JP2020109351A - Heating device - Google Patents

Abstract

To provide a heating device which has excellent uniformity of temperature distribution and stability of cleanliness, and which can easily correspond to the change at least in a width direction size of an object to be heated.SOLUTION: A heating device 100 includes: a plurality of electric heaters 11 which are heat generation means provided at a plurality of wall bodies 10L, 10R for heating oppositely arranged with a distance; a plurality of heat radiation members 12 arranged in a shelf shape with a distance vertically in opposing regions of the plurality of wall bodies 10L, 10R for heating; a storage space 14 for an object 13 to be heated provided between heat radiation members 12 adjacent to each other vertically; and holding means 30 capable of holding the object 13 to be heated stored in the storage space 14 in a substantially horizontal posture and capable of changing a holding range with respect to the object 13 to be heated. The holding means 30 has an expansion/contraction mechanism 40 capable of changing an interval of a plurality of supporting bar materials 17L, 17R, and the expansion/contraction mechanism 40 has a movement mechanism 50 for contracting/expanding an interval of a plurality of support pillars 15L, 15R and the like.SELECTED DRAWING: Figure 1

Description

The present invention relates to a heating device used for heat treatment of various plate members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates, which are constituent members of liquid crystal display panels and plasma display panels.

As a device for heat-treating a glass substrate which is a component such as a liquid crystal display panel, a heated gas circulation type clean oven has been conventionally used (for example, refer to Patent Document 1). This clean oven accommodates an object to be heat-treated, such as a glass substrate, in a constant temperature bath, and heats the object to be heated using a heating gas circulated by a fan in the constant temperature bath.

However, in the case of a heated gas circulation type clean oven, it is easy to adopt a structure in which objects to be heated such as glass substrates are stored in multiple stages, so while it is excellent in space efficiency, it is difficult to make the heating temperature distribution uniform. Therefore, the cleanliness is likely to be deteriorated by stirring the heated gas. When the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of heating gas.

In order to solve such a problem, a thin layer of far-infrared radiating ceramics is coated on both sides of a heat dissipation plate having a heating element inside, and a double-sided heating type far infrared that radiates far infrared rays from both sides by heating the heat dissipation plate A large number of shelf heaters consisting of panel heaters are arranged in the furnace body in multiple stages at regular intervals in the vertical direction, and a heating furnace has been developed in which each space formed between these shelf heaters is a drying chamber. (See, for example, Patent Document 2).

In the case of the heating furnace described in Patent Document 2, since a large number of shelf-like heaters composed of double-sided heating type far infrared panel heaters are arranged, each space portion (drying chamber) formed between these shelf-like heaters. Is excellent in that it can be efficiently heated.

However, in this heating furnace, the heat generated from a large number of vertically arranged shelf-shaped heaters tends to rise in the heating furnace and collect in the region near the ceiling wall in the furnace. The temperature of the upper region is higher than the temperature of the lower region inside the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region inside the furnace and the lower region inside the furnace.

Therefore, the present applicant has proposed a heating device having excellent temperature distribution uniformity and cleanliness stability (see, for example, Patent Document 3). This heating device includes a plurality of heating wall bodies arranged facing each other at a distance in a space surrounded by a heat insulating material, a heat generating means provided on the heating wall body, and a distance between the heating wall body. A plurality of heat transfer wall bodies that are arranged apart from each other, a plurality of heat radiating members that are arranged in a shelf shape between the heat transfer wall bodies, and a cover member that is provided between the heat radiating members that are vertically adjacent to each other. It is provided with a storage space for heated objects.

JP 2001-56141 A JP 2001-317872 A JP, 2005-352306, A

The heating device described in Patent Document 3 is excellent in the uniformity of temperature distribution and the stability of cleanliness, but the size of the object to be heated that can be accommodated in the accommodation space is limited, so that it deviates from the predetermined size. In reality, it is difficult to store the heated object in the storage space.

