JP2019189440A - Article transport device and facility - Google Patents

Abstract

To provide an article transport device capable of suppressing reduction of transport efficiency while achieving transport of different kinds of articles together.SOLUTION: An article transport device comprises: a first transfer device 6; a second transfer device 7 installed above the first transfer device 6; and a lifting body 8 for supporting the first transfer device 6 and the second transfer device 7 and moving along a vertical direction. A first kind of an article K1 and a second kind of an article K2 whose kind is different from the kind of the first kind of the article K1, are transport objects. A transport amount of the first kind of articles K1 is larger than that of the second kind of articles K2, the first transfer device 6 can transfer only the first kind of articles K1 between it and a transfer object position out of the first kind of articles K1 and second kind of articles K2, the second transfer device 7 can transfer both of the first kind of articles K1 and the second kind of articles K2 between it and the transfer object position, and the first transfer device 6 can execute a transfer operation of the first kind of articles K1 between it and the transfer object position in a short time relative to a transfer operation time of the second transfer device 7.SELECTED DRAWING: Figure 2

Description

  The present invention includes a first transfer device, a second transfer device installed above the first transfer device and at a position overlapping the first transfer device when viewed in the vertical direction along the vertical direction, The present invention relates to an article transport device including a first transfer device and an elevating body that supports the second transfer device and moves in the vertical direction, and an article transport facility including the same.

  The background art will be described below. In the following description, the code or name in parentheses is the code or name in the prior art document. A conventional example of such an article conveying apparatus is described in Japanese Patent Application Laid-Open No. 2018-039660 (Patent Document 1). The article conveying device of Patent Document 1 supports the first transfer device (lower transfer unit 34a), the second transfer device (upper transfer unit 34b), the first transfer device, and the second transfer device. And a lifting body (second lifting body 32). The first transfer device and the second transfer device are configured similarly, and are configured to support the article from below.

  The article transport apparatus of Patent Document 1 is configured to transport two articles collectively by transporting the articles with the first transfer apparatus and the second transfer apparatus. Efficiency is increased.

JP 2018-039660 A

The article conveying apparatus of Patent Document 1 uses one type of article as a conveyance target, but it may be necessary to collectively convey different types of articles with a plurality of types of articles as conveyance targets.
For example, in the article transport apparatus of Patent Document 1, only the FOUP is an object to be transported, but it may be necessary to transport a reticle container that contains a different type of reticle from the FOUP. When the FOUP and the reticle container are transported as described above, the transport amount of the reticle container is generally smaller than the transport amount of the FOUP. As described above, when different types of articles are conveyed, the conveyance amount for each article type may be biased.

  Moreover, in the article conveying apparatus of patent document 1, although the same type (fork type) transfer apparatus is employ | adopted by the 1st transfer apparatus and the 2nd transfer apparatus, the transfer apparatus suitable according to the kind of article | item. In some cases, the time required for the transfer operation differs depending on the type of the transfer device. The time required for the transfer operation of the transfer device affects the conveyance efficiency of the article. Therefore, depending on the configuration of the transfer device and the like, different types of articles can be transported together, which may greatly reduce the transport efficiency.

  Therefore, it is desired to realize an article transport apparatus that can suppress a decrease in transport efficiency while being able to transport different types of articles collectively.

In view of the above, the characteristic configuration of the article transporting apparatus is installed at a position overlapping the first transfer apparatus and the first transfer apparatus when viewed from above and below the first transfer apparatus and in the vertical direction along the vertical direction. A second transfer device, and an elevating body that supports the first transfer device and the second transfer device and moves along the vertical direction,
A first type article and a second type article different in type from the first type article are objects to be transported, and the transport amount of the first class article is larger than the transport amount of the second class article. The first transfer device is configured to be able to transfer only the first-class article of the first-class article and the second-class article between itself and the transfer target portion, and the second transfer apparatus The apparatus is configured to be able to transfer both the first-class article and the second-class article between itself and the transfer target location, and the first transfer apparatus is configured to be the self of the first-class article. And a transfer operation between the transfer target portion and the second transfer device in a short time compared to the second transfer device.

According to this characteristic configuration, the first transfer device cannot hold the second type article, but the article transfer operation is relatively fast. On the other hand, the second transfer device can hold both the first-type article and the second-type article, although the transfer operation of the article is relatively slow.
That is, the second type article having a relatively small conveyance amount is conveyed using the second transfer device having a relatively slow transfer operation, and the first type article having a relatively large conveyance amount is relatively transferred. Since it can convey using both the quick 1st transfer apparatus and 2nd transfer apparatus, the fall of conveyance efficiency can be suppressed.

Front view of goods transport equipment Side view of article transport device Side view of the first transfer device in which the first holding portion is in the lowered position and in the first retracted position. Side view of the first transfer device in which the first holding part is in the lowered position and in the first protruding position. Side view of the second transfer device in which the second holding part is in the raised position and in the second retracted position. Side view of the second transfer device in which the second holding part is in the raised position and in the second retracted position. Side view of the second transfer device in which the second holding part is in the raised position and in the second retracted position. Side view of the second transfer device in which the second holding part is in the first type descending position and in the second protruding position. Side view of the second transfer device in which the second holding portion is in the second type descending position and in the second protruding position. Side view of the second transfer device in which the second holding part is in the third type descending position and in the second protruding position. Top view of the first conveyor Plan view of second conveyor and third conveyor Longitudinal front view of the second conveyor and the third conveyor Control block diagram Illustration of transfer operation

1. Embodiment An embodiment of an article conveyance facility provided with an article conveyance device will be described with reference to the drawings.
As shown in FIG. 1, the article transport facility includes a lift transport apparatus 1 (corresponding to an article transport apparatus) and a conveyor transport apparatus 2. The elevating type conveying apparatus 1 conveys articles between the lower floor D and the upper floor U higher than the lower floor D. The conveyor-type transport device 2 is installed on the lower floor D and the upper floor U, and transports articles along the horizontal direction.

  The lifting and lowering transfer device 1 and the conveyor-type transfer device 2 are the first type article K1 and the second type article K2 of a different type from the first type article K1. The second type article K2 includes a second type article T2 and a third type article T3 having different external dimensions. The first type article K1 is a first type article T1 having a different external dimension from both the second type article T2 and the third type article T3. That is, the lifting and lowering conveying device 1 and the conveyor-type conveying device 2 are intended to convey the first type article T1, the second type article T2, and the third type article T3 having different external dimensions.

  The carry amount of the first type article K1 is larger than the carry amount of the second type article K2. That is, the conveyance amount of the first type article T1 is larger than the total of the conveyance amount of the second type article T2 and the conveyance amount of the third type article T3. In the present embodiment, the second-type article T2 and the third-type article T3, which have a smaller conveyance amount than the first-type article T1, are collectively referred to as a second-type article K2, and the first-type article T1 with a large conveyance amount is the first type. Class 1 goods are classified as K1.

