JP2020157605A - Cutter holder fitting unit and scribe device - Google Patents

Abstract

To highly maintain the precision of scribe formation while maintaining the high exchange operability of a scribing wheel in a cutter holder fitting unit.SOLUTION: A cutter holder fitting unit 1 is used for a scribe device forming a scribe line on a brittle material substrate, and comprises: a cutter holder 2; a holder joint 3; and an energization mechanism 21.The cutter holder 2 includes: a cutter mechanism 4; and a holder body 5 made of a magnetic substance and holding the cutter mechanism. The holder joint 3 includes: a chuck 14 having a plurality of claws 15a to 15c extending in an axial direction for fixing the cutter holder 2; and a magnet 16 arranged at the inside of the chuck 14. The energization mechanism 21 performs energization in such a manner that the plurality of claw 15a to 15c are made close to each other to sandwich the holder body 5 with the plurality of claws 15a to 15c.SELECTED DRAWING: Figure 3

Description

The present invention relates to a cutter holder mounting unit and a scribe device, particularly a cutter holder, a cutter holder mounting unit having a holder joint, and a scribe device using the same.

A scribing wheel is usually used for dividing a brittle material substrate such as a glass substrate. Specifically, this scribing wheel is pressure-welded and rolled on a glass substrate to form a scribing line on the substrate surface, thereby causing cracks in the direction perpendicular to the substrate surface (scribing process), and then applying stress to the substrate. The vertical cracks are grown to the back surface of the substrate (break step) to divide the brittle material substrate.
When a scribe line is formed on the surface of the substrate, the cutting edge of the scribing wheel is gradually worn. If the cutting edge wears, the scribing wheel needs to be replaced. However, since the scribing wheel has a small outer diameter of about 1.0 to 5.0 mm, the replacement workability of the scribing wheel is very poor.
Therefore, a tip holder is known as a wheel unit having improved workability for exchanging a scribing wheel (see Patent Document 1).

Japanese Unexamined Patent Publication No. 2011-213592

The tip holder has a holder body, a scribing wheel, and a pin. More specifically, the tip holder holds the scribing wheel rotatably with a pin in the groove of the holder body.
On the other hand, the tip holder can be easily attached to and detached from the holder joint in which the magnet is embedded. Therefore, the replacement workability of the scribing wheel is very good.
However, the chip holder is used not only for straight lines but also for dividing irregular shapes such as curved lines. In that case, there is a problem that the contact portion between the holder body and the holder joint is worn or damaged due to the lateral load generated at the time of division, and therefore the accuracy of scribe formation is lowered.

An object of the present invention is to maintain high accuracy of scribe formation in addition to replacement workability of a scribing wheel in a cutter holder mounting unit.

Hereinafter, a plurality of aspects will be described as means for solving the problem. These aspects can be arbitrarily combined as needed.

The cutter holder mounting unit according to the first aspect of the present invention is used for a scribe device for forming a scribe line on a brittle material substrate, and has a cutter holder, a holder joint, and an urging mechanism.
The cutter holder has a cutter mechanism and a holder body made of a magnetic material and holding the cutter mechanism.
The holder joint has a chuck having a plurality of claws extending in the axial direction for fixing the cutter holder, and a magnet arranged inside the chuck.
The urging mechanism urges a plurality of claws so as to approach each other, thereby sandwiching the holder body with the plurality of claws.
In this unit, when the cutter holder is inserted into the holder joint, the cutter holder is held in the holder joint by the force of the magnet.
Further, since a plurality of claws sandwich the holder body by the urging mechanism, for example, when the cutter mechanism forms a curved scribe line and a lateral force is applied to the holder body with respect to the traveling direction of the cutter mechanism. However, the state in which the holder body is securely in contact with the holder joint can be maintained. Therefore, the cutter mechanism does not shift sideways or the position does not move during scribe processing of the curve, and a clean scribe line can be formed with high accuracy.

The urging mechanism may have an urging force generating member that elastically generates an urging force.
This unit has a simple structure, and multiple claws can pinch the holder body.

The urging mechanism may further include a pressing member arranged on the outer peripheral side of each of the plurality of claws, and a contact member that comes into contact with the pressing member.
The pressing member may be a sphere.
Even if the abutting member has a receiving surface that receives the load from the urging force generating member in the axial direction and an inclined surface that contacts the sphere and converts a part of the axial load into a load toward the claw side. Good.
In this unit, a plurality of claws can sandwich the holder body with a simple structure by means of an urging member, an abutting member, and a pressing member.

