in the second region.
The second oxide semiconductor film is arranged across a third region that overlaps the black matrix when viewed in a plan view and a fourth region that does not overlap the black matrix when viewed in a plan view.
A display device in which the second metal film is arranged in the third region, laminated with the second oxide semiconductor film, and not arranged in the fourth region. The touch panel of claim 5 and
An electronic processing unit that electronically processes the touch position,
Electronic equipment equipped with. a) A plurality of first wirings having a first oxide semiconductor film made of an oxide semiconductor and extending in the first direction,
A plurality of second wirings having a second oxide semiconductor film made of an oxide semiconductor and extending in a second direction different from the first direction,
A plurality of first lead-out wirings connected to one end of each of the plurality of first wirings,
A plurality of second lead-out wirings connected to one end of each of the plurality of second wirings,
When viewed in a plan view, the plurality of first wirings, the plurality of second wirings, the plurality of first lead-out wirings, and shield wirings surrounding the plurality of second lead-out wirings.
A first electric resistor made of an oxide semiconductor and straddling the other end of each first wiring included in the plurality of first wirings and the shield wiring.
A second electric resistor made of an oxide semiconductor and straddling the other ends of two adjacent first wires included in the plurality of first wires.
A third electric resistor made of an oxide semiconductor and straddling the other end of each of the second wirings included in the plurality of second wirings.
A fourth electrical resistor made of an oxide semiconductor and straddling the other ends of two adjacent second wirings included in the plurality of second wirings.
And the process of preparing an intermediate touch screen with
b) A step of irradiating the first oxide semiconductor film and the second oxide semiconductor film with ultraviolet rays to improve the conductivity of the first oxide semiconductor film and the second oxide semiconductor film. ,
A method of manufacturing a touch screen. In step b),
A part of the first oxide semiconductor film and a part of the second oxide semiconductor film are irradiated with the ultraviolet rays, and a part of the first oxide semiconductor film and the second oxide semiconductor film are irradiated. Improves the conductivity of some parts of
The method for manufacturing a touch screen according to claim 9, wherein the residual portion of the first oxide semiconductor film and the residual portion of the second oxide semiconductor film are not irradiated with the ultraviolet rays. The step b) is the method for manufacturing a touch screen according to claim 9 or 10, wherein the ultraviolet rays are irradiated by an ultraviolet lamp, an ultraviolet LED, or an ultraviolet laser.

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