JP2020188089A - Supporting apparatus and supporting method - Google Patents

Abstract

To provide a supporting apparatus and a supporting method, capable of preventing adhesion failure of an adhesive sheet peeled off from a release sheet by pressing the adhesive sheet against pressing means.SOLUTION: A supporting apparatus EA, which is an apparatus for supporting a supporting object WK with an adhesive sheet AS adhered, includes: supporting means 10 with a supporting surface 13A for supporting the supporting object WK; and air flow direction change means 20 for changing an air flow direction of air flowing along the supporting surface 12A to such a direction as to an opposing direction of the supporting surface 12A.SELECTED DRAWING: Figure 1

Description

The present invention relates to a support device and a support method.

Conventionally, there is known a support device that supports a support object when the adhesive sheet temporarily attached to the release sheet is peeled from the release sheet and attached to the support object by a pressing means (for example, Patent Document 1). reference).

Japanese Unexamined Patent Publication No. 4-340746

The table 10 (support device) described in Patent Document 1 has a press roller 43 (pressing means) from an air blowing pipe 52 (spraying means) arranged below the peel plate 7 for peeling the adhesive tape 41 (adhesive sheet). ), The semiconductor wafer 14 (support object) is supported in a state where air (gas) is blown out, but depending on the hardness of the adhesive sheet, the adhesive sheet is pressed against the pressing means even by gas spraying of the adhesive sheet. There is a risk that the adhesive sheet will not be attached properly.

An object of the present invention is to provide a support device and a support method capable of pressing an adhesive sheet to be peeled from a release sheet against a pressing means to prevent a sticking failure of the adhesive sheet.

The present invention has adopted the configuration described in the claims.

According to the present invention, by changing the airflow direction of the gas flowing along the support surface to the direction opposite to the support surface, the gas can flow from the support surface toward the pressing means, so that the gas can be separated from the release sheet. It is possible to press the adhesive sheet to be pressed against the pressing means to prevent the adhesive sheet from being poorly attached.
Further, if the airflow direction changing means is configured by the protrusions detachably provided on the supporting means, the airflow direction changing means can be easily configured, and the airflow direction changing means can be attached and detached as needed. ..

The explanatory view of the sheet sticking apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis, when the direction is indicated, "up" is the arrow direction of the Z axis and "down" is the opposite direction. "Left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y-axis, and "rear" is the opposite direction.

In FIG. 1, the support device EA is a device that supports the support object WK to which the adhesive sheet AS is attached, and is along the support means 10 having the support surface 12A that supports the support object WK and the support surface 12A. A flow direction changing means 20 for changing the flow direction of the flowing gas to the opposite direction of the support surface 12A, a feeding means 30 for feeding out the adhesive sheet AS, a spraying means 40 for blowing a gas such as air or gas, and the like. The sheet is attached by the pressing roller 50 as a pressing means for pressing and attaching the adhesive sheet AS to the supporting object WK, and the moving means 60 for relatively moving the supporting device EA and the feeding means 30, the spraying means 40 and the pressing roller 50. The device EA1 is configured.

The support means 10 is a table having a linear motion motor 11 as a drive device and a support surface 12A supported by the output shaft 11A of the linear motion motor 11 and capable of being attracted and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector. It has 12 and.

The airflow direction changing means 20 is detachably provided on the support means 10 and includes a protruding portion 21 protruding from the tip end portion in the airflow direction on the support surface 12A.

The feeding means 30 includes a support roller 31 for supporting the original fabric RS on which the adhesive sheet AS is temporarily attached to one surface of the release sheet RL, a guide roller 32 for guiding the original fabric RS, and the release sheet RL with the release edge 33A. Is supported by a peeling plate 33 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL, and an output shaft (not shown) of the rotary motor 34A as a drive device, and the peeling sheet RL is sandwiched between the pinch rollers 34B. A predetermined tension is constantly applied to the release sheet RL existing between the drive roller 34 and the pinch roller 34B while the sheet attachment device EA1 is automatically operated while being supported by the output shaft of the drive device (not shown). A recovery roller 35 is provided as a recovery means for recovering the release sheet RL, and the adhesive sheet AS can be held in a state where the tip portion AS1 in the feeding direction of the adhesive sheet AS is peeled from the release sheet RL.

The spraying means 40 is arranged below the feeding means 30, and blows gas to a position below the pressing roller 50 by a gas supply means (not shown) such as a pressurizing pump or a turbine.

The moving means 60 includes a linear motor 61 as a drive device having a slider 61A that supports the support device EA.

