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JP2019155346A - Ultrasonic oscillation circuit - Google Patents

Ultrasonic oscillation circuit Download PDF

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JP2019155346A
JP2019155346A JP2018060799A JP2018060799A JP2019155346A JP 2019155346 A JP2019155346 A JP 2019155346A JP 2018060799 A JP2018060799 A JP 2018060799A JP 2018060799 A JP2018060799 A JP 2018060799A JP 2019155346 A JP2019155346 A JP 2019155346A
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tool
voltage
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ultrasonic
microcomputer
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JP2019155346A5 (en
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大西　一正
Kazumasa Onishi
一正 大西
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UWAVE KK
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Abstract

To provide the phenomenon that an oscillation change amount is almost constant even when driving at a frequency optimum to an ultrasonic transducer and to a tool connected with the ultrasonic transducer and when a tool length changes.SOLUTION: A commercial power source (100 V AC) is connected with a rectification circuit and connected with a DC-DC converter. The DC-DC converter captures a phase of current and voltage of a wiring which connects a transformer with the rectification circuit in a phase comparison circuit 2 under conditions of center frequency, tracking range, current value and drill length established in a microcomputer 3 and inputs frequencies of the same phase through a gate drive circuit. A signal is inputted into the DC-DC converter through the gate drive circuit so as to have a current value set at the frequency. The output voltage of an inverter is shaped into a sine wave voltage by a matching circuit constituted of the inductor and capacitors of the primary side transformer and shaped into output voltage by the secondary side transformer to be impressed onto a piezoelectric transducer.SELECTED DRAWING: Figure 1

Description

本発明は、超音波振動子および超音波振動子と接続した工具などに最適な共振周波数と所望の超音波振動変位量で駆動する超音波発振回路に関する。  The present invention relates to an ultrasonic oscillation circuit that is driven at an optimum resonance frequency and a desired ultrasonic vibration displacement amount for an ultrasonic vibrator and a tool connected to the ultrasonic vibrator.

従来より超音波発振回路は、超音波振動子および超音波振動子と接続した工具などに最適な共振周波数で駆動するものであった。  Conventionally, an ultrasonic oscillation circuit is driven at an optimum resonance frequency for an ultrasonic vibrator and a tool connected to the ultrasonic vibrator.

しかしながら、特許文献１に記載の超音波発振回路では、超音波振動子および超音波振動子と接続した工具などに最適な共振周波数で駆動するだけで、例えば工具先端の工具軸方向の振動変位量に対しては、調整をする手段がないため、工具長さが変化すると振動変位量が大きく変化してしまうという問題がある。  However, in the ultrasonic oscillation circuit described in Patent Document 1, for example, the vibration displacement amount of the tool tip in the tool axis direction can be obtained only by driving the ultrasonic vibrator and a tool connected to the ultrasonic vibrator at an optimum resonance frequency. On the other hand, since there is no means for adjusting, there is a problem that the amount of vibration displacement greatly changes when the tool length changes.

特開２００６−２０５１０２JP 2006-205102 A 特開２００７−５０４９３JP2007-50493

従って本発明の目的は、超音波振動子および超音波振動子と接続した工具などに最適な共振周波数で駆動し、かつ工具長さが変化しても振動変位量の変化量を小さくするものである。  Accordingly, an object of the present invention is to drive at an optimum resonance frequency for an ultrasonic vibrator and a tool connected to the ultrasonic vibrator, and to reduce the amount of change in vibration displacement even if the tool length changes. is there.

本発明は、超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして超音波振動子に接続した工具の長さを複数設定し、それぞれの工具長さに対して駆動電圧または駆動電流を補正する係数を持つ機能を有するものである。  The present invention relates to an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, and incorporating a phase difference between current and voltage, a current value, and a voltage value into a microcomputer. , The microcomputer sets the drive frequency and drive voltage or drive current to the ultrasonic vibrator, sets the tracking range of the drive frequency, and sets the length of the tool connected to the ultrasonic vibrator, It has a function having a coefficient for correcting the drive voltage or drive current for each tool length.