  The first type article T1 includes a first held portion F1 at the top. The second type article T2 includes a second held portion F2 at the top. The third type article T3 includes a third held portion F3 at the top. The first held portion F1 corresponds to the first class held portion R1 provided on the top of the first type article K1, and the second held portion F2 and the third held portion F3 are the second type. This corresponds to the second class held portion R2 provided on the top of the article K2.

  The second type article T2 has a larger dimension in the vertical direction Z than the third type article T3, and the first type article T1 has a larger dimension in the vertical direction Z than the second type article T2 and the third type article T3. Therefore, the height of the lower end of the second type article T2 when the second held part F2 of the second type article T2 is held by the second holding unit 16 of the second transfer apparatus 7 is the second transfer apparatus 7. The second holding part 16 is lower than the height of the lower end of the third type article T3 when the third held part F3 of the third type article T3 is held. Further, the height of the lower end of the first type article T1 when the first held part F1 of the first type article T1 is held by the second holding unit 16 of the second transfer apparatus 7 is the second transfer apparatus 7. By the second holding part 16 of the second type article T2 when the second held part F2 of the second type article T2 is held by the second holding part 16 and the second holding part 16 of the second transfer device 7. It becomes lower than the height of the lower end of the third type article T3 when the third held part F3 of the third type article T3 is held.

  In the present embodiment, the first-type article T1 is a wafer container that contains a semiconductor wafer, the second-type article T2 is an EUV container that contains an EUV mask, and the third-type article T3 is a reticle. It is a container for a reticle to be accommodated. Specifically, the first type article T1 is a FOUP (Front Opening Unified Pod) and a FOSB (Front Opening Shipping Box). The second type article T2 is an EUV container that conforms to SEMI standard E152. The third type article T3 is a reticle container compliant with SEMI standard E111. The 1st to-be-held part F1, the 2nd to-be-held part F2, and the 3rd to-be-held part F3 are the flange parts with which the upper surface part of each container was equipped.

  In the present embodiment, the “outer dimensions are different” when the outer dimensions of the portions that affect the operation of the second transfer device 7 in the elevating transport apparatus 1 are different. That is, since the second transfer device 7 is configured to hold the flange portion of the container, when the height of the flange portion in the container is the same height and the shape of the flange portion is the same, When the height of the flange portion of the container is different, or when the shape of the flange portion is different, the outer dimensions are different. The second transfer device 7 can support all of the first-type article T1, the second-type article T2, and the third-type article T3, but the bottom surface of the first-type article T1, the bottom surface of the second-type article T2, and the second type When the bottom surface of the three-type article T3 is supported at the same height, the heights of the flange portions of these articles are different. The operation in the case of transfer is different between T1, the second type article T2, and the third type article T3. Therefore, the first type article T1, the second type article T2, and the third type article T3 are different types. On the other hand, there are FOUP and FOSB as the first type article T1, but these have the same height of the flange of the container and the shape of the flange part, so they are not "different in outer dimensions". In other words, the articles have the same outer dimensions, that is, the same kind of articles. In the present embodiment, the shapes of the flange portions of the second type article T2 and the third type article T3 are the same. In other words, in the present embodiment, the second type article T2 and the third type article T3 having the same shape of the flange portion are classified into the second type item K2, and the shape of the flange portion is different from these, and the height of the flange portion is also set. Different first-type articles T1 are classified as first-type articles K1.

  The lifting and lowering transfer device 1 is installed at a position that overlaps the first transfer device 6 and the first transfer device 6 in the vertical Z direction above the first transfer device 6 and along the vertical direction Z. A transfer device 7; and a lifting body 8 that supports the first transfer device 6 and the second transfer device 7 and moves along the vertical direction Z by driving a lifting motor 9 (see FIG. 13). ing. When the side on which the second transfer device 7 is installed with respect to the first transfer device 6 in the vertical direction Z is the vertical direction specific side, in the present embodiment, the vertical direction specific side is the upper side in the vertical direction Z. It is.

The first transfer device 6 includes a first-class article K1 (first-class article K1 (first-class article T1) and a second-class article K2 (second-class article T2 and third-class article T3). Only one type of article T1) can be transferred between itself and the transfer target location 3. The second transfer device 7 includes both the first-type article K1 (first-type article T1) and the second-type article K2 (second-type article T2 and third-type article T3) and the transfer target location 3. It is comprised so that transfer is possible.
In the first transfer device 6, “the transfer is possible between itself and the transfer target location 3” means that the first transfer device 6 moves from the first transfer device 6 to the transfer target location 3. It represents that the first-class article K1 can be transferred, and that the first transfer apparatus 6 can transfer the first-class article K1 from the transfer target location 3 to the first transfer apparatus 6. . Further, in the second transfer device 7, “the transfer is possible between itself and the transfer target location 3” means that the second transfer device 7 moves from the second transfer device 7 to the transfer target location 3. The first-class article K1 or the second-class article K2 is transferred, or the second-transfer apparatus 7 transfers the first-class article K1 or the second-class article K2 from the transfer target location 3 to the second-transfer apparatus 7. This means that it can be posted.

  As shown in FIG.11 and FIG.12, the transfer object location 3 is provided so that it may be located in the circumference | surroundings of the raising / lowering body 8 by the up-down direction Z view. This transfer target location 3 is provided with a support 10 for supporting an article and a part of the conveyor type transfer device 2. The first transfer device 6 transfers the first type article T1 between itself and the support 10, and also transfers the first type article T1 between itself and the conveyor-type transfer device 2. The second transfer device 7 transfers the first-type article T1, the second-type article T2, and the third-type article T3 between itself and the support 10, and between the self and the conveyor type transfer device 2. The first-type article T1, the second-type article T2, and the third-type article T3 are transferred.

  As shown in FIG. 2, the first transfer device 6 includes a first holding unit 11 that holds the first type article K1 (first type article T1), and the first holding unit 11 in the first retraction position and the first retraction position. The first retracting mechanism 12 that moves to the first projecting position that projects to the side where the transfer target location 3 exists with respect to the retracted position, and the first holding unit 11 are moved up and down with respect to the first retracting mechanism 12. The first elevating mechanism 13 that moves in the direction Z and the first turning mechanism 14 that turns the first retracting mechanism 12 around the axis along the vertical direction Z are provided.