The holder body may have a contact surface on the outer peripheral side.
The cutter holder mounting unit may further include a detent member that is fixed to the inside of the chuck and that abuts the contact surface to prevent the holder body from rotating to the chuck.
In this unit, when the cutter holder is inserted into the holder joint, the contact surface of the holder body comes into contact with the detent member, and the mounting is completed.

The chuck may have two high-rigidity claws and one low-rigidity claw.
The detent member may be fixed to two high-rigidity claws.
In this unit, since the detent member is fixed to the two high-rigidity claws, the claws are less likely to be damaged.

The scribe device according to another aspect of the present invention uses a cutter holder mounting unit. The cutter holder mounting unit includes a cutter holder, a holder joint, and an urging mechanism.
The cutter holder has a cutter mechanism and a holder body made of a magnetic material and holding the cutter mechanism.
The holder joint has a chuck having a plurality of claws extending in the axial direction for fixing the cutter holder, and a magnet arranged inside the chuck.
The urging mechanism clamps the holder body by the plurality of claws by urging the plurality of claws so as to approach each other.
With this scribe device, the same effect as the cutter holder mounting unit can be obtained.

In the cutter holder mounting unit and the scribe device according to the present invention, it is possible to maintain high accuracy of scribe formation while maintaining high replacement workability of the cutter mechanism.

Schematic perspective view of the scribe device. Front view of the cutter holder mounting unit. Sectional drawing of the cutter holder mounting unit. An exploded perspective view of the cutter holder mounting unit. An exploded perspective view of the cutter holder mounting unit. Perspective view of the cutter holder. Front view of the cutter holder mounting unit. Partial perspective view of the cutter holder mounting unit.

1. 1. 1st Embodiment (1) Scribing device The scribe device 101 will be described with reference to FIG. FIG. 1 is a schematic perspective view of the scribe device. The scribe device 101 is a device for scribe processing a brittle material substrate W (hereinafter, referred to as “substrate W”). The substrate W is, for example, a glass substrate, a ceramic substrate, a sapphire substrate, a silicon substrate, or the like.
The scribe device 101 includes a table 102 on which the substrate W is placed. The table 102 is mounted on the moving table 103, and the moving table 103 can move along the horizontal rails 105a and 105b, and is driven by the ball screw 107 rotated by the motor 106.

In the following description, the horizontal direction in which the rails 105a and 105b extend is referred to as the Y direction, and the horizontal direction orthogonal to the Y direction is referred to as the X direction.
The table 102 is provided with holding means (not shown) so that the substrate W can be held in a fixed position. The holding means is, for example, air suction from a large number of small suction holes (not shown) opened in the table 102.

In the scribe device 101, a bridge 111 is erected along the X direction by columns 112a and 112b so as to straddle the moving table 103 and the table 102.
A guide 113 is attached to the bridge 111, and a scribe head 114 is movably installed along the guide 113 in the X direction. A cutter holder mounting unit 1 (described later) is mounted on the scribe head 114.
The cutter wheel 6 (described later) of the cutter holder mounting unit 1 mounted on the scribe head 114 of the scribe device 101 as described above is lowered onto the surface of the substrate W placed on the table 102 and pressed against the surface of the substrate W. A scribe line for division is processed on the surface of the substrate W by relatively linearly moving it.

(2) Cutter Holder Mounting Unit The cutter holder mounting unit 1 will be described with reference to FIGS. 2 to 8.
The cutter holder mounting unit 1 (an example of a cutter holder mounting unit) is used for a scribe device 101 that forms a scribe line on a brittle material substrate W, and is used by a cutter holder 2 (an example of a cutter holder) and a holder joint 3 (an example of a holder joint). ) And.
The cutter holder 2 has a cutter mechanism 4 and a holder body 5 that holds the cutter mechanism 4. The cutter mechanism 4 has a cutter wheel 6 rotatably supported at the lower end portion of the holder body 5 via a wheel shaft orthogonal to the axis of the holder body 5.
The holder body 5 is made of a magnetic material such as iron and has a substantially columnar body. An attachment portion 7 for positioning when attaching to the holder joint 3 is provided on the upper portion of the holder body 5. As shown in FIGS. 3 and 6, the mounting portion 7 includes a flat surface portion 7a and an inclined surface 7b formed by cutting out a part of the holder main body 5. The flat surface portion 7a is parallel to the axis of the holder body 5. The inclined surface 7b is also flat.

As shown in FIG. 3, the holder joint 3 is provided with a swivel shaft 8 extending in the vertical direction at the upper portion, and the swivel shaft 8 rotates around the scribing head 114 of the scribe device 101 via a pair of upper and lower ball bearings 10, 11. It is mounted so that it can move.