本発明はまた、前記の工具の長さを計測器により測定し、この計測データを基にした係数をマイコンに入力するものである。  In the present invention, the length of the tool is measured by a measuring instrument, and a coefficient based on the measured data is input to a microcomputer.

本発明はまた、超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして工具の長さを機械加工装置に設置した計測器により測定し、これをマイコンに入力し、マイコン内で工具長さによる超音波振動子に印加する電圧値または電流値を設定するものである。  The present invention also relates to an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, in which a phase difference between current and voltage, a current value, and a voltage value are stored in a microcomputer. Capture and set the drive frequency and drive voltage or drive current to the ultrasonic transducer with a microcomputer, set the tracking range of the drive frequency, and measure the tool length with the measuring instrument installed in the machining device Then, this is input to the microcomputer, and the voltage value or the current value applied to the ultrasonic vibrator according to the tool length is set in the microcomputer.

本発明はまた、超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして超音波振動子に接続した工具の長さを複数設定し、それぞれの工具長さに対して振動変位量または振動速度を補正する係数を持つ機能を有するものである。  The present invention also relates to an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, in which a phase difference between current and voltage, a current value, and a voltage value are stored in a microcomputer. Capture and set the drive frequency and drive voltage or drive current to the ultrasonic transducer by the microcomputer, set the tracking range of the drive frequency, and set multiple lengths of tools connected to the ultrasonic transducer , It has a function having a coefficient for correcting the vibration displacement amount or the vibration speed for each tool length.

本発明はまた、前記の振動変位量または振動速度を計測器により測定し、これをマイコンに入力するものである。  In the present invention, the vibration displacement amount or the vibration speed is measured by a measuring instrument and input to a microcomputer.

本発明はまた、超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路１において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして工具の振動変位量または振動速度を機械加工装置に設置した計測器により測定し、前記振動変位量または振動速度が一定になるようにマイコンにより超音波振動子に印加する電圧値または電流値を設定する。  In the ultrasonic oscillation circuit 1 for tracking the resonance frequency of the vibration mode of an ultrasonic transducer or an ultrasonic transducer connected with a tool, the present invention also provides a phase difference between current and voltage, a current value, and a voltage value as a microcomputer. The drive frequency and drive voltage or drive current are set in the ultrasonic vibrator by a microcomputer, the tracking range of the drive frequency is set, and the vibration displacement amount or vibration speed of the tool is installed in the machining device. The voltage value or the current value to be applied to the ultrasonic vibrator is set by the microcomputer so that the vibration displacement amount or the vibration speed is constant.

本発明はまた、超音波発振回路の操作パネルに中心周波数、追尾範囲、電流値または電圧値そして工具長さを設定する入力装置を設置するものである。  The present invention also provides an input device for setting the center frequency, tracking range, current value or voltage value, and tool length on the operation panel of the ultrasonic oscillation circuit.

本発明の超音波発振回路を用いることにより、超音波振動子に接続した工具に工具軸方向の振動モードの共振周波数を自動で追尾すると共に工具の長さが変化しても工具の先端の振動変位量または振動速度をほぼ一定にできる。  By using the ultrasonic oscillator circuit of the present invention, the tool connected to the ultrasonic vibrator automatically tracks the resonance frequency of the vibration mode in the tool axis direction and vibrates at the tip of the tool even if the tool length changes. The displacement or vibration speed can be made almost constant.

本発明の超音波発振回路の構成を示すブロック図である。It is a block diagram which shows the structure of the ultrasonic oscillation circuit of this invention. 本発明の別の超音波発振回路の構成を示すブロック図である。It is a block diagram which shows the structure of another ultrasonic oscillation circuit of this invention. 超音波発振回路の操作パネルを説明する図である。It is a figure explaining the operation panel of an ultrasonic oscillation circuit.