  In this embodiment, the 1st exit / retreat mechanism 12 is comprised by the scalar arm. A base portion of the first retracting mechanism 12 is connected to the lifting body 8 so as to be rotatable around an axis along the vertical direction Z, and a first lifting mechanism 13 is connected to a distal end portion of the first retracting mechanism 12. . The first withdrawing / retracting mechanism 12 moves the first holding unit 11 along the withdrawing / withdrawing direction X by expanding and contracting along the withdrawing / withdrawing direction X. The first elevating mechanism 13 includes a main body portion 13A fixed to the first retracting mechanism 12 and an elevating portion 13B supported by the main body portion 13A so as to be movable up and down and fixed to the first holding portion 11. . The first elevating mechanism 13 moves the first holding unit 11 along the vertical direction Z by moving the elevating unit 13B along the vertical direction Z with respect to the main body 13A. The 1st holding | maintenance part 11 is comprised so that it may hold | maintain by supporting the bottom face of 1st class goods K1 from the downward direction.

  As shown in FIGS. 3 and 4, the first transfer device 6 performs a transfer operation of transferring the first type article K <b> 1 between itself and the transfer target location 3. The first transfer device 6 moves in and out along the up-and-down direction Z, and moves up and down in the up-and-down direction Z, as a transfer operation. Lifting and lowering operation.

  The first transfer device 6 is moved out and out by a first projecting operation that causes the first holding mechanism 11 to project from the first retracted position to the first projecting position by the first retracting mechanism 12 or by the first retracting mechanism 12. This is a first retraction operation for retracting the first holding unit 11 from the first protruding position to the first retraction position. In addition, the first transfer device 6 is moved up and down by a first lifting operation in which the first lifting mechanism 13 raises the first holding unit 11 from the lowered position to the raised position, or by the first lifting mechanism 13 in the first holding unit 11. Is a first lowering operation for lowering from a raised position to a lowered position.

When the first transfer device 6 transfers the first-type article T1 from the self to the transfer target location 3, the first holding unit 11 holding the first-type article T1 is raised in the vertical direction Z. The first retraction operation, the first lowering operation, and the first retraction operation are performed in this order from the first retraction position in the retreat direction X.
When the first transfer device 6 transfers the first type article T1 from the transfer target location 3 to itself, the first holding unit 11 that does not hold the first type article T1 is in the vertical direction Z. From the state of being in the lowered position and being in the first retracted position in the exit / retreat direction X, the first projecting operation, the first ascending operation, and the first retracting operation are performed in this order.

  Then, the first transfer device 6 rotates the first retracting mechanism 12 about the axis along the vertical direction Z, so that the first holding unit 11 is retracted when the first retracting mechanism 12 is expanded and contracted. The backward direction X can be changed. As a result, the first-type article T1 can be transferred to and from the five transfer target locations 3 arranged around the periphery.

  The second transfer device 7 can hold both the first type article K1 (first type article T1) and the second type article K2 (second type article T2 and third type article T3). 16 and a second retracting mechanism 17 that moves the second holding portion 16 to the second retracted position and the second projecting position that projects to the side where the transfer target location 3 exists with respect to the second retracted position, A second elevating mechanism 18 that moves the second holding portion 16 in the vertical direction Z with respect to the second retracting mechanism 17, and a second turning mechanism that rotates the second retracting mechanism 17 around the axis along the vertical direction Z 19.

  In the present embodiment, the second retracting mechanism 17 is constituted by a scalar arm. A base portion of the second retracting mechanism 17 is coupled to the lifting body 8 so as to be rotatable around an axis along the vertical direction Z, and a second lifting mechanism 18 is coupled to the distal end portion of the second retracting mechanism 17. . The second retracting mechanism 17 moves the second holding part 16 along the retracting / extracting direction X by extending / contracting along the retracting / extracting direction X. The second elevating mechanism 18 includes a main body portion 18A fixed to the second retracting mechanism 17 and an elevating portion 18B supported by the main body portion 18A so as to be movable up and down and fixed to the second holding portion 16. . The second lifting mechanism 18 moves the second holding unit 16 along the vertical direction Z by moving the lifting unit 18B along the vertical direction Z with respect to the main body 18A. The second holding part 16 includes both the first class held part R1 provided on the upper part of the first class article K1 and the second class held part R2 provided on the upper side of the second class article K2. It is configured so that it can be held.

  The second holding unit 16 will be further described. The second holding unit 16 includes a pair of gripping claws 16 </ b> A that can move toward and away from each other along the horizontal direction. The second holding unit 16 is configured to be switchable between an approaching state in which the pair of gripping claws 16A are brought close to each other and a separated state in which the pair of gripping claws 16A are separated from each other. In the separated state, the distance between the pair of gripping claws 16A is wider than the width of the first held portion F1, the second held portion F2, and the third held portion F3. It is narrower than any width of the held part F1, the second held part F2, and the third held part F3. Therefore, the second holding part 16 includes a first held part F1 provided on the upper part of the first type article T1, a second held part F2 provided on the upper part of the second type article T2, and a third type. It is configured to be able to hold any of the third held portions F3 provided on the top of the article T3.

  The second transfer device 7 performs a transfer operation of transferring the first-type article K1 and the second-type article K2 between itself and the transfer target location 3. The second transfer device 7 is configured to perform a holding operation for holding the first-type article K1 or the second-type article K2 in addition to the withdrawal / retraction operation and the lifting / lowering operation as the transfer operation.

  The second transfer device 7 can be moved in and out by a second projecting operation in which the second holding mechanism 16 projects the second holding portion 16 from the second retracted position to the second projecting position. This is a second retraction operation in which the second holding portion 16 is retracted from the second protrusion position to the second retraction position. The lifting / lowering operation of the second transfer device 7 includes a second lifting operation in which the second lifting mechanism 18 lifts the second holding portion 16 to the lifting position, and the second lifting mechanism 18 lifts the second holding portion 16 to the rising position. A first-type descending operation for lowering the first holding unit 16 from the raised position to the second-type descending position by the second elevating mechanism 18; This is a third type lowering operation in which the second lifting mechanism 18 lowers the second holding portion 16 from the raised position to the third type lowering position. The holding operation of the second transfer device 7 is a separating operation for switching the second holding unit 16 from the approaching state to the separating state, and an approaching operation for switching the second holding unit 16 from the separating state to the approaching state.

When the second transfer device 7 transfers the first type article T1 from itself (the first transfer device 6) to the transfer target location 3, the second holding unit holds the first type item T1. From the state where 16 is in the raised position in the vertical direction Z and in the second retracted position in the exit / retreat direction X, the second projecting operation, the first type descending operation, the separating operation, the second raising operation, and the second retracting operation are performed. Do in order.
In addition, when the second transfer device 7 transfers the first type article T1 from the transfer target location 3 to itself (the first transfer device 6), the first type article T1, the second type article T2, From the state in which the second holding portion 16 that does not hold any of the third type articles T3 is in the raised position in the vertical direction Z and in the second retracted position in the withdrawing / retracting direction X, the second protruding operation, the first type For example, the lowering operation, the approaching operation, the second raising operation, and the second retreating operation are performed in this order.