The holder joint 3 has a chuck 14 (an example of a chuck). The chuck 14 allows the cutter holder 2 to be easily attached to and detached from the holder joint 3. The chuck 14 has a plurality of tightening pieces 15a to 15c (an example of a claw). The tightening pieces 15a to 15c are formed by the tightening pieces 15a to 15c extending in the axial direction in order to fix the cutter holder 2, and an opening having a substantially circular cross section for receiving the cutter holder 2 is opened downward. Specifically, the tightening pieces 15a to 15c are arc-shaped members in a plan view arranged at equiangular intervals. The tightening pieces 15a to 15c each have an angle of about 100 to 110 degrees. With the tightening pieces 15a to 15c tightening the cutter holder 2, the axis of the cutter holder 2 is aligned with the center of the chuck 14.
The tightening pieces 15a to 15c have two high-rigidity tightening pieces 15a and 15b and one low-rigidity tightening piece 15c. Specifically, the low-rigidity tightening piece 15c has a smaller radial thickness than the other two pieces.

Inside the chuck 14, a parallel pin 16 for positioning (an example of a detent member) extending in a direction orthogonal to the axis of the chuck 14 is provided at a position away from the axis of the chuck 14. As a result, when the cutter holder 2 is inserted into the chuck 14, the parallel pin 16 comes into contact with the inclined surface 7b of the holder body 5 of the cutter holder 2 and presses the peripheral surface on the back surface side of the inclined surface 7b against the inner surface of the tightening piece 15c. , Position the cutter holder 2 so that the direction and posture are constant. Further, at this time, as shown in FIG. 3, the ground contact point of the cutter wheel 6 is positioned so as to be displaced by L1 to the rear side in the traveling direction of the cutter wheel 6 with respect to the axial center of the turning shaft 8. This deviation is for promoting the straightness of the cutter wheel 6 by exerting a so-called "caster effect" that always tries to return to the traveling direction when the cutter wheel 6 is running.
The parallel pin 16 is fixed to two high-rigidity tightening pieces 15a and 15b. Therefore, the partner against which the peripheral surface on the back surface side of the inclined surface 7b of the holder body 5 is pressed is the low-rigidity tightening piece 15c. Therefore, when the low-rigidity tightening piece 15c is sufficiently bent, the adhesion between the holder body 5 and the chuck 14 is improved.
As shown in FIG. 3, the holder joint 3 has a magnet 15 provided on the bottom surface of the chuck 14. The magnet 15 is a member for attracting and holding the cutter holder 2.

The chuck 14 has an urging mechanism 21 as shown in FIGS. 3 to 5. The urging mechanism 21 is a mechanism for sandwiching the holder body 5 by urging a plurality of tightening pieces 15a to 15c so as to approach each other.
The urging mechanism 21 has a coil spring 22 (an example of an urging force generating member). In this unit, a plurality of tightening pieces 15a to 15c can sandwich the holder body 5 with a simple structure. In addition, the coil spring 22 can be easily replaced.

The urging mechanism 21 has a pressing member 23 arranged on the outer peripheral side of each of the plurality of tightening pieces 15a to 15c. Specifically, the pressing member 23 is a sphere. The pressing member 23 is seated on the outer end of the hole 24 formed in the tightening pieces 15a to 15c.
The urging mechanism 21 has a tubular member 25 (an example of a contact member). The tubular member 25 is a member that comes into contact with the pressing member 23. As shown in FIG. 3, the tubular member 25 comes into contact with the receiving surface 25a that receives the load from the coil spring 22 in the axial direction and the pressing member 23, and a part of the load in the axial direction is moved to the tightening piece 15a to 15c side. It has an inclined surface 25b that converts the load into.

Specifically, the tubular member 25 has a flange extending inward in the radial direction at the lower end, the upper side of the flange is an annular receiving surface 25a, and the lower side is an annular inclined surface 25b. The coil spring 22 extends inside the tubular member 25 between a part of the holder joint 3 and the receiving surface 25a of the flange of the tubular member 25, and is compressed in the mounted state. Therefore, the coil spring 22 constantly urges the tubular member 25 downward. As a result, the three pressing members 23 press the three tightening pieces 15a to 15c inward in the radial direction, respectively.
As described above, the coil spring 22, the tubular member 25, and the pressing member 23 allow a plurality of tightening pieces 15a to 15c to sandwich the holder body 5 with a simple structure.