The operation of the sheet sticking device EA1 provided with the above support device EA will be described.
First, with respect to the sheet sticking device EA1 in which each member is arranged at the initial position shown by the solid line in FIG. 1, the user of the sheet sticking device EA1 (hereinafter, simply referred to as “user”) is the original fabric as shown in the figure. After setting the RS, a signal for starting automatic operation is input via an operation panel (not shown) or an operation means such as a personal computer. Then, the feeding means 30 drives the rotary motor 34A to feed the original fabric RS, and as shown in FIG. 1, the tip portion AS1 in the feeding direction of the leading adhesive sheet AS has a predetermined length at the peeling edge 33A of the peeling plate 33. When the adhesive sheet is peeled off, the feeding means 30 stops driving the rotary motor 34A, and the adhesive sheet AS is held in a state where the tip portion AS1 in the feeding direction of the adhesive sheet AS is peeled off from the peeling sheet RL, and the adhesive sheet AS is put into a standby state.

Next, when the user or a transport means (not shown) such as an articulated robot or a belt conveyor places the support object WK at a predetermined position on the support surface 12A as shown by the solid line in FIG. 1, the support means 10 Drives a decompression means (not shown) to start adsorbing and holding the support object WK on the support surface 12A. After that, the moving means 60 drives the linear motor 61, and as shown by the alternate long and short dash line on the right side in FIG. 1, the support device EA is moved to the left to position the protrusion 21 below the pressing roller 50. , The support means 10 drives the linear motor 11 to raise the table 12. Next, the spraying means 40 drives a gas supply means (not shown) to spray gas to a position below the pressing roller 50. The blown gas becomes an air flow that flows along the support object WK, the support surface 12A, and the projecting portion 21, and as shown by the arrow of the alternate long and short dash line in FIG. 1 (A), the air flow direction is changed by the air flow direction changing means 20. The support surface 12A is changed in the opposite direction, and is sprayed on the tip portion AS1 of the adhesive sheet AS held by the feeding means 30 in the feeding direction. As a result, the tip portion AS1 of the adhesive sheet AS in the feeding direction is pressed against the pressing roller 50 by the air flow as shown in the figure with AA in FIG. Then, the moving means 60 drives the linear motor 61 to move the support device EA to the left, and the supporting means 10 drives the linear motor 11 to raise the table 12, and then drives the linear motor 11. To stop. Next, when the table 12 reaches a predetermined position, the feeding means 30 drives the rotary motor 34A to feed the original fabric RS according to the moving speed of the table 12. As a result, the adhesive sheet AS is separated from the release sheet RL by the release edge 33A of the release plate 33, and is supported by the pressing roller 50 while being pressed against the pressing roller 50 by the airflow whose direction is changed by the airflow direction changing means 20. It is pressed against the object WK and attached. After that, when the next adhesive sheet AS is peeled off by the peeling edge 33A of the peeling plate 33 by a predetermined length, the feeding means 30 stops driving the rotary motor 34A.

When the attachment of the adhesive sheet AS to the object to be supported WK is completed and the table 12 reaches a predetermined position, the moving means 60 stops driving the linear motor 61, and then stops driving the decompression means (not shown) to support the table 12. The suction holding of the support object WK on the surface 12A is released. Next, when the user or a transport means (not shown) transports the support object WK to which the adhesive sheet AS is attached to the next step, the moving means 60 and the support means 10 drive the linear motor 61 and the linear motor 11. The support device EA is returned to the initial position, and the same operation as described above is repeated thereafter.

According to the above embodiment, the gas flows from the support surface 12A toward the pressing roller 50 by changing the airflow direction of the gas flowing along the support surface 12A to the direction facing the support surface 12A. Therefore, the adhesive sheet AS peeled from the release sheet RL can be pressed against the pressing roller 50 to prevent the adhesive sheet AS from being poorly attached.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is particularly illustrated and described primarily with respect to a particular embodiment, but without departing from the scope of the technical idea and purpose of the present invention, with respect to the embodiments described above. Those skilled in the art can make various modifications in terms of material, quantity, and other detailed configurations. Further, the description limiting the shapes, materials, etc. disclosed above is exemplarily described for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, those shapes, materials, etc. The description by the name of the member excluding some or all of the restrictions such as the above is included in the present invention.

For example, the airflow direction changing means 20 may be integrally formed with the table 12 and the support surface 12A may have a protrusion, or the protrusion may be detachably provided on the support surface 12A, or the protrusion may be provided. Even if the airflow direction is changed by providing a curved surface curved upward from the support surface 12A, an inclined surface inclined diagonally upward, or a plurality of stepped steps, or by providing a depressed portion on the support surface 12A. Good.