When the second transfer device 7 transfers the second type article T2 from the self (first transfer device 6) to the transfer target location 3, the second holding unit holds the second type item T2. From the state where 16 is in the raised position in the vertical direction Z and in the second retracted position in the exit / retreat direction X, the second projecting operation, the second type descending operation, the separating operation, the second raising operation, and the second retracting operation are performed. Do in order.
When the second transfer device 7 transfers the second type article T2 from the transfer target location 3 to itself (the first transfer device 6), the first type item T1, the second type item T2, From the state in which the second holding portion 16 that does not hold any of the third type article T3 is in the raised position in the vertical direction Z and in the second retracted position in the retracting direction X, the second protruding operation, the second type For example, the lowering operation, the approaching operation, the second raising operation, and the second retreating operation are performed in this order.

When the second transfer device 7 transfers the third type article T3 from the self (first transfer device 6) to the transfer target location 3, the second holding unit holds the third type article T3. From the state where 16 is in the raised position in the vertical direction Z and in the second retracted position in the exit / retreat direction X, the second projecting operation, the third type descending operation, the separating operation, the second raising operation, and the second retracting operation are performed. Do in order.
In addition, when the second transfer device 7 transfers the third type article T3 from the transfer target location 3 to itself (the first transfer device 6), the first type article T1, the second type article T2, From the state in which the second holding part 16 holding no third type article T3 is in the raised position in the vertical direction Z and in the second retracted position in the withdrawal / retracting direction X, the second protruding operation, the third type For example, the lowering operation, the approaching operation, the second raising operation, and the second retreating operation are performed in this order.

The first transfer device 6 is configured to be able to execute a transfer operation between the self of the first type article and the transfer target portion in a shorter time than the second transfer device 7.
The time required for the first transfer device 6 to transfer the first-type article T1 from the self to the transfer target location 3 (the time required for the first protrusion operation, the first lowering operation, and the first retraction operation) is as follows. The time required for the second transfer device 7 to transfer the first type article T1 from the self to the transfer target location 3 (second protrusion operation, first type lowering operation, separation operation, second raising operation, Shorter than the time required for the second retirement operation).
Further, the time required for the first transfer device 6 to transfer the first type article T1 from the transfer target location 3 to itself (time required for the first protrusion operation, the first ascending operation, and the first retraction operation). Is the time required for the second transfer device 7 to transfer the first type article T1 from the transfer target location 3 (second protrusion operation, first type lowering operation, approaching operation, second rising) The time required for the operation and the second retirement operation) is short.

  Then, the second transfer device 7 rotates the second retracting mechanism 17 about the axis along the vertical direction Z, so that the second retracting mechanism 17 is retracted when the second retracting mechanism 17 is expanded and contracted. The backward direction X can be changed. As a result, the first type article T1, the second type article T2, and the third type article T3 can be transferred to and from the five transfer target locations 3 arranged around the periphery.

  The conveyor-type transport device 2 includes a first conveyor 21 and a second conveyor that transport only the first-type article T1 among the first-type article T1, the second-type article T2, and the third-type article T3 along the horizontal direction. 22 and the third conveyor 23 that conveys only the second-type article T2 and the third-type article T3 among the first-type article T1, the second-type article T2, and the third-type article T3 along the horizontal direction. And. A second conveyor 22 and a third conveyor 23 are installed above the first conveyor 21.

  As the first conveyor 21, a first conveyor 21 for carrying in the first type article T1 toward the transfer target location 3 and a first carry-out for carrying the first type article T1 from the transfer target location 3 are used. There is a conveyor 21. In the example shown in FIG. 11, the first conveyor 21 for loading and the first conveyor 21 for unloading are used as one set of first conveyors 21, and two sets of first conveyors 21 are installed at the same height.

  As the second conveyor 22, a second conveyor 22 for carrying in the first type article T <b> 1 toward the transfer target location 3, and a second for carrying out the first type article T <b> 1 from the transfer target location 3. And a conveyor 22. Further, as the third conveyor 23, a third conveyor 23 for carrying the second-type article T2 and the third-type article T3 toward the transfer target location 3, and the second-type article T2 from the transfer target location 3 And a third conveyor 23 for carrying out the third type article T3. In the example shown in FIG. 12, the second conveyor 22 for carry-in and the second conveyor 22 for carry-out are set as a pair of second conveyors 22, and the third conveyor 23 for carry-in and the third conveyor 23 for carry-out are used. As a set of third conveyors 23, a set of second conveyors 22 and a set of third conveyors 23 are installed at the same height.

  The installation height of the second conveyor 22 and the third conveyor 23 will be described. In the present embodiment, as shown in FIG. 13, the second conveyor 22 is transported by the third conveyor 23 at the height of the first held portion F <b> 1 of the first type article T <b> 1 transported by the second conveyor 22. It is installed so as to be the same as the height of the second held portion F2 of the second type article T2.

The first conveyor 21 and the second conveyor 22 transfer the first type article T1 between itself and the first conveyor 21 by the first transfer device 6, and the second conveyor 22 and the second conveyor 22 by themselves. The transfer of the first type article T1 to and from the conveyor 22 is arranged at an interval that can be executed simultaneously.
Moreover, the 1st conveyor 21 and the 3rd conveyor 23 transfer the 1st type article | item T1 between the self by the 1st transfer apparatus 6 and the 1st conveyor 21, and the self by the 2nd transfer apparatus 7. The second-type article T2 and the third-type article T3 are transferred to and from the third conveyor 23 at intervals that can be simultaneously executed.

  The second conveyor 22 moves along the horizontal direction and transports the first-class article K1 (first-class article T1), and one end of the movement path of the first-class carriage 27. A first-type inner support portion 28 installed against the first-type cart 27 and a first-type outer support portion (not shown) installed on the other end of the moving path of the first-type cart 27. ing. The first type inner support portion 28 is located at the transfer target location 3.

  The first-type article T1 is loaded and unloaded on the first-type inner support portion 28 by the lifting and lowering transfer device 1. Further, the first-type article T1 is loaded and unloaded on the first-type outer support section by the article transport vehicle 4 (see FIG. 1) that runs near the ceiling. Then, the first type article T1 is transported between the first type inner support portion 28 and the first type outer support portion 27 by the first type cart 27.

  The third conveyor 23 moves along the horizontal direction and transports the second type goods K2 (the second kind goods T2 and the third kind goods T3), and the second kind carriage 31 The second type inner support 32 and the third type inner support 33 installed at one end of the moving path, and the second type installed at the other end of the moving path of the second type cart 31. A second type outer support (not shown) and a third type outer support (not shown). The second type inner support part 32 and the third type inner support part 33 are located in the transfer target location 3.