(3) Mounting and Removing Operation of Cutter Holder When mounting the cutter holder 2 on the holder joint 3, the mounting portion 7 side of the cutter holder 2 is inserted into the chuck 14 of the holder joint 3 for mounting. Then, the parallel pin 16 comes into contact with the inclined surface 7b of the mounting portion 7 and is positioned, and the upper end portion of the cutter holder 2 is attracted and held by the magnet 15. At this time, since the cutter holder 2 is pulled up by the magnet 15, the inclined surface 7b of the mounting portion 7 is pressed against the parallel pin 16. As a result, the cutter holder 2 is attached to the holder joint 3 with the posture of the cutter holder 2 automatically oriented in a certain direction.

Next, the coil spring 22 and the tubular member 25 are fitted into the holder joint 3. Specifically, the coil spring 22 is compressed between the tubular member 25 and the holder joint 3. While maintaining that state, the pressing member 23 is fitted into the holes 24 of the tightening pieces 15a to 15c. Then, the inclined surface 25b of the tubular member 25 pushes the pressing member 23 in the axial direction, and pushes the pressing member 23 and the tightening pieces 15a to 15c inward in the radial direction. As a result, the tightening pieces 15a to 15c sandwich the holder body 5. As a result, the cutter holder 2 is firmly fixed to the holder joint 3.

Since the plurality of tightening pieces 15a to 15c sandwich the holder body 5 by the urging mechanism 21 in this way, the cutter holder 2 exerts a lateral force with respect to the traveling direction of the cutter wheel 6, for example, when scribing a curve. It is possible to maintain a state in which the holder body 5 is surely in contact with the holder joint 3 even when the holder body 5 is joined. Therefore, the cutter wheel does not shift sideways or the position does not move during the scribe processing of the curve, and a clean scribe line can be formed accurately.
When the cutter wheel 6 is worn and replaced, when the tubular member 25 is pushed upward against the urging force of the coil spring 22, the inclined surface 25b of the tubular member 25 is separated from the pressing member 23, so that the holder body 5 The plurality of tightening pieces 15a to 15c sandwiching the are loosened, and as a result, the cutter holder 2 can be separated from the holder joint 3. In this way, the cutter holder 2 can be easily removed.

2. 2. Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the gist of the invention. In particular, the plurality of embodiments and modifications described herein can be arbitrarily combined as needed.

The present invention can be widely applied to a cutter holder mounting unit having a cutter holder and a holder joint, and a scribe device.

1: Cutter holder mounting unit 2: Cutter holder 3: Holder joint 4: Cutter mechanism 5: Holder body 6: Cutter wheel 7: Mounting part 7a: Flat surface part 7b: Inclined surface 8: Swivel shaft 14: Chuck 15: Magnet 15a: High rigidity Tightening piece 15b: High-rigidity tightening piece 15c: Low-rigidity tightening piece 16: Parallel pin 21: Biasing mechanism 22: Coil spring 23: Pressing member 24: Hole 25: Cylindrical member 25a: Receiving surface 25b: Inclined surface W: Brittle Material substrate

Claims (6)

A cutter holder mounting unit used in a scribe device that forms a scribe line on a brittle material substrate.
A cutter holder having a cutter mechanism and a holder body made of a magnetic material and holding the cutter mechanism.
A chuck having a plurality of claws extending in the axial direction for fixing the cutter holder, and a holder joint having a magnet arranged inside the chuck.
An urging mechanism that clamps the holder body by the plurality of claws by urging the plurality of claws so as to approach each other.
Cutter holder mounting unit equipped with. The cutter holder mounting unit according to claim 1, wherein the urging mechanism includes an urging force generating member that elastically generates an urging force. The urging mechanism further includes a pressing member arranged on the outer peripheral side of each of the plurality of claws, and an abutting member that abuts on the pressing member.
The pressing member is a sphere
The contact member has a receiving surface that receives a load from the urging force generating member in the axial direction, and an inclined surface that contacts the sphere and converts a part of the axial load into a load toward the claw side. , The cutter holder mounting unit according to claim 2. The holder body has a contact surface on the outer peripheral side and has a contact surface on the outer peripheral side.
The cutter holder mounting unit according to any one of claims 1 to 3, further comprising a detent member which is fixed to the inside of the chuck and abuts on the contact surface to prevent the holder body from rotating to the chuck. .. The chuck has two high-rigidity claws and one low-rigidity claw.
The cutter holder mounting unit according to claim 4, wherein the detent member is fixed to the two high-rigidity claws. A cutter holder having a cutter mechanism and a holder body made of a magnetic material and holding the cutter mechanism.
A chuck having a plurality of claws extending in the axial direction for fixing the cutter holder, and a holder joint having a magnet arranged inside the chuck.
A scribe device using a cutter holder mounting unit provided with an urging mechanism for sandwiching the holder body with the plurality of claws by urging the plurality of claws so as to approach each other.

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