（超音波発振回路のブロック図）
以下、本発明に関わる超音波発振回路１のブロック図１を用いて超音波振動子５と接続した工具に最適な共振周波数で駆動し、かつ工具の長さが変化しても工具先端に工具軸方向の所望の振動変位量を与えることができることについて説明する。(Block diagram of ultrasonic oscillation circuit)
Hereinafter, the tool is driven at the optimum resonance frequency for the tool connected to the ultrasonic vibrator 5 using the block diagram 1 of the ultrasonic oscillation circuit 1 according to the present invention, and the tool is attached to the tool tip even if the tool length changes. The fact that a desired amount of vibration displacement in the axial direction can be given will be described.

商用電源（１００Ｖ交流）は整流回路に接続し、そしてＤＣ−ＤＣコンバータに接続する。ＤＣ−ＤＣコンバータは、マイコン３に設置した中心周波数、追尾範囲、電流値そしてドリル長さの条件で、トランスと整合回路を接続する配線の電流と電圧の位相を位相比較回路２に取り込み、位相が同じである周波数を、ゲートドライブ回路を通してインバータに入力する。また、ＤＣ−ＤＣコンバータには、前記周波数において設定した電流値になるようにゲートドライブ回路を通してＤＣ−ＤＣコンバータに信号を入力する。  The commercial power supply (100V AC) is connected to the rectifier circuit and to the DC-DC converter. The DC-DC converter takes in the phase of the current and voltage of the wiring connecting the transformer and the matching circuit to the phase comparison circuit 2 under the conditions of the center frequency, tracking range, current value and drill length installed in the microcomputer 3. Are input to the inverter through the gate drive circuit. Further, a signal is input to the DC-DC converter through the gate drive circuit so that the current value set at the frequency is obtained.

ＤＣ−ＤＣコンバータは、インバータに接続され、さらに１次側トランスに配線で接続される。この配線に流れる電流をカレントトランスなどの電流センサにより測定し、マイコン３に入力する。また前記配線の電圧もマイコン３に入力する。さらに前記の電流と電圧の信号を位相比較回路２に入力し、位相差をマイコン３に入力し、マイコン３から位相差がゼロになる周波数を出力する。  The DC-DC converter is connected to the inverter and further connected to the primary transformer by wiring. The current flowing through the wiring is measured by a current sensor such as a current transformer and input to the microcomputer 3. The voltage of the wiring is also input to the microcomputer 3. Further, the current and voltage signals are input to the phase comparison circuit 2, the phase difference is input to the microcomputer 3, and the frequency at which the phase difference becomes zero is output from the microcomputer 3.

インバータの出力電圧は、１次側トランスのインダクタとコンデンサで構成した整合回路によりサイン波電圧にして、２次側トランスで出力電圧として圧電振動子に印加される。The output voltage of the inverter is converted to a sine wave voltage by a matching circuit composed of an inductor and a capacitor of the primary transformer, and is applied to the piezoelectric vibrator as an output voltage by the secondary transformer.

このようにして、本発明の超音波発振回路１は超音波振動子５と接続した工具に最適な共振周波数で駆動し、かつ工具長さが変化しても工具先端に工具軸方向の振動変位量をほぼ一定にすることができる。  In this way, the ultrasonic oscillation circuit 1 of the present invention is driven at the optimum resonance frequency for the tool connected to the ultrasonic vibrator 5, and the vibration displacement in the tool axis direction is applied to the tool tip even if the tool length changes. The amount can be made almost constant.

また、超音波発振回路１は様々あるが、図２の回路ブロック図で示す超音波発振回路１では、回路でサイン波電圧を発生できるので整合回路は必要ない。整合回路は、フィルタの特性を持つものであり、追尾範囲の周波数が限定されてしまうという問題点があった。  Further, although there are various ultrasonic oscillation circuits 1, the ultrasonic oscillation circuit 1 shown in the circuit block diagram of FIG. 2 can generate a sine wave voltage in the circuit, so that a matching circuit is not necessary. The matching circuit has a filter characteristic and has a problem that the frequency of the tracking range is limited.