The second-type article T2 is loaded and unloaded on the second-type inner support portion 32 by the lift-type transport device 1, and the lift-type transport device 1 on the third-type inner support portion 33. Thus, the loading and unloading of the third type article T3 is performed. The second type article T2 is loaded and unloaded by the article transport vehicle 4 (see FIG. 1) with respect to the second type outer support part, and the article transport vehicle with respect to the third type outer support part. 4, the third-type article T3 is loaded and unloaded. The second type cart 31 transports the second-type article T2 between the second-type inner support portion 32 and the second-type outer support portion 32, and the third-type inner support portion 33 and the second-type inner support portion 33. The third-type article T3 is transported between the third-type outer support portions.
In addition, since the 1st conveyor 21 is comprised similarly to the 2nd conveyor 22, description is abbreviate | omitted.

  Further, as shown in FIG. 1, the conveyor-type transport device 2 transports only the first-type article T1 among the first-type article T1, the second-type article T2, and the third-type article T3 along the horizontal direction. The fourth conveyor 24 and the second-type article T2 and the third-type article T3 among the first-type article T1, the second-type article T2, and the third-type article T3 are conveyed along the horizontal direction. And a fifth conveyor 25.

  The fourth conveyor 24 and the fifth conveyor 25 are installed near the lower floor with respect to the first conveyor 21, the second conveyor 22, and the third conveyor 23. One end of each of the fourth conveyor 24 and the fifth conveyor 25 is located at the transfer target location 3. Then, the operator loads and unloads the first-type article T1 on the other end of the fourth conveyor 24, and the operator places the second end on the other end of the fifth conveyor 25. The seed article T2 or the third kind article T3 is loaded and unloaded.

  As shown in FIG. 14, the first control unit H <b> 1 that controls the operation of the elevating transport device 1 based on a command from the host controller H, and the operation of the conveyor transport device 2 based on a command from the host controller H And a second control unit H2 to be controlled. The first control unit H <b> 1 corresponds to a control unit that controls operations of the first transfer device 6, the second transfer device 7, and the elevating body 8.

  The first transfer device 6 includes a first load sensor S1, an ascending sensor S2, and a descending sensor S3. The second transfer device 7 includes a second load sensor S4, a third load sensor S5, a first fixed position sensor S6, and a second fixed position sensor S7. The second in-stock sensor S4 corresponds to a first sensor for detecting the first type article T1, and the third in-stock sensor S5 detects the second type article T2 and the third type article T3. This corresponds to the second sensor.

  As shown in FIGS. 3 and 4, the first load sensor S <b> 1 is installed so as to project detection light toward a region where the first type article T <b> 1 placed on the first holding unit 11 is present. Has been. The first control unit H1 determines whether or not the first holding unit 11 holds the first type article T1 based on the detection information of the first stock sensor S1.

  The lift sensor S2 is located at a height corresponding to the first conveyor 21 and the first conveyor 11 is in the swivel position corresponding to the first conveyor 21 while the first holding unit 11 is at the lift position. 21 is installed so as to project the detection light toward the first detection target A1 installed in 21. The first control unit H1 determines whether or not the first holding unit 11 is in a suitable lift position with respect to the transfer target location 3 based on the detection information of the lift sensor S2. In addition, the 1st to-be-detected body A1 is installed also in the 2nd conveyor 22 similarly to the 1st conveyor 21. FIG.

  The lowering sensor S3 is located at a height corresponding to the first conveyor 21 and the first holding unit 11 is in the lowering position and the swiveling position corresponding to the first conveyor 21. 21 is installed so as to project the detection light toward the first detection target A1 installed in 21. The first control unit H1 determines whether or not the first holding unit 11 is at a suitable lowered position with respect to the transfer target location 3 based on the detection information of the lowering sensor S3.

  As shown in FIGS. 5 to 10, the second load sensor S <b> 4 is a height at which the first type article T <b> 1 held by the second transfer device 7 is present and the second transfer device 7 holds the second load sensor S <b> 4. The seed article T2 and the third kind article T3 are installed at a height that does not exist. The second in-stock sensor S4 is a region where the first type article T1 held by the second holding unit 16 is present and the second type article T2 or third type held by the second holding unit 16. It is installed so as to project detection light toward an area where the article T3 does not exist. The first control unit H1 determines whether or not the second holding unit 16 holds the first type article T1 based on the detection information of the second stock sensor S4.

  The third load sensor S5 is installed at a height at which the second type article T2 held by the second transfer device 7 is present and at a height at which the third type article T3 held by the second transfer device 7 is present. Has been. The third in-stock sensor S5 is an area where the second type article T2 held by the second holding part 16 is present and an area where the third type article T3 held by the second holding part 16 is present. It is installed to project detection light toward In the present embodiment, the third in-stock sensor S5 is configured by a distance sensor, and is configured to measure the distance to the article held by the second holding unit 16. The first control unit H1 determines whether or not the second holding unit 16 is holding the second type article T2 based on the detection information of the third in-stock sensor S5, and the second holding unit 16 is the first one. It is determined whether or not the three types of articles T3 are held.

  The first fixed position sensor S <b> 6 is installed in the second conveyor 22 in a state where the lifting body 8 is located at a height corresponding to the second conveyor 22 and is in a turning position corresponding to the second conveyor 22. 2 It is installed so as to project detection light toward the detection target A2. The first control unit H1 determines whether or not the second holding unit 16 is in a suitable position with respect to the second conveyor 22 based on the detection information of the first fixed position sensor S6. In addition, the 2nd to-be-detected body A2 is installed similarly to the 2nd conveyor 22 with respect to the 1st conveyor 21. FIG.

  The second fixed position sensor S <b> 7 is installed on the third conveyor 23 in a state where the elevating body 8 is located at a height corresponding to the third conveyor 23 and is in a turning position corresponding to the third conveyor 23. 3 It is installed so as to project detection light toward the detection target A3. The first control unit H1 determines whether or not the second holding unit 16 is in a suitable position with respect to the third conveyor 23 based on the detection information of the second fixed position sensor S7.

  As shown in FIG. 13, the third conveyor 23 includes a determination device 35 that determines whether the article being conveyed is the second-type article T2 or the third-type article T3. The discriminating device 35 includes a fourth stock sensor S8, a fifth stock sensor S9, and a second control unit H2. The fourth cargo sensor S8 is installed so as to project detection light toward a region where the second type article T2 placed on the second type inner support 32 is present. The fifth in-stock sensor S9 is installed so as to project detection light toward an area where the third type article T3 placed on the third type inner support 33 is present. Whether or not the second type inner support portion 32 supports the second type article T2 based on the detection information of the fourth presence sensor S8 and the detection information of the fifth presence sensor S9. As well as whether or not the third type inner support portion 33 supports the third type article T3.