The feeding means 30 is formed by forming a closed loop-shaped or short cut in the entire short width direction on the strip-shaped adhesive sheet base material (band-shaped base material sheet and strip-shaped adhesive layer) temporarily attached to the release sheet RL. , The predetermined area partitioned by the notch may be used as the adhesive sheet AS, or the original fabric in which the strip-shaped adhesive sheet base material is temporarily attached to the release sheet RL is adopted, and the adhesive sheet is used. A closed loop-shaped or short cut in the entire width direction may be formed in the base material by a cutting means, and a predetermined region partitioned by the cut may be used as an adhesive sheet AS, or the adhesive sheet AS may be peeled from the release sheet RL. At this time, the torque of the rotating motor 34A may be controlled so that a predetermined tension is applied to the original fabric RS, or a plate-shaped member, a shaft member, or the like may be used instead of the rollers such as the support roller 31 and the guide roller 32. The original fabric RS and the release sheet RL may be supported or guided by the sheet, or the original fabric RS may be supported by folding the original fabric RS, for example, by folding it in a fan fold, and the collecting means is the release sheet RL. For example, it may be folded in a fan fold without being wound, or it may be collected by chopping it with a shredder or the like, or it may be simply accumulated without being wound or folded in a fan fold to collect the release sheet RL. Good.

The gas sprayed by the spraying means 40 may be air, a single gas such as nitrogen gas or neon gas, a mixed gas, or the like.

The moving means 60 may move the feeding means 30, the spraying means 40, and the pressing roller 50 without or while moving the support device EA, or may be replaced with or in combination with the linear motor 61 to be articulated. The support device EA and the feeding means 30, the spraying means 40, and the pressing roller 50 may be relatively moved by another driving device such as a robot.

The material, type, shape, etc. of the adhesive sheet AS and the supporting object WK are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangular shape, or another shape, or may have an adhesive shape such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing an appropriate heating means such as a coil heater or a heat pipe for heating the adhesive sheet AS. Further, the adhesive sheet AS has three or more layers, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base sheet and the adhesive layer, and a cover layer on the upper surface of the base sheet. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer, and the double-sided adhesive sheet may have a single layer or a multi-layer intermediate layer. , It may be a single layer or a multi-layer without an intermediate layer. The supported object WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood plates or resin plates. , Any form of member or article can also be targeted. In addition, the adhesive sheet AS can be changed to a functional and versatile reading, for example, any label for information description, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, or the like. Any sheet, film, tape, etc. of any shape can be attached to any support object WK as described above.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above embodiments. It is not limited to the process at all. For example, the supporting means is not limited as long as it has a supporting surface that supports the object to be supported, as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (other means). And the description of the process is omitted).
Further, the drive device in the above embodiment includes electric devices such as rotary motors, linear motors, linear motors, single-axis robots and articulated robots, actuators such as air cylinders, hydraulic cylinders, rodless cylinders and rotary cylinders. In addition to being able to be adopted, it is also possible to adopt a combination thereof directly or indirectly (some of which overlap with those illustrated in the embodiment).
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of members, the surface of the rotating member or the rotating member itself may be composed of members that do not deform, or other members such as shafts and blades that rotate or do not rotate may be adopted instead of the rollers. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified one. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be used to press. It may be composed of a member that does not deform, or if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it is illustrated above. A plate-shaped member, a round bar, a roller, or the like may be used in place of or in combination with the material, or the material to be peeled off may be made of a deformable member such as rubber or resin, or may be deformed. It may be composed of members that do not, or when a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder. Such as gripping means, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. to support (hold) the supported member. May be adopted.

EA ... Support device 10 ... Support means 12A ... Support surface 20 ... Airflow direction changing means 21 ... Projection 30 ... Feeding means 50 ... Pressing roller (pressing means)
AS ... Adhesive sheet AS1 ... Tip in feeding direction RL ... Release sheet WK ... Support object

Claims (4)

A support device that supports a support object to which an adhesive sheet is attached.
A support means having a support surface for supporting the support object, and
A support device including a means for changing an air flow direction that changes the airflow direction of a gas flowing along the support surface in a direction opposite to the support surface. The support device according to claim 1, wherein the airflow direction changing means is detachably provided on the support means and includes a protruding portion of the support surface that projects from the tip end portion in the airflow direction. The adhesive sheet is temporarily attached to one surface of the release sheet, peeled from the release sheet by a feeding means, and fed out.
The feeding means is provided so as to be able to hold the adhesive sheet in a state where the tip portion of the adhesive sheet in the feeding direction is peeled off from the release sheet.
The support device according to claim 1 or 2, wherein the airflow direction changing means blows gas onto the tip of the adhesive sheet held by the feeding means in the feeding direction by changing the airflow direction. .. It is a support method for supporting a support object to which an adhesive sheet is attached.
A support process for supporting the support object on a support surface, and
A support method comprising carrying out a flow direction changing step of changing the airflow direction of a gas flowing along the support surface to a direction opposite to the support surface.

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