That is, the size (width, thickness) of the object to be heated that can be heat-treated in the heating device described in Patent Document 3 is the same as that of the plurality of heat transfer wall bodies arranged with a distance between the plurality of heating wall bodies. Since it is determined by the facing interval of the formed horizontal holding grooves and the groove width in the vertical direction, the size of the object to be heated whose width direction size is less than or exceeds the facing interval, and the groove width in the vertical direction. Objects to be heated that exceed the amount cannot be stored in the storage space.

Therefore, when the size (width, thickness) of the object to be heated is changed, the arrangement intervals of the plurality of heat transfer wall bodies are changed to adjust the facing intervals of the holding grooves, or the holding grooves are changed. It is necessary to change the vertical groove width. Therefore, it is difficult to quickly respond to the size change of the object to be heated.

Therefore, the problem to be solved by the present invention is to provide a heating device which is excellent in uniformity of temperature distribution and stability of cleanliness and which can easily cope with at least a change in size in the width direction of an object to be heated. It is in.

The heating device of the present invention includes a plurality of heating wall bodies arranged facing each other at a distance, a heat generating means provided in the heating wall body, and a plurality of heating wall bodies facing each other in a vertical direction. A plurality of heat radiating members arranged in a shelf shape with a distance therebetween, an accommodation space for the object to be heated provided between the plurality of heat radiating members, and an object to be heated accommodated in the accommodation space are predetermined. Holding means capable of holding the object to be heated and capable of changing the holding range of the object to be heated, and as the holding means, a plurality of supporting members on which the object to be heated can be placed, and a gap between the supporting members. And a supporting member on the left side and a right side supporting bar member arranged in a state of horizontally penetrating each of two left and right regions separated in the width direction in the accommodation space in the depth direction. Support bar material, the expansion and contraction mechanism, the front portion of the left side support bar member protruding from the left front surface, the rear surface of the accommodation space, respectively, the left front side support post attached to the back portion, the left rear side Side strut, right front side of the accommodation space, front part of the right side supporting bar material protruding from the back side, respectively, right front side strut attached to the back side, right back side strut, and the left side, respectively. It is a moving mechanism that expands or contracts a space between the front-side support pillar and the left back-side support pillar, and the right front-side support pillar and the right-back-side support pillar.

With such a structure, the accommodation space of the object to be heated has a structure in which the heating walls are arranged on the left and right, and the heat radiating members are arranged on the upper and lower sides. Since it is heated by the heat radiated from the heated left and right heating walls and the heat radiated up and down from the heat radiating member that generates heat due to the heat conduction from these heating walls, the inside of each accommodation space It is evenly heated and has excellent temperature distribution uniformity.

The heat generating means is provided only on the heating wall body, and each accommodation space is partitioned by the heating wall bodies located on the left and right sides and the heat radiating members located on the upper and lower sides. Not only is the uniformity of temperature distribution excellent, but the heat accumulation phenomenon and overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not stirred or circulated by the fan, the cleanliness stability is excellent and the heated object does not move due to the gas flow.

Further, since the holding range of the object to be heated by the holding means can be changed according to the width of the object to be heated, it is possible to easily cope with at least the change in size in the width direction of the object to be heated.

Here, it is desirable to provide, as the holding means, a plurality of support members on which an object to be heated can be placed and an expansion/contraction mechanism capable of changing the interval between the support members. With such a configuration, the object to be heated can be held in a state of being supported by the supporting member, so that it is possible to easily cope with the case where the thickness of the object to be heated is changed.

Further, in the heating device of the present invention, the support member includes a left-side support bar member and a right-side support bar that are arranged in a state of horizontally penetrating in the depth direction into two left and right regions separated in the width direction in the accommodation space. The expansion/contraction mechanism is a bar, and the expansion/contraction mechanism is a left front support column and a left rear support column that are respectively attached to the front portion and the rear portion of the left support bar member protruding from the left front surface and the rear surface of the accommodation space. And a right front side of the accommodation space, a front portion of the right side support bar member protruding from the back side, respectively, a right front side support column, a right rear side support column, and a left front side support It is a moving mechanism that expands or contracts a space between the support pillar and the left rear surface support pillar, and the right front surface support pillar and the right rear surface support pillar. With such a configuration, it is possible to change the distance between the support bar members only by expanding and contracting the distance between the plurality of columns by the moving mechanism. It is possible to form an adjusting means having excellent properties.