  The first control unit H <b> 1 executes lifting control for lifting the lifting body 8 to a position corresponding to the transfer target location 3 and transfer control for transferring an article between the transfer target location 3. As the transfer control, the first control unit H1 transfers the first type article T1 from the first conveyor 21 to the first transfer device 6, and transfers the first type T1 from the second conveyor 22 to the second transfer device 7. Transfer control for transferring the first-type article T1, transfer control for transferring the second-type article T2 from the third conveyor 23 to the second transfer apparatus 7, and transfer from the third conveyor 23 to the second transfer apparatus 7. Transfer control for transferring the third type article T3 and transfer control for transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 are executed. Furthermore, the 1st control part H1 is the transfer control which transfers 1st type articles | goods T1 from the 1st transfer apparatus 6 to the 1st conveyor 21, and the 2nd conveyor 22 from the 2nd transfer apparatus 7 as transfer control. The transfer control for transferring the first type article T1 to the second transfer apparatus 7, the transfer control for transferring the second type article T2 from the second transfer apparatus 7 to the third conveyor 23, and the third conveyor 23 from the second transfer apparatus 7 to the third conveyor 23. The transfer control for transferring the third type article T3 to the second conveyor 22 and the transfer control for transferring the first type article T1 from the first transfer device 6 to the second conveyor 22 are executed.

  That is, for example, when the first type article T1 is supported by the first type inner support 28 of the first conveyor 21 and the second type article T2 is supported by the second transfer device 7, first, 1 control part H1 performs the raising / lowering control which raises / lowers the raising / lowering body 8 so that the 1st transfer apparatus 6 may move to the position corresponding to the 1st conveyor 21. FIG. Thus, by performing the lifting control in this way, the first transfer device 6 moves to a position corresponding to the first conveyor 21, and the second transfer device 7 moves to a position corresponding to the second conveyor 22. To do. The first control unit H1 transfers the first type article T1 from the first conveyor 21 to the first transfer device 6, and transfers the second type from the second transfer device 7 to the third conveyor 23. Transfer control for transferring the article T2 is executed simultaneously.

  Further, for example, the first type article T1 is supported by the first type inner support part 28 of the second conveyor 22, and the first type article T1 is supported by the first type inner support part 28 of the first conveyor 21. If both the first transfer device 6 and the second transfer device 7 do not hold the article, the first type article T1 supported by the first type inner support portion 28 of the second conveyor 22 is used. Only need to be transferred. In such a case, the first type article T1 can be transferred by either the first transfer device 6 or the second transfer device 7. That is, transfer control for transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 and transfer for transferring the first type article T1 from the second conveyor 22 to the second transfer device 7. Both the loading control and the loading control can be executed. In such a case, the 1st control part H1 performs the raising / lowering control which raises / lowers the raising / lowering body 8 so that the 1st transfer apparatus 6 may move to the position corresponding to the 2nd conveyor 22. FIG. Thereafter, transfer control for transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 is executed. In this way, the transfer control for transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 and the first type article T1 from the second conveyor 22 to the second transfer device 7 are transferred. In the case where both the transfer control and the transfer control that can be executed are possible, the first control unit H1 preferentially executes the transfer control for transferring the first type article T1 from the second conveyor 22 to the first transfer device 6. To do.

  The transfer control for transferring the first type article T1 from the first conveyor 21 or the second conveyor 22 to the first transfer device 6 corresponds to the first transfer control. The transfer control for transferring the second type article T2 from the third conveyor 23 to the second transfer device 7 corresponds to the second transfer control. Further, the transfer control for transferring the first-type article T1 from the second conveyor 22 to the second transfer device 7 corresponds to the third transfer control.

2. Other Embodiments Next, other embodiments of the article conveyance device and the article conveyance facility will be described.

(1) In the above embodiment, the first class article K1 is FOUP and FOSB, and the second class article K2 is an EUV container and a reticle container. However, the first class article K1 and the second class article K2 are appropriately changed. May be. For example, the first type article K1 may be either FOUP or FOSB, and the second type article K2 may be any one of a reticle container and an EUV container. Also, the first type article K1 may be a reticle container and the second type article K2 may be an EUV container. Further, the first-class article K1 and the second-class article K2 are not limited to these articles conveyed by the semiconductor manufacturing facility, and may be containers such as containers and pallets, and various products themselves. It may be.

(2) In the above embodiment, the first type article K1 is FOUP and FOSB as a container for containing a semiconductor wafer, the second type article K2 is an EUV container and a reticle container, and a photomask is contained as a container. The case where the usage of the contents is different between the category item K1 and the second category item K2 has been described as an example. However, the present invention is not limited to this. For example, the first class article K1 and the second class are such that the first class article K1 is a container that accommodates a 350 mm wafer and the second class article K2 is a container that accommodates a 450 mm wafer. The use of the contents may be the same for the article K2.

(3) In the above embodiment, the first control unit H1 preferentially executes the first transfer control when both the first transfer control and the third transfer control can be executed. 3 Transfer control may be executed preferentially.

(4) In the above embodiment, the first elevating mechanism 13 has been described as an example in which the first holding mechanism 11 is moved along the vertical direction Z with respect to the first retracting mechanism 12. The 1st raising / lowering mechanism 13 moves the 1st holding | maintenance part 11 along the up-down direction Z by the 1st raising / lowering mechanism 13 moving along the up-down direction Z with respect to the raising / lowering body 8 not only in this way. It may be. Similarly, the second lifting mechanism 18 moves the second holding part 16 along the vertical direction Z by moving the second retracting mechanism 17 along the vertical direction Z with respect to the lifting body 8. It may be a configuration.

(5) In the above embodiment, the first transfer device 6 is configured to perform the withdrawal / retraction operation and the lifting / lowering operation as the transfer operation, and the second transfer device 7 is configured to perform the withdrawal / retraction operation as the transfer operation. The case where the moving operation is different between the first transfer device 6 and the second transfer device 7 has been described as an example, but the first transfer device is not limited to this. The transfer operation may be the same between the device 6 and the second transfer device 7. For example, both the first transfer device 6 and the second transfer device 7 may be configured to perform an exit / retreat operation and a lifting / lowering operation as the transfer operation. In this case, for example, one of the first retracting mechanism 12 and the second retracting mechanism 17 may be configured with a scalar arm, and the other may be configured with a slide fork. Even in this case, the first transfer device 6 can perform the transfer operation in a shorter time than the second transfer device 7 due to the difference in the transfer operation between the scalar arm and the slide fork. Good.

(6) In the above embodiment, the second transfer device 7 detects the second in-stock sensor S4 for detecting the first type article T1, and the second type article T2 and the third type article T3. Although it was set as the structure provided with 3rd in-stock sensor S5, you may change the position and number of a sensor with which the 2nd transfer apparatus 7 is provided suitably. That is, a sensor is provided at a height at which the first-type article T1, the second-type article T2, and the third-type article T3 exist, and the first-type article T1, the second-type article T2, and the third-type are provided by one sensor. It is good also as composition which detects seed article T3, and installs a sensor individually to each of 1st kind article T1, 2nd kind article T2, and 3rd kind article T3, and 1st kind article T1 by three sensors. The second type article T2 and the third type article T3 may be detected.