（超音波発振回路の操作パネル）
前記超音波発振回路１を操作するための操作パネルについて、図３を用いて説明する。操作パネルの上側は、駆動周波数、電流値、電圧そして電力を表示する表示部で液晶またはＬＥＤなどを用いて表示する。(Operation panel of ultrasonic oscillation circuit)
An operation panel for operating the ultrasonic oscillation circuit 1 will be described with reference to FIG. The upper side of the operation panel is a display unit that displays the drive frequency, current value, voltage, and power, and displays them using liquid crystal or LEDs.

操作パネルの下側は、電源部と設定部であり、電源部は主電源のスイッチと超音波発振回路１のスイッチであり、超音波発振回路１をＯＮするときは、主電源スイッチそして超音波発振回路１のスイッチをＯＮする。  The lower side of the operation panel is a power supply unit and a setting unit, and the power supply unit is a switch of the main power supply and the switch of the ultrasonic oscillation circuit 1. When turning on the ultrasonic oscillation circuit 1, the main power switch and the ultrasonic wave Turn on the switch of the oscillation circuit 1.

電源部の右側に、工具を接続した超音波振動子５に所望の振動モードを励起するために先ず駆動周波数の中心値と、追尾範囲を、ロータリースイッチなどを用いて設定する。例えば駆動周波数の中心値を３０．００ＫＨｚ、そして追尾範囲を、駆動周波数の中心値を中心として２ＫＨｚと設定する。  In order to excite a desired vibration mode on the ultrasonic transducer 5 connected to the tool on the right side of the power supply unit, first, the center value of the drive frequency and the tracking range are set using a rotary switch or the like. For example, the center value of the driving frequency is set to 30.00 KHz, and the tracking range is set to 2 KHz centering on the center value of the driving frequency.

次に、電流値を同じくロータリースイッチなどを用いて設定する。例えば、電流値を１．５０Ａｐ−ｐと設定する。  Next, the current value is similarly set using a rotary switch or the like. For example, the current value is set to 1.50 Ap-p.

さらに、工具の長さを入力する。これは工具の長さと振動変位量との関係が表１に示すような関係があるため、工具長さに係数を与え、工具の長さが変化しても振動変位量をほぼ一定にする。なお、工具の長さはノギスを用いて測定した。  Furthermore, the length of the tool is input. Since the relationship between the tool length and the vibration displacement amount is as shown in Table 1, a coefficient is given to the tool length so that the vibration displacement amount becomes substantially constant even if the tool length changes. The length of the tool was measured using a caliper.

Figure 2019155346
Figure 2019155346

表１について詳しく説明する。先ず超硬製の棒で直径４ｍｍ、長さが３０ｍｍから８０ｍｍまで１０ｍｍ間隔で６個用意した。そして、コレットチャックを持つ超音波振動子５に超硬製の棒を、コレットナットを締付けることにより装着する。次にアンプとファンクションシンセサイザーにより縦１次振動モードの共振周波数付近でサイン波４０Ｖｐ−ｐの電圧を印加して電圧位相と電流位相の位相差がゼロになるように周波数を調整する。その周波数で超音波振動子５に流れる電流とレーザードップラー振動計により超硬製の棒の先端の中心部の振動変位量を測定し、その結果を表１にまとめた。  Table 1 will be described in detail. First, six carbide rods with a diameter of 4 mm and a length of 30 mm to 80 mm were prepared at 10 mm intervals. Then, a cemented carbide rod is attached to the ultrasonic vibrator 5 having a collet chuck by tightening a collet nut. Next, the voltage is adjusted so that the phase difference between the voltage phase and the current phase becomes zero by applying a voltage of a sine wave 40 Vp-p in the vicinity of the resonance frequency of the longitudinal primary vibration mode by the amplifier and the function synthesizer. The amount of vibration displacement at the center of the tip of the cemented carbide rod was measured with a current flowing through the ultrasonic transducer 5 at that frequency and a laser Doppler vibrometer, and the results are summarized in Table 1.

上記の表で棒が長くなるほど、駆動電流は減少し、棒の振動変位量は大きくなる。通常振動変位量を調整するために駆動電流値を調整しているが、棒の長さを変えると目的の振動変位量は得られない。  In the above table, the longer the rod, the smaller the drive current and the greater the amount of vibration displacement of the rod. Normally, the drive current value is adjusted to adjust the amount of vibration displacement, but if the length of the rod is changed, the desired amount of vibration displacement cannot be obtained.