Further, it is possible to provide an operating mechanism capable of changing the holding range of the holding means from outside the facing regions of the plurality of heating walls. With such a configuration, it is possible to change the holding area of the holding means from the outside of the accommodation space of the object to be heated, so that the operability is further improved.

On the other hand, it is also possible to provide an exhaust path capable of discharging the gas in the accommodation space and an air supply path capable of introducing the gas into the accommodation space. With such a configuration, the air in the storage space can be replaced with an inert gas or a specific gas, so that the inert gas can prevent the object to be heated from oxidizing or use the reaction with the specific gas. Then, the object to be heated can be subjected to surface treatment.

According to the present invention, it is possible to provide a heating device which is excellent in uniformity of temperature distribution and stability of cleanliness and which can promptly deal with at least a change in size in the width direction of an object to be heated.

It is a front view showing a heating device which is an embodiment of the present invention. It is a front view which abbreviate|omits a part of heating device shown in FIG. It is a right view of the heating device shown in FIG. It is sectional drawing in the AA line in FIG. It is sectional drawing in the BB line in FIG. It is a rear view of the heating device shown in FIG.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6. As shown in FIGS. 1 to 6, the heating device 100 includes a plurality of heating walls 10L and 10R arranged facing each other with a distance, and a plurality of heating units provided in the heating walls 10L and 10R. Of the electric heater 11, the plurality of heat radiating members 12 arranged in a shelf shape in the facing region of the plurality of heating wall bodies 10L and 10R with a vertical distance therebetween, and the heat radiating members 12 adjacent in the vertical direction. The holding space 14 for holding the article to be heated 13 and the article to be heated 13 accommodated in the accommodation space 14 can be held in a substantially horizontal posture, and the holding range of the article to be heated 13 can be changed. Means 30 and.

The upper and lower ends of the heating walls 10L and 10R are connected by a top plate 19 and a bottom plate 20, respectively, and leg members 21L, 21R, 22L and 22R are attached to the lower surfaces of the heating walls 10L and 10R, respectively. The lower ends of the leg members 21L, 21R, 22L, 22R are fixed to the base 23. A plurality of through holes 24 are horizontally formed from the front side to the back side of the heating wall bodies 10L and 10R, and the electric heaters 11 are detachably inserted into the through holes 24, respectively.

In the heating device 100, the heating walls 10L, 10R are made of stainless steel, and the top plate 19, the bottom plate 20, the leg members 21L, 21R, 22L, 22R and the base 23 are the same as the heating walls 10L, 10R. The heat radiation member 12 is made of stainless steel, and the surface of the heat radiation member 12 is black plated. However, since it is not limited to these materials, the heating walls 10L, 10R, the top plate 19, the bottom plate 20, the leg members 21L, 21R, 22L, 22R, the base 23, and the like are made of aluminum or an aluminum alloy (or radiant heat is diffused). It can also be formed of aluminum or aluminum alloy that has been subjected to a dull surface treatment to suppress it. Further, since the surface treatment of the heat radiating member 12 is not limited to black plating, it is possible to employ a surface treatment capable of suppressing the radiant heat from being diffused, for example, a surface treatment having a dull surface treatment.

As the holding means 30, a plurality of support bar members 17L and 17R, which are support members on which the article 13 to be heated can be placed, and a scaling mechanism 40 capable of changing the intervals between the support bar members 17L and 17R are provided. .. The expansion/contraction mechanism 40 includes a plurality of columns 15L, 15R, 16L, 16R for holding the plurality of support bar members 17L, 17R in a substantially horizontal posture, and a moving mechanism for expanding/contracting the intervals between the columns 15L, 15R and the intervals between the columns 16L, 16R. And 50.

The support bar members 17L and 17R are strip-shaped members, and are arranged such that their longitudinal directions are parallel to the depth direction D and their width directions are vertical. That is, the plurality of support bar members 17L are attached to the columns 15L and 16L in a state of horizontally penetrating in the accommodation space 14 in the depth direction D, and similarly, the plurality of support bar members 17R are each accommodated in the accommodation space 14 in the depth direction. It is attached to the pillars 15L and 16R in a state of penetrating horizontally through D.