(7) Note that the configurations disclosed in the above-described embodiments can be applied in combination with the configurations disclosed in other embodiments as long as no contradiction arises. Regarding other configurations, the embodiments disclosed herein are merely examples in all respects. Accordingly, various modifications can be made as appropriate without departing from the spirit of the present disclosure.

3. Outline of the above-described embodiment Hereinafter, an outline of the article conveyance device and the article conveyance facility described above will be described.

The article conveying device includes a first transfer device, a second transfer device installed at a position above the first transfer device and overlapping with the first transfer device when viewed in the vertical direction along the vertical direction, An elevating body that supports the first transfer device and the second transfer device and moves along the vertical direction,
A first type article and a second type article different in type from the first type article are objects to be transported, and the transport amount of the first class article is larger than the transport amount of the second class article. The first transfer device is configured to be able to transfer only the first-class article of the first-class article and the second-class article between itself and the transfer target portion, and the second transfer apparatus The apparatus is configured to be able to transfer both the first-class article and the second-class article between itself and the transfer target location, and the first transfer apparatus is configured to be the self of the first-class article. And a transfer operation between the transfer target portion and the second transfer device can be executed in a shorter time than the second transfer device.

According to this configuration, the first transfer device cannot hold the second type article, but the article transfer operation is relatively fast. On the other hand, the second transfer device can hold both the first-type article and the second-type article, although the transfer operation of the article is relatively slow.
That is, the second type article having a relatively small conveyance amount is conveyed using the second transfer device having a relatively slow transfer operation, and the first type article having a relatively large conveyance amount is relatively transferred. Since it can convey using both the quick 1st transfer apparatus and 2nd transfer apparatus, the fall of conveyance efficiency can be suppressed.

  Here, the first transfer device includes, as the transfer operation, an exit / retreat operation that protrudes and retracts along a direction connecting the lifting body and the transfer target portion, and an elevating operation that moves up and down along the vertical direction. The second transfer device holds the first-type article or the second-type article in addition to the withdrawal / retraction operation and the lifting / lowering operation as the transfer operation. It is preferable that the holding operation is performed.

  According to this configuration, the first transfer device transfers the first type article between itself and the transfer target location by the withdrawal operation and the lifting operation, but the second transfer device The first-type article and the second-type article are transferred between the self and the transfer target portion by the operation, the lifting operation, and the holding operation. As described above, since the first transfer device has fewer steps of the transfer operation than the second transfer device, the first transfer device is configured to have a faster transfer operation than the second transfer device. easy. On the other hand, since the second transfer device is configured to hold the article by the holding operation, the second transfer apparatus can easily be configured to support transfer of different types of articles.

  The first transfer device includes a first holding unit configured to hold the bottom surface of the first-type article from below, and the second transfer device includes the first-type article. A second holding part configured to hold both the first type holding part provided on the upper part of the second type holding part provided on the upper part of the second type article. It is preferable that

  According to this configuration, the first holding unit of the first transfer device is disposed below the first type article held by the first transfer device, and the second holding unit of the second transfer device is arranged. Can be arranged above the first-type article or the second-type article held in the second transfer device. Therefore, in the configuration in which the second transfer device is arranged above the first transfer device as described above, the first holding unit and the second holding unit can be arranged apart from each other in the vertical direction, and the article is interposed between them. A space for holding can be formed. Therefore, the vertical interval between the article held by the first transfer device and the article held by the second transfer device can be reduced. Therefore, the vertical interval between the transfer target portion of the first transfer device and the transfer target portion of the second transfer device can be narrowed, and the space of the transfer target portion can be easily saved.

  Further, the first type article has a size in the vertical direction larger than that of the second type article, and the second transfer device includes a first sensor for detecting the first type article, and the second sensor. A second sensor for detecting a similar article, wherein the first sensor is at a height at which the first classified article held by the second transfer device is present and held by the second transfer device. It is preferable that the second-type article is installed at a height where the second-type article does not exist, and the second sensor is installed at a height where the second-type article held by the second transfer device exists.

  According to this configuration, when the second transfer device holds the first type article, the first sensor and the second sensor detect the article. On the other hand, when the second transfer device holds a second type article, the first sensor detects the article, and the second sensor does not detect the article. Therefore, according to this configuration, it is possible to appropriately detect whether the article held by the second transfer device is the first type article or the second type article.

  Further, the first transfer device has a first holding portion for holding the first type article protruding from the first retraction position and the first retraction position to the side where the transfer target portion exists. And a first lifting mechanism for moving the first holding portion in the up and down direction with respect to the first retracting mechanism, and the second transfer device. Makes the second holding part capable of holding both the first type article and the second type article project from the second retraction position and the second retraction position to the side where the transfer target location exists. And a second elevating mechanism for moving the second holding portion in the vertical direction relative to the second egress / retreat mechanism. is there.

  According to this configuration, the first elevating mechanism moves only the first holding unit out of the first egress / retreat mechanism and the first holding unit. Compared with the case where it raises / lowers, since the weight of the object raised / lowered by a 1st raising / lowering mechanism can be made light, size reduction and weight reduction of a 1st raising / lowering mechanism can be achieved. Similarly, the second lifting mechanism can also reduce the weight of the object to be lifted and lowered by the second lifting mechanism, so that the second lifting mechanism can be reduced in size and weight.

  The first type article is a wafer container for storing a semiconductor wafer, and the second type article is at least one of an EUV container for storing an EUV mask and a reticle container for storing a reticle. It is preferable.

  According to this configuration, in a semiconductor manufacturing facility, a wafer container having a relatively large conveyance amount and an EUV container or a reticle container having a relatively small conveyance amount are appropriately controlled while suppressing a decrease in conveyance efficiency. Can be transported.

  The first transfer device, the second transfer device, and a control unit that controls the operation of the lifting body are further provided, and the control unit moves from the transfer target location to the first transfer device. From the first transfer control for transferring the first type article, the second transfer control for transferring the second type article from the transfer target location to the second transfer device, and the transfer target location. When the third transfer control for transferring the first-type article to the second transfer device is executed and both the first transfer control and the third transfer control are executable The first transfer control is preferably executed with priority.

  According to this configuration, when both the first transfer control and the third transfer control can be executed, the first transfer control is preferentially executed. As described above, the first transfer device can execute the transfer operation in a shorter time than the second transfer device. Therefore, according to this configuration, it is possible to more efficiently carry the first type article.