そこで、棒のそれぞれの長さに、最適な電流値を設定する。例えば、表１のデータから目標とする振動変位量を３μｍｐ−ｐであるとすると長さ３０ｍｍの棒では、約４１６ｍＡｐ−ｐが必要であり、棒の長さが８０ｍｍでは、５６．４ｍＡｐ−ｐでよい。  Therefore, an optimal current value is set for each length of the bar. For example, if the target vibration displacement amount is 3 μmp-p from the data in Table 1, about 416 mAp-p is required for a 30 mm long bar, and 56.4 mAp-p for a 80 mm long bar. It's okay.

そこで、設定電流値を２００ｍＡｐ−ｐにすると、３０ｍｍ長さの棒では、係数を約２．０とし、８０ｍｍの棒では、係数を約０．２８とする。  Therefore, when the set current value is 200 mAp-p, the coefficient is about 2.0 for a 30 mm long bar, and the coefficient is about 0.28 for a 80 mm bar.

つまり電流設定機能と、係数を設定できる係数設定機能を複数持たせることでそれぞれの超硬製の棒の長さが変化しても振動変位量がほぼ同じになる電流値を設定することができる。  In other words, by providing a current setting function and a plurality of coefficient setting functions that can set a coefficient, it is possible to set a current value at which the vibration displacement amount is substantially the same even if the length of each cemented carbide rod changes. .

また、工具長さを測定する装置を、工具を使用する機械加工装置に有する場合には、工具長さを測定する装置が計測した工具長さデータを、マイコン３に入れ、マイコン３が工具長さに適する電流値を設定する。例えば工具長さを測定する装置としては日新産業株式会社製のツールセッターなどがある。  In addition, when the machining device using the tool has a device for measuring the tool length, the tool length data measured by the device for measuring the tool length is input to the microcomputer 3, and the microcomputer 3 Set an appropriate current value. For example, there is a tool setter manufactured by Nissin Sangyo Co., Ltd. as an apparatus for measuring the tool length.

また、工具の先端の振動変位量を測定するレーザードプッラー振動計により測定する場合には、それぞれの長さの棒の長さの振動変位量を測定し、目的となる振動変位量を持つことができるようになるように電圧設定機能または電流設定機能と、係数を設定できる係数設定機能を複数持たせることで、それぞれの超硬製の棒の長さにほぼ同じ振動変位量にさせることができる。Also, when measuring with a laser Doppler vibrometer that measures the amount of vibration displacement at the tip of the tool, measure the amount of vibration displacement for each length of rod and have the desired amount of vibration displacement. By providing multiple voltage setting functions or current setting functions and a coefficient setting function that can set the coefficient, the length of each carbide rod can be set to approximately the same amount of vibration displacement. it can.

また、工具の振動変位量を測定する装置を、工具を使用する機械加工装置に有する場合には、工具の振動変位量を測定する装置が計測した振動変位量データを、マイコン３に入れ、マイコン３が工具長さに適する電圧値または電流値を設定する。工具の振動変位量を測定する装置としては、特許文献２に詳しく記述してある。機械加工装置とは例えばマシニングセンター、フライス盤などがある。  Further, when the machining device using the tool has a device for measuring the vibration displacement amount of the tool, the vibration displacement amount data measured by the device for measuring the vibration displacement amount of the tool is put into the microcomputer 3 and the microcomputer 3 sets a voltage value or current value suitable for the tool length. An apparatus for measuring the amount of vibration displacement of a tool is described in detail in Patent Document 2. Examples of the machining apparatus include a machining center and a milling machine.

本発明の超音波発振回路により超音波振動子に装着した工具の長さが変化しても工具先端の振動変位量をほぼ一定にすることができる。Even if the length of the tool attached to the ultrasonic transducer is changed by the ultrasonic oscillation circuit of the present invention, the vibration displacement amount of the tool tip can be made substantially constant.