The locking grooves 15Lt, 16Lt, 15Rt, which are opened in the depth direction D, are provided directly above the mounting portions of the support bar members 17L on the columns 15L and 16L and directly above the mounting portions of the supporting bar members 17R on the columns 15R and 16R, respectively. 16Rt is provided. In addition, a plurality of locking grooves 10Lt, 10Rt are formed at the same height positions as the locking grooves 15Lt, 16Lt, 15Rt, 16Rt on the inner side surfaces (the surfaces facing the accommodation space 14) of the heating wall bodies 10L, 10R. It is formed in the direction D.

The moving mechanism 50 horizontally moves the main sliders 51L and 51R connecting the upper ends of the columns 15L and 16L and the upper ends of the columns 15R and 16R, respectively, and the female screw holes 51La and 51Ra formed in the main sliders 51L and 51R in the horizontal direction. The male screw shaft 52 is rotatably arranged in a threaded manner and penetrates through, and an operation handle 53 attached to one end of the male screw shaft 52. The lower ends of the columns 15L and 16L and the lower ends of the columns 15R and 16R are connected by driven sliders 54L and 54R, respectively, and the support shafts are horizontally penetrated through through holes 54La and 54Ra formed in the driven sliders 54L and 54R. 55 are arranged. The support shaft 55 is arranged parallel to the male screw shaft 52, and both ends of the support shaft 55 are locked to the leg members 21L and 21R, respectively. The driven sliders 54L and 54R are slidable along the longitudinal direction of the support shaft 55.

When the operation handle 53 is normally or reversely rotated about the shaft center 52c of the male screw shaft 52, the driving sliders 51L and 51R are separated and approached to each other along the shaft center 52c direction. The spacing of 15R and the spacing of the pillars 16L and 16R are separated and approached. Along with this, the plurality of support bar members 17L and 17R are spaced apart from each other and approach each other, so that the holding range of the object to be heated 13 is expanded or contracted in the width direction W of the accommodation space 14.

In addition, an exhaust path 26 capable of discharging the gas in the accommodation space 14 and a gas supply path 27 capable of introducing the gas into the accommodation space 14 to the back wall members 25 respectively disposed on the back sides of the plurality of accommodation spaces 14. And are provided. In the heating device 100, the air supply path 27 is arranged below the exhaust path 26 in each back wall member 25, but it is not limited to this, and it may be arranged upside down.

When the heating device 100 is used, the operation handle 53 is rotated according to the lateral width of the object 13 to be heated, the intervals between the columns 15L and 15R and the intervals between the columns 16L and 16R are adjusted, and the left and right side edges of the object 13 to be heated are adjusted. Can be placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges is set so as to be accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt, respectively. .. After that, in each of the accommodation spaces 14, the left and right side edges of the article to be heated 13 are placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges are respectively engaged with the engagement grooves 15Lt, 16Lt and the engagement groove. Since the setting of the object to be heated 13 is completed when it is housed in the inside of 15 Rt and 16 Rt, the heat treatment can be performed according to a predetermined program if the electric heater 11 is energized.

The housing space 14 for the article to be heated 13 has the heating walls 10L and 10R arranged on the left and right, and the heat radiating members 12 arranged on the top and bottom. The inside of each housing space 14 is heated by the heat of the electric heater 11 to the left and right. Since the heat is radiated from the heating wall bodies 10L and 10R and the heat radiated vertically from the heat radiating member 12 that generates heat due to heat conduction from the heating wall bodies, the respective accommodation spaces The inside of 14 is evenly heated and the temperature distribution in the entire heating device 100 is uniform.

The electric heater 11 is provided only on the heating walls 10L and 10R, and each accommodation space 14 is partitioned by the heating walls 10L and 10R located on the left and right of each, and the heat radiating member 12 located on the top and bottom. Therefore, the uniformity of the temperature distribution in each accommodation space 14 is excellent, and the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not stirred or circulated by the fan, the cleanliness stability is excellent, and the object to be heated does not move due to the gas flow.