The article conveying facility includes an article conveying device and a conveyor type conveying device,
The second-type article includes a second-type article and a third-type article having different external dimensions, and the first-type article has external dimensions that are the same as both the second-type article and the third-type article. Are different first type articles, and the conveyor-type transfer device conveys only the first type articles among the first type articles, the second type articles, and the third type articles along the horizontal direction. Of the first and second conveyors, and the first-type article, the second-type article, and the third-type article, only the second-type article and the third-type article are aligned along the horizontal direction. A second conveyor, and the second conveyor and the third conveyor are installed above the first conveyor, the first conveyor and the second conveyor being the first transfer Transfer of the first type article between itself and the first conveyor by an apparatus; The transfer of the first type article between itself and the second conveyor by the second transfer device is arranged at an interval that can be performed simultaneously, and the first conveyor and the third conveyor are The transfer of the first type article between itself and the first conveyor by the first transfer device, the second type article between the self and the third conveyor by the second transfer device, and the The transfer of the third type article is arranged at an interval that can be executed simultaneously.

According to this configuration, the transfer of the first type article between the first transfer device and the first conveyor, and the first transfer between the self and the second conveyor of the second transfer device. The transfer of goods can be executed simultaneously. Also, the first type article is transferred between the first transfer apparatus and the first conveyor, and the second type article and the third type are transferred between the second transfer apparatus and the third conveyor. The transfer of goods can be executed simultaneously.
That is, regardless of whether the second transfer device holds the first type article, the second type article, or the third type article, the transfer by the first transfer apparatus and the transfer by the second transfer apparatus. Can be executed simultaneously. And when not holding 2nd type articles | goods and 3rd type articles | goods with a comparatively small conveyance amount in a 2nd transfer apparatus, hold | maintain a 1st type | mold article with a comparatively large conveyance amount in this 2nd transfer apparatus. Therefore, the conveyance efficiency of the article can be increased.
Therefore, according to this configuration, it is possible to improve the conveyance efficiency of the articles while collectively conveying different types of articles.

  The technology according to the present disclosure can be used for an article conveying device including a first transfer device, a second transfer device, and a lifting body.

1: Elevating transfer device (article transfer device)
2: Conveyor type transfer device 3: Transfer target location 6: First transfer device 7: Second transfer device 8: Lifting body 11: First holding unit 12: First retracting mechanism 13: First lifting mechanism 16 : Second holding unit 17: second retracting mechanism 18: second elevating mechanism 21: first conveyor 22: second conveyor 23: third conveyor H: control unit K1: first class article K2: second class article R1 : First class held portion R2: Second class held portion S4: Second load sensor (first sensor)
S5: Third stock sensor (second sensor)
T1: Type 1 article T2: Type 2 article T3: Type 3 article Z: Vertical direction

Claims (8)

A first transfer device;
A second transfer device installed at a position above the first transfer device and overlapping the first transfer device as viewed in the vertical direction along the vertical direction;
A lifting and lowering body that supports the first transfer device and the second transfer device and moves along the vertical direction,
The first class article and the second class article different in kind from the first class article are objects to be transported, and the transport amount of the first class article is larger than the transport amount of the second class article,
The first transfer device is configured to be able to transfer only the first-type article of the first-type article and the second-type article between itself and the transfer target location,
The second transfer device is configured to be able to transfer both the first-type article and the second-type article between itself and the transfer target location,
The first transfer device is configured to be able to execute a transfer operation between the self of the first type article and the transfer target portion in a shorter time than the second transfer device. Article conveying device. The first transfer device includes, as the transfer operation, an exit / retreat operation that protrudes and retracts along a direction connecting the lifting body and the transfer target location, and a lift operation that moves up and down along the vertical direction, Configured to do
The second transfer device is configured to perform a holding operation for holding the first-type article or the second-type article in addition to the withdrawal / retraction operation and the lifting / lowering operation as the transfer operation. The article conveying apparatus according to claim 1. The first transfer device includes a first holding unit configured to hold a bottom surface of the first-type article by supporting it from below,
The second transfer device holds both the first class held portion provided on the upper part of the first type article and the second type held part provided on the upper side of the second type article. The article conveying apparatus according to claim 1, further comprising a second holding unit configured to be able to do so. The first type article has a larger size in the vertical direction than the second type article,
The second transfer device includes a first sensor for detecting the first type article, and a second sensor for detecting the second type article,
The first sensor is installed at a height at which the first type article held by the second transfer device is present and at a height at which the second type article held by the second transfer device is not present,
The said 2nd sensor is an article conveyance apparatus as described in any one of Claim 1 to 3 installed in the height in which the said 2nd kind article | item hold | maintained by the said 2nd transfer apparatus exists. The first transfer device has a first protrusion in which a first holding portion for holding the first type article is protruded to a side where the transfer target portion exists with respect to a first retraction position and the first retraction position. And a first elevating mechanism for moving the first holding portion in the vertical direction with respect to the first egress / retreat mechanism,
The second transfer device has a second holding unit capable of holding both the first-type article and the second-type article with respect to the second retraction position and the second retraction position. A second retracting mechanism that moves to a second projecting position that projects to an existing side; and a second lifting mechanism that moves the second holding portion in the up-down direction with respect to the second retracting mechanism. The article conveyance device according to any one of claims 1 to 4, which is provided. The first type article is a wafer container for storing a semiconductor wafer,
6. The article conveying apparatus according to claim 1, wherein the second-type article is at least one of an EUV container that houses an EUV mask and a reticle container that houses a reticle. 6. A control unit for controlling operations of the first transfer device, the second transfer device, and the lifting body;
The control unit includes: a first transfer control for transferring the first type article from the transfer target location to the first transfer device; and the second transfer device from the transfer target location to the second transfer device. A second transfer control for transferring a similar article, and a third transfer control for transferring the first category article from the transfer target location to the second transfer device, and the first transfer control. The article conveying apparatus according to any one of claims 1 to 6, wherein when both transfer control and the third transfer control are executable, the first transfer control is preferentially executed. An article conveying facility comprising the article conveying apparatus according to any one of claims 1 to 7 and a conveyor type conveying apparatus,
The second-type article includes a second-type article and a third-type article having different external dimensions,
The first type article is a first type article having an outer dimension different from both the second type article and the third type article,
The conveyor-type transport device includes a first conveyor and a second conveyor that transport only the first-type article among the first-type article, the second-type article, and the third-type article along a horizontal direction; A third conveyor that conveys only the second-type article and the third-type article among the first-type article, the second-type article, and the third-type article in a horizontal direction; Prepared,
The second conveyor and the third conveyor are installed above the first conveyor,
The first conveyor and the second conveyor are the transfer of the first-type article between the first transfer device and the first conveyor, the second transfer device and the first transfer device. The transfer of the first-type article between two conveyors is arranged at an interval that can be performed simultaneously,
The first conveyor and the third conveyor are the transfer of the first-type article between the first transfer device and the first conveyor, the second transfer device and the first transfer device. Article transportation equipment arranged at intervals capable of simultaneously executing the second-type article and the transfer of the third-type article between three conveyors.

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