１ 超音波発振回路
２ 位相比較回路
３ マイコン
４ 出力トランス
５ 超音波振動子DESCRIPTION OF SYMBOLS 1 Ultrasonic oscillation circuit 2 Phase comparison circuit 3 Microcomputer 4 Output transformer 5 Ultrasonic vibrator

Claims (7)

超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして超音波振動子に接続した工具の長さを複数設定し、それぞれの工具長さに対して駆動電圧または駆動電流を補正する係数を持つ機能を有することを特徴とする。  In an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, the phase difference between current and voltage, the current value, and the voltage value are taken into the microcomputer and Sets the drive frequency and drive voltage or drive current to the ultrasonic transducer, sets the tracking range of the drive frequency, sets multiple lengths of tools connected to the ultrasonic transducer, and sets the tool length for each. And a function having a coefficient for correcting the driving voltage or the driving current. 前記の工具の長さを計測器により測定し、この計測データを基にした係数をマイコンに入力することを特徴とする請求項１に記載の超音波発振回路。  The ultrasonic oscillation circuit according to claim 1, wherein the length of the tool is measured by a measuring instrument, and a coefficient based on the measurement data is input to a microcomputer. 超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして工具の長さを機械加工装置に設置した計測器により測定し、これをマイコンに入力し、マイコン内で工具長さによる超音波振動子に印加する電圧値または電流値を設定することを特徴とする。  In an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, the phase difference between current and voltage, the current value, and the voltage value are taken into the microcomputer and The drive frequency and drive voltage or drive current are set in the sound wave vibrator, the tracking range of the drive frequency is set, the length of the tool is measured by a measuring instrument installed in the machining apparatus, and this is measured by a microcomputer. The voltage value or the current value to be applied to the ultrasonic vibrator according to the tool length is set in the microcomputer. 超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして超音波振動子に接続した工具の長さを複数設定し、それぞれの工具長さに対して振動変位量または振動速度を補正する係数を持つ機能を有することを特徴とする。  In an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, the phase difference between current and voltage, the current value, and the voltage value are taken into the microcomputer and Sets the drive frequency and drive voltage or drive current to the ultrasonic transducer, sets the tracking range of the drive frequency, sets multiple lengths of tools connected to the ultrasonic transducer, and sets the tool length for each. It has a function having a coefficient for correcting the vibration displacement amount or the vibration speed with respect to the height. 前記の振動変位量または振動速度を計測器により測定し、これをマイコンに入力する請求項４に記載の超音波発振回路。  The ultrasonic oscillation circuit according to claim 4, wherein the vibration displacement amount or vibration speed is measured by a measuring instrument and is input to a microcomputer. 超音波振動子または工具を接続した超音波振動子の振動モードの共振周波数を追尾するための超音波発振回路において、電流と電圧の位相差、電流値、電圧値をマイコンに取り込み、マイコンにより超音波振動子に駆動周波数と駆動電圧または駆動電流を設定するものであり、かつ駆動周波数の追尾範囲を設定し、そして工具の振動変位量または振動速度を機械加工装置に設置した計測器により測定し、前記振動変位量または振動速度が一定になるようにマイコンにより超音波振動子に印加する電圧値または電流値を設定することを特徴とする。  In an ultrasonic oscillation circuit for tracking the resonance frequency of the vibration mode of an ultrasonic vibrator or an ultrasonic vibrator connected with a tool, the phase difference between current and voltage, the current value, and the voltage value are taken into the microcomputer and The drive frequency and drive voltage or drive current are set in the sonic transducer, the tracking range of the drive frequency is set, and the vibration displacement or vibration speed of the tool is measured by a measuring instrument installed in the machining device. The voltage value or the current value applied to the ultrasonic transducer is set by a microcomputer so that the vibration displacement amount or the vibration speed is constant. 超音波発振回路の操作パネルに中心周波数、追尾範囲、電流値または電圧値そして工具長さを設定する入力装置を設置することを特徴とする。  An input device for setting a center frequency, a tracking range, a current value or a voltage value, and a tool length is installed on an operation panel of the ultrasonic oscillation circuit.
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