Further, since the holding range of the object to be heated 13 in the width direction W by the support bar members 17L and 17R can be changed according to the lateral width of the object to be heated 13, at least the width direction size of the object to be heated 13 can be changed. It can be dealt with easily. When the thickness of the article to be heated 13 is excessive, the left and right side edges of the article 13 are placed on the support bars 17L and 17R without being housed in the engagement grooves 15Lt and 16Lt and the engagement grooves 15Rt and 16Rt. It is also possible to perform heat treatment in the state of just.

Further, a plurality of support bar members 17L, 17R are arranged in the accommodation space 14, and a plurality of support columns 15L, 15R, 16L, 16R for supporting the support bar members 17L, 17R in a substantially horizontal posture, and a support column 15L, By providing the moving mechanism 50 that expands and contracts the interval of 15R and the intervals of the columns 16L and 16R, the interval between the support bar members 17L and 17R can be changed only by rotating the operation handle 53, so that the structure is simple. It is also excellent in operability and stability. In addition, as shown in FIG. 2, when heat-treating an object 13a to be heated which is wider than the object 13 to be heated, the interval between the columns 15L and 15R and the intervals between the columns 16L and 16R are set to be widely widened, and the object to be heated is The left and right side edge portions of 13a can be housed in the locking grooves 10Lt, 10Rt of the heating wall bodies 10L, 10R, respectively.

Furthermore, since the operation handle 53 is arranged outside the facing region of the plurality of heating walls 10L and 10R, the holding regions of the holding bar members 17L and 17R can be changed from the outside of the accommodation space 14 for the article 13 to be heated. Is possible and the operability is good. As shown in FIG. 1, the heating device 100 can be used while being housed in the casing 18 having a heat insulating property, but can also be used without the casing 18.

On the other hand, in the heating device 100, by providing the exhaust path 26 and the air supply path 27 that communicate with the inside of each accommodation space 14, it is possible to replace the air in the accommodation space 14 with an inert gas or a specific gas. Therefore, it is possible to prevent the object to be heated 13 from being oxidized by the introduction of the inert gas or to subject the object to be heated 13 to the surface treatment by utilizing the reaction with the introduced specific gas.

The heating device 100 described above exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.

INDUSTRIAL APPLICABILITY The heating device according to the present invention can be widely used in the industrial field for heat-treating various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates.

10L, 10R Heating wall 10Lt, 10Rt, 15Lt, 15Rt, 16Lt, 16Rt Locking groove 11 Electric heater 12 Heat radiating member 13, 13a Heated object 14 Storage space 15L, 15R, 16L, 16R Strut 17L, 17R Support bar Material 18 Casing 19 Top plate 20 Bottom plate 21L, 21R, 22L, 22R Leg member 23 Base 24, 54La, 54Ra Through hole 25 Back wall member 26 Exhaust path 27 Air supply path 30 Holding means 40 Expansion/contraction mechanism 50 Moving mechanism 51L, 51R Driving slider 51La, 51Ra Female screw hole 52 Male screw shaft 52c Shaft center 53 Operating handle 54L, 54R Driven slider 55 Spindle D Depth direction W Width direction

Claims (1)

A plurality of heating walls arranged facing each other with a distance,
Heating means provided on the heating wall,
A plurality of heat conducting members made of metal, which are arranged in a shelf shape in the up-down direction in a facing region of the plurality of heating wall bodies with a distance therebetween to conduct heat from the heating wall body,
The plurality of heating walls and the plurality of heat conduction members define a plurality of accommodation spaces for accommodating the objects to be heated in the vertical direction,
Further comprising a supply means for supplying an inert gas or a specific gas from the back part in the depth direction of each of the plurality of accommodation spaces toward the front part,
The front part of each of the plurality of accommodation spaces has an opening defined by the heating wall body and the heat conducting member,
The heating means is characterized in that the supply means is provided with a discharge port for the supplied gas on the back side and faces the opening side of the front part.

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